CN112179505A - Image processing device and method based on wedge-shaped flat plate shearing interferometer - Google Patents
Image processing device and method based on wedge-shaped flat plate shearing interferometer Download PDFInfo
- Publication number
- CN112179505A CN112179505A CN202011008970.8A CN202011008970A CN112179505A CN 112179505 A CN112179505 A CN 112179505A CN 202011008970 A CN202011008970 A CN 202011008970A CN 112179505 A CN112179505 A CN 112179505A
- Authority
- CN
- China
- Prior art keywords
- wedge
- image
- flat plate
- shearing
- shearing interferometer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010008 shearing Methods 0.000 title claims abstract description 102
- 238000012545 processing Methods 0.000 title claims abstract description 18
- 238000000034 method Methods 0.000 title claims abstract description 10
- 238000007781 pre-processing Methods 0.000 claims abstract description 13
- 238000004364 calculation method Methods 0.000 claims abstract description 11
- 238000001514 detection method Methods 0.000 claims abstract description 5
- 230000003287 optical effect Effects 0.000 claims abstract description 4
- 238000003672 processing method Methods 0.000 claims description 15
- 238000000605 extraction Methods 0.000 claims description 14
- 238000001914 filtration Methods 0.000 claims description 8
- 230000010365 information processing Effects 0.000 claims description 6
- 238000002372 labelling Methods 0.000 claims description 5
- 230000002146 bilateral effect Effects 0.000 claims description 3
- 238000011002 quantification Methods 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 9
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
- G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
- G01J9/0215—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods by shearing interferometric methods
-
- G06T5/70—
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/10—Segmentation; Edge detection
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T2207/00—Indexing scheme for image analysis or image enhancement
- G06T2207/20—Special algorithmic details
- G06T2207/20024—Filtering details
- G06T2207/20028—Bilateral filtering
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T2207/00—Indexing scheme for image analysis or image enhancement
- G06T2207/20—Special algorithmic details
- G06T2207/20112—Image segmentation details
- G06T2207/20132—Image cropping
Abstract
The invention discloses an image processing device and method based on a wedge-shaped flat plate shearing interferometer. The method comprises the following steps: shearing interference images for preprocessing, detecting and marking a circular observation screen of the shearing interference images and acquiring the number of pixels corresponding to the diameter of the observation screen, extracting required image information, preprocessing interference fringes of the shearing interference images, and performing curve fitting and acquisition of a fringe inclination angle and a space perpendicular to a shearing direction on each dark fringe or bright fringe. And calculating to obtain the curvature radius and the far field divergence angle of the corresponding position of the shearing interferometer. The method can judge the collimation degree of the light beam more visually through the quantification result, is convenient to operate, is quick and accurate in calculation, and is suitable for detection of the large-aperture laser beam and adjustment of an optical system.
Description
Technical Field
The invention relates to the technical field of image processing, in particular to an image processing device and method based on a wedge-shaped flat plate shearing interferometer.
Background
For a wedge-shaped flat plate shearing interferometer, the measurement precision of the divergence angle of a laser beam depends on the reading precision of the distance and the inclination angle of interference fringes; at present, the divergence angle of a light beam of a domestic shearing interferometer is measured by directly observing through scales on the instrument to obtain the distance between fringes and the inclination angle of the interference fringes, and the actual interference fringes contain a large amount of noise, so that the distance between the fringes and the inclination angle of the interference fringes are slowly read by human eyes, the precision of the obtained distance between the fringes and the inclination angle of the interference fringes is not high, the far-field divergence angle and the wave surface curvature radius of the laser beam cannot be quickly and accurately obtained, and the current shearing interferometer is not suitable for a light spot of which the diameter of the collimated light spot is larger than the clear aperture of a shearing plate.
Disclosure of Invention
The invention aims to solve the problems that the human eyes cannot quickly and accurately obtain the far-field divergence angle and the wave surface curvature radius of the laser beam due to slow reading and low precision of the inclination angle and the interference fringe distance of the interference fringes. The image processing device and method based on the wedge-shaped flat plate shearing interferometer have the advantages of high automation degree, relatively quick and accurate processing result and suitability for the diameter of a collimated light spot not smaller than the clear aperture of the shear plate.
