CN104165582A - Phase shift point-diffraction interference detection device and method based on reflecting grating - Google Patents
Phase shift point-diffraction interference detection device and method based on reflecting grating Download PDFInfo
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Abstract
The invention belongs to the technical field of optical interference detection and particularly relates to a phase shift point-diffraction interference detection device and method based on a reflecting grating. The phase shift point-diffraction interference detection device based on the reflecting grating comprises a light source, a collimation and beam expanding system, a window, an object to be detected, a first lens, an unpolarized splitting prism, the reflecting grating, a small-hole reflector, a second lens and an image sensor. A light beam emitted by the light source enters the collimation and beam expanding system, the outgoing beam subjected to collimation and beam expanding of the collimation and beam expanding system enters the first lens through the window and the object to be detected, and the light beam subjected to focusing of the first lens is divided into a bundle of reference light and a bundle of object light by the unpolarized splitting prism. The reference light irradiates to the small-hole reflector, and the object light irradiates to the reflecting grating. The phase shift point-diffraction interference detection device based on the reflecting grating is low in system complexity and cost, simple in structure, flexible and convenient to operate and free of special optical elements of a polarizer group and the like.
Description
Technical field
The invention belongs to optical interference detection technique field, be specifically related to a kind of phase shift point diffraction interference pick-up unit and detection method based on reflection grating.
Background technology
Optical interference detection method, because its noncontact, resolving power are high, need not do to sample the unique features such as special processing, has been widely used in the detection fields such as optical surface, deformation and thickness.Current optical interference detection architecture can be divided into separation light path and be total to two kinds of light paths: separate light path interferometer, because reference beam and measuring beam are interfered by different paths, be subject to the impact such as extraneous vibration, temperature fluctuation as Twyman-Green interference instrument, Mach-Zehnder interferometer etc.Than separating light path interferometer, interference with common path instrument is interfered through identical optical path because of reference beam and measuring beam, it vibrates to external world, temperature fluctuation etc. is insensitive, has the advantages such as antijamming capability is strong, receives much concern at optical interference detection field.A kind of typical structure of interference with common path instrument is point-diffraction interferometer, but early stage point-diffraction interferometer quantitative measurment ability is poor, and in order to make up this shortcoming, Chinese scholars has been made a lot of Beneficials.
Israel scholar N.T.Shaked proposes a kind of reflective off axis point diffraction microinterferometer (Shaked N.T. " Quantitative phase microscopy of biological samples using a portable interferometer, " Opt.Lett., 37 (11), 2016-2018 (2012) .), in a standard 4f optical system, introduce unpolarized Amici prism and produce two-beam, by light beam is wherein used to reflective pinhole filter, thereby formation reference light, another light beam converges once again by unpolarized Amici prism and reference light after being reflected mirror reflection.The method only need gather a width interferogram just can obtain quantitative phase information, measurement efficiency is high, but because adopt from axle construction, has sacrificed spatial bandwidth and the spatial sampling ability of camera, and then limited system space resolving power, and easily lose the high-frequency information of testing sample.
Patent 201310206690.1 " a kind of reflective some diffraction is from axle simultaneous phase-shifting interference checking device and detection method " is by introducing the light splitting synchronized orthogonal phase-shifting technique based on polarization splitting prism, obtain two width orthogonal phase shift by single exposure collection, in ensureing to measure efficiency, improve systematic survey resolving power, but system complex, the utilization ratio of visual field of camera is low.
Xi'an ray machine Guo Rongli etc. a kind of reflective coaxial microinterferometer of diffraction (R.Guo has been proposed, B.Yao, P.Gao, J.Min, J.Zheng, T.Ye. " Reflective Point-diffraction microscopic interferometer with long term stability. " COL 2011,9 (12): 120002.), by introducing polarization phase-shifting technology, exposure gathers four width phase shifting interferences in chronological order, utilization ratio of visual field is high, but because adopt at least 4 polarizers to realize phase shift, system complexity is high.
Summary of the invention
The object of the present invention is to provide a kind of phase shift point diffraction interference pick-up unit based on reflection grating.
