CN113483995A - Detection system and method for refractive index distribution of self-focusing lens - Google Patents

Detection system and method for refractive index distribution of self-focusing lens Download PDF

Info

Publication number
CN113483995A
CN113483995A CN202110788884.1A CN202110788884A CN113483995A CN 113483995 A CN113483995 A CN 113483995A CN 202110788884 A CN202110788884 A CN 202110788884A CN 113483995 A CN113483995 A CN 113483995A
Authority
CN
China
Prior art keywords
self
focusing lens
refractive index
interference fringes
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202110788884.1A
Other languages
Chinese (zh)
Inventor
许峰
林槟
马锁冬
孙鹏
陈旭
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Suzhou University
Original Assignee
Suzhou University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Suzhou University filed Critical Suzhou University
Priority to CN202110788884.1A priority Critical patent/CN113483995A/en
Publication of CN113483995A publication Critical patent/CN113483995A/en
Pending legal-status Critical Current

Links

Images

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02Testing optical properties
    • G01M11/0228Testing optical properties by measuring refractive power

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)

Abstract

The invention relates to the technical field of optical measurement, and discloses a detection system and a detection method for refractive index distribution of a self-focusing lens, aiming at solving the problem of low refractive index detection precision caused by poor environment interference resistance of the existing detection method for refractive index distribution of the self-focusing lens. The Fizeau interferometer system has the advantages of strong anti-interference capability and small size.

Description

Detection system and method for refractive index distribution of self-focusing lens
Technical Field
The invention relates to the technical field of optical measurement, in particular to a Fizeau interference principle-based detection method for refractive index distribution of a self-focusing lens.
Background
A self-focusing lens (GRIN lens, G-lens), also called gradient index lens, is a cylindrical optical lens with refractive index changing in gradient along the radial direction, and has focusing and imaging functions. The self-focusing lens realizes the periodic propagation of light rays in the lens by adjusting the radial gradient refractive index, and the light ray modulation period can be adjusted by changing the length of the self-focusing lens, so that an optical device with the same function as the lens is realized.
The self-focusing lens has end surface collimation, coupling and imaging characteristics, so that the self-focusing lens is widely applied to equipment such as a micro optical system, a medical optical instrument, an optical copying machine, a facsimile machine, a scanner and the like.
The performance of the optical device is inseparable from the law of the refractive index distribution of the optical device, so that the method for detecting the refractive index distribution of the self-focusing lens based on the Fizeau interference principle is always one of the problems of important research of the technicians in the field.
In prior art 1 (Zhoushengsheng, xu feng, yaoyusau, etc., a refractive index distribution testing device and an image acquisition device for a self-focusing lens, chinese utility model patent 201721734733.3) adopts mach-zehnder interference principle to realize high-precision and high-efficiency detection of refractive index distribution of the self-focusing lens, the method adopts a mach-zehnder interference system of optical path interference, and the system has general anti-environmental interference capability.
Compared with the prior art 1, the method improves the environmental interference resistance of the test system and the volume of the test system is small.
Disclosure of Invention
The technical problem solved by the invention is as follows: the refractive index detection method of the self-focusing lens in the prior art has poor environmental interference resistance, so that the refractive index detection precision is not high.
A self-focusing lens refractive index profile detection system, comprising: the device comprises a laser, a spatial filter, a collimating objective lens, a beam splitter, a self-focusing lens, a microscopic imaging system and an image processing system; the method is characterized in that: the microscopic imaging system comprises a microscope objective and a camera; laser generated by the laser is incident on the spatial filter to form a divergent beam; the collimating objective lens collimates the divergent light beams into collimated light beams; the collimated light beam penetrates through the beam splitter and then enters the self-focusing lens; the front surface of the self-focusing lens reflects collimated light to form a reference beam, the rear surface of the self-focusing lens reflects collimated light to form a test beam, interference fringes generated by the reference beam and the test beam are reflected by the beam splitter and then enter the microscopic imaging system, and a microscopic objective of the microscopic imaging system is used for amplifying the interference fringes and imaging the interference fringes on a camera; the image processing system processes interference fringes of the self-focusing lens collected by the camera and obtains the refractive index distribution of the self-focusing lens by analyzing the interference fringe information.
According to the technical scheme, the reference beam and the test beam share the optical path, the Fizeau interference optical path is adopted, the interference fringes of the front surface reflected light and the rear surface reflected light of the self-focusing lens are adopted to analyze the refractive index distribution of the self-focusing lens, the problem that optical elements are too many in the traditional detection method for the refractive index distribution of the self-focusing lens is avoided, and the environment interference resistance of the test system is improved to a certain extent. The Fizeau interferometer system adopts a common-path interference principle, the influence of the deviation of other optical elements in a light path on the optical path difference is almost the same, and the environmental interference can be well overcome; secondly, the method adopts the mutual interference of the reflected light of the front surface and the reflected light of the back surface of the self-focusing lens based on the Fizeau interference principle, and compared with the prior art, the method has the advantage that the number of optical elements of the test system is less.
Description of the drawings:
FIG. 1 is a schematic diagram of an optical path of a detection method for refractive index distribution of a self-focusing lens based on Fizeau interference principle;
wherein: the device comprises a 1-laser, a 2-spatial filter, a 3-collimating objective, a 4-beam splitter, a 5-self-focusing lens, a 6-microscope objective and a 7-camera.
Fig. 2 is a diagram of interference fringes taken at a wavelength of 632.8 nm.
Fig. 3 is a diagram of interference fringes taken at a wavelength of 1064 nm.
Fig. 4 is a graph of interference fringes taken at a wavelength of 1550 nm.
FIG. 5 is a graph of the refractive index profile of a self-focusing lens measured at a wavelength of 632.8 nm; fig. 5(a) shows the results of one measurement, and fig. 5(b) shows the results of measurement after changing the measurement conditions by manually moving the sample piece at intervals of 10 minutes.
FIG. 6 is a graph of the refractive index profile of a self-focusing lens measured at a wavelength of 1064 nm; fig. 6(a) shows the results of one measurement, and fig. 6(b) shows the results of measurement after changing the measurement conditions by manually moving the sample piece at intervals of 10 minutes.
FIG. 7 is a graph of a refractive index profile of a self-focusing lens measured at a wavelength of 1550 nm; fig. 7(a) shows the results of one measurement, and fig. 7(b) shows the results of measurement after changing the measurement conditions by manually moving the sample piece at intervals of 10 minutes.
Detailed Description
The invention provides a detection method for refractive index distribution of a self-focusing lens based on Fizeau interference principle, and in order to make the purpose, technical scheme and effect of the invention clearer and clearer, the invention is further described in detail below by referring to the attached drawings and taking examples. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
Example one
A detection system for refractive index distribution of a self-focusing lens, as shown in fig. 1: the device comprises a laser 1, a spatial filter 2, a collimating objective 3, a beam splitter 4, a self-focusing lens 5, a microscopic imaging system and an image processing system; wherein, the microscopic imaging system comprises a microscope objective 6 and a camera 7; laser generated by the laser is incident on the spatial filter to form a divergent beam; the collimating objective lens collimates the divergent light beams into collimated light beams; the collimated light beam penetrates through the beam splitter and then enters the self-focusing lens; the front surface of the self-focusing lens reflects collimated light to form a reference beam, the rear surface of the self-focusing lens reflects collimated light to form a test beam, interference fringes generated by the reference beam and the test beam are reflected by the beam splitter and then enter the microscopic imaging system, and a microscopic objective of the microscopic imaging system is used for amplifying the interference fringes and imaging the interference fringes on a camera; the image processing system processes the interference fringes of the self-focusing lens collected by the camera 7, and obtains the refractive index distribution of the self-focusing lens by analyzing the interference fringe information.
Example two
A detection method of refractive index distribution of a self-focusing lens based on the detection system of refractive index distribution of a self-focusing lens; the method comprises the following steps:
placing a self-focusing lens to be detected behind the beam splitter, opening a laser to generate parallel light, filtering the light through a spatial filter, irradiating the light on the front and rear surfaces of the self-focusing lens after passing through the beam splitter, reflecting the light into two beams of light through the front and rear surfaces of the self-focusing lens to form an interference light path, reflecting the light to a microscopic imaging lens through the beam splitter, imaging interference fringes on a camera through the microscopic imaging lens, and resolving the interference fringes by an image processing system;
moving the imaging microscope system back and forth to enable the focal plane of the microscope objective to coincide with the surface of the self-focusing lens, namely forming a clear image on the self-focusing lens, and obtaining corresponding interference fringes through a camera;
and collecting an image by a back-end image processing system, and inputting the central refractive index of the central position of the self-focusing lens, the wavelength of the selected laser, the thickness of the self-focusing lens, the diameter of the end face and the central refractive index.
As shown in fig. 2, 3, and 4, the interference fringes are concentric rings, the outermost ring of the concentric rings of interference fringes forms a bright edge due to dense superposition of the fringes, the center of the concentric rings is the center of the ring fringe, the bright edge is a boundary, and the interference fringes surrounded by the boundary are an effective mask region; the steps of resolving the interference fringes are as follows: firstly, taking the center of the circular stripe as a starting point, and intercepting a one-dimensional gray array for an image in multiple directions within the range of an effective mask area; secondly, starting to search the peak-valley gray values of a plurality of one-dimensional gray arrays by using the starting point of the one-dimensional gray array; then, on the basis of determining the peak-valley positions of the plurality of one-dimensional gray array, carrying out recursive search on the subsequent peak-valley positions so as to determine all the fringe peak-valley positions of the one-dimensional gray array, and determining the integer level fringe level of each one-dimensional gray array peak-valley position by taking the starting point of the one-dimensional gray array as a zero-level fringe; and finally, determining the decimal fringe order between every two adjacent peak valleys according to the relative gray value, combining the integer fringe order and the decimal fringe order to obtain the fringe order distribution of the one-dimensional gray array, and finally calculating the optical path difference of the interference fringes through a formula so as to calculate the refractive index distribution of the self-focusing lens.
The specific formula of the refractive index distribution calculated from the fringe series distribution is as follows:
2·(n0-n)·d=k·λ
wherein n is0The refractive index of the center of the self-focusing lens is shown, n is the refractive index to be solved, d is the thickness of the self-focusing lens, k is the fringe series distribution of the one-dimensional gray array, and lambda is the working wavelength of the laser. The refractive index profiles calculated from the fringes shown in fig. 2, 3, and 4 are shown in fig. 5, 6, and 7, in which (a) and (b) subgraphs of each graph correspond to two measurements after 10 minutes of interval and the sample is manually moved to change the measurement conditions.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the scope of the present invention, but rather as embodying the invention in a wide variety of equivalent variations and modifications within the scope of the appended claims.

