CN111256619A - Collimated light beam detection device - Google Patents
Collimated light beam detection device Download PDFInfo
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- CN111256619A CN111256619A CN201811462003.1A CN201811462003A CN111256619A CN 111256619 A CN111256619 A CN 111256619A CN 201811462003 A CN201811462003 A CN 201811462003A CN 111256619 A CN111256619 A CN 111256619A
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- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
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Abstract
The invention discloses a collimated light beam detection device, which comprises a first cylindrical mirror and a second cylindrical mirror which are parallel to each other and are orthogonally arranged in the cylindrical surface direction, a first photoelectric detector and a second photoelectric detector which are respectively and correspondingly arranged at the focuses of the two cylindrical mirrors, a collimating mirror which is right opposite to the first cylindrical mirror, a first transmission mirror and a second transmission mirror; the first transmission mirror is a transparent medium and is obliquely arranged between the collimating mirror and the first cylindrical mirror, and the collimating mirror, the first transmission mirror, the first cylindrical mirror and the first photoelectric detector are sequentially arranged on a straight line; the second transmission mirror and the first transmission mirror are parallel to each other and are positioned on the same straight line and face the second cylindrical mirror, and the second transmission mirror, the second cylindrical mirror and the second photoelectric detector are sequentially arranged on the same straight line; the invention uses the characteristic that the cylindrical mirror only has one-way axial symmetry curvature to detect the parallelism of the collimated light beam, so the device has simple structure, easy adjustment, low manufacturing cost and easy popularization.
Description
Technical Field
The present invention relates to a collimated light beam detection device, and more particularly, to a device for detecting the parallelism of a collimated light beam.
Background
Laser is a modern new light source, and is widely applied to laser ranging, laser drilling and cutting, seismic monitoring, laser surgery, laser singing head and the like due to the characteristics of small diffusion angle, high brightness, good monochromaticity, long-distance transmission and the like. Meanwhile, the space controllability and the time controllability of the laser are good, the freedom degree of materials, shapes, sizes and processing environments of processing objects is large, the laser processing system is suitable for automatic processing, the laser processing system and the computer numerical control technology are combined to form a high-efficiency automatic processing device, the laser processing system becomes a key technology for enterprises to carry out timely production, and the laser processing system opens up a wide prospect for high-quality, high-efficiency and low-cost processing production.
The laser is a point light source with a certain divergence angle, so that the laser generally forms a collimated light beam parallel to the symmetry axis of the collimating mirror after being emitted through the collimating mirror, the parallelism and the collimation of the collimated light beam influence the performance of the laser, and the parallelism is the coincidence degree of the emergent light and the mechanical axis of the laser head; the collimation degree is whether divergence or convergence exists in the emergent light, and the measurement index can be qualitatively determined as whether an included angle exists between the edge light and the central light of the emergent light; therefore, the collimation degree and the parallelism of the collimated light beam are important indexes for evaluating the light beam performance, in order to ensure the performance of laser, a collimator is generally adopted to detect the collimation degree or the parallelism of the collimated light beam, the detection of the existing collimator for aligning the collimated light beam is mainly based on an optical interference principle, namely, an interference method is used for detection, the system principle schematic diagram is shown in figure 1, a light beam generated by an electric light source P emits a collimated light beam to be detected after passing through a collimator L, the collimated light beam to be detected is divided into two parts after entering a wedge-shaped mirror W, one part is reflected light of the front surface and the rear surface of the wedge-shaped mirror, the two parts form a shearing quantity S along the positive direction of an X axis, and interference fringes are formed on a detector after being reflected by a reflector M1; the other part of the transmitted light is reflected by the mirror M2 and then incident on the wedge mirror, where it is reflected at both surfaces, and because the incident directions are opposite, a negative shear S is formed along the X-axis, and interference fringes are also formed on the detector. The upper half (lower half) of the reflector M1 and the lower half (upper half) of the reflector M2 are blocked, two half-field interference fringes can be formed on a detector, the blocking position is adjusted, the two half-field interference fringes are spliced together to form a whole field, and when the wave front curvature radius of incident light is changed, the widths or the directions of the two half-field interference fringes can be changed in opposite trends. The interference fringes detected by the method are shown in fig. 2a-2c, when the light beam to be detected is collimated, the interference field will see parallel straight fringes which are equidistant and continuous along the boundary, as shown in fig. 2 a; in two special cases, i.e. when the wedge angle direction of the wedge mirror is perpendicular to the X-axis direction, the two sets of interference fringes are parallel to each other in the X-axis direction, as shown in fig. 2 b; when the wedge angle direction of the wedge mirror is parallel to the X-axis direction, the two sets of interference fringes are parallel along the Y-axis direction, as shown in fig. 2 c. The method is adopted to detect the collimation degree of the collimated light beam, when the shielding positions of the two reflectors are adjusted, the adjustment difficulty is high, and the precision of the interference fringes of the two half fields which are spliced together is technically difficult to ensure; meanwhile, the computer and the photoelectric processing method are complex and have poor practicability; the interferometer adopting the method has high manufacturing cost and is difficult to popularize.
