CN113137931B - Spectrum confocal device and method capable of measuring surface shape or thickness - Google Patents
Spectrum confocal device and method capable of measuring surface shape or thickness Download PDFInfo
- Publication number
- CN113137931B CN113137931B CN202110457465.XA CN202110457465A CN113137931B CN 113137931 B CN113137931 B CN 113137931B CN 202110457465 A CN202110457465 A CN 202110457465A CN 113137931 B CN113137931 B CN 113137931B
- Authority
- CN
- China
- Prior art keywords
- lens group
- light
- focusing lens
- panel
- spectrum analyzer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention discloses a device and a method for measuring surface type or thickness through spectrum confocal, wherein the device comprises a multispectral light source, a focusing lens group, a collimating lens group, a spectroscope, a dispersion focusing lens group, an XY displacement platform, a focusing lens group and a spectrum analyzer, and has the characteristics of reasonable and concise structural design, capability of accurately measuring the thickness of a measured panel without contact and stable and reliable measurement; the method utilizes the interface reflection characteristic of a measured panel, focuses the surface of the measured panel in a dispersion focus range by adjusting an XY displacement platform, collects focused reflected light through a dispersion focusing lens group and focuses the focused reflected light on a spectrum analyzer, obtains a corresponding light intensity extreme value by processing through a computer connected with the spectrum analyzer, calculates the surface type or the thickness of the measured panel according to the displacement variation of the XY displacement platform in the time interval of the occurrence of the corresponding light intensity extreme value, and realizes non-contact and high-precision measurement.
Description
[ technical field ] A method for producing a semiconductor device
The invention relates to the field of front-edge optical detection, in particular to a device and a method for measuring the surface type or thickness through spectrum confocal.
[ background of the invention ]
With the progress of the prior art and the remarkable improvement of the process level, the demand for measuring the surface shape is more and more demanding. For example, products such as mobile phones or display panels are generally made of transparent materials, and the thickness of the products is developed towards the direction of becoming thinner and thinner, so that the products have excellent performances, higher light transmittance, smoother surface, stronger flexibility and better optical performance. Meanwhile, the technology for realizing the thickness measurement of the high-performance ultrathin transparent materials also needs higher precision requirements, the traditional contact type measurement method cannot be used for the new requirement of the thickness measurement of the thin mobile phone panel, and the contact type measurement is easy to scratch the thin mobile phone panel, so that the non-contact type measurement technology is an inevitable choice.
At present, the thickness of a mobile phone panel is mainly measured in a contact mode, and the direct contact measurement method can cause the problems of scratching and damage to materials and the like. The problems of small measuring range, uncertain position and difficult determination exist. From the aspect of measurement efficiency, the contact measurement is slow in speed, low in precision and large in measurement error. The mobile phone panel is made of transparent materials. High-end measuring equipment in this aspect is imported by most countries developed in the western world. The thickness measurement technology is a direct restriction factor for the product quality and the economic benefit of the transparent material. Therefore, it is necessary to develop a non-contact mobile phone panel measurement technique with proprietary intellectual property rights, and the applicant has developed and filed the present invention.
[ summary of the invention ]
The technical problem to be solved by the invention is to provide a device for measuring the surface shape or thickness through spectrum confocal, which has the characteristics of reasonable and concise structural design, convenient operation and use, capability of accurately measuring the surface shape or thickness of a panel to be measured without contact, and stability and reliability in measurement. In addition, the invention also provides a method for measuring the surface type or thickness by spectrum confocal, which utilizes the surface reflection characteristic of a measured panel to ensure that the measured surface is in the dispersion focus range of a dispersion focusing lens group in the axial moving process of an XY displacement platform, and simultaneously a light baffle plate is arranged in front of the dispersion focusing lens group to ensure that a detection beam is annular, so that a spectrum analyzer can effectively receive a specific spectrum signal reflected by the surface of the measured panel, and a computer connected with the spectrum analyzer correspondingly processes the specific spectrum signal to obtain a corresponding light intensity extreme value, therefore, the surface type or thickness is calculated according to the spectrum position where the light intensity extreme value of the XY displacement platform appears. Therefore, the invention can measure the surface shape or the thickness of the measured panel efficiently, accurately and contactlessly, effectively ensures the quality and performance of the products adopting the measured panel, has obvious economic and social benefits, and simultaneously has practical significance for the development of optical manufacturing, optical detection and other application fields.
In order to solve the technical problem, the device for measuring the surface type or thickness through spectrum confocal comprises a multispectral light source 1, a focusing lens group 2, a collimating lens group 4, a spectroscope 8, a dispersive focusing lens group 6 and an XY displacement platform 12, wherein the focusing lens group 9 and a spectrum analyzer 11 are sequentially arranged on the other side of the spectroscope 8. An illumination small hole 3 or an illumination optical fiber 17 is arranged between the focusing lens group 2 and the collimating lens group 4, and a detection small hole 10 for filtering is arranged between the focusing lens group 9 and the spectrum analyzer 11.
When the measurement is carried out, the measured panel 7 is positioned on the XY displacement platform 12, and the XY displacement platform 12 is adjusted to move axially so that the surface of the measured panel 7 coincides with the focal plane of the dispersive focusing lens group 6.
The multispectral light source 1 provides and emits a multispectral light beam.
The focusing lens group 2 is used for focusing light energy emitted by the multispectral light source 1 to the illuminating small hole 3 or the incident end of the illuminating optical fiber 17, and the illuminating small hole 3 or the incident end of the illuminating optical fiber 17 filters edge stray light to form a needed point light source.
The collimating lens group 4 is used to collimate the light passing through the illumination aperture 3 or the illumination fiber 17 into a parallel beam 14.
The spectroscope 8 is used for splitting light, two opposite sides of the spectroscope 8 are respectively provided with a collimating lens group 4 and a dispersion focusing lens group 6, and the third side of the spectroscope 8 is sequentially provided with a focusing lens group 9, a detection small hole 10 and a spectrum analyzer 11.
The focusing lens group 9 is used for focusing, when the reflected light on the surface of the panel 7 to be detected is collected by the dispersive focusing lens group 6, the reflected light passes through the spectroscope 8 and is focused on the detection small hole 10 by the focusing lens group 9, so that the optical spectrum analyzer 11 can detect the optical signal.
The dispersive focusing lens group 6 is used for focusing the illumination light beam split by the spectroscope 8 on the detected panel 7, reflecting the light focused on the surface of the detected panel 7, the dispersive focusing lens group 6 collects the reflected light reflected by the surface of the detected panel 7, the reflected light is separated and reflected on the focusing lens group 9 by the spectroscope 8, and the focusing lens group 9 is focused on the detection small hole 10, so that the spectrum analyzer 11 detects the optical signal.
The device for measuring the surface type or the thickness through spectrum confocal measurement is characterized in that a light blocking sheet 5 is arranged between the collimating lens group 4 and the beam splitter 8, or the light blocking sheet 5 is arranged between the beam splitter 8 and the dispersive focusing lens group 6, or the light blocking sheet 5 is arranged between the dispersive focusing lens group 6 and the XY displacement platform 12, and the light blocking sheet 5 is used for blocking central light of a light path to form an annular light beam so as to improve the precision of measuring the measured panel 7.
The invention also discloses a method for measuring the surface type or the thickness through spectrum confocal, which uses the device for measuring the surface type or the thickness through spectrum confocal and comprises the following specific steps:
s1, adjusting the multispectral light source 1, the focusing lens group 2, the illumination small hole 3 or the incident end and the emergent end of the illumination optical fiber 17, the collimating lens group 4, the spectroscope 8 and the dispersion focusing lens group 6 to enable the multispectral light source, the focusing lens group 9, the detection small hole 10 and the spectrum analyzer 11 to be correspondingly coaxial in height, and adjusting the spectroscope 8, the focusing lens group 9, the detection small hole 10 and the spectrum analyzer 11 to enable the multispectral light source, the focusing lens group 9, the illumination small hole 3 or the illumination optical fiber 17 to be correspondingly coaxial in height.
S2, the multispectral light source 1 is started, and incident light 13 emitted by the multispectral light source 1 is focused on the small illuminating hole 3 or the incident end of the illuminating optical fiber 17 through the focusing lens group 2 to form a point light source.