Claims (3)

1. A self-focusing lens refractive index profile detection system, comprising: the device comprises a laser, a spatial filter, a collimating objective lens, a beam splitter, a self-focusing lens, a microscopic imaging system and an image processing system; the method is characterized in that: the microscopic imaging system comprises a microscope objective and a camera; laser generated by the laser is incident on the spatial filter to form a divergent beam; the collimating objective lens collimates the divergent light beams into collimated light beams; the collimated light beam penetrates through the beam splitter and then enters the self-focusing lens; the front surface of the self-focusing lens reflects collimated light to form a reference beam, the rear surface of the self-focusing lens reflects collimated light to form a test beam, interference fringes generated by the reference beam and the test beam are reflected by the beam splitter and then enter the microscopic imaging system, and a microscopic objective of the microscopic imaging system is used for amplifying the interference fringes and imaging the interference fringes on a camera; the image processing system processes interference fringes of the self-focusing lens collected by the camera and obtains the refractive index distribution of the self-focusing lens by analyzing the interference fringe information.
2. A detection method for refractive index distribution of a self-focusing lens is characterized in that: detecting using a self-focusing lens refractive index profile detection system of claim 1; placing a self-focusing lens to be detected behind the beam splitter, opening a laser to generate parallel light, filtering the light through a spatial filter, irradiating the light on the front and rear surfaces of the self-focusing lens after passing through the beam splitter, reflecting the light into two beams of light through the front and rear surfaces of the self-focusing lens to form an interference light path, reflecting the light to a microscopic imaging lens through the beam splitter, imaging interference fringes on a camera through the microscopic imaging lens, and resolving the interference fringes by an image processing system; moving the imaging microscope system back and forth to enable the focal plane of the microscope objective to coincide with the surface of the self-focusing lens, namely forming a clear image on the self-focusing lens, and obtaining corresponding interference fringes through a camera; and collecting an image by a back-end image processing system, and inputting the central refractive index of the self-focusing lens, the wavelength of the selected laser, the thickness of the self-focusing lens, the diameter of the end face and the central refractive index.
3. The method for detecting the refractive index distribution of a self-focusing lens according to claim 2, wherein: the interference fringes are concentric rings, the outermost ring of the concentric rings of the interference fringes forms a bright edge due to the dense superposition of the fringes, the circle center of the concentric rings is taken as the center of the fringes of the rings, the bright edge is taken as a boundary, and the interference fringes surrounded by the boundary are taken as an effective mask area; the steps of resolving the interference fringes are as follows: firstly, taking the center of the circular stripe as a starting point, and intercepting a one-dimensional gray array for an image in multiple directions within the range of an effective mask area; secondly, starting to search the peak-valley gray values of a plurality of one-dimensional gray arrays by using the starting point of the one-dimensional gray array; then, on the basis of determining the peak-valley positions of the plurality of one-dimensional gray array, carrying out recursive search on the subsequent peak-valley positions so as to determine all the fringe peak-valley positions of the one-dimensional gray array, and determining the integer level fringe level of each one-dimensional gray array peak-valley position by taking the starting point of the one-dimensional gray array as a zero-level fringe; and finally, determining the decimal fringe order between every two adjacent peak valleys according to the relative gray value, combining the integer fringe order and the decimal fringe order to obtain the fringe order distribution of the one-dimensional gray array, and finally calculating the optical path difference of the interference fringes through a formula so as to calculate the refractive index distribution of the self-focusing lens.
CN202110788884.1A 2021-07-13 2021-07-13 Detection system and method for refractive index distribution of self-focusing lens Pending CN113483995A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202110788884.1A CN113483995A (en) 2021-07-13 2021-07-13 Detection system and method for refractive index distribution of self-focusing lens