In order to solve the technical problem, the technical scheme adopted by the invention is as follows: according to a first aspect of the disclosure, an image processing device based on a wedge-shaped flat plate shearing interferometer is provided, and comprises a wedge-shaped flat plate shearing interferometer, a camera, an image information processing module and a display module. The collimated laser beam passes through the wedge-shaped flat plate shearing interferometer to generate corresponding interference fringes on an observation screen of the shearing interferometer, the camera is used for shooting to obtain an image, the obtained image is processed by the image information processing module to obtain a shearing interference image and extract the distance perpendicular to the shearing direction and the fringe inclination angle in the shearing interference image, the curvature radius of the corresponding position of the shearing interferometer can be obtained by combining a related calculation formula, the collimated far-field divergence angle can be calculated by taking the curvature radius of two proper positions and the distance between the two proper positions, or the maximum far-field divergence angle can be estimated by the fringe inclination angle on the back focal plane of the collimator, and the processed parameters and results are finally displayed by the display module.
Further, the clear aperture of the wedge-shaped flat plate shearing interferometer is smaller than or equal to the diameter of the collimated light spot.
Furthermore, the wedge-shaped flat plate shearing interferometer adopts a high-quality optical flat plate with a certain thickness and a tiny wedge angle, and the wedge angle direction of the shearing flat plate is perpendicular to the shearing direction.
Further, the wedge-shaped flat plate shearing interferometer is placed on the back focal plane of the collimator or placed at two appropriate positions.
According to a second aspect of the present disclosure, there is provided a wedge-shaped flat plate shearing interferometer based image processing method, comprising: shearing the interference image for preprocessing; detecting and marking a shearing interference image on a circular observation screen, acquiring the number of pixels corresponding to the diameter of the observation screen, and extracting required image information; preprocessing interference fringes of the shearing interference image; each dark or light stripe is curve fitted and extracted for the stripe tilt angle and the pitch perpendicular to the shear direction.
Further, the shearing interference image is preprocessed, including: graying the acquired image, removing background light and carrying out bilateral filtering.
Further, the detection and labeling of the shearing interference image circular observation screen, the extraction of the number of pixels corresponding to the diameter of the observation screen, and the extraction of the required image information comprise: detecting and labeling the interference image circular observation screen by using a Hough transform algorithm, acquiring the diameter pixel number of the observation screen, and further independently extracting the observation screen image containing the interference fringes in the original image.
Further, the shearing interference image interference fringe preprocessing comprises the following steps: and performing Fourier transform on the middle row of the circular image, searching for a corresponding frequency, performing band-pass filtering by taking the frequency as a reference, and performing peak value extraction on each row of the image after filtering.
Further, the curve fitting and extraction of the inclination angle of the stripe and the distance perpendicular to the shearing direction of each dark stripe or light stripe comprises: and (3) taking the proper number of samples, performing least square fitting on the extracted peak values within a certain line number range, displaying the fitting curves of the least square fitting, and obtaining the inclination angle of each fitting curve and the distance average value between the fitting curves.
According to the technical scheme, the invention has the beneficial effects that:
1. the image processing device based on the wedge-shaped flat plate shearing interferometer is suitable for the detection of the collimated large-diameter light beam and the near field.
2. The wedge-shaped flat plate shearing interferometer is arranged on the back focal plane of the collimator, and the maximum far field divergence angle after collimation can be estimated by utilizing the inclination angle of the stripes in the interference image at the moment.
3. The wedge-shaped flat plate shearing interferometer is placed at the rear two proper positions of the collimator, the fringe distance and the fringe inclination angle in the interference image at the two positions and the distance between the two positions are respectively extracted, and the far field divergence angle after collimation can be calculated by combining a corresponding calculation formula.
4. And the interference image is cut for preprocessing, so that the Hough transform algorithm can be more accurately carried out to extract a corresponding circle.
