CN104061998A - Diffuse reflection type homodyne orthogonal laser vibration measurer - Google Patents
Diffuse reflection type homodyne orthogonal laser vibration measurer Download PDFInfo
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- CN104061998A CN104061998A CN201410312523.XA CN201410312523A CN104061998A CN 104061998 A CN104061998 A CN 104061998A CN 201410312523 A CN201410312523 A CN 201410312523A CN 104061998 A CN104061998 A CN 104061998A
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Abstract
The present invention provides a diffuse reflection type homodyne orthogonal laser vibration measurer belonging to the metering and calibration field. The diffuse reflection type homodyne orthogonal laser vibration measurer comprises a laser, a reference optical path assembly, a measurement optical path assembly and a vibration measurement assembly. The reference optical path assembly comprises a first reflector, a first wave plate and a second reflector which are arranged orderly, the measurement optical path assembly comprises a polarizer, a beam splitter prism, a second wave plate and a focusing lens which are arranged orderly, and the vibration measurement assembly comprises a polarization splitting prism, a first photoelectric receiver, a second photoelectric receiver, a signal processing circuit, a data acquisition module and a calculation module.
Description
Technical field
The invention belongs to measurement and calibration field, be specifically related to diffuse reflection type homodyne orthogonal laser vialog, for straight-line oscillation absolute method measurement and calibration, and otherwise high precision vibration Absolute Measurement, as vibrate base, standard vibration and measure, and the vibration survey of other industry high precision, as industries such as earthquake, Aeronautics and Astronautics, building, electric power.
Background technology
Traditional homodyne interferometer measuring accuracy is high, but require stricter to light path and measurement environment, measuring returning of light is by level crossing or three-dimensional prism, light path all must be returned on strict An Yuan road, the interference effect that guarantee is good, and Installation and Debugging are cumbersome, measurand is if any larger transverse movement, or relative position is moved, when measurement, not there will be light path interference effect good or can not interfere, cause measuring result unstable and even that can not measure.
Summary of the invention
The object of the invention is to solve the difficult problem existing in above-mentioned prior art, a kind of diffuse reflection type homodyne orthogonal laser vialog is provided, and for adjusting easily, use procedure is stable, affected by testee transverse movement little, to the less demanding absolute method high precision of test environment homodyne vibration measurement with laser instrument.
The present invention is achieved by the following technical solutions:
A kind of diffuse reflection type homodyne orthogonal laser vialog, comprises laser instrument, reference path assembly, optical path assembly and vibration measuring assembly;
Described reference path assembly comprises the first level crossing, the first wave plate and the second level crossing that set gradually;
Described optical path assembly comprises the polaroid, Amici prism, the second wave plate and the condenser lens that set gradually;
Described vibration measuring assembly comprises polarization splitting prism, the first photelectric receiver, the second photelectric receiver, signal processing circuit, data acquisition module and resolves module.
The laser that described laser instrument is launched forms polarized light through polaroid, and described polarized light is divided into two bundle laser by described Amici prism, is respectively and measures light and reference light;
Wherein said measurement light focuses on and forms high light spot after the second wave plate and condenser lens, is radiated on tested vibration object, and forms diffuse reflection, the measurement light that diffuses and return by pooling after described condenser lens;
Described reference light returns and forms the reference light returning through the first level crossing, the first wave plate and the second level crossing Hou Zaianyuan road;
The described measurement light returning again after the second wave plate with described in the reference light that returns interferes formation interference light;
Described interference light is divided into the interference light of two different polarization directions after described polarization splitting prism, and two interference lights enter respectively the first photelectric receiver and the second photelectric receiver, forms the orthogonal circuit signal u of two-way
1(t
i) and u
2(t
i);
Circuit signal u
1(t
i) and u
2(t
i) after signal processing circuit is processed, after data collecting module collected, entered and resolve module and calculate, obtain vibration acceleration, speed and displacement, the sensitivity of sensor amplitude and phase shift.
Described the first wave plate and the second wave plate all adopt quarter wave plate.
Described signal processing circuit comprises the filtering circuit, zeroing circuit and the amplifying circuit that set gradually.
Described filtering circuit adopts 9 rank low-pass filter circuits.
The described module of resolving is according to circuit signal u
1(t
i) and u
2(t
i) carry out calculating below:
Calculate phase modulation value sequence
Signal model is as follows:
In formula: i=0,1,2 ... N;
for phase-modulation item amplitude;
c is constant; ω is angle of throw frequency, ω=2 π f, and f is vibration frequency;
for the Initial phase of displacement;
Obtain a definite value by (1) formula, then by this determined value substitution (2) formula, use least square method, calculate the value of A, B, C by separating N+1 equation, then utilize (3) formula and (4) formula to calculate phase-modulation phase amplitude
initial phase with displacement
(5) formula of utilization and (6) formula calculate vibration acceleration amplitude a and acceleration Initial phase
If acceleration is carried out to integration, can obtain speed v, acceleration is carried out to integration 2 times, namely speed v is carried out to integration and can obtain displacement s.