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202110788884.1A CN113483995A (en) 2021-07-13 2021-07-13 Detection system and method for refractive index distribution of self-focusing lens

Publications (1)

Publication Number Publication Date
CN113483995A true CN113483995A (en) 2021-10-08

Family

ID=77939019

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202110788884.1A Pending CN113483995A (en) 2021-07-13 2021-07-13 Detection system and method for refractive index distribution of self-focusing lens

Country Status (1)

Country Link
CN (1) CN113483995A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113639973A (en) * 2021-10-15 2021-11-12 高视科技(苏州)有限公司 Detection method and system for refractive index distribution of finished product of self-focusing lens
CN114383524A (en) * 2021-12-27 2022-04-22 南京工业大学 OpenCV-based Michelson interference image physical information extraction method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113639973A (en) * 2021-10-15 2021-11-12 高视科技(苏州)有限公司 Detection method and system for refractive index distribution of finished product of self-focusing lens
CN113639973B (en) * 2021-10-15 2022-02-08 高视科技(苏州)有限公司 Detection method and system for refractive index distribution of finished product of self-focusing lens
CN114383524A (en) * 2021-12-27 2022-04-22 南京工业大学 OpenCV-based Michelson interference image physical information extraction method

Similar Documents

Publication Publication Date Title
CN102313642B (en) High-precision focus detection device for long-focus lens
CN104655032B (en) High-precision distance measurement system and method based on orthogonal chromatic dispersion spectral domain interferometer
EP2538170A1 (en) Method and device for measuring multiple parameters of differential confocal interference component
CN113483995A (en) Detection system and method for refractive index distribution of self-focusing lens
CN102889980B (en) Microlens fixed-focus detection method based on grating shearing interference detection system
CN105181298A (en) Multiple reflection type laser con-focal long focal length measuring method and device
CN103411957A (en) High-space-resolution double-shaft confocal atlas micro-imaging method and device
CN102589853B (en) Focal length measuring method of auto-collimating differential confocal lens
CN102589852B (en) Autocollimating type confocal method for measuring focal length of lens
CN110736721B (en) Glass plate refractive index uniformity detection device and detection method based on diffraction grating
CN109990733B (en) Bilateral dislocation differential confocal curvature radius measuring method
CN104833486A (en) Multi-reflection laser differential confocal long focal length measuring method and multi-reflection laser differential confocal long focal length measuring device
CN109540474A (en) Postposition is divided pupil laser differential confocal focal-length measurement method and device
CN112097923B (en) Simple wavefront measurement method for optical element
CN112684462A (en) Amplified area array sweep frequency measuring device and method
CN109520973A (en) Postposition is divided pupil laser differential confocal microscopic detection method and device
CN109974603B (en) Method for measuring center thickness of bilateral dislocation differential confocal lens
CN110118645B (en) Optical performance comprehensive evaluation method of semi-ellipsoid reflecting surface
CN110631510B (en) High-precision angle measuring device and method based on Michelson structure
CN216717775U (en) Detection system for refractive index distribution of self-focusing lens
CN109945804B (en) Transverse subtraction differential confocal measuring method for super-large curvature radius
CN105806240A (en) Method capable of simultaneously measuring multiple absolute distances based on optical transfer functions
CN110243760B (en) Line domain frequency domain optical coherence tomography system and longitudinal coordinate calibration method thereof
CN205514536U (en) Frequency domain optics chromatographic device that is concerned with
CN103630087A (en) Space translation transformation-based device and space translation transformation-based method for digital differential confocal measurement

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination