CN104034257B - Synchronous phase shift interference measurement device and method of Fizeau quasi-common optical path structure - Google Patents
Synchronous phase shift interference measurement device and method of Fizeau quasi-common optical path structure Download PDFInfo
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Abstract
The invention relates to a synchronous phase shift interferometry method and a synchronous phase shift interferometry device of a Fizeau quasi-common-path structure, which comprise a laser, a half-wave plate, a focusing lens, a spatial filter, a circular polarization beam splitter (an optical rotation crystal), a beam splitter, a collimating lens, a reference mirror, an aperture diaphragm, an imaging lens, a beam splitting phase shift system, a computer control system and a CCD camera. The invention combines the synchronous phase shift technology and the Fizeau interference method, solves the technical problems that the traditional interferometer has poor stability and can not realize dynamic measurement, and is characterized in that the orthogonal polarization separation of reference light and test light in a common light path is realized by utilizing the optical rotation effect of crystals and adding a circular polarized light beam splitter with a small beam splitting angle into a Fizeau interference structure. The invention not only avoids the use of high-quality quarter wave plates in the synchronous phase shift interference system, but also greatly reduces the phase measurement error caused by the stress birefringence effect of the optical elements in the system.
Description
Technical field
The invention belongs to field of optical detection, is related to a kind of interferometric measuring means and method, more particularly to a kind of Feisuo type
Synchronous phase shift interference measurement apparatus and method.
Background technology
Interferometry technology is a kind of generally acknowledged non-contact type high-precision measurement means, is widely used in the face of optical element
A series of measurements for including optical path difference concept such as shape detection, the micro-strain of material, index of refraction homogeneity.Phase shift interference PSI
(Phase-Shifting Interferometry) e measurement technology is proposed by Burning et al. earliest, using digital corrugated phase place
Detection technique, it is achieved that automatic test in high precision, real-time, greatly expands the measurement function of interferometer, improves
Testing efficiency, promotes the raising of contemporary optics manufacture level.But a maximum drawback of phase shift interference measurement is to vibration
Very sensitive, extraneous vibration and air agitation all can cause very big error to measurement result, which also limits phase shift interference
Range of application.And synchronous phase shift interference e measurement technology (Simultaneous Phase-Shifting Interferometry),
Then fundamentally can avoid vibrating the impact to interferometry, this is possibly realized the on-line checking of Large optical system,
Become one of field of optical detection heat subject.
Synchronous phase shift interference e measurement technology is based on spatial Phase-shifting Method, gathers more than three frames in synchronization and walks with constant phase shift
The interference pattern of long (generally 90 °), the impact that so vibrates to all interference patterns is identical, subtracting each other and be divided by through algorithm
Computing is avoided that impact of the vibration to testing result.
The path-splitting synchronization phase shift interference technical research for being now based on safe graceful Green's type is more, and the common light path of Feisuo type is same
Step phase shift interference Research on measuring technique is seldom related to, and main cause is difficult based on the synchronous Phase Shifting System of polarization interference principle
Realize that object light is separated with the cross-polarization of reference light in the common light path of Feisuo type, and safe graceful Green's type path-splitting system can then pass through one
Piece polarization splitting prism is realized easily.But at present, the interferometer on market is mainly Feisuo type structure, relative to Thailand
For graceful type light splitting line structure, due to object light and the common light path of reference light, they have passed through identical optical element so Feisuo type
Structure to be vibrated to external world and have certain antijamming capability with air agitation and taken up space little be easily assembled to.Development is based on Feisuo
The synchronous phase shift interference measurement apparatus of the common light path of type are trends of the times.
Chinese patent《The synchronous phase shift Feisuo interference device that can be measured in real time》Publication No. CN102580414A, publication date
Phase is in August, 2012, and a piece of quarter-wave plate of the patent utilization replaces standard optic plane glass crystal, makes object light and reference light pass through common road
Interference is produced behind footpath, real-time measurement is can achieve, but the method needs a piece of high-quality quarter-wave plate, cost compared with
Height, and the measurement for being difficult to realize heavy caliber sphere or aspherical mirror.
