CN107356780A - A kind of low speed speed precision detecting system of high precision turntable - Google Patents
A kind of low speed speed precision detecting system of high precision turntable Download PDFInfo
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- CN107356780A CN107356780A CN201710508884.5A CN201710508884A CN107356780A CN 107356780 A CN107356780 A CN 107356780A CN 201710508884 A CN201710508884 A CN 201710508884A CN 107356780 A CN107356780 A CN 107356780A
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- 238000005259 measurement Methods 0.000 claims abstract description 18
- 230000010287 polarization Effects 0.000 claims abstract description 18
- 230000003287 optical effect Effects 0.000 claims description 7
- 238000006243 chemical reaction Methods 0.000 claims description 6
- 238000013519 translation Methods 0.000 claims description 5
- 238000004364 calculation method Methods 0.000 claims description 2
- 230000005693 optoelectronics Effects 0.000 claims description 2
- 230000005622 photoelectricity Effects 0.000 claims 1
- 230000011514 reflex Effects 0.000 claims 1
- 238000001514 detection method Methods 0.000 abstract description 24
- 238000012360 testing method Methods 0.000 abstract description 7
- 238000006073 displacement reaction Methods 0.000 abstract description 3
- 230000035559 beat frequency Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000005388 cross polarization Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 230000009885 systemic effect Effects 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P3/00—Measuring linear or angular speed; Measuring differences of linear or angular speeds
- G01P3/36—Devices characterised by the use of optical means, e.g. using infrared, visible, or ultraviolet light
Abstract
The invention discloses a kind of low speed speed precision detecting system of high precision turntable, belong to technical field of measurement and test.The detecting system is mainly made up of double-frequency laser generator, photelectric receiver, polarization spectroscope, speculum, prism of corner cube, sine arm, multifunctional digital phase card.Compared with carrying out the equipment of speed precision detection using turntable interior angle encoder or external angular encoder in the past, the present invention is based on two-frequency laser interferometer and optics difference structure-sine arm, displacement measurement is carried out using the principle of principle of interference and Doppler effect the generation frequency difference of light, and be converted to angle displacement measurement, sampled again by high precision clock, and then realize and the Dynamic High-accuracy angular speed of low speed operation intermediate station is detected.The present invention solves the problem that effective detection can not be carried out to turntable high accuracy low rate, meanwhile, the present invention has the advantages of simple to operate, automatic measurement, strong antijamming capability, high accuracy of detection.
Description
Technical field
The present invention relates to a kind of low speed speed precision detecting system of high precision turntable, belong to technical field of measurement and test.Mainly
Complete the detection to test table low speed angular rate information.
Background technology
Test table is that inertia production is researched and developed, tested, dispatching from the factory the capital equipment of evaluation and demarcation, the position of turntable and speed
Precision is to influence the principal element of demarcation, extremely important, it is necessary to go out in turret plant particularly with rate table, its speed characteristic
The detection of completing technology index before factory.(ω >=10 °/s) generally utilize the modes such as photoelectric counter in the case of rotating speed is higher
Detection, and in the case of low speed (10 °/s of ω ＜), can only be by other detection devices.
Relatively fewer, the traditional external coding of high-precision low speed rate detection system research of the country to test table at present
Device and internal encoder detection device all can not meet that research and production will either in precision aspect and automaticity
Ask.Certain difficulty be present for the detection of high-precision low speed speed precision in detection device used in tradition.Therefore, it is necessary to develop
There is the high detection device of simple to operate, automatic measurement, strong antijamming capability, accuracy of detection.
The content of the invention
The technical problems to be solved by the invention are：Overcome the deficiencies in the prior art, there is provided a kind of high precision turntable
Low speed speed precision detecting system, solve the problem that effective detection can not be carried out to turntable high accuracy low rate, there is operation
Simply, the advantages that automatic measurement, strong antijamming capability, high accuracy of detection.
The present invention technical solution be：A kind of low speed speed precision detecting system of high precision turntable, including double frequency
Laser generator, photelectric receiver, polarization spectroscope, speculum, prism of corner cube, sine arm, digit phase card；
It is respectively f that dual-frequency laser source generator, which produces frequency,1And f2Double frequency orhtogonal linear polarizaiton light, a part of double frequency is just
It is f that intersection polarised light obtains frequency by optical component and photoelectric conversion device1-f2Reference signal and send to digital phase
Position card, a part of double frequency orhtogonal linear polarizaiton light directive polarization spectroscope；
Polarization spectroscope separates double frequency orhtogonal linear polarizaiton light, parallel after being reflected respectively by two groups of speculums to project to angle
Cone prism；Polarization spectroscope receives the double frequency crossed polarized light that speculum reflects, directive photelectric receiver after convergence；
Prism of corner cube is separately mounted to sine arm both ends；The double frequency crossed polarized light that prism of corner cube will reflect by speculum
Speculum is reflexed to, and polarization spectroscope is reflexed to by speculum；Sine arm be arranged on turntable on, using sine arm center for turn
Axle rotates；
The double frequency cross-polarization that photelectric receiver is sent polarization spectroscope by optical component and photoelectric conversion device
Light is interfered, and it is (f to obtain frequency1-f2)+Δf1+Δf2Measurement signal；Wherein, Δ f1Expression frequency is f1Polarised light
Amount of frequency translation after prism of corner cube, Δ f2Expression frequency is f2Amount of frequency translation of the polarised light after prism of corner cube；
The frequency obtained by double-frequency laser generator is f by digit phase card1-f2Reference signal and photelectric receiver
The frequency of transmission is (f1-f2)+Δf1+Δf2Measurement signal be compared, integrate and obtain periodicity N, obtained according to periodicity N
Obtain the rotational angle α of turntable.
The calculation formula of the rotational angle α is as follows：
Wherein, λ is the approximate wavelength of double frequency orhtogonal linear polarizaiton light, and D is sine arm brachium.
The present invention compared with prior art the advantages of be：
(1) present system is by using double-frequency laser interference scheme, and strong antijamming capability, accuracy of detection is high, solves
The technical barrier of effective detection can not be carried out to turntable high accuracy low rate.
(2) present system is by using optics difference structure -- sine arm scheme, not only cause measuring system resolution ratio
It is higher, and it is smaller make it that device alignment error influences on system accuracy.
(3) present system is by with multifunctional digital phase card high-speed sampling, and obtained it is fuller and more accurate, accurate,
Reliable turntable performance data.
Brief description of the drawings
Fig. 1 is structural principle sketch of the present invention；
Fig. 2 is the device 3-D view of the present invention.
Embodiment
The present invention proposes a kind of low speed speed precision detection of high precision turntable for the detection of turntable low speed speed precision
System, the automatization level of test process is not only increased, and fundamentally solve can not be to turntable high accuracy low rate
The problem of effective detection is carried out, with carrying out speed precision inspection using turntable interior angle encoder or external angular encoder in the past
The equipment of survey is compared, and has the advantages of simple to operate, automatic measurement, strong antijamming capability, high accuracy of detection.As shown in figure 1,
For present system principle sketch, as shown in Fig. 2 be the schematic three dimensional views of present system, the low speed speed of high precision turntable
Precision detection system includes double-frequency laser generator 1, photelectric receiver 2, polarization spectroscope 3, speculum 4, prism of corner cube 5, light
Difference structure -- sine arm 6, digit phase card 7 are learned, wherein,
Dual-frequency laser source generator 1 produces the double frequency orhtogonal linear polarizaiton light that polarization state is good, beat frequency rate is stable, frequency point
Wei not f1And f2, it is f that a part of double frequency orhtogonal linear polarizaiton light obtains frequency by optical component and photoelectric conversion device1-f2's
Reference signal is sent to digit phase card 7, a part of double frequency orhtogonal linear polarizaiton light directive polarization spectroscope 3；
Polarization spectroscope 3 separates double frequency orhtogonal linear polarizaiton light, parallel after being reflected respectively by two groups of speculums 4 to project extremely
Prism of corner cube 5；
Prism of corner cube 5 is also known as angle body cooperative target, due to reflected light and incident parallel light, and optics sine arm 6
The characteristic that brachium does not change and changed with incidence angle, is converted to angle displacement measurement, and which causes for linear movement measuring
Systemic resolution is higher, and alignment error is smaller on the influence of detecting system precision, is being effectively ensured for this detecting system accuracy of detection.
The brachium of sine arm 6 just refers to the company between i.e. two summits of prism of corner cube 5 of line distance between the optical centre of two corners cone prism 5
Linear distance.After polarised light is reflected by prism of corner cube 5, then collect after directive speculum 4, polarization spectroscope 3, directive opto-electronic receiver
Device 2.Central Symmetry of the prism of corner cube 5 on sine arm 6, installed in the both ends of sine arm 6.Sine arm 6 is arranged on turntable 8
On, using the center of sine arm 6 as axis of rotation.
Photelectric receiver 2 does two beam crossed polarized lights of acquisition by optical component and photoelectric conversion device
Relate to, it is (f to obtain frequency1-f2)+Δf1+Δf2Measurement signal；Wherein, Δ f1Expression frequency is f1Polarised light pass through pyramid
Amount of frequency translation after prism 5, Δ f2Expression frequency is f2Amount of frequency translation of the polarised light after prism of corner cube 5.
Digital means -- digit phase card 7, which is used for high-speed figure, to be gathered and transmits.Digit phase card 7 will pass through double frequency
The frequency for the double frequency orhtogonal linear polarizaiton interference of light that laser generator 1 obtains is f1-f2Reference signal and pass through photelectric receiver 2
Obtained frequency is (f1-f2)+Δf1+Δf2Measurement signal made the difference, integrate to obtain periodicity N, this periodicity N can be with
Reflect the rotational angle α of turntable 8；Specific functional relation is shown below：
Wherein, when L is that test table 8 rotates α angles, distance that a prism of corner cube 5 moves along light path；λ be double frequency just
The approximate wavelength of intersection polarised light, D are the brachium of sine arm 6.
If turntable 8 does not rotate, N=0, measurement signal is consistent with reference signal, if turntable 8 rotates, passes through frequency
Rate is f1-f2Measurement signal and frequency be (f1-f2)+Δf1+Δf2Reference signal be compared, integrate obtain periodicity N,
The rotational angle α of turntable 8 can be calculated, then is sampled with high precision clock, and then is realized to the high-precision of low speed operation intermediate station
Spend the detection of dynamic angular speed.
The angular speed of turntable 8Δ T is the time interval that turntable 8 turns over rotational angle α.
In an embodiment of the present invention, what double-frequency laser generator 1 was selected is PT-1105C laser heads, and its frequency difference is 1-
5MHz, beat frequency stability are 0.5kHz, mean wavelength 632.8nm.
What photelectric receiver 2 was selected is PT-1303C high-speed receivers, and working frequency is up to 10MHz.
What digit phase card 7 was selected is PT-1313B multifunctional digital phase cards, the frequency range 10kHz- of measurement frequency
10MHz。
Unspecified part of the present invention belongs to general knowledge as well known to those skilled in the art.
Claims (2)
- A kind of 1. low speed speed precision detecting system of high precision turntable, it is characterised in that including double-frequency laser generator (1), Photelectric receiver (2), polarization spectroscope (3), speculum (4), prism of corner cube (5), sine arm (6), digit phase card (7)；It is respectively f that dual-frequency laser source generator (1), which produces frequency,1And f2Double frequency orhtogonal linear polarizaiton light, a part of double frequency is orthogonal It is f that linearly polarized light obtains frequency by optical component and photoelectric conversion device1-f2Reference signal and send to digit phase Block (7), a part of double frequency orhtogonal linear polarizaiton light directive polarization spectroscope (3)；Polarization spectroscope (3) separates double frequency orhtogonal linear polarizaiton light, parallel after being reflected respectively by two groups of speculums (4) to project extremely Prism of corner cube (5)；Polarization spectroscope (3) receives the double frequency crossed polarized light that speculum (4) reflects, directive photoelectricity after convergence Receiver (2)；Prism of corner cube (5) is separately mounted to sine arm (6) both ends；Prism of corner cube (5) will pass through the double frequency of speculum (4) reflection just Hand over polarised light to reflex to speculum (4), and polarization spectroscope (3) is reflexed to by speculum (4)；Sine arm (6), which is arranged on, to be turned On platform (8), using sine arm (6) center as axis of rotation；The double frequency that photelectric receiver (2) is sent polarization spectroscope (3) by optical component and photoelectric conversion device is orthogonal partially The light that shakes is interfered, and it is (f to obtain frequency1-f2)+Δf1+Δf2Measurement signal；Wherein, Δ f1Expression frequency is f1Polarization Amount of frequency translation of the light after prism of corner cube (5), Δ f2Expression frequency is f2Frequency of the polarised light after prism of corner cube (5) Rate converted quantity；Digit phase card (7) will be f by the frequency that double-frequency laser generator (1) obtains1-f2Reference signal and opto-electronic receiver The frequency that device (2) is sent is (f1-f2)+Δf1+Δf2Measurement signal be compared, integrate and obtain periodicity N, according to the cycle Number N obtains the rotational angle α of turntable (8).
- A kind of 2. low speed speed precision detecting system of high precision turntable according to claim 1, it is characterised in that：It is described Rotational angle α calculation formula is as follows：Wherein, λ is the approximate wavelength of double frequency orhtogonal linear polarizaiton light, and D is sine arm (6) brachium.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112296754A (en) * | 2020-10-30 | 2021-02-02 | 谢泽兵 | Rotation angle precision detection device and method based on laser detection system |
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| CN102564354A (en) * | 2011-12-28 | 2012-07-11 | 哈尔滨工业大学 | Angle measuring device and angle measuring method of double-frequency laser interferometer based on slow-light material |
| CN103697807A (en) * | 2013-12-13 | 2014-04-02 | 清华大学 | Double-frequency laser displacement and angle interferometer |
| CN104180776A (en) * | 2014-08-21 | 2014-12-03 | 西安交通大学 | High-resolution roll angle measuring method and device based on heterodyne interferometric phase method |
-
2017
- 2017-06-28 CN CN201710508884.5A patent/CN107356780A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102564354A (en) * | 2011-12-28 | 2012-07-11 | 哈尔滨工业大学 | Angle measuring device and angle measuring method of double-frequency laser interferometer based on slow-light material |
| CN103697807A (en) * | 2013-12-13 | 2014-04-02 | 清华大学 | Double-frequency laser displacement and angle interferometer |
| CN104180776A (en) * | 2014-08-21 | 2014-12-03 | 西安交通大学 | High-resolution roll angle measuring method and device based on heterodyne interferometric phase method |
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| 何川等: "双频激光干涉测角中角锥镜的不对称性对测角精度影响的分析", 《光学技术》 * |
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Cited By (1)
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| CN112296754A (en) * | 2020-10-30 | 2021-02-02 | 谢泽兵 | Rotation angle precision detection device and method based on laser detection system |
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Application publication date: 20171117 |