WO2015085694A1 - Double-frequency laser displacement and angle interferometer - Google Patents

Double-frequency laser displacement and angle interferometer Download PDF

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Publication number
WO2015085694A1
WO2015085694A1 PCT/CN2014/075960 CN2014075960W WO2015085694A1 WO 2015085694 A1 WO2015085694 A1 WO 2015085694A1 CN 2014075960 W CN2014075960 W CN 2014075960W WO 2015085694 A1 WO2015085694 A1 WO 2015085694A1
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Prior art keywords
prism
beam splitting
conversion unit
photoelectric conversion
angle
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PCT/CN2014/075960
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French (fr)
Chinese (zh)
Inventor
赵世杰
李岩
尉昊赟
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清华大学
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Publication of WO2015085694A1 publication Critical patent/WO2015085694A1/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02007—Two or more frequencies or sources used for interferometric measurement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02017—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations
    • G01B9/02019—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations contacting different points on same face of object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/15—Cat eye, i.e. reflection always parallel to incoming beam
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Definitions

  • the present invention relates to the field of precision displacement measurement and angle measurement, and in particular to a dual-frequency laser displacement and angle interferometer.
  • dual-frequency laser interferometers In measuring multi-axis motion errors of high-precision CNC machine tool guides, dual-frequency laser interferometers have been widely used due to their advantages of high resolution, high precision, high speed, good repeatability, and large range.
  • the schematic diagram of the angle measurement of the traditional dual-frequency laser interferometer is shown in Figure 1.
  • the dual-frequency laser is dry.
  • the dual-frequency orthogonally polarized laser light emitted by the instrument is divided into two beams by the polarization beam splitter 101 according to the polarization direction, wherein the light having a polarization state parallel to the YZ plane frequency is transmitted through the polarization beam splitter 101 to the corner cube prism 103;
  • Light having a frequency of / 2 parallel to the XY plane is reflected by the polarization beam splitting prism 101, passes through the mirror 102, and is incident on the corner cube prism 104.
  • the light beams respectively reflected by the two corner cubes are received by the photoreceiver 105, and the double-corner prism group C1 is placed on the object to be measured.
  • the beat frequency ⁇ / 2 is constant.
  • the angle output value does not change. If the corner cube is tilted around the X-axis during the movement, the two-corner prism will produce a relative displacement ⁇ in the x-axis direction, so the angle change obtained is:
  • Z is the angular spacing of the corner cubes 103 and 104.
  • the scheme has no optical subdivision, and the fundamental problem is that the displacement information corresponding to the current angle cannot be obtained.
  • the angle error cannot be accurate. Position to the rail.
  • An object of the present invention is to provide a dual-frequency laser displacement and angle interferometer, which solves the problem that the existing dual-frequency laser interferometer has no displacement information, has high measurement sensitivity, compact mechanism, simple assembly, and can be widely applied to geometry. The amount of precision measurement.
  • a dual-frequency laser displacement and angle interferometer includes a dual-frequency laser, a partial reflection beam splitter 2, an interference component 8, a double-range component B, and a left-to-right sequence.
  • the target mirror assembly C further includes a first photoelectric conversion unit D1, a second photoelectric conversion unit D2, a third photoelectric conversion unit D3, and is connected to the first photoelectric conversion unit D1, the second photoelectric conversion unit D2, and the third photoelectric conversion unit D3.
  • Phase measurement module 14 14.
  • the dual-frequency laser 1 can output an orthogonally polarized frequency-stabilized dual-frequency laser, and the output light is a polarization state parallel to the YZ plane, that is, a P-polarized light and a polarization state parallel to the XY plane, ie, a 2 polarization, ie, an S polarization. State light.
  • the partial reflection beam splitter 2 may be composed of two right-angle prisms bonded along a slope, and a non-polarized portion reflection spectroscopic film is plated on the slope of the right-angle prism.
  • the interference component A may include a first corner cube 3, a first quarter wave plate 4, a non-polarization beam splitting prism 5, and a first polarization beam splitting prism 6, which are disposed in order from top to bottom, and the non-polarization beam splitting prism 5
  • the first polarization beam splitting prism 6 is composed of two right angle prisms bonded along a slope, the upper surface of the first quarter wave plate 4 is bonded to the bottom surface of the first corner cube 3, and the lower surface is bonded to The upper right angle surface of the non-polarization beam splitting prism 5 is bonded to the upper right angle surface of the first polarization beam splitting prism 6; the upper surface of the right angle prism of the non-polarization beam splitting prism 5 is plated
  • the non-polarizing light-splitting film reaches a splitting ratio of, for example, 50:50, and a polarizing beam splitting film is plated on the inclined surface of the right-angle prism of the first polarizing beam splitting prism 6.
  • the doubling component B includes, for example, a second corner cube prism 7 disposed in order from top to bottom, a second polarization beam splitting prism 8 and a mirror 10, and the second polarization beam splitting prism 8 is composed of two right angle prisms bonded along a sloped surface.
  • the mirror 10 is a right-angled trapezoidal prism plated with a depolarizing total reflection film on a slope, the slope of which is parallel to the slope of the right-angle prism of the second polarization beam splitting prism 8, and the upper surface of the second polarization beam splitting prism 8
  • the right angle surface is bonded to the bottom surface of the second corner cube prism 7, and the lower right angle surface is bonded to the upper right angle surface of the mirror 10, and the polarizing beam splitting film is plated on the inclined surface of the right angle prism of the second polarization beam splitting prism 8
  • a second quarter-wave plate 9 bonded to the second polarization beam splitting prism 8 and the right end surface of the mirror 10 is included.
  • the target mirror assembly C includes, for example, a third corner cube prism 11 and a fourth corner cube prism 12; and may further include a corner cube prism clamping base 13, and the third triangular cone prism 11 and the fourth corner cube prism 12 may be bonded to the pyramid The prism is clamped in the base 13.
  • the three pyramidal faces of the first pyramid prism 3, the second pyramid prism 7, the triangular pyramid prism 11, and the fourth pyramid prism 12 may be plated with a total reflection film.
  • the optical axes of the first quarter wave plate 4 and the second quarter wave plate 9 are at an angle of 45° with respect to the polarization direction of the light-transmitting dual-frequency laser 1 .
  • the pupil light that is, the P light emitted by the frequency-stabilized dual-frequency laser 1 passes through the partial reflection beam splitter 2, and a part of the light of the light is reflected to the first photoelectric conversion unit D1, and the transmitted light of the /1 light is split into the equal light through the non-polarization beam splitting prism 5.
  • the strong two beams of light are reflected light and transmitted light; the reflected light passes through the first quarter wave plate in sequence 4.
  • the first corner cube 3, the first quarter wave plate 4, the non-polarization beam splitting prism 5, and the first polarization beam splitting prism 6 enter the third photoelectric conversion unit D3; the transmitted light passes through the second polarization beam splitting prism in sequence.
  • the second quarter wave plate 9 is composed of a third corner cube prism 11, a second quarter wave plate 9, a second polarization beam splitting prism 8, a second corner cube prism 7, and a second polarization beam splitting prism 8.
  • the second quarter wave plate 9, the third corner cube prism 11, the second quarter wave plate 9, the second polarization beam splitting prism 8, the non-polarizing beam splitting prism 5, and the first polarization beam splitting prism 6 enter the second Photoelectric conversion unit D2.
  • the /2 light that is, the S light, emitted by the frequency-stabilized dual-frequency laser 1 is partially reflected by the partial reflection beam splitter 2, /2 light to the first photoelectric conversion unit D1, and the transmitted light of the /2 light is divided by the non-polarization beam splitting prism 5
  • the two beams of equal intensity are reflected light and transmitted light; the reflected light passes through the first quarter wave plate 4, the first corner cube 3, the first quarter wave plate 4, and the non-polarizing beam splitting prism. 5.