United States Patent (USP)《Interferometric system with reduced vibration sensitivity
and related method》Publication No.：US00265017A1, publication date are 2 months 2012, a piece of tool of the patent utilization
The Wollaston prisms for having birefringence function realize that object light is separated with the cross-polarization of reference light in Feisuo type light path, but
In order to realize that polarizing phase shift interferes, the patented method also needs to add a piece of quarter-wave plate again, which increases system cost, increases
The operation difficulty of system.
Content of the invention
The technology of the present invention solve problem：Overcome the deficiencies in the prior art, there is provided a kind of Feisuo type is accurate to be total to the same of light channel structure
Step phase shift interference measurement apparatus and method, solve synchronous phase shift interference for a difficult problem for interference with common path system；Meanwhile, with each
Strict left-handed right-circularly polarized light can be obtained to the gyrotropi crystal of the same sex, synchronous phase shift interference system is so not only avoided
The use of middle high-quality quarter-wave plate, also surveys the phase place caused by the residual birefringence in system existing for optical element
Amount error is substantially reduced.
The technology of the present invention solution：A kind of synchronous phase shift interference measurement apparatus of the accurate light channel structure altogether of Feisuo type, including：
Laser instrument, half-wave plate, condenser lens, spatial filter, circularly polarized light beam splitter, spectroscope, collimation lens, reference mirror, aperture
Diaphragm, imaging len, light splitting phase-shift system, computer control system and CCD；The condenser lens back focal plane and collimation lens
Front focal plane overlap；The spatial filter is located at the back focal plane of condenser lens, while front Jiao positioned at collimation lens
At plane；The aperture is located at the front focal plane of imaging len, and is conjugated with the front focal plane of collimation lens；Laser instrument
A branch of linearly polarized light beam is sent, is changed into the adjustable linearly polarized light in a branch of polarization direction after half-wave plate；Poly- through condenser lens
Defocused filtered from spatial filter after two beams be changed into by a circularly polarized light beam splitter have the left-handed circle of certain splitting angle inclined
Shake light and right-circularly polarized light, and the two regards the cross-polarization spot light p of two conjugation of front focal plane in collimation lens as,
The light sent by s, wherein p light sources send left circularly polarized light, and s light sources send right-circularly polarized light, by a spectroscope transmission
After collimation lens, light beam is all reflected via reference mirror reflection and measured lens by beam-expanding collimation, then left-handed right-circularly polarized light
The mirror that is split after again passing by collimation lens is reflexed at aperture, will form four hot spot Rp, and Rs, Tp, Ts, Rp are left-handed
Circularly polarized light is focused on and the hot spot formed after dichroic mirror via collimation lens again through reference mirror reflection；Rs is right-hand circular polarization
Light is focused on and the hot spot formed after dichroic mirror via collimation lens again through reference mirror reflection；Tp is left circularly polarized light through quilt
Survey mirror reflection to focus on and the hot spot formed after dichroic mirror via collimation lens again；Ts is that right-circularly polarized light is anti-through measured lens
Penetrate and focus on and the hot spot formed after dichroic mirror via collimation lens；By adjusting the relative position of reference mirror and measured lens
Hot spot Rp, Ts or Rs, Tp can be made to overlap, other hot spots are then filtered, and have thus obtained the reference of a pair of orthogonal polarization
Light and test light；Then light splitting phase-shift system is entered after imaging len and realizes light splitting phase shift, by computer control system
Control CCD synchronous acquisitions are more than the phase shifting interference of three width and recover the 3 d shape distribution of measured lens with phase shift algorithm, real
Now synchronous phase shift interference measurement.
The circularly polarized light beam splitter is one by two panels is oppositely oriented and isotropic right-angled edge mirror-type gyrotropi crystal
The cuboid of gluing.Form by certain geometric shape gluing.
