CN101113927A - Phase shifting lateral direction shearing interferometer - Google Patents
Phase shifting lateral direction shearing interferometer Download PDFInfo
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- CN101113927A CN101113927A CNA2007100451472A CN200710045147A CN101113927A CN 101113927 A CN101113927 A CN 101113927A CN A2007100451472 A CNA2007100451472 A CN A2007100451472A CN 200710045147 A CN200710045147 A CN 200710045147A CN 101113927 A CN101113927 A CN 101113927A
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- 238000010008 shearing Methods 0.000 title claims description 105
- 230000003287 optical effect Effects 0.000 claims abstract description 18
- 230000010363 phase shift Effects 0.000 claims abstract description 12
- 230000005540 biological transmission Effects 0.000 claims description 13
- 239000000463 material Substances 0.000 claims description 13
- 239000013078 crystal Substances 0.000 claims description 6
- 230000007246 mechanism Effects 0.000 claims description 5
- 238000005259 measurement Methods 0.000 abstract description 13
- 230000008859 change Effects 0.000 description 6
- 238000001514 detection method Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 230000010287 polarization Effects 0.000 description 4
- 230000008033 biological extinction Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 230000002452 interceptive effect Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 230000001427 coherent effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
- G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
- G01J9/0215—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods by shearing interferometric methods
Abstract
A phase shift transverse shear interferometer consists of a first polarizer, an input parallel plate, a second polarizer, a third polarizer, a first shear plate, a second shear plate, an output parallel plate, a quarter wave plate, a detecting deflection machine, a CCD camera and a computer, the phase shift transverse shear interferometer is an equal optical path interference optical system, the shear quantity can be continuously adjusted, which is very applicable to the wavefront measurement of the short interference length, and satisfies the wavefront measurement of the different light beam bore and the measurement precision.
Description
Technical Field
The invention relates to optical interference measurement, in particular to a phase-shifting lateral shearing interferometer, which is capable of realizing aplanatic interference and continuously adjusting shearing quantity.
Background
The transverse shearing interference method is used for interfering the wavefront to be measured and the copied wavefront thereof, avoids system errors caused by adopting standard wavefronts, has a simple structure, low environmental requirements and high measurement precision, and plays an increasingly important role in wavefront measurement with unique advantages. The performance of the lateral shearing interferometer formed by introducing the phase shifting technology into the lateral shearing interferometer can be further improved, such as sensitivity and measurement precision improvement, realization of automatic processing of an interference diagram, provision of a wavefront three-dimensional shape and the like.
Prior art [1] (see Liu Xiao Jun, chapter, li post. "development of Co-channel phase-shifting shearing interferometer". Proceedings of the university of Chinese Engineers, vol.27, no.3, 16-18, 1999) describes a phase-shifting lateral shearing interferometer that uses the birefringence effect of a crystal to generate a shearing quantity and uses the polarization phase-shifting principle to shift the phase. If a combined birefringent crystal with equal optical path is adopted, the combined birefringent crystal can be a phase-shifting shearing interferometer with equal optical path interference. If the amount of shear is changed by rotating the birefringent crystal, it cannot maintain the aplanatic interference condition. Therefore, the phase-shifting lateral shearing interferometer cannot simultaneously obtain the characteristics of aplanatic interference and continuously adjustable shearing amount.
Prior art [2] (see DeVon W.Griffin. "Phase-shifting interferometer". Optics Letter, vol.26, no.3, 140-141, 2001) describes a Phase-shifting lateral shearing interferometer using a single shearing element which generates a continuously variable Phase shift by changing a control voltage with a liquid crystal retarder sandwiched between flat plates as a Phase-shifting element. The phase-shifting shearing interferometer does not need precise alignment and has a simpler structure, but is a non-aplanatic interfering phase-shifting shearing interferometer, and the lateral shearing quantity of the phase-shifting shearing interferometer cannot be adjusted.
