CN104913838B - Single channel circular polarization is interfered and single Wo Lasite prismatic decomposition formula homodyne laser vibration measurer - Google Patents
Single channel circular polarization is interfered and single Wo Lasite prismatic decomposition formula homodyne laser vibration measurer Download PDFInfo
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Abstract
The single channel circular polarization of anti-polarization aliasing is interfered and single Wo Lasite prismatic decomposition formula homodyne laser vibration measurer belongs to laser interferometry field; Light is measured in interference portion is orthogonal by two quarter-wave plates and non-polarization Beamsplitter NBS generation single channel polarization direction, light path overlaps circular polarization reference light and circular polarization, the photosignal of four road phase 90 �� is produced through same Wo Lasite prism, thus obtaining, from light channel structure and principle, the prominent characteristic suppressing nonlinearity erron after probe portion reference light and measurement light light splitting; The present invention can realize four-way homodyne orthogonal laser interferometry, can effectively solve light path in prior art and there is polarization leakage and polarization aliasing, there is direct current biasing error and non-orthogonal errors in output signal, the problems such as measurement result nonlinearity erron is notable, have significant technical advantage in ultraprecise vibration measurement field.
Description
Technical field
The invention belongs to laser interferometry field, the single channel circular polarization relating generally to a kind of anti-polarization aliasing is interfered and single Wo Lasite prismatic decomposition formula homodyne laser vibration measurer.
Background technology
Laser vibration measurer, as the ultra precise measurement instrument that vibration value can be traceable to optical maser wavelength, is widely used in the fields such as displacement kinetic measurement, vibration measurement and monitoring, ultraprecise equipment and the system integration, scientific research and experiment. Laser vibration measurer based on laser interferance method can be divided into homodyne and the big class of heterodyne two according to principle, and the two has significant difference on operation principle, light channel structure and technical characterstic. The null method of measurement adopts single-frequency laser as light source, based on Michelson laser interference principle that is classical or that improve, changes direct displacement by measuring the phase place of interference fringe; And heterodyne measurement method is to adopt double-frequency laser as light source, based on Doppler effect, the indirect displacement by the movement velocity of measurement Doppler frequency difference measurement measured piece. Heterodyne laser vialog (often claims laser doppler vialog), and its signal processing is substantially by frequency measurement, system itself is dynamic communication system, have that capacity of resisting disturbance is strong, measurement result is changed by light intensity affects the features such as little, shortcoming is that nonlinearity erron source is more, revise more complicated, there is higher technical sophistication degree and technical difficulty. Homodyne laser vibration measurer technology is then comparatively ripe, has that simple in construction, certainty of measurement be high, wide dynamic range, non-linear is prone to the advantages such as compensation. Especially in recent years, scientific research and experiment propose sub-nanometer even the vibration measurement demand of micromicron precision, and the null method of measurement receives the concern of research worker again and becomes the study hotspot of this area.
Development along with interferometry technology, current homodyne laser vibration measurer adopts advanced homodyne orthogonal laser vibration measuring scheme, utilizes Polarized light phase-shift interference technique, it is thus achieved that the two-way orthogonal optical signal of telecommunication, demodulated by arctangent computation and continuous phase, it is achieved the high-resolution survey of vibration. The amplitude such as two paths of signals Ying Shi in the ideal case of homodyne orthogonal laser vialog output, the harmonic signal without direct current biasing, quadrature in phase, the Lie groupoid of two paths of signals should be a standard round; But reality due to laser power drift about, optical component is undesirable and the factor such as optical element error in mounting position, especially there is polarisation leakage in the optics such as polarization spectroscope PBS and polaroid, there is the factors such as phase delay error in wave plate device, there is direct current biasing, non-constant amplitude and non-orthogonal errors in the two-way orthogonal signalling causing actual output, thus bringing nonlinearity erron to measurement result.Existing homodyne orthogonal laser vialog nonlinearity erron up to several nanometers, even tens nanometers, although can be modified by mathematical method to a certain extent, but the processing speed of sample rate and digital signal is proposed significantly high requirement, and requires that the Lie groupoid of two paths of signals is necessary for complete ellipse and just can be modified. Revising computing and have a strong impact on the real-time of measurement on the one hand, precision and effect are also restrained on the other hand. Therefore, how by light channel structure and the innovation in principle, the factor avoiding nonlinearity erron to produce principle, it is solve homodyne orthogonal laser vialog nonlinearity erron problem most efficient method, is also the hot issue of this area research.
The light channel structure of homodyne orthogonal laser vialog is made up of interference portion and probe portion two large divisions. At interference portion and/or probe portion, by the restriction that light channel structure, principle and optics self character are undesirable, there is the nonlinearity erron being difficult to overcome in prior art. The pluses and minuses of prior art and the reason of generation nonlinearity erron are described below:
(1) in the homodyne orthogonal laser vialog technical scheme of traditional classical, interference portion adopts polarization spectroscope PBS light splitting, produces the reference light of P component and the measurement light of S component; Probe portion elder generation road after non-polarization Beamsplitter NBS light splitting, after polaroid, is received by a photoelectric detector, and another Lu Xianjing quarter-wave plate becomes circularly polarized light, is then received by a photoelectric detector then through polaroid. In this technical scheme, the polaroid extinction ratio low (being typically in 1000:1 magnitude) that the polarization spectroscope PBS of interference portion employing and probe portion adopt, there is polarisation leakage phenomenon, cause that this light path nonlinearity erron is notable.
(2) 1999 years, based on the homodyne orthogonal laser vibration measuring technical scheme of non-polarization Beamsplitter NBS and Wo Lasite prismatic decomposition, it is written in " the vibration absolute calibration of ISO16063-11 laser interferance method " standard (ISO16063-41 " Methodsforthecalibrationofvibrationandshocktransducers--Part41:Calibrationoflaservibrometers " .). In this technical scheme, interference portion LASER Light Source polarization light output, make the polarization direction of line polarized light and the quick shaft direction angle at 45 �� of quarter-wave plate, line polarized light becomes circularly polarized light after quarter-wave plate, adopt non-polarization Beamsplitter NBS that circularly polarized light is carried out light splitting, reference arm adopts polaroid by circular polarization, the polarization state of reference light is become linear polarization, and measure light and be always circularly polarized light; Probe portion reference light and measurement light produce, through Wo Lasite prismatic decomposition, the interference signal that two-way is orthogonal. Owing to probe portion adopts Wo Lasite prismatic decomposition, Wo Lasite prism utilizes the physical characteristic of birefringece crystal self to separate different polarized light, having bigger extinction ratio (can be higher than 100000:1), therefore probe portion can be considered and is absent from polarization aliasing. The existence of this technical scheme is disadvantageous in that: 1) places polaroid on reference arm and causes that reference light is substantially reduced relative to the light intensity measuring light, introduces the not constant amplitude error of two-way output signal; 2) interference portion adopts polaroid to produce line polarized light, and polaroid extinction ratio is low, and interference portion exists polarization aliasing and introduces nonlinearity erron.
(3) 2009 years, the GPeter of Slovenia etc. propose a kind of homodyne orthogonal laser vialog (1.GPeter based on non-polarization Beamsplitter NBS and eight/mono-wave plate, TPozar, MJanez. " Quadraturephase-shifterroranalysisusingahomodynelaserint erferometer " .OpticsExpress, 2009, 17 (18): 16322-16331.2.GPeter, TPozar, MJanez. " Phase-shifterrorinquadrature-detection-basedinterferomet ers " .Proc.ofSPIE, 2010, Vol.7726:77260X-1-77260X-10.).In this technical scheme, interference portion lasing light emitter output polarization direction is the line polarized light in 45 �� of directions, adopts non-polarization Beamsplitter NBS to carry out light splitting, and reference light turns back twice through 1/8th wave plates, polarization state is become circular polarization from linear polarization, and measures light polarization direction and remain unchanged; Reference light and measurement light adopt polarization spectroscope PBS light splitting to produce the interference signal that two-way is orthogonal at probe portion. The light path of this technical scheme is relatively simple, and optical element is less. Its existence is disadvantageous in that: 1) 1/8th wave plate device precision are poor, actual phase shift is less than 45 ��, what linear polarization reference light twice actually obtained through 1/8th wave plates is elliptically polarized light, causes that the nonopiate phase displacement error of the two paths of signals of actual output is bigger; 2) probe portion adopts PBS light splitting, there is polarisation leakage phenomenon, introduces bigger nonlinearity erron.
