CN113607687A - Single-ended diffuse reflection multi-component measurement system based on gas absorption spectrum - Google Patents
Single-ended diffuse reflection multi-component measurement system based on gas absorption spectrum Download PDFInfo
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- CN113607687A CN113607687A CN202111091111.4A CN202111091111A CN113607687A CN 113607687 A CN113607687 A CN 113607687A CN 202111091111 A CN202111091111 A CN 202111091111A CN 113607687 A CN113607687 A CN 113607687A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/39—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
Abstract
The invention provides a single-ended diffuse reflection multi-component measurement system based on gas absorption spectrum, which comprises a high-precision microscope objective coupling unit, a light source unit and a light source unit, wherein the high-precision microscope objective coupling unit is used for controlling a plurality of lasers to generate laser and coupling the laser; the all-in-one optical fiber bundle unit is used for performing all-fiber treatment on the plurality of laser beams passing through the high-precision microscope objective coupling unit; a wall surface single-end diffuse reflection unit for controlling the optical path of the laser which is fiberized by the all-in-one fiber bundle unit; and the extremely weak light intensity signal receiving unit is used for receiving and analyzing the light passing through the wall surface single-end diffuse reflection unit so as to realize multi-component measurement of the medium in the region to be measured. The invention improves the integration level, stability, vibration resistance and detection lower limit of a multi-component absorption spectrum measuring system in an extremely complex environment, and simultaneously provides a new solution for the application and popularization of a mid-infrared laser device in an actual complex measuring environment.
Description
Technical Field
The invention relates to the technical field of absorption spectrum measurement, and particularly provides a single-ended diffuse reflection multi-component measurement system based on gas absorption spectrum.
Background
A measurement technology based on Tunable laser absorption spectroscopy (TDLAS) is used as a non-contact measurement means, has the characteristics of high sensitivity, high response speed, in-situ measurement and the like, is widely applied to the fields of energy chemical industry, electric power environmental protection and the like, and can realize the cooperative measurement of gas physical property parameters such as temperature, component concentration, pressure and the like. Nevertheless, in an extremely complex environment (high temperature, high pressure, high speed, strong vibration, trace-level component concentration), the design and construction of a multi-gas component in-situ online collaborative measurement system with high integration level and strong stability still face huge challenges, and meanwhile, in a mid-infrared band, the strength of a common gas absorption spectrum line is high, and the measurement advantage of the mid-infrared band is obvious, but compared with a laser device with a mature near-infrared communication band, the fiber-making degree of a mid-infrared photoelectric device is low, which brings certain difficulties to the application and popularization of the mid-infrared laser device in the absorption spectrum measurement technology.
The characteristics and the defects of the traditional multi-component absorption spectrum measuring system can be divided into three categories: 1) in a conventional absorption spectrum experiment, one end of the absorption spectrum experiment is transmitted, and the other end of the absorption spectrum experiment is received by an optical path arrangement, when the measurement environment space is severely limited or an observation window is inconvenient to open on both sides, the optical path arrangement has great limitation, and when an infrared photoelectric device is used, the infrared photoelectric device faces difficulties of multi-optical path collimation, collineation, convergence and the like; 2) in a high-turbulence combustion environment with high temperature, high pressure, high speed and large mechanical vibration, the light beam shaking phenomenon is very serious, in order to effectively converge and collect light intensity signals, a large-caliber parabolic mirror, a convex lens and the like are often required to be arranged, and the influence of the light beam shaking phenomenon on a spectrum measurement signal is not fundamentally relieved; 3) when absorption spectrum detection is carried out in an environment with extremely low concentration such as trace level (ppm level) NOx combustion tail gas emission, effective gas absorption signals are weak, and signal-to-noise ratio is low. How to further increase the signal-to-noise ratio of the absorption signal and increase the detection lower limit is a big difficulty. At present, only single-ended multi-component measurement research is carried out in a Stanford university power laboratory, the single-ended multi-component absorption spectrum measurement can be realized by utilizing the specular reflection of the polished inner surface of the rotary detonation engine and having higher reflected light power, but the single-ended multi-component absorption spectrum measurement system has greater limitation when being applied to the occasions with serious ablation and scaling and pollution of the wall surface of a combustion chamber of an aircraft engine and the like.
Generally speaking, in an extremely complicated environment, the existing multi-component laser absorption spectrum measuring system has low overall integration level, high complexity and poor vibration resistance, and is limited in application under the conditions of severe wall ablation and fouling.
Disclosure of Invention
Aiming at the technical problems, the invention provides a single-ended diffuse reflection multi-component measurement system based on gas absorption spectrum, which adopts a high-precision objective coupling system and an advanced all-in-one optical fiber bundle design, utilizes the wall surface single-ended diffuse reflection characteristic to improve the integration level, stability, vibration resistance, detection lower limit and the like of the multi-component absorption spectrum measurement system in an extremely complex environment, and simultaneously provides a new solution idea and scheme for the application and popularization of a mid-infrared laser device in an actual complex measurement environment.
A single-ended diffuse reflectance multi-component measurement system based on gas absorption spectroscopy, comprising:
the high-precision microscope objective coupling unit is used for controlling the plurality of lasers to generate laser and coupling the laser;
the all-in-one optical fiber bundle unit is used for performing all-fiber treatment on the plurality of lasers passing through the high-precision microscope objective coupling unit;
the wall surface single-end diffuse reflection unit is used for controlling the light path of the laser which is subjected to fiber processing by the all-in-one optical fiber beam unit;
and the extremely weak light intensity signal receiving unit is used for receiving and analyzing the light passing through the wall surface single-ended diffuse reflection unit, so that multi-component measurement of the medium in the region to be measured is realized.
Further, the high-precision microscope objective coupling unit includes: the device comprises a laser temperature and current controller, a near-infrared tunable semiconductor laser, a middle-infrared microscope objective, a high-precision three-dimensional displacement platform and a matching sleeve, wherein the laser temperature and current controller controls the wavelength scanning tuning of the near-infrared tunable laser and the middle-infrared tunable laser; the near-infrared laser is output by optical fibers and is directly connected with the all-in-one optical fiber unit through the optical fiber matching sleeve; the middle infrared laser is output in free space, and laser generated by the high-precision three-dimensional displacement table is coupled to the all-in-one optical fiber bundle unit through the middle infrared microscope objective by adjusting the high-precision three-dimensional displacement table.
Preferably, the diameter of the near-infrared laser light spot is 1-2mm, and the light intensity power is about 10-20 mW; the diameter of the light spot of the intermediate infrared laser is 1-2mm, and the light intensity power is about 3-5 mW.
Further, the all-in-one optical fiber bundle unit comprises an all-in-one optical fiber bundle and a collimator, and the laser passing through the all-in-one optical fiber bundle is collimated and output by the collimator.
Furthermore, the single-ended diffuse reflection unit of wall includes parabolic mirror, diaphragm, observation window, baffle and wall, warp the light of unifying fiber bundle unit output more passes through the observation window to pass through the baffle avoids the reverberation on observation window surface takes place diffuse reflection on the wall, diffuse reflection light passes again the observation window, the warp the parabolic mirror assembles and passes the diaphragm output.
Further, the very weak light intensity signal receiving unit comprises a photoelectric detector, a data acquisition system, a dichroic mirror and narrow-band filters, light output by the wall surface single-end diffuse reflection unit passes through reflected light and transmitted light which are separated by the dichroic mirror and respectively pass through the two narrow-band filters to reach the detector, and the data acquisition system acquires electric signals generated by the photoelectric detector and is used for subsequent processing and analysis.
Furthermore, the diffuse reflection light is distributed within an angle of 180 degrees in the whole space, the parabolic mirror receives the diffuse reflection light within an angle theta, and the angle theta is adjusted by controlling the opening of the diaphragm.
Preferably, the diaphragm opening is controlled by an optical trajectory tracking algorithm.
The invention has the beneficial effects that:
by utilizing a high-precision objective coupling system and an advanced all-in-one optical fiber bundle design, multi-band (near infrared and intermediate infrared) laser beam combination and multi-gas component synchronous measurement can be realized; the diffuse reflection characteristic of a single end of the wall surface is utilized, double-side windowing in the actual measurement process is avoided, and the method can be used in occasions with severely limited measurement space; by receiving the diffuse reflection light in all directions in the whole space, the beam jitter resistance characteristic, the detection lower limit and the like of the measuring system can be improved. In summary, the invention has the beneficial effects that the single-end diffuse reflection multi-component measurement scheme based on the gas absorption spectrum can improve the integration level, stability, lower detection limit and the like of the measurement system, and simultaneously provides a new solution idea and scheme for the application and popularization of the intermediate infrared laser device in the actual complex measurement environment.
Drawings
FIG. 1 is a schematic structural diagram of an embodiment of a single-ended diffuse reflection multi-component measurement system based on gas absorption spectroscopy according to the present invention;
FIG. 2 is a schematic diagram of the single-ended diffuse reflectance system shown in the embodiment of FIG. 1;
FIG. 3 is a diagram illustrating the results of optical trajectory tracking optimization employed in the present invention;
FIG. 4 is a schematic diagram of a three-in-one fiber bundle used in one embodiment of the present invention.
Reference numerals:
1. the device comprises a laser temperature and current controller, 2, a near-infrared tunable semiconductor laser, 3, a middle-infrared tunable semiconductor laser, 4, a middle-infrared microscope objective, 5, a high-precision three-dimensional displacement table, 6, an all-in-one optical fiber bundle, 7, a collimator, 8, a parabolic mirror, 9, a photoelectric detector, 10, a data acquisition system, 11, a matching sleeve, 12, a diaphragm, 13, a dichroic mirror, 14, a narrow-band optical filter, 15, a wall surface, 16, a baffle, 17 and an observation window.
Detailed Description
The specific structure, operation principle and measurement process of the present invention will be further described with reference to the accompanying drawings.
Fig. 1 shows an embodiment of a single-ended diffuse reflection multi-component measurement system based on gas absorption spectroscopy, which comprises a high-precision microscope objective coupling unit, a three-in-one optical fiber bundle unit, a wall surface single-ended diffuse reflection unit and an extremely weak light intensity signal receiving unit. The high-precision microscope objective coupling unit is used for controlling generation and coupling of laser, the three-in-one optical fiber beam unit is used for performing full-fiber processing on a plurality of laser beams passing through the high-precision microscope objective coupling unit, the wall surface single-end diffuse reflection unit is used for controlling a light path of light coupled by the optical fiber beam, and the extremely weak light intensity signal receiving unit is used for receiving the light passing through the wall surface single-end diffuse reflection unit and analyzing the light.
The high-precision microscope objective coupling unit comprises a laser temperature and current controller 1, a near-infrared tunable semiconductor laser 2, a mid-infrared tunable semiconductor laser 3, a mid-infrared microscope objective 4, a high-precision three-dimensional displacement platform 5 and a matching sleeve 11. The three-in-one optical fiber bundle unit comprises a three-in-one optical fiber bundle 6 and a collimator 7. Wherein, the laser temperature and current controller 1 controls the wavelength scanning tuning of the near-infrared tunable laser and the mid-infrared tunable laser; the near-infrared laser 2 is output by optical fibers, the diameter of a light spot is about 1-2mm, the light intensity power is about 10-20mW, and the near-infrared laser can be directly connected with the three-in-one optical fiber bundle 6 through an optical fiber matching sleeve 11; the middle infrared laser 3 is output in free space, the diameter of a light spot is about 1-2mm, the light intensity power is about 3-5mW, and the middle infrared micro objective 4 is coupled to the three-in-one optical fiber bundle 6 by adjusting the high-precision three-dimensional displacement table 5; the near-infrared laser and the mid-infrared laser synthesized by the three-in-one optical fiber bundle 6 are output in a collimating way by a collimator 7.
The wall surface single-end diffuse reflection unit comprises a parabolic mirror 8, a diaphragm 12, an observation window 15, a baffle 16 and a wall surface 17. The extremely weak light intensity signal receiving unit comprises a photoelectric detector 9, a data acquisition system 10, a dichroic mirror 13 and a narrow-band filter 14. Fig. 2 is a schematic diagram of a single-ended diffuse reflection system used in the present invention, and as can be seen from fig. 1 and 2, light output from the collimator 7 passes through the observation window 15, and is reflected by the baffle 16 to avoid the reflected light on the surface of the observation window 15, so as to generate diffuse reflection on the rough wall surface 17. The spatially diffuse reflected light passes through the observation window 15 again and is collected by the parabolic mirror 8. In the system, laser passes through the observation window on one side, the diffuse reflection characteristic of the rough wall surface on the other side is utilized, additional windowing processing is not needed, and compared with the traditional design of reflecting at one end, receiving at one end and opening windows on two sides, the measuring system designed by the invention can be used in the occasions with severely limited measuring space. The single-end diffuse reflection system is adopted for arrangement, laser enters an area to be detected from an observation window on one side, diffuse reflection occurs through a rough wall surface on the other side, diffuse reflection light passes through the area to be detected again, passes through the observation window and reaches a detector, the effective absorption optical path is increased to two times, the signal-to-noise ratio of an absorption signal is increased, and the detection lower limit of the absorption spectrum measurement technology is further increased.
The dichroic mirror 13 can be used to separate the different wavelength bands, e.g. near and mid-infrared lasers, and the reflected and transmitted light generated by the dichroic mirror passes through the narrow band filter 14 to the detector 9. The data acquisition system 10 acquires the electrical signals of the photoelectric detector 9 for subsequent processing and analysis, and mainly comprises absorption spectrum measurement signal background baseline processing, molecular spectral line linear fitting and the like, so as to calculate the temperature and component concentration information of the medium to be measured. The diffuse reflection light is distributed in the angle of 180 degrees in the whole space, the diffuse reflection light in the angle theta is received by the parabolic mirror 8, and the angle theta can be adjusted by controlling the opening of the diaphragm 12. In actual extremely complex environments (high speed, strong vibration and soot particle enrichment), single laser beams are prone to shake, shift and the like, and the laser beams are distributed in all directions of 180 degrees in the whole space by utilizing the diffuse reflection characteristic of the rough wall surface, so that the problems of light beam shake and light signal deviation caused by strong turbulence and strong vibration can be effectively relieved.
As shown in fig. 2. The invention adopts the paraboloidal mirror 8 to receive the diffuse reflection light within the angle theta, the path optical paths of the diffuse reflection light passing through the region to be detected are different within the angle theta, which brings certain uncertainty to the absorption optical path during subsequent signal processing, and meanwhile, the laser power P which can be detected is also different due to different receiving angles theta. In order to comprehensively consider two factors of optical path uncertainty and detectable power, an optical trajectory tracking algorithm is adopted, and the optical path uncertainty and the change condition of the detectable power P under the condition of different diaphragm opening degrees are researched mainly according to the diffuse reflection light geometric space transmission characteristic and the parabolic mirror design parameters (diameter and focal length). Fig. 3 is a schematic diagram of the result of optical trajectory tracking optimization adopted in the present invention, where the parabolic mirror used in the present invention is a 90 ° off-axis parabolic mirror, the size of 2 inches, the reflection focal length is 101.6mm, and the parent focal length is 50.8mm, and under this parameter setting, the intersection position of the two curves in fig. 3, that is, the optimized aperture R is 11.1 mm. The parameters of elements in the optical path are changed, and the corresponding optimized diaphragm opening is different, so that the parameters can be comprehensively considered by two factors of optical path uncertainty and detectable power. The only single-ended multi-component measurement research at present utilizes specular reflection light, not diffuse reflection light, on the inner surface of the device to be measured, and does not relate to the optical trajectory tracking algorithm in the invention. According to the invention, the aperture of the diaphragm is controlled through an optical track tracking algorithm, the laser reflected by a single-side observation window is avoided, the maximum diffuse reflection light intensity detection signal is realized, meanwhile, the optical path uncertainty caused by the diffuse reflection light reception at a certain space angle is reduced, and the measurement precision is further improved.
Fig. 4 is a schematic structural diagram of a three-in-one optical fiber bundle used in an embodiment of the present invention, which includes two mid-infrared hollow optical fibers and one near-infrared optical fiber. Wherein the intermediate infrared hollow fiber adopts an AgI dielectric coating, and the inner diameter is 300 mu m; the near-infrared optical fiber is a conventional single-mode optical fiber SMF28, and three optical fibers are physically coupled at the tail end to realize simultaneous and same-position measurement of multiple components. It should be noted that, in the embodiment of the present invention, as shown in fig. 1, one near-infrared laser and two mid-infrared lasers are used and bundled together by a three-in-one optical fiber, but the present invention is not limited to three lasers and can be further extended to the use of multiple beams of lasers with different wavelength bands. Meanwhile, the optical fiber bundle is changed into an all-in-one optical fiber bundle according to the number of the lasers, and the all-in-one optical fiber bundle is used for coupling light emitted by the lasers. According to the invention, the mid-infrared free space laser can be efficiently coupled by adopting the mid-infrared objective lens and the high-precision three-dimensional displacement platform system, and the design of a near-infrared and mid-infrared multiband full-fiber system can be realized by matching with an advanced all-in-one optical fiber bundle, so that the measurement system is more compact and stable.
The above embodiments are only preferred embodiments of the present invention, but the scope of the present invention is not limited thereto, and any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present invention are also within the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.
Claims (8)
1. A single-ended diffuse reflectance multi-component measurement system based on gas absorption spectroscopy, comprising:
the high-precision microscope objective coupling unit is used for controlling the plurality of lasers to generate laser and coupling the laser;
the all-in-one optical fiber bundle unit is used for performing all-fiber treatment on the plurality of lasers passing through the high-precision microscope objective coupling unit;
the wall surface single-end diffuse reflection unit is used for controlling the light path of the laser which is subjected to fiber processing by the all-in-one optical fiber beam unit;
and the extremely weak light intensity signal receiving unit is used for receiving and analyzing the light passing through the wall surface single-ended diffuse reflection unit, so that multi-component measurement of the medium in the region to be measured is realized.
2. The gas absorption spectroscopy-based single-ended diffuse reflection multi-component measurement system of claim 1, wherein the high-precision microscope objective coupling unit comprises: the device comprises a laser temperature and current controller, a near-infrared tunable semiconductor laser, a middle-infrared microscope objective, a high-precision three-dimensional displacement platform and a matching sleeve, wherein the laser temperature and current controller controls the wavelength scanning tuning of the near-infrared tunable laser and the middle-infrared tunable laser; the near-infrared laser is output by optical fibers and is directly connected with the all-in-one optical fiber unit through the optical fiber matching sleeve; the middle infrared laser is output in free space, and laser generated by the high-precision three-dimensional displacement table is coupled to the all-in-one optical fiber bundle unit through the middle infrared microscope objective by adjusting the high-precision three-dimensional displacement table.
3. The gas absorption spectroscopy-based single-ended diffuse reflection multicomponent measurement system of claim 2, wherein the near-infrared laser spot diameter is 1-2mm and the optical power is about 10-20 mW; the diameter of the light spot of the intermediate infrared laser is 1-2mm, and the light intensity power is about 3-5 mW.
4. The gas absorption spectroscopy-based single-ended diffuse reflection multi-component measurement system according to claim 1, wherein the all-in-one fiber bundle unit comprises an all-in-one fiber bundle and a collimator, and the collimator collimates the laser light passing through the all-in-one fiber bundle to output.
5. The gas absorption spectrum-based single-ended diffuse reflection multi-component measurement system according to claim 1, wherein the wall surface single-ended diffuse reflection unit comprises a parabolic mirror, a diaphragm, an observation window, a baffle and a wall surface, light output by the all-in-one fiber bundle unit passes through the observation window, reflected light on the surface of the observation window is avoided by the baffle, diffuse reflection occurs on the wall surface, and the diffuse reflected light passes through the observation window again and is converged by the parabolic mirror to be output through the diaphragm.
6. The gas absorption spectrum-based single-ended diffuse reflection multi-component measurement system according to claim 1, wherein the very weak light intensity signal receiving unit comprises a photodetector, a data acquisition system, a dichroic mirror and a narrow-band filter, light output by the wall surface single-ended diffuse reflection unit passes through two narrow-band filters respectively to reach the detector after reflected light and transmitted light separated by the dichroic mirror, and the data acquisition system acquires an electrical signal generated by the photodetector for subsequent processing and analysis.
7. The gas absorption spectrum-based single-ended diffuse reflection multi-component measurement system according to claim 5, wherein the diffuse reflection light is distributed within a full-space 180 ° angle, the parabolic mirror receives the diffuse reflection light within an angle θ, and the angle θ is adjusted by controlling the opening degree of the diaphragm.
8. The gas absorption spectroscopy-based single-ended diffuse reflection multi-component measurement system according to claim 7, wherein the diaphragm opening is controlled by an optical trajectory tracking algorithm.
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