Therefore, there is a strong need for a collimated light beam detecting device that is simple in structure, easy to adjust, inexpensive to manufacture, and easy to popularize.
Disclosure of Invention
The invention aims to provide a collimated light beam detection device which is simple in structure, easy to adjust, low in manufacturing cost and easy to popularize.
In order to achieve the purpose, the technical scheme of the invention is as follows: the collimated light beam detection device comprises two cylindrical mirrors, two photodetectors, a collimating mirror, a first transmission mirror and a second transmission mirror, wherein the two cylindrical mirrors are arranged in parallel, the two cylindrical mirrors are a first cylindrical mirror and a second cylindrical mirror, and the cylindrical surface directions of the first cylindrical mirror and the second cylindrical mirror are in orthogonal arrangement; the two photoelectric detectors are a first photoelectric detector and a second photoelectric detector, the first photoelectric detector is installed at the focus of the first cylindrical mirror, and the second photoelectric detector is installed at the focus of the second cylindrical mirror; the collimating mirror is opposite to the first cylindrical mirror; the first transmission mirror is a transparent medium, the first transmission mirror is obliquely arranged between the collimating mirror and the first cylindrical mirror, and the collimating mirror, the first transmission mirror, the first cylindrical mirror and the first photodetector are sequentially arranged on a straight line; the second transmission mirror and the first transmission mirror are parallel to each other and are positioned on the same straight line, the second transmission mirror faces the second cylindrical mirror, and the second transmission mirror, the second cylindrical mirror and the second photoelectric detector are sequentially arranged on the same straight line.
Preferably, the first transmission mirror is a half-transmission mirror, and after the collimated light beam to be detected generated by the collimating mirror passes through the half-transmission mirror, the half-transmission mirror generates a light splitting effect to split the collimated light beam to be detected into two parts, one part of the collimated light beam is transmitted and then emitted to the first cylindrical mirror, the other part of the collimated light beam is reflected to the second transmission mirror, and the other part of the collimated light beam is reflected by the second transmission mirror and then emitted to the second cylindrical mirror.
Preferably, the second transmission mirror is a total reflection mirror; the total reflection mirror and the semi-reflection semi-transmission mirror are parallel to each other, are positioned on the same straight line and are correspondingly installed with the second cylindrical mirror, light beams reflected by the semi-transmission mirror enter the total reflection mirror, after the light paths are turned by the total reflection mirror, light beams to be detected exit to the second cylindrical mirror, and the total reflection mirror and the semi-reflection semi-transmission mirror are matched for application, so that the integral volume of the device is reduced, and the production cost of the device is reduced.
Preferably, the apertures of the first transmission mirror and the second transmission mirror are both larger than the diameter of the collimated light beam generated by the collimating mirror, so that the collimated light beam can be completely reflected and transmitted when passing through the semi-transmission semi-reflection mirror and the total reflection mirror, and the detection quality and the detection precision are improved.
Preferably, the collimated light beam detection device of the present invention further includes a first display and a second display corresponding to the first photodetector and the second photodetector, the first display is installed corresponding to the first photodetector, the second display is installed corresponding to the second photodetector, and the display is configured to clearly display the linear light spot detected by the photodetector.