There are other two kinds of improved forms in this technical scheme: one is that JeonghoAhn of Korea S etc. is on the basis of GPeter scheme light path, prism of corner cube is adopted to replace the Plane reference mirror in GPeter scheme and measure mirror (JeonghoAhn, " NonliearErrorCompensationandAlignmentErrorInsensitiveMet hodforResolutionEnhancementofPreciseDisplacementMeasurin gInterferometer ", Doctoralthesis, 2010), in reference arm, quarter-wave plate is adopted to replace ��/8 wave plate, before reflecting due to pyramid reference mirror, there is lateral displacement in rear reference light, therefore reference light can be made only through a quarter-wave plate, scheme after improvement can obtain comparatively ideal circular polarization state reference light, but owing to the lateral displacement of reference light is less, as adopted, wave plate frame is fixing can block adjacent beams to quarter-wave plate, therefore the actual surface that usually quarter-wave plate is affixed on non-polarization Beamsplitter NBS, can cause adjusting difficulty. two is that Hungarian D �� nielI etc. adopts Wo Lasite prism to instead of polarization spectroscope PBS (D �� nielI. " Advancedsuccessivephaseunwrappingalgorithmforquadratureo utputMichelsoninterferometers " .Measurement of probe portion in GPeter scheme, 2005,37 (2): 95-102.) polarisation leakage problem of probe portion, is only improved to a certain extent.
Above-mentioned several homodyne orthogonal laser vibration measuring technical scheme all adopts dual pathways Detection Techniques at probe portion, what ideally export is the orthogonal optical signal of telecommunication of two-way phase 90 ��, owing to output signal is direct current signal, the power excursion of laser and other common mode disturbances factor can cause the direct current biasing of two-way orthogonal signalling to change. Phase place solution formula " ��=tan according to signal processing-1[(Iy-I0)/(Ix-I0)], wherein IxAnd IyFor the orthogonal optical signal of telecommunication, I0For direct current biasing " it can be seen that direct current biasing change can directly affect phase place calculation result, thus introducing nonlinearity erron. In dual pathways Detection Techniques scheme, laser power drift is an important errors source of nonlinearity erron. Scholar is had to propose new Four-channel detection technology scheme, thinking is by polarizing phase shift, obtain the photosignal of respectively 0 ��, 90 ��, 180 �� and 270 �� of four tunnel phase places, make two signal subtractions of phase 180 ��, can error that effectively DC-offset correction and other common mode disturbances factors introduce, improve the capacity of resisting disturbance of system.
Probe portion is as one of the two big ingredients of homodyne orthogonal laser vialog light path, and nonlinearity erron size and the certainty of measurement of homodyne orthogonal laser vialog are had very important effect by its performance and precision. For the existing various Four-channel detection technology schemes that can be used for homodyne orthogonal laser vibration measuring, the reason of respective pluses and minuses and generation nonlinearity erron is described below:
(1) nineteen ninety-five, Italy scholar Greco proposes a kind of Four-channel detection technology scheme (GrecoV based on quarter-wave plate phase shift and polarization spectroscope PBS light splitting first, MolesiniG, QuercioliF. " Accuratepolarizationinterferometer " .ReviewofScientificInstruments, 1995,66 (7): 3729-3734.).This technical scheme can be used for the probe portion of homodyne orthogonal laser vialog, if prime light path output signal type is the orthogonal line polarized light in two polarization directions, it is designated as P light and S light, the quick shaft direction of 1/2nd wave plates is made to become 22.5 �� of angles with the polarization direction of P light or S light, then P light, S light becomes two orhtogonal linear polarizaiton light that polarization direction is 45 �� of directions after 1/2nd wave plates, then through non-polarization Beamsplitter NBS equal proportion light splitting, wherein a road directly obtains, through polarization spectroscope PBS, the interference signal that two-way phase place is 0 �� and 180 ��, the fast axle of another Lu Xianjing be 45 �� of directions quarter-wave plate become circularly polarized light, the interference signal that other two-way phase place is 90 �� and 270 �� is obtained then through polarization spectroscope PBS light splitting, finally give the interference signal of four road phase 90 ��. the existence of this technical scheme is disadvantageous in that: 1) optical element is more, and nonlinearity erron source is more, 2) adopt polarization spectroscope PBS light splitting, there is polarisation leakage phenomenon, cause that nonlinearity erron is notable.
(2) calendar year 2001, Taiwan's scholars Lee etc. propose the Four-channel detection technology scheme (Lee based on Space Rotating polarization spectroscope PBS, J.Y.Su, D.C. " Centralfringeidentificationbyphasequadratureinterferomet rictechniqueandtunablelaser-diode " .OpticsCommunications, 2001,198 (4-6): 333-337). This Four-channel detection technology scheme is on the basis of the Greco technical scheme proposed, by by one of them polarization spectroscope PBS Space Rotating 45 �� so that light path decreases 1/2nd wave plates. But due to the inevitable light splitting error of PBS, namely mutually orthogonal polarized light cannot be kept completely separate, therefore there is also more significant polarisation leakage phenomenon, have a strong impact on the output quality of each road signal.
(3) 1997 years, American scholar Peter proposed a kind of Four-channel detection technology scheme based on Wo Lasite prismatic decomposition (PeterG. " Homodyneinterferometricreceiverandcalibrationmethodhavin gimprovedaccuracyandfunctionality " .USPatent:US5663793). This technical scheme can be used for the probe portion of homodyne orthogonal laser vialog, as prime light path exports two crossed polarized lights, it is divided into two bundles by a kind of partial polarization spectroscope (PPBS), a branch of directly it be divided into two bundles through Wo Lasite prism and then received by two photodetectors, another Shu Xianjing quarter-wave plate, it is divided into two bundles then through Wo Lasite prism then to be received by two photodetectors, finally gives the interference signal of four road phase 90 ��. The existence of this technical scheme is disadvantageous in that: 1) probe portion needs extra quarter-wave plate could produce the photosignal of four road phase 90 ��; 2) probe portion light path is asymmetric, is easily introduced direct current biasing, non-constant amplitude and non-orthogonal errors, thus introducing nonlinearity erron.
(4) 2006 years, the Wang Li of Shanghai University of Science and Technology etc. propose on the basis of the Four-channel detection technology scheme of Peter, before quarter-wave plate is placed on spectroscope, four-way detection (Wang Li is realized again through around 45 �� of one of them Wo Lasite prism of beam direction Space Rotating, Hou Wenmei. " single frequency laser interferometer four-way receiving system ". metering journal, 2006,27 (4): 313-316). The advantage of this technical scheme is that light path symmetry is better, solving the non-orthogonal errors problem of the Peter scheme proposed, its existence is disadvantageous in that: 1) probe portion needs extra quarter-wave plate could produce the photosignal of four road phase 90 ��;2) spectroscope adopted is common spectroscope BS, and spectrophotometric result is relevant with the polarization state inciding four-way probe portion, and has bigger additional phase shift.
(5) 2015 years, the Hu Pengchengs of Harbin Institute of Technology etc. it is also proposed a kind of Four-channel detection technology scheme (PengchengHu based on Space Rotating Wo Lasite prism, et.al. " DC-offsethomodyneinterferometeranditsnonlinearitycompens ation " .OpticsExpress, 2015,23 (7): 8399-8408). In this technical scheme, as interference portion exports the line polarized light that two polarization directions are orthogonal, it is designated as P light and S light, it is divided into two bundles through non-polarization Beamsplitter NBS, a branch of direct warp is divided into two bundles around the Wo Lasite prism of beam direction Space Rotating 45 ��, then received by two photodetectors, the quarter-wave plate that the polarization direction of another Shu Xianjing optical axis and a line polarized light is consistent, it is divided into two bundles then through another around the Wo Lasite prism of beam direction Space Rotating 45 ��, is then received by another two photodetector. Finally give the interference signal of four road phase 90 ��. The existence of this technical scheme is disadvantageous in that: 1) probe portion needs extra quarter-wave plate could produce the photosignal of four road phase 90 ��; 2) probe portion light path is asymmetric, is easily introduced direct current biasing, non-constant amplitude and non-orthogonal errors, thus introducing nonlinearity erron.
To sum up, owing to laser power is drifted about, optical component is undesirable and the factor such as optical element alignment error, especially the phase delay error of the polarisation leakage of the optics such as polarization spectroscope PBS and polaroid and wave plate device, cause that existing homodyne orthogonal laser vialog technical scheme is at interference portion and/or probe portion, by light channel structure, principle and the undesirable restriction of optics self character, there is the nonlinearity erron being difficult to overcome, nonlinearity erron is up to several nm even tens nm, it is difficult to meet in real time, high-acruracy survey, especially Asia nanometer of future generation even micromicron class precision, and the vibration measurement demand such as nanoscale amplitude. therefore, how by light channel structure and the innovation in principle, it is provided that a kind of homodyne orthogonal laser vibration measuring technical scheme that can suppress nonlinearity erron from light channel structure and principle, meaning is very great.
