CN110017793B - Double-channel anti-vibration interference measurement device and method - Google Patents
Double-channel anti-vibration interference measurement device and method Download PDFInfo
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- CN110017793B CN110017793B CN201910285098.2A CN201910285098A CN110017793B CN 110017793 B CN110017793 B CN 110017793B CN 201910285098 A CN201910285098 A CN 201910285098A CN 110017793 B CN110017793 B CN 110017793B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/02075—Reduction or prevention of errors; Testing; Calibration of particular errors
Abstract
The invention discloses a double-channel anti-vibration interference measuring device and a method, wherein the device comprises a light source beam expanding and collimating system, an auxiliary interference measuring system, a main interference measuring system and a measured piece optical path system, wherein the light source beam expanding and collimating system is used for expanding and collimating a light source, the auxiliary interference measuring system is used for detecting a vibration phase plane of a measured piece, the main interference measuring system is used for measuring the phase distribution of the measured piece by combining the auxiliary interference measuring system; the light source beam expanding collimation system and the measured piece light path system have the same optical axis and are marked as a first optical axis, and the optical axes of the auxiliary interference measurement system and the main interference measurement system are respectively marked as a second optical axis and a third optical axis which are both vertical to the first optical axis; the light source beam expanding collimation system, the main interference measurement system and the measured piece light path system form a main Taemann-Green interference light path; the light source beam expanding collimation system, the auxiliary interference measurement system and the measured piece light path system form an auxiliary Taeman-Green interference light path. The device and the method have the advantages of good anti-vibration effect, high measurement precision, simple and compact structure and lower cost.
Description
Technical Field
The invention belongs to the field of optical interference measurement testing, and particularly relates to a double-channel anti-vibration interference measuring device and method.
Background
Optical interferometry is widely used today to measure the surface shape of an optical element, and conventional optical interferometers and measurement methods are various, such as michelson interferometers, tayman interferometers, fizeau interferometers and other devices, and phase-shift interferometry, fourier transform interferometry, misalignment interferometry, heterodyne interferometry and other measurement techniques. However, these methods have been developed so far, and the requirements for the measurement environment are very strict, and especially, the measured phase cannot be accurately measured in the vibration environment.
The existing interference device and the existing measuring method with better robustness to the environmental vibration are mainly divided into two categories, one category is to solve the vibration problem from a data processing algorithm, the scheme does not change on the interference device, normally collects a series of interference patterns, and calculates the error caused by the environmental vibration by the data processing algorithm, so that the phase calculation is more accurate. There are many data processing algorithms in this type of method, but measurement errors can be manifested when the number of fringes of the interferogram is small, especially for zero-fringe interferograms. The fizeau type interference device has a certain anti-vibration effect, interference light beams are divided into four beams behind the optical path, different phase shift quantities are introduced into each beam through a polarizing device, four pairs of phase shift interferograms can be acquired simultaneously, and the influence of vibration on measurement can be effectively overcome. In such a scheme, the spatial relative position relationship between the phase-shift maps is unknown, and the relative position of the phase-shift maps lacks a mature and reliable calibration technology, which easily causes position matching errors and affects the measurement accuracy.
Disclosure of Invention
The invention aims to provide a double-channel anti-vibration interference measurement device and a double-channel anti-vibration interference measurement method, which overcome the influence caused by environmental vibration during interference measurement and improve the measurement precision.
The technical solution for realizing the purpose of the invention is as follows: a dual-channel anti-vibration interferometry device comprises the following components in sequence: the system comprises a light source beam expanding and collimating system, an auxiliary interference measurement system, a main interference measurement system and a measured piece optical path system, wherein the light source beam expanding and collimating system is used for carrying out beam expanding and collimating on a light source;
the light source beam expanding collimation system and the measured piece light path system have the same optical axis and are marked as a first optical axis, and the optical axes of the auxiliary interference measurement system and the main interference measurement system are respectively marked as a second optical axis and a third optical axis which are both vertical to the first optical axis; the light source beam expanding collimation system, the main interference measurement system and the measured piece light path system form a main Taemann-Green interference light path; the light source beam expanding collimation system, the auxiliary interference measurement system and the measured piece light path system are assisted to form a Thyman-Green interference light path.