The splitting angle is 14-16 point.
The condenser lens, collimation lens and imaging len are aplanatic lens.
The light splitting phase-shift system adopts prismatic decomposition polarizer phase shift, or grating beam splitting polarizer phase shift, or micro- polarization
Spectral array light splitting phase shift.
The initial quick shaft direction of the half-wave plate is horizontal direction, changes the inclined of polarization light output by rotatable halfwave plate
Shake direction, and then changes the light intensity of the left circularly polarized light that sends of circular polarization optical splitter and right-circularly polarized light.
The cross-polarization spot light p, s regard two light sources in traditional Feisuo optical interference circuit as, and they are located at collimation thoroughly
The front focal plane of mirror and it is symmetrically distributed with optical axis as axle；Therebetween apart from d by circularly polarized light beam splitter splitting angle θ
Determine with the focal length f of collimation lens:d≈tan(θ)·f.
The front surface of the reference mirror should have the 4-6 ° of angle of wedge, to ensure that the light of front surface reflection is not introduced into light path.
A kind of synchronous phase shift interference measuring method of the accurate light channel structure altogether of Feisuo type, realizes that step is as follows：
(1) relative position of adjustment reference mirror and measured lens, makes a pair of Rp in four hot spots at aperture, Ts or
Person Rs, Tp overlap, and another pair hot spot is then filtered；
At this moment test light and the reference light of a pair of orthogonal polarization is obtained, is represented by with Jones matrix：
Wherein ErReference light Jones vector is represented,It is to refer to light amplitude, it is a left circularly polarized light；EtRepresent and survey
The Jones vector of examination light,It is test light amplitude, it is a right-circularly polarized light；φ is the phase between reference light and test light
Potential difference；
(2) phase shifting interference of the CCD synchronous acquisitions more than three width is controlled by computer control system, and is recorded；
Beam splitting system is compound light wave
(wherein E represents compound light wave Jones vector) is divided into the sub- complex light essentially equal more than 3 beams (such as 4 beams), so
θ=0 ° is followed successively by afterwards via four polarization directions and horizontal direction angle respectively, 45 °, 90 °, 135 ° of polarizer, its Jones's arrow
Amount：
(wherein θ represents that shake thoroughly direction and the angle of horizontal direction of polarizer, A (θ) represent shake thoroughly direction and horizontal direction
Angle be θ polarizer Jones vector)
Interfere, interfere light vector to be represented by：
(wherein E' represent reference light and test light interfere after Jones vector)
The emergent light is a linearly polarized light consistent with polarization direction, and its light intensity is：
(wherein I represent reference light and test light interfere after light intensity value)
Four width phase shifting interference of CCD (14) synchronous acquisition is controlled by computer control system (13), light intensity is respectively：
(wherein I1Represent the light intensity of the first width interference pattern of CCD collections, I2Represent the second width interference pattern (phase of CCD collections
Move 90 °) light intensity, I3Represent the light intensity of the 3rd width interference pattern (180 ° of phase shift) of CCD collections, I4Represent the 4th width of CCD collections
The light intensity of interference pattern (270 ° of phase shift))
Four-step phase-shifting algorithm is used, phase place is recovered：
(whereinRepresent the wrapped phase of the measured piece recovered by four-step phase-shifting algorithm)
Real phase distribution is obtained after unpacking, recycles formula：
The actual face shape of measured lens can be recovered.(wherein φ (x, y) represents the true phase of measured piece after unpacking, h
(x, y) represents the face shape distribution of measured piece)
The principle of the present invention：Using the rotation effect of crystal, linearly polarized light is divided into two beams with a circularly polarized light beam splitter
The left circularly polarized light and right-circularly polarized light of angle very little.Such two beam has the orthogonal light beam of certain walk-off angle and polarization state
Just all by reference to part and measured piece can be obtained by a pair by the relative position for adjusting reference mirror and measured lens and contain
Reference mirror information and the crossed polarized light of measured lens information, are also achieved that object light is separated with the cross-polarization of reference light, finally
The four width interference pattern synchronous acquisitions with fixed phase drift are realized after synchronous light splitting phase-shift system, are recovered using phase shift algorithm
Tested mirror surface-shaped information.