  • the first polarization beam splitting prism 6 enters the second photoelectric conversion unit D2; the transmitted light sequentially passes through the second polarization beam splitting prism 8, the mirror 10, the second quarter wave plate 9, and the fourth corner cube prism 12, a second quarter wave plate 9, a mirror 10, a second polarization beam splitting prism 8, a second corner cube prism 7, a second polarization beam splitting prism 8, a mirror 10, a second quarter wave plate 9,
  • the fourth corner cube prism 12, the second quarter wave plate 9, the mirror 10, the second polarization beam splitting prism 8, the non-polarization beam splitting prism 5, and the first polarization beam splitting prism 6 enter the third photoelectric conversion unit D3.
  • the non-polarized portion reflective spectroscopic film coated on the inclined surface of the partial reflection beam splitter 2 can achieve a split ratio of, for example, 10:90.
  • the frequency-stabilized dual-frequency laser 1. Partial reflection beam splitter 2.
  • the position of component A and component B can be fixed, and component C can be mounted on the object to be tested and moved with the object to be tested.
  • the first photoelectric conversion unit D1, the second photoelectric conversion unit D2, and the third photoelectric conversion unit D3 converts the optical signal into an electrical signal and transmits it to the phase measuring module 14.
  • the phase measuring module 14 compares the phase difference variation of the electrical signals output by the first photoelectric conversion unit D1 and the second photoelectric conversion unit D2 to obtain the third corner cube prism 11
  • the displacement amount is compared with the phase difference variation of the output electrical signals of the first photoelectric conversion unit D1 and the third photoelectric conversion unit D3 to obtain the displacement amount of the fourth corner cube prism 12, and the displacement of the third triangular pyramid prism 11 and the fourth corner cube prism 12
  • the average value is obtained to obtain the displacement amount of the object to be tested; the displacement amounts of the triangular pyramid prism 11 and the fourth corner cube prism 12 are subtracted to obtain a displacement difference, and the displacement difference is divided by the third corner cube prism 11 and the fourth corner cube prism 12
  • the inverse sine is obtained to obtain the angle value of the measured object around
  • the displacement measurement is an optical eight subdivision, and the angle measurement is an optical four subdivision.
  • the problem of no displacement information is solved.
  • the angular error can be accurately positioned on the guide rail.
  • the second pyramid prism 7 and the second quarter wave plate 9 are added to make the measurement of the light doubling, and the displacement of the single horn prism is optically four subdivisions, so the angle The measurement is an optical four subdivision.
  • the displacement measurement is optical eight subdivision, and the measurement resolution is improved.
  • FIG. 1 is a schematic diagram of the principle of a conventional dual-frequency laser interferometer.
  • FIG. 2 is a schematic diagram of the principle and apparatus of a dual-frequency laser displacement and angle interferometer, in accordance with an exemplary embodiment of the present invention. detailed description
  • the present application uses spatially relative terms such as “upper”, “lower”, “left”, and “right” to describe the relationship of one element shown in the figure to another element. It should be understood that Spatial terms are meant to include different orientations of the device in use or operation, in addition to the orientation shown in the figures. For example, if the device in the figures is turned up, the elements that are described as “under” other elements will be “positioned” on other elements, and the exemplary term “lower” can encompass both the top and the bottom. The device may be otherwise positioned (rotated 90° or at other orientations) and the relative description of the space used herein may be interpreted accordingly.
  • a dual-frequency laser displacement and angle interferometer includes a dual-frequency laser, a partial reflection beam splitter 2, and an interference component eight, which are sequentially arranged from left to right.
  • the process component B and the target mirror component C further include a first photoelectric conversion unit D1, a second photoelectric conversion unit D2, a third photoelectric conversion unit D3, and a first photoelectric conversion unit D1, a second photoelectric conversion unit D2, and a third photoelectric
  • the phase measuring module 14 is connected to the conversion unit D3.
  • the frequency laser output of the laser can be frequency laser frequency stabilized orthogonally polarized output light polarization light, respectively ⁇ parallel to the YZ plane, i.e., P-polarized light and the polarization plane parallel to the XY / 2 optical i.e. S-polarized light.
  • the partial reflection beam splitter 2 may be composed of two right-angle prisms bonded along a slope, and a non-polarized portion reflection spectroscopic film is plated on the slope of the right-angle prism.
  • the interference component A may include a first corner cube 3, which is disposed in order from top to bottom, and a first four a wave plate 4, a non-polarizing beam splitting prism 5 and a first polarization beam splitting prism 6, the non-polarizing beam splitting prism 5 and the first polarizing beam splitting prism 6 are each composed of two right-angle prisms bonded along a slope, the first The upper surface of the quarter wave plate 4 is bonded to the bottom surface of the first corner cube 3, and the lower surface is bonded to the upper right angle surface of the non-polarizing beam splitting prism 5, and the lower right angle surface of the non-polarizing beam splitting prism 5 is bonded.
  • a non-polarization beam splitting film is plated on the slope of the right angle prism of the non-polarization beam splitting prism 5, for example, a split ratio of 50:50 is achieved, and the first polarization beam splitting prism is The inclined surface of the rectangular prism of 6 is plated with a polarizing beam splitting film.
  • the doubling assembly B may include a second corner cube prism 7, a second polarization beam splitting prism 8 and a mirror 10 disposed in order from top to bottom, and further includes a second end of the second polarization beam splitting prism 8 and the mirror 10 bonded to the right end The second quarter wave plate 9 of the face.
  • the second polarization beam splitting prism 8 may be composed of two right-angle prisms bonded along a sloped surface.
  • the mirror 10 is a right-angled trapezoidal prism plated with a depolarized total reflection film on a slope, and the slope and the second polarization are split.
  • the inclined surface of the right-angle prism of the prism 8 is parallel, the upper right-angled surface of the second polarization beam splitting prism 8 is bonded to the bottom surface of the second corner cube prism, and the lower right-angle surface is bonded to the upper right-angle surface of the mirror 10,
  • the inclined surface of the right-angle prism of the second polarization beam splitting prism 8 is plated with a polarization beam splitting film.
  • the target mirror assembly C includes a third corner cube prism 11 and a fourth corner cube prism 12.
  • the target mirror assembly C may further include a corner cube holding base 13, and the third triangular prism 11 and the fourth corner prism 12 may be bonded to the corner cube holding base 13.
  • the three pyramidal faces of the first pyramid prism 3, the second pyramid prism 7, the triangular pyramid prism 11, and the fourth pyramid prism 12 may be plated with a total reflection film.
  • Optical axis and frequency-stabilized dual-frequency laser of the first quarter wave plate 4 and the second quarter wave plate 9 The angle of the polarization direction of the light emitted by the device 1 is 45°.
  • the non-polarized partial reflection beam splitting film coated on the inclined surface of the partial reflection beam splitter 2 can, for example, achieve a split ratio of 10:90.
  • the frequency-stabilized dual-frequency laser 1, the partial reflection beam splitter 2, the component A and the component B are fixed in position, and the component C is mounted on the object to be tested, and moves with the object to be tested.
  • the frequency-stabilized dual-frequency laser 1 emits an orthogonally polarized laser having a frequency of / 2 , and after passing through the partial reflection beam splitter 2, a small portion of the light is reflected to the first photoelectric conversion unit D1 and converted into The electrical signal is then transmitted to the phase measuring module 14, and the transmitted light is split into two beams by a non-polarizing beam splitting prism 5, one for measurement and one for reference.
  • the measuring light is split by the double-passing component B and then vertically incident on the third corner cube prism 11 and the fourth corner cube prism 12, and returns to the reference light.
  • the combined light of the measurement light and the reference light is split by the first polarization beam splitting prism 6 and then incident on the second photoelectric conversion unit D2 and the third D3 photoelectric conversion unit to be converted into an electrical signal, and then transmitted to the phase measurement module 14.
  • the phase measuring module 14 simultaneously detects the first photoelectric conversion unit D1 and the second photoelectric conversion unit D2, the first photoelectric conversion unit D1 and the third photoelectric conversion unit
  • the amount of change in the phase difference of the D3 output electric signal is obtained by the displacement amount of the third corner cube prism 11 and the fourth corner cube prism 12, and the average amount of the displacement of the object to be measured can be measured.
  • the difference between the displacement amount of the triangular pyramid prism 11 and the fourth pyramid prism 12 and the ratio of the angular distance between the third pyramid prism 11 and the fourth pyramid prism 12 are inverse sin to obtain a small angle value of the object to be measured around the X axis. . After the optical path is placed in the XY plane, the angle of the measured object around the Z axis can be measured.

Abstract

A double-frequency laser displacement and angle interferometer comprises a frequency stabilizing double-frequency laser (1), part of reflection spectroscopes (2), an interference assembly (A), a multi-pass assembly (B) and a target mirror assembly (C) all sequentially disposed from left to right, and also comprises a first photoelectric conversion unit (D1), a second photoelectric conversion unit (D2), a third photoelectric conversion unit (D3) and a phase measurement module (14) that is connected to the first photoelectric conversion unit (D1), the second photoelectric conversion unit (D2) and the third photoelectric conversion unit (D3). The interference assembly (A) comprises a first pyramid prism (3), a first quarter-wave plate (4), a non-polarization splitting prism (5) and a first polarization splitting prism (6) all disposed from top to bottom. The multi-pass assembly (B) comprises a second pyramid prism (7), a second polarization splitting prism (8) and a reflecting mirror (10) all disposed from top to bottom. The target mirror assembly (C) comprises a pyramid prism clamping base (13), and comprises a third pyramid prism (11) and a fourth pyramid prism (12)both adhered into the pyramid prism clamping base (13). By adding the part of the interference assembly (A), the problem that displacement information does not exist is solved; by improving the part of the multi-pass assembly (B), the displacement of a single pyramid prism is optical four-subdivision, so that the angle measurement is optical four-subdivision. Therefore, the displacement measurement is optical eight-subdivision, and the measurement resolution is improved.

Description

一种双频激光位移和角度干涉仪 技术领域 本发明属于精密位移测量及角度测量领域， 具体涉及一种双频激光位移 和角度干涉仪。  FIELD OF THE INVENTION The present invention relates to the field of precision displacement measurement and angle measurement, and in particular to a dual-frequency laser displacement and angle interferometer.
说  Say
背景技术 在测量高精密数控机床导轨的多轴运动误差时， 双频激光干涉测角仪由 于高分辨率、 高精度、 高速度、 重复性好、 量程大的优势一直获得广泛的应 用。 传统双频激光干涉仪的角度测量的原理示意图如图 1所示， 双频激光干 书  BACKGROUND OF THE INVENTION In measuring multi-axis motion errors of high-precision CNC machine tool guides, dual-frequency laser interferometers have been widely used due to their advantages of high resolution, high precision, high speed, good repeatability, and large range. The schematic diagram of the angle measurement of the traditional dual-frequency laser interferometer is shown in Figure 1. The dual-frequency laser is dry.
涉仪发出的双频正交偏振激光经偏振分光镜 101按偏振方向分为两束， 其中 偏振态平行于 YZ平面频率为 Λ的光透过偏振分光镜 101射向角锥棱镜 103 ; 偏振态平行于 XY平面频率为 /2的光经过偏振分光棱镜 101反射后经过反射镜 102 后射向角锥棱镜 104。 分别由这两个角锥棱镜反射的光束由光电接收器 105接收， 双角锥棱镜组 C1安放在被测物体上， 被测物件前后移动且没有摆 动时， 拍频中 Δ /2为常数， 角度输出值不变。 如果角锥棱镜在移动过 程中绕 X轴倾斜 角， 则两角锥棱镜在 Υ轴方向将产生一个相对位移量 Δ， 因此获得的角度变化为： The dual-frequency orthogonally polarized laser light emitted by the instrument is divided into two beams by the polarization beam splitter 101 according to the polarization direction, wherein the light having a polarization state parallel to the YZ plane frequency is transmitted through the polarization beam splitter 101 to the corner cube prism 103; Light having a frequency of / 2 parallel to the XY plane is reflected by the polarization beam splitting prism 101, passes through the mirror 102, and is incident on the corner cube prism 104. The light beams respectively reflected by the two corner cubes are received by the photoreceiver 105, and the double-corner prism group C1 is placed on the object to be measured. When the object to be tested moves back and forth without swinging, the beat frequency Δ / 2 is constant. The angle output value does not change. If the corner cube is tilted around the X-axis during the movement, the two-corner prism will produce a relative displacement Δ in the x-axis direction, so the angle change obtained is:
α . . — i |(ΔΛ -Δ 2)^ α . . — i |(ΔΛ -Δ 2 )^
6' = sin — = sin  6' = sin - = sin
L L  L L
式中： Z为角锥棱镜 103和 104的棱尖间距。 该方案没有光学细分， 而且根本问题在于无法获得当前角度对应的位移 信息， 在测量高精密数控机床导轨的多轴运动误差时， 角度误差无法准确的 定位到导轨。 Where: Z is the angular spacing of the corner cubes 103 and 104. The scheme has no optical subdivision, and the fundamental problem is that the displacement information corresponding to the current angle cannot be obtained. When measuring the multi-axis motion error of the high-precision CNC machine tool guide, the angle error cannot be accurate. Position to the rail.
发明内容  Summary of the invention
本发明的一个目的在于提供一种双频激光位移和角度干涉仪， 解决了现 有双频激光干涉测角仪没有位移信息的问题， 测量灵敏度高， 机构紧凑， 装 配简单， 可广泛应用于几何量精密测量中。  An object of the present invention is to provide a dual-frequency laser displacement and angle interferometer, which solves the problem that the existing dual-frequency laser interferometer has no displacement information, has high measurement sensitivity, compact mechanism, simple assembly, and can be widely applied to geometry. The amount of precision measurement.
根据本发明的一种示例性实施方式， 一种双频激光位移和角度干涉仪， 包括由左向右依次设置的双频激光器 1、 部分反射分光镜 2、 干涉组件八、 倍 程组件 B和靶镜组件 C， 还包括第一光电转换单元 Dl、 第二光电转换单元 D2、 第三光电转换单元 D3以及与第一光电转换单元 Dl、 第二光电转换单元 D2和第三光电转换单元 D3连接的相位测量模块 14。  According to an exemplary embodiment of the present invention, a dual-frequency laser displacement and angle interferometer includes a dual-frequency laser, a partial reflection beam splitter 2, an interference component 8, a double-range component B, and a left-to-right sequence. The target mirror assembly C further includes a first photoelectric conversion unit D1, a second photoelectric conversion unit D2, a third photoelectric conversion unit D3, and is connected to the first photoelectric conversion unit D1, the second photoelectric conversion unit D2, and the third photoelectric conversion unit D3. Phase measurement module 14.
所述双频激光器 1可以输出正交偏振的稳频双频激光， 输出光分别为偏 振态平行于 YZ平面的 Λ光即 P偏振态光和偏振态平行于 XY平面的 /2光即 S偏振态光。 The dual-frequency laser 1 can output an orthogonally polarized frequency-stabilized dual-frequency laser, and the output light is a polarization state parallel to the YZ plane, that is, a P-polarized light and a polarization state parallel to the XY plane, ie, a 2 polarization, ie, an S polarization. State light.
所述部分反射分光镜 2可以由两个直角棱镜沿斜面粘结组成， 在直角棱 镜的斜面上镀有非偏振部分反射分光膜。  The partial reflection beam splitter 2 may be composed of two right-angle prisms bonded along a slope, and a non-polarized portion reflection spectroscopic film is plated on the slope of the right-angle prism.
所述干涉组件 A可以包括至上而下依次设置的第一角锥棱镜 3、 第一四 分之一波片 4、非偏振分光棱镜 5和第一偏振分光棱镜 6， 所述非偏振分光棱 镜 5和第一偏振分光棱镜 6均由两个直角棱镜沿斜面粘结组成， 所述第一四 分之一波片 4的上表面粘接到第一角锥棱镜 3的底面， 下表面粘接到非偏振 分光棱镜 5的上直角面， 所述非偏振分光棱镜 5的下直角面粘接到第一偏振 分光棱镜 6的上直角面； 在所述非偏振分光棱镜 5的直角棱镜的斜面上镀有 非偏振分光膜， 达到例如 50:50的分光比， 在所述第一偏振分光棱镜 6的直 角棱镜的斜面上镀有偏振分光膜。 The interference component A may include a first corner cube 3, a first quarter wave plate 4, a non-polarization beam splitting prism 5, and a first polarization beam splitting prism 6, which are disposed in order from top to bottom, and the non-polarization beam splitting prism 5 And the first polarization beam splitting prism 6 is composed of two right angle prisms bonded along a slope, the upper surface of the first quarter wave plate 4 is bonded to the bottom surface of the first corner cube 3, and the lower surface is bonded to The upper right angle surface of the non-polarization beam splitting prism 5 is bonded to the upper right angle surface of the first polarization beam splitting prism 6; the upper surface of the right angle prism of the non-polarization beam splitting prism 5 is plated Have The non-polarizing light-splitting film reaches a splitting ratio of, for example, 50:50, and a polarizing beam splitting film is plated on the inclined surface of the right-angle prism of the first polarizing beam splitting prism 6.
所述倍程组件 B例如包括至上而下依次设置的第二角锥棱镜 7、 第二偏 振分光棱镜 8和反射镜 10， 所述第二偏振分光棱镜 8由两个直角棱镜沿斜面 粘结组成， 所述反射镜 10 为一个在斜面镀有消偏振全反射膜的直角梯形棱 镜， 其斜面与所述第二偏振分光棱镜 8的直角棱镜的斜面平行， 所述第二偏 振分光棱镜 8的上直角面粘接到第二角锥棱镜 7的底面， 下直角面粘接到反 射镜 10的上直角面，在所述第二偏振分光棱镜 8的直角棱镜的斜面上镀有偏 振分光膜，还包括粘接到所述第二偏振分光棱镜 8和反射镜 10右端面的第二 四分之一波片 9。  The doubling component B includes, for example, a second corner cube prism 7 disposed in order from top to bottom, a second polarization beam splitting prism 8 and a mirror 10, and the second polarization beam splitting prism 8 is composed of two right angle prisms bonded along a sloped surface. The mirror 10 is a right-angled trapezoidal prism plated with a depolarizing total reflection film on a slope, the slope of which is parallel to the slope of the right-angle prism of the second polarization beam splitting prism 8, and the upper surface of the second polarization beam splitting prism 8 The right angle surface is bonded to the bottom surface of the second corner cube prism 7, and the lower right angle surface is bonded to the upper right angle surface of the mirror 10, and the polarizing beam splitting film is plated on the inclined surface of the right angle prism of the second polarization beam splitting prism 8 A second quarter-wave plate 9 bonded to the second polarization beam splitting prism 8 and the right end surface of the mirror 10 is included.
所述靶镜组件 C例如包括第三角锥棱镜 11和第四角锥棱镜 12; 还可以 包括角锥棱镜夹持底座 13， 第三角锥棱镜 11和第四角锥棱镜 12可以粘接到 角锥棱镜夹持底座 13内。  The target mirror assembly C includes, for example, a third corner cube prism 11 and a fourth corner cube prism 12; and may further include a corner cube prism clamping base 13, and the third triangular cone prism 11 and the fourth corner cube prism 12 may be bonded to the pyramid The prism is clamped in the base 13.
所述第一角锥棱镜 3、 第二角锥棱镜 7、 第三角锥棱镜 11和第四角锥棱 镜 12各自的三个角锥面可以镀有全反射膜。  The three pyramidal faces of the first pyramid prism 3, the second pyramid prism 7, the triangular pyramid prism 11, and the fourth pyramid prism 12 may be plated with a total reflection film.
所述第一四分之一波片 4和第二四分之一波片 9的光轴与稳频双频激光 器 1发出 ^光的偏振方向的夹角为 45°。  The optical axes of the first quarter wave plate 4 and the second quarter wave plate 9 are at an angle of 45° with respect to the polarization direction of the light-transmitting dual-frequency laser 1 .
上述部件的位置关系可以满足如下要求：  The positional relationship of the above components can meet the following requirements:
稳频双频激光器 1发出的 Λ光即 P光， 经过部分反射分光镜 2, ^光的 一部分光反射到第一光电转换单元 Dl， /1光的透射光经过非偏振分光棱镜 5 分成等光强的两束光即反射光和透射光； 反射光依次经过第一四分之一波片 4、 由第一角锥棱镜 3、 第一四分之一波片 4、 非偏振分光棱镜 5、 第一偏振 分光棱镜 6后进入第三光电转换单元 D3 ;透射光依次经过第二偏振分光棱镜 8、 第二四分之一波片 9， 由第三角锥棱镜 11、 第二四分之一波片 9、 第二偏 振分光棱镜 8、 第二角锥棱镜 7、 第二偏振分光棱镜 8、第二四分之一波片 9、 由第三角锥棱镜 11、 第二四分之一波片 9、 第二偏振分光棱镜 8、 非偏振分 光棱镜 5、 第一偏振分光棱镜 6后进入第二光电转换单元 D2。 The pupil light, that is, the P light emitted by the frequency-stabilized dual-frequency laser 1 passes through the partial reflection beam splitter 2, and a part of the light of the light is reflected to the first photoelectric conversion unit D1, and the transmitted light of the /1 light is split into the equal light through the non-polarization beam splitting prism 5. The strong two beams of light are reflected light and transmitted light; the reflected light passes through the first quarter wave plate in sequence 4. The first corner cube 3, the first quarter wave plate 4, the non-polarization beam splitting prism 5, and the first polarization beam splitting prism 6 enter the third photoelectric conversion unit D3; the transmitted light passes through the second polarization beam splitting prism in sequence. 8. The second quarter wave plate 9 is composed of a third corner cube prism 11, a second quarter wave plate 9, a second polarization beam splitting prism 8, a second corner cube prism 7, and a second polarization beam splitting prism 8. The second quarter wave plate 9, the third corner cube prism 11, the second quarter wave plate 9, the second polarization beam splitting prism 8, the non-polarizing beam splitting prism 5, and the first polarization beam splitting prism 6 enter the second Photoelectric conversion unit D2.
稳频双频激光器 1发出的 /2光即 S光， 经过部分反射分光镜 2， /2光的 一部分光反射到第一光电转换单元 Dl， /2光的透射光经过非偏振分光棱镜 5 分成等光强的两束光即反射光和透射光； 反射光依次经过第一四分之一波片 4、 由第一角锥棱镜 3、 第一四分之一波片 4、 非偏振分光棱镜 5、 第一偏振 分光棱镜 6后进入第二光电转换单元 D2;透射光依次经过第二偏振分光棱镜 8、 反射镜 10、 第二四分之一波片 9、 由第四角锥棱镜 12、 第二四分之一波 片 9、 反射镜 10、 第二偏振分光棱镜 8、 第二角锥棱镜 7、 第二偏振分光棱镜 8、 反射镜 10、 第二四分之一波片 9、 由第四角锥棱镜 12、 第二四分之一波 片 9、 反射镜 10、 第二偏振分光棱镜 8、 非偏振分光棱镜 5、 第一偏振分光棱 镜 6后进入第三光电转换单元 D3。  The /2 light, that is, the S light, emitted by the frequency-stabilized dual-frequency laser 1 is partially reflected by the partial reflection beam splitter 2, /2 light to the first photoelectric conversion unit D1, and the transmitted light of the /2 light is divided by the non-polarization beam splitting prism 5 The two beams of equal intensity are reflected light and transmitted light; the reflected light passes through the first quarter wave plate 4, the first corner cube 3, the first quarter wave plate 4, and the non-polarizing beam splitting prism. 5. The first polarization beam splitting prism 6 enters the second photoelectric conversion unit D2; the transmitted light sequentially passes through the second polarization beam splitting prism 8, the mirror 10, the second quarter wave plate 9, and the fourth corner cube prism 12, a second quarter wave plate 9, a mirror 10, a second polarization beam splitting prism 8, a second corner cube prism 7, a second polarization beam splitting prism 8, a mirror 10, a second quarter wave plate 9, The fourth corner cube prism 12, the second quarter wave plate 9, the mirror 10, the second polarization beam splitting prism 8, the non-polarization beam splitting prism 5, and the first polarization beam splitting prism 6 enter the third photoelectric conversion unit D3.
所述部分反射分光镜 2斜面上镀有的非偏振部分反射分光膜可以达到例 如 10:90的分光比。  The non-polarized portion reflective spectroscopic film coated on the inclined surface of the partial reflection beam splitter 2 can achieve a split ratio of, for example, 10:90.
所述稳频双频激光器 1、 部分反射分光镜 2、 组件 A和组件 B位置可以 固定， 组件 C可以安装于被测物件上， 随被测物件移动。  The frequency-stabilized dual-frequency laser 1. Partial reflection beam splitter 2. The position of component A and component B can be fixed, and component C can be mounted on the object to be tested and moved with the object to be tested.
所述第一光电转换单元 Dl、 第二光电转换单元 D2和第三光电转换单元 D3将光信号转换为电信号后传输到相位测量模块 14， 相位测量模块 14比较 第一光电转换单元 D1和第二光电转换单元 D2输出电信号的相位差变化量， 得到第三角锥棱镜 11的位移量， 比较第一光电转换单元 D1和第三光电转换 单元 D3输出电信号的相位差变化量， 得到第四角锥棱镜 12的位移量， 第三 角锥棱镜 11和第四角锥棱镜 12位移量取平均值得到被测物件的位移量； 第 三角锥棱镜 11和第四角锥棱镜 12位移量相减得到位移差， 将位移差除以第 三角锥棱镜 11和第四角锥棱镜 12之间的棱尖间距后， 再求反正弦得到被测 物件绕 X轴的角度值； 将光路置于 XY平面后可以测量被测物件绕 Z轴的角 度值。 The first photoelectric conversion unit D1, the second photoelectric conversion unit D2, and the third photoelectric conversion unit D3 converts the optical signal into an electrical signal and transmits it to the phase measuring module 14. The phase measuring module 14 compares the phase difference variation of the electrical signals output by the first photoelectric conversion unit D1 and the second photoelectric conversion unit D2 to obtain the third corner cube prism 11 The displacement amount is compared with the phase difference variation of the output electrical signals of the first photoelectric conversion unit D1 and the third photoelectric conversion unit D3 to obtain the displacement amount of the fourth corner cube prism 12, and the displacement of the third triangular pyramid prism 11 and the fourth corner cube prism 12 The average value is obtained to obtain the displacement amount of the object to be tested; the displacement amounts of the triangular pyramid prism 11 and the fourth corner cube prism 12 are subtracted to obtain a displacement difference, and the displacement difference is divided by the third corner cube prism 11 and the fourth corner cube prism 12 After the edge pitch is interposed, the inverse sine is obtained to obtain the angle value of the measured object around the X axis; after the optical path is placed in the XY plane, the angle value of the measured object around the Z axis can be measured.
位移测量为光学八细分， 角度测量为光学四细分。  The displacement measurement is an optical eight subdivision, and the angle measurement is an optical four subdivision.
与现有技术相比， 本发明的示例性实施方式具有如下优点：  The exemplary embodiment of the present invention has the following advantages over the prior art:
1、 通过增加干涉组件 A部分， 在现有双频激光干涉测角仪的基础上， 解决了没有位移信息的问题。在测量高精密数控机床导轨的多轴运动误差时， 角度误差可以准确的定位到导轨上。  1. By adding the interference component A, on the basis of the existing dual-frequency laser interferometer, the problem of no displacement information is solved. When measuring the multi-axis motion error of the high-precision CNC machine tool guide, the angular error can be accurately positioned on the guide rail.
2、中通过改进倍程组件 B部分，增加了第二角锥棱镜 7和第二四分之一 波片 9使得测量光倍程， 单个角锥棱镜的位移量为光学四细分， 因此角度测 量为光学四细分。 位移测量为光学八细分， 测量分辨率得到了提高。  2. By improving the B component of the doubling component, the second pyramid prism 7 and the second quarter wave plate 9 are added to make the measurement of the light doubling, and the displacement of the single horn prism is optically four subdivisions, so the angle The measurement is an optical four subdivision. The displacement measurement is optical eight subdivision, and the measurement resolution is improved.
附图说明 DRAWINGS
图 1为现有双频激光干涉测角仪的原理示意图。  FIG. 1 is a schematic diagram of the principle of a conventional dual-frequency laser interferometer.
图 2为根据本发明的示例性实施方式， 双频激光位移和角度干涉仪原理 与装置示意图。 具体实施方式 2 is a schematic diagram of the principle and apparatus of a dual-frequency laser displacement and angle interferometer, in accordance with an exemplary embodiment of the present invention. detailed description
以下结合附图及具体实施例题， 对本发明的示例性实施方式作进一步的 详细描述。  Exemplary embodiments of the present invention are further described in detail below with reference to the drawings and specific embodiments.
为了易于说明， 本申请使用 "上" 、 "下" 、 "左" 、 "右"等空间 相对术语， 用于说明图中示出的一个元件相对于另一个元件的关系， 应该理 解的是， 除了图中示出的方位之外， 空间术语语意在于包括装置在使用或操 作中的不同方位。例如，如果图中的装置被倒置，被叙述为位于其他元件"下" 的元件将定位在其他元件 "上" ， 因此， 示例性术语 "下"可以包含上和下 方位两者。 装置可以以其他方式定位 （旋转 90°或位于其他方位） ， 这里所 用的空间相对说明可相应地解释。  For ease of explanation, the present application uses spatially relative terms such as "upper", "lower", "left", and "right" to describe the relationship of one element shown in the figure to another element. It should be understood that Spatial terms are meant to include different orientations of the device in use or operation, in addition to the orientation shown in the figures. For example, if the device in the figures is turned up, the elements that are described as "under" other elements will be "positioned" on other elements, and the exemplary term "lower" can encompass both the top and the bottom. The device may be otherwise positioned (rotated 90° or at other orientations) and the relative description of the space used herein may be interpreted accordingly.
如图 2所示， 根据本发明的示例性实施方式， 一种双频激光位移和角度 干涉仪， 包括由左向右依次设置的双频激光器 1、 部分反射分光镜 2、 干涉组 件八、 倍程组件 B和 靶镜组件 C， 还包括第一光电转换单元 Dl、 第二光电 转换单元 D2、第三光电转换单元 D3以及与第一光电转换单元 Dl、第二光电 转换单元 D2和第三光电转换单元 D3连接的相位测量模块 14。  As shown in FIG. 2, according to an exemplary embodiment of the present invention, a dual-frequency laser displacement and angle interferometer includes a dual-frequency laser, a partial reflection beam splitter 2, and an interference component eight, which are sequentially arranged from left to right. The process component B and the target mirror component C further include a first photoelectric conversion unit D1, a second photoelectric conversion unit D2, a third photoelectric conversion unit D3, and a first photoelectric conversion unit D1, a second photoelectric conversion unit D2, and a third photoelectric The phase measuring module 14 is connected to the conversion unit D3.
所述双频激光器 1输出激光可以为正交偏振的稳频双频激光， 输出光分 别为偏振态平行于 YZ平面的 Λ光即 P偏振态光和偏振态平行于 XY平面的 /2光即 S偏振态光。 The frequency laser output of the laser can be frequency laser frequency stabilized orthogonally polarized output light polarization light, respectively Λ parallel to the YZ plane, i.e., P-polarized light and the polarization plane parallel to the XY / 2 optical i.e. S-polarized light.
所述部分反射分光镜 2可以由两个直角棱镜沿斜面粘结组成， 在直角棱 镜的斜面上镀有非偏振部分反射分光膜。  The partial reflection beam splitter 2 may be composed of two right-angle prisms bonded along a slope, and a non-polarized portion reflection spectroscopic film is plated on the slope of the right-angle prism.
所述干涉组件 A可以包括至上而下依次设置的第一角锥棱镜 3、 第一四 分之一波片 4、非偏振分光棱镜 5和第一偏振分光棱镜 6， 所述非偏振分光棱 镜 5和第一偏振分光棱镜 6均由两个直角棱镜沿斜面粘结组成， 所述第一四 分之一波片 4的上表面粘接到第一角锥棱镜 3的底面， 下表面粘接到非偏振 分光棱镜 5的上直角面， 所述非偏振分光棱镜 5的下直角面粘接到第一偏振 分光棱镜 6的上直角面； 在所述非偏振分光棱镜 5的直角棱镜的斜面上镀有 非偏振分光膜， 例如达到 50:50的分光比， 在所述第一偏振分光棱镜 6的直 角棱镜的斜面上镀有偏振分光膜。 The interference component A may include a first corner cube 3, which is disposed in order from top to bottom, and a first four a wave plate 4, a non-polarizing beam splitting prism 5 and a first polarization beam splitting prism 6, the non-polarizing beam splitting prism 5 and the first polarizing beam splitting prism 6 are each composed of two right-angle prisms bonded along a slope, the first The upper surface of the quarter wave plate 4 is bonded to the bottom surface of the first corner cube 3, and the lower surface is bonded to the upper right angle surface of the non-polarizing beam splitting prism 5, and the lower right angle surface of the non-polarizing beam splitting prism 5 is bonded. To the upper right angle surface of the first polarization beam splitting prism 6; a non-polarization beam splitting film is plated on the slope of the right angle prism of the non-polarization beam splitting prism 5, for example, a split ratio of 50:50 is achieved, and the first polarization beam splitting prism is The inclined surface of the rectangular prism of 6 is plated with a polarizing beam splitting film.
所述倍程组件 B可以包括至上而下依次设置的第二角锥棱镜 7、 第二偏 振分光棱镜 8和反射镜 10， 还包括粘接到所述第二偏振分光棱镜 8和反射镜 10右端面的第二四分之一波片 9。 所述第二偏振分光棱镜 8可以由两个直角 棱镜沿斜面粘结组成，所述反射镜 10为一个在斜面镀有消偏振全反射膜的直 角梯形棱镜， 其斜面与所述第二偏振分光棱镜 8的直角棱镜的斜面平行， 所 述第二偏振分光棱镜 8的上直角面粘接到第二角锥棱镜 Ί的底面， 下直角面 粘接到反射镜 10的上直角面，在所述第二偏振分光棱镜 8的直角棱镜的斜面 上镀有偏振分光膜。  The doubling assembly B may include a second corner cube prism 7, a second polarization beam splitting prism 8 and a mirror 10 disposed in order from top to bottom, and further includes a second end of the second polarization beam splitting prism 8 and the mirror 10 bonded to the right end The second quarter wave plate 9 of the face. The second polarization beam splitting prism 8 may be composed of two right-angle prisms bonded along a sloped surface. The mirror 10 is a right-angled trapezoidal prism plated with a depolarized total reflection film on a slope, and the slope and the second polarization are split. The inclined surface of the right-angle prism of the prism 8 is parallel, the upper right-angled surface of the second polarization beam splitting prism 8 is bonded to the bottom surface of the second corner cube prism, and the lower right-angle surface is bonded to the upper right-angle surface of the mirror 10, The inclined surface of the right-angle prism of the second polarization beam splitting prism 8 is plated with a polarization beam splitting film.
所述靶镜组件 C包括第三角锥棱镜 11和第四角锥棱镜 12。 所述靶镜组 件 C还可以包括角锥棱镜夹持底座 13， 第三角锥棱镜 11和第四角锥棱镜 12 可以粘接到角锥棱镜夹持底座 13内。  The target mirror assembly C includes a third corner cube prism 11 and a fourth corner cube prism 12. The target mirror assembly C may further include a corner cube holding base 13, and the third triangular prism 11 and the fourth corner prism 12 may be bonded to the corner cube holding base 13.
所述第一角锥棱镜 3、 第二角锥棱镜 7、 第三角锥棱镜 11和第四角锥棱 镜 12各自的三个角锥面可以镀有全反射膜。  The three pyramidal faces of the first pyramid prism 3, the second pyramid prism 7, the triangular pyramid prism 11, and the fourth pyramid prism 12 may be plated with a total reflection film.
所述第一四分之一波片 4和第二四分之一波片 9的光轴与稳频双频激光 器 1发出 ^光的偏振方向的夹角为 45°。 Optical axis and frequency-stabilized dual-frequency laser of the first quarter wave plate 4 and the second quarter wave plate 9 The angle of the polarization direction of the light emitted by the device 1 is 45°.
所述部分反射分光镜 2斜面上镀有的非偏振部分反射分光膜例如可以达 到 10:90的分光比。  The non-polarized partial reflection beam splitting film coated on the inclined surface of the partial reflection beam splitter 2 can, for example, achieve a split ratio of 10:90.
根据一种示例性实施方式， 所述稳频双频激光器 1、 部分反射分光镜 2、 组件 A和组件 B位置固定， 组件 C安装于被测物件上， 随被测物件移动。  According to an exemplary embodiment, the frequency-stabilized dual-frequency laser 1, the partial reflection beam splitter 2, the component A and the component B are fixed in position, and the component C is mounted on the object to be tested, and moves with the object to be tested.
本发明上述实施方式的工作原理为： 稳频双频激光器 1发出频率为 和 /2的正交偏振激光， 经过部分反射分光镜 2后将一小部分光反射到第一光电 转换单元 D1转换成电信号后传输到相位测量模块 14， 透射光经过非偏振分 光棱镜 5分成两束光， 一束用来测量， 一路作为参考。 测量光经过倍程组件 B分光后垂直入射到第三角锥棱镜 11和第四角锥棱镜 12后返回与参考光合 光。 测量光和参考光的合光经由第一偏振分光棱镜 6分光后入射到第二光电 转换单元 D2和第三 D3光电转换单元转换成电信号后传输到相位测量模块 14。 当被测物体连同靶镜组件 C一起沿着 Y方向移动的时候， 相位测量模块 14同时检测第一光电转换单元 D1和第二光电转换单元 D2，第一光电转换单 元 D1和第三光电转换单元 D3输出电信号的相位差变化量得到第三角锥棱镜 11和第四角锥棱镜 12的位移量， 两者平均就可以测量出被测物体的位移量。 第三角锥棱镜 11和第四角锥棱镜 12的位移量之差与第三角锥棱镜 11和第四 角锥棱镜 12棱尖间距的比值求反正弦就得到被测物体绕 X轴的微小角度值。 将光路置于 XY平面后可以测量被测物件绕 Z轴的角度值。 The working principle of the above embodiment of the present invention is as follows: The frequency-stabilized dual-frequency laser 1 emits an orthogonally polarized laser having a frequency of / 2 , and after passing through the partial reflection beam splitter 2, a small portion of the light is reflected to the first photoelectric conversion unit D1 and converted into The electrical signal is then transmitted to the phase measuring module 14, and the transmitted light is split into two beams by a non-polarizing beam splitting prism 5, one for measurement and one for reference. The measuring light is split by the double-passing component B and then vertically incident on the third corner cube prism 11 and the fourth corner cube prism 12, and returns to the reference light. The combined light of the measurement light and the reference light is split by the first polarization beam splitting prism 6 and then incident on the second photoelectric conversion unit D2 and the third D3 photoelectric conversion unit to be converted into an electrical signal, and then transmitted to the phase measurement module 14. When the measured object moves along the Y direction together with the target mirror assembly C, the phase measuring module 14 simultaneously detects the first photoelectric conversion unit D1 and the second photoelectric conversion unit D2, the first photoelectric conversion unit D1 and the third photoelectric conversion unit The amount of change in the phase difference of the D3 output electric signal is obtained by the displacement amount of the third corner cube prism 11 and the fourth corner cube prism 12, and the average amount of the displacement of the object to be measured can be measured. The difference between the displacement amount of the triangular pyramid prism 11 and the fourth pyramid prism 12 and the ratio of the angular distance between the third pyramid prism 11 and the fourth pyramid prism 12 are inverse sin to obtain a small angle value of the object to be measured around the X axis. . After the optical path is placed in the XY plane, the angle of the measured object around the Z axis can be measured.
虽然已经参考附图详细描述了本发明的具体实施方式， 但是应当明白， 该实施方式仅仅是示例性而非限制性的。 在权利要求限定的范围内， 本领域 的技术人员可以想到对该实施方式的修改和调整， 这些修改和调整后的技术 方案也应涵盖在权利要求的范围之内。 While the invention has been described in detail with reference to the drawings the embodiments Within the scope of the claims, the field Modifications and adaptations of the embodiments are contemplated by those skilled in the art, and such modifications and adaptations are also intended to be included within the scope of the appended claims.

Claims

权 利 要 求 书 Claims
1、 一种双频激光位移和角度干涉仪， 其特征在于： 包括由左向右依次设 置的双频激光器 （1)、 部分反射分光镜 （2)、 干涉组件 （A)、 倍程组件 （B) 和靶镜组件（C),还包括第一光电转换单元（Dl)、第二光电转换单元（D2)、 第三光电转换单元 （D3) 以及与第一光电转换单元 （Dl)、 第二光电转换单 元 （D2) 和第三光电转换单元 （D3) 连接的相位测量模块 （14);  1. A dual-frequency laser displacement and angle interferometer, comprising: a dual-frequency laser (1), a partial reflection beam splitter (2), an interference component (A), and a doubling component (s) arranged in order from left to right ( B) and a target mirror assembly (C), further comprising a first photoelectric conversion unit (D1), a second photoelectric conversion unit (D2), a third photoelectric conversion unit (D3), and a first photoelectric conversion unit (D1), a phase measuring module (14) connected to the second photoelectric conversion unit (D2) and the third photoelectric conversion unit (D3);
其中， 所述双频激光器 （1) 输出激光为正交偏振的双频激光；  Wherein, the dual-frequency laser (1) outputs a laser with an orthogonally polarized dual-frequency laser;
所述干涉组件 （A) 包括至上而下依次设置的第一角锥棱镜 （3)、 第一 四分之一波片 （4)、 非偏振分光棱镜 （5) 和第一偏振分光棱镜 （6);  The interference component (A) includes a first corner cube (3), a first quarter wave plate (4), a non-polarization beam splitting prism (5), and a first polarization beam splitting prism (6) arranged in order from top to bottom. );
所述倍程组件（B)包括至上而下依次设置的第二角锥棱镜（7)、第二偏 振分光棱镜 （8) 和反射镜 （10)， 还包括粘接到所述第二偏振分光棱镜 （8) 和反射镜 （10) 右端面的第二四分之一波片 （9);  The doubling assembly (B) includes a second corner cube (7), a second polarization beam splitting prism (8) and a mirror (10) disposed in order from top to bottom, and further comprising bonding to the second polarization beam splitting a second quarter wave plate (9) of the right end face of the prism (8) and the mirror (10);
所述靶镜组件 （C) 包括第三角锥棱镜 （11) 和第四角锥棱镜 （12); 所述第一四分之一波片 （4) 和第二四分之一波片 （9) 快轴与双频激光 器 （1) 发出的第一频率的光的偏振方向的夹角为 45°。  The target mirror assembly (C) includes a third corner cube prism (11) and a fourth corner cube prism (12); the first quarter wave plate (4) and the second quarter wave plate (9) The angle between the fast axis and the polarization direction of the light of the first frequency emitted by the dual-frequency laser (1) is 45°.
2、 根据权利要求 1所述的双频激光位移和角度干涉仪， 其特征在于， 双 频激光器 （1) 发出的第一频率的光由部分反射分光镜 （2) 分成第一反射光 和第一透射光， 第一反射光行进到第一光电转换单元 （Dl)， 第一透射光经 过非偏振分光棱镜（5)分成第二反射光和第二透射光； 第二反射光依次经过 第一四分之一波片 （4)、 第一角锥棱镜 （3)、 第一四分之一波片 （4)、 非偏 振分光棱镜 （5)、 第一偏振分光棱镜 （6) 后进入第三光电转换单元 （D3); 第二透射光依次经过第二偏振分光棱镜 （8)、 第二四分之一波片 （9)、 第三 角锥棱镜（11)、 第二四分之一波片 （9)、 第二偏振分光棱镜 （8)、 第二角锥 棱镜 （7)、 第二偏振分光棱镜 （8)、 第二四分之一波片 （9)、 第三角锥棱镜2. The dual-frequency laser displacement and angle interferometer according to claim 1, wherein the first frequency of light emitted by the dual-frequency laser (1) is split into a first reflected light by a partial reflection beam splitter (2) and a second a transmitted light, the first reflected light travels to the first photoelectric conversion unit (D1), and the first transmitted light is split into the second reflected light and the second transmitted light through the non-polarizing beam splitting prism (5); the second reflected light passes through the first The quarter wave plate (4), the first corner cube (3), the first quarter wave plate (4), the non-polarizing beam splitting prism (5), and the first polarization beam splitting prism (6) enter the first a third photoelectric conversion unit (D3); the second transmitted light sequentially passes through the second polarization beam splitting prism (8), the second quarter wave plate (9), and the third Corner cube (11), second quarter wave plate (9), second polarization beam splitting prism (8), second corner cube prism (7), second polarization beam splitting prism (8), second quarter One wave plate (9), the third triangular prism
( 11 )、第二四分之一波片（9)、第二偏振分光棱镜（8)、非偏振分光棱镜（5 )、 第一偏振分光棱镜 （6) 后进入第二光电转换单元 （D2); (11), the second quarter wave plate (9), the second polarization beam splitting prism (8), the non-polarizing beam splitting prism (5), and the first polarization beam splitting prism (6) enter the second photoelectric conversion unit (D2) );
双频激光器 （1 ) 发出的第二频率的光由部分反射分光镜 （2) 分成第三 反射光和第三透射光， 第三反射光行进到第一光电转换单元 （Dl )， 第三透 射光经过非偏振分光棱镜（5 )分成第四反射光和第四透射光； 第四反射光依 次经过第一四分之一波片 （4)、 第一角锥棱镜（3)、 第一四分之一波片 （4)、 非偏振分光棱镜（5 )、第一偏振分光棱镜（6)后进入第二光电转换单元（D2); 第四透射光依次经过第二偏振分光棱镜（8)、 反射镜（10)、 第二四分之一波 片 （9)、 第四角锥棱镜 （12)、 第二四分之一波片 （9)、 反射镜 （10)、 第二 偏振分光棱镜（8)、第二角锥棱镜（7)、第二偏振分光棱镜（8)、反射镜（10)、 第二四分之一波片 （9)、 第四角锥棱镜（12)、 第二四分之一波片 （9)、 反射 镜 （10)、 第二偏振分光棱镜 （8)、 非偏振分光棱镜（5)、 第一偏振分光棱镜 The second frequency of light emitted by the dual-frequency laser (1) is divided into a third reflected light and a third transmitted light by the partial reflection beam splitter (2), and the third reflected light travels to the first photoelectric conversion unit (D1), the third transmission The light is divided into a fourth reflected light and a fourth transmitted light through the non-polarizing beam splitting prism (5); the fourth reflected light sequentially passes through the first quarter wave plate (4), the first corner cube prism (3), the first four a wave plate (4), a non-polarizing beam splitting prism (5), and a first polarization beam splitting prism (6) enter the second photoelectric conversion unit (D2); the fourth transmitted light sequentially passes through the second polarization beam splitting prism (8) , mirror (10), second quarter wave plate (9), fourth corner cube prism (12), second quarter wave plate (9), mirror (10), second polarization splitting a prism (8), a second pyramid prism (7), a second polarization beam splitting prism (8), a mirror (10), a second quarter wave plate (9), a fourth corner cube prism (12), Second quarter wave plate (9), mirror (10), second polarization beam splitting prism (8), non-polarizing beam splitting prism (5), first polarization Beam splitting prism
( 6) 后进入第三光电转换单元 （D3)。 (6) Enter the third photoelectric conversion unit (D3).
3、 根据权利要求 1所述的双频激光位移和角度干涉仪， 其特征在于： 所 述部分反射分光镜（2)斜面上镀有的非偏振部分反射分光膜达到 10:90的分 光比。  3. The dual-frequency laser displacement and angle interferometer according to claim 1, wherein: the non-polarized portion of the partially reflective spectroscope (2) is coated with a non-polarized portion reflecting the spectral film to achieve a spectral ratio of 10:90.
4、 根据权利要求 1所述的双频激光位移和角度干涉仪， 其特征在于： 所 述双频激光器 （1 )、 部分反射分光镜 （2)、 干涉组件 （A) 和倍程组件 （B) 位置固定， 靶镜组件 （C) 安装于被测物件上， 随被测物件移动。 5、 根据权利要求 4所述的双频激光位移和角度干涉仪， 其特征在于： 所 述第一光电转换单元 （Dl )、 第二光电转换单元 （D2) 和第三光电转换单元4. The dual-frequency laser displacement and angle interferometer according to claim 1, wherein: the dual-frequency laser (1), the partial reflection beam splitter (2), the interference component (A), and the double-range component (B) The position is fixed, and the target mirror assembly (C) is attached to the object to be tested and moves with the object to be tested. The dual-frequency laser displacement and angle interferometer according to claim 4, wherein: the first photoelectric conversion unit (D1), the second photoelectric conversion unit (D2), and the third photoelectric conversion unit
(D3 ) 将光信号转换为电信号后传输到相位测量模块 （14)， 相位测量模块 ( 14) 比较第一光电转换单元 （D1 )和第二光电转换单元（D2)输出电信号 的相位差变化量， 得到第三角锥棱镜 （11 ) 的位移量， 比较第一光电转换单 元（D1 )和第三光电转换单元 （D3 )输出电信号的相位差变化量， 得到第四 角锥棱镜 （12) 的位移量， 第三角锥棱镜 （11 ) 和第四角锥棱镜 （12) 位移 量取平均值得到被测物件的位移量；第三角锥棱镜（11 )和第四角锥棱镜（12) 位移量相减得到位移差， 将位移差除以第三角锥棱镜 （11 ) 和第四角锥棱镜 ( 12) 之间的棱尖间距后， 再求反正弦得到被测物件绕 X轴的角度值； 将光 路置于 XY平面后可以测量被测物件绕 Z轴的角度值。 (D3) converting the optical signal into an electrical signal and transmitting it to the phase measuring module (14), the phase measuring module (14) comparing the phase difference of the output electrical signals of the first photoelectric conversion unit (D1) and the second photoelectric conversion unit (D2) The amount of change is obtained, and the displacement amount of the third cube-corner prism (11) is obtained, and the phase difference variation of the output electrical signals of the first photoelectric conversion unit (D1) and the third photoelectric conversion unit (D3) is compared to obtain a fourth corner cube (12). The displacement amount of the triangular pyramid prism (11) and the fourth pyramid prism (12) is averaged to obtain the displacement of the object to be tested; the third pyramid prism (11) and the fourth pyramid prism (12) The displacement difference is subtracted to obtain the displacement difference. After dividing the displacement difference by the edge pitch between the third corner cube prism (11) and the fourth corner cube prism (12), the inverse sine is obtained to obtain the angle of the measured object around the X axis. Value; After placing the optical path in the XY plane, you can measure the angle of the measured object around the Z axis.
6、 根据权利要求 5所述的双频激光位移和角度干涉仪， 其特征在于： 位 移测量为光学八细分， 角度测量为光学四细分。  6. The dual-frequency laser displacement and angle interferometer according to claim 5, wherein: the displacement measurement is an optical eight subdivision, and the angle measurement is an optical four subdivision.
7、 根据权利要求 1所述的双频激光位移和角度干涉仪， 其特征在于： 所 述双频激光器 （1 ) 是经过稳频的双频激光器， 所述部分反射分光镜 （2) 由 两个直角棱镜沿斜面粘结组成， 在直角棱镜的斜面上镀有非偏振部分反射分 光膜， 所述第一角锥棱镜 （3)、 第二角锥棱镜 （7)、 第三角锥棱镜 （11 ) 和 第四角锥棱镜 （12) 各自的三个角锥面镀有全反射膜。  7. The dual-frequency laser displacement and angle interferometer according to claim 1, wherein: said dual-frequency laser (1) is a frequency-stabilized dual-frequency laser, and said partial reflection beam splitter (2) consists of two The right-angle prisms are bonded along the inclined surface, and the non-polarized partial reflection beam splitting film is plated on the inclined surface of the right-angle prism, and the first corner cube prism (3), the second corner cube prism (7), and the triangular pyramid prism (11) ) and the four corner cones of the fourth corner cube (12) are plated with a total reflection film.
8、 根据权利要求 1所述的双频激光位移和角度干涉仪， 其特征在于： 所 述非偏振分光棱镜 （5 ) 和第一偏振分光棱镜 （6) 均由两个直角棱镜沿斜面 粘结组成， 所述第一四分之一波片 （4) 的上表面粘接到第一角锥棱镜 （3 ) 的底面， 下表面粘接到非偏振分光棱镜（5 ) 的上直角面， 所述非偏振分光棱 镜 （5 ) 的下直角面粘接到第一偏振分光棱镜 （6) 的上直角面； 在所述非偏 振分光棱镜（5 ) 的直角棱镜的斜面上镀有非偏振分光膜， 达到 50:50的分光 比， 在所述第一偏振分光棱镜 （6) 的直角棱镜的斜面上镀有偏振分光膜。 8. The dual-frequency laser displacement and angle interferometer according to claim 1, wherein: said non-polarizing beam splitting prism (5) and said first polarization beam splitting prism (6) are bonded by oblique angles by two right-angle prisms. Composition, the upper surface of the first quarter wave plate (4) is bonded to the bottom surface of the first corner cube (3), and the lower surface is bonded to the upper right angle surface of the non-polarizing beam splitting prism (5). Non-polarized beam splitting edge The lower right angle surface of the mirror (5) is bonded to the upper right angle surface of the first polarization beam splitting prism (6); the non-polarization beam splitting film is plated on the slope of the right angle prism of the non-polarization beam splitting prism (5), reaching 50: A splitting ratio of 50 is plated with a polarizing beam splitting film on the inclined surface of the right-angle prism of the first polarizing beam splitting prism (6).
9、 根据权利要求 1所述的双频激光位移和角度干涉仪， 其特征在于： 所 述第二偏振分光棱镜（8)由两个直角棱镜沿斜面粘结组成，所述反射镜（10) 为一个在斜面镀有消偏振全反射膜的直角梯形棱镜， 其斜面与所述第二偏振 分光棱镜 （8 ) 的直角棱镜的斜面平行， 所述第二偏振分光棱镜 （8) 的上直 角面粘接到第二角锥棱镜（7) 的底面， 下直角面粘接到反射镜（10) 的上直 角面， 在所述第二偏振分光棱镜 （8) 的直角棱镜的斜面上镀有偏振分光膜。  9. The dual-frequency laser displacement and angle interferometer according to claim 1, wherein: said second polarization beam splitting prism (8) is composed of two right-angle prisms bonded along a slope, said mirror (10) a right-angled trapezoidal prism plated with a depolarizing total reflection film on a slope, the slope of which is parallel to the slope of the right-angle prism of the second polarization beam splitting prism (8), and the upper right angle surface of the second polarization beam splitting prism (8) Bonded to the bottom surface of the second cube-corner prism (7), the lower right-angled surface is bonded to the upper right-angled surface of the mirror (10), and the inclined surface of the right-angle prism of the second polarization beam splitting prism (8) is plated with polarization Split film.
10、 根据权利要求 2所述的双频激光位移和角度干涉仪， 其特征在于： 所述第一频率的光为 P光， 所述第二频率的光为 S光。  10. The dual-frequency laser displacement and angle interferometer according to claim 2, wherein: the light of the first frequency is P light, and the light of the second frequency is S light.
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