The present invention also aims to provide a kind of phase shift point diffraction interference detection method based on reflection grating.
The object of the present invention is achieved like this:
Phase shift point diffraction interference pick-up unit based on reflection grating, comprise light source, collimating and beam expanding system, window, object under test, first lens, unpolarized Amici prism, reflection grating, aperture catoptron, the second lens, imageing sensor, the outgoing beam of the light beam of light source transmitting after collimating and beam expanding system collimator and extender is incident to first lens after window, object under test, and the light beam after first lens focuses on is divided into a branch of reference light and a branch of object light by unpolarized Amici prism; Reference light is radiated on aperture catoptron, and object light is radiated in reflection grating; Object light and reference light through reflection merge into after a branch of light beam again after unpolarized Amici prism, after the second lens, generate interferogram, are collected in computing machine by imageing sensor simultaneously.
Aperture catoptron is positioned on the focal plane of first lens, and described reflection grating is positioned on the focal plane of the second lens.
Reflection grating can be carried out horizontal minute movement to produce phase shift.
Reflection grating+1 order of diffraction light is used to generate interferogram.
The reflector space diameter of aperture catoptron is d
p≤ 1.22 λ f
1/ D, wherein, λ is optical source wavelength, f
1for the focal length of first lens, the diameter that D is window.
Between object under test and first lens, can also place successively microcobjective and proofread and correct object lens.
Phase shift point diffraction interference detection method based on reflection grating, comprises the steps:
(1) adjust light source, make the light beam of light source transmitting after collimating and beam expanding system, window, object under test, first lens and unpolarized Amici prism, form successively the object light and the reference light that focus on, object light and reference light form interferogram through unpolarized Amici prism and the second lens after being reflected respectively grating and the reflection of aperture catoptron jointly, are transferred in computing machine by imageing sensor collection;
(2) reflection grating is driven and is produced serial transversal displacement Δ=(k-1) d/N, and the interferogram of imageing sensor collection will be introduced into serial phase shift delta
k=(k-1) 2 π/N, its corresponding intensity distributions is
Wherein, k=1,2 ..., N, O is object light optical field distribution, R is reference light optical field distribution,
for the PHASE DISTRIBUTION of object under test;
The PHASE DISTRIBUTION of utilizing least square method can obtain object under test is
Beneficial effect of the present invention is:
1. the present invention combines reflective point-diffraction interference method with reflection grating phase shift technology, complete phase bit recovery to be measured by gathering serial phase shifting interference, ensureing on the basis of system rejection to disturbance ability and resolving power and image sensor field of view utilization factor, improve Phase shift precision, simplified the complexity of phase shift;
2. apparatus of the present invention system complexity is low, simple in structure, flexible and convenient operation, and cost is low, does not need the special optical elements such as polarizer group;
3. by introducing microcobjective, the method can be applicable in micrometering.
Brief description of the drawings
Fig. 1 is the principle schematic of the phase shift point diffraction interference pick-up unit based on reflection grating;
Fig. 2 is the principle schematic of the phase shift point diffraction micro-interference pick-up unit based on reflection grating;
The first width phase shifting interference that Fig. 3 (a) is computer acquisition;
The second width phase shifting interference that Fig. 3 (b) is computer acquisition;
The 3rd width phase shifting interference that Fig. 3 (c) is computer acquisition;
The 4th width phase shifting interference that Fig. 3 (d) is computer acquisition;
Fig. 4 is the PHASE DISTRIBUTION according to object under test
recover the PHASE DISTRIBUTION of the object under test obtaining.
Embodiment
Below in conjunction with accompanying drawing, the present invention is described further.
Phase shift point diffraction interference pick-up unit based on reflection grating of the present invention, it comprises light source, collimating and beam expanding system, window, object under test, first lens, unpolarized Amici prism, reflection grating, aperture catoptron, the second lens, imageing sensor,
The light beam of light source transmitting is through collimating and beam expanding system collimator and extender, and then outgoing beam is incident to first lens after window, object under test, and the light beam after first lens focuses on is divided into a branch of reference light and a branch of object light by unpolarized Amici prism; Reference light is radiated on aperture catoptron, and object light is radiated in reflection grating; Object light and reference light through reflection merge into after a branch of light beam again after unpolarized Amici prism, after the second lens, generate interferogram, are collected in computing machine by imageing sensor simultaneously.
