CN102313642A - High-precision focus detection device for long-focus lens - Google Patents

High-precision focus detection device for long-focus lens Download PDF

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CN102313642A
CN102313642A CN201110252061A CN201110252061A CN102313642A CN 102313642 A CN102313642 A CN 102313642A CN 201110252061 A CN201110252061 A CN 201110252061A CN 201110252061 A CN201110252061 A CN 201110252061A CN 102313642 A CN102313642 A CN 102313642A
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ronchi grating
long
focus lens
grating
focus
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CN102313642B (en
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金晓荣
张金春
白剑
侯昌伦
侯西云
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Zhejiang University ZJU
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Abstract

The invention discloses a high-precision focus detection device for a long-focus lens, which comprises a laser, a microscope objective, a pin hole, a first Ronchi grating, the long-focus lens to be detected, a second Ronchi grating, ground glass and a CCD (Charge Coupled Device) camera. Light emitted by the laser passes through the microscope objective and the pin hole to form a divergent beam and the divergent beam enters the first Ronchi grating and then passes through the long-focus lens to be detected and the second Ronchi grating; the second Ronchi grating is placed at a certain talbot-order position of the first Ronchi grating, so that Moire fringes can be formed on a talbot image of the first Ronchi grating and the second Ronchi grating; and the fringes are acquired by the CCD camera and the focus of the lens to be detected can be obtained by calculating angles of the fringes. The high-precision focus detection device has a simple structure, is easy to implement, has high precision, can be used for detecting the long-focus lens and accurately measuring the focus in an optical system and particularly can be used for accurately measuring the focus of the large-caliber long-focus lens (the focus is in the range of meters and dozens of meters), so that an error caused by the scanning detection is avoided.

