CN104655032B - High-precision distance measurement system and method based on orthogonal chromatic dispersion spectral domain interferometer - Google Patents
High-precision distance measurement system and method based on orthogonal chromatic dispersion spectral domain interferometer Download PDFInfo
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Abstract
The invention discloses a high-precision distance measurement system and method based on an orthogonal chromatic dispersion spectral domain interferometer. Based on a layout of the spectral domain interferometer, a phase difference is introduced among a plurality of interference spectrums through a quick displacement device arranged in a reference arm, a complex interference signal is reconstructed by utilizing an actually verified phase difference, and high-fidelity sample information is obtained based on inverse Fourier transform of the complex interference signal. Detection is carried out on a detection arm by an orthogonal spectrophotometer having ultra-high spectral resolution and based on a virtual image phase control array and an optical grating, so that the measurement range is greatly expanded. With the adoption of an optical distance measurement method for an optimized multichannel spectral phase, the measurement precision is remarkably improved, and error amplification possibly caused by single-channel measurement is avoided, therefore quick high-precision wide-range distance measurement is realized.
Description
Technical field
The present invention relates to optical coherence field of measuring technique, and in particular to a kind of height based on cross dispersion spectral domain interferometer
Precision distance measurement system and method.
Background technology
Contemporary optics system is typically all what is be made up of multiple lens, during the installation and debugging of optical system, each
Whether lens positioning is accurately the key index for determining Performance of Optical System, this be accomplished by one it is quick, high accuracy, wide range
Distance measurement system is come the installation and debugging monitoring and guide optical system.In order to realize Non-Destructive Testing, there has been proposed a kind of base
In the spacing monitoring method of principle of optical interference, the such as mirror surface position finder of Fogale companies of France, the technology for being adopted is time domain
Optical coherence tomography (Time Domain Optical Coherence Tomography, TDOCT), using broadband low phase
Dry light source and the more accurate optical interval measurement result of high accuracy optical delay circuit acquisition, but the systematic survey speed and measurement
Precision is limited to the speed and precision of mechanical movement in high accuracy optical delay circuit, and measuring speed is slow, and certainty of measurement is vulnerable to temperature
The impact of the extraneous factors such as degree, vibration.In order to improve measuring speed, reduce dependence of the measuring system to mechanical movement, people will
Fourier domain optical coherence tomography (Fourier Domain Optical Coherence Tomography, FDOCT) should
For the measurement of spacing between lens in optical system.FDOCT technologies are divided into spectral domain optical coherence tomography techniques (Spectral again
Domain OCT, SDOCT) and frequency sweep optical coherence tomography (Swept Source OCT, SSOCT).SDOCT selects broadband
Light source and rapid multi-channel spectrogrph obtain interference signal.SSOCT is obtained from rapid frequency-sweeping laser source and single point detector
Interference spectrum signal.By carrying out to interference signal between the optical system interior lens that Fourier transform is obtained vertically
Pitch information.Due to the phase stability of SSOCT systems it is poor, so choose SDOCT technology implementation high accuracy distance measurements
It is more particularly suitable.
However, SDOCT technologies are used to improve optical interval measurement, while detection speed is improved, some are there is also not
Foot.
Firstth, there is mirror image in measurement result.
Because the interference spectrum for detecting is real number, so can be deposited by mirror image caused by the Hermitian conjugate of Fourier transform
The range of half in so that SDOCT system losses, more seriously, when the presence of image signal may result in measurement
Misread.
Mirror image caused by order to overcome the Hermitian conjugate by Fourier transform, R.Leitgeb et al. were proposed in 1999
Carrier frequency is introduced by reference arm of the method for phase shift in coherent system, so as to obtain the interference signal of plural form, and then is distinguished
Signal and its mirror image.Because the method is affected by factors such as the precision of fast offset device, external environment and aberration, so
Image rejection ratio is not high.
Secondth, range is measured limited.
Multi-channel spectrometer used in general SDOCT systems is made up of grating and line-scan digital camera, spectral resolution
It is not high enough, so the range of SDOCT systems is typically in several millimeters.
A kind of double reference arms of photoswitch switching are proposed in order to break through measurement range, Hui Wang et al., and by position
Phase modulator approach eliminates mirror image, and then the method for expanding SDOCT system ranges.Although the method can play increase SDOCT systems
The range of system, but range improves limited, still can not meet the needs of big distance measurement；The setting of many reference arms is also increased
The complexity of system, the optical interval between many reference arms is needed through complicated demarcation, and otherwise measurement result has larger
Error.
3rd, the optical interval certainty of measurement of SDOCT systems is not enough.
Axial distance precision obtained by common signal processing method receives the factor shadow such as light source bandwidth and sampled point number
Ring.Quantization phase imaging method (Quantitative is proposed in order to improve the certainty of measurement of axial spacing, Jun Zhang etc.