Traditional synchronous phase shift interference measuring system is typically necessary using quarter-wave plate inclined for the line of cross-polarization
The light that shakes is converted into left-handed and right-circularly polarized light to realize phase shift interference, and the present invention then avoids making for quarter-wave plate
With, not only simplify system architecture and also reduce cost, more effectively solving synchronous phase shift interference is used for Feisuo type light path altogether
A difficult problem for structure.
Present invention advantage compared with prior art is：
(1) for interferometry：Synchronous phase-shifting technique and Feisuo interference technique are combined by the present invention, are solved
Conventional dry interferometer stability is poor, technical barrier that is can not realizing kinetic measurement.
(2) for safe graceful type synchronization phase shift interference measurement：The present invention not only can be simplified using Feisuo type structure
System, can more reduce the impact that vibrates in measurement process, improve certainty of measurement.
(3) for other Feisuo type synchronization phase shift interference measuring systems：1. the present invention does not need four points of high-quality
One of wave plate can be achieved with polarization interference, save cost, improve system compact type.2. in system, arbitrary crystal element is present
Stress birfringence can all cause to produce phase error between the reference light of different polarization states and test light in common light path, and this is to measurement
As a result can have a huge impact.Research shows：For linearly polarized light, measuring result error with stress birfringence error is in
Linear relationship, and exponent function relation for circularly polarized light.So, the circularly polarized light beam splitter that the present invention is adopted is generated
Left-right rotary circularly polarized light be used for interference system respectively as object light and reference light relative to Wollaston prisms generate orthogonal
For linearly polarized light, to light path in stress birfringence the error that measurement result is brought is significantly reduced, and work as stress birfringence
When the phase error that is brought is not very big, its impact to measurement result can even be ignored.This be the present invention difference with existing
The main innovation point of technology.
Description of the drawings
Fig. 1 is that detection means constitutes schematic diagram；
Fig. 2 is that the imaginary light source of two orthogonal polarisation states generates schematic diagram；
Fig. 3 is a kind of light splitting phase-shift system schematic diagram of prismatic decomposition polarizer phase shift；
Fig. 4 is the polarization direction schematic diagram of four polarizers.
Specific embodiment
Below in conjunction with the accompanying drawings and specific embodiment is discussed in detail the present invention.
As shown in figure 1, a kind of synchronous phase shift interference measurement apparatus of the accurate light channel structure altogether of Feisuo type of the embodiment of the present invention
Including：Laser instrument 1, half-wave plate 2, condenser lens 3, spatial filter 4, circularly polarized light beam splitter 5, unpolarized Amici prism 6, standard
Straight lens 7, reference mirror 8,9 aperture 10 of measured lens, imaging len 11, light splitting phase-shift system 12, computer control system 13,
CCD camera 14.
The component function included by the present invention is as follows：
1st, laser instrument 1, wavelength export a branch of linearly polarized light and power stability in visible-range.
2nd, condenser lens 3, collimation lens 7, imaging len 11 require to be aplanatic lens.And 3 back focal plane of condenser lens
Overlap with the front focal plane of collimation lens 7.The front focal plane of imaging len 11 is located at aperture 10, and is collimation lens 7
The conjugate position of front focal plane.
3rd, spatial filter 4, diameter in 10um-50um, for carrying out space filtering to illumination light.It is located at condenser lens 3
Back focal plane and collimation lens 7 front focal plane.
4th, circularly polarized light beam splitter 5 is formed by oppositely oriented and isotropic gyrotropi crystal gluing, such as NaBrO3 crystal
With NaClO3 crystal, structure is as shown in Figure 2.It can realize the separation of about 15 points of left circularly polarized light and right-circularly polarized light.
5th, Amici prism 6, are non-polarization splitting prisms, for the reflection and transmission of light beam.
6th, aperture 10, can be with adjusting size so as to can pass through the object light and reference light with orthogonal polarisation state, its
Remaining hot spot is blocked.The front focal plane of imaging len 11 is located at, and is conjugated with the front focal plane of collimation lens 7.
7th, light splitting phase-shift system 12 adopts prismatic decomposition, polarizer phase-shift system, as shown in Figure 3：Beam splitting system is by 3 individual characteies
Unpolarized Amici prism (NPBS) gluing that can be consistent is constituted, and phase-shift system is to be followed successively by 0,45,90 by four polarization directions
, 135 polarizer group is into controlling CCD14 synchronous workings by computer control system 13, realize that four width have by single exposure
There is the interference pattern synchronous acquisition of fixed skew.
8th, light path proposed by the invention is as shown in Figure 1：Laser instrument 1 sends a branch of linearly polarized light beam, becomes after half-wave plate 2
For the adjustable linearly polarized light in a branch of polarization direction, condenser lens 3 is filtered by spatial filter 4 after focusing on, by a circular polarization
Beam splitter 5, is changed into left circularly polarized light and right-circularly polarized light that two beams have certain angle.The two can be regarded as in standard
The cross-polarization spot light p of two conjugation of front focal plane of straight lens 7, the light sent by s.By a unpolarized Amici prism
6 and collimation lens 7 after, light beam by beam-expanding collimation, then left-handed right-circularly polarized light all via reference mirror 8 rear surface reflection and
Measured lens front surface reflection, is reflexed at aperture 10 by unpolarized Amici prism 6 after again passing by collimation lens 7, is formed
Four hot spot Rp, Rs, Tp, Ts.Hot spot Rp, Ts or Rs can be made by the relative position for adjusting reference mirror 8 and measured lens 9,
Tp overlaps, and other hot spots are then filtered.Then light splitting phase-shift system 12 is entered after imaging len 12 realizes that synchronous light splitting is moved
Phase.CCD14 synchronous acquisitions are controlled more than the phase shifting interference of three width finally by computer control system 13 and uses phase shift algorithm
The 3 d shape distribution of measured lens is recovered, synchronous phase shift interference measurement is realized.
Assume that test light is left circularly polarized light, and its Jones matrix is before light splitting phase-shift system is entered：
(whereinFor testing light amplitude, EtFor test light Jones vector, i is imaginary unit)
Reference light is right-circularly polarized light, and Jones matrix is：
(wherein ErFor reference light Jones vector,For the phase difference between reference light and test light)
Then composite light beam Jones matrix is：
The polarization direction and horizontal sextant angle for assuming polarizer is θ, then its Jones matrix is：
So when composite light beam after first polarizer (θ=0), its light vector is：
(reflectance factors of the wherein r1 for unpolarized Amici prism 1 (NPBS1), t2 are unpolarized Amici prism 2 (NPBS2)
Transmission coefficient)
The interference pattern light intensity collected on so CCD1 is：
In the same manner, the light intensity on other three CCD is respectively：
(reflectance factors of the wherein r2 for unpolarized Amici prism 2 (NPBS2), t1 are unpolarized Amici prism 1 (NPBS1)
Transmission coefficient, reflectance factors of the r3 for unpolarized Amici prism 3 (NPBS3), t3 is for unpolarized Amici prism 3 (NPBS3)
Transmission coefficient)
Due to the performance of three unpolarized Amici prism (NPBS) consistent, it is possible to make：r1r2=r1t2=t1r3=t1t3
Phase distribution is obtained with four-step phase-shifting algorithm is：
Real phase distribution is obtained after unpacking, recycles formula：
Actual face shape distribution h (x, y) of measured lens can be recovered.
The above, the only specific embodiment in the present invention, but protection scope of the present invention is not limited thereto, and appoints
What be familiar with the people of the technology disclosed herein technical scope in local modification or replace, should all cover of the invention
Comprising within the scope of.
Claims (7)
1. a kind of Feisuo type standard is total to the synchronous phase shift interference measurement apparatus of light channel structure, it is characterised in that include：Laser instrument (1),
Half-wave plate (2), condenser lens (3), spatial filter (4), circularly polarized light beam splitter (5), spectroscope (6), collimation lens (7),
Reference mirror (8), aperture (10), imaging len (11), light splitting phase-shift system (12), computer control system (13) and CCD
(14)；The front focal plane of condenser lens (3) back focal plane and collimation lens (7) overlaps；Spatial filter (4) are located at
At the back focal plane of condenser lens (3), while being located at the front focal plane of collimation lens (7)；Aperture (10) are located at
The front focal plane of imaging len (11), and be conjugated with the front focal plane of collimation lens (7)；It is inclined that laser instrument (1) sends a bunch
Shake light beam, is changed into the adjustable linearly polarized light in a branch of polarization direction after half-wave plate (2)；Through condenser lens (3) focus on after by
Being changed into two beams by a circularly polarized light beam splitter (5) after spatial filter (4) filtering has the left-handed circle of certain splitting angle inclined
Shake light and right-circularly polarized light, and the two regards the cross-polarization point light of two conjugation of front focal plane in collimation lens (7) as
The light sent by source p, s, wherein p light sources send left circularly polarized light, and s light sources send right-circularly polarized light, by a spectroscope
(6), after transmission and collimation lens (7), light beam is all reflected via reference mirror (8) by beam-expanding collimation, then left-handed right-circularly polarized light
The mirror (6) that is split after collimation lens (7) is again passed by with measured lens (9) reflection reflexes to aperture (10) place, will form four
Individual hot spot Rp, Rs, Tp, Ts, wherein Rp is left circularly polarized light focused on via collimation lens (7) through reference mirror (8) reflection again and
The hot spot formed after spectroscope (6) reflection；Rs is that right-circularly polarized light is again poly- via collimation lens (7) through reference mirror (8) reflection
The hot spot formed after the reflection of burnt and spectroscope (6)；Tp is that left circularly polarized light is reflected again via collimation lens through measured lens (9)
(7) hot spot for focusing on and being formed after spectroscope (6) reflection；Ts is that right-circularly polarized light is reflected again via collimation through measured lens (9)
The hot spot formed after lens (7) are focused on and spectroscope (6) reflects；By adjusting the relative position of reference mirror (8) and measured lens (9)
Hot spot Rp, Ts or Rs, Tp can be made to overlap, other hot spots are then filtered, and have thus obtained the reference of a pair of orthogonal polarization
Light and test light；Then light splitting phase-shift system (12) is entered after imaging len (11) and realizes light splitting phase shift, by computer
Control system (13) control CCD (14) synchronous acquisition is more than the phase shifting interference of three width and recovers measured lens with phase shift algorithm
3 d shape is distributed, and realizes synchronous phase shift interference measurement；
The initial quick shaft direction of half-wave plate (2) is horizontal direction, changes the inclined of polarization light output by rotatable halfwave plate
Shake direction, and then changes the light intensity of the left circularly polarized light that sends of circular polarization optical splitter and right-circularly polarized light；
The cross-polarization spot light p, s regard two light sources in traditional Feisuo optical interference circuit as, and they are located at collimation lens
Front focal plane and it is symmetrically distributed with optical axis as axle；Therebetween apart from d by circularly polarized light beam splitter (5) splitting angle θ
Determine with the focal length f of collimation lens (7):d≈tan(θ)·f.