Aperture catoptron is positioned on the focal plane of first lens, and reflection grating is positioned on the focal plane of the second lens.
Reflection grating can be carried out horizontal minute movement to produce phase shift.
Reflection grating+1 order of diffraction light is used to generate interferogram.
The reflector space diameter of aperture catoptron is d
p≤ 1.22 λ f
1/ D, wherein, λ is optical source wavelength, f
1for the focal length of first lens, the diameter that D is window.
Between object under test and first lens, can also place successively microcobjective and proofread and correct object lens for micrometering.
Based on the interference detection method of above-mentioned interference pick-up unit, its implementation procedure is as follows:
1., adjust light source, make the light beam of light source transmitting after collimating and beam expanding system, window, object under test, first lens and unpolarized Amici prism, form successively the object light and the reference light that focus on, this object light and reference light form interferogram through unpolarized Amici prism and the second lens after being reflected respectively grating and the reflection of aperture catoptron jointly, are transferred in computing machine by imageing sensor collection;
2., suppose reflection grating driven produce serial transversal displacement Δ=(k-1) d/N, the interferogram of imageing sensor collection will be introduced into serial phase shift delta
k=(k-1) 2 π/N, its corresponding intensity distributions is
Wherein, k=1,2 ..., N, O is object light optical field distribution, R is reference light optical field distribution,
for the PHASE DISTRIBUTION of object under test.
The PHASE DISTRIBUTION of utilizing least square method can obtain object under test is
Below in conjunction with Fig. 1, the specific embodiment of the present invention is described, phase shift point diffraction interference pick-up unit based on reflection grating described in present embodiment, it comprises light source 1, collimating and beam expanding system 2, window 3, object under test 4, first lens 5, unpolarized Amici prism 6, reflection grating 7, aperture catoptron 8, the second lens 9, imageing sensor 10.Wherein, light source 1 adopts the He-Ne laser instrument of wavelength 632.8nm, or is other monochromatic visible light source, and wavelength can be optional as required.First lens 5 is identical with the focal length of the second lens 9, is f
1=f
2=250mm.Aperture catoptron 8 is positioned on the focal plane of first lens 5, and reflection grating 7 is positioned on the focal plane of the second lens 9.The cycle d of reflection grating 7 is 54.72um, and it can carry out horizontal minute movement to produce phase shift.The reflector space diameter of aperture catoptron 8 is d
p≤ 1.22 λ f
1/ D (D is window diameter).Between object under test 4 and first lens 5, can also place successively microcobjective and proofread and correct object lens.
Utilize the phase shift point diffraction interference pick-up unit based on reflection grating described above, the embodiment of detection method of the present invention is as follows:
First, before detecting, adjust whole optical system, open light source 1, the outgoing beam of the light beam of this light source transmitting after collimating and beam expanding system 2 collimator and extenders is through window 3, after object under test 4, be incident to first lens 5, light beam after first lens 5 focuses on is divided into a branch of object light and a branch of reference light by unpolarized Amici prism 6, reference light is radiated on aperture catoptron 8, object light is radiated in reflection grating 7, after merging into, generate interferogram after successively by the second lens 9 through unpolarized Amici prism 6 again through the object light of reflection and reference light and imageing sensor 10 gathers and collects in computing machine,
Record the first width interferogram I
1after, translation reflection grating 7, in three translation reflection grating processes each small displacement be d/4 (cycle that d is reflection grating) in three translation processes object light move introduced phase shift by reflection grating and be respectively pi/2, π, 3 pi/2s, and record successively interferogram.Like this, just obtain four width interferogram I by four exposures
1, I
2, I
3and I
4for the phase bit recovery of determinand.Phase place to be measured is calculated by following formula:
This embodiment has extraordinary stability, between the required each interference pattern of phase bit recovery phase shift accurate, and because recovery algorithms is simple, the complexity of system has further reduced.
Claims (7)
1. the phase shift point diffraction interference pick-up unit based on reflection grating, comprise light source (1), collimating and beam expanding system (2), window (3), object under test (4), first lens (5), unpolarized Amici prism (6), reflection grating (7), aperture catoptron (8), the second lens (9), imageing sensor (10), it is characterized in that: the outgoing beam of the light beam of light source (1) transmitting after collimating and beam expanding system (2) collimator and extender is through window (3), after object under test (4), be incident to first lens (5), light beam after first lens (5) focuses on is divided into a branch of reference light and a branch of object light by unpolarized Amici prism (6), it is upper that reference light is radiated at aperture catoptron (8), and object light is radiated in reflection grating (7), object light and reference light through reflection merge into after a branch of light beam again after unpolarized Amici prism (6), generate interferogram after the second lens (9), are collected in computing machine by imageing sensor (10) simultaneously.
2. a kind of phase shift point diffraction interference pick-up unit based on reflection grating according to claim 1, it is characterized in that: described aperture catoptron (8) is positioned on the focal plane of first lens (5), described reflection grating (7) is positioned on the focal plane of the second lens (9).
3. a kind of phase shift point diffraction interference pick-up unit based on reflection grating according to claim 1 and 2, is characterized in that: described reflection grating (7) can be carried out horizontal minute movement to produce phase shift.
4. according to the phase shift point diffraction interference pick-up unit based on reflection grating described in claim 1 or 2 or 3, it is characterized in that: described reflection grating (7)+1 order of diffraction light is used to generate interferogram.
5. the phase shift point diffraction interference pick-up unit based on reflection grating according to claim 1 and 2, is characterized in that: the reflector space diameter of described aperture catoptron (10) is d
p≤ 1.22 λ f
1/ D, wherein, λ is light source (1) wavelength, f
1for the focal length of first lens (5), D is the diameter of window (3).
6. the phase shift point diffraction interference pick-up unit based on reflection grating according to claim 1, is characterized in that: between described object under test (4) and first lens (5), can also place successively microcobjective (11) and proofread and correct object lens (12).
7. the phase shift point diffraction interference detection method based on reflection grating, is characterized in that, comprises the steps:
(1) adjust light source, make the light beam of light source transmitting after collimating and beam expanding system, window, object under test, first lens and unpolarized Amici prism, form successively the object light and the reference light that focus on, object light and reference light form interferogram through unpolarized Amici prism and the second lens after being reflected respectively grating and the reflection of aperture catoptron jointly, are transferred in computing machine by imageing sensor collection;
(2) reflection grating is driven and is produced serial transversal displacement Δ=(k-1) d/N, and the interferogram of imageing sensor collection will be introduced into serial phase shift delta
k=(k-1) 2 π/N, its corresponding intensity distributions is
Wherein, k=1,2 ..., N, O is object light optical field distribution, R is reference light optical field distribution,
for the PHASE DISTRIBUTION of object under test;
The PHASE DISTRIBUTION of utilizing least square method can obtain object under test is
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Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5822066A (en) * | 1997-02-26 | 1998-10-13 | Ultratech Stepper, Inc. | Point diffraction interferometer and pin mirror for use therewith |
| US6559953B1 (en) * | 2000-05-16 | 2003-05-06 | Intel Corporation | Point diffraction interferometric mask inspection tool and method |
| US6573997B1 (en) * | 2000-07-17 | 2003-06-03 | The Regents Of California | Hybrid shearing and phase-shifting point diffraction interferometer |
| CN2599524Y (en) * | 2003-02-14 | 2004-01-14 | 中国科学院上海光学精密机械研究所 | Dot diffraction interferometer for detecting surface shape |
| JP2006017485A (en) * | 2004-06-30 | 2006-01-19 | Nikon Corp | Device and method for measuring surface shape, manufacturing method of projection optical system, projection optical system, and projection exposing device |
| CN101183042A (en) * | 2007-12-13 | 2008-05-21 | 上海微电子装备有限公司 | Point diffraction interferometer |
| CN102798341A (en) * | 2012-07-23 | 2012-11-28 | 中国科学院长春光学精密机械与物理研究所 | Method used for improving measuring accuracy of point-diffraction interferometer |
| CN103245285A (en) * | 2013-04-22 | 2013-08-14 | 哈尔滨工程大学 | Reflective point-diffraction carrier synchronization phase-shifting interference detection device and detection method |
| CN103322912A (en) * | 2013-05-29 | 2013-09-25 | 哈尔滨工程大学 | Reflection type point diffraction off-axis simultaneous phase shifting interference detection device and method |
| CN204177342U (en) * | 2014-08-28 | 2015-02-25 | 哈尔滨工程大学 | A kind of phase shift point diffraction interference pick-up unit based on reflection grating |
-
2014
- 2014-08-28 CN CN201410431707.8A patent/CN104165582B/en not_active Expired - Fee Related
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5822066A (en) * | 1997-02-26 | 1998-10-13 | Ultratech Stepper, Inc. | Point diffraction interferometer and pin mirror for use therewith |
| US6559953B1 (en) * | 2000-05-16 | 2003-05-06 | Intel Corporation | Point diffraction interferometric mask inspection tool and method |
| US6573997B1 (en) * | 2000-07-17 | 2003-06-03 | The Regents Of California | Hybrid shearing and phase-shifting point diffraction interferometer |
| CN2599524Y (en) * | 2003-02-14 | 2004-01-14 | 中国科学院上海光学精密机械研究所 | Dot diffraction interferometer for detecting surface shape |
| JP2006017485A (en) * | 2004-06-30 | 2006-01-19 | Nikon Corp | Device and method for measuring surface shape, manufacturing method of projection optical system, projection optical system, and projection exposing device |
| CN101183042A (en) * | 2007-12-13 | 2008-05-21 | 上海微电子装备有限公司 | Point diffraction interferometer |
| CN102798341A (en) * | 2012-07-23 | 2012-11-28 | 中国科学院长春光学精密机械与物理研究所 | Method used for improving measuring accuracy of point-diffraction interferometer |
| CN103245285A (en) * | 2013-04-22 | 2013-08-14 | 哈尔滨工程大学 | Reflective point-diffraction carrier synchronization phase-shifting interference detection device and detection method |
| CN103322912A (en) * | 2013-05-29 | 2013-09-25 | 哈尔滨工程大学 | Reflection type point diffraction off-axis simultaneous phase shifting interference detection device and method |
| CN204177342U (en) * | 2014-08-28 | 2015-02-25 | 哈尔滨工程大学 | A kind of phase shift point diffraction interference pick-up unit based on reflection grating |
Non-Patent Citations (2)
| Title |
|---|
| RONGLI GUO ET.AL: "Reflective point-diffraction microscopic interferometer with long-term stability", 《CHINESE OPTICS LETTERS》 * |
| 刑廷文等: "193 nm 移相点衍射干涉仪的测量误差分析", 《光电工程》 * |
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| CN107356195A (en) * | 2017-07-19 | 2017-11-17 | 哈尔滨工程大学 | Three view field digital holographic detection devices and method based on two-dimension periodic grating and point diffraction |
| CN107421437A (en) * | 2017-07-19 | 2017-12-01 | 哈尔滨工程大学 | Three view field digital holographic detection devices and method based on two-dimensional phase grating and point diffraction |
| CN107356195B (en) * | 2017-07-19 | 2019-09-27 | 哈尔滨工程大学 | Three view field digital holographic detection devices and method based on two-dimension periodic grating and point diffraction |
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| CN110260784A (en) * | 2018-03-12 | 2019-09-20 | 欧姆龙株式会社 | Optical measuring device |
| US11231270B2 (en) | 2018-03-12 | 2022-01-25 | Omron Corporation | Optical measuring device |
| CN108535217A (en) * | 2018-04-08 | 2018-09-14 | 雄安华讯方舟科技有限公司 | optical coherence tomography system |
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| WO2021160082A1 (en) * | 2020-02-10 | 2021-08-19 | 北京理工大学 | Transient digital moire phase-shift interference measurement device and method for surface figure of optical element |
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