CN104897270B - Michelson heterodyne laser vialog based on monophone light modulation and polarization spectro - Google Patents
Michelson heterodyne laser vialog based on monophone light modulation and polarization spectro Download PDFInfo
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Abstract
Michelson heterodyne laser vialog based on monophone light modulation and polarization spectro belongs to laser interferometry field；It is divided to form reference arm and measuring arm using polarization spectroscope PBS, by acousto-optic modulator diffraction occurs for the incident beam on reference arm, and the first-order diffraction light of shift frequency is adjusted by light beam element of turning back, and makes direction of beam propagation parallel to incident beam；Referring to prism of corner cube by adjustment makes reflected light be located at acousto-optic modulator top, so that reference light only passes through an acousto-optic modulator, regulation measurement prism of corner cube makes reference light and measures light beam coincidence when light again passes by polarization spectroscope PBS, and interferes；The present invention realizes heterodyne laser interference measurement using less optical element, and light path adjustment is simple, can effectively solve the problems such as light path adjustment is complicated in prior art be present, have significant technical advantage in ultraprecise vibration measurement field.
Description
Technical field
The invention belongs to laser interferometry field, relates generally to a kind of mikey based on monophone light modulation and polarization spectro
The inferior heterodyne laser vialog of that.
Background technology
Laser vibration measurer is widely used as the ultra precise measurement instrument that vibration value can be traceable to optical maser wavelength
In the field such as the measurement of displacement dynamic, vibration measurement and monitoring, ultraprecise equipment and the system integration, scientific research and experiment.It is based on
The laser vibration measurer of laser interferance method can be divided into homodyne and the major class of heterodyne two according to principle, and the two is in operation principle, light channel structure
With there is significant difference on technical characterstic.The null method of measurement uses single-frequency laser as light source, based on classical or improved mikey
The inferior laser interference principle of that, the direct displacement of phase place change by measuring interference fringe；And heterodyne measurement method is usually to use
Double-frequency laser, based on Doppler effect, the movement velocity of measured piece is measured and indirect by measuring Doppler frequency difference as light source
Displacement.Its signal transacting of homodyne laser vibration measurer is substantially to carry out luminous intensity measurement, and system is straight-flow system in itself, has knot
Structure is simple, measurement accuracy is high, wide dynamic range, and non-linear the advantages that being easy to compensation, shortcoming is poor anti jamming capability, measurement result
Influenceed greatly by light intensity change.Heterodyne laser vialog (often claiming laser doppler vialog), its signal transacting was substantially into line frequency
Rate measures, and system is dynamic communication system in itself, and there is strong antijamming capability, measurement accuracy height, measurement result to be changed by light intensity
The features such as small is influenceed, therefore heterodyne measurement method is constantly subjected to the concern of researcher and turns into the study hotspot of this area.
Difference interference measuring requirement forms certain frequency difference between two interfere arms of vialog.The method for producing frequency difference is main
It is to utilize Zeemen effect and acousto-optic modulation.Zeemen effect is influenceed by frequency difference latch-up phenomenon, and caused double frequency frequency difference is typically small, is led to
Normal maximum frequency difference is no more than 4MHz.The frequency difference that acousto-optic modulation method obtains is generally larger, and frequency difference reaches more than 20MHz, Er Qiepin
Rate stability is very good, can meet the needs of high speed, high-acruracy survey.
Existing heterodyne laser vialog (1.Martin B, the et.al. " High- that frequency difference is produced based on acousto-optic modulation
Precision laser vibrometers based on digital Doppler-signal processing ",
Proceedings of SPIE, Vol.4827：50-61,2002；2.Stefan Franz.et.al.“Heterodyne
interferometer having an optical modulator”.US Patent：US7688451B2；) be with Mach once
Based on Deccan interferometer, using frequency stabilized carbon dioxide laser as light source, it is divided to form two interfere arms by polarization spectroscope PBS, makees
For measuring arm and reference arm, frequency displacement is realized using acousto-optic modulator at least one interfere arm, so that between two interfere arms
Form frequency difference；Closing light is carried out to light beam using plane mirror, polarization spectroscope PBS and non-polarization Beamsplitter NBS again.Monophone
The frequency difference of double-frequency laser is big caused by optical frequency shift technical scheme, high to system hardware rate request, to solve this problem, can adopt
The relatively small light beam of two-way frequency difference is produced with alliteration light modulation techniques scheme, respectively as reference light and measurement light, dual-acousto-optic is adjusted
Although scheme processed can reduce frequency difference, optical system complexity is added.To sum up, the shortcomings that prior art is present be：
1) prior art is based on Mach-Zehnder interferometer, and interfere arm and measuring arm are integrally rectangular, passes through polarization point
Light microscopic is divided in an apex of rectangle, then passes through extra polarization spectroscope PBS, non-polarization Beamsplitter NBS and speculum
In the diagonal angle closing light of optical splitting point, there are multiple polarization spectroscope PBS in the technical scheme, polarisation leakage phenomenon be present, cause light
Road nonlinearity erron is notable；2) according to the operation principle of acousto-optic modulator, frequency displacement can occur for only first-order diffraction light, but with incidence
There is certain angle in light beam, so that light path closing light is difficult, reference light and measurement light are difficult to interfere.
Due to acousto-optic modulator first-order diffraction light and incident light is not parallel and the factors such as optical element is undesirable, especially
It is polarization spectroscope PBS polarisation leakage, causes existing heterodyne laser vialog technical scheme adjustment difficult, and by light path knot
, the nonlinearity erron for being difficult to overcome be present, it is difficult to meet sub- nanometer in structure, principle and the undesirable limitation of optics self character
Even micromicron class precision vibration measurement demand.Therefore, how the innovation on light channel structure and principle is passed through, there is provided a kind of light path is adjusted
Whole simple or the less heterodyne laser vibration measuring technical scheme of nonlinearity erron, meaning are very great.
The content of the invention
The purpose of the present invention be for existing Mach once moral heterodyne laser vibration measuring technical scheme on light channel structure and principle
A kind of the problems such as existing light path adjustment is difficult, nonlinearity erron, there is provided Michael based on monophone light modulation and polarization spectro
Inferior heterodyne laser vialog, by the innovation of light channel structure and principle, based on Michelson's interferometer, using less light
Learn element and realize that heterodyne laser interference measures, adjustment is simple and convenient, can effectively solve light path in prior art and polarization be present
Leakage and the problem of polarization aliasing is notable, light path adjustment is difficult.
The present invention technical solution be：
A kind of Michelson heterodyne laser vialog based on monophone light modulation and polarization spectro, by laser, two/
One wave plate, polarization spectroscope, quarter-wave plate, measurement prism of corner cube, acousto-optic modulator, light beam turn back element, with reference to pyramid
Prism, analyzer, high-speed photodetector composition, the laser send linearly polarized light, adjust and polarize through half wave plate
Direction, then it is divided through polarization spectroscope, reflected light forms the first light beam and forms the second light beam as measurement light, transmitted light
As reference light；First light beam becomes circularly polarized light after quarter-wave plate, and four points are again passed by after measurement mirror reflection
One of wave plate become linearly polarized light, then transmit to form the 3rd light beam through polarization spectroscope；Second light beam passes through acousto-optic modulator
Diffracted beam is produced, diffracted beam is turned back through light beam after element adjustment, and direction of beam propagation is parallel to the second light beam, through reference angle
After cone prism reflection, then through polarization spectroscope reflect to form the 4th light beam；3rd light beam, the 4th beam path are overlapped and polarized
Direction is orthogonal；3rd light beam, the 4th light beam interfere after analyzer, are received by high-speed photodetector.
Light beam element of turning back is plane mirror or wedge.
The first-order diffraction light of the acousto-optic modulator is orthogonal with incident light polarization.
The laser is frequency stabilized carbon dioxide laser.
The technological innovation and caused good result of the present invention is：
(1) present invention proposes a kind of Michelson heterodyne laser vibration measuring technical scheme based on acousto-optic modulation.The technology
For scheme based on Michelson's interferometer, light path is simple, and component is less, reduces link caused by nonlinearity erron；Profit
The characteristic of frequency displacement occurs with acousto-optic modulator first-order diffraction light, makes to form frequency difference between two interfere arms；Made using prism of corner cube
For measurement mirror and reference mirror, the return light of interfere arm is located above acousto-optic modulator, only pass through an acousto-optic modulator, so as to
Realize heterodyne laser interference measurement.By above-mentioned technological innovation, efficiently solve prior art path optics element compared with
It is more, the problem of nonlinearity erron source is more.
(2) present invention only turn back element by the light beam that need to adjust in interfere arm, makes the direction of propagation of first-order diffraction light beam with entering
Irradiating light beam or zero order beam are parallel, you can make reference light and survey by the position for adjusting measurement prism of corner cube and reference prism of corner cube
Amount light interferes, and light path adjustment is very convenient.Solve the problems, such as that the adjustment of prior art light path is inconvenient.
Brief description of the drawings
Fig. 1 is an implementation of the Michelson heterodyne laser vialog of the invention based on monophone light modulation and polarization spectro
The three-dimensional views of example；
Fig. 2 is an implementation of the Michelson heterodyne laser vialog of the invention based on monophone light modulation and polarization spectro
The light path principle diagram of example；
Fig. 3 is another implementation of the Michelson heterodyne laser vialog of the invention based on monophone light modulation and polarization spectro
The three-dimensional views of example；
Fig. 4 is another implementation of the Michelson heterodyne laser vialog of the invention based on monophone light modulation and polarization spectro
The light path principle diagram of example；
Fig. 5 is the acousto-optic modulator operation principle of the present invention；
Fig. 6 is the principles of signal processing figure of the present invention；
In figure, 1 laser, 2 polarization spectroscopes, 3 quarter-wave plates, 4 measurement prism of corner cubes, 5 acousto-optic modulators, 6 light
Shu Zhezhuan elements, 7 are with reference to prism of corner cubes, 8 high-speed photodetectors, 9 first light beams, 10 second light beams, 11 diffracted beams, 12 the
Three light beams, 13 the 4th light beams, 14 half wave plates, 15 analyzers.
Embodiment
The embodiment of the present invention is described in detail below in conjunction with the accompanying drawings, and provides embodiment.
A kind of Michelson heterodyne laser vialog based on monophone light modulation and polarization spectro, by laser 1, two/
One wave plate 14, polarization spectroscope 2, quarter-wave plate 3, measurement prism of corner cube 4, acousto-optic modulator 5, light beam are turned back element 6, ginseng
Examine prism of corner cube 7, analyzer 15, high-speed photodetector 8 to form, the laser 1 sends linearly polarized light, through half ripple
Piece 14 adjusts polarization direction, is then divided through polarization spectroscope 2, and reflected light forms the first light beam 9 as measurement light, transmission
Light forms the second light beam 10 and is used as reference light；First light beam 9 becomes circularly polarized light after quarter-wave plate 3, through measuring mirror 4
Quarter-wave plate 3 is again passed by after reflection and becomes linearly polarized light, is then transmitted through polarization spectroscope 2 and forms the 3rd light beam 12；
Second light beam 10 produces diffracted beam 11 by acousto-optic modulator 5, and diffracted beam 11 is turned back through light beam after the adjustment of element 6, light beam
The direction of propagation reflects to form the 4th light parallel to the second light beam 10 after being reflected with reference to prism of corner cube 7, then through polarization spectroscope 2
Beam 13；3rd light beam 12, the light path of the 4th light beam 13 overlap and polarization direction is orthogonal；3rd light beam 12, the 4th light beam 13 are by inspection
Interfere after inclined device 15, received by high-speed photodetector 8.
Light beam element 6 of turning back is plane mirror or wedge.
The first-order diffraction light of the acousto-optic modulator 5 is orthogonal with incident light polarization.
The laser 1 is frequency stabilized carbon dioxide laser.
It is one embodiment of the present of invention to be given with reference to Fig. 1 and Fig. 2.In the present embodiment, light beam element 6 of turning back is plane reflection
Mirror.Laser 1 uses the He-Ne lasers Jing Guo frequency stabilization, wavelength 632.8nm, noise ＜ 0.05%rms, and power output is
1mW, polarization turn to 1000: 1, frequency ω0, in space coordinates xyz, laser 1 sends linearly polarized light, and polarization direction is
X-axis, as P light.Half wave plate 14 is placed in x/y plane, and the fast axle of half wave plate 14 and x-axis are into 22.5 ° of angles
When, P light becomes 45 ° of linearly polarized lights, is divided through polarization spectroscope 2, and the reflected light of S components forms the first light as measurement light
Beam 9, the transmitted light of P components form the second light beam 10 as reference light.In measuring arm, quarter-wave plate 3 is placed on yz
In plane, when the fast axle of quarter-wave plate 3 and z-axis angle at 45 °, the first light beam 9 of S components first becomes through quarter-wave plate
Circularly polarized light, become P light after measurement prism of corner cube 4 reflects, then through quarter-wave plate 3, then transmitted through polarization spectroscope 2
Form the 3rd light beam 12.The athletic meeting for measuring prism of corner cube produces Doppler frequency shift ± ωd, therefore the return light frequency of measuring arm
For ω0±ωd.On reference arm, the second light beam 10 of P components passes through acousto-optic modulator 5, and the driving frequency of acousto-optic modulator 5 is
ωc, the diffracted beam 11 of outgoing is S light, frequency ω0+ωc, there is certain angle the direction of propagation with incident light.Diffracted beam 11
After plane mirror adjusts, the direction of propagation is parallel with the second light beam 10, through being reflected with reference to prism of corner cube 7, the return of reference arm
Light is located at the top of acousto-optic modulator 5, then reflects to form the 4th light beam 13 through polarization spectroscope 2.Measure the light beam 12 of light the 3rd, reference
The light beam 13 of light the 4th overlaps, polarization direction is orthogonal, is interfered after analyzer 15, the polarization direction of analyzer 15 and z-axis into
During 45 ° of angles, interference signal maximum intensity.Frequency is ωc±ωdInterference signal received by high-speed photodetector 8.This reality
Apply in example, high-speed photodetector 8 be Si PIN types photodetector, a diameter of 0.8mm in photosensitive area, bandwidth 200MHz.
Fig. 3 and Fig. 4 provide an alternative embodiment of the invention.In the present embodiment, light beam element 6 of turning back is wedge, root
According to law of refraction principle, change direction of beam propagation.
Fig. 5 is the acousto-optic modulator operation principle diagram of the present invention.In the present embodiment, the acousto-optic crsytal of acousto-optic modulator 5
For bragg cell, due to the inherent characteristic of Prague acoustooptic diffraction, the frequency of ultrasonic wave can not be too small, typically no less than 20MHz,
The double-frequency laser frequency difference that can then obtain is equal to or more than 20MHz.When incident light oblique incidence is to acousto-optic modulator 5, outgoing
Light only has diffraction zero-level light and one-level light, and the frequency of diffraction zero-level light and direction are identical with incident light, and frequency occurs for diffraction one-level light
Move, and there is a deflection angle direction of propagation with zero order light or incident light.Diffraction zero-level polarization state is consistent with incident light, one-level light
It is orthogonal with incident light polarization.
Fig. 6 is the principles of signal processing diagram of the present invention.Measurement signal cos (the ω that high-speed photodetector 8 receivesc
±ωd) t reference signal cos ω with acousto-optic modulator 5 respectivelycT, the sin ω of 90 ° of reference signal phase shiftcT is multiplied, and passes through respectively
After LPF, A/D conversions, orthogonal signalling are obtained, then obtain the phase of moving object through arctangent computation
Claims (4)
1. a kind of Michelson heterodyne laser vialog based on monophone light modulation and polarization spectro, by laser (1), two/
One wave plate (14), polarization spectroscope (2), quarter-wave plate (3), measurement prism of corner cube (4), acousto-optic modulator (5), light beam folding
Turn element (6), with reference to prism of corner cube (7), analyzer (15), high-speed photodetector (8) composition, it is characterised in that：It is described to swash
Light device (1) sends linearly polarized light, adjusts polarization direction through half wave plate (14), is then divided through polarization spectroscope (2)
Light, reflected light form the first light beam (9) and form the second light beam (10) as measurement light, transmitted light and be used as reference light；First light beam
(9) become circularly polarized light after quarter-wave plate (3), a quarter is again passed by after measurement prism of corner cube (4) reflection
Wave plate (3) becomes linearly polarized light, is then transmitted through polarization spectroscope (2) and forms the 3rd light beam (12)；Second light beam (10) passes through
Acousto-optic modulator (5) produces diffracted beam (11), and diffracted beam (11) is turned back through light beam after element (6) adjustment, beam propagation side
To parallel to the second light beam (10), the 4th light is reflected to form after with reference to prism of corner cube (7) reflection, then through polarization spectroscope (2)
Beam (13)；3rd light beam (12), the 4th light beam (13) light path overlap and polarization direction is orthogonal；3rd light beam (12), the 4th light beam
(13) interfere after analyzer (15), received by high-speed photodetector (8).
2. the Michelson heterodyne laser vialog according to claim 1 based on monophone light modulation and polarization spectro, its
It is characterised by：Light beam element (6) of turning back is plane mirror or wedge.
3. the Michelson heterodyne laser vialog according to claim 1 based on monophone light modulation and polarization spectro, its
It is characterised by：The first-order diffraction light of the acousto-optic modulator (5) is orthogonal with incident light polarization.
4. the Michelson heterodyne laser vialog according to claim 1 based on monophone light modulation and polarization spectro, its
It is characterised by：The laser (1) is frequency stabilized carbon dioxide laser.
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