S3, the collimating lens group 4 changes the point light source passing through the lighting small hole 3 or the exit end of the lighting optical fiber 17 into light collimation parallel light beams 14 to be emitted, and then the light collimation parallel light beams 14 are split by the beam splitter 8 and then enter the dispersion focusing lens group 6.
S4, the dispersive focusing lens group 6 focuses the light collimated parallel light beam 14 after being split on the surface of the panel 7 to be detected, the light is reflected by the surface of the panel 7 to be detected, the dispersive focusing lens group 6 collects reflected light on the surface of the panel 7 to be detected, the reflected light on the surface of the panel 7 to be detected is split by the beam splitter 8 and then enters the focusing lens group 9, the reflected light is focused on the detection small hole 10 by the focusing lens group 9, the detection small hole 10 filters the incident reflected light, and the spectrum analyzer 11 correspondingly receives a light intensity signal reflected by the dispersive focusing lens group 6 from a focal plane.
S5, when the measured panel 7 is made of transparent materials, the XY displacement platform 12 on which the measured panel 7 is placed moves along the axial direction, the upper surface and the lower surface of the measured panel 7 are respectively overlapped with the focal plane of the dispersive focusing lens group 6 in the moving process, the optical spectrum analyzer 11 can receive optical signals reflected by the upper surface and the lower surface of the measured panel 7, a computer connected with the optical spectrum analyzer 11 processes the optical signals to obtain two light intensity extreme values, and the thickness of the measured panel 7 is calculated according to the displacement variation of the XY displacement platform 12 in the time interval of the two light intensity extreme values.
When the measured panel is made of non-transparent materials, the XY displacement platform 12 on which the measured panel 7 is placed moves along the axial direction, the upper surface of the measured panel 7 coincides with the focal plane of the dispersive focusing lens group 6 in the moving process, the optical spectrum analyzer 11 can receive optical signals reflected by the corresponding surface of the measured panel 7, a computer connected with the optical spectrum analyzer 11 processes the optical signals to obtain corresponding light intensity extreme values, and the surface type of the measured panel 7 is calculated according to the displacement variation of the XY displacement platform 12 in the time interval of the occurrence of the corresponding light intensity extreme values.
In step S3, the collimating lens group 4 changes the point light source into a collimated parallel light beam 14 to be emitted, the light blocking sheet 5 blocks the central light of the collimated parallel light beam 14 to form an annular light beam, the annular light beam is split by the beam splitter 8, and the annular light beam is emitted into the dispersive focusing lens group 6.
Or in step S3, the collimating lens group 4 converts the point light source into a light-collimated parallel beam 14, emits the light-collimated parallel beam 14 to be split by the beam splitter 8, and then the light blocking sheet 5 blocks the central light of the split light-collimated parallel beam 14 to form an annular light beam, and finally emits the annular light beam into the chromatic dispersion focusing lens group 6.
Or in step S3, the collimating lens group 4 converts the point light source into a light-collimated parallel light beam 14, emits the light-collimated parallel light beam through the beam splitter 8 for splitting, and then emits the light-collimated parallel light beam into the dispersive focusing lens group 6, and the light blocking sheet 5 blocks the central light of the light beam focused by the dispersive focusing lens group 6 to form an annular light beam which is focused on the corresponding surface of the panel 7 to be measured.
The invention further provides a device for measuring the surface type or thickness through spectrum confocal, which comprises a multispectral light source 1, a focusing lens group 2, a spectroscope 8, a collimating lens group 4, a dispersion focusing lens group 6 and an XY displacement platform 12, wherein the focusing lens group 9 and a spectrum analyzer 11 are sequentially arranged on the other side of the spectroscope 8. And an illumination small hole 3 or an illumination optical fiber 17 is arranged between the spectroscope 8 and the collimating lens group 4.
When the measurement is carried out, the measured panel 7 is positioned on the XY displacement platform 12, and the surface of the measured panel 7 is correspondingly coincided with the focal plane of the dispersive focusing lens group 6 by adjusting the axial movement of the XY displacement platform 12.
The multispectral light source 1 provides and emits a multispectral light beam.
The focusing lens group 2 is used for focusing light energy emitted by the multispectral light source 1, emitting the light energy to the upper spectroscope 8, emitting the light energy to the lighting small hole 3 or the lighting optical fiber 17 after light splitting to filter edge stray light to form a needed point light source, and emitting light beams emitted by the point light source to the collimating lens group 4.
The collimating lens group 4 is used to collimate the light passing through the illumination aperture 3 or the illumination fiber 17 into a parallel beam 14.
The spectroscope 8 is used for splitting light, two opposite sides of the spectroscope 8 are respectively provided with a focusing lens group 2 and a lighting small hole 3 or a lighting optical fiber 17, and the third side of the spectroscope 8 is sequentially provided with a focusing lens group 9 and a spectrum analyzer 11.
The focusing lens group 9 is used for focusing, when the reflected light on the surface of the panel 7 to be detected is collected by the dispersive focusing lens group 6, the reflected light passes through the collimating lens group 4 and the illumination small hole 3 or the illumination optical fiber 17 in sequence, and is focused by the focusing lens group 9 after passing through the light splitting mirror 8 so that the optical spectrum analyzer 11 can detect optical signals.
The dispersive focusing lens group 6 is used for focusing light beams on a measured panel 7 to be measured, reflecting the light focused on the surface of the measured panel 7, collecting the reflected light reflected by the surface of the measured panel 7 by the dispersive focusing lens group 6, enabling the reflected light to pass through the collimating lens group 4 and the illumination small hole 3 or the illumination optical fiber 17 in sequence, and focusing the reflected light by the focusing lens group 9 after passing through the beam splitter 8 so as to enable the spectrum analyzer 11 to detect optical signals.
The device for confocal measurement of the surface shape or thickness of the spectrum is characterized in that a detection small hole 10 for filtering is arranged between the focusing lens group 9 and the spectrum analyzer 11.
In the above-mentioned spectral confocal device for measuring the surface shape or thickness, a light-blocking sheet 5 is disposed between the collimating lens group 4 and the dispersive focusing lens group 6, and the light-blocking sheet 5 is used for blocking the central light of the light path to form an annular light beam, so as to improve the precision of measuring the measured panel 7.
The invention also provides a method for measuring the surface type or the thickness by spectrum confocal, which uses the device for measuring the surface type or the thickness by spectrum confocal and comprises the following specific steps:
s1, adjusting the multispectral light source 1, the focusing lens group 2, the spectroscope 8, the illumination small hole 3 or the illumination optical fiber 17 to enable the incident end and the emergent end, the collimating lens group 4 and the dispersion focusing lens group 6 to be correspondingly coaxial in height, and adjusting the spectroscope 8, the focusing lens group 9 and the spectrum analyzer 11 to be correspondingly coaxial in height.
S2, the multispectral light source 1 is started, and incident light 13 emitted by the multispectral light source 1 is split by the focusing lens group 2 and the beam splitter 8 in sequence and then focused on the incident end of the illumination small hole 3 or the illumination optical fiber 17 to form a point light source.
S3, the collimating lens group 4 changes the point light source passing through the lighting small hole 3 or the emergent end of the lighting optical fiber 17 into light collimation parallel light beams 14 to be emitted, and then the light collimation parallel light beams 14 are focused on the corresponding surface of the detected panel 7 through the dispersion focusing lens group 6.
S4, reflecting the surface of the panel 7 to be detected, collecting the reflected light on the surface of the panel 7 to be detected by the dispersion focusing lens group 6, enabling the reflected light on the surface of the panel 7 to be detected to pass through the collimating lens group 4, the illumination small hole 3 or the illumination optical fiber 17 in sequence, splitting the light by the beam splitter 8, then enabling the split light to enter the focusing lens group 9, and finally enabling the focusing lens group 9 to be focused on the spectrum analyzer 11, wherein the spectrum analyzer 11 correspondingly receives the light intensity signal reflected by the dispersion focusing lens group 6 from the focal plane.
S5, when the measured panel 7 is made of transparent materials, the XY displacement platform 12 on which the measured panel 7 is placed moves along the axial direction, the upper surface and the lower surface of the measured panel 7 are respectively overlapped with the focal plane of the dispersive focusing lens group 6 in the moving process, the optical spectrum analyzer 11 can receive optical signals reflected by the upper surface and the lower surface of the measured panel 7, a computer connected with the optical spectrum analyzer 11 processes the optical signals to obtain two light intensity extreme values, and the thickness of the measured panel 7 is calculated according to the displacement variation of the XY displacement platform 12 in the time interval of the two light intensity extreme values.
When the measured panel 7 is made of non-transparent material, the XY displacement platform 12 on which the measured panel 7 is placed moves along the axial direction, the upper surface of the measured panel 7 coincides with the focal plane of the dispersive focusing lens group 6 in the moving process, the optical spectrum analyzer 11 can receive optical signals reflected by the corresponding surface of the measured panel 7, a computer connected with the optical spectrum analyzer 11 processes the optical signals to obtain corresponding light intensity extreme values, and the surface type of the measured panel 7 is calculated according to the displacement variation of the XY displacement platform 12 in the time interval of the occurrence of the corresponding light intensity extreme values.
In step S3, the collimating lens group 4 converts the point light source into a collimated parallel light beam 14 to be emitted, the light blocking sheet 5 blocks the central light of the collimated parallel light beam 14 to form an annular light beam, and the annular light beam is focused on the corresponding surface of the panel 7 to be measured through the dispersive focusing lens group 6.
Compared with the prior art, the invention has the following advantages:
1. the device for measuring the surface type or the thickness through spectrum confocal has the characteristics of reasonable and compact structural design, simplicity and convenience in operation, and has the characteristics of high adaptability, high resolution and wide measurement range, so that the device is efficient and stable in measurement and high in precision.
2. The invention relates to a method for measuring surface type or thickness by spectrum confocal, which utilizes the reflection characteristic of the measured surface to ensure that the measured surface is in the dispersion focus range 15 of a dispersion focusing lens group in the axial moving process of an XY displacement platform, and simultaneously, a light barrier is arranged in front of the measured panel to ensure that a detection beam is an annular beam, so that a spectrum analyzer can effectively receive a specific spectrum signal reflected by the surface of the measured panel, and a computer connected with the spectrum analyzer correspondingly processes the specific spectrum signal to obtain a corresponding light intensity extreme value.
3. The method of the invention utilizes the interface reflection characteristic of the measured panel, and the upper surface and the lower surface of the measured panel made of transparent materials are positioned in the dispersion focus range 15 of the dispersion focusing lens group through the XY displacement platform in the axial movement process of the XY displacement platform, so that the optical spectrum analyzer can effectively receive optical signals reflected by the upper surface and the lower surface of the measured panel, and a computer connected with the optical spectrum analyzer processes the optical signals to obtain two corresponding light intensity extreme values, therefore, the thickness of the measured panel is calculated by calculating the displacement variation according to the interval of the XY displacement platform when the two light intensity extreme values appear, the thickness of the measured panel can be accurately measured without contact, and the adverse effects of scraping flowers or residual fingerprints on the measured panel caused by adopting contact measurement in the prior art are avoided.
[ description of the drawings ]
The following detailed description of embodiments of the invention is provided in conjunction with the appended drawings, in which:
FIG. 1 is a schematic view of the structure of the device of the present invention.
FIG. 2 is a schematic view of the ring light during use of the present invention.
FIG. 3 is a graph of normalized response intensity data before the addition of a light barrier in the apparatus of the present invention.
FIG. 4 is a graph of normalized response intensity data after the addition of a light barrier in the device of the present invention.
FIG. 5 is a schematic view of the device for measuring the thickness of the panel to be measured according to the present invention.
FIG. 6 is a second schematic structural diagram of an embodiment of the apparatus of the present invention.
FIG. 7 is a third schematic structural diagram of an embodiment of the apparatus of the present invention.
FIG. 8 is a fourth schematic structural diagram of an embodiment of the apparatus of the present invention.
FIG. 9 is a fifth schematic structural diagram of an embodiment of the apparatus of the present invention.
[ detailed description ] embodiments
Embodiments of the present invention will be described in detail below with reference to the accompanying drawings.
The thickness range of the panel to be measured for the mobile phone in the market at present is 0.3mm-0.5mm, so the device and the method can realize non-contact, high-precision and high-efficiency measurement of the thickness and the surface type of the panel to be measured.
As shown in fig. 1, 5, 6 and 7, the device for measuring the surface shape or thickness by spectral confocal measurement of the invention comprises a multispectral light source 1, a focusing lens group 2, a collimating lens group 4, a spectroscope 8, a dispersive focusing lens group 6 and an XY displacement platform 12, wherein the other side of the spectroscope 8 is provided with a focusing lens group 9 and a spectrum analyzer 11 in sequence. An illumination pinhole 3 or an illumination optical fiber 17 is arranged between the focusing lens group 2 and the collimating lens group 4, and a detection pinhole 10 for filtering is arranged between the focusing lens group 9 and the spectrum analyzer 11.
When the measurement is carried out, the measured panel 7 is positioned on the XY displacement platform 12, and the surface of the measured panel 7 is correspondingly coincided with the focal plane of the dispersive focusing lens group 6 by adjusting the XY displacement platform 12 to move axially.
The focusing lens group 2 is used for focusing light energy emitted by the multispectral light source 1 to the illuminating small hole 3 or the incident end of the illuminating optical fiber 17, and the illuminating small hole 3 or the incident end of the illuminating optical fiber 17 filters edge stray light to form a needed point light source.
The collimating lens group 4 is used to collimate the light passing through the illumination aperture 3 or the illumination fiber 17 into a parallel beam 14.
The spectroscope 8 is used for splitting light, two opposite sides of the spectroscope 8 are respectively provided with a collimating lens group 4 and a dispersion focusing lens group 6, and the third side of the spectroscope 8 is sequentially provided with a focusing lens group 9, a detection small hole 10 and a spectrum analyzer 11.
The focusing lens group 9 is used for focusing, when the reflected light on the surface of the detected panel 7 collected by the dispersive focusing lens group 6 passes through the spectroscope 8, the reflected light is focused on the detection small hole 10 by the focusing lens group 9, so that the optical signal is detected by the optical spectrum analyzer 11.
The dispersive focusing lens group 6 is used for focusing the illumination light beam split by the spectroscope 8 on the measured panel 7 to be measured, and reflecting the light focused on the surface of the measured panel 7, the dispersive focusing lens group 6 collects the reflected light reflected by the surface of the measured panel 7, the reflected light is reflected to the focusing lens group 9 by the spectroscope 8, and the focusing lens group 9 is focused on the detection small hole 10, so that the optical spectrum analyzer 11 detects the optical signal.
As shown in fig. 1 and 5, as an embodiment of the present invention, a light blocking sheet 5 is disposed between the collimating lens group 4 and the beam splitter 8. As shown in fig. 6, as another embodiment of the present invention, a light barrier 5 is disposed between the beam splitter 8 and the dispersive focusing lens group 6, and it is characterized in that the light barrier 5 is disposed behind the beam splitter 8, such a structure can ensure sensitivity to the surface tilt of the panel to be measured, and is convenient for adjustment in time.
As shown in fig. 7, as another embodiment of the present invention, a light blocking sheet 5 is provided between the dispersive focusing lens group 6 and the XY stage 12. The light blocking sheet 5 is used for blocking the central light of the light path to form an annular light beam so as to improve the precision of measuring the panel 7 to be measured. It features the light barrier 5 placed behind the dispersive focusing lens group 6, which is also sensitive to the measured panel surface tilt.
When measurement is carried out, the measured panel 7 is located on the XY displacement platform 12, the axial movement of the displacement platform 12 is adjusted to enable the measured panel 7 to be within the dispersion focus range 15 of the dispersion focusing lens group, reflected light on the surface of the measured panel 7 returns to the dispersion focusing lens group 6, then the reflected light is split by the spectroscope 8 and reflected to the focusing lens group 9, the focusing lens group 9 is focused on the detection small hole 10, light passing through the detection small hole 10 can enter the optical spectrum analyzer 11, the light path can be seen, the illumination small hole 3 or the incident end and the emergent end of the illumination optical fiber 17, the surface of the measured panel 7 and the detection small hole 10 are optical spectrum, only the focused light on the surface of the measured panel 7 is reflected in a confocal mode and focused on the detection small hole 10, and other optical spectrums which are not focused on the surface of the measured panel 7 can not effectively focus the light on the detection small hole 10 and then enter the optical spectrum analyzer 11.
The invention discloses a method for measuring the surface type or the thickness through spectrum confocal, which uses a device for measuring the surface type or the thickness through spectrum confocal as shown in figures 1, 5, 6 and 7 and comprises the following specific steps:
s1, adjusting the multispectral light source 1, the focusing lens group 2, the illumination small hole 3 or the incident end and the emergent end of the illumination optical fiber 17, the collimating lens group 4, the spectroscope 8 and the dispersion focusing lens group 6 to enable the multispectral light source, the focusing lens group 9, the detection small hole 10 and the spectrum analyzer 11 to be correspondingly coaxial in height, and adjusting the spectroscope 8, the focusing lens group 9, the detection small hole 10 and the spectrum analyzer 11 to enable the multispectral light source, the focusing lens group 9, the illumination small hole 3 or the illumination optical fiber 17 to be correspondingly coaxial in height.
S2, the multispectral light source 1 is started, and incident light 13 emitted by the multispectral light source 1 is focused on the small illuminating hole 3 or the incident end of the illuminating optical fiber 17 through the focusing lens group 2 to form a point light source.
S3, the collimating lens group 4 changes the point light source passing through the lighting small hole 3 or the exit end of the lighting optical fiber 17 into light collimation parallel light beams 14 to be emitted, and then the light collimation parallel light beams 14 are split by the beam splitter 8 and then enter the dispersion focusing lens group 6.
S4, the dispersive focusing lens group 6 focuses the light collimated parallel light beam 14 after being split on the surface of the panel 7 to be detected, the light is reflected by the surface of the panel 7 to be detected, the dispersive focusing lens group 6 collects reflected light on the surface of the panel 7 to be detected, the reflected light on the surface of the panel 7 to be detected is split by the beam splitter 8 and then enters the focusing lens group 9, the reflected light is focused on the detection small hole 10 by the focusing lens group 9, the detection small hole 10 filters the incident reflected light, and the spectrum analyzer 11 correspondingly receives a light intensity signal reflected by the dispersive focusing lens group 6 from a focal plane.
S5, as shown in FIG. 5, when the measured panel 7 is made of transparent material, the XY displacement platform 12 on which the measured panel 7 is placed moves along the axial direction, so that the upper surface and the lower surface of the measured panel 7 coincide with the focal plane of the dispersive focusing lens group 6 respectively in the moving process, the optical spectrum analyzer 11 can receive optical signals reflected by the upper surface and the lower surface of the measured panel 7, a computer connected with the optical spectrum analyzer 11 processes the optical signals to obtain two light intensity extreme values, and the thickness of the measured panel 7 is calculated according to the displacement variation of the XY displacement platform 12 in the time interval of the two light intensity extreme values.
As shown in fig. 1, 6 and 7, when the measured panel 7 is made of a non-transparent material, the XY displacement stage 12 on which the measured panel 7 is placed is moved in the axial direction, so that the focal plane of the dispersive focusing lens assembly 6 coincides with the upper surface of the measured panel 7 during the movement, the optical spectrum analyzer 11 can receive the optical signal reflected by the corresponding surface of the measured panel 7, the computer connected to the optical spectrum analyzer 11 processes the optical signal to obtain a corresponding optical intensity extreme value, and the surface shape of the measured panel 7 is calculated according to the displacement variation of the XY displacement stage 12 in the time interval in which the corresponding optical intensity extreme value appears.
As shown in fig. 1 and 5, in step S3, the collimating lens group 4 converts the point light source into a light-collimated parallel light beam 14, and emits the light-collimated parallel light beam 14, the light blocking sheet 5 blocks the central light of the light-collimated parallel light beam 14 to form an annular light beam, and the annular light beam is split by the beam splitter 8 and finally enters the chromatic dispersion focusing lens group 6.
As shown in fig. 6, in step S3, the collimating lens group 4 converts the point light source into a light-collimated parallel light beam 14, emits the light-collimated parallel light beam to be split by the beam splitter 8, and then the light blocking sheet 5 blocks the central light of the split light-collimated parallel light beam 14 to form an annular light beam, and finally emits the annular light beam into the dispersive focusing lens group 6.
As shown in fig. 7, in step S3, the collimating lens group 4 converts the point light source into a collimated parallel light beam 14, and then the collimated parallel light beam is split by the beam splitter 8 and then enters the chromatic dispersion focusing lens group 6, and the light blocking sheet 5 blocks the central light of the light beam focused by the chromatic dispersion focusing lens group 6 to form an annular light beam which is focused on the corresponding surface of the panel 7 to be measured.
As shown in fig. 8 and 9, the present invention further provides a device for measuring the surface shape or thickness by spectral confocal method, which comprises a multispectral light source 1, a focusing lens group 2, a beam splitter 8, a collimating lens group 4, a dispersive focusing lens group 6 and an XY displacement platform 12, which are sequentially arranged for providing and emitting multispectral light beams, wherein the focusing lens group 9 and a spectrum analyzer 11 are sequentially arranged on the other side of the beam splitter 8. An illumination small hole 3 or an illumination optical fiber 17 is arranged between the spectroscope 8 and the collimating lens group 4.
When the measurement is carried out, the measured panel 7 is positioned on the XY displacement platform 12, and the XY displacement platform 12 is adjusted to move axially so that the surface of the measured panel 7 is correspondingly coincided with the focal plane of the dispersive focusing lens group 6.
The focusing lens group 2 is used for focusing light energy emitted by the multispectral light source 1, emitting the light energy to the upper spectroscope 8, emitting the light energy to the lighting small hole 3 or the lighting optical fiber 17 after light splitting to filter edge stray light to form a needed point light source, and emitting light beams emitted by the point light source to the collimating lens group 4.
The collimating lens group 4 is used to collimate the light passing through the illumination aperture 3 or the illumination fiber 17 into a parallel beam 14.
The spectroscope 8 is used for splitting light, two opposite sides of the spectroscope 8 are respectively provided with a focusing lens group 2 and a lighting small hole 3 or a lighting optical fiber 17, and the third side of the spectroscope 8 is sequentially provided with a focusing lens group 9 and a spectrum analyzer 11.
The focusing lens group 9 is used for focusing, when the reflected light on the surface of the panel 7 to be detected is collected by the dispersive focusing lens group 6, the reflected light passes through the collimating lens group 4 and the illumination small hole 3 or the illumination optical fiber 17 in sequence, and is focused by the focusing lens group 9 after passing through the light splitting mirror 8 so that the optical spectrum analyzer 11 can detect optical signals.
The dispersive focusing lens group 6 is used for focusing light beams on a measured panel 7 to be measured, reflecting the light focused on the surface of the measured panel 7, collecting the reflected light reflected by the surface of the measured panel 7 by the dispersive focusing lens group 6, enabling the reflected light to pass through the collimating lens group 4 and the illumination small hole 3 or the illumination optical fiber 17 in sequence, and focusing the reflected light by the focusing lens group 9 after passing through the beam splitter 8 so as to enable the spectrum analyzer 11 to detect optical signals.
A detection small hole 10 for filtering is arranged between the focusing lens group 9 and the spectrum analyzer 11.
In order to improve the precision of measuring the panel 7 to be measured, a light barrier 5 is arranged between the collimating lens group 4 and the dispersive focusing lens group 6, and the light barrier 5 is used for blocking central light rays of a light path to form an annular light beam.
As shown in fig. 8 and 9, the beam splitter 8 is disposed in front of the collimating lens 4, and in this way, the collimating lens 4, the light barrier 5 and the dispersive focusing lens 6 can be designed jointly to reduce the cost.
As shown in fig. 9, as another embodiment of the present invention, it is characterized in that the illumination fiber 17 is used to transmit the light radiation, and the illumination fiber 17 replaces the function of the illumination aperture 3, such a form can jointly design the collimating lens 4, the light barrier 5, and the dispersive focusing lens 6 to reduce the cost, and the illumination fiber 17 can be used to transmit a long distance without electromagnetic interference, which is beneficial to realize long-distance measurement.
The invention also provides a method for measuring the surface shape or thickness through spectrum confocal, which uses a device for measuring the surface shape or thickness through spectrum confocal as shown in figures 8 and 9 and comprises the following specific steps:
s1, adjusting a multispectral light source 1, a focusing lens group 2, a spectroscope 8, a lighting small hole 3 or a lighting optical fiber 17 incident end and emergent end, a collimating lens group 4 and a dispersion focusing lens group 6 to enable the multispectral light source, the focusing lens group 9 and the spectroscope 11 to be correspondingly coaxial in equal height, and adjusting the spectroscope 8, the focusing lens group 9 and the spectroscope 11 to be correspondingly coaxial in equal height.
S2, the multispectral light source 1 is started, incident light 13 emitted by the multispectral light source 1 is split by the focusing lens group 2 and the spectroscope 8 and then focused on the illuminating small hole 3 or the incident end of the illuminating optical fiber 17 to form a point light source.
S3, the collimating lens group 4 changes the point light source passing through the lighting small hole 3 or the emergent end of the lighting optical fiber 17 into light collimation parallel light beams 14 to be emitted, and then the light collimation parallel light beams 14 are focused on the corresponding surface of the detected panel 7 through the dispersion focusing lens group 6. In order to provide measurement accuracy, the collimating lens group 4 converts the point light source into a light-collimated parallel beam 14 to be emitted, the light blocking sheet 5 blocks the central light of the light-collimated parallel beam 14 to form an annular beam, and the annular beam is focused on the corresponding surface of the panel 7 to be measured through the dispersive focusing lens group 6.
S4, reflecting the surface of the panel 7 to be detected, collecting the reflected light on the surface of the panel 7 to be detected by the dispersion focusing lens group 6, enabling the reflected light on the surface of the panel 7 to be detected to pass through the collimating lens group 4, the illumination small hole 3 or the illumination optical fiber 17 in sequence, splitting the light by the beam splitter 8, then enabling the split light to enter the focusing lens group 9, and finally enabling the focusing lens group 9 to be focused on the spectrum analyzer 11, wherein the spectrum analyzer 11 correspondingly receives the light intensity signal reflected by the dispersion focusing lens group 6 from the focal plane.
S5, when the measured panel 7 is made of transparent materials, the XY displacement platform 12 on which the measured panel 7 is placed moves along the axial direction, the upper surface and the lower surface of the measured panel 7 are respectively overlapped with the focal plane of the dispersive focusing lens group 6 in the moving process, the optical spectrum analyzer 11 can receive optical signals reflected by the upper surface and the lower surface of the measured panel 7, a computer connected with the optical spectrum analyzer 11 processes the optical signals to obtain two light intensity extreme values, and the thickness of the measured panel 7 is calculated according to the displacement variation of the XY displacement platform 12 in the time interval of the two light intensity extreme values.
As shown in fig. 8 and 9, when the measured panel 7 is made of a non-transparent material, the XY displacement stage 12 on which the measured panel 7 is placed moves in the axial direction, so that the upper surface of the measured panel 7 coincides with the focal plane of the dispersive focusing lens assembly 6 during the movement, the optical spectrum analyzer 11 can receive the optical signal reflected by the corresponding surface of the measured panel 7, the computer connected to the optical spectrum analyzer 11 processes the optical signal to obtain a corresponding optical intensity extreme value, and the surface shape of the measured panel 7 is calculated according to the displacement variation of the XY displacement stage 12 in the time interval in which the corresponding optical intensity extreme value appears.
The multispectral light source 1 is used for providing and emitting multispectral light beams, and belongs to an illumination light source in the invention. The illumination source is an important component of the confocal optical system. In the whole optical system of the present invention, the light beam emitted from the illumination light source is required to have a high degree of collimation, and because the number of elements in the optical system is large, the attenuation effects of absorption, scattering and the like of the light energy are not negligible, the energy output power of the illumination light source is required to have stable and efficient characteristics, so as to ensure that the optical spectrum analyzer 11 can receive the optical signal with sufficient intensity. The above factors are considered comprehensively, a radiation source with a small divergence angle and good monochromaticity is selected as a light source, and the embodiment of the invention selects blue laser with an output wavelength to excite the fluorescent powder to generate white light output.
The focusing lens group 2 is used for focusing light beams of the light source, focusing light rays to the illuminating small hole 3 or the incident end of the illuminating optical fiber 17 to filter stray light at the edge to form a point light source.
As shown in fig. 2, collimated light 102, 104, 114, 115 is focused by the dispersive focusing lens group 6, and light of different wavelengths is focused at different positions 116, 117 due to chromatic dispersion. The ring-shaped light beams 108, 109, 110, 111 focused in the focal point 116 can all pass through the illumination aperture 3, while the light beams 105, 106, 112, 113 of the other spectrum, if no light barrier 5 is present, still pass through the illumination aperture 3 for light beams with a small focusing angle, but almost no light beams pass through the illumination aperture 3 by the arrangement of the light barrier 5. As shown in fig. 3, which is a simulation result in which the light-blocking panel 5 is not provided. As shown in fig. 4, which is a simulation result of the light barrier 5 being provided.
As shown in fig. 1, 5, 6 and 7, the illumination aperture, the collimating lens group, the light barrier, the dispersive focusing lens group, the surface of the panel to be detected, the spectroscope, the focusing lens group and the detection aperture form a multispectral confocal system. The illumination optical path system focuses light emitted by the light source to form a point light source, and then focuses the point light source on the surface of the panel to be detected through the dispersive focusing lens group. When the multispectral confocal system is optimally designed, only the on-axis point spherical aberration needs to be corrected. Preferably, the ring-shaped parallel light beam which is collimated, split and blocked from the central light ray fills the entrance pupil of the chromatic dispersion focusing lens group 6, and in order to improve the resolution of the system, the focal length of the chromatic dispersion focusing lens group is generally as short as possible. Therefore, to ensure that the collimated light fills the pupil of the defocusing lens group 6, the focal length of the collimating lens group needs to be selected appropriately. Since the focusing lens group 9 is used for focusing the reflected light collected by the dispersive focusing lens group 6 on the detection small hole, the more concentrated the focusing energy is, the easier the light intensity reaches the threshold value of the response of the spectrum analyzer, and the response of the spectrum analyzer is caused. The design of the focusing lens group 9 is generally the same as the collimating lens group 4. The main function of the spectroscope is to separate the reflected light on the surface of the panel to be measured, which is collected by the dispersive focusing lens group 6, from the incident light path, and the reflected light is focused on the spectrum analyzer 11 by the focusing lens group 9.
In the steps, the corresponding relation between the distance and the wavelength is established through the axial chromatographic characteristic and the optical dispersion principle, and the spectrum analyzer is used for decoding the spectrum information, so that the position information is obtained, and the thickness or the surface type of the measured panel is accurately measured.
In the method, the resolution capability of the device for measuring the thickness of the panel to be measured is measured by using an axial response spectrum, the numerical aperture of a dispersive focusing lens group 6 is assumed to be a, the numerical aperture of a part for blocking light is assumed to be b, the radius of a detection pore on the surface image of the panel to be measured is assumed to be r, the detection pore is confocal with the surface of the panel to be measured, the focus corresponding to different spectrums and the detection pore have defocusing amount x, and if the defocusing spectrum is approximately calculated according to geometric optics, the height h of a light spot of the defocusing spectrum on the image surface of the detection pore is as follows:
h＝a*x。
thus detecting the image surface area S of the small hole 0 Comprises the following steps:
S 0 ＝π*h 2 ＝π*a 2 *x 2 。
area S also blocked by the light barrier 5 1 Comprises the following steps:
S 1 ＝π*b 2 *x 2 。
since the area S of the detection aperture is:
S＝π*r 2 。
thus, in the absence of the light barrier 5, the normalized light intensity I through the detection aperture is:
With the light barrier 5, the normalized light intensity I through the detection aperture is:
The half-maximum width of the axial response intensity curve is FWHM, and when no light blocking sheet is provided:
therefore, the defocus at half-extreme is:
without a light barrier there are:
therefore, the defocusing amount at the half extreme value with the light blocking sheet is as follows:
it is obvious that:
the FWHM with the light barrier is smaller than the FWHM without the light barrier, that is to say, the light barrier improves the measurement accuracy, the light barrier cannot completely block the light, and the accuracy is higher if the light barrier is as large as possible under the condition of strong enough light.
Through numerical simulation, normalized axial response light intensities of the dispersion focus range 15 measurement system under an ideal condition before and after the addition of the light barrier 5 are respectively obtained, as shown in fig. 3 and 4.
As can be seen from fig. 3, in the case where the light blocking sheet is not used to block the central light, when the surface of the panel to be measured coincides with the spectral focal point of the dispersive focusing lens group, the spectral analyzer 11 can receive the intensity of the reflected spectral light at the focal point which is just at the maximum. When the surface of the panel to be measured deviates from the focal plane of the dispersive focusing lens group, the intensity of the reflected light received by the spectrum analyzer 11 is rapidly attenuated.
As shown in fig. 4, the confocal system adds a light blocking sheet to block the axial response light intensity of the central light, and when the surface of the panel to be measured coincides with the focal point of the dispersive focusing lens group, the spectrum analyzer 11 can receive the spectrum reflected light intensity which just reaches the maximum value. When the spectral focus of the dispersive focusing lens group deviates from the surface of the panel to be measured, the intensity of the reflected light received by the spectrum analyzer 11 is rapidly attenuated to 0.
Comparing fig. 4 and fig. 3, it can be seen that, under the influence of the central light, some peaks with lower peak values appear near the maximum value of the response light intensity under the condition that the central light is not blocked by the light blocking sheet. And the addition of the central light of fig. 2, which also affects the maximum intensity of the reflected light at the wavelength that is just focused on the surface of the panel being measured, compared to the maximum of fig. 3, allows the off-focus spectrum to still pass through the detection aperture 10, thereby reducing the detection sensitivity. The change of the light intensity response received by the spectrum analyzer 11 can accurately reflect the relative position of the surface of the panel to be measured and the focus of the dispersive focusing lens group, so the measuring accuracy can be further improved after the light blocking sheet 5 is added to block the central light.
Factors that determine FWHM are: the numerical aperture of the dispersive focusing lens group 6 is used for blocking the image size of the light numerical aperture and the detection small hole on the surface of the panel to be detected. Therefore, in the practical design of the optical system, the numerical aperture of the dispersive focusing lens group is designed to be larger, the stronger the point light source is, the better the detection pinhole is, and the smaller the detection pinhole is, the better the detection pinhole is. In practice, the collimating lens group, the light barrier and the dispersive focusing lens group adopt a combined design, so that the collimating lens group, the light barrier and the dispersive focusing lens group are favorably used for dispersion adjustment. The measurement accuracy in the entire measurement system is not only determined by the FWHM, but also the spectrum analyzer 11 is very important, and the wavelength resolution and noise thereof affect the final measurement accuracy. The dispersion range determines the effective measurement range, but the larger the measurement range, the lower the accuracy, the smaller the dispersion range, the higher the measurement accuracy, but the measurement range is also an important index, and the dispersion range and the measurement accuracy are generally designed.
If the off-axis aberration of the confocal chromatic dispersion optical system is corrected during design, the detection small hole can be changed into a slit or a one-dimensional small hole array, so that the measurement can be carried out by lines or multiple points, and the measurement efficiency is improved. Therefore, in the embodiment of fig. 9, the illumination fibers can be arranged in a multi-fiber one-dimensional manner, which can improve the measurement efficiency when the remote measurement is realized.
Claims (4)
1. The device capable of measuring the surface type or thickness through spectrum confocal is characterized by comprising a multispectral light source (1), a focusing lens group (2), a collimating lens group (4), a spectroscope (8), a dispersion focusing lens group (6) and an XY displacement platform (12), wherein the focusing lens group (9) and a spectrum analyzer (11) are sequentially arranged on the other side of the spectroscope (8); a lighting small hole (3) or a lighting optical fiber (17) is arranged between the focusing lens group (2) and the collimating lens group (4), and a detection small hole (10) for filtering is arranged between the focusing lens group (9) and the spectrum analyzer (11);
when measurement is carried out, the measured panel (7) is positioned on the XY displacement platform (12), and the surface of the measured panel (7) is correspondingly superposed with the focal plane of the dispersive focusing lens group (6) by adjusting the axial movement of the XY displacement platform (12);
the multispectral light source (1) provides and emits a multispectral light beam;
the focusing lens group (2) is used for focusing light energy emitted by the multispectral light source (1) to the illuminating aperture (3) or the incident end of the illuminating optical fiber (17), and the incident end of the illuminating aperture (3) or the illuminating optical fiber (17) filters edge stray light to form a needed point light source;
the collimating lens group (4) is used for collimating the light passing through the illumination pinhole (3) or the illumination optical fiber (17) into a parallel light beam (14);
the spectroscope (8) is used for splitting light, two opposite sides of the spectroscope (8) are respectively provided with a collimating lens group (4) and a dispersion focusing lens group (6), and the third side of the spectroscope (8) is sequentially provided with a focusing lens group (9), a detection small hole (10) and a spectrum analyzer (11);
the focusing lens group (9) is used for focusing, when reflected light on the surface of the detected panel (7) collected by the dispersive focusing lens group (6) passes through the spectroscope (8), the reflected light is focused on the detection small hole (10) by the focusing lens group (9), so that an optical spectrum analyzer (11) can detect optical signals;
the dispersion focusing lens group (6) is used for focusing the illuminating light beam split by the beam splitter (8) on a detected panel (7), the light focused on the surface of the detected panel (7) is reflected again, the dispersion focusing lens group (6) collects reflected light reflected by the surface of the detected panel (7), the reflected light is separated by the beam splitter (8) and reflected on the focusing lens group (9), and the focusing lens group (9) is focused on the detection pinhole (10) again, so that the optical spectrum analyzer (11) detects an optical signal;
a light blocking sheet (5) is arranged between the collimating lens group (4) and the spectroscope (8), or the light blocking sheet (5) is arranged between the spectroscope (8) and the dispersion focusing lens group (6), or the light blocking sheet (5) is arranged between the dispersion focusing lens group (6) and the XY displacement platform (12), and the light blocking sheet (5) is used for blocking central light of a light path to form an annular light beam so as to improve the precision of measuring the measured panel (7).
2. The device for confocal measurement of surface type or thickness by spectrum is characterized by comprising a multispectral light source (1), a focusing lens group (2), a spectroscope (8), a collimating lens group (4), a dispersive focusing lens group (6) and an XY displacement platform (12), wherein a focusing lens group (9) and a spectrum analyzer (11) are sequentially arranged on the other side of the spectroscope (8); a small illumination hole (3) or an illumination optical fiber (17) is arranged between the spectroscope (8) and the collimating lens group (4);
when measurement is carried out, the measured panel (7) is positioned on the XY displacement platform (12), and the surface of the measured panel (7) is correspondingly superposed with the focal plane of the dispersive focusing lens group (6) by adjusting the axial movement of the XY displacement platform (12);
the multispectral light source (1) provides and emits a multispectral light beam;
the focusing lens group (2) is used for focusing light energy emitted by the multispectral light source (1), emitting the light energy to the upper spectroscope (8), emitting the light energy to the lighting small hole (3) or the lighting optical fiber (17) after light splitting to filter edge stray light to form a required point light source, and emitting light beams emitted by the point light source to the collimating lens group (4);
the collimating lens group (4) is used for collimating the light passing through the illumination pinhole (3) or the illumination optical fiber (17) into a parallel light beam (14);
the spectroscope (8) is used for splitting light, two opposite sides of the spectroscope (8) are respectively provided with a focusing lens group (2) and a lighting small hole (3) or a lighting optical fiber (17), and the third side of the spectroscope (8) is sequentially provided with a focusing lens group (9) and a spectrum analyzer (11);
the focusing lens group (9) is used for focusing, when reflected light on the surface of the panel (7) to be detected, collected by the dispersion focusing lens group (6), passes through the collimating lens group (4) and the illumination small hole (3) or the illumination optical fiber (17) in sequence, and is focused by the focusing lens group (9) after passing through the spectroscope (8) so that the spectrum analyzer (11) can detect optical signals;
the dispersion focusing lens group (6) is used for focusing light beams on a measured panel (7) to be measured, light focused on the surface of the measured panel (7) is reflected again, the dispersion focusing lens group (6) collects reflected light reflected by the surface of the measured panel (7), and the reflected light passes through the collimating lens group (4) and the illumination pinhole (3) or the illumination optical fiber (17) in sequence and is focused by the focusing lens group (9) after passing through the beam splitter (8) so that the spectrum analyzer (11) can detect optical signals;
a detection small hole (10) for filtering is arranged between the focusing lens group (9) and the spectrum analyzer (11);
and a light blocking sheet (5) is arranged between the collimating lens group (4) and the dispersion focusing lens group (6), and the light blocking sheet (5) is used for blocking central light of a light path to form an annular light beam so as to improve the precision of measuring the measured panel (7).
3. A method for measuring the surface shape or thickness by spectrum confocal, which is characterized in that: the use of the spectroscopic confocal device of claim 1 for measuring profile or thickness by the following steps:
s1, adjusting an incident end and an emergent end of a multispectral light source (1), a focusing lens group (2), a lighting small hole (3) or a lighting optical fiber (17), a collimating lens group (4), a spectroscope (8) and a dispersion focusing lens group (6) to enable the multispectral light source, the focusing lens group (9), the detection small hole (10) and a spectrum analyzer (11) to be correspondingly coaxial at the same height, and adjusting the spectroscope (8), the focusing lens group (9), the detection small hole (10) and the spectrum analyzer (11) to enable the spectroscope, the focusing lens group (9), the detection small hole (10) and the spectrum analyzer (11) to be correspondingly coaxial at the same height;
s2, turning on the multispectral light source (1), and focusing incident light rays (13) emitted by the multispectral light source (1) on an incident end of the lighting small hole (3) or the lighting optical fiber (17) through the focusing lens group (2) to form a point light source;
s3, a point light source passing through the small illuminating hole (3) or the emergent end of the illuminating optical fiber (17) is changed into a light collimation parallel light beam (14) by the collimating lens group (4) to be emitted, and then the light collimation parallel light beam (14) is split by the beam splitter (8) and then enters the dispersion focusing lens group (6);
s4, the dispersion focusing lens group (6) focuses the light-split collimated parallel light beam (14) on the surface of the panel to be detected (7), the light is reflected by the surface of the panel to be detected (7), reflected light on the surface of the panel to be detected (7) is collected by the dispersion focusing lens group (6), the reflected light on the surface of the panel to be detected (7) is split by the light splitter (8) and then enters the focusing lens group (9), the light is focused on the detection small hole (10) by the focusing lens group (9), the detection small hole (10) filters the incident reflected light, and the spectrum analyzer (11) correspondingly receives a light intensity signal reflected by the dispersion focusing lens group (6) from a focal plane;
s5, when the XY displacement platform (12) placed with the measured panel (7) moves along the axial direction, when the measured panel (7) is made of transparent materials, the upper surface and the lower surface of the measured panel (7) are respectively superposed with a focal plane of the dispersive focusing lens group (6) in the moving process, the optical spectrum analyzer (11) can receive optical signals reflected by the upper surface and the lower surface of the measured panel (7), a computer connected with the optical spectrum analyzer (11) processes the optical signals to obtain two light intensity extreme values, and the thickness of the measured panel (7) is calculated according to the displacement variation of the XY displacement platform (12) in the time interval of the two light intensity extreme values;
when the measured panel (7) is made of non-transparent materials, the XY displacement platform (12) placed with the measured panel (7) moves along the axial direction, the upper surface of the measured panel (7) is enabled to coincide with the focal plane of the dispersive focusing lens group (6) in the moving process, the spectrum analyzer (11) can receive optical signals reflected by the corresponding surface of the measured panel (7), a computer connected with the spectrum analyzer (11) processes the optical signals to obtain corresponding light intensity extreme values, and the surface type of the measured panel (7) is calculated according to the displacement variation of the XY displacement platform (12) in the time interval of the occurrence of the corresponding light intensity extreme values;
in the step S3, the collimating lens group (4) changes the point light source into a light collimation parallel light beam (14) to be emitted, the light blocking sheet (5) blocks the central light of the light collimation parallel light beam (14) to form an annular light beam, the annular light beam is split by the beam splitter (8), and finally the annular light beam is emitted into the dispersion focusing lens group (6);
or in the step S3, the collimating lens group (4) changes the point light source into a light collimation parallel light beam (14) to be emitted out and split by the beam splitter (8), then the light blocking sheet (5) blocks the central light of the split light collimation parallel light beam (14) to form an annular light beam, and finally the annular light beam is emitted into the dispersion focusing lens group (6);
or in step S3, the collimating lens group (4) changes the point light source into a light collimating parallel beam (14), the light is emitted out and split by the beam splitter (8), then the light is emitted into the dispersive focusing lens group (6), and the light blocking sheet (5) blocks the central ray of the beam focused by the dispersive focusing lens group (6) to form an annular beam which is focused on the corresponding surface of the panel (7) to be measured.
4. A method for measuring the surface shape or thickness by spectrum confocal, which is characterized in that: the use of the spectroscopic confocal device of claim 2 for measuring profile or thickness by the following steps:
s1, adjusting a multispectral light source (1), a focusing lens group (2), a spectroscope (8), a lighting small hole (3) or an incident end and an emergent end of a lighting optical fiber (17), a collimating lens group (4) and a dispersion focusing lens group (6) to enable the multispectral light source, the focusing lens group (9) and the spectroscope (11) to be correspondingly coaxial in equal height, and adjusting the spectroscope (8), the focusing lens group (9) and the spectroscope (11) to be correspondingly coaxial in equal height;
s2, turning on the multispectral light source (1), wherein incident light (13) emitted by the multispectral light source (1) is split by the focusing lens group (2) and the beam splitter (8) in sequence and then focused on the incident end of the illumination small hole (3) or the illumination optical fiber (17) to form a point light source;
s3, a point light source passing through the small illuminating hole (3) or the emergent end of the illuminating optical fiber (17) is changed into a light collimation parallel beam (14) by the collimating lens group (4) to be emitted, and then the light collimation parallel beam (14) is focused on the corresponding surface of the panel (7) to be detected by the dispersion focusing lens group (6);
s4, reflecting the surface of the detected panel (7), collecting reflected light on the surface of the detected panel (7) by using the dispersion focusing lens group (6), splitting the reflected light on the surface of the detected panel (7) by using the beam splitter (8) and then injecting the split light into the focusing lens group (9) after passing through the collimating lens group (4), the illumination small hole (3) or the illumination optical fiber (17), and finally focusing the light on the spectrum analyzer (11) by using the focusing lens group (9), wherein the spectrum analyzer (11) correspondingly receives a light intensity signal reflected by the dispersion focusing lens group (6) from a focal plane;
s5, when the measured panel (7) is made of a transparent material, the XY displacement platform (12) on which the measured panel (7) is placed moves along the axial direction, the upper surface and the lower surface of the measured panel (7) are respectively superposed with the focal plane of the dispersive focusing lens group (6) in the moving process, the optical spectrum analyzer (11) can receive optical signals reflected by the upper surface and the lower surface of the measured panel (7), a computer connected with the optical spectrum analyzer (11) processes the optical signals to obtain two light intensity extreme values, and the thickness of the measured panel (7) is calculated according to the displacement variation of the XY displacement platform (12) in the time interval of occurrence of the two light intensity extreme values;
when the measured panel (7) is made of non-transparent materials, the XY displacement platform (12) placed with the measured panel (7) moves along the axial direction, the upper surface of the measured panel (7) is enabled to coincide with the focal plane of the dispersive focusing lens group (6) in the moving process, the spectrum analyzer (11) can receive optical signals reflected by the corresponding surface of the measured panel (7), a computer connected with the spectrum analyzer (11) processes the optical signals to obtain corresponding light intensity extreme values, and the surface type of the measured panel (7) is calculated according to the displacement variation of the XY displacement platform (12) in the time interval of the occurrence of the corresponding light intensity extreme values;
in step S3, the collimating lens group (4) converts the point light source into a light-collimated parallel beam (14) to be emitted, the light blocking sheet (5) blocks the central light of the light-collimated parallel beam (14) to form an annular beam, and the annular beam is focused on the corresponding surface of the panel (7) to be measured through the dispersive focusing lens group (6).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110457465.XA CN113137931B (en) | 2021-04-27 | 2021-04-27 | Spectrum confocal device and method capable of measuring surface shape or thickness |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110457465.XA CN113137931B (en) | 2021-04-27 | 2021-04-27 | Spectrum confocal device and method capable of measuring surface shape or thickness |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN113137931A CN113137931A (en) | 2021-07-20 |
| CN113137931B true CN113137931B (en) | 2023-03-14 |
Family
ID=76813498
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110457465.XA Active CN113137931B (en) | 2021-04-27 | 2021-04-27 | Spectrum confocal device and method capable of measuring surface shape or thickness |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN113137931B (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113686793B (en) * | 2021-08-25 | 2024-03-19 | 珠海横琴美加澳光电技术有限公司 | Spectrum confocal scanning displacement sensor device and application method thereof |
| CN113916151B (en) * | 2021-10-22 | 2024-04-30 | 珠海横琴美加澳光电技术有限公司 | Device and method for confocal measurement of surface shape or thickness of spectrum black hole |
| CN114199137A (en) * | 2021-12-10 | 2022-03-18 | 深圳立仪科技有限公司 | Contact type spectrum confocal device |
| CN114858066B (en) * | 2022-04-29 | 2024-03-29 | 中国科学院微电子研究所 | Thickness measuring device of through silicon via passivation layer |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB9811502D0 (en) * | 1998-05-28 | 1998-07-29 | Visionix Ltd | Thickness meter for thin transparent objects |
| CN102735338A (en) * | 2012-06-20 | 2012-10-17 | 清华大学 | High-resolution multispectral collection system based on mask and double-Amici prism |
| CN106802129A (en) * | 2016-12-30 | 2017-06-06 | 中国科学院光电研究院 | A kind of high resolution and self calibration Spectral Confocal displacement measurement system |
| CN108827172A (en) * | 2018-10-11 | 2018-11-16 | 中国人民解放军国防科技大学 | Non-contact laser thickness measuring device and method based on solid zoom lens |
| CN109001207A (en) * | 2018-05-07 | 2018-12-14 | 华侨大学 | The detection method and detection system of a kind of transparent material surface and internal flaw |
| CN109357623A (en) * | 2018-11-16 | 2019-02-19 | 中国科学院光电技术研究所 | Method and device for measuring thickness of mobile phone panel by using confocal microscope system |
| CN111412863A (en) * | 2020-04-23 | 2020-07-14 | 华侨大学 | Parallel chromatic confocal three-dimensional morphology optical measurement system |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI490444B (en) * | 2009-01-23 | 2015-07-01 | Univ Nat Taipei Technology | Slit-scan microscopic system and method using the same |
| CN103091299B (en) * | 2013-01-21 | 2015-01-21 | 北京理工大学 | Laser differential confocal map microimaging imaging method and device |
| CN109186479B (en) * | 2018-11-13 | 2020-05-12 | 北京理工大学 | Method and device for measuring axial clearance of rear-mounted pupil laser differential confocal lens group |
-
2021
- 2021-04-27 CN CN202110457465.XA patent/CN113137931B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB9811502D0 (en) * | 1998-05-28 | 1998-07-29 | Visionix Ltd | Thickness meter for thin transparent objects |
| CN102735338A (en) * | 2012-06-20 | 2012-10-17 | 清华大学 | High-resolution multispectral collection system based on mask and double-Amici prism |
| CN106802129A (en) * | 2016-12-30 | 2017-06-06 | 中国科学院光电研究院 | A kind of high resolution and self calibration Spectral Confocal displacement measurement system |
| CN109001207A (en) * | 2018-05-07 | 2018-12-14 | 华侨大学 | The detection method and detection system of a kind of transparent material surface and internal flaw |
| CN108827172A (en) * | 2018-10-11 | 2018-11-16 | 中国人民解放军国防科技大学 | Non-contact laser thickness measuring device and method based on solid zoom lens |
| CN109357623A (en) * | 2018-11-16 | 2019-02-19 | 中国科学院光电技术研究所 | Method and device for measuring thickness of mobile phone panel by using confocal microscope system |
| CN111412863A (en) * | 2020-04-23 | 2020-07-14 | 华侨大学 | Parallel chromatic confocal three-dimensional morphology optical measurement system |
Non-Patent Citations (3)
| Title |
|---|
| 激光共焦透镜轴向间隙测量方法;赵维谦; 沈阳; 邱丽荣; 杨佳苗;《激光与光电子学进展》;20150310;第52卷(第3期);第1-4节 * |
| 色散聚焦分离式彩色共聚焦测量系统研究;余卿; 张学典; 崔长彩;《仪器仪表学报》;20180331;第39卷(第3期);全文 * |
| 透镜中心厚度测量方法及装置的研究;卢毅;徐熙平;石诺;张莹莹;曹建宁;刘鸿嵛;《长春理工大学学报(自然科学版)》;20130815;第36卷(第3-4期);全文 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN113137931A (en) | 2021-07-20 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN113137931B (en) | Spectrum confocal device and method capable of measuring surface shape or thickness | |
| US7315371B2 (en) | Multi-channel spectrum analyzer | |
| CN201233362Y (en) | Multi optical spectrum imaging device for detecting fruit quality | |
| US20080283723A1 (en) | Optical characteristic measuring apparatus using light reflected from object to be measured and focus adjusting method therefor | |
| US12085501B2 (en) | Spectral confocal measurement device and measurement method thereof | |
| CN106706589B (en) | Fluorescence detection system for cell analyzer | |
| CN103267482A (en) | High-accuracy displacement detection device and method | |
| CN115628686A (en) | High-precision light spot testing system and method based on space imaging system | |
| CN116336962A (en) | Linear gradient filter-based linear spectrum confocal three-dimensional measurement system and method | |
| CN113686793B (en) | Spectrum confocal scanning displacement sensor device and application method thereof | |
| CN203310374U (en) | High precision displacement detection device | |
| CN116182738A (en) | Method and device for synchronously measuring interface profile of film surface based on sub-band multispectral | |
| CN113138022B (en) | Spectral reflectance detection method, system, device and computer-readable storage medium | |
| CN113483676B (en) | Displacement sensing device based on spectrum confocal chromaticity measurement and use method | |
| CN114941998A (en) | Three-dimensional line spectrum confocal sensing method and device | |
| CN216846099U (en) | Device for confocal measurement of surface type or thickness by combining optical fibers | |
| CN113916151B (en) | Device and method for confocal measurement of surface shape or thickness of spectrum black hole | |
| KR101326204B1 (en) | Device and method for measuring thickness of thin film | |
| CN114812396B (en) | Spectrum confocal measurement system | |
| CN219454985U (en) | Spectrum black hole confocal measurement device | |
| CN113959363B (en) | Line scanning type spectrum confocal device based on high-dispersion cylindrical lens and cylindrical concave grating | |
| CN212082598U (en) | Miniaturized low-cost self-collimation type spectrum light splitting module | |
| CN220399731U (en) | Optical path switching device for optical detection system | |
| CN221686184U (en) | Double focal plane imaging system and multidirectional beam splitter | |
| CN113448050B (en) | Spectrometer light path structure |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20230719 Address after: 519000 819 Office, No. 2718 Haojiang Road, Hengqin New District, Zhuhai City, Guangdong Province Patentee after: Zhuhai Hengqin Meiruike Holding Enterprise (L.P.) Address before: 519000 room 105-58293, No.6 Baohua Road, Hengqin New District, Zhuhai City, Guangdong Province (centralized office area) Patentee before: Zhuhai Hengqin Mega-CAO Photoelectric Technology Co.,Ltd. |