Description

A kind of focal length pick-up unit of high precision long-focus lens
Technical field
The invention belongs to the optic test field, relate in particular to a kind of focal length pick-up unit of high precision long-focus lens.
Background technology
In fields such as optics, astronomy and military affairs, long-focus lens is very crucial basic components, bringing into play more and more important effect, and required focal length is more and more longer, and bore is also increasing.In large scale system, such as national portfire, long-focus lens is crucial collective optics, and the focal length of these lens reaches 40 meters.The use of long-focus lens needs the relevant detection technology; But still there are a lot of difficulties in the high Precision Detection measurement that particularly is accurate to several millimeters even hundreds of micron at present; For example spherometer can accurately measure 2 meters; Precision has ten thousand/, but along with the increase of focal length, utilize spherometer to detect with regard to indeterminacy.In addition, high-precision test receive external interference particularly the influence of air turbulence and external shock be difficult to eliminate, and the aberration of light path own also increases along with the measurement influence of the increase focusing position of focal length in the detection system, is difficult to realize high-acruracy survey.Therefore the high precision long-focus measuring method and the device that are easy to realize have very large application space and very important application.
Summary of the invention
The objective of the invention is deficiency, a kind of focal length pick-up unit of high precision long-focus lens is provided to prior art.
The focal length pick-up unit of high precision long-focus lens comprises laser instrument, microcobjective, pin hole, first Ronchi grating, long-focus lens to be measured, second Ronchi grating, frosted glass, CCD camera; The light that laser instrument sends forms divergent beams behind microcobjective and pin hole; Incide on first Ronchi grating; Again through the long-focus lens to be measured and second Ronchi grating; The Taibo picture of first Ronchi grating and second Ronchi grating then can form Moire fringe so, gather striped with the CCD camera, calculate the focal length that the Moire fringe angle just can obtain lens to be measured.
The periodicity linear gratings of said first Ronchi grating and the second Ronchi grating even structure, the cycle is 350~500 microns.Described second Ronchi grating is placed on the talbot distance d of first Ronchi grating; Wherein
Figure 889538DEST_PATH_IMAGE001
; is positive integer; is the grating cycle of first Ronchi grating, and is the light wavelength that laser instrument sends.Said second Ronchi grating and frosted glass all are placed on the guide rail that can move along optical axis direction, guide precision 0.1mm.
The invention has the beneficial effects as follows:
1. the present invention directly detects dispersing in the light path of aperture outgoing, need not to obtain the heavy caliber light beam as the collimator and extender that carries out multilayer in a lot of other detection systems, and simple in structure being easy to realized.Utilize Tabo effect and Moire fringe technology, the technology of this diffractometry has higher precision than existing interferometry, can realize the high-acruracy survey of long-focus lens and optical system focal length
2. the present invention is 350~500 microns at two Ronchi grating cycles of using, and the cycle is big, compares and the coherent measurement of conventional interference technology, and is insensitive for the factors such as disturbance of outside air;
3. the present invention can be used to detect several meters to tens meters focal range; Second Ronchi grating can move along optical axis is accurate; When measuring the different focal lens; Only need to move second Ronchi grating and reach suitable position, focal length measurement and high repeatability precision is arranged accurately just, light path simply is easy to realization.
Description of drawings
Fig. 1 is the focal length pick-up unit structural representation of high precision long-focus lens.
Embodiment
Principle of work of the present invention: the light that laser instrument sends forms divergent beams behind microcobjective and pin hole; Incide on first Ronchi grating; Through the long-focus lens to be measured and second Ronchi grating, second Ronchi grating is placed on a certain Taibo level time position of first Ronchi grating again, and the Taibo picture of first Ronchi grating and second Ronchi grating then can form Moire fringe so; Gather striped with the CCD camera, calculate the focal length that the Moire fringe angle just can obtain lens to be measured.Before putting into measured lens, earlier first and second Ronchi grating is placed in place, measure the focal length value f that incides the divergent beams at the first Ronchi grating place this moment according to the Moire fringe of this moment 1Put into measured lens, suitable mobile second Ronchi grating records focal length value f 2, f 2Be the combined focal length value of divergent beams and lens to be measured in fact, just can obtain the focal length value f of lens to be measured like this according to compound lens focal length reduction formula.
As shown in Figure 1, the focal length pick-up unit of a kind of high precision long-focus lens of the present invention comprises laser instrument 1, microcobjective 2, pin hole 3, first Ronchi grating 4, long-focus lens to be measured 5, second Ronchi grating 6, frosted glass 7, CCD camera 8; The light that laser instrument 1 sends forms divergent beams behind microcobjective 2 and pin hole 3; Incide on first Ronchi grating 4; Be placed on a certain Taibo level time position of first Ronchi grating 4 through long-focus lens 5 to be measured and second Ronchi grating, 6, the second Ronchi gratings 6, the Taibo picture of first Ronchi grating 4 and 6 of second Ronchi gratings can form Moire fringe so again; Gather striped with CCD camera 8, calculate the focal length that the Moire fringe angle just can obtain lens to be measured.
The periodicity linear gratings of above-mentioned first Ronchi grating 4 and second Ronchi grating, 6 even structure, the cycle is 350~500 microns.Described second Ronchi grating 6 is placed on the talbot distance d of first Ronchi grating 4; Wherein
Figure 773366DEST_PATH_IMAGE001
;
Figure 230892DEST_PATH_IMAGE002
is positive integer;
Figure 45265DEST_PATH_IMAGE003
is the grating cycle of first Ronchi grating 4, and
Figure 930044DEST_PATH_IMAGE004
is the light wavelength that laser instrument 1 sends.Said second Ronchi grating 6, frosted glass 7 and CCD camera 8 all are placed on the guide rail that can move along optical axis direction, guide precision 0.1mm.

