CN204666513U - Gas sample room - Google Patents
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- CN204666513U CN204666513U CN201520127774.0U CN201520127774U CN204666513U CN 204666513 U CN204666513 U CN 204666513U CN 201520127774 U CN201520127774 U CN 201520127774U CN 204666513 U CN204666513 U CN 204666513U
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Abstract
The utility model provides a kind of gas sample room, and described gas sample room comprises optical resonator and a hollow reflective pipe, and optical resonator is made up of optical resonance resonant reflec-tors; Hollow reflective Guan Weiyi root holds gas to be analyzed and optical resonance endovenous laser bundle enters the hollow pipe that the other end penetrates from one end, be placed on optical resonator wherein between two optical resonance resonant reflec-tors, optical resonance endovenous laser bundle, at hollow reflective inside pipe wall internal communication, produces scattered light with gas molecule effect to be analyzed in pipe; Scattered light is inner through tube wall multiple reflections at hollow reflective pipe, penetrates from hollow reflective pipe two ends.This gas sample room adopts piezoelectric ceramics (PZT) accurate adjustment optical resonator chamber long, makes optical resonator lock external incident laser beam longitudinal mode, is formed and strengthen laser beam in optical resonator.The enhancing effect of this gas sample room to Raman scattering light signal is tens times that simple optical resonator enhancing technology strengthens effect, even higher, drastically increases the sensitivity of detection of gas.
Description
Technical field
The utility model relates to aerochemistry analysis of components and detection field, the gas sample room particularly in a kind of laser Raman spectroscopy gas analyzer.
Background technology
Nineteen twenty-eight C.V. Raman experiments finds, light is changed by the light occurrence frequency of molecular scattering through transparent medium, and this phenomenon is called Raman scattering.In the scattering spectrum of transparent medium, frequency and incident light frequency υ
0identical composition is called Rayleigh scattering; Frequency is symmetrically distributed in υ
0spectral line or the bands of a spectrum of both sides are Raman spectrum, the composition υ that its medium frequency is less
0-Δ υ is also called Stokes line, the composition υ that frequency is larger
0+ Δ υ is also called anti-stockes line.Due to the number of Raman line, the size of displacement, the length of spectral line directly and sample molecule vibrates or rotational energy level is relevant, and Raman spectrum can distinguish the chemical composition of illuminated material exactly.Along with the appearance of laser instrument after nineteen sixty, provide high-quality high strength monochromatic light, Raman spectrum is grown up gradually in the application in matter chemistry analysis of components field.
Laser Raman spectroscopy Analysis On Gaseous Constituents is a kind of technology that development in recent years is got up.This technology has that detection speed is fast, sampling less, multiple components can be analyzed simultaneously, the feature such as volume is little, maintenances is simple and grow service time, be highly suitable for line analysis measurement industrial process gas component content.Laser Raman spectroscopy gas analysis technology can be applicable to petroleum engineering gas detection logging, rock gas component detects and calorimetry, heat-treating atmosphere controls, power plant soot controls, the ironmaking of steel plant, steel-making, coking coal gas on-line analysis, oil refining process gas-monitoring, the control of sweat gas detect, Coal Chemical Industry, chemical fertilizer production, methyl alcohol and alcohol production, the field such as become more meticulous.
Laser Roman spectroscopic analysis of composition technology is still faced with some challenges in gas analysis field, wherein topmost is exactly that Raman scattering light signal is very faint, the sensitivity of common laser Raman spectrum probe gas does not reach detection requirement at all, and this just needs to improve Raman scattered light intensity by various method.In patent US4648714, gaseous sample box is placed in laser resonant cavity by Robert E.Benner, utilizes laser field intensity stronger in laserresonator thus the analysis achieved gas; Patent EP0557655B1 discloses a kind of method adopting hollow reflective pipe to improve scattered light (as Raman) collection efficiency, this hollow reflective pipe outer wall is coated with high reflectance rete, in pipe, the laser beam of horizontal infection produces Raman diffused light with gas effect in pipe, and Raman diffused light penetrates from hollow reflective pipe two ends or center drilling after multiple reflections; Patent US5521703 discloses a kind of method adopting semiconductor laser (or being called laser diode) to excite hollow reflective tube interior gas Raman signal, this hollow reflective inside pipe wall plating reflective coating, the laser beam that semiconductor laser is launched does not need parallel transmission in pipe; Patent US5432610 discloses a kind of method that diode-end-pumped resonator cavity strengthens chemical gas analysis, resonator cavity reflected light signal feeds back to semiconductor laser, the longitudinal mode of semiconductor laser, with the locking of resonator cavity longitudinal mode, forms stronger laser field intensity in resonator cavity.At document (Analyst, 2012,137,4669) in, Robert Salter discloses the way that a kind of resonator cavity strengthens Raman spectrum gas phase analysis, and the method adopts laser diode equally, is that the document adopts resonator cavity transmitted light to feed back to laser diode with patent US5432610 difference, the longitudinal mode of laser diode, with the locking of resonator cavity longitudinal mode, forms stronger laser field intensity in resonator cavity.Summarize above technological invention, the method that two kinds strengthen Raman scattering signal can be summarized as, namely strengthen excitation light power and improve scattered light collection efficiency.
At present, the optimal detection sensitivity that the technological invention of this several enhancing gas Raman scattered signal can reach is 1ppm, also do not reach the application requirement of ppb magnitude, as volatile organic compounds (volatile organic compounds, VOC) detects.Therefore seek higher Raman signal and strengthen way, be still the primary study direction of industry.
Summary of the invention
The utility model discloses the gas sample room in a kind of laser Raman spectroscopy gas analyzer, its technical scheme is:
A kind of gas sample room, comprise optical resonator and a hollow reflective pipe, optical resonator is made up of optical resonance resonant reflec-tors; Hollow reflective Guan Weiyi root holds gas to be analyzed and optical resonance endovenous laser bundle enters the hollow pipe that the other end penetrates from one end, be placed on optical resonator wherein between two optical resonance resonant reflec-tors, optical resonance endovenous laser bundle, at hollow reflective inside pipe wall internal communication, produces scattered light with gas molecule effect to be analyzed in pipe; Scattered light is inner through tube wall multiple reflections at hollow reflective pipe, penetrates from hollow reflective pipe two ends.
Preferably, optical resonator is made up of two optical resonance resonant reflec-tors.
Preferably, gas sample room also comprises the piezoelectric ceramics for adjusting distance between optical resonance resonant reflec-tors.
Preferably, hollow reflective inside pipe wall is coated with metallic reflection rete or the optical medium rete to Raman diffused light reflection.
Preferably, hollow reflective tube material itself is to Raman scattering optical transparency, and hollow reflective pipe outer wall is coated with metallic reflection rete or the optical medium rete to Raman diffused light reflection.
Preferably, hollow reflective tube material itself reflects Raman diffused light.
Preferably, be provided with a slant reflection mirror that the scattered light of hollow reflective pipe outgoing can be reflected between hollow reflective pipe one end and adjacent optical cavity mirror, it have the hole that a laser beam can be passed.
Preferably, a slant reflection mirror that the scattered light of hollow reflective pipe outgoing can be reflected is provided with between hollow reflective pipe one end and adjacent optical cavity mirror, it has the hole that a laser beam can be passed, be provided with the concave mirror that scattered light is reflected back hollow reflective pipe inside by an energy between the hollow reflective pipe other end and adjacent optical cavity mirror, it have the hole that a laser beam can be passed.
Preferably, a slant reflection mirror that the scattered light of hollow reflective pipe outgoing can be reflected is provided with between hollow reflective pipe one end and adjacent optical cavity mirror, it has the hole that a laser beam can be passed, be provided with the isolated body that prevents air stream contamination optical resonance resonant reflec-tors between the hollow reflective pipe other end and adjacent optical cavity mirror, it have the hole that a laser beam can be passed.
Preferably, a slant reflection mirror that the scattered light of hollow reflective pipe outgoing can be reflected is provided with between hollow reflective pipe one end and adjacent optical cavity mirror, it has the hole that a laser beam can be passed, be provided with a slant reflection mirror that the scattered light of hollow reflective pipe outgoing can be reflected between the hollow reflective pipe other end and adjacent optical cavity mirror, it have the hole that a laser beam can be passed.
Preferably, it is characterized in that: hollow reflective pipe one end is provided with draft tube and the other end is provided with escape pipe.
Preferably, be provided with can through the optical window of scattered light for gas sample chamber.
Preferably, optical resonator is made up of three or four optical resonance resonant reflec-tors.
Piezoelectric ceramics (PZT) accurate adjustment optical resonator chamber is long, and make optical resonator lock external incident laser beam longitudinal mode, laser beam is coupled in optical resonator, forms comparatively light laser light beam in optical resonator.In optical resonator, parallel placement hollow reflective pipe, is filled with gas to be analyzed in it.The internal diameter of this hollow reflective pipe is greater than the diameter of optical resonance endovenous laser bundle, and the laser beam in optical resonator can be made to propagate at hollow reflective inside pipe wall internal freedom and can not touch tube wall; Optical resonance endovenous laser bundle produces Raman diffused light with the detected gas effect of hollow reflective pipe inside; Because the inwall of hollow reflective pipe or outer wall are coated with the rete to Raman diffused light high reverse--bias, Raman diffused light is through multiple reflections in hollow reflective pipe, and last Raman diffused light exports from hollow reflective pipe two ends; The Raman diffused light that hollow reflective pipe two ends export is input in spectrometer by optical receiver assembly, finally obtains the Raman spectrum of gas.
The utility model is with existing invention difference: 1. in patent US4648714, and gaseous sample box (non-hollow reflective pipe) is placed in laser resonant cavity; In the utility model, adopt a hollow reflective pipe being filled with gas to be analyzed to be placed in another optical resonator, this optical resonator is at laser external.2. in patent EP0557655B1 and patent US5521703, hollow reflective pipe is positioned at laser external, does not adopt resonator cavity to strengthen laser beam; Be positioned at optical resonator at the utility model hollow core reflection tube, have employed optical resonator and laser beam is strengthened.3. at patent US5432610 and document (Analyst, 2012,137,4669) in, the reflected light and the transmitted light that have employed optical resonator respectively feed back to laser diode inside as feedback light, and the longitudinal mode of semiconductor laser is locked with external optical resonator cavity longitudinal mode; In the utility model, adopt piezoelectric ceramics (PZT) accurate adjustment optical resonator chamber long, make optical resonator locked laser longitudinal mode; In addition, the utility model have employed a hollow reflective pipe can filling gas to be analyzed and is placed in optical resonator.
Contrast existing invention, Advantageous Effects of the present utility model is 1. can when laser output power is identical, adopts optical resonator to increase considerably the laser beam power of same gas effect, can produce stronger Raman diffused light thus.2. hollow reflective pipe can effectively improve scattered light collection efficiency.
Accompanying drawing explanation
Fig. 1 is the laser Raman spectroscopy gas analyzer adopting back scattering collection mode;
Fig. 2 is laser module 1 structural representation;
Fig. 3 is a kind of implementation of gas sample room 4;
Fig. 4 is hollow reflective pipe 21 schematic diagram;
Fig. 5 is that chamber strengthens laser beam at hollow reflective pipe internal communication schematic diagram;
Fig. 6 a is that hollow reflective inside pipe wall reflects scattered light thus strengthens scattered light collection efficiency schematic diagram;
Fig. 6 b is that hollow reflective pipe outer wall reflects scattered light thus strengthens scattered light collection efficiency schematic diagram;
Fig. 7 is a kind of implementation of piezoelectric ceramics control module 7;
Fig. 8 is Raman scattering light collecting system schematic diagram;
Fig. 9 is a kind of implementation of optical resonator enhancing technology;
Figure 10 is the laser Raman spectroscopy gas analyzer adopting forward scattering collection mode;
Several implementations of Figure 11 a-11c gas sample room 4;
Figure 12 is a kind of laser Raman spectroscopy gas analyzer;
Figure 13 a-13b is slant reflection mirror 36 schematic diagram;
Figure 14 is concave mirror 37 schematic diagram;
Figure 15 is a kind of gas sample room 4;
Figure 16 is a kind of forward direction-backward Raman scattering light collecting system schematic diagram;
Figure 17 a-17b is that optical resonator is to the relation between transmitance T, the reflectivity R of laser beam and light path (nL)
Embodiment
In order to understand the utility model in depth, below in conjunction with specific embodiment and accompanying drawing, the utility model is described in detail.
Embodiment one
A kind of laser Raman spectroscopy gas analyzer adopting back scattering collection mode that accompanying drawing 1 provides for the utility model embodiment one, comprises laser module 1, small size catoptron 3, gas sample room 4, photodetector 5, piezoelectric ceramics control module 7, scattered light gathering-device 10, fibre bundle 11 and spectrometer 12.
Wherein, see accompanying drawing 2, as a kind of specific implementation of laser module 7, comprise laser instrument 13, faraday's laser isolator 14, bandpass filter 15, lens 16, small filter 17 and lens 18.Laser instrument 13 Emission Lasers bundle 2a, any one laser instrument can be adopted, as gas laser, semiconductor laser, solid-state laser etc., have employed semiconductor pumped solid (DPSS) single longitudinal mode green laser in the present embodiment, its outgoing laser beam is single longitudinal mode, wavelength X
laser=532nm; Faraday's laser isolator 14, for isolating subsequent optical element reflects light, avoids reflected light return laser light device; Bandpass filter 15 be 532nm through wavelength, laser center wavelength can be made to pass through, and other the veiling glare of wavelength isolated, avoids veiling glare to enter subsequent optical element; Lens 16 and lens 18 form a telescope, expand for laser beam 2a, and shoot laser bundle 2b transverse mode is mated with the transverse mode of optical resonator.
Wherein, see accompanying drawing 3 ~ 6b, as a kind of specific implementation of gas sample room 4, comprise (optical resonator) catoptron 19, (optical resonator) catoptron 20, hollow reflective pipe 21, supporter 23, (optical resonator) cavity 22, piezoelectric ceramics 24, catoptron holder 25, draft tube 26 and escape pipe 27.Catoptron 19, catoptron 20, cavity 22, piezoelectric ceramics 24 and catoptron holder 25 form a confining gas sample room 4; Catoptron 19 is parallel with catoptron 20 is placed on two ends, gas sample room 4; Catoptron 20 is fixed on catoptron holder 25; Catoptron holder 25 is connected to cavity 22 by piezoelectric ceramics 24; Hollow reflective pipe 21 is placed horizontally between catoptron 19 and catoptron 20, and is connected and fixed on cavity 22 by supporter 23; Detected gas enters this gas sample room by draft tube 26, and due to the isolation of supporter 23, detected gas can only flow to escape pipe 27 (gas flowing path is by shown in arrow thick in Fig. 3) by hollow reflective pipe 21;
The reflecting surface S19 of catoptron 19 and catoptron 20 and reflecting surface S20 is (near the side of hollow reflective pipe 21, as Fig. 5) be coated with the rete that laser light wave height is reflected respectively, form an optical resonator (optical resonant cavity).In the present embodiment, S19 and S20 is concave surface, and radius-of-curvature is 200mm, and its center distance is also 200mm, thus forms a confocal resonator; Laser beam 2b, by back and forth propagating in this optical resonator after catoptron 19, forms laser beam 2c.
Piezoelectric ceramics 24 can produce microdisplacement 8 times at Piezoelectric Ceramic voltage, and its effect is used for the spacing L between accurate adjustment catoptron 19 and catoptron 20.Theoretical according to optical resonator, the pass between the light wave fields longitudinal mode (frequency v) and spacing L of the existence of optical resonator inside is:
nL＝mλ/2
Wherein nL is the light path of resonator cavity inner light beam through gas, and n is gas refracting index, and c is the light velocity in vacuum, and m is integer, the wavelength of λ (λ=c/v) corresponding to resonator cavity longitudinal mode.Therefore by adjustment optical resonator mirror pitch L, optical resonator longitudinal mode can be made with external incident laser beam longitudinal mode coupling (single longitudinal mode v
laser, wavelength X
laser=532nm), this adjustment process is optical resonator locking laser beam longitudinal mode process.When optical resonator longitudinal mode mates with external incident laser beam longitudinal mode, from analyzing above:
nL＝mλ
laser/2
Figure 17 a is that optical resonator is to the relation between the transmitance T of laser beam and light path (nL), when the integral multiple that light path (nL) is laser light wave half-wavelength, transmitted light intensity is in maximal peak position, therefore can, with the spacing L between transmitted light beam signal intensity FEEDBACK CONTROL catoptron 19 and catoptron 20, optical resonator be made to lock laser beam longitudinal mode; Figure 17 b is that optical resonator is to the relation between the reflectivity R of laser beam and light path (nL), visible when the integral multiple that light path (nL) is laser light wave half-wavelength, reflective light intensity is in minimum valley position, therefore same usable reflectance beam signal intensity feedback controls the spacing L between catoptron 19 and catoptron 20, makes optical resonator lock laser beam longitudinal mode.In the present embodiment, transmitted light beam signal feedback control both optical resonator cavity locking laser beam longitudinal mode is adopted.
Theoretical according to optical resonator, when optical resonator locking laser beam longitudinal mode, laser beam 2c forms standing wave in this resonator cavity, and endovenous laser bundle 2c energy is enhanced.In actual locked mode process, due to impacts such as laser power fluctuation, FEEDBACK CONTROL response speed, control circuit noise and piezoelectric ceramics displacement accuracies, optical resonator longitudinal mode can not exact matching external incident laser beam longitudinal mode completely, namely there is longitudinal mode matching error, but in fact because longitudinal mode has certain width, it is little that longitudinal mode matching error strengthens influential effect to endovenous laser beam energy.
For common lasers, its outgoing laser beam is generally many longitudinal modes, and longitudinal mode spacing (i.e. frequency interval) is:
Wherein n ' L
laserfor the light path in laser instrument internal resonance chamber, n ' is the refractive index of laserresonator interior media; Equally, external optical resonator cavity longitudinal mode spacing is:
Therefore, if the spacing L between adjustment catoptron 19 and catoptron 20, nL=q (n ' L is met
laser) relation, wherein q is integer, and namely laser beam longitudinal mode spacing is the integral multiple of optical resonator longitudinal mode spacing, and optical resonator can be made to lock whole laser beam longitudinal mode; Be non-integral situation for q, optical resonator lock part laser beam longitudinal mode or locking zero laser beam longitudinal mode can only be made.In a word, for common Multi-Longitudinal Mode laser, adjustable optical resonator locks at least one laser beam longitudinal mode.
Hollow reflective pipe 21 is a hollow pipe, see accompanying drawing 4, and its internal diameter size D
hW=1mm is greater than optical resonance endovenous laser spot size D
laser=0.37mm (centered by intensity 1/e
2spot diameter); Hollow reflective pipe 21 is parallel to laser propagation direction and is positioned in the optical resonator that catoptron 19 and catoptron 20 form, and its central axis is with laser beam 2c central axes, see accompanying drawing 5.Therefore, laser beam 2c enters from hollow reflective pipe one end, penetrates from the other end, pars intramuralis rectilinear propagation in hollow reflective pipe 21, can not touch hollow reflective pipe 21 inwall, be in Free propagation state, ensure that lower laser energy loss percentage, see accompanying drawing 5.
Laser beam 2c, in hollow reflective pipe 21 fro inside communication process, produces scattered light 9, comprising Rayleigh scattering light and Raman diffused light etc. with the gas molecule effect being full of hollow reflective pipe.In the present embodiment one, hollow reflective pipe 21 is quartz glass tube, its inwall is coated with the silverskin to scattered light high reverse--bias, its benefit is: can effectively stop scattered light 9 to be dispersed to free space, the scattered light that hollow reflective pipe inside is produced is exported by hollow reflective pipe two ends after multiple reflections, therefore the collection efficiency of scattered light is significantly enhanced, see accompanying drawing 6a.Implementation as hollow reflective pipe 21 comprises: 1. hollow pipe inwall be coated with to scattered light reflection metallic diaphragm or optical medium rete.2. the outer wall of transparent glass tube be coated with to scattered light reflection metallic diaphragm or optical medium rete, as shown in Figure 6 b; 3. hollow pipe material itself is to scattered light reflection, as silver pipe.
Wherein, see accompanying drawing 6a-6b, the exit direction of scattered light 9a is contrary with incoming laser beam 2b direction, is called rear orientation light; The exit direction of scattered light 9b is identical with incoming laser beam 2b direction, is called forward scattering light.
Wherein, see accompanying drawing 7, as a kind of specific implementation of piezoelectric ceramics control module 7, comprise Signal acquiring and processing module 28, piezoelectric ceramic actuator 30.Signal acquiring and processing module 28 is provided with modulus (A/D) converter, cpu chip and digital-to-analogue (D/A) converter, the output signal 6, CPU that modulus (A/D) converter accepts photodetector 5 carries out computing to the digital signal collected; CPU exports digital quantity voltage signal to digital-to-analogue (D/A) converter, and analog voltage signal 29 outputs in piezoelectric ceramic actuator 30 by digital-to-analogue (D/A) converter; Piezoelectric ceramic actuator 30 is a voltage amplification module, and it exports as Piezoelectric Ceramic voltage 8, and in this embodiment, the voltage amplification factor of piezoelectric ceramic actuator 30 is 60 times.
Wherein, see accompanying drawing 8, as a kind of specific implementation of scattered light gathering-device 10, comprise lens 31, optical filter 32 and lens 33.Lens 31 are for collimating scattered light; Optical filter 32 is for veiling glare composition in isolated scattered light, and as Rayleigh scattering light, it is to Raman scattering Transmission light; Lens 33 are for converging to Raman scattering light signal in fibre bundle 11.Lens 31 and lens 33 form an imaging optical path, and imaging object is the end face of hollow reflective pipe 21, and its imaging magnification depends on the ratio of two focal lengths of lens, i.e. f
33: f
31; F in the present embodiment one
33=f
31, magnification is 1, therefore the picture that obtained by this imaging optical path of scattered light 9, i.e. Raman signal hot spot, its size is identical with hollow reflective pipe 21 internal diameter size.In the present embodiment one, hollow reflective pipe 21 internal diameter is 1mm, so Raman signal spot diameter is 1mm.
Wherein, as a kind of specific implementation of fibre bundle 11, the receiving end 11a of fibre bundle is circular, and its diameter is 1mm, and wherein containing 7 optical fiber, simple optical fiber diameter is 0.32mm; Fibre bundle output terminal 11b is rectangle, and it is of a size of 0.32mm × 2.5mm, and wherein 7 optical fiber arrangements are in a row.Effective object of this fiber bundle structure parameter is adopted to be: 1. fibre bundle receiving end 11a can efficient reception Raman scattering hot spot (its diameter is similarly 1mm).2. reduce the width of fibre bundle 11 output terminal, therefore can increase the spectrally resolved ability of spectrometer 12.
The overall workflow of the utility model embodiment one is: laser module 1 Emission Lasers bundle 2b, laser beam 2b are input to gas sample room 4 through small size catoptron 3 reflection; Gas sample room 4 comprises an optical resonator (being made up of catoptron 19 and catoptron 20) and a hollow reflective pipe 21; Detected gas flows to hollow reflective pipe 21 by draft tube 26.Laser beam 2d, through optical resonator, is received by photodetector 5.Photodetector 5, piezoelectric ceramics control module 7 and piezoelectric ceramics 24 form a resonator cavity clamping system, control both optical resonator cavity locking laser beam longitudinal mode.Laser beam 2c forms standing wave in optical resonator, and laser beam energy is enhanced; High energy laser beam, at hollow reflective pipe 21 internal communication, produces scattered light 9 with gas molecule effect; This scattered light, through hollow reflective pipe 21 inwall multiple reflections, is exported by hollow reflective pipe two ends.Wherein, rear orientation light 9a, by after catoptron 19, passes through by around small size catoptron 3, is input in scattered light gathering-device 10; Raman diffused light is assembled and is input in fibre bundle 11 by scattered light gathering-device 10; Fibre bundle 11 connects with spectrometer 12, is finally obtained the Raman spectrum of measured gas by spectrometer analysis.
In the present embodiment one, be provided with one the 45 degree small size catoptrons 3 placed between scattered light gathering-device 10 and gas sample room 4, its effect realizes laser input light path to collect light path separation with rear orientation light.
As the contrast of the present embodiment one, see accompanying drawing 9, for optical resonator strengthens a kind of implementation of Raman spectroscopy.In intra resonant cavity, laser beam on travel path and gas effect produce Raman diffused light, but scattered light gathering-device 10 only can be collected length and is about light signal on 1mm path.
In the present embodiment one, have employed two kinds of modes and Raman scattering is strengthened: 1. optical resonator is to the enhancing of laser energy.2. the enhancing of hollow reflective pipe 21 pairs of Raman scattering light collection efficiencies.The length of hollow reflective pipe 21 is 175mm, and the Raman signal therefore produced in this length paths all can be collected, its intensification factor about 175 times.
Embodiment two
A kind of laser Raman spectroscopy gas analyzer adopting forward scattering collection mode that accompanying drawing 10 provides for the utility model embodiment two, comprises laser module 1, catoptron 35, gas sample room 4, photodetector 5, piezoelectric ceramics control module 7, dichroic mirror 34, scattered light gathering-device 10, fibre bundle 11 and spectrometer 12.
The utility model embodiment two and embodiment one are distinguished and are: 1., in embodiment two, collected signal is forward scattering light 9b.Dichroic mirror 34 is separated with shoot laser bundle 2d for realizing forward direction Raman diffused light collection light path; This dichroic mirror is a short-pass dichroic mirror, its to optical maser wavelength through, Raman diffused light is reflected.2., in embodiment two, adopt laser beam reflection optical signal feedback control both optical resonator cavity locking laser beam longitudinal mode.One the 45 degree catoptrons 35 (reflectivity is 1%, and transmissivity is 99%) placed are provided with between laser module 1 and gas sample room 4; The laser beam 2e reflected from optical resonator reflects through catoptron 35, is finally received by photodetector 5.
The overall workflow of the utility model embodiment two is: laser module 1 Emission Lasers bundle 2b, laser beam 2b are input to gas sample room 4 through after catoptron 35; Gas sample room 4 comprises an optical resonator (being made up of catoptron 19 and catoptron 20) and a hollow reflective pipe 21; Detected gas flows to hollow reflective pipe 21 by draft tube 26.Laser beam 2e is by optical resonance cavity reflection and returned by original route, then is reflected by catoptron 35, is finally received by photodetector 5.Photodetector 5, piezoelectric ceramics control module 7 and piezoelectric ceramics 24 form a resonator cavity clamping system, control both optical resonator cavity locking laser beam longitudinal mode.Laser beam 2c forms standing wave in optical resonator, and laser beam energy is enhanced; High energy laser beam, at hollow reflective pipe 21 internal communication, produces scattered light 9 with gas molecule effect; This scattered light, through hollow reflective pipe 21 inwall multiple reflections, is exported by hollow reflective pipe two ends.Wherein, forward direction Raman diffused light, by after catoptron 20, is reflected by dichroic mirror 34, is finally input in scattered light gathering-device 10; Raman diffused light is assembled and is input in fibre bundle 11 by scattered light gathering-device 10; Fibre bundle 11 connects with spectrometer 12, is finally obtained the Raman spectrum of measured gas by spectrometer analysis.
Embodiment three
A kind of gas sample room 4 that accompanying drawing 11a provides for the utility model embodiment three, the utility model embodiment three and embodiment one are distinguished and are:
1. in embodiment three, be provided with a slant reflection mirror 36 between catoptron 19 and hollow reflective pipe 21, its center is provided with an aperture (diameter D
36=1mm), laser beam 2c can from wherein passing freely through; Figure 13 a is slant reflection mirror 36 schematic diagram, and wherein S36 is reflecting surface; S36 tilts relative to laser beam 2c; Slant reflection mirror 36 is separated with laser beam 2c for realizing scattered light 9.The reflecting surface S36 of slant reflection mirror 36 also can be curved surface, as shown in Figure 11 b and Figure 13 b, from the scattered light 9 of hollow reflective pipe 21 outgoing after slant reflection mirror 36 reflects, becomes collimated light.
2. cavity 22 is provided with an optical window 38, from the scattered light 9 of hollow reflective pipe 21 outgoing after slant reflection mirror 36 reflects, is penetrated by optical window 38.
3. be provided with a concave mirror 37 between catoptron 20 and hollow reflective pipe 21, its center is provided with an aperture (diameter D
37=1mm), laser beam 2c can from wherein passing freely through.Figure 14 is concave mirror 37 schematic diagram, wherein reflecting surface S37 is curved surface, its center of curvature is at hollow reflective pipe 21 its right end face place, its effective benefit is: from the forward scattering light 9b of hollow reflective pipe 21 outgoing after concave mirror 37 reflects, turn back in hollow reflective pipe 21, last forward scattering light 9b and rear orientation light 9a together penetrates, because this enhancing scattered light 9 signal intensity that hollow reflective pipe 21 left end face exports from hollow reflective pipe 21 left end face.
In the present embodiment three, another effective benefit of slant reflection mirror 36 and concave mirror 37 is: prevent Diffusion of gas stream from arriving on (optical resonator) catoptron 19 and (optical resonator) catoptron 20, in minimizing gas, suspended particle is to the pollution of optical resonance resonant reflec-tors.Gas flowing path to be shown in accompanying drawing 11a-11c shown in thick arrow.For preventing air stream contamination (optical resonator) catoptron, equally also can arrange an isolated body 39 between hollow reflective pipe and (optical resonator) catoptron, its center is provided with an aperture (diameter D
37=1mm), laser beam 2c can from wherein passing freely through, as shown in fig. live.
A kind of laser Raman spectroscopy gas analyzer that accompanying drawing 12 provides for the utility model embodiment three, the utility model embodiment three and embodiment one are distinguished and are: laser module 1 Emission Lasers bundle 2b is directly inputted in gas sample room 4; Scattered light gathering-device 10 is located at side, gas sample room 4, for collecting the scattered light 9 from optical window 38 outgoing.
Embodiment four
A kind of gas sample room 4 that accompanying drawing 15 provides for the utility model embodiment four, the utility model embodiment four and embodiment three are distinguished and are: be 1. provided with 36, one, two slant reflection mirrors between catoptron 19 and hollow reflective pipe 21; Another is between catoptron 20 and hollow reflective pipe 21.2. cavity 22 is provided with two optical windows 38, lays respectively at cavity 22 both sides.
From rear orientation light 9a and the forward scattering light 9b of the injection of hollow reflective pipe 21 two ends, reflect through these two slant reflection mirrors 36, penetrate from two optical windows 38 respectively.A kind of forward direction-backward Raman scattering light collecting system that accompanying drawing 16 provides for the present embodiment four, be wherein provided with two scattered light gathering-devices 10 with respectively with two fibre bundles 11 that it is connected; With one end 11c that spectrometer 12 connects, two fibre bundles 11 (containing 7 optical fiber) synthesize a fibre bundle, and all 14 optical fiber are arranged in a row together.
Claims (18)
1. a gas sample room, is characterized in that, described gas sample room comprises optical resonator and a hollow reflective pipe, and optical resonator is made up of optical resonance resonant reflec-tors; Hollow reflective Guan Weiyi root holds gas to be analyzed and optical resonance endovenous laser bundle enters the hollow pipe that the other end penetrates from one end, to be placed in optical resonator between two optical resonance resonant reflec-tors, optical resonance endovenous laser bundle, at hollow reflective inside pipe wall internal communication, produces scattered light with gas molecule effect to be analyzed in pipe; Scattered light is inner through tube wall multiple reflections at hollow reflective pipe, penetrates from hollow reflective pipe two ends.
2. gas sample room as claimed in claim 1, it is characterized in that, described optical resonator is made up of two optical resonance resonant reflec-tors.
3. gas sample room as claimed in claim 1, it is characterized in that, described gas sample room also comprises the piezoelectric ceramics for adjusting distance between optical resonance resonant reflec-tors.
4. gas sample room as claimed in claim 2, it is characterized in that, described gas sample room also comprises the piezoelectric ceramics for adjusting distance between optical resonance resonant reflec-tors.
5. the gas sample room as described in one of claim 1-4, is characterized in that, described hollow reflective inside pipe wall is coated with metallic reflection rete or the optical medium rete to Raman diffused light reflection.
6. the gas sample room as described in one of claim 1-4, is characterized in that, described hollow reflective tube material itself is to Raman scattering optical transparency, and hollow reflective pipe outer wall is coated with metallic reflection rete or the optical medium rete to Raman diffused light reflection.
7. the gas sample room as described in one of claim 1-4, is characterized in that, described hollow reflective tube material itself reflects Raman diffused light.
8. the gas sample room as described in one of claim 1-4, it is characterized in that, be provided with the concave mirror that scattered light is reflected back hollow reflective pipe inside by an energy between described hollow reflective pipe one end and adjacent optical cavity mirror, it have the hole that a laser beam can be passed.
9. the gas sample room as described in one of claim 1-4, it is characterized in that, be provided with the isolated body that prevents air stream contamination optical resonance resonant reflec-tors between described hollow reflective pipe one end and adjacent optical cavity mirror, it have the hole that a laser beam can be passed.
10. the gas sample room as described in one of claim 1-4, it is characterized in that, be provided with a slant reflection mirror that the scattered light of hollow reflective pipe outgoing can be reflected between described hollow reflective pipe one end and adjacent optical cavity mirror, it have the hole that a laser beam can be passed.
11. gas sample rooms as claimed in claim 10, it is characterized in that, be provided with a slant reflection mirror that the scattered light of hollow reflective pipe outgoing can be reflected between the described hollow reflective pipe other end and adjacent optical cavity mirror, it have the hole that a laser beam can be passed.
12. gas sample rooms as claimed in claim 10, it is characterized in that, be provided with the concave mirror that scattered light is reflected back hollow reflective pipe inside by an energy between the described hollow reflective pipe other end and adjacent optical cavity mirror, it have the hole that a laser beam can be passed.
13. gas sample rooms as claimed in claim 10, it is characterized in that, be provided with the isolated body that prevents air stream contamination optical resonance resonant reflec-tors between the described hollow reflective pipe other end and adjacent optical cavity mirror, it have the hole that a laser beam can be passed.
14. gas sample rooms as described in one of claim 1-4, it is characterized in that, described hollow reflective pipe one end is provided with draft tube and the other end is provided with escape pipe.
15. gas sample rooms as claimed in claim 10, is characterized in that, described in
Hollow reflective pipe one end is provided with draft tube and the other end is provided with escape pipe.
16. gas sample rooms as claimed in claim 10, is characterized in that, described gas sample chamber is provided with can through of a scattered light optical window.
17. gas sample rooms as claimed in claim 11, is characterized in that, described gas sample chamber is provided with can through two of a scattered light optical window.
18. gas sample rooms as claimed in claim 1, is characterized in that, described optical resonator is made up of three or four optical resonance resonant reflec-tors.
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| CN201520127774.0U CN204666513U (en) | 2015-03-05 | 2015-03-05 | Gas sample room |
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| CN201520127774.0U CN204666513U (en) | 2015-03-05 | 2015-03-05 | Gas sample room |
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Effective date of registration: 20160930 Address after: 778, room 304, building 8, 305 Asia Pacific Road, Nanhu District, Jiaxing, Zhejiang, Jiaxing, 314033 Patentee after: Jiaxing radium light Instrument Technology Co., Ltd. Address before: Yushan town of Kunshan City Road 215301 Suzhou city of Jiangsu province and fengyasong building 18 room 1306 Patentee before: Chen Liping Patentee before: Pei Shiyou |