The measuring method based on the double-channel anti-vibration interference measuring device comprises the following steps:
step 1, a light source beam expanding collimation system emits linearly polarized light, and an auxiliary interference measurement system transmits and reflects the linearly polarized light;
step 2, the main interference measurement system divides the transmitted light in the step 1 into orthogonal p light and s light, and the s light forms first reference light orthogonal to the original s light through the main interference measurement system; the p light forms test light through a tested piece light path system and is reflected and transmitted through the main interference measurement system to respectively obtain first test light and second test light;
step 3, the reflected light of the step 1 is reflected by an auxiliary interference measurement system to form second reference light;
step 4, combining the first test light and the first reference light through a main interference measurement system and generating interference, adjusting a light path system of a measured piece to enable interference fringes to be sparse, and then collecting a corresponding interference image sequence; meanwhile, the second test light and the second reference light are combined through the auxiliary interference measurement system and generate interference, the auxiliary interference measurement system is adjusted to enable interference fringes to be dense, and then a corresponding interference image sequence is acquired;
and 5, resolving the phase distribution of the measured piece according to the interferogram obtained in the step 4.
Compared with the prior art, the invention has the following remarkable advantages: 1) the invention adopts a double-channel Thyman-Green interference device and a measuring method, can simultaneously acquire two-channel interference signals, one path of interference signals is used for resolving a vibration plane, the other path of interference signals is used for resolving a measured phase, effective and rapid measurement can be realized, and the influence of vibration in measurement can be overcome; 2) the device of the invention can not only solve the influence of environmental vibration on measurement, but also has simple and compact structure, skillful and understandable measurement method and low cost.
The present invention is described in further detail below with reference to the attached drawing figures.
Drawings
FIG. 1 is a schematic structural diagram of a dual-channel anti-vibration interferometry device of the present invention.
FIG. 2 is an interferogram acquired by the dominant interferometry system in an embodiment of the present invention.
FIG. 3 is an interferogram acquired by the auxiliary interferometry system in an embodiment of the present invention.
Fig. 4 is a schematic diagram of the phase distribution of the optical element measured by the scheme of the invention in the embodiment of the invention.
FIG. 5 is a schematic diagram of the phase distribution of the same optical element measured by the conventional four-step phase-shifting scheme according to the embodiment of the present invention.
Detailed Description
With reference to fig. 1, the dual-channel anti-vibration interferometry device of the present invention comprises: a light source beam expanding and collimating system 24 for expanding and collimating the light source, an auxiliary interference measurement system 25 for detecting the vibration phase plane of the measured piece, a main interference measurement system 27 for measuring the phase distribution of the measured piece by combining the auxiliary interference measurement system 25, and a measured piece optical path system 28;
the light source beam expanding collimation system 24 and the measured piece light path system 28 have the same optical axis and are marked as a first optical axis, and the optical axes of the auxiliary interference measurement system 25 and the main interference measurement system 27 are respectively marked as a second optical axis and a third optical axis which are both vertical to the first optical axis; the light source beam expanding collimation system 24, the main interference measurement system 27 and the measured piece light path system 28 form a main Taeman-Green interference light path; the light source beam expanding collimation system 24, the auxiliary interference measurement system 25 and the measured piece light path system 28 form an auxiliary Taeman-Green interference light path.
Further, the light source beam expanding and collimating system 24 comprises a laser assembly 1, a half-wave plate 2, a first objective lens 3, a first diaphragm 4 and a second objective lens 5 which are sequentially arranged along a first optical axis; the laser component 1 comprises a linear polarization laser or comprises a laser and a polarizer;
the main interference measurement system 27 comprises a first standard reference mirror 12, a first quarter wave plate 13, a polarization beam splitter prism 7, a first polarizing plate 18, a first beam reduction imaging system consisting of a third objective lens 19, a second diaphragm 20 and a fourth objective lens 21, and a first area array detector 23 which are sequentially arranged along a third optical axis;
the auxiliary interferometry system 25 comprises a second standard reference mirror 11, a beam splitting prism 6, a second polaroid 14, a second beam reduction imaging system consisting of a fifth objective lens 15, a third diaphragm 16 and a sixth objective lens 17, and a second planar array detector 22 which are sequentially arranged along a second optical axis;
the polarization beam splitter prism 7 and the beam splitter prism 6 are positioned on the first optical axis at the same time; the second standard reference mirror 11 and the first standard reference mirror 12 are fixed on the same adjusting frame 26, and the adjusting frame 26 is used for adjusting the inclination angle of the reference mirror;
the measured element optical path system 28 includes a second quarter-wave plate 8, a converging objective lens group 9 and a measured element 10 which are sequentially arranged along the first optical axis.
