CN103697807B - A kind of double-frequency laser displacement and angle interferometer - Google Patents
A kind of double-frequency laser displacement and angle interferometer Download PDFInfo
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- CN103697807B CN103697807B CN201310687001.3A CN201310687001A CN103697807B CN 103697807 B CN103697807 B CN 103697807B CN 201310687001 A CN201310687001 A CN 201310687001A CN 103697807 B CN103697807 B CN 103697807B
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- 238000006073 displacement reaction Methods 0.000 title claims abstract description 41
- 230000010287 polarization Effects 0.000 claims abstract description 77
- 238000006243 chemical reaction Methods 0.000 claims abstract description 54
- 238000005259 measurement Methods 0.000 claims abstract description 25
- 230000011218 segmentation Effects 0.000 claims abstract description 10
- 238000005388 cross polarization Methods 0.000 claims description 5
- 230000004446 light reflex Effects 0.000 claims description 4
- 241000826860 Trapezium Species 0.000 claims description 3
- 230000028161 membrane depolarization Effects 0.000 claims description 3
- 230000003287 optical effect Effects 0.000 description 3
- NCGICGYLBXGBGN-UHFFFAOYSA-N 3-morpholin-4-yl-1-oxa-3-azonia-2-azanidacyclopent-3-en-5-imine;hydrochloride Chemical compound Cl.[N-]1OC(=N)C=[N+]1N1CCOCC1 NCGICGYLBXGBGN-UHFFFAOYSA-N 0.000 description 2
- 230000035559 beat frequency Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
- G01B9/02007—Two or more frequencies or sources used for interferometric measurement
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
- G01B9/02017—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations
- G01B9/02019—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations contacting different points on same face of object
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/15—Cat eye, i.e. reflection always parallel to incoming beam
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/45—Multiple detectors for detecting interferometer signals
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/70—Using polarization in the interferometer
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- General Physics & Mathematics (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
Abstract
A kind of double-frequency laser displacement and angle interferometer, comprise the stabilized two-frequency laser, part reflection beam splitting mirror, interference component, times journey assembly and the target mirror assembly that set gradually from left to right, also comprise the first photoelectric conversion unit, the second photoelectric conversion unit, the 3rd photoelectric conversion unit and connected phase measurement module; Interference component comprises the first prism of corner cube, the first quarter-wave plate, unpolarized Amici prism and the first polarization splitting prism that arrange from top to bottom; Times journey assembly comprises the second prism of corner cube, the second polarization splitting prism and the catoptron that arrange from top to bottom; Target mirror assembly comprises prism of corner cube Holding seat and bonding pyrometric cone prism within it and quadrangular pyramid prism; The present invention, by increasing interference component part A, solves the problem not having displacement information; By improving times journey assembly part B, the displacement of single prism of corner cube is optics four segmentation, and therefore measurement of angle is optics four segmentation.Displacement measurement is optics eight segmentation, and Measurement Resolution improves.
Description
Technical field
The invention belongs to accurate displacement to measure and measurement of angle field, be specifically related to a kind of double-frequency laser displacement and angle interferometer.
Background technology
When measuring the multiaxial motion error of high-precision numerical control machine tool guideway, double-frequency laser interference angular instrument obtains always and applies widely due to high resolving power, high precision, high speed, the advantage that reproducible, range is large.
As shown in Figure 1, the double frequency cross polarization laser that two-frequency laser interferometer sends is divided into two bundles through polarization spectroscope 1 by polarization direction to the principle schematic of the measurement of angle of tradition two-frequency laser interferometer, and wherein polarization state is parallel to YZ plan frequency is f
1light transmission polarization spectroscope 1 directive prism of corner cube 3; It is f that polarization state is parallel to XY plan frequency
2light through polarization splitting prism 1 reflect after after catoptron 2 directive prism of corner cube 4.The light beam reflected by these two prism of corner cubes is respectively received by photelectric receiver 5, and dipyramid prism group A is placed on testee, and measured object is movable and when not swinging, Δ f in beat frequency
1-Δ f
2for constant, angle output valve is constant.If prism of corner cube is around X-axis cant angle theta angle in moving process, then two prism of corner cubes are in Y direction by generation relative shift Δ, and the angle therefore obtained is changed to:
In formula: L is the rib point spacing of prism of corner cube 3 and 4.