Compared with prior art, the invention has the beneficial effects as follows: the present invention brings great convenience to little displacement vibration measuring, comprise a peacekeeping multidimensional straight-line oscillation, quality less vibration object is realized to the vibration absolute measurement without additional mass, but also can realize easily the Absolute Measurement of on-the-spot vibration; This instrument compare traditional homodyne Quadrature laser interferometer just have more stable, more easily adjust, to testee movement locus require low, to the less demanding feature of outside measurement environment.
Brief description of the drawings
Fig. 1 is structure principle chart of the present invention.
Fig. 2 is 9 rank low-pass filter circuits.
Fig. 3 is zeroing amplifying circuit.
Embodiment
Below in conjunction with accompanying drawing, the present invention is described in further detail:
The present invention collects the form diffusing by optical focusing lens group, replace by leaning on level crossing or three-dimensional prism reflected version, be focused into measuring light the minimum tabula rasa that energy is stronger, be radiated on body surface, in order to reach stronger diffuse reflection, can paste reflective sheeting, the diffuse reflectance measurement light returning is gathered together, interfere with reference light, this method not be used in mounting plane reflective mirror or three-dimensional prism on testee, on testee, (general body surface can form diffuse reflection to direct irradiation, just different according to body surface roughness, Diffusive intensity is also different, for a little less than Diffusive intensity, in order to obtain stronger diffusing, can stick diffuse reflection paper at body surface, just can form and diffuse, and paster is very little, can not change the motion state of object), so not only easy installment and debugging, and can require not to be strict to the transverse movement track of testee, other annex need to be installed on testee, do not change the movement present situation of object, on object, directly form absolute non-contact measurement.
The present invention is on the basis of modified homodyne orthogonal laser vialog, use the combination of focus lens group and wave plate, ejaculation and the echo plex mode of measuring light are changed, replace the method for original dependence plane mirror or three-dimensional prism, the signal that signal condition is become to be applicable to resolving by circuit, combination algorithm part forms laser vibration measurer, has realized the measurement of vibration absolute method.
As shown in Figure 1, principle of the present invention is as follows:
Laser instrument 3 is launched laser, form polarized light through polariscope 4 (claiming again polaroid), use Amici prism 5 to be divided into two bundle laser, be respectively and measure light and reference light, measuring light focuses on and forms the high light spot dwindling through condenser lens 6, be radiated at tested vibration object 14 (for imagery, in Fig. 1, dot object on the right side of tested vibration object 14 and do back and forth simple harmonic oscillation) (under different situations, measurand is likely different, specific as follows: if be applied in measurement and calibration equipment, the luminous point of laser is sometimes radiated on the surface of shaking table, sometimes be radiated on the end face of sensor, but this interferometer can also be used on non-metering correcting device, or the occasion of on-the-spot vibration measuring, in this case, the light spot of laser is in the place that needs measuring vibrations) on, and formation diffuse reflection, diffuse and pool return measurement light beam by condenser lens 6, between Amici prism 5 and condenser lens 6, be provided with quarter wave plate 2 (i.e. the second wave plate), so successively 2 times (while going once and while returning once) are by quarter wave plate 2 (this quarter wave plate of per pass, laser phase can postpone 90 degree, be exactly for twice 180 degree, here by using quarter wave plate can change return measurement polarisation of light state), can regulate polarisation of light state by wave plate, interfere with the reference light returning, specifically, laser beam (is common Amici prism by light splitting rib 5, common Amici prism is to be divided into two bundle light, two-beam polarization state is the same), straight-through is to measure light, also has the light beam light at right angle left, in order to make light path more longer, there are like this two benefits: the one, aplanatism as far as possible, the 2nd, the in the situation that of optical path length, mechanical strain impact is little, reference light reflexes to second level crossing 1 by first level crossing 1, reflect at second level crossing 1, An Yuan returns on road, interfere with the measurement light returning.
In reference path, between two level crossings, also place a slice quarter wave plate 2 (i.e. the first wave plate), can regulate polarisation of light state.Concrete adjusting is as follows: wave plate is mounted on wave plate frame, by rotational wave horse, can drive wave plate to rotate together, wave plate rotation can change the polarization direction of laser, and two bundle laser are only just likely interfered on same polarization direction, simultaneously, in the situation that adjusting wave plate, also can change sharp light intensity, all more intense in order to ensure the light intensity of reference light and return measurement light, and polarization direction is consistent, so be all provided with polaroid.
By polarization splitting prism 8, (polarization splitting prism is the two-beam that is divided into two bundle polarization directions and differs 90 degree to interference light.) separate the interference light of two different polarization directions, enter respectively 2 photelectric receivers 7,9, form the orthogonal electric signal of two-way, be respectively signal u
1(t
i) and u
2(t
i) (after conditioned, with 2 channel data collections), electric signal is by 9 rank low-pass filter circuits 10 (as shown in Figure 2.), remove noise jamming, remove direct current (claiming again removing DC road) by zeroing circuit 11, through amplifying circuit 12 (as shown in Figure 3, Fig. 3 is zeroing amplifying circuit, is the circuit that the zeroing circuit in Fig. 1 and amplifying circuit are combined) signal is amplified to applicable amplitude, use number extraction system 13 (is AD data acquisition, conditioned signal, use number extraction system to become digitizing) collection 2 tunnel orthogonal signal u
1(t
i) and u
2(t
i), then data are sent to computer, carry out calculating below by resolving module:
Calculate phase modulation value sequence
T in Fig. 1
0< t
i< t0+t
mearepresent the time to quantize t
irepresent that it is at t that number is adopted card
0to t
mea, the point of middle collection.Because data acquisition is discrete point, counting of gathering is each time a lot, is not a point, considers to have first point, second point from time quantum ... until n point, n is one and represents number.
Use least square method, the system of equations that have A by resolving, tri-unknown parameters of B, C forms, approaches the phase modulation value sequence that (1) formula is tried to achieve
that is:
it is a signal model.Each
all form an equation
obtain a definite value by (1) formula, then, by this determined value substitution (2) formula, try to achieve A, B, C, can calculate A, B, C by separating N+1 equation.
In formula: i=0,1,2 ... N;
phase-modulation item amplitude;
c-constant; ω-angle of throw frequency, ω=2 π f, f is vibration frequency;
the Initial phase of-displacement; N is the representative of a number, and N represents from 0 ... to N equation.
After trying to achieve A, B, calculate phase-modulation phase amplitude
initial phase with displacement
Can obtain vibration acceleration amplitude a and Initial phase
(s in Fig. 1 represents displacement, v representation speed, a represents acceleration):
Technique scheme is one embodiment of the present invention, for those skilled in the art, the invention discloses on the basis of application process and principle, be easy to make various types of improvement or distortion, and be not limited only to the described method of the above-mentioned embodiment of the present invention, therefore previously described mode is just preferred, and does not have restrictive meaning.
Claims (6)
1. diffuse reflection type homodyne orthogonal laser vialog, is characterized in that: described diffuse reflection type homodyne orthogonal laser vialog comprises laser instrument, reference path assembly, optical path assembly and vibration measuring assembly;
Described reference path assembly comprises the first level crossing, the first wave plate and the second level crossing that set gradually;
Described optical path assembly comprises the polaroid, Amici prism, the second wave plate and the condenser lens that set gradually;
Described vibration measuring assembly comprises polarization splitting prism, the first photelectric receiver, the second photelectric receiver, signal processing circuit, data acquisition module and resolves module.
2. diffuse reflection type homodyne orthogonal laser vialog according to claim 1, it is characterized in that: the laser that described laser instrument is launched forms polarized light through polaroid, described polarized light is divided into two bundle laser by described Amici prism, is respectively and measures light and reference light;
Wherein said measurement light focuses on and forms high light spot after the second wave plate and condenser lens, is radiated on tested vibration object, and forms diffuse reflection, the measurement light that diffuses and return by pooling after described condenser lens;
Described reference light returns and forms the reference light returning through the first level crossing, the first wave plate and the second level crossing Hou Zaianyuan road;
The described measurement light returning again after the second wave plate with described in the reference light that returns interferes formation interference light;
Described interference light is divided into the interference light of two different polarization directions after described polarization splitting prism, and two interference lights enter respectively the first photelectric receiver and the second photelectric receiver, forms the orthogonal circuit signal u of two-way
1(t
i) and u
2(t
i);
Circuit signal u
1(t
i) and u
2(t
i) after signal processing circuit is processed, after data collecting module collected, entered and resolve module and calculate.
3. diffuse reflection type homodyne orthogonal laser vialog according to claim 2, is characterized in that: described the first wave plate and the second wave plate all adopt quarter wave plate.
4. diffuse reflection type homodyne orthogonal laser vialog according to claim 3, is characterized in that: described signal processing circuit comprises the filtering circuit, zeroing circuit and the amplifying circuit that set gradually.
