CN114545584B - Fitting consistency verification method for wedge-shaped flat shearing interferometer - Google Patents
Fitting consistency verification method for wedge-shaped flat shearing interferometer Download PDFInfo
- Publication number
- CN114545584B CN114545584B CN202210146013.4A CN202210146013A CN114545584B CN 114545584 B CN114545584 B CN 114545584B CN 202210146013 A CN202210146013 A CN 202210146013A CN 114545584 B CN114545584 B CN 114545584B
- Authority
- CN
- China
- Prior art keywords
- wedge
- base
- fitting
- shearing
- observation screen
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000010008 shearing Methods 0.000 title claims abstract description 55
- 238000000034 method Methods 0.000 title claims abstract description 21
- 238000012795 verification Methods 0.000 title abstract description 8
- 238000004519 manufacturing process Methods 0.000 claims abstract description 10
- 230000003287 optical effect Effects 0.000 abstract description 2
- 230000004048 modification Effects 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 238000003384 imaging method Methods 0.000 description 2
- 238000004026 adhesive bonding Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/1805—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for prisms
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
- G01B11/27—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/10—Beam splitting or combining systems
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/62—Optical apparatus specially adapted for adjusting optical elements during the assembly of optical systems
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
Abstract
The application relates to the technical field of optical manufacturing, and discloses a fitting consistency verification method for a wedge-shaped flat shearing interferometer, which is used for avoiding misjudgment of a user. The method comprises the following steps: the method comprises the steps of constructing a wedge-shaped flat shearing interferometer assembly and debugging system, wherein the wedge-shaped flat shearing interferometer assembly and debugging system comprises a first base and a second base, a non-polarized beam splitter for splitting a collimated light beam to wedge-shaped prisms on two shearing plates, and a device for converging or diverging parallel collimated light beams is arranged between the non-polarized beam splitter and the second base; rotating the wedge prism on the first base so that interference fringes observed by the corresponding observation screen are parallel to the scribing lines on the observation screen, and then fixing the wedge prism on the corresponding shearing plate to manufacture a fitting; the manufactured accessory is arranged on the second base, whether the direction of the corresponding interference fringe deviating from the line on the observation screen is consistent with the expected direction or not is observed through the corresponding observation screen, and if so, the accessory is qualified; otherwise, the wedge prism in the fitting is rotated 180 degrees and then reassembled.
Description
Technical Field
The application relates to the technical field of optical manufacturing, and discloses a fitting consistency verification method for a wedge-shaped flat shearing interferometer.
Background
The alignment degree of the laser beam can be judged by the interference fringes produced by the wedge-shaped flat shearing interferometer. The specific principle is as follows: the laser beam is incident to the wedge-shaped flat plate, light reflected by the front surface and the rear surface of the wedge-shaped flat plate is interfered at the observation plate, and when the incident light beams are parallel, interference fringes are parallel to a scribing line on the observation screen; when the incident light beam diverges or converges, the interference fringes when the interference fringes are parallel deflect, and the deflection directions of the divergent light beam and the convergent light beam are opposite.
The wedge-shaped flat shearing interferometer assembly can be divided into an observation plate assembly and a shearing plate assembly, and the effect of the interferometer is greatly influenced by the assembly angle of the wedge-shaped prism during the shearing plate assembly. The conventional assembly method in the industry is to score lines on the edges of a mechanical part and a wedge prism respectively to perform rough alignment, and the precision is poor.
At the same time, the shearing plate is used as a replaceable accessory, the corresponding mechanical parts and the wedge prism are usually from different manufacturers, and the gradual direction of the narrow and wide parts of the wedge prism is difficult to distinguish by naked eyes, so that the error and carelessness of marking easily occur in the manufacturing process of the wedge prism. For example: the labels that are about to be marked on the high side are marked on the narrow side, or the labels that are about to be marked on the narrow side are marked on the high side. Therefore, after the shearing plate assembled according to the scribing is assembled to the wedge-shaped flat shearing interferometer, the deflection directions corresponding to the divergent light beam and the convergent light beam are interchanged, and misjudgment of a user is easy to cause.
Disclosure of Invention
The application aims to disclose a fitting consistency verification method for a wedge-shaped flat shearing interferometer, so as to avoid misjudgment of a user.