5. The Hough transform algorithm is used for detecting and labeling the interference image circular observation screen, so that shearing of an original image of the interference fringes is facilitated, the parameter error is further reduced, the proportion coefficient of the ratio of the size of the circle detected by the image to the size of the actual observation screen can be obtained, and the actual distance and curvature radius of the interference fringes can be obtained through calculation.
6. And (3) preprocessing interference fringes of the shearing interference image, and combining the least square curve fitting of the fringes to realize accurate fringe inclination angle and extraction of a distance vertical to the shearing direction.
Drawings
FIG. 1 is a block diagram of an image processing apparatus based on a wedge-shaped flat plate shearing interferometer;
FIG. 2 is a schematic flow diagram of a wedge-shaped flat plate shearing interferometer based image processing method;
FIG. 3 is a schematic diagram of a wedge-shaped flat plate shearing interferometer based image processing method;
FIG. 4 is a schematic diagram of a wedge-shaped plate shearing interferometer based image processing method;
FIG. 5 is a schematic diagram of a wedge-shaped plate shearing interferometer based image processing method;
FIG. 6 is a schematic diagram of a wedge-shaped plate shearing interferometer based image processing method;
FIG. 7 is a schematic diagram of a wedge-shaped plate shearing interferometer based image processing method;
FIG. 8 is a schematic diagram of a wedge-shaped plate shearing interferometer based image processing method;
FIG. 9 is a schematic diagram of an image processing method based on a wedge-shaped flat plate shearing interferometer.
Detailed Description
The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only a part of the embodiments of the present application, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
As shown in FIG. 1, the invention relates to an image processing device based on a wedge-shaped flat plate shearing interferometer, which comprises a wedge-shaped flat plate shearing interferometer, a camera, an image information processing module and a display module. The collimated laser beam passes through the wedge-shaped flat plate shearing interferometer to generate corresponding interference fringes on an observation screen of the shearing interferometer, the camera is used for shooting to obtain an image, the obtained image is processed by the image information processing module to obtain a shearing interference image and extract the distance perpendicular to the shearing direction and the fringe inclination angle in the shearing interference image, the curvature radius of the corresponding position of the shearing interferometer can be obtained by combining a related calculation formula, the collimated far-field divergence angle can be calculated by taking the curvature radius of two proper positions and the distance between the two proper positions, or the maximum far-field divergence angle can be estimated by the fringe inclination angle on the back focal plane of the collimator, and the processed parameters and results are finally displayed by the display module.
The diameter of the light spot of the collimated light beam is larger than or equal to the light transmission caliber of the shearing interference plate, and the incident light beam and the shearing interference plate form an included angle of 45 degrees, so that the interference fringes formed conveniently fill the whole observation screen.
The shearing interferometer is horizontally arranged, so that the reference line on the observation screen is kept horizontal, and the camera lens is parallel to the observation screen of the shearing interferometer, thereby completing the acquisition of the interference fringe image.
The maximum far field divergence angle can be estimated from the tilt angles of the fringes obtained when the shearing interferometer is placed in the back focal plane of the collimator. Or the shearing interferometer is placed at two proper positions on one side of the light waist of the collimator, and the curvature radius and the distance between the two proper positions can be taken to calculate the far-field divergence angle after collimation
The image processing module and the display module are realized based on a computer, and the extraction and the display of the required information in the image are completed.
As shown in FIG. 2, the invention relates to an image processing method based on a wedge-shaped flat plate shearing interferometer, which comprises the following steps:
step S110, completing the extraction of the original image of the cut interference image by the camera, as shown in fig. 3.
Step S120, preprocessing the input original image, including: the image is grayed, background light is removed, and bilateral filtering is performed, as shown in fig. 4, to obtain a preprocessed image.