Phase Imaging), phase information is extracted in interference signal, and then obtain the axial spacing measurement result of sub-micrometer scale.
But, measurement may be caused because of choosing to the poor wavelength of some sensitivity when calculating spacing using single-point spectral information
Error is amplified.
The content of the invention
The present invention is directed to the deficiencies in the prior art, there is provided the high accuracy distance measurement based on cross dispersion spectral domain interferometer
System and method.
Based on the high accuracy distance measurement system of cross dispersion spectral domain interferometer, including wideband light source, optical circulator, broadband
Fiber coupler, sample arm, reference arm and feeler arm；
Described sample arm includes the first fiber collimating lenses, the first condenser lenses, plane mirror and fast offset dress
Put；Described reference arm includes the second fiber collimating lenses, the second condenser lenses and sample；Described feeler arm includes the 3rd light
Fine collimating lens, cylindrical focusing lens, virtual image phased array, grating, tertiary focusing lens, area array CCD or face battle array CMOS；
Wideband light source low-coherent light out, Jing optical circulators are to broadband optical fiber coupler, wherein all the way light enters reference
Arm, another road enters sample arm；Into referring to arm section：The fiber optic collimators of light Jing first Jing after broadband optical fiber coupler light splitting are saturating
After mirror, the condenser lenses of Jing first are irradiated to the plane mirror being fixed on fast offset device, are reflected back from plane mirror
The light for coming is via backtracking to broadband optical fiber coupler；Into sample arm section：Light Jing after broadband optical fiber coupler light splitting
Sample is irradiated to Jing after the second fiber collimating lenses incide the second condenser lenses, the light reflected from sample is returned via former road
It is back to broadband optical fiber coupler；
The two-way light returned from sample arm and reference arm forms interference light, the Jing rings of light after interfering in broadband optical fiber coupler
Row device enters feeler arm, interference light is decomposed into into interference spectrum signal by feeler arm and is detected；Into detection arm section：Interference light
The fiber collimating lenses of Jing the 3rd, incide cylindrical focusing lens, and emergent light converges to the entrance window of virtual image phased array front surface,
From the rear surface outgoing of virtual image phased array, the first order light splitting in spatial domain is carried out, grating is again incident on, in orthogonal intersection space side
Second level light splitting is carried out upwards, and Jing tertiary focusing lens imagings are detected using area array CCD or face battle array CMOS；It is last these
Spectral signal is changed into the incoming computer of the signal of telecommunication, and implements Fourier transform scheduling algorithm processing reconstructed sample drawing in a computer
Picture.
Based on the measuring method of the high accuracy distance measurement system of cross dispersion spectral domain interferometer, following step is specifically included
Suddenly：
Step one：In reference arm, reflecting mirror is fixed on a fast offset device, when a certain sample is detected,
Control fast offset device repeatedly moved, so as to obtain different optical path differences under multiple interference signals；
Step 2：In feeler arm, cross dispersion light splitting is carried out to interference light using virtual image phased array and grating；First use
Virtual image phased array carries out first time dispersion light splitting to interference light；Again second light splitting is carried out in that orthogonal direction by grating, two
The two-dimentional interference spectrum of the high spectral resolution obtained after secondary light splitting is after a condenser lenses by area array CCD or face battle array CMOS
Detection is obtained；
Step 3：Multiple interference spectrums of certain sample obtained to area array CCD or the detection of face battle array CMOS carry out Fourier's change
Change, obtain multiple signals of the sample, the signal peak most strong to intensity in these signals carries out bandpass filtering treatment and ask for light
Spectrum phase place, calculates the phase contrast between these interference spectrums, and using this phase contrast multiple interference spectrum is reconstructed；To the multiple interference
Spectrum carries out the sample signal that inverse Fourier transform obtains high-fidelity；
Step 4：After obtaining sample signal, the signal peak at each interface of sample is extracted, try to achieve each independent signal peak
Spectrum position phase, corresponding optical path difference is tried to achieve to each signal peak using the phase information of different spectrum channels, right by analytic operation
It carries out optimum averagely with suppression system noise, realizes high-precision distance measurement.
The invention has the advantages that：
1. the complex signal method for reconstructing based on spectrum phase difference is proposed, precision, the external world of fast offset device is overcome
The impact that the factor such as environment and aberration is rebuild to complex signal.The method has not only expanded double range, and improves sample
The fidelity of reconstruction.Do not affected by remaining mirror image, it is to avoid misreading for measurement process.2. using based on the virtual image on feeler arm
The orthogonal sub-ray spectrometer of phased array and grating is detected, and realizes the detection of ultraspectral resolution, be greatly improved
Measurement range.3. using the measurement method for distance of optimization multi-channel spectral position phase, the precision of measurement is not only increased, and avoided
Single channel measurement may caused by error amplify.