In order to achieve the above purpose, the application discloses a fitting consistency verification method for a wedge-shaped flat shearing interferometer, which comprises the following steps:
s1, building a wedge-shaped flat shearing interferometer assembly and debugging system, wherein the system comprises a first base and a second base, each base is provided with a structure which is matched with a shearing plate in a dismounting way, and a corresponding observation plate is arranged on each base to form the wedge-shaped flat shearing interferometer, and the system further comprises a non-polarized beam splitter which splits a collimated light beam to wedge prisms on two shearing plates; a device for converging or diverging parallel collimated light is arranged between the unpolarized beam splitter and the second base;
s2, roughly aligning marks of the wedge prism with scribing lines on the shear plate on the first base;
s3, rotating the wedge-shaped prism through a rotation angle smaller than 180 degrees so that interference fringes observed through a corresponding observation screen are parallel to scribing lines on the observation screen, and then fixing the wedge-shaped prism on a corresponding shearing plate to manufacture a fitting;
s4, mounting the manufactured accessory on the second base, observing whether the direction of the corresponding interference fringe deviating from the line on the observation screen is consistent with the expected direction or not through the corresponding observation screen, and if so, determining that the accessory is qualified; otherwise, the wedge prism in the fitting is rotated 180 degrees and then the step S3 is executed again to be assembled again.
Preferably, the system is further provided with an image acquisition and display assembly for observing the relative relation between the scribed lines and the interference fringes on the two observation screens.
The application has the following beneficial effects:
the alignment precision of the wedge prism is simple, practical and improved. The consistency of the shear plates is ensured, and misjudgment of users is effectively avoided. Further, the present application can omit the corresponding marking process on the shear plate, and is briefly described as a method of deformation to ensure consistency, the method after deformation specifically includes:
s10, building a wedge-shaped flat shearing interferometer assembly and debugging system, wherein the system comprises a first base and a second base, each base is provided with a structure which is matched with a shearing plate in a dismounting way, and a corresponding observation plate is arranged on each base to form the wedge-shaped flat shearing interferometer, and the system further comprises a non-polarized beam splitter which splits a collimated light beam to wedge prisms on two shearing plates; a device for converging or diverging parallel collimated light is arranged between the unpolarized beam splitter and the second base;
s20, rotating the wedge-shaped prism on the first base so that interference fringes observed through a corresponding observation screen are parallel to scribing lines on the observation screen, and fixing the wedge-shaped prism on a corresponding shearing plate to manufacture a fitting;
step S30, mounting the manufactured accessory on the second base, observing whether the direction of the corresponding interference fringe deviating from the line on the observation screen is consistent with the expected direction or not through the corresponding observation screen, and if so, determining that the accessory is qualified; otherwise, the wedge prism in the fitting is rotated 180 degrees and then returns to the step S20 to be assembled again.
The application will be described in further detail with reference to the accompanying drawings.
Drawings
The accompanying drawings, which are included to provide a further understanding of the application and are incorporated in and constitute a part of this specification, illustrate embodiments of the application and together with the description serve to explain the application. In the drawings:
FIG. 1 is a block diagram of a wedge plate shearing interferometer assembly debugging system disclosed in an embodiment of the present application.
Detailed Description
Embodiments of the application are described in detail below with reference to the attached drawings, but the application can be implemented in a number of different ways, which are defined and covered by the claims.
Example 1
The embodiment discloses a fitting consistency verification method for a wedge-shaped flat shearing interferometer, which comprises the following steps:
s1, building a wedge-shaped flat shearing interferometer assembly and debugging system, wherein the system comprises a first base and a second base, each base is provided with a structure which is matched with a shearing plate in a dismounting way, and a corresponding observation plate is arranged on each base to form the wedge-shaped flat shearing interferometer, and the system further comprises a non-polarized beam splitter which splits a collimated light beam to wedge prisms on two shearing plates; and a device for converging or diverging the parallel collimated light is arranged between the unpolarized beam splitter and the second base.
Typically, the first base and the second base are constructed and formed of identical materials to reduce errors. In this step, preferably, the system further comprises an image acquisition and display unit for observing the relative relationship between the scribed lines and the interference fringes on the two observation screens.
Specifically, as shown in fig. 1, a simple wedge-shaped flat shearing interferometer assembly and debugging system may specifically include: 1. a laser; 2. a beam-expanded collimation device; 3. a non-polarizing beam splitter; 4. wedge-shaped flat shearing interferometer base (first base on left, second base on right); 5. shear plates (comprising wedge prisms and mechanical mounts); 6. a viewing panel (comprising a diffuser viewing screen and mechanical elements); 7. an imaging lens; 8. an industrial camera; 9. a computer; 10. means for dispersing the parallel light; 11. a diaphragm.
And S2, roughly aligning the marks of the wedge-shaped prisms with the scribing lines on the shear plate on the first base.
In this step, the marks of the wedge prism, which are typically marked on the sides of the prism to not affect the propagation of the beam, are typically marked on the narrow or high sides of the prism cross-section by specifications.
And S3, rotating the wedge-shaped prism through a rotation angle smaller than 180 degrees so that interference fringes observed through the corresponding observation screen are parallel to the scribing lines on the observation screen, and fixing the wedge-shaped prism on the corresponding shearing plate to manufacture the fitting.
In this step, a specific fixing mode can be a low-cost gluing mode, and secondary assembly is also facilitated.
S4, mounting the manufactured accessory on the second base, observing whether the direction of the corresponding interference fringe deviating from the line on the observation screen is consistent with the expected direction or not through the corresponding observation screen, and if so, determining that the accessory is qualified; otherwise, the wedge prism in the fitting is rotated 180 degrees and then the step S3 is executed again to be assembled again.
Example 2
This embodiment, as a modification of the above embodiment, may further omit the above-described corresponding marking process on the shear plate, and is briefly described as a method of the following modification to ensure uniformity.
The method of the embodiment specifically comprises the following steps:
s10, building a wedge-shaped flat shearing interferometer assembly and debugging system, wherein the system comprises a first base and a second base, each base is provided with a structure which is matched with a shearing plate in a dismounting way, and a corresponding observation plate is arranged on each base to form the wedge-shaped flat shearing interferometer, and the system further comprises a non-polarized beam splitter which splits a collimated light beam to wedge prisms on two shearing plates; and a device for converging or diverging the parallel collimated light is arranged between the unpolarized beam splitter and the second base.
And S20, rotating the wedge-shaped prism on the first base so that interference fringes observed through the corresponding observation screen are parallel to scribing lines on the observation screen, and fixing the wedge-shaped prism on the corresponding shearing plate to manufacture the fitting.
Step S30, mounting the manufactured accessory on the second base, observing whether the direction of the corresponding interference fringe deviating from the line on the observation screen is consistent with the expected direction or not through the corresponding observation screen, and if so, determining that the accessory is qualified; otherwise, the wedge prism in the fitting is rotated 180 degrees and then returns to the step S20 to be assembled again.
Similarly, the system of this embodiment is further provided with an image acquisition and display assembly for observing the relative relationship between the scribed lines and the interference fringes on the two observation screens, and the assembly of the embodiment can be specifically composed of an imaging lens, an industrial camera and a computer as shown in fig. 1.
In summary, the fitting consistency verification method for the wedge-shaped flat shearing interferometer disclosed by the embodiment of the application is simple and practical, and improves the alignment precision of the wedge-shaped prism. And the consistency of the shearing plates is ensured, and misjudgment of users is effectively avoided.
The above description is only of the preferred embodiments of the present application and is not intended to limit the present application, but various modifications and variations can be made to the present application by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application should be included in the protection scope of the present application.
Claims (4)
1. A method for verifying the consistency of a fitting for a wedge-shaped flat shearing interferometer, comprising the steps of:
s1, building a wedge-shaped flat shearing interferometer assembly and debugging system, wherein the system comprises a first base and a second base, each base is provided with a structure which is matched with a shearing plate in a dismounting way, and a corresponding observation plate is arranged on each base to form the wedge-shaped flat shearing interferometer, and the system further comprises a non-polarized beam splitter which splits a collimated light beam to wedge prisms on two shearing plates; a device for converging or diverging parallel collimated light is arranged between the unpolarized beam splitter and the second base;
s2, roughly aligning marks of the wedge prism with scribing lines on the shear plate on the first base;
s3, rotating the wedge-shaped prism through a rotation angle smaller than 180 degrees so that interference fringes observed through a corresponding observation screen are parallel to scribing lines on the observation screen, and then fixing the wedge-shaped prism on a corresponding shearing plate to manufacture a fitting;
s4, mounting the manufactured accessory on the second base, observing whether the direction of the corresponding interference fringe deviating from the line on the observation screen is consistent with the expected direction or not through the corresponding observation screen, and if so, determining that the accessory is qualified; otherwise, the wedge prism in the fitting is rotated 180 degrees and then the step S3 is executed again to be assembled again.
