CN103267482A - High-accuracy displacement detection device and method - Google Patents
High-accuracy displacement detection device and method Download PDFInfo
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- CN103267482A CN103267482A CN2013101198316A CN201310119831A CN103267482A CN 103267482 A CN103267482 A CN 103267482A CN 2013101198316 A CN2013101198316 A CN 2013101198316A CN 201310119831 A CN201310119831 A CN 201310119831A CN 103267482 A CN103267482 A CN 103267482A
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Abstract
The invention discloses a high-accuracy displacement detection device and a high-accuracy displacement detection method, which belong to the field of optical detection. The device comprises a short coherent light source, a collimating lens, a polarizer, an optical splitter, a focusing lens, a reflecting mirror, an analyzer, an image sensing device and two 1/4 wave plates, wherein the short coherent light source, the collimating lens, the polarizer, the optical splitter, the first 1/4 wave plate and the reflecting mirror are arranged in sequence in one row to form a first light path; the focusing lens, the second 1/4 wave plate, the optical splitter, the polarizer and the image sensing device are arranged in sequence in one row to form a second light path; the first light path and the second light path intersect with each other through the optical splitter, and are vertical to each other; the light output end of the short coherent light source faces the collimating lens; and the reflecting mirror is arranged obliquely in the first light path, and the inclination angle in the first light path can be adjusted. The detection device has the advantages of simple and compact structure, high measuring accuracy and convenience in adjusting the measuring range conveniently.
Description
Technical field
The present invention relates to the optical detection field, particularly relate to a kind of high precision displacement pick-up unit and method of utilizing Optical Implementation.
Background technology
Traditional displacement transducer adopts the principle of confocal microscope to measure usually, it is mainly by white light source, the aberration camera lens adds spectrometer composition (referring to " the confocal displacement transducer objective lens design of spectrum " of document " photoelectric project "), light source adopts polychromatic light (as white light), this Shu Guang is through the aberration camera lens, produce spectral dispersion, form a series of focuses in the space.Focus on the monochromatic light on testee surface, reflect, arrive monochromator or spectrometer, thereby determine this monochromatic wavelength, each wavelength is corresponding distance value all, therefore can extrapolate shift value according to wavelength.
Fig. 1 has illustrated the ultimate principle of the confocal displacement transducer of spectrum, polychromatic light light source 1 forms directional light through the front lens, then can produce the imaging len of chromatic dispersion by beam splitter 2 back, if just green-yellow light converges on object 3 surfaces, reflected light passes through imaging len again, last green-yellow light is assembled by aperture 4 and another beam splitter 5 and is arrived spectrometer, and other spectral component of out of focus reflection is then blocked by aperture.The spectral distribution that spectrometer obtains as shown in Figure 2, horizontal ordinate is represented wavelength, ordinate is represented contrast.For the curve of spectrum that obtains, its peak value is at the 555nm place, if object has a little displacement, spectrometer can obtain another curve of spectrum so, obtain the another one peak value, the displacement of the difference representative of these two peak values can draw according to chromatic dispersion and the wavelength relationship that imaging len produces.
The range of displacement measurement of this displacement transducer depends on the spectral dispersion scope of microlens, when measurement is high-resolution, needs to select the camera lens of high-NA, causes work apart from the minimizing that has to a great extent like this.
The raising of resolution can cause measurement range corresponding to reduce simultaneously in addition, and measurement range is 1 of resolution～100,000 times usually, in order to allow system compatible different resolution and measurement range, needs to change different aberration camera lenses, causes the cost of equipment to rise.
Summary of the invention
The technical problem to be solved in the present invention provides a kind of high precision displacement pick-up unit and method, do not needing to change under the prerequisite of different aberration camera lenses, resolution and measurement range that energy is compatible different, thus the equipment that solves present light detection displacement needs frequent replacing camera lens and the short problem of work distance.
The technical scheme that solves the problems of the technologies described above is as follows:
The invention provides a kind of high precision displacement pick-up unit, comprising:
Short coherent source, collimation lens, the polarizer, optical splitter, condenser lens, catoptron, analyzer, image sensing device and two quarter wave plates; Wherein,
Described short coherent source, collimation lens, the polarizer, optical splitter, first quarter wave plate and catoptron are a row and are arranged in order and become first light path;
Described condenser lens, second quarter wave plate, described optical splitter, analyzer and image sensing device are a row and are arranged in order and become second light path;
Described first light path and second light path through described optical splitter cross and described two light paths vertical mutually;
The light output end of described short coherent source is towards described collimation lens;
Described catoptron arranges in the described first light path medium dip, and can be adjusted at the angle of the described first light path medium dip.
The present invention also provides a kind of high precision displacement detection method, adopts pick-up unit of the present invention, may further comprise the steps:
Testee is arranged on the focus place of the condenser lens of described pick-up unit;
Described pick-up unit is after its short coherent source sends light, and after two light-path effects that two light paths form, its image sensing device receives the interference fringe that the reflected light on reflected light and testee surface is interfered formation;
By the analyzing and processing to described interference fringe, determine the displacement of described testee.
Beneficial effect of the present invention is: the interference fringe of utilizing two light-path effects to form is carried out the measurement of displacement, can be by the angle of inclination of accommodation reflex mirror, realize the adjustment of measurement range easily, and need not change different aberration camera lenses, therefore have advantage simple in structure, that cost is low, the work distance is long, measuring accuracy is high and measurement range is conveniently adjusted.
Description of drawings
In order to be illustrated more clearly in the technical scheme of the embodiment of the invention, the accompanying drawing of required use is done to introduce simply in will describing embodiment below, apparently, accompanying drawing in describing below only is some embodiments of the present invention, for those of ordinary skill in the art, under the prerequisite of not paying creative work, can also obtain other accompanying drawings according to these accompanying drawings.
Fig. 1 is the structure principle chart of conventional confocal microscopes;
Fig. 2 is the output waveform figure of conventional confocal microscopes spectrometer;
The structure principle chart of the pick-up unit that Fig. 3 provides for the embodiment of the invention;
Fig. 4 is the light distribution synoptic diagram on the image sensing device of the embodiment of the invention.
Embodiment
Below the technical scheme in the embodiment of the invention is clearly and completely described, obviously, described embodiment only is the present invention's part embodiment, rather than whole embodiment.Based on embodiments of the invention, those of ordinary skills belong to protection scope of the present invention not making the every other embodiment that obtains under the creative work prerequisite.
The embodiment of the invention provides a kind of high precision displacement pick-up unit, as shown in Figure 3, this pick-up unit comprises: short coherent source 301, collimation lens 302, the polarizer 303, optical splitter 304, condenser lens 309, catoptron 306, analyzer 308, image sensing device 307 and two quarter wave plates 3051,3052;
Wherein, lacking coherent source 301, collimation lens 302, the polarizer 303, optical splitter 304, first quarter wave plate 3051 and catoptron 306 is a row and is arranged in order and becomes first light path;
First light path and second light path through described optical splitter 304 cross and described two light paths vertical mutually;
The light output end of short coherent source 301 is towards described collimation lens 302;
Catoptron 306 arranges in the described first light path medium dip, and can be adjusted at the angle of the described first light path medium dip.
In this device, first light path cooperates with second light path, constitutes first light-path by short coherent source 301, collimation lens 302, the polarizer 303, optical splitter 304, first quarter wave plate 3051, catoptron 306, first quarter wave plate 3051, optical splitter 304, analyzer 308 and image sensing device 307;
Wherein, what short coherent source 301, collimation lens 302, the polarizer 303, optical splitter 304, first quarter wave plate 3051, catoptron 306 constituted is the process light-path, and first quarter wave plate 3051, optical splitter 304, analyzer 308 and image sensing device 307 are the return light may path;
Constitute second light-path (for detecting light-path by short coherent source 301, collimation lens 302, the polarizer 303, optical splitter 304, second quarter wave plate 3052, condenser lens 309, second quarter wave plate 3052, optical splitter 304, analyzer 308 and image sensing device 307, wherein, the light of the second light-path backhaul is the surperficial light that reflects of testee at the focus place of line focus lens 309).Wherein, short coherent source 301, collimation lens 302, the polarizer 303, optical splitter 304, second quarter wave plate 3052, condenser lens 309 are the process light-path, and the light of the testee at the focus place of condenser lens 309 surface reflection enters image sensing device 307 from condenser lens 309, second quarter wave plate 3052, optical splitter 304, analyzer 308 and image sensing device 307 for the return light may path.
