CN105698702B - A kind of diplopore heterodyne ineterferometer based on acousto-optic low frequency differences phase shift - Google Patents
A kind of diplopore heterodyne ineterferometer based on acousto-optic low frequency differences phase shift Download PDFInfo
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- CN105698702B CN105698702B CN201610236674.0A CN201610236674A CN105698702B CN 105698702 B CN105698702 B CN 105698702B CN 201610236674 A CN201610236674 A CN 201610236674A CN 105698702 B CN105698702 B CN 105698702B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
Abstract
The invention discloses a kind of diplopore heterodyne ineterferometers based on acousto-optic low frequency differences phase shift, use acousto-optic frequency shifters difference interference phase shift, the same optical path interference pattern of detector continuous acquisition, the problem of registration there is no multi-frame interferometry pattern, measurement accuracy is further increased；In addition, the information content of acquisition is richer also using low frequency differences difference interference and high speed camera continuous acquisition, it is more advantageous to accurate resolving phase, is more advantageous to and the factors such as noise is overcome to influence.
Description
Technical field
The present invention relates to optical technical field more particularly to a kind of diplopore difference interferences based on acousto-optic low frequency differences phase shift
Instrument.
Background technique
Using deep-UV lithography machine projection exposure system therefor as the advanced optical equipment of representative, processing, optics to optical element
The integrated of system proposes great challenge.Interferometer integrates indispensable as high-precision optical element processing and optical system
Core detection device, detection accuracy require to be continuously improved.
The surface characterization test method used in traditional optical processing includes Hartmann sensor method, knife-edge method and consistency profiles
Deng.These methods, which are respectively present non-digitalization, needs the different disadvantage of subjective interpretation or contact damage part to be measured etc., and is difficult to reach
It is simple method for measuring to higher measurement accuracy.
Interference detection method is just used before a century, belongs to non-contact measurement, and has wide range, highly sensitive
The features such as degree, high-precision, is widely used when high-precision detects, and principle is the reference planes conduct of light beam irradiation standard
Reference light, another Shu Guangzhao penetrates tested surface and returns with face shape information as measurement light, due to hot spot difference when two-beam is interfered
Position phase difference generates optical path difference to generate curved interference fringe, that is, can determine whether that the face shape of tested surface rises and falls.
Current interferometer mostly uses greatly polarization phase shift system, and the mutually perpendicular light of two beams passes through its phase shift block, realizes
Four steps or multistep phase shift simultaneously, solve the face type of measured piece.However, although polarization phase-moving method meeting antivibration, shoots simultaneously
Several phase shift figures will be registrated solution phase, will certainly bring matching error；In addition, acquisition can only obtain the interference pattern of Finite Amplitude, it is right
The precision of its phase extraction is restricted, and the phase shifting accuracy of a few amplitude shift phasors is limited by phase shift block, is directly affected
To face type inversion accuracy.
Summary of the invention
The object of the present invention is to provide a kind of diplopore heterodyne ineterferometers based on acousto-optic low frequency differences phase shift, can greatly improve
Measurement accuracy.
The purpose of the present invention is what is be achieved through the following technical solutions:
A kind of diplopore heterodyne ineterferometer based on acousto-optic low frequency differences phase shift, comprising: laser, two blocks of half-wave plates, polarization point
Light microscopic PBS, two acousto-optic frequency shifters, two fiber couplers, two polarization maintaining optical fibres, two spectroscopes, collimating mirror, standard mirror,
Mirror, filtering hole, two imaging lens and two detectors to be measured；Wherein:
Laser emitting laser injects PBS after half-wave plate 1, and incident laser is divided into two bundles laser by PBS；Wherein one
Shu Jiguang is coupled into polarization maintaining optical fibre 1 by fiber coupler 1 after acousto-optic frequency shifters 1；Another beam of laser successively passes through half-wave
Polarization maintaining optical fibre 2 is coupled by fiber coupler 2 after piece 2 and acousto-optic frequency shifters 2；
By adjusting the inclination of standard mirror and mirror to be measured, the laser for being emitted polarization maintaining optical fibre 2 passes sequentially through spectroscope 1, standard
Mirror to be measured is injected after straight mirror and standard mirror, the backtracking after mirror to be measured reflection, and the mirror 1 that is split reflexes to filtering hole；Make to protect
The laser of 1 outgoing of polarisation fibre injects standard mirror after passing sequentially through spectroscope 1 and collimating mirror, the backtracking after the reflection of standard mirror,
And the mirror 1 that is split reflexes to filtering hole；
The two beam laser for injecting filtering hole are divided into two-way after spectroscope 2；Wherein optical path is monitored as adjustment all the way,
It is injected in detector 1 by imaging lens 1；Another way is injected in detector 2 as acquisition interference pattern optical path by imaging lens 2.
Further, incident laser is divided into two bundles laser according to any power ratio by the PBS.
Further, the half-wave plate 2 for changing laser polarization direction so that two beams are after acousto-optic frequency shifters
Laser polarization direction is consistent.
Further, the shift frequency amount of two acousto-optic frequency shifters is different, is the low of several hertz or tens hertz magnitudes after difference frequency
Difference frequency.
Further, the end of the polarization maintaining optical fibre 1 and polarization maintaining optical fibre 2 is fixed by fixed module, it is ensured that two beam laser
Exit direction it is consistent, and horizontal space has certain dislocation.
As seen from the above technical solution provided by the invention, using acousto-optic frequency shifters difference interference phase shift, detector
The problem of same optical path interference pattern of continuous acquisition, there is no multi-frame interferometry pattern registrations, measurement accuracy further increases；In addition,
Using low frequency differences difference interference and high speed camera continuous acquisition, the information content of acquisition is richer, is more advantageous to accurate resolving phase,
It is more advantageous to and the factors such as noise is overcome to influence.
Detailed description of the invention
In order to illustrate the technical solution of the embodiments of the present invention more clearly, required use in being described below to embodiment
Attached drawing be briefly described, it should be apparent that, drawings in the following description are only some embodiments of the invention, for this
For the those of ordinary skill in field, without creative efforts, it can also be obtained according to these attached drawings other
Attached drawing.
Fig. 1 is that a kind of optical path of the diplopore heterodyne ineterferometer based on acousto-optic low frequency differences phase shift provided in an embodiment of the present invention is shown
It is intended to；
Fig. 2 is the signal form schematic diagram of acquisition provided in an embodiment of the present invention.
Specific embodiment
With reference to the attached drawing in the embodiment of the present invention, technical solution in the embodiment of the present invention carries out clear, complete
Ground description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.Based on this
The embodiment of invention, every other implementation obtained by those of ordinary skill in the art without making creative efforts
Example, belongs to protection scope of the present invention.
The embodiment of the present invention provides a kind of diplopore heterodyne ineterferometer based on acousto-optic low frequency differences phase shift, and light channel structure is as schemed
Shown in 1, specifically include that laser, two blocks of half-wave plates, polarization spectroscope PBS, two acousto-optic frequency shifters, two fiber couplers,
Two polarization maintaining optical fibres, two spectroscopes, collimating mirror, standard mirror, mirror to be measured, filtering hole, two imaging lens and two detectors；Its
In:
Laser emitting laser injects PBS after half-wave plate 1, and incident laser is divided into two bundles laser by PBS；Wherein one
Shu Jiguang is coupled into polarization maintaining optical fibre 1 by fiber coupler 1 after acousto-optic frequency shifters 1；Another beam of laser successively passes through half-wave
Polarization maintaining optical fibre 2 is coupled by fiber coupler 2 after piece 2 and acousto-optic frequency shifters 2；
By adjusting the inclination of standard mirror and mirror to be measured, the laser for being emitted polarization maintaining optical fibre 2 passes sequentially through spectroscope 1, standard
Mirror to be measured is injected after straight mirror and standard mirror, the backtracking after mirror to be measured reflection, and the mirror 1 that is split reflexes to filtering hole；Make to protect
The laser of 1 outgoing of polarisation fibre injects standard mirror after passing sequentially through spectroscope 1 and collimating mirror, the backtracking after the reflection of standard mirror,
And the mirror 1 that is split reflexes to filtering hole；
The two beam laser for injecting filtering hole are divided into two-way after spectroscope 2；Wherein optical path is monitored as adjustment all the way,
It is injected in detector 1 by imaging lens 1；Another way is injected in detector 2 as acquisition interference pattern optical path by imaging lens 2.
In the embodiment of the present invention, incident laser is divided into two bundles laser according to any power ratio by the PBS.
In the embodiment of the present invention, the half-wave plate 2 for changing laser polarization direction so that two beams pass through acousto-optic frequency translation
Laser polarization direction after device is consistent.
In the embodiment of the present invention, the shift frequency amount of two acousto-optic frequency shifters is different, is several hertz or tens hertz amounts after difference frequency
The low difference frequency of grade.
In the embodiment of the present invention, the end of the polarization maintaining optical fibre 1 and polarization maintaining optical fibre 2 is fixed by fixed module, it is ensured that two
The exit direction of Shu Jiguang is consistent, and horizontal space has certain dislocation.
In the embodiment of the present invention, the two beam laser acquired in interference pattern optical path pass through fiber exit, and corrugated is believed that ideal
The face type of corrugated, respective carrier's standard mirror and mirror to be measured is interfered, and the face of mirror to be measured can be obtained by solving interference pattern
Type.
Resolution principle is as follows:
If the frequency of two-beam is respectively ν after shift frequency1And ν2, frequency difference ν1-ν2For hertz or tens hertz of magnitudes, high speed phase
Machine uses hundreds of hertz of magnitudes, therefore can accurately detect the beat signal of heterodyne.If the light intensity of two-beam is all E, then at a high speed
The interference signal S (t) of the variation of t at any time of some acquisition on camera (detector) is indicated are as follows:
Wherein, L be polarization maintaining optical fibre 2 be emitted laser back and forth mirror surface to be measured when relative to polarization maintaining optical fibre 1 be emitted laser
The light path more walked, R are the shaggy relief volume of mirror to be measured, and c is the light velocity.One on a little corresponding tested surface of high speed camera
Point, one group of face battle array photo of camera continuous acquisition, as one group of data cube, it is more than one that the value of corresponding identical every bit, which extracts,
String periodic signal, the as form of S (t), as shown in Figure 2.R of the difference due to coarse fluctuating it can be seen from signal form
Value is different, causes the signal phase that corresponding points detect on camera different.It can using Fourier analysis or other data processing methods
The phase for often pointing out signal is resolved, can be obtained the relief volume on mirror surface to be measured, for the Fourier analysis of different frequency
Different interference informations is obtained respectively.Calculate separately face shape of the difference with regard to resilient mirror to be measured out of the R value of every consecutive points.
In the above scheme of the embodiment of the present invention, using acousto-optic frequency shifters difference interference phase shift, detector continuous acquisition is same
The problem of one optical path interference pattern, there is no multi-frame interferometry pattern registrations, measurement accuracy further increases；In addition, using low frequency differences
Difference interference and high speed camera continuous acquisition, the information content of acquisition is richer, be more advantageous to it is accurate resolve phase, be more advantageous to gram
Take the influence of the factors such as noise.
The foregoing is only a preferred embodiment of the present invention, but scope of protection of the present invention is not limited thereto,
Within the technical scope of the present disclosure, any changes or substitutions that can be easily thought of by anyone skilled in the art,
It should be covered by the protection scope of the present invention.Therefore, protection scope of the present invention should be with the protection model of claims
Subject to enclosing.
Claims (5)
1. a kind of diplopore heterodyne ineterferometer based on acousto-optic low frequency differences phase shift characterized by comprising laser, two pieces of half-waves
Piece, polarization spectroscope, two acousto-optic frequency shifters, two fiber couplers, two polarization maintaining optical fibres, two spectroscopes, collimating mirror, marks
Quasi- mirror, mirror to be measured, filtering hole, two imaging lens and two detectors；Wherein:
Laser emitting laser injects polarization spectroscope after half-wave plate 1, is divided into two bundles incident laser by polarization spectroscope
Laser；Wherein beam of laser is coupled into polarization maintaining optical fibre 1 by fiber coupler 1 after acousto-optic frequency shifters 1；Another beam of laser according to
It is secondary that polarization maintaining optical fibre 2 is coupled by fiber coupler 2 after half-wave plate 2 and acousto-optic frequency shifters 2；
By adjusting the inclination of standard mirror and mirror to be measured, the laser for being emitted polarization maintaining optical fibre 2 passes sequentially through spectroscope 1, collimating mirror
With mirror to be measured is injected after standard mirror, through mirror to be measured reflection after backtracking, and the mirror 1 that is split reflex to filtering hole；Make polarization-maintaining light
The laser of 1 outgoing of fibre injects standard mirror after passing sequentially through spectroscope 1 and collimating mirror, the backtracking after the reflection of standard mirror, and by
Spectroscope 1 reflexes to filtering hole；
The two beam laser for injecting filtering hole are divided into two-way after spectroscope 2；Wherein pass through all the way as adjustment monitoring optical path
Imaging lens 1 are injected in detector 1；Another way is injected in detector 2 as acquisition interference pattern optical path by imaging lens 2.
2. the diplopore heterodyne ineterferometer according to claim 1 based on acousto-optic low frequency differences phase shift, which is characterized in that described inclined
Incident laser is divided into two bundles laser according to any power ratio by vibration spectroscope.
3. the diplopore heterodyne ineterferometer according to claim 1 based on acousto-optic low frequency differences phase shift, which is characterized in that described half
Wave plate 2 for changing laser polarization direction so that laser polarization direction of two beams after acousto-optic frequency shifters is consistent.
4. the diplopore heterodyne ineterferometer according to claim 1 based on acousto-optic low frequency differences phase shift, which is characterized in that two sound
The shift frequency amount of optical frequency shifter is different, is the low difference frequency of several hertz or tens hertz magnitudes after difference frequency.
5. the diplopore heterodyne ineterferometer according to claim 1 based on acousto-optic low frequency differences phase shift, which is characterized in that the guarantor
Polarisation fibre 1 and the end of polarization maintaining optical fibre 2 are fixed by fixed module, it is ensured that the exit direction of two beam laser is consistent, and laterally
There is certain dislocation in space.
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| CN109100026B (en) * | 2018-07-19 | 2020-10-20 | 西安电子科技大学 | Device and method for inhibiting phase-dropping effect in heterodyne detection based on CCD camera |
| CN109375379A (en) * | 2018-11-26 | 2019-02-22 | 北京科技大学 | A kind of laser interferencefringes transmitter |
| CN112255640B (en) * | 2020-09-11 | 2023-11-10 | 北京空间机电研究所 | Variable-frequency differential laser interference ranging device capable of adaptively adjusting light path |
| CN112484648B (en) * | 2020-11-18 | 2022-06-10 | 北京华卓精科科技股份有限公司 | Displacement measurement system and method for heterodyne optical fiber interferometer |
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