2. The method of claim 1, wherein the system is further provided with an image acquisition and display assembly for observing the relative relationship of the score lines and interference fringes on two of the viewing screens.
3. A method for verifying the consistency of a fitting for a wedge-shaped flat shearing interferometer, comprising the steps of:
s10, building a wedge-shaped flat shearing interferometer assembly and debugging system, wherein the system comprises a first base and a second base, each base is provided with a structure which is matched with a shearing plate in a dismounting way, and a corresponding observation plate is arranged on each base to form the wedge-shaped flat shearing interferometer, and the system further comprises a non-polarized beam splitter which splits a collimated light beam to wedge prisms on two shearing plates; a device for converging or diverging parallel collimated light is arranged between the unpolarized beam splitter and the second base;
s20, rotating the wedge-shaped prism on the first base so that interference fringes observed through a corresponding observation screen are parallel to scribing lines on the observation screen, and fixing the wedge-shaped prism on a corresponding shearing plate to manufacture a fitting;
step S30, mounting the manufactured accessory on the second base, observing whether the direction of the corresponding interference fringe deviating from the line on the observation screen is consistent with the expected direction or not through the corresponding observation screen, and if so, determining that the accessory is qualified; otherwise, the wedge prism in the fitting is rotated 180 degrees and then returns to the step S20 to be assembled again.
4. A method according to claim 3, wherein the system is further provided with an image acquisition and display assembly for observing the relative relationship of the score lines and interference fringes on two of the viewing screens.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210146013.4A CN114545584B (en) | 2022-02-17 | 2022-02-17 | Fitting consistency verification method for wedge-shaped flat shearing interferometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210146013.4A CN114545584B (en) | 2022-02-17 | 2022-02-17 | Fitting consistency verification method for wedge-shaped flat shearing interferometer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN114545584A CN114545584A (en) | 2022-05-27 |
| CN114545584B true CN114545584B (en) | 2023-11-03 |
Family
ID=81674663
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210146013.4A Active CN114545584B (en) | 2022-02-17 | 2022-02-17 | Fitting consistency verification method for wedge-shaped flat shearing interferometer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN114545584B (en) |
Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB829841A (en) * | 1957-10-07 | 1960-03-09 | Zeiss Jena Veb Carl | Improvements in compensating apparatus for interferometers |
| US5923426A (en) * | 1997-07-24 | 1999-07-13 | Mirage Development, Ltd. | Bi-lateral shearing interferometer |
| JP2000249510A (en) * | 1999-02-26 | 2000-09-14 | Ricoh Co Ltd | Shearing interferometer, refraction index distribution measuring device provided with the interferometer and measuring method for refraction index distribution |
| US6201609B1 (en) * | 1999-08-27 | 2001-03-13 | Zygo Corporation | Interferometers utilizing polarization preserving optical systems |
| KR20030080803A (en) * | 2002-04-11 | 2003-10-17 | 박승한 | System for evaluating optical part using shear interference |
| WO2005019901A2 (en) * | 2003-08-07 | 2005-03-03 | Stichting Voor De Technische Wetenschappen | Method and device for aligning and interferometer |
| CN101113927A (en) * | 2007-08-22 | 2008-01-30 | 中国科学院上海光学精密机械研究所 | Phase shifting lateral direction shearing interferometer |
| CN104570272A (en) * | 2014-12-30 | 2015-04-29 | 中国科学院西安光学精密机械研究所 | Adjustment device for cube-corner prism dihedral angle error measurement |
| CN111256619A (en) * | 2018-11-30 | 2020-06-09 | 江苏宇极光电科技有限公司 | Collimated light beam detection device |
| CN112179505A (en) * | 2020-09-23 | 2021-01-05 | 中国科学院光电技术研究所 | Image processing device and method based on wedge-shaped flat plate shearing interferometer |
| CN213613324U (en) * | 2020-06-04 | 2021-07-06 | 广州Jfe钢板有限公司 | Turnover guide plate device |
| CN114018554A (en) * | 2021-09-28 | 2022-02-08 | 长沙麓邦光电科技有限公司 | Method and system for measuring stability of spectacle frame |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6989901B2 (en) * | 2003-07-02 | 2006-01-24 | Inlight Solutions, Inc. | Interferometer |