Preferably, the point light source, the collimating mirror, the first transmitting mirror, the first cylindrical mirror, and the first photodetector are sequentially arranged on a straight line; the light beam generated by the point light source forms a collimated light beam to be detected after passing through the collimating mirror, and the collimated light beam to be detected passes through the first transmission mirror and the first cylindrical mirror which are arranged on a straight line, so that the turning of a light path is reduced, and the detection quality is improved.
Compared with the prior art, the collimated light beam detection device is provided with the first cylindrical mirror and the second cylindrical mirror which are arranged in parallel, and the cylindrical directions of the first cylindrical mirror and the second cylindrical mirror are arranged orthogonally; the corresponding first photoelectric detector and the second photoelectric detector are respectively and correspondingly arranged at the focuses of the first cylindrical mirror and the second cylindrical mirror; the collimating mirror is arranged right above the first cylindrical mirror; the first transmission mirror is a transparent medium, the first transmission mirror is obliquely arranged between the collimating mirror and the first cylindrical mirror, and the collimating mirror, the first transmission mirror, the first cylindrical mirror and the first photoelectric detector are sequentially arranged on a straight line; the second transmission mirror and the first transmission mirror are parallel to each other and are positioned on the same straight line, the second transmission mirror faces the second cylindrical mirror, and the second transmission mirror, the second cylindrical mirror and the second photoelectric detector are sequentially arranged on the same straight line; the light beam generated by the point light source passes through the collimating mirror to form a collimated light beam to be detected, the collimated light beam to be detected is divided into two parts after passing through the half-reflecting half-transmitting mirror, one part of the collimated light beam is emitted to the first cylindrical mirror after passing through the first transmitting mirror, the other part of the collimated light beam is reflected to the second transmitting mirror by the first transmitting mirror and is emitted to the second cylindrical mirror after passing through the second transmitting mirror, linear light spots on two cross sections are formed after passing through the two cylindrical mirrors, the linear light spots on the two cross sections are respectively detected through the two photoelectric detectors, the detected linear light spots are displayed through the display, and the detection of the parallelism of the collimated light beam is realized by comparing the lengths of the linear light spots; because the cylindrical mirror has the characteristic that only single axisymmetric curvature exists, collimated light beams on two sections are detected through the cylindrical mirrors with two orthogonal cylindrical directions, and the detection of the parallelism of the collimated light beams is realized by comparing the lengths of linear light spots in two directions obtained by detection.
Drawings
Fig. 1 is a schematic diagram of the detection of a prior art collimated light beam.
Fig. 2a-2c are schematic diagrams of interference fringes detected by a prior collimated light beam.
Fig. 3 is a schematic diagram of a collimated beam detection device of the present invention.
Fig. 4a-4 c are schematic diagrams of the collimator lens of the collimated light beam detecting device according to the present invention.
Fig. 5 is a schematic diagram of the principle of the cylindrical mirror of the collimated beam detection device of the present invention.
Detailed Description
Embodiments of the present invention will now be described with reference to the drawings, wherein like element numerals represent like elements.
As shown in fig. 3, the collimated light beam detection apparatus 100 of the present invention includes a first cylindrical mirror 40a and a second cylindrical mirror 40b having equal focal lengths, where the focal length of the first cylindrical mirror 40a is Fx, and the focal length of the second cylindrical mirror 40b is Fy, so that Fx is Fy, the first cylindrical mirror 40a and the second cylindrical mirror 40b are arranged in parallel, and the cylindrical directions of the two cylindrical mirrors 40a and 40b are on the same side and are arranged orthogonally, the first cylindrical mirror 40a is arranged as a cylindrical mirror in the X-axis direction, the second cylindrical mirror 40b is arranged as a cylindrical mirror in the Y-axis direction, the first cylindrical mirror 40a and the second cylindrical mirror 40b are located on a straight line, and the central distance between the first cylindrical mirror 40a and the second cylindrical mirror 40b is S; the first photoelectric detector 50a and the second photoelectric detector 50b are respectively and correspondingly mounted with the first cylindrical mirror 40a and the second cylindrical mirror 40b, the two photoelectric detectors 50a and 50b are respectively and correspondingly mounted at the focal positions of the two cylindrical mirrors 40a and 40b, the first photoelectric detector 50a is correspondingly connected with the first display 60a, the second photoelectric detector 50b is correspondingly connected with the second display 60b, the high-resolution photoelectric detectors 50a and 50b are used for detecting the length of linear light spots, the detection precision is improved, and the displays 60a and 60b are used for displaying the detected linear light spots; the collimating mirror 20 and the first cylindrical mirror 40a are correspondingly installed and used for generating a collimated light beam to be detected, the collimating mirror 20, the first cylindrical mirror 40a and the first photodetector 50a are sequentially arranged on a straight line, and the optical axes of the collimating mirror 20 and the first cylindrical mirror 40a are located on the straight line, namely the optical axis C1; the half-transmission half-reflection mirror 30a is obliquely arranged between the collimating mirror 20 and the first cylindrical mirror 40a, the half-transmission half-reflection mirror 30a is positioned on an optical axis C1 determined by the optical axes of the first cylindrical mirror 40a and the collimating mirror 20, and is used for transmitting and refracting the collimated light beam to be detected generated by the collimating mirror 20; the diameter of the collimated light beam to be measured formed by the collimating mirror 20 is d, and the aperture of the semi-transmission semi-reflecting mirror 30a is larger than the diameter d of the collimated light beam to be measured; the total reflection mirror 30b and the second cylindrical mirror 40b are correspondingly installed, the total reflection mirror 30b and the semi-transmission semi-reflection mirror 30a are installed in parallel and are positioned on the same straight line, the total reflection mirror 30b, the second cylindrical mirror 40b and the second photoelectric detector 60b are sequentially arranged on the same straight line, namely, the total reflection mirror 30b is positioned on the optical axis C2 of the second cylindrical mirror 40b, and the total reflection mirror 30b is used for receiving and converting the light beam reflected by the semi-transmission semi-reflection mirror 30 a; the aperture of the total reflector 30b is larger than the diameter d of the collimated light beam to be measured; since the center distance between the first cylindrical mirror 40a and the second cylindrical mirror 40b is S, the optical path difference between the semi-transmissive and semi-reflective mirror 30a and the total-reflective mirror 30b is also S; a point light source 10 is arranged on one side of a focus of the collimating mirror 20, light emitted by the point light source 10 forms collimated light beams to be detected after passing through the collimating mirror 20, the collimated light beams to be detected generate a light splitting effect when passing through the semi-transmission semi-reflection mirror 30a, the collimated light beams to be detected are divided into two parts, one part of the collimated light beams to be detected penetrates through the semi-transmission semi-reflection mirror 30a and then is emitted to the first cylindrical mirror 40a, and the other part of the collimated light beams to be detected is reflected to the total reflection mirror 30b by the semi-transmission semi-reflection mirror 30a and is reflected; the light beams form two linear light spots after passing through the first cylindrical mirror 40a and the second cylindrical mirror 40b, the two linear light spots are detected by the two photoelectric detectors 50a and 50b respectively, and then the lengths of the detected two linear light spots are calculated and compared, so that the parallelism of the collimated light beams is judged.
The principle of the collimator lens 20 of the present invention is explained in connection with fig. 4a-4 b. As shown in fig. 4a, when the point light source is located at the focal position D of the collimating mirror 20, the light beam emitted after passing through the collimating mirror 20 is parallel to the optical axis C3, and the cross-sectional area of all light beams is equal at any position; as shown in fig. 4b, when the point light source is located outside the focal position D of the collimating mirror 20, i.e. at the outer focal point D1, the light beam emitted after passing through the collimating mirror 20 converges toward the optical axis C3, so that the area of the beam cross section thereof gradually decreases to zero along the emitting direction of the collimated light beam; as shown in fig. 4C, when the point light source is located inside the focal position D of the collimator lens 20, i.e. at the inner focal point D2, the light beam exiting from the collimator lens 20 diverges away from the optical axis C3, so the area of the beam cross section thereof increases gradually along the exit direction of the collimated light beam; it follows that the condition for the collimating mirror 20 to produce a collimated beam is that the point source is at its focal position D.
With reference to fig. 4a to 5, a description is given to the principle of the two orthogonally disposed cylindrical mirrors 40a and 40b of the present invention, in which the cylindrical mirror is an optical lens optically having only one-way axisymmetric curvature, and is different from a spherical mirror having a symmetric axis, so that the focal power generated by the cylindrical mirror only exists in one direction, and no focal power exists in other directions, so that there is no deflection effect on light rays, and by using this principle, when a collimated light beam a passes through the first cylindrical mirror 40a in the X-axis direction, a linear light spot in the Y-axis direction is formed, and the length of the linear light spot is Ly, and there is no focal power in the X-axis direction, and there is no deflection and convergence effect on light rays; the collimated light beam B passes through a second cylindrical lens 40B in the Y-axis direction to form a linear light spot in the X-axis direction, the length of the linear light spot is Lx, no focal power exists in the Y-axis direction, and no deflection and aggregation effect is caused on light rays; if the light beam emitted from the collimator lens 20 has no divergence angle, the linear light spot lengths detected on two cross sections orthogonal to XY are equal, that is, Lx is Ly; when the point light source is located at the outer focus D1, the light emitted by the collimating mirror converges toward the optical axis, and after the light path is bent by the semi-transmitting semi-reflecting mirror 30a and the fully reflecting mirror 30b, the linear light spot formed by the second cylindrical mirror 40b in the Y-axis direction is smaller than the linear light spot formed by the first cylindrical mirror 40a in the X-axis direction, i.e. Lx is less than Ly; accordingly, when the point light source is located at the inner focus D2, the light rays exiting through the collimating mirror diverge away from the optical axis, so the length of the linear spot is opposite to that when the point light source is located at the outer focus D1, i.e., Lx > Ly; therefore, the parallelism of the collimated light beam can be judged by detecting the lengths Lx and Ly of the linear light spots on two cross sections orthogonal to XY; and calculating according to the detected lengths of the linear light spots on the two orthogonal cross sections to obtain the divergence angle of the collimated light beam, and further detecting the collimation degree of the collimated light beam.
The principle of the collimated light beam detecting device 100 of the present invention will be described in detail with reference to fig. 3 to 5. The light beam emitted by the point light source 10 passes through the collimating mirror 20 to form a collimated light beam to be detected which is parallel to the optical axis C1, the diameter of the collimated light beam is d, when the collimated light beam to be detected passes through the semi-transmission semi-reflection mirror 30a, the semi-transmission semi-reflection mirror 30a generates a light splitting effect on the collimated light beam, the collimated light beam to be detected is divided into two parts, one part passes through the semi-transmission semi-reflection mirror 30a and then emits to the first cylindrical mirror 40a, the other part passes through the semi-transmission semi-reflection mirror 30a and reflects to the total reflection mirror 30b, the optical path difference between the semi-transmission semi-reflection mirror 30a and the total reflection mirror 30b is S, and then the collimated light beam is reflected by the total reflection mirror; because the first cylindrical mirror 40a is arranged in the X-axis direction, the collimated light beam to be detected forms a linear light spot in the Y-axis direction after passing through the first cylindrical mirror 40a, the length of the linear light spot is Ly, the linear light spot formed after the light beam passes through the first cylindrical mirror 40a is detected by the first photoelectric detector 50a, and the linear light spot is displayed by the first display 60 a; the second cylindrical lens 40b is arranged in the Y-axis direction, so that collimated light beams to be detected form linear light spots in the X-axis direction after passing through the second cylindrical lens 40b, the length of the linear light spots is Lx, the linear light spots formed after the light beams pass through the second cylindrical lens 40b are detected by the second photoelectric detector 50b, and the linear light spots are displayed by the second display 60 b; then, the length Lx and Ly of the two linear light spots are compared to judge the parallelism of the collimated light beam to be detected, if Lx is equal to Ly, the collimated light beam is parallel to the optical axis C1, the collimated light beam emitted by the collimating mirror 20 has no divergence angle, that is, the point light source 10 is located at the focal point of the collimating mirror 20; accordingly, if Lx < Ly, it means that the point light source 10 is located at the outer focal point D1 of the collimating mirror 20; if Lx > Ly, the point light source 10 is located at the inner focal point D2 of the collimating mirror 20; therefore, by comparing the lengths Lx and Ly of the linear light spots on two sections which are orthogonal to XY, whether the collimated light beam to be detected is parallel to the optical axis or not can be judged; then, according to the lengths Lx and Ly of the linear light spots, the diameter d of the collimated light beam, the optical path difference S and the focal lengths Fx and Fy of the two cylindrical mirrors, the divergence angle of the collimated light beam to be measured can be calculated, and the point light source can be adjusted according to the calculated divergence angle of the light beam, so that the parallelism and the collimation of the collimated light beam are ensured; according to the principle, the device can also be used for detecting the quality of the collimating mirror 20, namely the point light source 10 is accurately arranged at the focus of the collimating mirror 20, and the collimation quality of the collimating mirror 20 can be judged according to the detected parallelism of the collimated light beams.
The principle and structure of the collimated light beam detection device 100 having the first cylindrical mirror 40a and the second cylindrical mirror 40b that are orthogonally arranged have been described above, but the collimated light beam detection device 100 of the present invention is not limited to this embodiment.
The principles and the like of the photodetectors 50a, 50b of the collimated light beam detection device 100 of the present invention are well known to those skilled in the art and will not be described in detail herein.
The above disclosure is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the scope of the present invention, therefore, the present invention is not limited by the appended claims.
Claims (6)
1. A collimated light beam detecting device for detecting parallelism of a collimated light beam in cooperation with a point light source, comprising:
the two cylindrical mirrors are a first cylindrical mirror and a second cylindrical mirror, and the cylindrical surface directions of the first cylindrical mirror and the second cylindrical mirror are in orthogonal arrangement;
the two photoelectric detectors are a first photoelectric detector and a second photoelectric detector, the first photoelectric detector is installed at the focus of the first cylindrical mirror, and the second photoelectric detector is installed at the focus of the second cylindrical mirror;
the collimating mirror is opposite to the first cylindrical mirror;
the first transmission mirror is a transparent medium, is obliquely arranged between the collimating mirror and the first cylindrical mirror, and is sequentially arranged on a straight line;
the second transmission mirror and the first transmission mirror are parallel to each other and are positioned on the same straight line, the second transmission mirror faces the second cylindrical mirror, and the second transmission mirror, the second cylindrical mirror and the second photoelectric detector are sequentially arranged on the same straight line.
2. A collimated light beam detecting device according to claim 1, wherein: the first transmission mirror is a semi-reflection and semi-transmission mirror.
3. A collimated light beam detecting device according to claim 1, wherein: the second transmission mirror is a total reflection mirror.
4. A collimated light beam detecting device according to claim 1, wherein: the calibers of the first transmission mirror and the second transmission mirror are both larger than the diameter of the collimated light beam generated by the collimating mirror.
5. A collimated light beam detecting device according to claim 1, wherein: the display device further comprises a first display and a second display which correspond to the first photoelectric detector and the second photoelectric detector, wherein the first display and the first photoelectric detector are correspondingly arranged, and the second display and the second photoelectric detector are correspondingly arranged.
6. A collimated light beam detecting device according to claim 1, wherein: the point light source, the collimating mirror, the first transmission mirror, the first cylindrical mirror and the first photoelectric detector are sequentially arranged on a straight line.
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| CN201811462003.1A CN111256619A (en) | 2018-11-30 | 2018-11-30 | Collimated light beam detection device |
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| CN201811462003.1A CN111256619A (en) | 2018-11-30 | 2018-11-30 | Collimated light beam detection device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114545584A (en) * | 2022-02-17 | 2022-05-27 | 长沙麓邦光电科技有限公司 | Consistency checking method for accessories of wedge-shaped flat plate shearing interferometer |
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2018
- 2018-11-30 CN CN201811462003.1A patent/CN111256619A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114545584A (en) * | 2022-02-17 | 2022-05-27 | 长沙麓邦光电科技有限公司 | Consistency checking method for accessories of wedge-shaped flat plate shearing interferometer |
| CN114545584B (en) * | 2022-02-17 | 2023-11-03 | 长沙麓邦光电科技有限公司 | Fitting consistency verification method for wedge-shaped flat shearing interferometer |
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Application publication date: 20200609 |