Summary of the invention
It is an object of the invention to the nonlinearity erron problem existed on light channel structure and principle for existing homodyne orthogonal laser vibration measuring technical scheme, the single channel circular polarization providing a kind of anti-polarization aliasing is interfered and single Wo Lasite prismatic decomposition formula homodyne laser vibration measurer, innovation by light channel structure Yu principle, less optical element is adopted to realize four-way homodyne orthogonal laser interferometry, the source of various nonlinearity erron is eliminated principle, obtain, from light channel structure and principle, the significant properties suppressing nonlinearity erron, can effectively solve light path in prior art and there is polarization leakage and polarization aliasing, there is direct current biasing and non-orthogonal errors in output signal, the significant problem of measurement result nonlinearity erron.
The technical solution of the present invention is:
The single channel circular polarization of a kind of anti-polarization aliasing is interfered and single Wo Lasite prismatic decomposition formula homodyne laser vibration measurer, being made up of interference portion and probe portion, described interference portion is made up of laser instrument, the first quarter-wave plate, the first non-polarization Beamsplitter, measurement mirror, the second quarter-wave plate and reference mirror;Laser instrument sends line polarized light, becomes circularly polarized light after the first quarter-wave plate, carries out light splitting then through the first non-polarization Beamsplitter, and reflection light forms the first light beam as measuring light, and transmission light forms the second light beam as reference light; First light beam, after measuring mirror reflection, forms the 3rd light beam then through the first non-polarization Beamsplitter transmission; Second light beam becomes line polarized light after the second quarter-wave plate, again passes by the second quarter-wave plate and becomes circularly polarized light, then reflect to form the 4th light beam through the first non-polarization Beamsplitter after reference mirror reflects; 3rd light beam, the 4th light beam are the circularly polarized light that light path overlaps and polarization direction is orthogonal; Described probe portion is made up of the second non-polarization Beamsplitter, the first reflecting mirror, the second reflecting mirror, Wo Lasite prism, the 3rd quarter-wave plate, the first photodetector, the second photodetector, the 3rd photodetector and the 4th photodetector; 3rd light beam, the 4th light beam form the 5th light beam through the second non-polarization Beamsplitter transmission and reflect to form the 6th light beam; 5th light beam, after the first reflecting mirror reflection, first after the 3rd quarter-wave plate, is divided into an o light, an e light by Wo Lasite prism, is received by the first photodetector, the second photodetector respectively; 6th light beam, after the second reflecting mirror reflection, is divided into the 2nd o light, the 2nd e light by Wo Lasite prism, is received by the 3rd photodetector, the 4th photodetector respectively.
Described laser instrument is frequency stabilized carbon dioxide laser.
Described measurement mirror, reference mirror are plane reflection or corner cube reflector.
Described first and second reflecting mirror is plane mirror or corner cube prism.
The technological innovation of the present invention and the good result of generation are in that:
(1) present invention proposes a kind of four-way homodyne orthogonal laser vialog technical scheme suppressing nonlinearity erron principle. This technical scheme light path is simple, and components and parts are few, decreases the link that nonlinearity erron produces; Utilize the physical characteristic light splitting of Wo Lasite prism birefringece crystal self, high extinction ratio (100000:1 can be higher than) can be obtained, non-polarization Beamsplitter NBS is adopted to carry out equal proportion light splitting, dichroism is unrelated with the polarization state of incident illumination, thus polarization leakage and aliasing can be suppressed principle; By above-mentioned technological innovation, efficiently solving prior art light path and there is serious polarization leakage and polarization aliasing, there is direct current biasing and non-orthogonal errors, the significant problem of measurement result nonlinearity erron in output signal.
(2) present invention is by the setting angle of three quarter-wave plates, can compensate for direct current biasing, non-orthogonal errors problem that light source undesirable (elliptic polarization etc.), the optical element undesirable additional phase shift etc. of non-polarization Beamsplitter (the wave plate delay error) cause output orthogonal signal to exist; The dichroism of non-polarization Beamsplitter NBS has extraordinary stability simultaneously; The orthogonal signalling obtained, after carrying out amplitude correc-tion, can obtain the center Lie groupoid in the circular ideal formula of initial point, and nonlinearity erron can be low to moderate micromicron magnitude. Solving prior art nonlinearity erron big, revise complicated difficult, correction computing is consuming time, revises the problem that precision is low, it is possible to meet real-time, the Asia nanometer even vibration measurement demand such as micromicron class precision, nanoscale amplitude of future generation.
(3) what interference portion of the present invention produced is that light and reference light are measured in the mutually orthogonal circular polarization in two-way polarization direction, particularity due to circularly polarized light, quarter-wave plate on reference arm its fast axle ideally can be arbitrarily angled, and light path adjustment is very easy.Solve prior art light path and adjust inconvenience, the problem that adjustment link is easily introduced error.
(4) present invention firstly provides the Four-channel detection technology scheme of a kind of single Wo Lasite prismatic decomposition, only a Wo Lasite prism need to be used can to realize the light beam of two vertical direction is carried out light splitting, produce the interference signal of four road phase 90 ��, owing to Wo Lasite is expensive, therefore technical scheme can be substantially reduced cost.
Accompanying drawing explanation
The single channel circular polarization that Fig. 1 is the anti-polarization aliasing of the present invention is interfered and an embodiment of single Wo Lasite prismatic decomposition formula homodyne laser vibration measurer light path principle figure;
Fig. 2 is Wo Lasite prismatic decomposition principle schematic of the present invention;
In figure, 1 laser instrument, 2 first quarter-wave plates, 3 first non-polarization Beamsplitters, 4 measure mirror, 5 second quarter-wave plates, 6 reference mirrors, 7 Wo Lasite prisms, 8 the 3rd quarter-wave plates, 9 first photodetectors, 10 second photodetectors, 11 the 3rd photodetectors, 12 the 4th photodetectors, 13 interference portions, 14 probe portions, 15 first light beams, 16 second light beams, 17 the 3rd light beams, 18 the 4th light beams, 19 the 5th light beams, 20 the 6th light beams, 21 the oneth o light, 22 the oneth e light, 23 the 2nd o light, 24 the 2nd e light, 25 second non-polarization Beamsplitters, 26 first reflecting mirrors, 27 second reflecting mirrors.
Detailed description of the invention
Below in conjunction with accompanying drawing, the specific embodiment of the present invention is described in detail, and provides embodiment.
The single channel circular polarization of a kind of anti-polarization aliasing is interfered and single Wo Lasite prismatic decomposition formula homodyne laser vibration measurer, being made up of interference portion 13 and probe portion 14, described interference portion 13 is made up of laser instrument the 1, first quarter-wave plate the 2, first non-polarization Beamsplitter 3, measurement mirror the 4, second quarter-wave plate 5 and reference mirror 6; Laser instrument 1 sends line polarized light, becomes circularly polarized light after the first quarter-wave plate 2, carries out light splitting then through the first non-polarization Beamsplitter 3, and reflection light forms the first light beam 15 as measuring light, and transmission light forms the second light beam 16 as reference light; First light beam 15, after measuring mirror 4 reflection, forms the 3rd light beam 17 then through the first non-polarization Beamsplitter 3 transmission; Second light beam 16 becomes line polarized light after the second quarter-wave plate 5, again passes by the second quarter-wave plate 5 and becomes circularly polarized light, then reflect to form the 4th light beam 18 through the first non-polarization Beamsplitter 3 after reference mirror 6 reflects; The circularly polarized light that 3rd light beam the 17, the 4th light beam 18 overlaps for light path and polarization direction is orthogonal; Described probe portion 14 is made up of second non-polarization Beamsplitter the 25, first reflecting mirror the 26, second reflecting mirror 27, Wo Lasite prism the 7, the 3rd quarter-wave plate the 8, first photodetector the 9, second photodetector the 10, the 3rd photodetector 11 and the 4th photodetector 12; 3rd light beam the 17, the 4th light beam 18 forms the 5th light beam 19 through the second non-polarization Beamsplitter 25 transmission and reflects to form the 6th light beam 20; After 5th light beam 19 is reflected by the first reflecting mirror 26, first after the 3rd quarter-wave plate 8, it is divided into o light the 21, an oneth e light 22 by Wo Lasite prism 7, is received by first photodetector the 9, second photodetector 10 respectively; 6th light beam 20, after the second reflecting mirror 27 reflection, is divided into the 2nd o light the 23, the 2nd e light 24 by Wo Lasite prism 7, is received by the 3rd photodetector the 11, the 4th photodetector 12 respectively.
Described laser instrument 1 is frequency stabilized carbon dioxide laser.
Described measurement mirror 4, reference mirror 6 are plane reflection or corner cube reflector.
Described first and second reflecting mirror 26,27 is plane mirror or corner cube prism.
Fig. 1 gives as one embodiment of the present of invention. In the present embodiment, laser instrument 1 adopts the He-Ne laser instrument through frequency stabilization, wavelength is 632.8nm, noise < 0.05%rms, and output is 1mW, polarization turns to 1000:1, in space coordinates xyz, laser instrument 1 sends line polarized light, and polarization direction is x-axis, being P light, therefore its Jones vector expression formula isBut there is certain polarizing angle. First quarter-wave plate 2 is placed in x/y plane, and the phase delay error of its existence is pi/2 50, and by rotating the first quarter-wave plate 2, ideally, when the first fast axle of quarter-wave plate 2 and x-axis are at 45 ��, P light becomes right-handed polarized light. Through the first non-polarization Beamsplitter 3 equal proportion light splitting, reflection light forms the first light beam 15 as the dextropolarization measuring light, and transmission light forms the second light beam 16 of the dextropolarization as reference light. Jones matrix expression formula according to reflecting mirrorCan obtain, the reflection relative incident illumination of light has the phase shift of 180 �� along y-axis direction of vibration, therefore measuring on arm, the first light beam 15 of dextropolarization state becomes left-hand polarization light after measuring mirror 4 reflection, then forms the 3rd light beam 17 through the first non-polarization Beamsplitter 3 transmission. On reference arm, second quarter-wave plate 5 is placed in x/y plane, second light beam 16 first passes through the second quarter-wave plate and becomes line polarized light, after reference mirror 6 reflects, become right-handed polarized light then through the second quarter-wave plate, then reflect to form the 4th light beam 18 through the first non-polarization Beamsplitter 3. Due to the particularity of circularly polarized light, the fast axle of the second quarter-wave plate 5 becomes arbitrarily angled with x-axis, and the second light beam 16 of dextropolarization state is turned back after twice second quarter-wave plates still for right-handed polarized light. The circularly polarized light that third and fourth light beam 17,18 overlaps for light path and polarization direction is orthogonal. 3rd light beam 17 and the 4th light beam 18 at probe portion by the second non-polarization Beamsplitter 25 light splitting, after transmission light the 5th light beam 19 is reflected by the first reflecting mirror 26, first through the 3rd quarter-wave plate 8, it is divided into o light 21 and an e light 22 again by Wo Lasite prism 7, received by first and second photodetector 9,10 respectively, reflection light the 6th light beam 20 is after the second reflecting mirror 27 reflection, it is divided into the 2nd o light 23 and the 2nd e light 24 by Wo Lasite prism 7, is received by first and second photodetector 11,12 respectively. Non-polarization Beamsplitter does not ensure that proper by 50:50 light splitting, and its absorbance is generally slightly larger than reflectance.
In the present embodiment, photodetector adopts the two quadrant photodetector of SiPIN type, photosensitive area is sized to 10mm �� 10mm, and sensitivity is 0.45A/W (��=632.8nm), and two quadrants of two quadrant photodetector are respectively as first and second photodetector 9,10; In like manner, adopt two quadrants of another two quadrant photodetector as third and fourth photodetector 11,12.
In the present embodiment, Wo Lasite prism 7 lies in a horizontal plane in xz plane, by adjusting the first quarter-wave plate 2, the fast axle of the fast axle of the second quarter-wave plate 5 and the angle of x-axis and the 3rd quarter-wave plate 8 and the angle of z-axis, first can be made, three, two, four photodetectors 9, 11, 10, the phase place relativeness of 12 interference signals received respectively 0 ��, 90 ��, 180 �� and 270 ��, make first simultaneously, two photodetectors 9, the direct current biasing of 10 interference signals received is equal, 3rd, four photodetectors 11, the direct current biasing of 12 interference signals received is equal.Owing to the absorbance of non-polarization Beamsplitter 25 is slightly larger than its reflectance, therefore the AC amplitude of the interference signal that first and second photodetector 9,10 receives is slightly larger than the AC amplitude of third and fourth photodetector 11,12. Therefore, after the interference signal that the interference signal received when first and second photodetector 9,10 subtracts each other, third and fourth photodetector 11,12 receives subtracts each other, two-way can be obtained without direct current biasing, without the orthogonal signalling of quadrature error, after amplitude correc-tion, the Lie groupoid finally giving two-way orthogonal signalling is the desirable center standard round at initial point.
Fig. 2 is Wo Lasite prismatic decomposition principle schematic of the present invention. When light beam is from the AB face incidence of Wo Lasite prism, o light and e light are with 2 �� angles in CD face separately; When light beam is from the AD face incidence of Wo Lasite prism, o light and e light are with �� angle in BC face separately.
Claims (4)
1. the single channel circular polarization of an anti-polarization aliasing is interfered and single Wo Lasite prismatic decomposition formula homodyne laser vibration measurer, it is made up of interference portion (13) and probe portion (14), it is characterised in that: described interference portion (13) is made up of laser instrument (1), the first quarter-wave plate (2), the first non-polarization Beamsplitter (3), measurement mirror (4), the second quarter-wave plate (5) and reference mirror (6); Laser instrument (1) sends line polarized light, circularly polarized light is become after the first quarter-wave plate (2), light splitting is carried out then through the first non-polarization Beamsplitter (3), reflection light forms the first light beam (15) as measuring light, and transmission light forms the second light beam (16) as reference light; First light beam (15), after measuring mirror (4) reflection, forms the 3rd light beam (17) then through the first non-polarization Beamsplitter (3) transmission; Second light beam (16) becomes line polarized light after the second quarter-wave plate (5), after reference mirror (6) reflects, again pass by the second quarter-wave plate (5) become circularly polarized light, then reflect to form the 4th light beam (18) through the first non-polarization Beamsplitter (3); The circularly polarized light that 3rd light beam (17), the 4th light beam (18) overlap for light path and polarization direction is orthogonal; Described probe portion (14) is made up of the second non-polarization Beamsplitter (25), the first reflecting mirror (26), the second reflecting mirror (27), Wo Lasite prism (7), the 3rd quarter-wave plate (8), the first photodetector (9), the second photodetector (10), the 3rd photodetector (11) and the 4th photodetector (12); 3rd light beam (17), the 4th light beam (18) form the 5th light beam (19) through the second non-polarization Beamsplitter (25) transmission and reflect to form the 6th light beam (20); After 5th light beam (19) is reflected by the first reflecting mirror (26), first after the 3rd quarter-wave plate (8), it is divided into an o light (21), an e light (22) by Wo Lasite prism (7), is received by the first photodetector (9), the second photodetector (10) respectively; 6th light beam (20) is after the second reflecting mirror (27) reflects, it is divided into the 2nd o light (23), the 2nd e light (24) by Wo Lasite prism (7), is received by the 3rd photodetector (11), the 4th photodetector (12) respectively.
2. the single channel circular polarization of anti-polarization aliasing according to claim 1 is interfered and single Wo Lasite prismatic decomposition formula homodyne laser vibration measurer, it is characterised in that: described laser instrument (1) is frequency stabilized carbon dioxide laser.
3. the single channel circular polarization of anti-polarization aliasing according to claim 1 is interfered and single Wo Lasite prismatic decomposition formula homodyne laser vibration measurer, it is characterised in that: described measurement mirror (4), reference mirror (6) they are plane reflection or corner cube reflector.
4. the single channel circular polarization of anti-polarization aliasing according to claim 1 is interfered and single Wo Lasite prismatic decomposition formula homodyne laser vibration measurer, it is characterised in that: described first and second reflecting mirror (26,27) is plane mirror or corner cube prism.
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| CN106248195B (en) * | 2016-08-08 | 2019-03-01 | 哈尔滨工业大学 | The high robust homodyne laser vibration measurer and four steppings of additional phase shift compensation |
| CN107024276B (en) * | 2017-04-27 | 2018-06-15 | 北京航空航天大学 | A kind of device and method for eliminating remaining circular component in the detection of linearly polarized light swing angle |
| CN109780991B (en) * | 2017-11-14 | 2021-03-30 | 哈尔滨工业大学 | Optical nonlinear first-order error compensation method and device based on error separation |
| CN108627234B (en) * | 2018-03-14 | 2019-09-20 | 哈尔滨工业大学 | Speed estimates vibration measurement with laser phase demodulating method |
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| CN108801436B (en) * | 2018-03-14 | 2019-09-20 | 哈尔滨工业大学 | The high-rate laser vialog of phase demodulating is estimated based on speed |
| CN108627235B (en) * | 2018-03-14 | 2019-09-20 | 哈尔滨工业大学 | Speed, acceleration is compound to estimate vibration measurement with laser phase demodulating method |
| CN117270031B (en) * | 2023-09-14 | 2024-04-05 | 济南大学 | Long-baseline laser interferometry system and measurement method thereof |
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