Claims (4)

1. the focal length pick-up unit of a high precision long-focus lens is characterized in that being included in laser instrument (1), microcobjective (2), pin hole (3), first Ronchi grating (4), long-focus lens to be measured (5), second Ronchi grating (6), frosted glass (7), the CCD camera (8) placed in order on the same optical axis; The light that laser instrument (1) sends forms divergent beams behind microcobjective (2) and pin hole (3); Incide on first Ronchi grating (4); Again through long-focus lens to be measured (5) and second Ronchi grating (6); The Taibo picture of first Ronchi grating (4) and second Ronchi grating (6) then can form Moire fringe so, gather striped with CCD camera (8), calculate the focal length that the Moire fringe angle just can obtain lens to be measured.
2. according to the focal length pick-up unit of claims 1 described a kind of high precision long-focus lens; It is characterized in that; Said first Ronchi grating (4) and second Ronchi grating (6) structure are uniform periodically linear gratings, and the grating cycle is 350~500 microns.
3. according to the focal length pick-up unit of claims 1 described a kind of high precision long-focus lens; It is characterized in that; Described second Ronchi grating (6) is placed on the talbot distance d of first Ronchi grating (4); Wherein
Figure 2011102520613100001DEST_PATH_IMAGE001
; is positive integer;
Figure 2011102520613100001DEST_PATH_IMAGE003
is the grating cycle of first Ronchi grating (4), and
Figure 793892DEST_PATH_IMAGE004
is the light wavelength that laser instrument (1) sends.
4. according to the focal length pick-up unit of claims 1 described a kind of high precision long-focus lens; It is characterized in that; Said second Ronchi grating (6), frosted glass (7) and CCD camera (8) all are placed on the guide rail that can move along same optical axis direction, guide precision 0.1mm.
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Cited By (16)

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Publication number Priority date Publication date Assignee Title
CN102788683A (en) * 2012-08-31 2012-11-21 中国科学院光电技术研究所 Method for detecting focal length of micro-lens array based on Newton method and Talbot effect
CN103033344A (en) * 2012-12-14 2013-04-10 中国科学院长春光学精密机械与物理研究所 Optical system focal distance detection method
CN103063413A (en) * 2012-12-24 2013-04-24 南京理工大学 Integrated long-focus measuring device based on Talbot-moire technology
CN103063415A (en) * 2013-01-05 2013-04-24 浙江大学 Long-focus lens focus distance measuring method based on moire fringe matching
CN103063414A (en) * 2012-12-24 2013-04-24 南京理工大学 Focal length measuring device adopting symmetrical grating
CN104515671A (en) * 2014-12-17 2015-04-15 中国科学院长春光学精密机械与物理研究所 Method for precisely measuring focal distance of superlong-focal-distance space camera
CN104930988A (en) * 2015-06-29 2015-09-23 西南科技大学 Optical fiber array end surface tilt angle measuring instrument and measuring method
CN105372041A (en) * 2015-04-02 2016-03-02 泰山医学院 Double-grating coaxial focus detection device and double-grating coaxial focus detection method based on LabVIEW
CN107121095A (en) * 2017-06-08 2017-09-01 杭州电子科技大学 A kind of method and device of accurate measurement super-large curvature radius
CN107515103A (en) * 2016-06-17 2017-12-26 南京理工大学 A kind of focal length detection means and method using circular grating
CN107588741A (en) * 2017-09-19 2018-01-16 深圳大学 A kind of measuring method and system of the camera depth change based on Moire fringe
CN107782535A (en) * 2017-10-25 2018-03-09 福建师范大学 A kind of focal length of convex lens measurement apparatus and its method
CN107941473A (en) * 2017-12-06 2018-04-20 西南技术物理研究所 A kind of Long focal length measurement device with fringe contrast automatic regulation function
CN110646171A (en) * 2019-10-31 2020-01-03 中国科学院长春光学精密机械与物理研究所 Method for measuring parallelism of light source
CN114061910A (en) * 2021-11-12 2022-02-18 西安交通大学 Device and method for measuring focal length of convex-concave lens
US11821755B1 (en) * 2023-07-19 2023-11-21 Mloptic Corp. Moiré-based distance measurement method

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PL229493B1 (en) * 2015-05-08 2018-07-31 Univ Warszawski Measurement system for determining position of the optical system focal plane and focal length and method for determining position of the optical system focal plane and focal length

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Cited By (25)

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Publication number Priority date Publication date Assignee Title
CN102788683A (en) * 2012-08-31 2012-11-21 中国科学院光电技术研究所 Method for detecting focal length of micro-lens array based on Newton method and Talbot effect
CN102788683B (en) * 2012-08-31 2015-04-22 中国科学院光电技术研究所 Method for detecting focal length of micro-lens array based on Newton method and Talbot effect
CN103033344A (en) * 2012-12-14 2013-04-10 中国科学院长春光学精密机械与物理研究所 Optical system focal distance detection method
CN103033344B (en) * 2012-12-14 2015-02-18 中国科学院长春光学精密机械与物理研究所 Optical system focal distance detection method
CN103063413A (en) * 2012-12-24 2013-04-24 南京理工大学 Integrated long-focus measuring device based on Talbot-moire technology
CN103063414A (en) * 2012-12-24 2013-04-24 南京理工大学 Focal length measuring device adopting symmetrical grating
CN103063413B (en) * 2012-12-24 2015-06-24 南京理工大学 Integrated long-focus measuring device based on Talbot-moire technology
CN103063414B (en) * 2012-12-24 2015-06-24 南京理工大学 Focal length measuring device adopting symmetrical grating
CN103063415A (en) * 2013-01-05 2013-04-24 浙江大学 Long-focus lens focus distance measuring method based on moire fringe matching
CN103063415B (en) * 2013-01-05 2015-09-02 浙江大学 A kind of long focus length of lens measuring method based on Moire fringe coupling
CN104515671A (en) * 2014-12-17 2015-04-15 中国科学院长春光学精密机械与物理研究所 Method for precisely measuring focal distance of superlong-focal-distance space camera
CN105372041A (en) * 2015-04-02 2016-03-02 泰山医学院 Double-grating coaxial focus detection device and double-grating coaxial focus detection method based on LabVIEW
CN104930988B (en) * 2015-06-29 2018-06-05 西南科技大学 A kind of fiber array end face inclination angle measuring instrument and measuring method
CN104930988A (en) * 2015-06-29 2015-09-23 西南科技大学 Optical fiber array end surface tilt angle measuring instrument and measuring method
CN107515103A (en) * 2016-06-17 2017-12-26 南京理工大学 A kind of focal length detection means and method using circular grating
CN107515103B (en) * 2016-06-17 2019-06-21 南京理工大学 A kind of focal length detection device and method using circular grating
CN107121095A (en) * 2017-06-08 2017-09-01 杭州电子科技大学 A kind of method and device of accurate measurement super-large curvature radius
CN107588741A (en) * 2017-09-19 2018-01-16 深圳大学 A kind of measuring method and system of the camera depth change based on Moire fringe
CN107588741B (en) * 2017-09-19 2020-01-21 深圳大学 Method and system for measuring camera depth change based on moire fringes
CN107782535A (en) * 2017-10-25 2018-03-09 福建师范大学 A kind of focal length of convex lens measurement apparatus and its method
CN107941473A (en) * 2017-12-06 2018-04-20 西南技术物理研究所 A kind of Long focal length measurement device with fringe contrast automatic regulation function
CN110646171A (en) * 2019-10-31 2020-01-03 中国科学院长春光学精密机械与物理研究所 Method for measuring parallelism of light source
CN110646171B (en) * 2019-10-31 2021-11-02 中国科学院长春光学精密机械与物理研究所 Method for measuring parallelism of light source
CN114061910A (en) * 2021-11-12 2022-02-18 西安交通大学 Device and method for measuring focal length of convex-concave lens
US11821755B1 (en) * 2023-07-19 2023-11-21 Mloptic Corp. Moiré-based distance measurement method

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