Step S130, detecting and marking the circular observation screen of the preprocessed image, acquiring the number of pixels corresponding to the diameter of the observation screen, and extracting the required image information, wherein the steps comprise: detecting and labeling a circular observation screen of an interference image by using a Hough transform algorithm, as shown in FIG. 5, acquiring the number of pixels of the diameter of the observation screen, and independently extracting an observation screen image containing interference fringes in an original image, as shown in FIG. 6, independently extracting the original image containing the interference fringes so as to remove an insignificant edge image and reduce errors of corresponding parameters of the extracted image; meanwhile, the ratio coefficient can be obtained by utilizing the number of pixels of the diameter of the observation screen and the diameter of the actual observation screen.
Step S140, performing interference fringe preprocessing on fig. 6, including: performing fourier transform on the middle column of the circular image, searching for a corresponding frequency, performing band-pass filtering on the frequency as a reference, wherein the filtered image is as shown in fig. 7, and because fitting is performed on dark stripes, the filtered image needs to be subjected to negation firstly, and then is not needed if fitting is performed on bright stripes, and then peak extraction is performed on each column number of the image, and a proper column sample number is selected, and the processed image is as shown in fig. 8.
Step S150, performing curve fitting and extraction of the tilt angle of the stripes and the distance perpendicular to the cutting direction for each stripe shown in fig. 8, including: and performing least square fitting on the extracted peak values within a certain line number range, displaying fitting curves of the fitting curves as shown in FIG. 9, obtaining the inclination angle of each fitting curve and the average distance value between the fitting curves, thus obtaining the inclination angle of the interference fringes and the distance perpendicular to the shearing direction, obtaining a proportional coefficient by combining the image observation screen diameter pixel number and the actual observation screen diameter, obtaining the actual distance perpendicular to the shearing direction, and obtaining the actual curvature radius and the far field divergence angle by formula calculation.
When the shearing interferometer is arranged on the back focal plane of the collimator, the maximum far-field divergence angle can be estimated by combining the obtained distance between the inclination angle of the fringes and the shearing direction with a corresponding calculation formula. Or when the shearing interferometer passes through two proper positions on the light waist side of the collimator, the curvature radius of the two proper positions and the distance between the two proper positions are respectively obtained, and the far field divergence angle after collimation can be calculated by combining the corresponding calculation formula. And finally, displaying the result through a display module.
According to the specific embodiment, the image processing device and method based on the wedge-shaped flat plate shearing interferometer can rapidly extract the accurate inclination angle of the stripes and the distance perpendicular to the shearing direction, rapidly obtain the stripe distance and the curvature radius of the wave surface according to the proportional coefficient relation, further obtain the far field divergence angle by combining the corresponding calculation formula through the corresponding method, judge the parallelism of the light beam according to the quantification result, are more reliable compared with the data obtained by manually judging and calculating by utilizing the scales of the shearing interferometer, are convenient to operate, are rapid and accurate in calculation, and can be applied to detection of the laser beam and adjustment of an optical system.
The foregoing detailed description is provided for the purpose of illustrating and explaining the present invention and is not to be construed as limiting the claims. It should be clear to those skilled in the art that any simple modification, variation or replacement based on the technical solution of the present invention will result in a new technical solution, which will fall into the protection scope of the present invention.
Claims (9)
1. An image processing device based on a wedge-shaped flat plate shearing interferometer is characterized in that: the device comprises a wedge-shaped flat plate shearing interferometer (I) and a camera (II), the device comprises an image information processing module (c) and a display module (c), wherein collimated laser beams generate corresponding interference fringes on an observation screen of a shearing interferometer through the wedge-shaped flat plate shearing interferometer, the camera is used for shooting to obtain images, the obtained images are subjected to shearing interference image obtaining and extraction of the distance perpendicular to the shearing direction and the fringe inclination angle in the shearing interference images through the image information processing module, the curvature radius of the corresponding position of the shearing interferometer is obtained through calculation, the collimated far-field divergence angle can be calculated by taking the curvature radius of two proper positions and the distance between the two proper positions, or the maximum far-field divergence angle can be estimated through the fringe inclination angle on the back focal plane of the collimator, and the processed parameters and results are finally displayed through the display module.
2. The wedge-shaped plate shearing interferometer based image processing apparatus as recited in claim 1, wherein: and the clear aperture of the wedge-shaped flat plate shearing interferometer is smaller than or equal to the diameter of the collimated light spot.
