CN103604773A - Laser beam combiner for simultaneously detecting various types of gas of TDLAS (Tunable Diode Laser Absorption Spectroscopy) - Google Patents

Laser beam combiner for simultaneously detecting various types of gas of TDLAS (Tunable Diode Laser Absorption Spectroscopy) Download PDF

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Publication number
CN103604773A
CN103604773A CN201310600565.9A CN201310600565A CN103604773A CN 103604773 A CN103604773 A CN 103604773A CN 201310600565 A CN201310600565 A CN 201310600565A CN 103604773 A CN103604773 A CN 103604773A
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China
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optical fiber
concave spherical
optical
laser
gas
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CN201310600565.9A
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Chinese (zh)
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赵鹏
李野
陶俊
于长睿
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Changchun Yun Ye Optoelectronics Technology Co Ltd
Changchun University of Science and Technology
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Changchun Yun Ye Optoelectronics Technology Co Ltd
Changchun University of Science and Technology
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Priority to CN201310600565.9A priority Critical patent/CN103604773A/en
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Abstract

The invention provides a laser beam combiner for simultaneously detecting various types of gas of a TDLAS (Tunable Diode Laser Absorption Spectroscopy) and belongs to the technical field of laser gas detection. In the prior art, the attenuation is high, the work wavelength range is narrow and the construction cost of a beam combining part is high. The laser beam combiner is characterized by being provided with a plurality of paths of incidence optical fibers; an emergent end of each path of the incidence optical fiber is connected with a collimating mirror and each incidence optical fiber is a single-core and single-mode optical fiber; mutually-parallel optical axes of the plurality of collimating mirrors of the plurality of paths of incidence optical fibers are parallel to the optical axis of a concave spherical surface reflection mirror; the mutually-parallel optical axes of the plurality of collimating mirrors intersect with a reflection surface of the concave spherical surface reflection mirror; an incidence end face of an emergent optical fiber is located on a reflection surface focus point F of the concave spherical surface reflection mirror and is vertical to the optical axis of the concave spherical surface reflection mirror; the emergent optical fiber is a single-core and multi-mode optical fiber; the numerical aperture of the concave spherical surface reflection mirror is less than that of the emergent optical fiber.

Description

The laser bundling device simultaneously detecting for TDLAS multiple gases
Technical field
The present invention relates to a kind of laser bundling device simultaneously detecting for TDLAS multiple gases, adopt this laser bundling device can realize multiple gases detects simultaneously, different according to the molecular absorption line of gas with various by same laser gas pick-up unit, adopt the laser detection of different wave length simultaneously, belong to laser gas detection technique field.
Background technology
At gaseous spectrum, absorb field, TDLAS(tunable diode laser absorption spectroscopy, tunable diode laser absorption spectroscopy technology) can realize multiple gases and detect simultaneously.This technology forms composition formula multi wave length illuminating source by the different Distributed Feedback Laser of several centre wavelengths (distributed feedback laser), the multichannel detection laser of being launched by this combined multi-wavelength light source is after wavelength division multiplexer closes bundle, by multimode optical fiber before pond, by closing bundle detection laser, from light inlet, import the gas cell that tested gas is housed, close bundle detection laser penetrates from light-emitting window in gas cell after multiple reflections, again by multimode optical fiber guide probe behind pond, detector is converted to electric signal by various gas absorption spectrum line light signals, through front putting and lock-in amplifier, obtain gas absorption letter numberonce and second harmonic, finally utilize humorous intensity of wave to realize the measurement of gas concentration.Wherein, how to make multichannel detection laser simultaneously by gas cell, when completing gas with various by same laser gas pick-up unit, detect, become a kind of core technology that multiple gases detects simultaneously.
Described prior art utilizes wavelength division multiplexer that multi-path laser is coupled into a single core multimode optical fiber, and this optical fiber leads to gas cell.
Yet, several defects below said method exists when realizing multiple gases and detect simultaneously:
1, by after wavelength division multiplexer, all can there is decay in various degree in multichannel different wave length detection laser, and the different laser beam number of the wavelength that is coupled is more, and decay is also just more serious;
2, the applicable wavelengths scope of wavelength division multiplexer is narrower, this is the saturating anti-film being all suitable in larger wavelength coverage owing to being difficult at present, so existing wavelength division multiplexer operation interval is 1310~1610nm, and the detection laser centre wavelength of many gases is greater than 1610nm, as CH 4gas 1654nm, HCl gas 1742nm, NO gas 1800nm/2650nm, CO 2gas 2004nm/2680nm, N 2o gas 2257nm, C 3h 8gas 3370nm, therefore, described wavelength division multiplexer can not be applicable to the needs of these gas analyses;
3, the wavelength division multiplexer that is applied to field of gas detection needs customization, and cost is high.
Make multi-path laser is the application of multi-core fiber bundle by the another kind of method of gas cell simultaneously.Jiang Mei road laser imports respectively in the fibre core corresponding with it, then by multi-core fiber Shu Tongxiang gas cell.Equally, by multi-core fiber Shu Shixian multiple gases, detect simultaneously and also have its defect:
1, the imaging facula at multi-core fiber bundle emergent light is comprised of each small light spot, and between small light spot, optics is independent;
2, emergent light optical intensity on the cross section distribution dispersion, inequality, and beam divergence angle is larger, so just cause the difficulty of the collimation of fibre bundle emergent light and focusing to strengthen, this just requires gas cell length short, it is large that detector detection area is wanted, and that gas cell length short-range missile causes light path is short, and detection laser and tested gas effect are light, detection sensitivity is low, and accuracy of detection declines; Detector detection area causes greatly detector cost high.
Summary of the invention
For the substitute technology of a kind of existing wavelength division multiplexer, multi-core fiber bundle is provided, make adopting different wave length laser to realize in the process that multiple gases detects simultaneously, alleviate decay, expand applicable wavelengths scope, reduce and close the detector that bundle manufacture cost of parts, gas cell have due length, use general size detection area, we have invented a kind of laser bundling device simultaneously detecting for TDLAS multiple gases.
The present invention's the laser bundling device simultaneously detecting for TDLAS multiple gases is characterized in that as shown in Figure 1, having multichannel incident optical 1, collimating mirror 2 of each road incident optical 1 outgoing termination, and incident optical 1 is single core single-mode fiber; A plurality of collimating mirrors 2 of multichannel incident optical 1 optical axis parallel to each other is parallel with concave spherical mirror 3 optical axises, and the optical axis parallel to each other of described a plurality of collimating mirrors 2 also intersects with the reflecting surface of concave spherical mirror 3; The incident end face of outgoing optical fiber 4 is positioned at the reflecting surface focal point F of concave spherical mirror 3, and vertical with concave spherical mirror 3 optical axises, and outgoing optical fiber 4 is single core multimode optical fiber; Concave spherical mirror 3 numerical apertures are less than the numerical aperture of outgoing optical fiber 4.
Its technique effect of the present invention is, the multichannel detection laser of the composition formula multi wave length illuminating source transmitting consisting of the different Distributed Feedback Laser 5 of several centre wavelengths is coupled into respectively a road incident optical 1, as shown in Figure 2, after incident optical 1 outgoing, by collimating mirror 2, collimated, now multi-beam collimation detection laser parallel to each other incides the reflecting surface of concave spherical mirror 3, be reflected the incident end face that converges to outgoing optical fiber 4, realize and close bundle.Because concave spherical mirror 3 numerical apertures are less than the numerical aperture of outgoing optical fiber 4, radius-of-curvature thus definite concave spherical mirror 3 can guarantee that the detection laser and the outgoing optical fiber 4 that are reflected have sufficiently high coupling efficiency, as shown in Figure 3.By outgoing optical fiber 4, the multichannel detection laser of closing after bundle is imported to the gas cell 6 that tested gas is housed from light inlet, as shown in Figure 2, detection laser penetrates from light-emitting window in gas cell 6 after multiple reflections, again by 7 guide probes 8 of multimode optical fiber behind pond, detector 8 is converted to electric signal by various gas absorption spectrum line light signals, through front putting and lock-in amplifier, obtain gas absorption signalonce and second harmonic, finally utilize humorous intensity of wave to realize the measurement of gas concentration.
With respect to existing wavelength division multiplexer, concave spherical mirror 3 its operating wavelength ranges are wide, contain near infrared, in infrared, this makes the present invention's laser bundling device be applicable to when detection laser centre wavelength is greater than the multiple gases of 1610nm detect.Be coated with near infrared, mid-infrared light have high reflectance concave spherical mirror 3 its to the decay of detection laser significantly lower than existing wavelength division multiplexer.In addition, the coupling efficiency of the detection laser after reflection and outgoing optical fiber 4 is very high; Single core multimode outgoing optical fiber 4 has lower loss near infrared, middle-infrared band, and these measures all make the present invention's the decay of laser bundling device very low.The cost of concave spherical mirror 3 is also lower than existing wavelength division multiplexer.
The scheme of closing bundle with respect to existing employing multi-core fiber Shu Shixian multichannel detection laser, by the present invention's laser bundling device, completing the multichannel detection laser optical intensity on the cross section that closes bundle distributes and concentrates, evenly, and beam divergence angle is little, gas cell keeps original length, equally, also without increasing detector detection area, therefore, when thering is higher accuracy of detection, do not cause the raising of hardware cost.
Accompanying drawing explanation
Fig. 1 is the structural representation of the present invention's the laser bundling device simultaneously detecting for TDLAS multiple gases, and this figure is simultaneously as Figure of abstract.Fig. 2 is the bundle process of the closing schematic diagram of the present invention's the laser bundling device simultaneously detecting for TDLAS multiple gases.Fig. 3 be the present invention the laser bundling device simultaneously detecting for TDLAS multiple gases because of concave spherical mirror numerical aperture be less than outgoing optical fiber numerical aperture this be particularly limited the technique effect schematic diagram producing.
Embodiment
The present invention's the laser bundling device simultaneously detecting for TDLAS multiple gases as shown in Figure 1, has multichannel incident optical 1, collimating mirror 2 of each road incident optical 1 outgoing termination, and incident optical 1 is single core single-mode fiber.A plurality of collimating mirrors 2 of multichannel incident optical 1 optical axis parallel to each other is parallel with concave spherical mirror 3 optical axises, and the optical axis parallel to each other of described a plurality of collimating mirrors 2 also intersects with the reflecting surface of concave spherical mirror 3.The reflecting surface of described concave spherical mirror 3 be coated with near infrared, in infrared high-reflecting film, comprise that reflectivity is 95% aluminium film, or the reflectivity golden film that is 99%.The incident end face of outgoing optical fiber 4 is positioned at the reflecting surface focal point F of concave spherical mirror 3, and vertical with concave spherical mirror 3 optical axises, and outgoing optical fiber 4 is single core multimode optical fiber; Concave spherical mirror 3 numerical apertures are less than the numerical aperture of outgoing optical fiber 4.

Claims (2)

1. the laser bundling device simultaneously detecting for TDLAS multiple gases, is characterized in that, has multichannel incident optical (1), each road incident optical (1) collimating mirror of outgoing termination (2), and incident optical (1) is single core single-mode fiber; A plurality of collimating mirrors (2) of multichannel incident optical (1) optical axis parallel to each other is parallel with concave spherical mirror (3) optical axis, and the optical axis parallel to each other of described a plurality of collimating mirrors (2) also intersects with the reflecting surface of concave spherical mirror (3); The incident end face of outgoing optical fiber (4) is positioned at the reflecting surface focal point F of concave spherical mirror (3), and vertical with concave spherical mirror (3) optical axis, and outgoing optical fiber (4) is single core multimode optical fiber; Concave spherical mirror (3) numerical aperture is less than the numerical aperture of outgoing optical fiber (4).
2. the laser bundling device simultaneously detecting for TDLAS multiple gases according to claim 1, it is characterized in that, the reflecting surface of described concave spherical mirror (3) be coated with near infrared, in infrared high-reflecting film, comprise that reflectivity is 95% aluminium film, or the reflectivity golden film that is 99%.
CN201310600565.9A 2013-11-22 2013-11-22 Laser beam combiner for simultaneously detecting various types of gas of TDLAS (Tunable Diode Laser Absorption Spectroscopy) Pending CN103604773A (en)

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Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103969210A (en) * 2014-05-15 2014-08-06 中国科学院合肥物质科学研究院 Open type CO2/H2O monitoring device based on non-dispersive infrared principle
CN106067657A (en) * 2016-07-12 2016-11-02 中国科学院半导体研究所 Bundle coupling device and coupled system are reversely closed in a kind of N × 1
CN106442404A (en) * 2016-09-28 2017-02-22 曲阜师范大学 Real-time on-line multi-component monitoring optical system for stable gas isotopes
EP3237944A4 (en) * 2014-12-23 2018-08-29 John Zink Company, LLC Tdlas architecture for widely spaced wavelengths
CN110031404A (en) * 2019-03-06 2019-07-19 北京航天易联科技发展有限公司 A kind of high-temperature-resistant gas absorption cell containing list, the compound collimator of multimode fibre
CN111289465A (en) * 2020-03-24 2020-06-16 中国科学院长春光学精密机械与物理研究所 TDLAS gas detection system and driving method thereof
CN112817117A (en) * 2020-12-28 2021-05-18 西南技术物理研究所 Parabolic reflector auxiliary device with auto-collimation adjusting function
CN115201967A (en) * 2022-06-08 2022-10-18 中国电子科技集团公司第十一研究所 Reverse optical fiber coupler
US20230251191A1 (en) * 2022-02-09 2023-08-10 Abb Schweiz Ag Use of Gradient-Index Lenses for Cavity Enhanced Absorption Spectroscopy

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CN102522683A (en) * 2012-01-10 2012-06-27 武汉锐科光纤激光器技术有限责任公司 Power beam combiner for high-power optical fiber laser
CN102654455A (en) * 2012-04-12 2012-09-05 安徽皖仪科技股份有限公司 Laser gas analyzer for multicomponent multiplexing measurement
WO2012168423A1 (en) * 2011-06-09 2012-12-13 Carl Zeiss Ag Beam combiner for combining two independently scanned illuminating beams of a light scanning microscope

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US20110063701A1 (en) * 2009-09-14 2011-03-17 Nano-optic Device, LLC Digital optical, planar holography system and method for improving brightness of light beams
WO2012168423A1 (en) * 2011-06-09 2012-12-13 Carl Zeiss Ag Beam combiner for combining two independently scanned illuminating beams of a light scanning microscope
CN102213833A (en) * 2011-06-23 2011-10-12 中国人民解放军国防科学技术大学 Cassegrain type light beam synthesizer with high duty ratio
CN102522683A (en) * 2012-01-10 2012-06-27 武汉锐科光纤激光器技术有限责任公司 Power beam combiner for high-power optical fiber laser
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Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103969210A (en) * 2014-05-15 2014-08-06 中国科学院合肥物质科学研究院 Open type CO2/H2O monitoring device based on non-dispersive infrared principle
US11513069B2 (en) 2014-12-23 2022-11-29 Onpoint Technologies, Llc TDLAS architecture for widely spaced wavelengths
EP3237944A4 (en) * 2014-12-23 2018-08-29 John Zink Company, LLC Tdlas architecture for widely spaced wavelengths
RU2682061C2 (en) * 2014-12-23 2019-03-14 Джон Цинк Компани, ЛЛК Tdlas architecture for widely spaced wavelengths
US10352852B2 (en) 2014-12-23 2019-07-16 John Zink Company, Llc TDLAS architecture for widely spaced wavelengths
US10830698B2 (en) 2014-12-23 2020-11-10 Onpoint Technologies, Llc TDLAS architecture for widely spaced wavelength
CN106067657A (en) * 2016-07-12 2016-11-02 中国科学院半导体研究所 Bundle coupling device and coupled system are reversely closed in a kind of N × 1
CN106442404A (en) * 2016-09-28 2017-02-22 曲阜师范大学 Real-time on-line multi-component monitoring optical system for stable gas isotopes
CN106442404B (en) * 2016-09-28 2019-01-22 曲阜师范大学 A kind of multicomponent gas stable isotope real time on-line monitoring optical system
CN110031404A (en) * 2019-03-06 2019-07-19 北京航天易联科技发展有限公司 A kind of high-temperature-resistant gas absorption cell containing list, the compound collimator of multimode fibre
CN111289465A (en) * 2020-03-24 2020-06-16 中国科学院长春光学精密机械与物理研究所 TDLAS gas detection system and driving method thereof
CN112817117B (en) * 2020-12-28 2022-10-21 西南技术物理研究所 Parabolic reflector auxiliary device with auto-collimation adjusting function
CN112817117A (en) * 2020-12-28 2021-05-18 西南技术物理研究所 Parabolic reflector auxiliary device with auto-collimation adjusting function
US20230251191A1 (en) * 2022-02-09 2023-08-10 Abb Schweiz Ag Use of Gradient-Index Lenses for Cavity Enhanced Absorption Spectroscopy
US11867623B2 (en) * 2022-02-09 2024-01-09 Abb Schweiz Ag Use of gradient-index lenses for cavity enhanced absorption spectroscopy
CN115201967A (en) * 2022-06-08 2022-10-18 中国电子科技集团公司第十一研究所 Reverse optical fiber coupler
CN115201967B (en) * 2022-06-08 2023-06-23 中国电子科技集团公司第十一研究所 Reverse optical fiber coupler

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Application publication date: 20140226