Description of the drawings
Fig. 1 is the system structure principle schematic of the present invention；
Fig. 2 is the signal processing flow figure that the present invention asks for phase contrast；
The high accuracy distance measurement principle schematic based on position phase of Fig. 3 present invention；
Specific embodiment
With reference to the accompanying drawings and examples the present invention is described further.
As shown in figure 1, the present invention includes wideband light source 1, optical circulator 2, broadband optical fiber coupler 3, sample arm 17, reference
Arm 18 and feeler arm 19；
Described sample arm 17 includes the first fiber collimating lenses 4, the first condenser lenses 5, plane mirror 6 and fast bit
Moving device 7；Described reference arm 18 includes the second fiber collimating lenses 8, the second condenser lenses 9 and sample 10；Described detection
Arm 19 includes the 3rd fiber collimating lenses 11, cylindrical focusing lens 12, virtual image phased array 13, grating 14, tertiary focusing lens
15th, area array CCD or face battle array CMOS 16；
The low-coherent light out of wideband light source 1, Jing optical circulators 2 arrive broadband optical fiber coupler 3, wherein all the way light enters ginseng
Arm 17 is examined, another road enters sample arm 18；Into the part of reference arm 17：The light of light Jing first Jing after broadband optical fiber coupler light splitting
After fine collimating lens 4, the first condenser lenses of Jing 5 are irradiated to the plane mirror 6 being fixed on fast offset device 7, from plane
The light that reflecting mirror is reflected is via backtracking to broadband optical fiber coupler 3；Into the part of sample arm 18：Jing band optical fiber couplings
Light after clutch light splitting is irradiated to sample 10 Jing after the second fiber collimating lenses 8 incide the second condenser lenses 9, from sample reflection
The light returned is via backtracking to broadband optical fiber coupler；
The two-way light returned from sample arm and reference arm interferes Jing optical circulators to enter detection in broadband optical fiber coupler
Arm 19, is decomposed into interference light interference spectrum signal by feeler arm and is detected；Into the part of feeler arm 19：The light of interference light Jing the 3rd
Fine collimating lens 11, incide cylindrical focusing lens 12, and emergent light converges to the entrance window of the front surface of virtual image phased array 13, from
The rear surface outgoing of virtual image phased array, carries out the first order light splitting in spatial domain, grating 14 is again incident on, in orthogonal intersection space side
Second level light splitting is carried out upwards, and Jing tertiary focusings lens 15 are imaged, and are detected using area array CCD or face battle array CMOS 16；Finally
These spectral signals are changed into the incoming computer of the signal of telecommunication, and implement Fourier transform scheduling algorithm processing reconstructed sample in a computer
Product image.
Comprised the following steps based on the high accuracy measurement method for distance of cross dispersion spectral domain interferometer：
Step one：In reference arm, reflecting mirror is fixed on a fast offset device (such as piezoelectric transducer), is being visited
When surveying a certain sample, control fast offset device repeatedly moved, so as to obtain different optical path differences under multiple interference signals.
Step 2：In feeler arm, cross dispersion light splitting is carried out to interference light using virtual image phased array and grating.First use
The virtual image phased array that Free Spectral Range is little, spectral resolution is high carries out first time dispersion light splitting to interference light；Again by relative
The grating that spectral resolution is relatively low, Free Spectral Range is wider carries out in that orthogonal direction second light splitting, obtains after light splitting twice
To high spectral resolution two-dimentional interference spectrum after a condenser lenses by area array CCD or face battle array CMOS detection obtain.
Step 3：Multiple interference spectrums of certain sample obtained to detection carry out Fourier transformation, obtain many of the sample
Individual signal, the signal peak most strong to intensity in these signals carries out bandpass filtering treatment and asks for spectrum phase, calculates these
Phase contrast between interference spectrum.Fig. 2 is the phase difference method between two interference spectrums that computation and measurement is obtained in the present invention
Flow chart.Two interference spectrums can be expressed as：
Wherein k be wave number, I0K () represents direct current signal and autocorrelation signal sum, S (k) is light source power spectral function, RR
And ZRBe respectively reference arm upper reflector reflectance and its apart from broadband optical fiber coupler distance, RSnAnd ZSnFor sample n-th
The reflectance at individual interface and its apart from broadband optical fiber coupler distance (assume sample one have N number of interface),For initial
Phase place,For the phase contrast of the introducings such as fast offset device and external environment.Fourier's change is carried out to two interference spectrums
The sample message I with mirror image is obtained after changing, and (z, 1) (2) z, using band filter one interface of representative sample is chosen with I
Peak signal (is assumed to be j-th face), and it is carried out to ask for phase place and unpacking after inverse Fourier transform, obtains：
Two phase places tried to achieve obtain the phase contrast of the two interference spectrums by subtracting each other：
The method for calculating the phase contrast between two interference spectrums of phase difference method and calculating between multiple interference spectrums
It is identical, can reconstruct multiple interference spectrum using this phase contrast.Inverse Fourier transform is carried out to the multiple interference spectrum and obtains height
The sample signal of fidelity.