3. The wedge-shaped plate shearing interferometer based image processing apparatus as recited in claim 1, wherein: the wedge-shaped flat plate shearing interferometer adopts a high-quality optical flat plate with a certain thickness and a small wedge angle, and the wedge angle direction of the shearing flat plate is perpendicular to the shearing direction.
4. The wedge-shaped plate shearing interferometer based image processing apparatus as recited in claim 1, wherein: the wedge-shaped flat plate shearing interferometer is arranged on the back focal plane of the collimator or arranged at two proper positions.
5. An image processing method based on a wedge-shaped flat plate shearing interferometer, which utilizes the image processing device based on the wedge-shaped flat plate shearing interferometer of claim 1, and is characterized in that: shearing the interference image for preprocessing; detecting and marking a shearing interference image on a circular observation screen, acquiring the number of pixels corresponding to the diameter of the observation screen, and extracting required image information; preprocessing interference fringes of the shearing interference image; each dark or light stripe is curve fitted and extracted for the stripe tilt angle and the pitch perpendicular to the shear direction.
6. The image processing method based on the wedge-shaped flat plate shearing interferometer as recited in claim 5, wherein: the shearing interference image is preprocessed, and the preprocessing comprises the following steps: graying the acquired image, removing background light and carrying out bilateral filtering.
7. The image processing method based on the wedge-shaped flat plate shearing interferometer as recited in claim 5, wherein: the detection and marking of the shearing interference image circular observation screen and the extraction of the corresponding pixel number of the diameter of the observation screen as well as the extraction of the required image information comprise the following steps: detecting and labeling the interference image circular observation screen by using a Hough transform algorithm, acquiring the diameter pixel number of the observation screen, and further independently extracting the observation screen image containing the interference fringes in the original image.
8. The image processing method based on the wedge-shaped flat plate shearing interferometer as recited in claim 5, wherein: the shearing interference image interference fringe preprocessing comprises the following steps: and performing Fourier transform on the middle row of the circular image, searching for a corresponding frequency, performing band-pass filtering by taking the frequency as a reference, and performing peak value extraction on each row of the image after filtering.
9. The image processing method based on the wedge-shaped flat plate shearing interferometer as recited in claim 5, wherein: each dark stripe or light stripe is subjected to curve fitting and extraction of the stripe inclination angle and the distance perpendicular to the shearing direction, and the method comprises the following steps: and (3) taking the proper number of samples, performing least square fitting on the extracted peak values within a certain line number range, displaying the fitting curves of the least square fitting, and obtaining the inclination angle of each fitting curve and the distance average value between the fitting curves.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011008970.8A CN112179505B (en) | 2020-09-23 | 2020-09-23 | Image processing device and method based on wedge-shaped flat plate shearing interferometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011008970.8A CN112179505B (en) | 2020-09-23 | 2020-09-23 | Image processing device and method based on wedge-shaped flat plate shearing interferometer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN112179505A true CN112179505A (en) | 2021-01-05 |
| CN112179505B CN112179505B (en) | 2022-08-02 |
Family
ID=73956508
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011008970.8A Active CN112179505B (en) | 2020-09-23 | 2020-09-23 | Image processing device and method based on wedge-shaped flat plate shearing interferometer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN112179505B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113063809A (en) * | 2021-03-24 | 2021-07-02 | 合肥工业大学 | X-ray grating interferometer imaging method based on Hough transform method |
| CN114545584A (en) * | 2022-02-17 | 2022-05-27 | 长沙麓邦光电科技有限公司 | Consistency checking method for accessories of wedge-shaped flat plate shearing interferometer |
Citations (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001050727A (en) * | 1999-06-02 | 2001-02-23 | Inst Of Physical & Chemical Res | Form measuring method using fringe modulation |
| US6246483B1 (en) * | 1998-01-08 | 2001-06-12 | Bae Systems Plc | Apparatus and method for shearographic inspection and non-destructive testing of articles in a vacuum chamber |
| JP2002013920A (en) * | 2000-06-30 | 2002-01-18 | Mitsutoyo Corp | Interference fringe image processing device and image correcting method |
| JP2006017613A (en) * | 2004-07-02 | 2006-01-19 | Mitsutoyo Corp | Interference image measuring instrument |
| CN102967378A (en) * | 2012-12-09 | 2013-03-13 | 中国科学院光电技术研究所 | Small-sized radial shearing interferometer based on four-step phase-shifting theory |
| US20130063730A1 (en) * | 2011-09-08 | 2013-03-14 | Zygo Corporation | In situ calibration of interferometers |
| CN103033272A (en) * | 2012-12-21 | 2013-04-10 | 南京信息工程大学 | Simultaneous phase-shifting lateral shearing interferometer and detection method |
| CN104111163A (en) * | 2014-07-23 | 2014-10-22 | 中国科学院上海光学精密机械研究所 | Convex lens focal length measuring device and method |
| CN104748855A (en) * | 2013-12-25 | 2015-07-01 | 南京理工大学 | Dual-channel high-throughput interference imaging spectral device and method |
| WO2017113965A1 (en) * | 2015-12-28 | 2017-07-06 | 天津大学 | High-resolution polarized low-coherence interferometric pressure measurement device and method |
| JPWO2018147473A1 (en) * | 2017-02-10 | 2020-01-09 | 国立大学法人京都工芸繊維大学 | 3D object information measurement device |
| CN110709204A (en) * | 2017-03-29 | 2020-01-17 | 新泽西鲁特格斯州立大学 | System and method for measuring curvature radius and thermal expansion of small sample in real time |
| US20200182701A1 (en) * | 2018-12-05 | 2020-06-11 | Electronics And Telecommunications Research Institute | Apparatus for measure of coherence of light source for holographic display and method thereof |
| US20200191650A1 (en) * | 2017-06-23 | 2020-06-18 | Keit Limited | Noise Suppression in Spectrometers |
| JP2020101517A (en) * | 2018-12-20 | 2020-07-02 | アズビル株式会社 | Interference fringe analyzer, interference fringe analysis method, and distance measuring device |
| CN111539967A (en) * | 2020-04-24 | 2020-08-14 | 电子科技大学 | Method and system for identifying and processing interference fringe region in terahertz imaging of focal plane |
-
2020
- 2020-09-23 CN CN202011008970.8A patent/CN112179505B/en active Active
Patent Citations (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6246483B1 (en) * | 1998-01-08 | 2001-06-12 | Bae Systems Plc | Apparatus and method for shearographic inspection and non-destructive testing of articles in a vacuum chamber |
| JP2001050727A (en) * | 1999-06-02 | 2001-02-23 | Inst Of Physical & Chemical Res | Form measuring method using fringe modulation |
| JP2002013920A (en) * | 2000-06-30 | 2002-01-18 | Mitsutoyo Corp | Interference fringe image processing device and image correcting method |
| JP2006017613A (en) * | 2004-07-02 | 2006-01-19 | Mitsutoyo Corp | Interference image measuring instrument |
| US20130063730A1 (en) * | 2011-09-08 | 2013-03-14 | Zygo Corporation | In situ calibration of interferometers |
| CN102967378A (en) * | 2012-12-09 | 2013-03-13 | 中国科学院光电技术研究所 | Small-sized radial shearing interferometer based on four-step phase-shifting theory |
| CN103033272A (en) * | 2012-12-21 | 2013-04-10 | 南京信息工程大学 | Simultaneous phase-shifting lateral shearing interferometer and detection method |
| CN104748855A (en) * | 2013-12-25 | 2015-07-01 | 南京理工大学 | Dual-channel high-throughput interference imaging spectral device and method |
| CN104111163A (en) * | 2014-07-23 | 2014-10-22 | 中国科学院上海光学精密机械研究所 | Convex lens focal length measuring device and method |
| WO2017113965A1 (en) * | 2015-12-28 | 2017-07-06 | 天津大学 | High-resolution polarized low-coherence interferometric pressure measurement device and method |