In the prior art [3] (see Jae Bong Song, yun Wo Lee, in Won Lee, yong-Hee Lee. "Simple phase-shifting method In a wedge-plate lateral-shearing interferometer". Applied Optics, vol43, no.20, 3989-39929, 2004), a phase-shifting lateral shearing interferometer using a single wedge as a shearing element is described, which generates a phase shift by moving the wedge In parallel In a horizontal plane, and has high phase-shifting accuracy. But the shearing amount is not adjustable, and the phase-shifting shearing interferometer is also a phase-shifting shearing interferometer with non-aplanatic interference.
Prior art [4] (see Sanjib Chatterjee, "Measurement of Single-pass wave front distortion of Optical components with phase shifting Jamin interferometer". Optic Engineering, vol.43, no.4, 872-8799, 2004) describes a phase shifting lateral shearing interferometer based on an Abbe's interferometer that moves one of the wedges slightly to produce a phase shift, but the shearing of the interferometer is also not adjustable and it is only approximately aplanatic coherent during the phase shift.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provide a phase-shifting lateral shearing interferometer. The phase-shifting lateral shearing interferometer is an aplanatic interference optical system, is very suitable for wavefront measurement of short-coherence-length beams, can continuously change shearing amount, and can meet wavefront detection requirements of different beam calibers and measurement accuracy.
The technical solution of the invention is as follows:
a phase-shifting lateral shearing interferometer comprises a first polarizer, an input parallel plate, a second polarizer, a third polarizer, a first shearing plate, a second shearing plate, an output parallel plate, a quarter wave plate, an analyzer, a CCD camera and a computer, wherein the position relation of the first polarizer, the input parallel plate, the second polarizer, the third polarizer, the first shearing plate, the second shearing plate, the output parallel plate, the quarter wave plate, the analyzer, the CCD camera and the computer is as follows:
the first polarizer is arranged on one side of the input parallel flat plate, an incident light beam and the input parallel flat plate form a 45-degree angle in an incident light path, the output parallel flat plate and the input parallel flat plate are made of the same material and are arranged in parallel, a second polarizer and a first shearing flat plate are arranged in a reflection light path of a first medium surface of the input parallel flat plate, a third polarizer and a second shearing flat plate are arranged in a reflection light path of a second medium surface of the input parallel flat plate, the first shearing flat plate and the second shearing flat plate are made of the same material and are symmetrically arranged in opposite inclination directions, the first shearing flat plate and the second shearing flat plate are provided with a mechanism which simultaneously rotate reversely around a common axis, the second polarizer and the third polarizer are made of the same material and thickness, a quarter polarizer, a polarization analyzer and a CCD camera are sequentially arranged in an emergent light path of the output parallel flat plate, and an output end of the CCD camera is connected with an input end of the computer.
The first polarizer is provided with a rotating mechanism for continuously changing the direction of the light transmission axis of the first polarizer, and the analyzer is provided with a rotating mechanism for continuously changing the direction of the light transmission axis of the first polarizer.
The incident plane of the input parallel flat plate is in the horizontal plane, and the transmission axes of the second polarizer and the third polarizer are mutually vertical and are parallel or vertical to the incident plane of the input parallel flat plate. The fast axis direction of the quarter-wave plate is 45 degrees with the horizontal plane.
The fast axis direction of the quarter-wave plate and the transmission axis direction of the second polarizer and the third polarizer form an angle of 45 degrees respectively.
The first shear flat plate and the second shear flat plate can be optical parallel flat plates, and the optical materials and the thicknesses of the first shear flat plate and the second shear flat plate are the same. And if the first shearing flat plate and the second shearing flat plate are optical wedge-shaped flat plates, the optical materials and the thicknesses of the first shearing flat plate and the second shearing flat plate are the same as the wedge angle. The first shearing flat plate and the second shearing flat plate are opposite in inclination direction and can rotate reversely around a common axis perpendicular to the incident plane simultaneously to change the shearing amount.
The first polarizer, the second polarizer, the third polarizer and the analyzer can be a polarizing prism, or a polarizing plate, or other linear polarized light generator.