Further preferably, the light beam incident on the polarization beam splitter prism 7 is split into a transmitted p-wave and a reflected s-wave, the fast axis of the first quarter-wave plate 13 makes an angle of 45 ° with the s-wave, and the fast axis of the second quarter-wave plate 8 makes an angle of 22.5 ° with the p-wave.
Further preferably, the first and second area array detectors 23 and 22 are CCD or CMOS cameras.
The measuring method based on the double-channel anti-vibration interference measuring device comprises the following steps:
step 1, a light source beam expanding collimation system 24 emits linearly polarized light, and an auxiliary interference measurement system 25 transmits and reflects the linearly polarized light;
step 2, the main interference measurement system 27 divides the transmitted light in the step 1 into orthogonal p light and s light, and the s light forms a first reference light orthogonal to the original s light through the main interference measurement system 27; the p light forms test light through a tested piece light path system 28 and is reflected and transmitted through a main interference measurement system 27 to respectively obtain first test light and second test light;
step 3, the reflected light of step 1 is reflected by the auxiliary interference measurement system 25 to form second reference light;
step 4, combining the first test light and the first reference light through a main interference measurement system 27 to generate interference, adjusting a light path system 28 of the measured piece to make interference fringes sparse, and then collecting a corresponding interference image sequence; meanwhile, the second test light and the second reference light are combined through the auxiliary interference measurement system 25 and generate interference, the auxiliary interference measurement system 25 is adjusted to enable interference fringes to be dense, and then a corresponding interference image sequence is acquired;
and 5, resolving the phase distribution of the measured piece 10 according to the interferogram obtained in the step 4.
Further, step 1 specifically comprises:
the linear polarization laser 1, the half-wave plate 2, the first objective lens 3, the first diaphragm 4 and the second objective lens 5 which are arranged in sequence form a light source beam expanding collimation system 24 for emitting linear polarization light, the linear polarization light is incident to a beam splitter prism 6 of an auxiliary interference measurement system 25, and the beam splitter prism 6 transmits and reflects the linear polarization light.
Further, step 2 specifically comprises:
the polarization beam splitter prism 7 of the main interference measurement system 27 splits the transmitted light of step 1 into orthogonal p light and s light;
then, the s light becomes circularly polarized light through the first quarter-wave plate 13, and then is reflected by the first standard reference mirror 12, the first quarter-wave plate 13 forms first reference light orthogonal to the original s light, and the first reference light is incident to the polarization beam splitter 7 and then is transmitted;
the p light becomes elliptical polarized light through the second quarter-wave plate 8, the elliptical polarized light passes through the converging objective lens group 9 and then is reflected by the tested piece 10 to become test light, the test light original path returns to become linearly polarized light through the quarter-wave plate 8 and is incident to the polarization beam splitter prism 7, and the included angle between the linearly polarized light and the p light is 45 degrees; the polarization beam splitter prism 7 reflects and transmits the linearly polarized light, the reflected light beam is marked as first test light, and the transmitted light beam is marked as second test light.
Further, step 3 specifically comprises: the reflected light of the step 1 is reflected by the second standard reference mirror 11 and is transmitted to the beam splitter prism 6 to form second reference light.
Further, step 4 specifically includes:
the first test light and the first reference light are combined by the polarization beam splitter prism 7, interfered by the first polaroid 18, and then incident to the target surface of the first area array detector 23 through a first beam reduction imaging system consisting of a third objective lens 19, a second diaphragm 20 and a fourth objective lens 21; in the process, the contrast of interference pattern fringes received by the first area array detector 23 is adjusted by adjusting the half-wave plate 2 and the first polaroid 18, the optical path system 28 of the detected piece is adjusted to make the interference fringes sparse, and then a corresponding interference image sequence is acquired;
the second reference light and the second test light are combined by the beam splitter prism 6, generate interference by the second polaroid 14, and then enter the target surface of the second area array detector 22 through a second beam reduction imaging system consisting of the fifth objective lens 15, the third diaphragm 16 and the sixth objective lens 17; in the process, the contrast of interference pattern fringes received by the second area array detector 22 is adjusted by adjusting the half-wave plate 2 and the second polaroid 14, the interference fringes are dense by adjusting the inclination of the second standard reference mirror 11 through the adjusting frame 26, and then a corresponding interference image sequence is acquired.
Further, in step 5, the phase distribution of the measured object 10 is calculated according to the interferogram obtained in step 4, specifically:
step 5-1, solving the phase of each interference pattern acquired by the second area array detector 22 by utilizing a Fourier transform method
Where N is 1,2,3, …, N is the total number of interferograms collected by the second area array detector 22;
step 5-2, solving the phase of each interference pattern
The corresponding vibration phase surface of the piece to be measured relative to the second standard reference mirror 11
The formula used is:
in the formula (I), the compound is shown in the specification,
is the phase of the first interferogram;
step 5-3, according to the vibration phase plane
Obtaining a noiseless vibration phase plane Pn(x,y)：
Pn(x,y)＝αnx+βny+γn
in the formula, αn、βn、γnAre coefficients, which are fitted by the least square method
Obtaining;
and 5-4, acquiring an interference pattern light intensity expression by the main interference measurement channel as follows:
In＝a(x,y)+b(x,y)cos(φ(x,y)+Pn(x,y))
wherein a (x, y) is background light intensity, and b (x, y) is modulation amplitude;
binding of InAnd Pn(x, y), and solving the phase phi (x, y) of the piece to be detected by using a least square solution phase method.
The present invention will be described in further detail with reference to examples.
Examples
In this embodiment, in the dual-channel anti-vibration interferometric device, the light source laser 1 is a he-ne laser with an output power of 5mw, the wavelength is 632.8nm, the beam diameter is 10mm after passing through the beam expanding and collimating system 24, the effective focal length of the converging objective lens group 9 is 50mm, the device to be measured 10 is a concave lens, the curvature radius of the concave lens is 125mm, the clear aperture is 25mm, the focal lengths of the fifth lens 15 and the sixth objective lens 17 are 150mm and 75mm, the focal lengths of the third lens 19 and the fourth objective lens 21 are 150mm and 75mm, the sampling pixels of the second area array detector 22 and the first area array detector 23 are 1920 × 1200, and the pixel size is 5.8 um.
The measurement is performed by the above device, a secondary interference fringe pattern acquired by the main interference measurement system is shown in fig. 2, a interference fringe pattern acquired by the auxiliary interference measurement system 25 is shown in fig. 3, a group of interference patterns are obtained in total, the group of interference patterns is used to calculate the phase distribution of the concave mirror 10 to be measured, which is shown in fig. 4, PV is 0.3306 λ, and RMS is 0.0578 λ; the phase distribution of the same concave mirror 10 is measured using a conventional synchronized phase shifting scheme as shown in fig. 5, where PV is 0.3718 λ and RMS is 0.0594 λ.
Fig. 4 and 5 show approximately the same phase distribution, thereby verifying the correctness of the measurement of the invention. However, the conventional synchronous phase shifting scheme has the problem of inconsistent contrast of the four phase shifting diagrams, thereby causing a fringe error, for example, the phase in fig. 5 has an obvious fringe error, and the fringe error in fig. 4 does not have a fringe error caused by vibration.
Therefore, compared with the traditional scheme, the device and the method have the advantages of good anti-vibration effect, high measurement precision, simple and compact structure and lower cost.