| JPWO2018147473A1 (en) * | 2017-02-10 | 2020-01-09 | 国立大学法人京都工芸繊維大学 | 3D object information measurement device |
| CN110709204A (en) * | 2017-03-29 | 2020-01-17 | 新泽西鲁特格斯州立大学 | System and method for measuring curvature radius and thermal expansion of small sample in real time |
| US20200191650A1 (en) * | 2017-06-23 | 2020-06-18 | Keit Limited | Noise Suppression in Spectrometers |
| US20200182701A1 (en) * | 2018-12-05 | 2020-06-11 | Electronics And Telecommunications Research Institute | Apparatus for measure of coherence of light source for holographic display and method thereof |
| JP2020101517A (en) * | 2018-12-20 | 2020-07-02 | アズビル株式会社 | Interference fringe analyzer, interference fringe analysis method, and distance measuring device |
| CN111539967A (en) * | 2020-04-24 | 2020-08-14 | 电子科技大学 | Method and system for identifying and processing interference fringe region in terahertz imaging of focal plane |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113063809A (en) * | 2021-03-24 | 2021-07-02 | 合肥工业大学 | X-ray grating interferometer imaging method based on Hough transform method |
| CN114545584A (en) * | 2022-02-17 | 2022-05-27 | 长沙麓邦光电科技有限公司 | Consistency checking method for accessories of wedge-shaped flat plate shearing interferometer |
| CN114545584B (en) * | 2022-02-17 | 2023-11-03 | 长沙麓邦光电科技有限公司 | Fitting consistency verification method for wedge-shaped flat shearing interferometer |
Also Published As
| Publication number | Publication date |
|---|---|
| CN112179505B (en) | 2022-08-02 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN112179505B (en) | Image processing device and method based on wedge-shaped flat plate shearing interferometer | |
| US7769243B2 (en) | Method and apparatus for image inspection | |
| US20160364886A1 (en) | Method and system for calculating laser beam spot size | |
| US20130147919A1 (en) | Multi-View Difraction Grating Imaging With Two-Dimensional Displacement Measurement For Three-Dimensional Deformation Or Profile Output | |
| CN101479596A (en) | Glazing inspection method | |
| CN112767364B (en) | Image detection system for gate blade surface corrosion and corrosion area rapid measuring and calculating method | |
| CN112991287B (en) | Automatic indentation measurement method based on full convolution neural network | |
| CN110118646B (en) | Glasses parameter detection device and method based on synthetic moire fringe technology | |
| CN111369484B (en) | Rail profile detection method and device | |
| WO2016192869A1 (en) | Method and apparatus for determining surface data and/or measurement data relating to a surface of an at least partially transparent object | |
| CN110108219A (en) | Measuring method, system, equipment and the readable storage medium storing program for executing of cross-section of cable structure | |
| CN111226110A (en) | Detection method and system | |
| DE102018222231A1 (en) | Device and method for the optical measurement of an inner contour of a spectacle frame | |
| CN113552133A (en) | Cell skirt edge cracking detection method and visual detection device | |
| CN112902869A (en) | Method and device for adjusting laser plane of rail profile measuring system | |
| US20030185430A1 (en) | Objectification of surface test methods through image processing | |
| JP2023134456A (en) | multicore fiber imaging | |
| EP0399138A2 (en) | Method for three-dimensional examination of printed circuits | |
| CN114659455B (en) | Diffraction fringe identification processing method for measuring filament diameter | |
| CN215865743U (en) | Film uniformity detection system based on line structured light | |
| CN114459395A (en) | Plane flat crystal calibrating device and calibrating method | |
| CN114581403A (en) | Cleanliness detection method, device and system and storage medium | |
| US11385164B2 (en) | Method for calibrating an analysis device, and associated device | |
| CN210376139U (en) | Device for measuring gas parameters to be measured based on two-dimensional shearing interference | |
| KR20220154345A (en) | Contour detection device using gaussian-weighted least squares and contour detection method thereof |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |