CN102175141A - Double-channel single-frequency laser interferometer - Google Patents
Double-channel single-frequency laser interferometer Download PDFInfo
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- CN102175141A CN102175141A CN 201110006415 CN201110006415A CN102175141A CN 102175141 A CN102175141 A CN 102175141A CN 201110006415 CN201110006415 CN 201110006415 CN 201110006415 A CN201110006415 A CN 201110006415A CN 102175141 A CN102175141 A CN 102175141A
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Abstract
The invention relates to a double-channel single-frequency laser interferometer, which is characterized by comprising a double-frequency laser head, a polarization light splitting prism and two groups of same single-frequency laser interference systems; each group of single-frequency laser interference system comprises two 1/4 wave plates, a half wave plate, three polarization light splitting prisms, a depolarization light splitting prism, two angle reflectors, a reflector and four photoelectric detector, wherein one angle reflector is used as a measurement mirror and immobilized, and the other angle reflector is placed on a measurement target; and the double-frequency laser head emits orthogonal polarized linear polarization beams which are split into two beams of linear polarization light through the polarization light splitting prisms, wherein the transmitted linear polarization light is incident to the first group of single-frequency laser interference system, and the reflected linear polarization light is incident to the second group of single-frequency laser interference system. The laser interferometer can be widely applied to the occasions of measurement and positioning of a high-precision mobile station and other high-precision length metering.
Description
Technical field
The present invention relates to a kind of interferometer, particularly about a kind of two-way single frequency laser interferometer.
Background technology
Laser interferometer has been widely used in the linear measure longimetry field because its measuring accuracy height and measurement range are wide.At present industrial application more single frequency laser interferometer and two-frequency laser interferometer arranged.Early stage single frequency laser interferometer is subject to the influence of factors such as dc shift, generally only is used for the laboratory specialized equipment, and a very long time fails to be applied in industry.Be representative with RENISHAW company afterwards, solved this problem preferably, and made the single frequency laser interferometer practicality improve greatly.Compare with two-frequency laser interferometer, the structure of single frequency laser interferometer and processing of circuit are more simple, and its measuring speed on principle without limits, depend primarily on the bandwidth of amplifier and the speed of electron device, the occasion that therefore tests the speed at height possesses advantage.In the manufacturing industry, machine tool measuring not only has the demand that height tests the speed, and usually needs the displacement of surveying work platform x axle, y axle simultaneously.This generally needs two high interferometers that test the speed to finish.This makes measuring system comparatively complicated, and cost is very high.
Summary of the invention
At the problems referred to above, the purpose of this invention is to provide a kind of two-way single frequency laser interferometer that adopts a double-frequency laser head just can realize two interferometers while high speed measurement functions.
For achieving the above object, the present invention takes following technical scheme: a kind of two-way single frequency laser interferometer is characterized in that: it comprises a double-frequency laser head, the single-frequency laser interference system that a polarization splitting prism is identical with two groups; Each group single-frequency laser interference system comprises two quarter wave plates, a half-wave plate, three polarization splitting prisms, a depolarization Amici prism, two corner reflectors, a catoptron and four photodetectors, one of them corner reflector maintains static as measuring mirror, and another corner reflector is placed on the measurement target; Described double-frequency laser hair goes out the linearly polarized light beam of cross polarization, be divided into two bunch polarized lights through polarization splitting prism, wherein the linearly polarized light of transmission incides in first group of single-frequency laser interference system, and the linearly polarized light of reflection incides in second group of single-frequency laser interference system.
The present invention can also comprise a right-angle prism, described double-frequency laser hair goes out the linearly polarized light beam of cross polarization, after polarization splitting prism was divided into two bunch polarized lights, wherein the linearly polarized light of reflection through after the described right-angle prism reflection, incided in second group of single-frequency laser interference system earlier again.
Enter each light beam of organizing described single-frequency laser interference system and change into circularly polarized light through quarter wave plate, be divided into two bunch polarized lights through polarization splitting prism again, two bunch polarized lights are respectively through returning after the corner reflector reflection, once more through synthetic a branch of crossed polarized light behind the described polarization spectroscope; Described orthogonal polarized light beam is through after the mirror reflects, and incident is divided into two-beam through the depolarization Amici prism again through 45 ° of half-wave plate polarization direction rotations; Wherein a branch of light incides and is divided into two bunch polarized lights on the polarization splitting prism, and the inclined to one side line of the two bundles light that shakes is surveyed by two photodetectors; Another Shu Guang changes into the left-handed and right-circularly polarized light of a branch of stack after through a quarter wave plate, and again through being divided into two bunch polarized lights behind the polarization splitting prism, the inclined to one side line of the two bundles light that shakes is surveyed by two other photodetector.
The present invention is owing to take above technical scheme, it has the following advantages: 1, the present invention is owing to adopted the light path design of a double-frequency laser head and two groups of single-frequency laser interference systems, therefore not only can replace two interferometers that the while is carried out in the displacement of worktable x axle, y axle with an equipment measures at a high speed, can also have the object of minor rotation to carry out the measurement of displacement and corner again simultaneously in translation to one.2, the present invention is owing to be provided with two groups of single-frequency laser interference systems, therefore compares with two-way double frequency interferometer to have remarkable advantages under the application scenario that height tests the speed.3, therefore the present invention can greatly suppress common-mode noise because the photodetection signal is carried out differential processing, improves measuring accuracy and stability.The present invention can be widely used in high precision movement platform measurement and positioning and other high precision length metering occasion.
Description of drawings
Fig. 1 is a structural representation of the present invention
Fig. 2 is another embodiment of the present invention structural representation
Embodiment
As shown in Figure 1, the present invention includes a double-frequency laser head A, a polarization splitting prism B and two groups of single-frequency laser interference systems.
First group of single-frequency laser interference system of the present invention comprises quarter wave plate P1, P2, half-wave plate P3, polarization splitting prism PBS1, PBS2, PBS3, depolarization Amici prism NBS1, corner reflector CR1, CR2, mirror M 1 and photodetector D1, D2, D3, D4.
Second group of single-frequency laser interference system of the present invention comprises quarter wave plate P4, P6, half-wave plate P5, polarization splitting prism PBS4, PBS5, PBS6, depolarization Amici prism NBS2, corner reflector CR3, CR4, mirror M 2 and photodetector D5, D6, D7, D8.
The present invention sends the linearly polarized light beam of cross polarization by double-frequency laser head A, be divided into two bunch polarized lights through polarization splitting prism B, wherein the linearly polarized light of transmission incides in first group of single-frequency laser interference system, and the linearly polarized light of reflection incides in second group of single-frequency laser interference system.
After the linearly polarized light of transmission incides first group of single-frequency laser interference system, change into circularly polarized light through quarter wave plate P1 (the P1 optical axis is from the horizontal by miter angle), this circularly polarized light is divided into two bunch polarized lights through polarization splitting prism PBS1 again, two bunch polarized lights are respectively through returning after corner reflector CR1, the CR2 reflection, once more through the synthetic a branch of crossed polarized light of polarization spectroscope PBS1.Synthetic orthogonal polarized light beam has rotated 45 degree (being still orhtogonal linear polarizaiton light) through mirror M 1 reflection and incident through 1/2 wave plate P3 (the P3 optical axis is from the horizontal by 22.5 degree angles) polarization direction, is divided into two-beam through depolarization Amici prism NBS1 again.Wherein a light beam incides and is divided into two bunch polarized lights on the polarization splitting prism PBS2, and two bunch polarized lights are surveyed by photodetector D1, D2 respectively; (the P2 optical axis is parallel with horizontal line) changes into the left-handed and right-circularly polarized light of a branch of stack behind another light beam process quarter wave plate P2, and through being divided into two bundle polarized lights behind the polarization splitting prism PBS3, two bundle polarized lights are surveyed by photodetector D3, D4 respectively again.
After the linearly polarized light of reflection incides second group of single-frequency laser interference system, change into circularly polarized light through quarter wave plate P4 (the P4 optical axis is from the horizontal by miter angle), this circularly polarized light is divided into two bunch polarized lights through polarization splitting prism PBS4 again, two bunch polarized lights are respectively through returning after corner reflector CR3, the CR4 reflection, once more through the synthetic a branch of crossed polarized light of polarization spectroscope PBS4.Synthetic orthogonal polarized light beam has rotated 45 degree (being still orhtogonal linear polarizaiton light) through mirror M 2 reflections and incident through 1/2 wave plate P6 (the P6 optical axis is from the horizontal by 22.5 degree angles) polarization direction, is divided into two-beam through depolarization Amici prism NBS2 again.Wherein a light beam incides and is divided into two bunch polarized lights on the polarization splitting prism PBS5, and two bunch polarized lights are surveyed by photodetector D5, D6 respectively; (the P5 optical axis is parallel with horizontal line) changes into the left-handed and right-circularly polarized light of a branch of stack behind another light beam process quarter wave plate P5, and through being divided into two bundle polarized lights behind the polarization splitting prism PBS6, two bundle polarized lights are surveyed by photodetector D7, D8 respectively again.
When system was measured, corner reflector CR1 and corner reflector CR3 maintained static as the reference mirror, and corner reflector CR2 and corner reflector CR4 are placed on the measurement target as measuring mirror.When measurement target moved, the displacement L1 of corner reflector CR2 had introduced the optical path difference n Δ L1 (n is an air refraction) of reference arm and gage beam in the first single-frequency laser interference system.Light intensity signal I1～I4 that photodetector D1～D4 receives is:
I1＝a+b·sin(4π·n·ΔL1)]
I2＝a-b·sin(4π·n·ΔL1)]
I3＝a+b·cos(4π·n·ΔL1)]
I4＝a-b·sin(4π·n·ΔL1)]
Wherein a is the DC component of signal, and b is the AC amplitude of signal.The phase place of this four tunnel output signal differs 90 ° successively.Adopt differential signal processing method, then have:
(I1-I2)/(I3-I4)＝tan(4π·n·ΔL1)
So, obtain (I1-I2)/(I3-I4) according to output signal, can obtain the displacement L1 of CR2.
The displacement L2 of corner reflector CR4 has introduced the optical path difference n Δ L2 of reference arm and gage beam in the second single-frequency laser interference system.Light intensity signal I5～I8 that photodetector D5～D8 receives is:
I5＝a+b·sin(4π·n·ΔL2)]
I6＝a-b·sin(4π·n·ΔL2)]
I7＝a+b·cos(4π·n·ΔL2)]
I8＝a-b·sin(4π·n·ΔL2)]
The phase place of this four tunnel output signal also is to differ 90 ° successively.The differential signal processing method of same employing then has:
(I5-I6)/(I7-I8)＝tan(4π·n·ΔL2)
Obtain (I5-I6)/(I7-I8) according to output signal, can obtain the displacement L2 of CR4.
Above-mentionedly can carry out synchronously, so can be used in same object x, the two-dimensional measurement of y direction for corner reflector CR2 and corner reflector CR4 measuring process.
As shown in Figure 2, the present invention can also set up a right-angle prism C, send the linearly polarized light beam of cross polarization by double-frequency laser head A like this, behind polarization splitting prism B, be divided into two bunch polarized lights, wherein the linearly polarized light of transmission incides in first group of single-frequency laser interference system, and the polarized light of reflection will incide in second group of single-frequency laser interference system more earlier through after the right-angle prism C reflection.Present embodiment can realize again having displacement and the corner of the object W of minor rotation to measure simultaneously to one in translation.The translation displacement that can obtain object W according to the Δ L1 that measures and Δ L2 is (Δ L1+ Δ L2)/2, and the rotational angle of object D is (Δ L1-Δ L2)/Lm, and wherein Lm is two spacings between the measuring position.
The various embodiments described above only are used to illustrate the present invention; wherein the structure of each parts, connected mode etc. all can change to some extent; particularly on the composition and light path design of each group single-frequency laser interference system; both can adopt the setting of existing other interference system; other variation also can be arranged; these all should not got rid of outside protection scope of the present invention based on equivalents on the inventive concept basis and improvement.
Claims (3)
1. two-way single frequency laser interferometer, it is characterized in that: it comprises a double-frequency laser head, the single-frequency laser interference system that a polarization splitting prism is identical with two groups; Each group single-frequency laser interference system comprises two quarter wave plates, a half-wave plate, three polarization splitting prisms, a depolarization Amici prism, two corner reflectors, a catoptron and four photodetectors, one of them corner reflector maintains static as measuring mirror, and another corner reflector is placed on the measurement target; Described double-frequency laser hair goes out the linearly polarized light beam of cross polarization, be divided into two bunch polarized lights through polarization splitting prism, wherein the linearly polarized light of transmission incides in first group of single-frequency laser interference system, and the linearly polarized light of reflection incides in second group of single-frequency laser interference system.
2. a kind of two-way single frequency laser interferometer as claimed in claim 1, it is characterized in that: it also comprises a right-angle prism, described double-frequency laser hair goes out the linearly polarized light beam of cross polarization, after polarization splitting prism is divided into two bunch polarized lights, wherein the linearly polarized light of reflection through after the described right-angle prism reflection, incides in second group of single-frequency laser interference system earlier again.
3. a kind of two-way single frequency laser interferometer as claimed in claim 1 or 2, it is characterized in that: enter each light beam of organizing described single-frequency laser interference system and change into circularly polarized light through quarter wave plate, be divided into two bunch polarized lights through polarization splitting prism again, two bunch polarized lights are respectively through returning after the corner reflector reflection, once more through synthetic a branch of crossed polarized light behind the described polarization spectroscope; Described orthogonal polarized light beam is through after the mirror reflects, and incident is divided into two-beam through the depolarization Amici prism again through 45 ° of half-wave plate polarization direction rotations; Wherein a branch of light incides and is divided into two bunch polarized lights on the polarization splitting prism, and the inclined to one side line of the two bundles light that shakes is surveyed by two photodetectors; Another Shu Guang changes into the left-handed and right-circularly polarized light of a branch of stack after through a quarter wave plate, and again through being divided into two bunch polarized lights behind the polarization splitting prism, the inclined to one side line of the two bundles light that shakes is surveyed by two other photodetector.
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| CN103697807A (en) * | 2013-12-13 | 2014-04-02 | 清华大学 | Double-frequency laser displacement and angle interferometer |
| CN104897048A (en) * | 2015-06-12 | 2015-09-09 | 哈尔滨工业大学 | Quadrature error-free single-path polarization interference and double-Wollaston prism light-splitting type homodyne laser vibration meter |
| CN104930967A (en) * | 2015-06-03 | 2015-09-23 | 清华大学 | Orthogonal polarization laser feedback interferometer |
| CN105004273A (en) * | 2015-06-29 | 2015-10-28 | 华中科技大学 | Laser interference displacement measuring system |
| CN105043245A (en) * | 2015-05-29 | 2015-11-11 | 北方民族大学 | Contrast type anti-interference plane reflector laser interferometer, calibration method and measurement method |
| CN106017333A (en) * | 2016-07-22 | 2016-10-12 | 浙江理工大学 | Phase modulation based dual-laser single-frequency interference nanometer displacement measurement device and method |
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