The optical materials of the input parallel flat plate and the output parallel flat plate are the same and the thicknesses of the input parallel flat plate and the output parallel flat plate are equal.
The quarter-wave plate can be a birefringent crystal wave plate or a prism type phase retarder.
The computer is provided with phase-shifting shearing interference fringe processing software.
The invention has the following technical effects:
1. the phase-shifting lateral shearing interferometer of the invention can further improve the performance of the shearing interferometer by introducing the phase-shifting technology, such as improving the sensitivity and the measurement precision, realizing the automatic processing of an interferogram, giving the three-dimensional shape of a wavefront and the like.
2. The method can be suitable for wavefront detection with different beam calibers and measurement accuracy requirements. The first shearing flat plate and the second shearing flat plate of the phase-shifting lateral shearing interferometer can rotate reversely around the common axis at the same time, so that the shearing amount is continuously adjustable. The change of the shearing quantity can meet the requirements of different beam calibers and measurement accuracy.
3. The wavefront detection can be performed on a short coherence length beam. The phase-shifting lateral shearing interferometer is an aplanatic interference optical system, and can be used for performing wavefront detection on short-coherence-length light beams and even white light.
Drawings
FIG. 1 is a schematic diagram of a phase-shifting lateral shearing interferometer according to the present invention.
Fig. 2 is a phase-shift interference diagram obtained when the analyzer rotates 45 ° sequentially when the aperture of the measured beam is Φ =10mm and the shearing amount is 2.5 mm.
Fig. 3 is a phase-shift interference diagram obtained when the analyzer rotates 45 ° sequentially when the aperture of the measured light beam is Φ =10mm and the shearing amount is 4 mm.
Detailed Description
Referring first to FIG. 1, FIG. 1 is a schematic diagram of a phase-shifting lateral shearing interferometer according to an embodiment of the present invention. As can be seen from the figure, the phase-shifting lateral shearing interferometer comprises a first polarizer 1, an input parallel plate 2, a second polarizer 3, a third polarizer 4, a first shearing plate 5, a second shearing plate 6, an output parallel plate 7, a quarter-wave plate 8, an analyzer 9, a CCD camera 10 and a computer processing system 11.
The first polarizer 1 is on the side of the input parallel plate 2 and in the incident light path thereof. The incident beam is at 45 to the input parallel plate 2. The input parallel plate 2 and the output parallel plate 7 are made of the same material and have the same thickness and are arranged in parallel. The first shear plate 5 and the second shear plate 6 are made of the same material and have the same thickness and are symmetrically arranged between the input parallel plate 2 and the output parallel plate 7, and the first shear plate 5 and the second shear plate 6 are inclined in opposite directions and can simultaneously rotate in opposite directions around a common axis, as shown by the arrows in fig. 1. The second polarizer 3 and the third polarizer 4 are made of the same material and thickness, and are positioned after the input parallel plate 2 and before the first shearing plate 5 and the second shearing plate 6. A quarter-wave plate 8 and an analyzer 9 are placed behind the output parallel plate 7 and in the exit light path thereof. Behind the analyzer 9 a CCD camera 10 is placed, the output of which is connected to the input of the processing computer system 11.
The first polarizer 1 can be rotated continuously to change its transmission axis direction. The entrance face of the input parallel plate 2 is in the horizontal plane. The transmission axes of the second polarizer 3 and the third polarizer 4 are respectively parallel to and vertical to the horizontal plane. 4. The fast axis direction of the quarter-wave plate 8 forms an angle of 45 degrees with the horizontal plane. The analyzer 9 can be continuously rotated to change its light transmission axis direction.
The working process of the invention is as follows:
the light beam to be detected is linearly polarized after passing through the first analyzer 1, is incident on the input parallel flat plate 2 at an incidence angle of 45 degrees, is reflected by the first medium surface 21 and the second medium surface 22 of the input parallel flat plate 2 and then is divided into two paths, the two paths of light beams respectively pass through the second polarizer 3 and the third polarizer 4 with mutually vertical polarization directions to form linearly polarized light with mutually vertical polarization directions, then respectively pass through the first shearing flat plate 5 and the second shearing flat plate 6 with opposite inclination directions to generate transverse shearing, finally the two paths of light beams are combined after being reflected by the first medium surface 71 and the second medium surface 72 of the output parallel flat plate 7, the combined light beams generate interference after passing through the quarter wave plate 8 and the analyzer 9, the phase-shifting interference pattern is formed by rotating the analyzer 9 step by step, and the image is collected by the CCD10 and is input into the computer 11 for image processing.
The wavefront of the two beams passing through the second polarizer 3 and the third polarizer 4 corresponding to a point in the interference image can be represented by complex amplitude as Aexp (j θ) a ) And Bexp (j θ) b ) Wherein A and B are the amplitude of the two beams, theta a And theta b The phases of the two light beams are respectively. The angle between the transmission axis of the analyzer 9 and the fast axis of the quarter-wave plate 8, i.e. the azimuth angle, is not represented as φ, the corresponding interference light intensity can be represented as
In the above formula for calculating the interference light intensity, 2 phi is the additional phase generated when the analyzer 9 is rotated, so that the phase shift adjustment can be performed when the analyzer 9 is rotated, and the amount of phase shift change is twice the azimuth angle of the analyzer 9. A series of phase-shifting interference images are collected in the process of rotating the analyzer 9, the computer 11 can solve the phase difference corresponding to each point in the interference images by using interference image processing software, and high-precision wavefront detection results can be obtained by further processing through the computer 11.
FIG. 1 is a block diagram of a preferred embodiment of the present invention, the specific structure and parameters of which are described below:
the input parallel plate 2 and the output parallel plate 7 have the dimensions of 155mm × 70mm × 40mm, and are made of K9 glass. The first shearing flat plate 5 and the second shearing flat plate 6 are both optical wedge-shaped flat plates, the thickness of each optical wedge-shaped flat plate is 40mm, and the materials of the first shearing flat plates and the second shearing flat plates are both K9 glass. The first shearing flat plate 5 and the second shearing flat plate 6 can continuously rotate within the range of 0-30 degrees, and the shearing amount can be continuously adjusted. The first polarizer 1, the second polarizer 3 and the third polarizer 4 are polaroids with an extinction ratio of 100: 1, and the aperture of the polaroids is phi 40mm. The analyzer 9 is a polarizing film with an extinction ratio of 100: 1, and the caliber thereof is phi 50mm. The quarter-wave plate 8 is a quartz wave plate having a phase retardation accuracy of λ/300 (where λ is 632.8 nm), and has a caliber of Φ 50mm.
In the embodiment, wavefront detection is performed on a light beam to be measured with an aperture of Φ 10mm and a wavelength of 632.8nm, and an interference image of the light beam is received by the CCD camera 10. In this embodiment, when the shearing amount is 2.5mm and the transmission axis direction of the analyzer 9 is the same as the fast axis direction of the quarter-wave plate 8, i.e., Φ =0 °, the interference image acquired by the CCD camera 10 after the light beam to be measured enters this embodiment is shown in fig. 2 (a). The analyzer 9 rotates 45 ° in sequence so that when Φ is 45 °, 90 °, 135 ° in sequence, that is, when the phase is shifted 90 ° in sequence, the interference images acquired by the CCD camera 10 are as shown in fig. 2 (b) to (d). When the shearing amount is 4mm, the phase-shifting interferogram shown in fig. 3 (a) - (d) can be obtained when the included angle between the transmission axis of the analyzer 9 and the fast axis of the quarter-wave plate 8 is 0 °, 45 °, 90 ° and 135 °. It is obvious from fig. 2 and 3 that the interference fringes are respectively and sequentially displaced in the four interference images, and it can be seen that the shearing amount is adjustable, and the phase shift of the transversely sheared interference image can be well realized.
Claims (8)
1. The utility model provides a phase shift lateral shear interferometer which characterized in that comprises first polarizer (1), input parallel flat board (2), second polarizer (3), third polarizer (4), first shear flat board (5), second shear flat board (6), output parallel flat board (7), quarter wave plate (8), analyzer (9), CCD camera (10) and computer (11), its positional relationship as follows:
the first polarizer (1) is arranged at one side of the input parallel plate (2) in an incident light path, an incident light beam forms 45 degrees with the input parallel plate (2), the output parallel plate (7) and the input parallel plate (2) are made of the same material and have the same thickness and are arranged in parallel, a second polarizer (3) and a first shearing plate (5) are arranged in a reflection light path of a first medium surface (21) of the input parallel plate (2) between the input parallel plate (2) and the output parallel plate (7), a third polarizer (4) and a second shearing plate (6) are arranged in a reflection light path of a second medium surface (22) of the input parallel plate (2), the first shearing plate (5) and the second shearing plate (6) are arranged oppositely and symmetrically in an inclined direction, the first shearing plate (5) and the second shearing plate (6) are provided with a common axis rotating reversely at the same time, the second shearing plate (3) and the third shearing plate (4) are connected with a CCD output end of a quarter-wave plate (10) and a quarter-wave plate (10) connected with the output end of the CCD detector (10) in sequence.
2. The phase shifting lateral shearing interferometer according to claim 1, wherein the first polarizer (1) has a rotating mechanism for continuously changing the direction of the transmission axis thereof, and the analyzer (9) has a rotating mechanism for continuously changing the direction of the transmission axis thereof.
3. The phase-shifting lateral shearing interferometer according to claim 1, wherein the input plane of the input parallel plate (2) is in a horizontal plane, the transmission axes of the second polarizer (3) and the third polarizer (4) are perpendicular to each other and are parallel or perpendicular to the input plane of the input parallel plate (2), and the direction of the fast axis of the quarter-wave plate (8) is 45 ° to the horizontal plane.
4. The phase shifting lateral shearing interferometer according to claim 1, wherein the first shearing plate (5) and the second shearing plate (6) are optically parallel plates, and the optical materials and the thicknesses of the first shearing plate and the second shearing plate are the same when the first shearing plate and the second shearing plate are optically parallel plates.
5. The phase shifting lateral shearing interferometer according to claim 1, wherein the first shearing plate (5) and the second shearing plate (6) are optical wedge plates, and the optical materials and thicknesses thereof are the same as the wedge angle, and the first shearing plate (5) and the second shearing plate (6) are inclined in opposite directions.
6. The phase shifting lateral shearing interferometer according to claim 1, wherein said first polarizer (1), second polarizer (3), third polarizer (4) and analyzer (9) are polarizing prisms, or polarizers, or other linearly polarized light generators.
7. The phase shifting lateral shearing interferometer according to claim 1, wherein said quarter wave plate (8) is a birefringent crystal waveplate or a prism type phase retarder.
8. The phase shifting lateral shearing interferometer according to any one of claims 1 to 7, wherein the computer (11) is a computer having phase shifting shearing fringe processing software.
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Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN101788344A (en) * | 2010-03-23 | 2010-07-28 | 西安工业大学 | Instantaneous phase-shift transverse shear interferometer |
| CN103135197A (en) * | 2013-02-06 | 2013-06-05 | 中国科学院西安光学精密机械研究所 | Adjusting method of light path overlap and balancing based on equal inclination interference principle |
| CN103256991A (en) * | 2013-05-08 | 2013-08-21 | 中国科学院上海光学精密机械研究所 | Spatial phase shift lateral shearing interferometer |
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| CN111256582B (en) * | 2020-01-22 | 2021-09-07 | 中国计量大学 | Transient phase-shifting lateral shearing interferometer and measurement method |
| CN114545584A (en) * | 2022-02-17 | 2022-05-27 | 长沙麓邦光电科技有限公司 | Consistency checking method for accessories of wedge-shaped flat plate shearing interferometer |
| CN114545584B (en) * | 2022-02-17 | 2023-11-03 | 长沙麓邦光电科技有限公司 | Fitting consistency verification method for wedge-shaped flat shearing interferometer |
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