Step 4：After obtaining sample signal, the signal peak at each interface of sample is extracted, try to achieve the spectrum phase of each signal peak
PositionFitting a straight line is carried out to spectrum after unpacking and obtains fit phaseAs shown in figure 3, logical using different spectrum
The phase information in road tries to achieve respectively corresponding optical path differenceM is selected by threshold method
OPD corresponding to the higher wave number of sensitivity is carried out averagelyWith suppression system noise, high accuracy is tried to achieve
Optical path difference, finally realize high-precision distance measurement.
Claims (1)
1. the measuring method of the high accuracy distance measurement system of cross dispersion spectral domain interferometer, the device that the method is based on are based on
Part includes wideband light source, optical circulator, broadband optical fiber coupler, sample arm, reference arm and feeler arm；
It is characterized in that：Described sample arm includes the first fiber collimating lenses, the first condenser lenses, plane mirror and quick
Gearshift；Described reference arm includes the second fiber collimating lenses, the second condenser lenses and sample；Described feeler arm includes
3rd fiber collimating lenses, cylindrical focusing lens, virtual image phased array, grating, tertiary focusing lens, area array CCD or face battle array
CMOS；
Wideband light source low-coherent light out, Jing optical circulators are to broadband optical fiber coupler, wherein all the way light enters reference arm, separately
Sample arm is entered all the way；Into referring to arm section：Light Jing after broadband optical fiber coupler light splitting Jing after the first fiber collimating lenses,
The condenser lenses of Jing first are irradiated to the plane mirror being fixed on fast offset device, from the light that plane mirror is reflected
Via backtracking to broadband optical fiber coupler；Into sample arm section：Light Jing second Jing after broadband optical fiber coupler light splitting
Fiber collimating lenses to be incided and be irradiated to sample after the second condenser lenses, and the light reflected from sample is via backtracking to width
Band fiber coupler；
The two-way light returned from sample arm and reference arm forms interference light, Jing optical circulators after interfering in broadband optical fiber coupler
Into feeler arm, interference light is decomposed into into interference spectrum signal by feeler arm and is detected；Into detection arm section：Interference light Jing
Three fiber collimating lenses, incide cylindrical focusing lens, and emergent light converges to the entrance window of virtual image phased array front surface, from void
As the rear surface outgoing of phased array, the first order light splitting in spatial domain is carried out, grating is again incident on, on orthogonal intersection space direction
Second level light splitting is carried out, Jing tertiary focusing lens imagings are detected using area array CCD or face battle array CMOS；Last these spectrum
Signal is changed into the incoming computer of the signal of telecommunication, and implements Fourier transform scheduling algorithm processing reconstructed sample image in a computer；
Characterized in that, the method specifically includes following steps：
Step one：In reference arm, reflecting mirror is fixed on a fast offset device, when a certain sample is detected, control
Fast offset device is repeatedly moved, so as to obtain different optical path differences under multiple interference signals；
Step 2：In feeler arm, cross dispersion light splitting is carried out to interference light using virtual image phased array and grating；First use the virtual image
Phased array carries out first time dispersion light splitting to interference light；Again second light splitting is carried out in that orthogonal direction by grating, divided twice
The two-dimentional interference spectrum of the high spectral resolution obtained after light is detected after a condenser lenses by area array CCD or face battle array CMOS
Obtain；
Step 3：Multiple interference spectrums of certain sample obtained to area array CCD or the detection of face battle array CMOS carry out Fourier transformation, obtain
To multiple signals of the sample, the signal peak most strong to intensity in these signals carries out bandpass filtering treatment and asks for spectrum phase
Position, calculates the phase contrast between these interference spectrums, and using this phase contrast multiple interference spectrum is reconstructed；To the multiple interference spectrum
Carry out the sample signal that inverse Fourier transform obtains high-fidelity；
Step 4：After obtaining sample signal, the signal peak at each interface of sample is extracted, try to achieve each independent signal peak spectrum
Position phase, corresponding optical path difference is tried to achieve to each signal peak using the phase information of different spectrum channels, by analytic operation, it is entered
Row optimum realizes high-precision distance measurement averagely with suppression system noise.
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Effective date of registration: 20200403 Address after: 315300 room 2011, Shanglin Yingcai entrepreneurial park, Hushan cultural business district, Cixi City, Ningbo City, Zhejiang Province Patentee after: Ningbo Core Photoelectric Technology Co.,Ltd. Address before: 310027 Hangzhou, Zhejiang Province, Xihu District, Zhejiang Road, No. 38, No. Patentee before: ZHEJIANG University |