CN103487401B - With the long light path gas-detecting device of micro-adjusting mechanism - Google Patents
With the long light path gas-detecting device of micro-adjusting mechanism Download PDFInfo
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- CN103487401B CN103487401B CN201310441096.0A CN201310441096A CN103487401B CN 103487401 B CN103487401 B CN 103487401B CN 201310441096 A CN201310441096 A CN 201310441096A CN 103487401 B CN103487401 B CN 103487401B
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Abstract
With the long light path gas-detecting device of micro-adjusting mechanism, comprise the container that inside has sealed gas chamber, the first concave mirror and the second concave mirror that the surface of emission is oppositely arranged is provided with in the air chamber of container, first concave mirror side is provided with fine adjustment type catoptron, container is provided with the directional light transmitter and photoelectric sensor that are positioned at the first concave mirror both sides, directional light transmitter closes on fine adjustment type catoptron, and the light source transmitting terminal of directional light transmitter and the light receiver end of photoelectric sensor extend in air chamber.The present invention adopts the method for multiple reflections, reduces the volume of air chamber, improves the detectability of instrument.The present invention uses fine adjustment type catoptron, reflected light can be changed path and again reflect back, and can effectively avoid normal pitch effect while the effective light path of growth.
Description
Technical field
The invention belongs to precision processing technology and optical technical field, particularly one is applied to based on TDLAS(tunable diode laser absorption spectroscopy) etc. the long light path gas-detecting device of band micro-adjusting mechanism of gas-phase spectrum analytical instrument.
Background technology
Along with the development of the industries such as China's Industry Control, Ferrous Metallurgy, petrochemical complex, environmental protection, biochemical pharmacy, electric power, Aero-Space, need to strengthen further carrying out Monitoring and Controlling to the production run in these fields.This just has higher requirement to the index such as accuracy of detection, response time, system stability of use procedure analyser in production run.The on-line analysis of gaseous substance concentration be widely used in these industries production run monitoring, production technology optimization, fall dirtyly to analyze, energy gas reclaims the aspects such as controls, environment monitoring, is the importance of raising to the analysis ability of production run.
TDLAS(TunableDiodeLaserAbsorptionSpectroscopy) be the abbreviation of t unable filter, be usually also called tunable diode laser absorption spectroscopy technology.Compared with tradition not light splitting infrared technique spectral technique, TDLAS technology has a lot of remarkable advantage:
(1) monochromaticity utilizing semiconductor laser good, " single line spectrum " technology of employing avoids background gas to absorb interference;
(2) semiconductor laser wavelength tunability is utilized to solve dust, form pollution to the impact of measuring;
(3) without the need to pre-service of sampling, fast response time, is convenient to control production run;
(4) in instrument internal measuring process, timing automatic is demarcated, without the need to manual demarcation;
(5) can auto modification environment temperature, pressure change on measure impact;
Therefore, based on the laser gas concentration analyzer of TDLAS technology can meet that spectrochemical analysis for gases and gas concentration analyze preferably in the urgent need to.
Based on the portable laser gas concentration analyzer of TDLAS technology, the detection limit of instrument and the optical path length direct proportionality of inner plenum, the detection limit of the longer instrument of light path is lower, and instrument reaction is sensitiveer.But in the unreflecting situation of light path, light path longer instrument gas pond volume is larger, is often inconvenient to carry.
Summary of the invention
The present invention, for solving the problems of the technologies described above, provides the long light path gas-detecting device of little, the portable band micro-adjusting mechanism of a kind of volume.
For achieving the above object, the long light path gas-detecting device of band micro-adjusting mechanism of the present invention, comprise the container that inside has sealed gas chamber, the first concave mirror and the second concave mirror that the surface of emission is oppositely arranged is provided with in the air chamber of container, first concave mirror side is provided with fine adjustment type catoptron, container is provided with the directional light transmitter and photoelectric sensor that are positioned at the first concave mirror both sides, directional light transmitter closes on fine adjustment type catoptron, and the light source transmitting terminal of directional light transmitter and the light receiver end of photoelectric sensor extend in air chamber.
Profile and the air chamber of described container are rectangular shape, first concave mirror, the second concave mirror, fine adjustment type catoptron, directional light transmitter and photoelectric sensor are gluing with container to be respectively connected, first concave mirror and the second concave mirror are located at the air chamber two ends along its length of container respectively, and the length of the second concave mirror is greater than the length of the first concave mirror.
Described directional light transmitter is collimating apparatus, and directional light transmitter is connected with end optical fiber flange plate by optical fiber, and the signal output part of photoelectric sensor is connected by the signal receiving end of data line with laser gas concentration analyzer; Tested gas is full of in described air chamber, the incident light that optical fiber sends forms parallel beam after directional light transmitter, parallel beam is first irradiated on the second concave mirror, parallel beam reflexes on the first concave mirror by the second concave mirror, parallel beam reflexes on the second concave mirror by the first concave mirror, parallel beam reflexes on fine adjustment type catoptron by the second concave mirror, parallel beam reflexes on the second concave mirror by fine adjustment type catoptron again, and parallel beam is finally reflexed to the light receiver end of photoelectric sensor by the second concave mirror.
Adopt technique scheme, the present invention uses directional light transmitter (collimating apparatus) that the light introduced by optical fiber is processed into parallel beam, and parallel beam is by projecting on micro-adjusting mechanism (fine adjustment type catoptron) after the first concave mirror in air chamber and the second concave mirror multiple reflections.Fine adjustment type catoptron is a very little level crossing, fine adjustment type catoptron can carry out 360 degree of adjustment to its angle when fixing, can change after parallel beam adjustment incident light incident angle and by reflected incident light to first concave mirror at air chamber two ends and the second concave mirror.Parallel rays is through fine adjustment type reflector alignment angle and after the first concave mirror and the second concave mirror, on final directive photoelectric sensor, signal is transported in laser gas concentration analyzer by photoelectric sensor, and laser gas concentration analyzer can be analyzed tested gas concentration.
When using of the present invention, end optical fiber flange plate is only needed to be connected to spectrometric instrument light source, parallel beam is at the first concave mirror, multiple reflections between the second concave mirror and micro-adjusting mechanism, final directive photoelectric sensor, light source through tested gas absorption is converted to electric signal by photoelectric sensor, and exports to laser gas concentration analyzer and analyze.
Because optical fiber core diameter is very thin, only have 10um, after collimating apparatus process, laser facula also only has about 100um.Slightly error during machining, light just can amplify at double along paths time error, and light is finally difficult to be received by photoelectric sensor.Even if use very accurate lathe to process, be also difficult to the requirement meeting light path precise positioning.The present invention is owing to using fine adjustment type catoptron, there is error, the first concave mirror and the second concave mirror in air chamber processing and bondingly there is error, collimating apparatus and bondingly there is error, photoelectric sensor is when existing error, still can adjust light path, make light be received photoelectric sensor and normally receive.
The present invention adopts the method for multiple reflections, reduces the volume of air chamber, improves the detectability of instrument.The present invention uses fine adjustment type catoptron, reflected light can be changed path and again reflect back, and can effectively avoid normal pitch effect while the effective light path of growth.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention;
Fig. 2 is parallel beam path schematic diagram of the present invention.
Embodiment
As shown in Figure 1, the long light path gas-detecting device of band micro-adjusting mechanism of the present invention, comprise the container 2 that inside has sealed gas chamber 1, the first concave mirror 3 and the second concave mirror 4 that the surface of emission is oppositely arranged is provided with in the air chamber 1 of container 2, first concave mirror 3 side is provided with fine adjustment type catoptron 5, container 2 is provided with the directional light transmitter 6 and photoelectric sensor 7 that are positioned at the first concave mirror 3 both sides, directional light transmitter 6 closes on fine adjustment type catoptron 5, and the light source transmitting terminal of directional light transmitter 6 and the light receiver end of photoelectric sensor 7 extend in air chamber 1.
Profile and the air chamber 1 of container 2 are rectangular shape, first concave mirror 3, second concave mirror 4, fine adjustment type catoptron 5, directional light transmitter 6 and photoelectric sensor 7 are connected with container 2 is gluing respectively, first concave mirror 3 and the second concave mirror 4 are located at air chamber 1 two ends along its length of container 2 respectively, and the length of the second concave mirror 4 is greater than the length of the first concave mirror 3.
Directional light transmitter 6 is collimating apparatus, and directional light transmitter 6 is connected with end optical fiber flange plate 9 by optical fiber 8, and the signal output part of photoelectric sensor 7 is connected with the signal receiving end of laser gas concentration analyzer 11 by data line 10.
As shown in Figure 2, tested gas is full of in air chamber 1, the incident light that optical fiber sends forms parallel beam after directional light transmitter 6, parallel beam is first irradiated on the second concave mirror 4, parallel beam reflexes on the first concave mirror 3 by the second concave mirror 4, parallel beam reflexes on the second concave mirror 4 by the first concave mirror 3, parallel beam reflexes on fine adjustment type catoptron 5 by the second concave mirror 4, parallel beam reflexes on the second concave mirror 4 by fine adjustment type catoptron 5 again, last light receiver end parallel beam being reflexed to photoelectric sensor 7 of the second concave mirror 4.
All parts in the middle of the present invention is existing mature technology, and concrete structure repeats no more.
Collimating apparatus outer end in the present invention, is drawn to outside gas cell by interfaces such as FC by Fiber connection.The minute surface of the first concave mirror 3 and the second concave mirror 4 is made up of low temperature shape-changing material, and surface gold-plating is to increase reflection potential.First concave mirror 3 and the second concave mirror 4 are concave mirror, so that when light reflection, the light dispersed are pooled directional light again.By multiple reflections, so that the gas passed in air chamber 1 of the longer distance of light.The narrow flat thin slice that fine adjustment type catoptron 5 is capable of reflecting light line by a slice forms, and the general surface gold-plating of this thin slice is to strengthen reflection potential.Photoelectric sensor 7 includes but not limited to relation by marriage gallium arsenic (ingaas), gallium phosphide (GaP), silicon (Si) and germanium (Ge) photodiode.Directional light transmitter 6 is collimating apparatus, and parasitic light can be converted to the device of directional light by other certainly also to comprise future.
Because optical fiber core diameter is very thin, only have 10um, after collimating apparatus process, laser facula also only has about 100um.Slightly error during machining, light just can amplify at double along paths time error, and light is finally difficult to be received by photoelectric sensor 7.Even if use very accurate lathe to process, be also difficult to the requirement meeting light path precise positioning.The present invention is owing to using fine adjustment type catoptron 5, there is error, the first concave mirror 3 and the second concave mirror 4 in air chamber 1 processing and bondingly there is error, collimating apparatus and bondingly there is error, photoelectric sensor 7 is when existing error, still can adjust light path, make light be received photoelectric sensor 7 and normally receive.
Claims (3)
1. be with the long light path gas-detecting device of micro-adjusting mechanism, it is characterized in that: comprise the container that inside has sealed gas chamber, the first concave mirror and the second concave mirror that the surface of emission is oppositely arranged is provided with in the air chamber of container, first concave mirror side be provided with can 360 ° rotate fine adjustment type catoptrons, container is provided with the directional light transmitter and photoelectric sensor that are positioned at the first concave mirror both sides, directional light transmitter closes on fine adjustment type catoptron, and the light source transmitting terminal of directional light transmitter and the light receiver end of photoelectric sensor extend in air chamber.
2. the long light path gas-detecting device of band micro-adjusting mechanism according to claim 1, it is characterized in that: profile and the air chamber of described container are rectangular shape, first concave mirror, the second concave mirror, fine adjustment type catoptron, directional light transmitter and photoelectric sensor are gluing with container to be respectively connected, first concave mirror and the second concave mirror are located at the air chamber two ends along its length of container respectively, and the length of the second concave mirror is greater than the length of the first concave mirror.
3. the long light path gas-detecting device of band micro-adjusting mechanism according to claim 1 and 2, it is characterized in that: described directional light transmitter is collimating apparatus, directional light transmitter is connected with end optical fiber flange plate by optical fiber, and the signal output part of photoelectric sensor is connected by the signal receiving end of data line with laser gas concentration analyzer; Tested gas is full of in described air chamber, the incident light that optical fiber sends forms parallel beam after directional light transmitter, parallel beam is first irradiated on the second concave mirror, parallel beam reflexes on the first concave mirror by the second concave mirror, parallel beam reflexes on the second concave mirror by the first concave mirror, parallel beam reflexes on fine adjustment type catoptron by the second concave mirror, parallel beam reflexes on the second concave mirror by fine adjustment type catoptron again, and parallel beam is finally reflexed to the light receiver end of photoelectric sensor by the second concave mirror.
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| CN104062251B (en) * | 2014-07-11 | 2018-06-26 | 刘颖东 | A kind of optical fibre transmission type long light path laser gas sensor using space reflection structure |
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| CN105758803A (en) * | 2016-04-28 | 2016-07-13 | 中钢集团武汉安全环保研究院有限公司 | Laser gas detection platform with multiple-reflection long-optical-path high-temperature sample chamber |
| EP3339837A1 (en) * | 2016-12-22 | 2018-06-27 | General Electric Technology GmbH | Miltipass gas cell with variable optical path lentgh and method for gas analysis |
| CN109709044A (en) * | 2018-12-29 | 2019-05-03 | 深圳供电局有限公司 | Assemble method, optics cavity and the optical gas absorbance pond of optics cavity |
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| CN113155769A (en) * | 2021-03-18 | 2021-07-23 | 重庆科技学院 | Tunable spectrum-based variable optical path gas chamber component detection system and method |
| CN113406001B (en) * | 2021-06-30 | 2022-07-01 | 广东感芯激光科技有限公司 | Photoelectric gas sensor probe and photoelectric gas detection device |
| CN115424505A (en) * | 2022-11-04 | 2022-12-02 | 中国航天三江集团有限公司 | Kilometer-level spectrum absorption simulation device and method with environment-controllable optical path adjustable |
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