During above-mentioned detection device work, short coherent source 301 is through behind the collimation lens 302, become behind the directional light through the polarizer 303, being certain polarization direction incides on the optical splitter 304, through the optical splitter 304 a branch of smooth transmissions in back, back to catoptron 306 through first quarter wave plate 3051, catoptron 306 is obliquely installed in first light path, at an angle and this angle can adjust, the angle of regulating depends on the pixel resolution of CCD, guarantee that each striped can cover 4 pixel wide at least and get final product, reflected light through catoptron 306 reflexes on the optical splitter 304 by first quarter wave plate 3051 again, because twice 90 degree rotations take place in the polarization direction through first quarter wave plate 3051, enter in the image sensing device 307 through analyzer 308 after optical splitter 304 reflections;
Another bundle reflected light through optical splitter 304, behind second quarter wave plate 3052, by condenser lens 309, focus on testee 30a surface, after the reflection of testee 30a surface, become directional light again through condenser lens 309, by entering optical splitter 304 behind second quarter wave plate 3052, because twice 90 degree rotations take place in the polarization direction, enter in the image sensing device 307 through analyzer 308 after after optical splitter 304 transmissions by second quarter wave plate 3052;
Two-beam all needs by analyzer 308 before entering image sensing device 307, two-beam synthesizes the identical light in a branch of polarization direction like this, can incide image sensing device 307 with identical polarization direction, identical to the optical path difference of image sensing device 307 with the light of testee 30a surface reflection from the light of the foveal reflex of catoptron 306, so can in certain scope, form interference from the light of optical splitter 304 transmissions and the light that reflects from optical splitter 304, because what adopt is short coherent source, so this interference fringe just forms in certain scope of image sensing device 307, center by the interference fringe on the analysis image sensing device 307, just can accurately know testee 30a surface with respect to the position of this pick-up unit, thereby can detect the displacement of testee 30a.This pick-up unit is simple in structure, and the measuring accuracy height does not need to change camera lens, and measurement range can conveniently be regulated, and effectively reduces the checkout equipment cost that utilizes the capable detection of light contraposition shift-in.
In the above-mentioned detection device, short coherent source employing coherent length is the led light source about 5～50um.
In the above-mentioned detection device, the angle of the polarizer 303 in first light path can be adjusted.
In the above-mentioned detection device, the focus place of condenser lens 309 is testee 30a lay down location.
In the above-mentioned detection device, identical to the optical path difference of described image sensing device 307 with the light of testee 30a surface reflection from the light of the foveal reflex of catoptron 306.
In the above-mentioned detection device, image sensing device 307 adopts any in area array CCD devices, line array CCD device or the common imageing sensor.
In the above-mentioned detection device, optical splitter 304 can adopt the polarization beam splitting optical splitter.Further, above-mentioned detection device also can adopt unpolarized optical splitter to carry out light splitting, can realize the coupling interference of the last interference fringe that forms like this by the reflective light intensity of accommodation reflex mirror 306.
In the above-mentioned detection device, optical fiber can also be set, condenser lens 309 is arranged on the input end of this optical fiber, the output terminal of this optical fiber is corresponding with described second quarter wave plate 3052.Obtain the focused light of condenser lens 309 like this by optical fiber coupling, by optical fiber focused light is guided to the place that pick-up unit is inconvenient to arrive testee 30a is detected.
This pick-up unit, simple in structure, compact, in test process, there is not the high-precision surperficial Bit Shift pick-up unit of movable device, well having solved present checkout equipment needs frequently to change camera lens and work apart from short problem.
The embodiment of the invention also provides a kind of high precision displacement detection method, adopts above-mentioned pick-up unit,
May further comprise the steps:
Testee is arranged on the focus place of the condenser lens of described pick-up unit;
Described pick-up unit is after its short coherent source sends light, and after two light-path effects that two light paths form, its image sensing device receives the interference fringe that the reflected light on reflected light and testee surface is interfered formation;
By the analyzing and processing to described interference fringe, determine the displacement of described testee.
In the above-mentioned detection method, by the analyzing and processing to interference fringe, determine that the displacement of testee is:
Described profile to described interference fringe carries out extraction and analysis, determines the center of the contrast of this interference fringe, determines described testee apart from the position of described pick-up unit by described center, and then the displacement of definite testee.
In the said method, can adjust the sensing range of described pick-up unit by adjusting the angle of inclination of catoptron in described first light path of described pick-up unit.
The present invention is described in further detail below in conjunction with specific embodiment.
As shown in Figure 3, short coherent source 301 employing coherent lengths are the led light source about 10um, short coherent source 301 is through behind the collimation lens 302, become behind the directional light through the polarizer 303, being certain polarization direction incides on the polarizing beam splitter 304, through the optical splitter 304 a branch of smooth transmissions in back, back to catoptron 306 through first quarter wave plate 3051, catoptron 306 is certain angle of inclination and places, reflected light through catoptron 306 reflexes on the optical splitter 304 by first quarter wave plate 3051 again, because twice through first quarter wave plate 3051,90 degree rotations take place in the polarization direction, enter in the image sensor apparatus 307 by analyzer 308 in optical splitter 304 reflections, this image sensor apparatus 307 can be area array CCD or line array CCD or common sensor; Reflected light through optical splitter 304, by second quarter wave plate 3052 and condenser lens 309, focus on testee 30a surface, after the reflection of testee 30a surface, become directional light again through condenser lens 309, by entering optical splitter 304 behind second quarter wave plate 3052, because twice is passed through second quarter wave plate 3052,90 degree rotations take place in the polarization direction, enter in the image sensor apparatus 307 by analyzer 308 by optical splitter 304 transmissions; Two-beam all needs by analyzer 308 before entering image sensor apparatus 307, and two-beam can incide image sensor apparatus 307 with identical polarization direction like this; The optical path difference that pours into image sensor apparatus 307 from the light of the light of the foveal reflex of catoptron 306 and the reflection of testee 30a surface is identical, so can in certain scope, form interference from the light of optical splitter 304 transmissions and the light that reflects from optical splitter 304, because what adopt is short relevant wavelength, so this interference fringe just forms in certain scope of image sensor apparatus 307, center by the interference fringe on the analysis image sensor device 307, just can accurately know the testee surface with respect to the position of pick-up unit, and then can determine the displacement of testee.Suppose that the distance between the center of two interference fringes is L, the angle of inclination of catoptron 306 is α, and the displacement of testee 30a is L * tan(α so).
When bigger variation takes place in the reflectivity on testee 30a surface, can be by regulating the angle of the polarizer 303, the transmission and the reflection ratio that change optical splitter 304 are regulated.
The resolution of this system depends on the angle of inclination of catoptron 306 and the resolution of image sensor apparatus 307, irrelevant with the focal length of condenser lens 309, so can use numerical aperture less, work is apart from long simple condenser lens, overcome the design effort of traditional aberration microscope apart from weak point, expensive shortcoming;
Suppose that the measurement range that this device needs is made as 0.5mm, with catoptron 306 inclination 0.5mm, the reflected light on reflected light and testee surface is interfered, and the total resolution of linear CCD is 4000; Wavelength is 1.31um, so an interference fringe covers about 5 pixels, if coherent length is 10um, tens stripeds can appear at image sensor apparatus 307, carry out extraction and analysis by the profile to striped, determine the center of contrast, this position resolution of high match can reach 1/100 pixel, the resolution of this pick-up unit reaches the resolution of inferior nm like this, resolution be less than 1,000,000 of total test specification/, be better than confocal microscope, by the angle of inclination of accommodation reflex mirror, can realize the adjustment of measurement range easily, therefore this method has simple in structure, work is apart from length, measuring accuracy height, the advantage that measurement range is conveniently adjusted.
The above; only for the preferable embodiment of the present invention, but protection scope of the present invention is not limited thereto, and anyly is familiar with those skilled in the art in the technical scope that the present invention discloses; the variation that can expect easily or replacement all should be encompassed within protection scope of the present invention.Therefore, protection scope of the present invention should be as the criterion with the protection domain of claims.
Claims (10)
1. a high precision displacement pick-up unit is characterized in that, comprising:
Short coherent source, collimation lens, the polarizer, optical splitter, condenser lens, catoptron, analyzer, image sensing device and two quarter wave plates; Wherein,
Described short coherent source, collimation lens, the polarizer, optical splitter, first quarter wave plate and catoptron are a row and are arranged in order and become first light path;
Described condenser lens, second quarter wave plate, described optical splitter, analyzer and image sensing device are a row and are arranged in order and become second light path;
Described first light path and second light path through described optical splitter cross and described two light paths vertical mutually;
The light output end of described short coherent source is towards described collimation lens;
Described catoptron arranges in the described first light path medium dip, and can be adjusted at the angle of the described first light path medium dip.
2. device as claimed in claim 1 is characterized in that, in the described device,
Described short coherent source, collimation lens, the polarizer, optical splitter, first quarter wave plate, catoptron, first quarter wave plate, optical splitter, analyzer and image sensing device constitute first light-path;
Described short coherent source, collimation lens, the polarizer, optical splitter, second quarter wave plate, condenser lens, second quarter wave plate, optical splitter, analyzer and image sensing device constitute second light-path.
3. device as claimed in claim 1 or 2 is characterized in that, it is the led light source of 5～50um that described short coherent source adopts coherent length.
4. device as claimed in claim 1 or 2 is characterized in that, described catoptron tilts to place in described first light path at an angle.
5. device as claimed in claim 1 or 2 is characterized in that, the focus place of the condenser lens in described first light path is the testee lay down location.
6. device as claimed in claim 1 is characterized in that, and is in the described device, identical to the optical path difference of described image sensing device with the light of testee surface reflection from the light of the foveal reflex of described catoptron.
7. as claim 1 or 6 described devices, it is characterized in that described image sensing device adopts any in area array CCD device, line array CCD device or the imageing sensor.
8. as claim 1 or 6 described devices, it is characterized in that, also comprise: optical fiber, the input end of this optical fiber is connected with described condenser lens, and output terminal is corresponding with described second quarter wave plate.
9. a high precision displacement detection method is characterized in that, adopts each described pick-up unit of claim 1～8, may further comprise the steps:
Testee is arranged on the focus place of the condenser lens of described pick-up unit;
Described pick-up unit is after its short coherent source sends light, and after two light-path effects that two light paths form, its image sensing device receives the interference fringe that the reflected light on reflected light and testee surface is interfered formation;
By described testee being in the analyzing and processing of primary importance point first interference fringe that forms and second interference fringe that is in the formation of second place point, determine the displacement of described testee.
10. method as claimed in claim 9 is characterized in that, by described testee being in the analyzing and processing of primary importance point first interference fringe that forms and second interference fringe that is in the formation of second place point, determines that the displacement of described testee is:
Described profile to described first interference fringe and second interference fringe carries out extraction and analysis respectively, determines the center of the contrast of two interference fringes;
If the distance between the center of two interference fringes is L, and the tilt angle alpha of the catoptron of described pick-up unit, the displacement of described testee 30a is L * tan(α).
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| CN103868464A (en) * | 2014-03-27 | 2014-06-18 | 西安交通大学 | Sensor for active leveling detection of nanoimprint lithography working tables |
| CN107084665A (en) * | 2017-05-02 | 2017-08-22 | 中北大学 | A kind of Spectral Confocal displacement transducer |
| CN108817656A (en) * | 2018-06-19 | 2018-11-16 | 南京引创光电科技有限公司 | A kind of laser focusing system for realizing coaxial displacement measurement function |
| CN110857849A (en) * | 2018-08-24 | 2020-03-03 | 台湾东电化股份有限公司 | Modeling system |
| CN113137924A (en) * | 2020-01-17 | 2021-07-20 | 宁波舜宇车载光学技术有限公司 | Optical test system and method thereof |
| CN113280728A (en) * | 2021-05-14 | 2021-08-20 | 南京中科神光科技有限公司 | Spectrum confocal displacement sensor |
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| TWI786094B (en) * | 2017-03-14 | 2022-12-11 | 柏林工業大學 | Method and apparatus for carrying out a time-resolved interferometric measurement |
| CN107084665A (en) * | 2017-05-02 | 2017-08-22 | 中北大学 | A kind of Spectral Confocal displacement transducer |
| CN107084665B (en) * | 2017-05-02 | 2019-03-19 | 中北大学 | A kind of Spectral Confocal displacement sensor |
| CN108817656A (en) * | 2018-06-19 | 2018-11-16 | 南京引创光电科技有限公司 | A kind of laser focusing system for realizing coaxial displacement measurement function |
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| CN114812396A (en) * | 2022-03-11 | 2022-07-29 | 智慧星空(上海)工程技术有限公司 | Spectrum confocal measuring system |
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| CN114964157A (en) * | 2022-04-26 | 2022-08-30 | 深圳市深视智能科技有限公司 | Inclination angle measuring probe and measuring device |
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