The program does not have optical fine, and root problem is to obtain displacement information corresponding to current angular, and when measuring the multiaxial motion error of high-precision numerical control machine tool guideway, angular error cannot navigate to guide rail accurately.
Summary of the invention
In order to solve above-mentioned prior art Problems existing, the object of the present invention is to provide a kind of double-frequency laser displacement and angle interferometer, solve the problem that existing double-frequency laser interference angular instrument does not have displacement information, measurement sensistivity is high, mechanism is compact, assembling is simple, can be widely used in geometric sense precision measurement.
For reaching above object, the present invention adopts following technical scheme:
A kind of double-frequency laser displacement and angle interferometer, comprise the stabilized two-frequency laser 1, part reflection beam splitting mirror 2, interference component A, times journey assembly B and the target mirror assembly C that set gradually from left to right, the phase measurement module 14 also comprising the first photoelectric conversion unit D1, the second photoelectric conversion unit D2, the 3rd photoelectric conversion unit D3 and be connected with the first photoelectric conversion unit D1, the second photoelectric conversion unit D2 and the 3rd photoelectric conversion unit D3;
Described stabilized two-frequency laser 1 Output of laser is the stabilized two-frequency laser of cross polarization, and output light is respectively the f that polarization state is parallel to YZ plane
1light and P light and polarization state are parallel to the f of XY plane
2light and S light;
Described part reflection beam splitting mirror 2 is made up of along inclined-plane bonding two right-angle prisms, and the inclined-plane of right-angle prism is coated with unpolarized part reflection beam splitting film;
Described interference component A comprises the first prism of corner cube 3, first quarter-wave plate 4, unpolarized Amici prism 5 and the first polarization splitting prism 6 that set gradually from top to bottom, described unpolarized Amici prism 5 and the first polarization splitting prism 6 form along inclined-plane bonding by two right-angle prisms, the upper surface of described first quarter-wave plate 4 bonds to the bottom surface of the first prism of corner cube 3, lower surface bonds is to the upper right-angle surface of unpolarized Amici prism 5, and the lower right-angle surface of described unpolarized Amici prism 5 bonds to the upper right-angle surface of the first polarization splitting prism 6; The inclined-plane of the right-angle prism of described unpolarized Amici prism 5 is coated with unpolarized spectro-film, reaches the splitting ratio of 50:50, the inclined-plane of the right-angle prism of described first polarization splitting prism 6 is coated with polarization beam splitter;
Described times of journey assembly B comprises the second prism of corner cube 7 set gradually from top to bottom, second polarization splitting prism 8 and catoptron 10, described second polarization splitting prism 8 is made up of along inclined-plane bonding two right-angle prisms, described catoptron 10 is a right-angled trapezium prism being coated with depolarization total reflection film on inclined-plane, its inclined-plane is parallel with the inclined-plane of the right-angle prism of described second polarization splitting prism 8, the upper right-angle surface of described second polarization splitting prism 8 bonds to the bottom surface of the second prism of corner cube 7, lower right-angle surface bonds to the upper right-angle surface of catoptron 10, the inclined-plane of the right-angle prism of described second polarization splitting prism 8 is coated with polarization beam splitter, also comprise the second quarter-wave plate 9 bonding to described second polarization splitting prism 8 and catoptron 10 right side,
Described target mirror assembly C comprises prism of corner cube Holding seat 13, and bonds to pyrometric cone prism 11 and the quadrangular pyramid prism 12 of prism of corner cube Holding seat 13 inside;
Three pyramidal planes of described first prism of corner cube 3, second prism of corner cube 7, pyrometric cone prism 11 and quadrangular pyramid prism 12 are coated with total reflection film;
Optical axis and the stabilized two-frequency laser 1 of described first quarter-wave plate 4 and the second quarter-wave plate 9 send f
1the angle in polarisation of light direction is 45 °;
The position relationship of above-mentioned parts meets following requirement:
The f that stabilized two-frequency laser 1 sends
1light and P light, through part reflection beam splitting mirror 2, f
1a part of light of light reflexes to the first photoelectric conversion unit D1, and the transmitted light of f1 light is divided into aplanatic two-beam and reflected light and transmitted light through unpolarized Amici prism 5; Reflected light successively through the first quarter-wave plate 4, by the first prism of corner cube 3, first quarter-wave plate 4, unpolarized Amici prism 5, first polarization splitting prism 6 after enter the 3rd photoelectric conversion unit D3; Transmitted light, successively through the second polarization splitting prism 8, second quarter-wave plate 9, by pyrometric cone prism 11, second quarter-wave plate 9, second polarization splitting prism 8, second prism of corner cube 7, second polarization splitting prism 8, second quarter-wave plate 9, enters the second photoelectric conversion unit D2 by after pyrometric cone prism 11, second quarter-wave plate 9, second polarization splitting prism 8, unpolarized Amici prism 5, first polarization splitting prism 6;
The f2 light that stabilized two-frequency laser 1 sends and S light, a part of light through part reflection beam splitting mirror 2, f2 light reflexes to the first photoelectric conversion unit D1, and the transmitted light of f2 light is divided into aplanatic two-beam and reflected light and transmitted light through unpolarized Amici prism 5, reflected light successively through the first quarter-wave plate 4, by the first prism of corner cube 3, first quarter-wave plate 4, unpolarized Amici prism 5, first polarization splitting prism 6 after enter the second photoelectric conversion unit D2, transmitted light is successively through the second polarization splitting prism 8, catoptron 10, second quarter-wave plate 9, by quadrangular pyramid prism 12, second quarter-wave plate 9, catoptron 10, second polarization splitting prism 8, second prism of corner cube 7, second polarization splitting prism 8, catoptron 10, second quarter-wave plate 9, by quadrangular pyramid prism 12, second quarter-wave plate 9, catoptron 10, second polarization splitting prism 8, unpolarized Amici prism 5, the 3rd photoelectric conversion unit D3 is entered after first polarization splitting prism 6.
The unpolarized part reflection beam splitting film that described part reflection beam splitting mirror 2 inclined-plane is coated with reaches the splitting ratio of 10:90.
Described stabilized two-frequency laser 1, part reflection beam splitting mirror 2, assembly A and assembly B position are fixed, and assembly C is installed on measured object, moves with measured object.
Described first photoelectric conversion unit D1, phase measurement module 14 is transferred to after light signal is converted to electric signal by the second photoelectric conversion unit D2 and the 3rd photoelectric conversion unit D3, phase measurement module 14 compares the phase differential variable quantity that the first photoelectric conversion unit D1 and the second photoelectric conversion unit D2 exports electric signal, obtain the displacement of pyrometric cone prism 11, relatively the first photoelectric conversion unit D1 and the 3rd photoelectric conversion unit D3 exports the phase differential variable quantity of electric signal, obtain the displacement of quadrangular pyramid prism 12, pyrometric cone prism 11 and quadrangular pyramid prism 12 displacement are averaged and are obtained the displacement of measured object, pyrometric cone prism 11 and quadrangular pyramid prism 12 displacement subtract each other and obtain displacement difference, and by displacement difference divided by after the rib point spacing between pyrometric cone prism 11 and quadrangular pyramid prism 12, then sine of negating obtains the angle value of measured object around X-axis, the angle value of measured object around Z axis can be measured after light path being placed in XY plane.
Displacement measurement is optics eight segmentation, and measurement of angle is optics four segmentation.
Compared with prior art, tool of the present invention has the following advantages:
1, the present invention is by increasing interference component part A, on the basis of existing double-frequency laser interference angular instrument, solves the problem not having displacement information.When measuring the multiaxial motion error of high-precision numerical control machine tool guideway, angular error can navigate on guide rail accurately.
2, in the present invention by improving times journey assembly part B, add the second prism of corner cube 7 and the second quarter-wave plate 9 and make to measure light times journey, the displacement of single prism of corner cube is optics four segmentation, and therefore measurement of angle is optics four segmentation.Displacement measurement is optics eight segmentation, and Measurement Resolution is improved.
Accompanying drawing explanation
Fig. 1 is the principle schematic of existing double-frequency laser interference angular instrument.
Fig. 2 is double-frequency laser displacement of the present invention and angle interferometer principle and device schematic diagram.
Embodiment
Below in conjunction with drawings and the specific embodiments topic, the present invention is described in further detail.
For ease of explanation, the present invention uses " on ", the space relative terms such as D score, "left", "right", for illustration of the elements relative of shown in figure in the relation of another element, it should be understood that, except the orientation shown in figure, the spatial terminology meaning of one's words is to comprise device different azimuth in use or operation.Such as, if the device in figure is squeezed, be stated as the element being positioned at other element D scores will be positioned at other elements " on ", therefore, exemplary term D score can comprise upper and lower both orientation.Device can otherwise be located (rotate 900 or be positioned at other orientation), and space used here illustrates relatively can correspondingly explain.
As shown in Figure 2, a kind of double-frequency laser displacement of the present invention and angle interferometer, comprise the stabilized two-frequency laser 1, part reflection beam splitting mirror 2, interference component A, times journey assembly B and the target mirror assembly C that set gradually from left to right, the phase measurement module 14 also comprising the first photoelectric conversion unit D1, the second photoelectric conversion unit D2, the 3rd photoelectric conversion unit D3 and be connected with the first photoelectric conversion unit D1, the second photoelectric conversion unit D2 and the 3rd photoelectric conversion unit D3;
Described stabilized two-frequency laser 1 Output of laser is the stabilized two-frequency laser of cross polarization, and output light is respectively the f that polarization state is parallel to YZ plane
1light and P polarization state light and polarization state are parallel to the f of XY plane
2light and S polarization state light;
Described part reflection beam splitting mirror 2 is made up of along inclined-plane bonding two right-angle prisms, and the inclined-plane of right-angle prism is coated with unpolarized part reflection beam splitting film;
Described interference component A comprises the first prism of corner cube 3, first quarter-wave plate 4, unpolarized Amici prism 5 and the first polarization splitting prism 6 that set gradually from top to bottom, described unpolarized Amici prism 5 and the first polarization splitting prism 6 form along inclined-plane bonding by two right-angle prisms, the upper surface of described first quarter-wave plate 4 bonds to the bottom surface of the first prism of corner cube 3, lower surface bonds is to the upper right-angle surface of unpolarized Amici prism 5, and the lower right-angle surface of described unpolarized Amici prism 5 bonds to the upper right-angle surface of the first polarization splitting prism 6; The inclined-plane of the right-angle prism of described unpolarized Amici prism 5 is coated with unpolarized spectro-film, reaches the splitting ratio of 50:50, the inclined-plane of the right-angle prism of described first polarization splitting prism 6 is coated with polarization beam splitter;
Described times of journey assembly B comprises the second prism of corner cube 7 set gradually from top to bottom, second polarization splitting prism 8 and catoptron 10, described second polarization splitting prism 8 is made up of along inclined-plane bonding two right-angle prisms, described catoptron 10 is a right-angled trapezium prism being coated with depolarization total reflection film on inclined-plane, its inclined-plane is parallel with the inclined-plane of the right-angle prism of described second polarization splitting prism 8, the upper right-angle surface of described second polarization splitting prism 8 bonds to the bottom surface of the second prism of corner cube 7, lower right-angle surface bonds to the upper right-angle surface of catoptron 10, the inclined-plane of the right-angle prism of described second polarization splitting prism 8 is coated with polarization beam splitter, also comprise the second quarter-wave plate 9 bonding to described second polarization splitting prism 8 and catoptron 10 right side,
Described target mirror assembly C comprises prism of corner cube Holding seat 13, and bonds to pyrometric cone prism 11 and the quadrangular pyramid prism 12 of prism of corner cube Holding seat 13 inside;
Three pyramidal planes of described first prism of corner cube 3, second prism of corner cube 7, pyrometric cone prism 11 and quadrangular pyramid prism 12 are coated with total reflection film;
Optical axis and the stabilized two-frequency laser 1 of described first quarter-wave plate 4 and the second quarter-wave plate 9 send f
1the angle in polarisation of light direction is 45 °;
The unpolarized part reflection beam splitting film that described part reflection beam splitting mirror 2 inclined-plane is coated with reaches the splitting ratio of 10:90.
Described stabilized two-frequency laser 1, part reflection beam splitting mirror 2, assembly A and assembly B position are fixed, and assembly C is installed on measured object, moves with measured object.
Principle of work of the present invention is: it is f that stabilized two-frequency laser 1 sends frequency
1and f
2cross polarization laser, after part reflection beam splitting mirror 2, sub-fraction light is reflexed to after the first photoelectric conversion unit D1 converts electric signal to and be transferred to phase measurement module 14, transmitted light is divided into two-beam through unpolarized Amici prism 5, and a branch of being used for is measured, and a road as a reference.Measure and to return after light impinges perpendicularly on pyrometric cone prism 11 and quadrangular pyramid prism 12 after doubly journey assembly B light splitting and with reference to actinic light.The conjunction light measuring light and reference light is transferred to phase measurement module 14 via inciding after the first polarization splitting prism 6 light splitting after the second photoelectric conversion unit D2 and the 3rd D3 photoelectric conversion unit convert electric signal to.When testee moves along the Y direction together with target mirror assembly C time, phase measurement module 14 detects the first photoelectric conversion unit D1 and the second photoelectric conversion unit D2 simultaneously, the phase differential that first photoelectric conversion unit D1 and the 3rd photoelectric conversion unit D3 exports electric signal changes the displacement measuring pyrometric cone prism 11 and quadrangular pyramid prism 12, and both on average just can measure displacements of testee.The ratio of the difference of the displacement of pyrometric cone prism 11 and quadrangular pyramid prism 12 and pyrometric cone prism 11 and quadrangular pyramid prism 12 rib point spacing is negated and is sinusoidally just obtained the minute angle value of testee around X-axis.The angle value of measured object around Z axis can be measured after light path being placed in XY plane.
Claims (5)
1. a double-frequency laser displacement and angle interferometer, it is characterized in that: comprise the stabilized two-frequency laser (1), part reflection beam splitting mirror (2), interference component (A), times journey assembly (B) and the target mirror assembly (C) that set gradually from left to right, the phase measurement module (14) also comprising the first photoelectric conversion unit (D1), the second photoelectric conversion unit (D2), the 3rd photoelectric conversion unit (D3) and be connected with the first photoelectric conversion unit (D1), the second photoelectric conversion unit (D2) and the 3rd photoelectric conversion unit (D3);
Described stabilized two-frequency laser (1) Output of laser is the stabilized two-frequency laser of cross polarization, and output light is respectively the f that polarization state is parallel to YZ plane
1light and P light and polarization state are parallel to the f of XY plane
2light and S light;
Described part reflection beam splitting mirror (2) is made up of along inclined-plane bonding two right-angle prisms, and the inclined-plane of right-angle prism is coated with unpolarized part reflection beam splitting film;
Described interference component (A) comprises the first prism of corner cube (3) set gradually from top to bottom, first quarter-wave plate (4), unpolarized Amici prism (5) and the first polarization splitting prism (6), described unpolarized Amici prism (5) and the first polarization splitting prism (6) form along inclined-plane bonding by two right-angle prisms, the upper surface of described first quarter-wave plate (4) bonds to the bottom surface of the first prism of corner cube (3), lower surface bonds is to the upper right-angle surface of unpolarized Amici prism (5), the lower right-angle surface of described unpolarized Amici prism (5) bonds to the upper right-angle surface of the first polarization splitting prism (6), the inclined-plane of the right-angle prism of described unpolarized Amici prism (5) is coated with unpolarized spectro-film, reaches the splitting ratio of 50:50, the inclined-plane of the right-angle prism of described first polarization splitting prism (6) is coated with polarization beam splitter,
Described times of journey assembly (B) comprises the second prism of corner cube (7) set gradually from top to bottom, second polarization splitting prism (8) and catoptron (10), described second polarization splitting prism (8) is made up of along inclined-plane bonding two right-angle prisms, described catoptron (10) is a right-angled trapezium prism being coated with depolarization total reflection film on inclined-plane, its inclined-plane is parallel with the inclined-plane of the right-angle prism of described second polarization splitting prism (8), the upper right-angle surface of described second polarization splitting prism (8) bonds to the bottom surface of the second prism of corner cube (7), lower right-angle surface bonds to the upper right-angle surface of catoptron (10), the inclined-plane of the right-angle prism of described second polarization splitting prism (8) is coated with polarization beam splitter, also comprise the second quarter-wave plate (9) bonding to described second polarization splitting prism (8) and catoptron (10) right side,
Described target mirror assembly (C) comprises prism of corner cube Holding seat (13), and bonds to the inner pyrometric cone prism (11) of prism of corner cube Holding seat (13) and quadrangular pyramid prism (12);
Three pyramidal planes of described first prism of corner cube (3), the second prism of corner cube (7), pyrometric cone prism (11) and quadrangular pyramid prism (12) are coated with total reflection film;
Described first quarter-wave plate (4) and the second quarter-wave plate (9) soon axle and stabilized two-frequency laser (1) send f
1the angle in polarisation of light direction is 45 °;
The position relationship of above-mentioned parts meets following requirement:
The f that stabilized two-frequency laser (1) sends
1light and P light, through part reflection beam splitting mirror (2), f
1a part of light of light reflexes to the first photoelectric conversion unit (D1), and the transmitted light of f1 light is divided into aplanatic two-beam and reflected light and transmitted light through unpolarized Amici prism (5); Reflected light successively through the first quarter-wave plate (4), by the first prism of corner cube (3), the first quarter-wave plate (4), unpolarized Amici prism (5), the first polarization splitting prism (6) after enter the 3rd photoelectric conversion unit (D3); Transmitted light, successively through the second polarization splitting prism (8), the second quarter-wave plate (9), by pyrometric cone prism (11), the second quarter-wave plate (9), the second polarization splitting prism (8), the second prism of corner cube (7), the second polarization splitting prism (8), the second quarter-wave plate (9), enters the second photoelectric conversion unit (D2) by after pyrometric cone prism (11), the second quarter-wave plate (9), the second polarization splitting prism (8), unpolarized Amici prism (5), the first polarization splitting prism (6);
The f2 light that stabilized two-frequency laser (1) sends and S light, through part reflection beam splitting mirror (2), a part of light of f2 light reflexes to the first photoelectric conversion unit (D1), and the transmitted light of f2 light is divided into aplanatic two-beam and reflected light and transmitted light through unpolarized Amici prism (5), reflected light successively through the first quarter-wave plate (4), by the first prism of corner cube (3), the first quarter-wave plate (4), unpolarized Amici prism (5), the first polarization splitting prism (6) after enter the second photoelectric conversion unit (D2), transmitted light is successively through the second polarization splitting prism (8), catoptron (10), second quarter-wave plate (9), by quadrangular pyramid prism (12), second quarter-wave plate (9), catoptron (10), second polarization splitting prism (8), second prism of corner cube (7), second polarization splitting prism (8), catoptron (10), second quarter-wave plate (9), by quadrangular pyramid prism (12), second quarter-wave plate (9), catoptron (10), second polarization splitting prism (8), unpolarized Amici prism (5), the 3rd photoelectric conversion unit (D3) is entered after first polarization splitting prism (6).
2. a kind of double-frequency laser displacement according to claim 1 and angle interferometer, is characterized in that: the unpolarized part reflection beam splitting film that described part reflection beam splitting mirror (2) inclined-plane is coated with reaches the splitting ratio of 10:90.
3. a kind of double-frequency laser displacement according to claim 1 and angle interferometer, it is characterized in that: described stabilized two-frequency laser (1), part reflection beam splitting mirror (2), interference component (A) and times journey assembly (B) position are fixed, target mirror assembly (C) is installed on measured object, moves with measured object.
4. a kind of double-frequency laser displacement according to claim 3 and angle interferometer, it is characterized in that: described first photoelectric conversion unit (D1), phase measurement module (14) is transferred to after light signal is converted to electric signal by the second photoelectric conversion unit (D2) and the 3rd photoelectric conversion unit (D3), phase measurement module (14) compares the phase differential variable quantity that the first photoelectric conversion unit (D1) and the second photoelectric conversion unit (D2) export electric signal, obtain the displacement of pyrometric cone prism (11), relatively the first photoelectric conversion unit (D1) and the 3rd photoelectric conversion unit (D3) export the phase differential variable quantity of electric signal, obtain the displacement of quadrangular pyramid prism (12), pyrometric cone prism (11) and quadrangular pyramid prism (12) displacement are averaged and are obtained the displacement of measured object, pyrometric cone prism (11) and quadrangular pyramid prism (12) displacement subtract each other and obtain displacement difference, by displacement difference divided by after the rib point spacing between pyrometric cone prism (11) and quadrangular pyramid prism (12), then sine of negating obtains the angle value of measured object around X-axis, the angle value of measured object around Z axis can be measured after light path being placed in XY plane.
5. a kind of double-frequency laser displacement according to claim 4 and angle interferometer, is characterized in that: displacement measurement is optics eight segmentation, and measurement of angle is optics four segmentation.
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| CN201310687001.3A CN103697807B (en) | 2013-12-13 | 2013-12-13 | A kind of double-frequency laser displacement and angle interferometer |
| PCT/CN2014/075960 WO2015085694A1 (en) | 2013-12-13 | 2014-04-22 | Double-frequency laser displacement and angle interferometer |
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| CN201310687001.3A CN103697807B (en) | 2013-12-13 | 2013-12-13 | A kind of double-frequency laser displacement and angle interferometer |
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| CN103697807B true CN103697807B (en) | 2016-04-13 |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103697807B (en) * | 2013-12-13 | 2016-04-13 | 清华大学 | A kind of double-frequency laser displacement and angle interferometer |
| GB2555646A (en) * | 2016-11-03 | 2018-05-09 | Mbda Uk Ltd | Interferometric position sensor |
| CN107356780A (en) * | 2017-06-28 | 2017-11-17 | 北京航天控制仪器研究所 | A kind of low speed speed precision detecting system of high precision turntable |
| CN107576265B (en) * | 2017-08-07 | 2019-11-12 | 北京理工大学 | A kind of measurement method that laser interferometer focuses automatically |
| CN108286943B (en) * | 2018-01-15 | 2020-10-16 | 中国科学院长春光学精密机械与物理研究所 | Displacement measurement optical system applied to workbench of photoetching system |
| CN109632010B (en) * | 2019-01-23 | 2020-07-17 | 中国科学院长春光学精密机械与物理研究所 | Displacement and angle synchronous measurement method |
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| WO2015085694A1 (en) | 2015-06-18 |
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