5. diffuse reflection type homodyne orthogonal laser vialog according to claim 4, is characterized in that: described filtering circuit adopts 9 rank low-pass filter circuits.
6. diffuse reflection type homodyne orthogonal laser vialog according to claim 5, is characterized in that: described in resolve module according to circuit signal u
1(t
i) and u
2(t
i) carry out calculating below:
Calculate phase modulation value sequence
Signal model is as follows:
In formula: i=0,1,2 ... N;
for phase-modulation item amplitude;
c is constant; ω is angle of throw frequency, ω=2 π f, and f is vibration frequency;
for the Initial phase of displacement;
Obtain a definite value by (1) formula, then by this determined value substitution (2) formula, use least square method, calculate the value of A, B, C by separating N+1 equation, then utilize (3) formula and (4) formula to calculate phase-modulation phase amplitude
initial phase with displacement
(5) formula of utilization and (6) formula calculate vibration acceleration amplitude a and Initial phase
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| CN201410312523.XA CN104061998A (en) | 2014-07-02 | 2014-07-02 | Diffuse reflection type homodyne orthogonal laser vibration measurer |
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Cited By (7)
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|---|---|---|---|---|
| CN104897272A (en) * | 2015-06-12 | 2015-09-09 | 哈尔滨工业大学 | Quadrature error-free double-path circular polarization interference and double-Wollaston prism light-splitting type homodyne laser vibration meter |
| CN104913838A (en) * | 2015-06-12 | 2015-09-16 | 哈尔滨工业大学 | Anti-polarization mixing single-path circular polarization interference and single wollaston prism splitting-type homodyne laser vibrometer |
| CN105911605A (en) * | 2016-06-14 | 2016-08-31 | 浙江大学 | Closed-loop signal collection method of optical interference gravimeter |
| CN106840366A (en) * | 2017-04-21 | 2017-06-13 | 吉林大学 | A kind of homodyne orthogonal fibre interferes vibration detecting device |
| CN106840359A (en) * | 2017-01-16 | 2017-06-13 | 北京航空航天大学 | A kind of two-beam interference calibrating installation for laser vibration measurer |
| CN110132140A (en) * | 2019-06-06 | 2019-08-16 | 电子科技大学 | A kind of optical displacement detection sensor component |
| CN111323111A (en) * | 2020-03-11 | 2020-06-23 | 北京空间飞行器总体设计部 | Modal test system suitable for film antenna under vacuum environment |
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Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104897272A (en) * | 2015-06-12 | 2015-09-09 | 哈尔滨工业大学 | Quadrature error-free double-path circular polarization interference and double-Wollaston prism light-splitting type homodyne laser vibration meter |
| CN104913838A (en) * | 2015-06-12 | 2015-09-16 | 哈尔滨工业大学 | Anti-polarization mixing single-path circular polarization interference and single wollaston prism splitting-type homodyne laser vibrometer |
| CN104913838B (en) * | 2015-06-12 | 2016-06-08 | 哈尔滨工业大学 | Single channel circular polarization is interfered and single Wo Lasite prismatic decomposition formula homodyne laser vibration measurer |
| CN104897272B (en) * | 2015-06-12 | 2018-01-05 | 哈尔滨工业大学 | Two-way circular polarization interferes and double Wo Lasite prismatic decomposition formula homodyne laser vibration measurers |
| CN105911605A (en) * | 2016-06-14 | 2016-08-31 | 浙江大学 | Closed-loop signal collection method of optical interference gravimeter |
| CN105911605B (en) * | 2016-06-14 | 2018-01-12 | 浙江大学 | A kind of closed signal acquisition method in optical interference formula gravimeter |
| CN106840359A (en) * | 2017-01-16 | 2017-06-13 | 北京航空航天大学 | A kind of two-beam interference calibrating installation for laser vibration measurer |
| WO2018130219A1 (en) * | 2017-01-16 | 2018-07-19 | 北京航空航天大学 | Double-beam interference calibration device for laser vibrometer and calibration method therefor |
| CN106840366A (en) * | 2017-04-21 | 2017-06-13 | 吉林大学 | A kind of homodyne orthogonal fibre interferes vibration detecting device |
| CN110132140A (en) * | 2019-06-06 | 2019-08-16 | 电子科技大学 | A kind of optical displacement detection sensor component |
| CN110132140B (en) * | 2019-06-06 | 2020-09-01 | 电子科技大学 | Optical displacement detection sensor assembly |
| CN111323111A (en) * | 2020-03-11 | 2020-06-23 | 北京空间飞行器总体设计部 | Modal test system suitable for film antenna under vacuum environment |
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Application publication date: 20140924 |
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