Claims (10)
1. The utility model provides a binary channels formula anti-vibration interferometry device which characterized in that, including setting gradually: the system comprises a light source beam expanding and collimating system (24) for expanding and collimating the light source, an auxiliary interferometry system (25) for detecting the vibration phase plane of the measured piece, a main interferometry system (27) for measuring the phase distribution of the measured piece by combining the auxiliary interferometry system (25), and a measured piece optical path system (28);
the light source beam expanding collimation system (24) and the optical path system (28) of the measured piece have the same optical axis and are marked as a first optical axis, and the optical axes of the auxiliary interference measurement system (25) and the main interference measurement system (27) are respectively marked as a second optical axis and a third optical axis which are both vertical to the first optical axis; the light source beam expanding collimation system (24), the main interference measurement system (27) and the measured piece light path system (28) form a main Taemann-Green interference light path; the light source beam expanding collimation system (24), the auxiliary interference measurement system (25) and the measured piece light path system (28) form an auxiliary Taeman-Green interference light path;
the main interference measurement system (27) comprises a first standard reference mirror (12), a first quarter-wave plate (13), a polarization beam splitter prism (7), a first polaroid (18), a first beam reduction imaging system and a first area array detector (23), wherein the first standard reference mirror (12), the first quarter-wave plate (13), the polarization beam splitter prism (7), the first polaroid (18), the first beam reduction imaging system and the first area array detector are sequentially arranged along a third optical axis;
the auxiliary interferometry system (25) comprises a second standard reference mirror (11), a beam splitting prism (6), a second polaroid (14), a second beam reduction imaging system and a second area array detector (22), wherein the second standard reference mirror, the beam splitting prism (6), the second polaroid (14), the second beam reduction imaging system and the second area array detector are sequentially arranged along a second optical axis;
the polarization beam splitter prism (7) and the beam splitter prism (6) are positioned on a first optical axis simultaneously; the second standard reference mirror (11) and the first standard reference mirror (12) are fixed on the same adjusting frame (26), and the adjusting frame (26) is used for adjusting the inclination angle of the reference mirror.
2. The dual-channel anti-vibration interferometry device according to claim 1, wherein the light source beam expanding and collimating system (24) comprises a laser assembly (1), a half-wave plate (2), a first objective lens (3), a first diaphragm (4) and a second objective lens (5) arranged in sequence along a first optical axis; the laser assembly (1) comprises a linearly polarized laser, or comprises a laser and a polarizer;
the measured piece optical path system (28) comprises a second quarter-wave plate (8), a convergence objective lens group (9) and a measured piece (10) which are sequentially arranged along a first optical axis.
3. The dual-channel anti-vibration interferometry device according to claim 2, wherein the light beam incident on the polarizing beam splitter prism (7) is split into a transmitted p-wave and a reflected s-wave, the fast axis of the first quarter-wave plate (13) is at an angle of 45 ° to the s-wave, and the fast axis of the second quarter-wave plate (8) is at an angle of 22.5 ° to the p-wave.
4. The dual-channel anti-vibration interferometry device according to claim 3, wherein the first and second area-array detectors (23, 22) are CCD or CMOS cameras.
5. The measuring method of the dual-channel anti-vibration interferometry device based on claim 1, comprising the steps of:
step 1, a light source beam expanding collimation system (24) emits linearly polarized light, and an auxiliary interference measurement system (25) transmits and reflects the linearly polarized light;
step 2, the main interference measurement system (27) divides the transmitted light in the step 1 into orthogonal p light and s light, and the s light forms first reference light orthogonal to the original s light through the main interference measurement system (27); p light forms test light through a tested piece light path system (28), and the test light is reflected and transmitted through a main interference measurement system (27) to respectively obtain first test light and second test light;
step 3, the reflected light of the step 1 is reflected by an auxiliary interference measurement system (25) to form second reference light;
step 4, combining the first test light and the first reference light through a main interference measurement system (27) to generate interference, adjusting a light path system (28) of a measured piece to make interference fringes sparse, and then collecting a corresponding interference image sequence; meanwhile, the second test light and the second reference light are combined through the auxiliary interference measurement system (25) and generate interference, the auxiliary interference measurement system (25) is adjusted to enable interference fringes to be dense, and then a corresponding interference image sequence is acquired;
and 5, resolving the phase distribution of the measured piece (10) according to the interferogram obtained in the step 4.
6. The dual-channel anti-vibration interferometry method according to claim 5, wherein step 1 specifically comprises:
the linear polarization light source system comprises a light source beam expanding collimation system (24) and a beam splitting prism (6), wherein the light source beam expanding collimation system (24) is composed of a linear polarization laser (1), a half-wave plate (2), a first objective lens (3), a first diaphragm (4) and a second objective lens (5) which are sequentially arranged, linear polarization light is emitted and enters the beam splitting prism (6) of an auxiliary interference measurement system (25), and the linear polarization light is transmitted and reflected by the beam splitting prism (6).
7. The dual-channel anti-vibration interferometry method according to claim 6, wherein step 2 specifically comprises:
a polarization beam splitter prism (7) of a main interference measurement system (27) splits the transmitted light of the step (1) into orthogonal p light and s light;
then, the s light becomes circularly polarized light through the first quarter-wave plate (13), and then the circularly polarized light is reflected by the first standard reference mirror (12), the first quarter-wave plate (13) forms first reference light orthogonal to the original s light, and the first reference light is incident to the polarization beam splitter (7) and then is transmitted;
the p light becomes elliptical polarized light through the second quarter-wave plate (8), the elliptical polarized light is reflected by the tested piece (10) after passing through the converging objective lens group (9) to become test light, the test light original path returns to become linearly polarized light through the quarter-wave plate (8) and is incident to the polarization beam splitter prism (7), and the included angle between the linearly polarized light and the p light is 45 degrees; the polarization beam splitter prism (7) reflects and transmits the linearly polarized light, the reflected light beam is marked as first test light, and the transmitted light beam is marked as second test light.
8. The dual-channel anti-vibration interferometry method according to claim 7, wherein step 3 specifically comprises: the reflected light of the step 1 is reflected by a second standard reference mirror (11) and is transmitted to a beam splitter prism (6) to form second reference light.
9. The dual-channel anti-vibration interferometry method according to claim 8, wherein step 4 specifically comprises:
the first test light and the first reference light are combined through a polarization beam splitter prism (7), generate interference through a first polaroid (18), and then are incident to a target surface of a first area array detector (23) through a first beam reduction imaging system consisting of a third objective lens (19), a second diaphragm (20) and a fourth objective lens (21); in the process, the contrast of interference pattern fringes received by a first area array detector (23) is adjusted by adjusting a half-wave plate (2) and a first polaroid (18), an optical path system (28) of a tested piece is adjusted to make the interference fringes sparse, and then a corresponding interference image sequence is acquired;
the second reference light and the second test light are combined through the beam splitting prism (6), generate interference through the second polaroid (14), and then enter a target surface of the second planar array detector (22) through a second beam reduction imaging system formed by the fifth objective lens (15), the third diaphragm (16) and the sixth objective lens (17); in the process, the contrast of interference pattern fringes received by the second area array detector (22) is adjusted by adjusting the half-wave plate (2) and the second polaroid (14), the interference fringes are dense by adjusting the inclination of the second standard reference mirror (11) through an adjusting frame (26), and then a corresponding interference image sequence is acquired.
10. The dual-channel anti-vibration interferometry method according to claim 9, wherein step 5, calculating the phase distribution of the measured object (10) according to the interferogram obtained in step 4, specifically:
step 5-1, solving the phase of each interference pattern acquired by the second area array detector (22) by utilizing a Fourier transform method
Wherein N is 1,2,3, …, and N is the total number of interferograms collected by the second area array detector (22);
step 5-2, solving the phase of each interference pattern
The corresponding vibration phase plane of the piece to be measured relative to the second standard reference mirror (11)
The formula used is:
in the formula (I), the compound is shown in the specification,
is the phase of the first interferogram;
step 5-3, according to the vibration phase plane
Obtaining a noiseless vibration phase plane Pn(x,y)：
Pn(x,y)＝αnx+βny+γn
in the formula, αn、βn、γnAre coefficients, which are fitted by the least square method
Obtaining; and 5-4, acquiring an interference pattern light intensity expression by the main interference measurement channel as follows:
In＝a(x,y)+b(x,y)cos(φ(x,y)+Pn(x,y))
wherein a (x, y) is background light intensity, and b (x, y) is modulation amplitude;
binding of InAnd Pn(x, y), and solving the phase phi (x, y) of the piece to be detected by using a least square solution phase method.
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