2. Feisuo type standard according to claim 1 is total to the synchronous phase shift interference measurement apparatus of light channel structure, it is characterised in that：
Circularly polarized light beam splitter (5) are one by two panels is oppositely oriented and isotropic right-angled edge mirror-type gyrotropi crystal is glued
Into cuboid.
3. Feisuo type standard according to claim 1 is total to the synchronous phase shift interference measurement apparatus of light channel structure, it is characterised in that：
The splitting angle is 14-16 point.
4. Feisuo type standard according to claim 1 is total to the synchronous phase shift interference measurement apparatus of light channel structure, it is characterised in that：
Condenser lens (3), collimation lens (7) and imaging len (11) are aplanatic lens.
5. Feisuo type standard according to claim 1 is total to the synchronous phase shift interference measurement apparatus of light channel structure, it is characterised in that：
Light splitting phase-shift system (12) can adopt prismatic decomposition polarizer phase shift, or grating beam splitting polarizer phase shift, or micro- polarization
Spectral array light splitting phase shift.
6. Feisuo type standard according to claim 1 is total to the synchronous phase shift interference measurement apparatus of light channel structure, it is characterised in that：
The front surface of reference mirror (8) should have the 2-4 ° of angle of wedge, to ensure that the light of front surface reflection is not introduced into light path.
7. a kind of Feisuo type standard is total to the synchronous phase shift interference measuring method of light channel structure, it is characterised in that：Using claim 1 institute
The measurement apparatus that states, realize that step is as follows：
(1) relative position of adjustment reference mirror (8) and measured lens (9), makes a pair in four hot spots at aperture (10) place
Rp, Ts or Rs, Tp overlap, and another pair hot spot is then filtered；
At this moment test light and the reference light of a pair of orthogonal polarization is obtained, is represented by with Jones matrix：
Wherein ErReference light Jones vector is represented,It is to refer to light amplitude, it is a left circularly polarized light；EtRepresent test light
Jones vector,It is test light amplitude, it is a right-circularly polarized light；φ is the phase difference between reference light and test light；
(2) phase shifting interference of CCD (14) synchronous acquisition more than three width is controlled by computer control system (13), and is recorded；
Beam splitting system is compound light wave：
It is divided into the sub- complex light essentially equal more than 3 beams, wherein E represents compound light wave Jones vector；Then respectively via four
Polarization direction is followed successively by θ=0 ° with horizontal direction angle, 45 °, 90 °, 135 ° of polarizer, its Jones vector：
Wherein θ represents that shake thoroughly direction and the angle of horizontal direction of polarizer, A (θ) represent the folder in shake thoroughly direction and horizontal direction
Jones vector of the angle for the polarizer of θ；
Interfere, interfere light vector to be represented by：
Wherein E' represent reference light and test light interfere after Jones vector；
Emergent light is a linearly polarized light consistent with polarization direction, and its light intensity is：
Wherein I represent reference light and test light interfere after light intensity value；
Four width phase shifting interference of CCD (14) synchronous acquisition is controlled by computer control system (13), light intensity is respectively：
Wherein I1Represent the light intensity of the first width interference pattern of CCD collections, I2Represent 90 ° of the second width interference pattern phase shift of CCD collections
Light intensity, I3Represent the light intensity of 180 ° of the 3rd width interference pattern phase shift of CCD collections, I4Represent the 4th width interference pattern phase shift of CCD collections
270 ° of light intensity；
Four-step phase-shifting algorithm is used, phase place is recovered：
WhereinRepresent the wrapped phase of the measured piece recovered by four-step phase-shifting algorithm；
Real phase distribution is obtained after unpacking, recycles formula：
The actual face shape of measured lens can be recovered, wherein φ (x, y) represents the true phase of measured piece after unpacking, h (x, y)
Represent the face shape distribution of measured piece.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410263744.2A CN104034257B (en) | 2014-06-14 | 2014-06-14 | Synchronous phase shift interference measurement device and method of Fizeau quasi-common optical path structure |
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