-
2022
- 2022-02-17 CN CN202210146013.4A patent/CN114545584B/en active Active
Patent Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB829841A (en) * | 1957-10-07 | 1960-03-09 | Zeiss Jena Veb Carl | Improvements in compensating apparatus for interferometers |
| US5923426A (en) * | 1997-07-24 | 1999-07-13 | Mirage Development, Ltd. | Bi-lateral shearing interferometer |
| JP2000249510A (en) * | 1999-02-26 | 2000-09-14 | Ricoh Co Ltd | Shearing interferometer, refraction index distribution measuring device provided with the interferometer and measuring method for refraction index distribution |
| US6201609B1 (en) * | 1999-08-27 | 2001-03-13 | Zygo Corporation | Interferometers utilizing polarization preserving optical systems |
| KR20030080803A (en) * | 2002-04-11 | 2003-10-17 | 박승한 | System for evaluating optical part using shear interference |
| WO2005019901A2 (en) * | 2003-08-07 | 2005-03-03 | Stichting Voor De Technische Wetenschappen | Method and device for aligning and interferometer |
| CN101113927A (en) * | 2007-08-22 | 2008-01-30 | 中国科学院上海光学精密机械研究所 | Phase shifting lateral direction shearing interferometer |
| CN104570272A (en) * | 2014-12-30 | 2015-04-29 | 中国科学院西安光学精密机械研究所 | Adjustment device for cube-corner prism dihedral angle error measurement |
| CN111256619A (en) * | 2018-11-30 | 2020-06-09 | 江苏宇极光电科技有限公司 | Collimated light beam detection device |
| CN213613324U (en) * | 2020-06-04 | 2021-07-06 | 广州Jfe钢板有限公司 | Turnover guide plate device |
| CN112179505A (en) * | 2020-09-23 | 2021-01-05 | 中国科学院光电技术研究所 | Image processing device and method based on wedge-shaped flat plate shearing interferometer |
| CN114018554A (en) * | 2021-09-28 | 2022-02-08 | 长沙麓邦光电科技有限公司 | Method and system for measuring stability of spectacle frame |
Non-Patent Citations (2)
| Title |
|---|
| Multi-directional lateral shearing interferometer based on rotatable prism pairs;Zhu, Yongjian等;OPTIK;第125卷(第20期);6315-6319 * |
| 激光剪切干涉准直系统的设计研究;王文丹;中国优秀硕士学位论文全文数据库信息科技辑;I135-109 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN114545584A (en) | 2022-05-27 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN1200245C (en) | Apparatus and method for measuring non-spheric surface with hologram and concave surface | |
| US7428110B2 (en) | Optical part holding unit | |
| JP6553967B2 (en) | Instantaneous phase shift interferometer | |
| CN110553580B (en) | Oblique incidence phase shift interferometer and rectangular prism large surface measurement method | |
| CN113884028B (en) | AR geometric array optical waveguide measurement method and device | |
| CN114545584B (en) | Fitting consistency verification method for wedge-shaped flat shearing interferometer | |
| US6930783B2 (en) | Method of aligning optical system using a hologram and apparatus therefor | |
| JP4232983B2 (en) | Optical system alignment system and method using high accuracy and simple operation | |
| CN107024751B (en) | A kind of apparatus and method of high-precision align optical components and glass plate | |
| CN105758333A (en) | Long-trace optical surface profile detector | |
| US10488228B2 (en) | Transparent-block encoder head with isotropic wedged elements | |
| KR101963760B1 (en) | Method for adjusting a position of prism lens | |
| CN102288129A (en) | System for testing surface shape deviation of birefringent crystal optical element | |
| CN111504185B (en) | Laser transmission target and laser alignment method | |
| CN211264754U (en) | Improved Michelson interferometer device | |
| CN213688885U (en) | Device for detecting zero-focus position of cutting head | |
| JP2000097660A (en) | Method for adjusting optical axis of optical system and interference measuring instrument | |
| US11275214B2 (en) | Monolithic fiber-lens array for communication and remote sensing | |
| CN220455604U (en) | Head-up display device | |
| CN210572966U (en) | High accuracy PBS prism pairs auxiliary device for processing | |
| CN110686620B (en) | Measuring device and method for grating integration precision and measuring system for planar grating ruler | |
| JP2011186123A (en) | Method of assembling prism unit, and assembling device | |
| JPH0610643B2 (en) | Measuring method of lens axis tilt, etc. | |
| CN103712779A (en) | Prism-type ring laser light path coplanarity detection system | |
| PL418450A1 (en) | Method for measuring angular micro-deviations relative to a laser beam, preferably rotation errors of machines and the interferometer for measurements of angular micro-deviations relative to a laser beam, preferably rotation errors of machines |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |