CN113280728A - Spectrum confocal displacement sensor - Google Patents
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- CN113280728A CN113280728A CN202110531567.1A CN202110531567A CN113280728A CN 113280728 A CN113280728 A CN 113280728A CN 202110531567 A CN202110531567 A CN 202110531567A CN 113280728 A CN113280728 A CN 113280728A
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- 238000001228 spectrum Methods 0.000 title claims abstract description 32
- 238000006073 displacement reaction Methods 0.000 title claims abstract description 25
- 239000006185 dispersion Substances 0.000 claims abstract description 40
- 239000013307 optical fiber Substances 0.000 claims abstract description 24
- 238000012545 processing Methods 0.000 claims abstract description 13
- 230000010354 integration Effects 0.000 claims abstract description 12
- 238000010606 normalization Methods 0.000 claims abstract description 8
- 230000003595 spectral effect Effects 0.000 claims description 11
- 239000000835 fiber Substances 0.000 claims description 9
- 238000012544 monitoring process Methods 0.000 claims description 7
- 238000005286 illumination Methods 0.000 claims description 5
- 238000012937 correction Methods 0.000 claims description 3
- 239000005331 crown glasses (windows) Substances 0.000 claims description 2
- 239000005308 flint glass Substances 0.000 claims description 2
- 238000005259 measurement Methods 0.000 abstract description 21
- 230000003287 optical effect Effects 0.000 description 12
- 238000010586 diagram Methods 0.000 description 8
- 239000002184 metal Substances 0.000 description 6
- 238000005562 fading Methods 0.000 description 5
- 230000004075 alteration Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 230000008859 change Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000001914 filtration Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 238000011161 development Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 238000004886 process control Methods 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
- G01N21/45—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods
Abstract
The invention discloses a spectrum confocal displacement sensor.A wide spectrum LED divides light into two light paths through an optical fiber coupler and a beam splitter system, wherein the first light path is subjected to spectrum dispersion through a dispersion lens to form quasi-monochromatic light with different wavelengths, the second light path is directly and vertically incident to a mirror reflection module, white light normalization processing is carried out on the wide spectrum LED through a computer, the measurement precision is improved, the attenuation of the LED along with the use time is monitored, and the light source and the integration time are processed through normalization processing at regular time according to the attenuation; the light reflected into the optical fiber spectrometer by the first path of light through the dispersion lens and the object to be measured interferes with the white light reflected back to the optical fiber spectrometer by the second path of light, and the distance value is further calculated more accurately according to the distance between interference fringes. The invention realizes the combination of the primary distance value measurement of a single dispersion lens module and the accurate distance value measurement of the interference light of the dispersion lens module and the mirror reflection module, and improves the measurement accuracy.
Description
Technical Field
The invention relates to a photoelectric precision measuring instrument, in particular to a spectrum confocal displacement sensor.
Background
With the rapid development of high and new technology industries in China, the requirements on the precision of measurement and analysis of the surface detail micro structure, shape and texture roughness of parts are higher and higher; along with the improvement of the efficiency and the precision requirements of online quality detection, process control, lossless measurement and reverse engineering in an industrial environment, the non-contact geometric displacement measurement is more and more required, and the precision requirement is higher and more high.
The measurement techniques capable of performing high-efficiency and high-precision measurement are mainly classified into contact measurement and non-contact measurement (mainly photoelectric measurement). Triangulation is the most widely used in the non-contact geometric dimension measurement market, and triangulation is a method in which a change in the distance of an object to be measured is measured using a change in the position of a light spot on a photosensitive element, and a characteristic value such as a peak or a center of gravity is calculated from a waveform on the photosensitive element. When the surface material of the tested sample is different or the roughness is different, the waveform on the photosensitive element is disordered; when the measurement surface is inclined, the obliquely reflected light causes aberration, resulting in deviation or confusion in the position of the waveform.
The non-contact type spectrum confocal technology is a novel high-precision detection mode researched in recent years. The principle of the spectrum confocal displacement sensor is derived from a confocal microscopic principle, a beam of polychromatic light is subjected to spectrum dispersion through a dispersion lens to obtain monochromatic light with different wavelengths, each wavelength corresponds to a distance value from a measured object, the monochromatic light with different wavelengths is emitted to the surface of the object, focused light and unfocused stray light corresponding to the measured object are reflected, a small hole is arranged at a receiving end of the dispersion lens, the focused light passes through the small hole, and the unfocused light is intercepted. And obtaining light intensities of different wavelengths through the spectral light splitting receiver, wherein the maximum peak value of the light intensity corresponds to the position of the measured object. The coaxial confocal principle can ensure that high-precision measurement can be carried out even if the measured object is inclined or warped, the measuring point cannot be changed, and the traditional triangular laser ranging method is overturned.
Disclosure of Invention
The purpose of the invention is as follows: the invention provides a spectrum confocal displacement sensor, which can overcome the technical problems of low measurement precision and low processing speed of the spectrum confocal displacement sensor in the prior art, and remarkably improves the measurement precision and the processing speed of the spectrum confocal displacement sensor.
The technical scheme is as follows: the technical scheme adopted by the invention is that the spectrum confocal displacement sensor comprises a broad spectrum light source, a beam splitter system, a dispersion lens, an optical fiber spectrometer and a mirror reflection module, wherein light rays emitted by the broad spectrum light source are divided into two light paths through the beam splitter system, the first light ray generates spectrum dispersion through the dispersion lens to form quasi-monochromatic light with different wavelengths and enters a measured object, the second light ray enters the mirror reflection module, the first light ray is reflected back to the beam splitter system through the measured object and the second light ray is reflected back to the beam splitter system through the optical fiber spectrometer to generate interference, and a distance value is calculated according to the distance between interference fringes.
Wherein the broad spectrum light source is selected to be an LED light source, preferably a white LED light source, having a sufficiently broad spectrum. The beam splitter is a semi-transparent semi-reflecting mirror, and adopts an X-shaped shunting mode, wherein an LED light source and an optical fiber spectrometer are arranged at the same end of the beam splitter, and a dispersion lens and a mirror reflection module are arranged at the other end of the beam splitter, and the light energy splitting ratio is 50: 50-mode beam splitting is carried out to realize maximum return light; wherein the light rays connected with the mirror reflection module are provided with a control switch system. The dispersion lens has a large numerical aperture, the preferred numerical aperture range is 0.4-0.5, the utilization rate of the system to light energy can be increased, and the resolution of the system can be improved; crown and flint positive and negative power lenses are combined to eliminate spherical and positional chromatic aberrations. The confocal pinhole ruler is designed to maximize the ratio of the peak light intensity to the spectral bandwidth. The mirror reflection device adopts a polished metal flat plate, the optical fiber vertically enters the metal flat plate, and the distance between the optical fiber and the metal flat plate is fixed.
The optical fiber spectrometer adopts a Czerny-Turner optical mechanism, uses a reflection grating as a light splitting element, adopts an array photoelectric detector CCD as a signal receiving element, a plano-convex cylindrical mirror which has the same height as a linear array detector is arranged at the front end of the photoelectric detector in the optical fiber spectrometer, and the horizontal included angle between the plano-convex cylindrical mirror and the linear array detector is adjustable. The horizontal included angle between the cylindrical mirror and the linear array is adjusted to correct the uniformity of light energy distribution of the optical system on the detector, and in addition, the light energy density on the detector can be improved, the integration time is reduced, and the processing speed is accelerated.
The device also comprises a processor electrically connected with the optical fiber spectrometer, wherein the processor monitors the illuminance of the broad spectrum light source collected by the optical fiber spectrometer at regular time, and normalizes the spectral illuminance of the light source and corrects the integral time according to the attenuation of the illumination intensity. The correction of the integration time means that the integration time t is set as a variable, a standard energy value of the spectrometer under the monitoring of the white light LED is specified to be a ± Δ a, when the energy value of the spectrometer under the monitoring of the white light LED is lower than a- Δ a along with the attenuation of the light energy of the LED, the software adjusts the integration time by t + Δ t × i (i is 0, 1, 2, 3.. said., Δ t is 1us), and the value of i is gradually increased until the energy value reaches a + Δ a.
And adjusting the distance between the measured sample and the dispersion lens, wherein the light returned to the spectrometer by the optical path of the dispersion lens can be ignored outside the measuring range. Only the white light reflected by the second path of light through the mirror reflection module is collected by the spectrometer, and then the computer performs illumination normalization processing on the white light LED spectral distribution received by the detector, so that the LED light sources are idealized to be the same as the energy excited by each wavelength.
The device also comprises a controller and a switch control system, wherein the controller controls the on/off of the second path of light rays through the switch control system. And setting a light path control switch system of the beam splitter, which is connected with the mirror reflection module, to be closed, adjusting the distance between the measured sample and the dispersion lens within a measuring range, dispersing the light of the second light path by the dispersion lens, then irradiating the light on the measured sample, reflecting the specific wavelength spectrum by the measured sample, returning the light by the dispersion lens, and collecting the light returned by the dispersion lens module by the spectrometer. And setting a light path control switch system of the beam splitter connected with the specular reflection module to be on, enabling the first light path and the second light path to work simultaneously, enabling light reflected by the first light path to interfere with light reflected by the second light path, enabling the detector to present interference fringes, and further calculating the precision of the position of the detected sample according to the fringe intervals of the interference fringes.
The computer carries out a series of data processing such as filtering and denoising on the input oscillogram to obtain a stable oscillogram corresponding to each measuring distance. And determining the position of the detected sample according to the linear relation between the dispersion distance and the dispersion wavelength of the dispersion lens and the monochromatic light wavelength corresponding to the peak point of the oscillogram received by the detector.
Has the advantages that: compared with the prior art, the invention has the following advantages: 1. the spectrum confocal displacement sensor firstly uses the sample reflected light fed back by the dispersion lens module to roughly calculate the position value of the sample, and then uses the sample reflected light reflected by the dispersion lens module to interfere in white light, so as to further calculate the position value of the sample finely, and compared with the traditional spectrum confocal displacement sensor, the precision is greatly improved; 2. the spectrum confocal displacement sensor adopts spectrum illuminance normalization processing on the white light LED light source, so that the influence that the peak wavelength is not confocal wavelength due to the non-uniformity of the light intensity distribution of the light source, different response degrees of a CCD (charge coupled device) and a grating in a spectrometer to different light wavelengths and different response degrees of an optical fiber coupler to different wavelengths can be effectively solved, and the measurement precision is further improved; 3. the light source normalization is carried out according to the fading value, and the integral time is corrected, so that the deviation of the measuring result caused by the fading of the LED light energy is avoided.
Drawings
Fig. 1 is a schematic structural diagram of a spectral confocal displacement sensor according to the present invention;
FIG. 2 is a schematic diagram of the structure and optical path of the dispersion lens according to the present invention;
FIG. 3 is a schematic diagram of the structure and optical path of the fiber spectrometer of the present invention;
FIG. 4 is a waveform diagram of an operating spectrum of a single dispersive lens module collected by the detector of the present invention;
fig. 5 is a waveform diagram of the spectrum of the interference light of the dispersive lens module and the specular reflection module collected by the detector of the present invention.
Detailed Description
The technical solution of the present invention is further described below with reference to the accompanying drawings and examples.
The structure of the spectral confocal displacement sensor is shown in fig. 1, and comprises:
The beam splitter 200, the beam splitter device adopts the half mirror that passes through, assembles beam splitter 200 between light source and dispersion lens and between fiber optic spectrometer and specular reflection module, has four optic fibres to be used for transmitting light on the beam splitter, adopts "X" shape branch way, and wherein LED light source and fiber optic spectrometer are at the same end of beam splitter, and dispersion lens 300 and specular reflection module 900 are at the other end of beam splitter to light energy splitting ratio 50: 50 mode beam splitting, and a switch control system 800 is arranged in the light path of the beam splitter connected with the mirror reflection module.
The structure and the optical path of the dispersing lens 300 are schematically shown in fig. 2. The dispersive lens 300 adopts a large numerical aperture, which can increase the utilization rate of the system to the light energy and improve the resolution of the system. The collimating lens group 302 collimates the fiber input light into parallel light, and focuses the light with different wavelengths on different positions of the optical axis through the dispersion lens group 303, wherein the collimating lens group 302 and the dispersion lens group 303 both use crown glass and flint glass positive and negative power lens combination to eliminate spherical aberration and position chromatic aberration. The confocal pinhole ruler is designed to maximize the ratio of the peak light intensity to the spectral bandwidth. The light emitted from the point 301 is focused to different positions such as a point 304 and a point 305 respectively according to different wavelengths through the dispersion lens.
The specular reflection module 900 is a polished metal plate, the optical fiber vertically enters the metal plate, and the distance between the optical fiber and the metal plate is constant.
The structure and optical path schematic diagram of the optical fiber spectrometer 500 is shown in fig. 3, a Czerny-Turner optical mechanism is adopted, an optical fiber input light 501 is collimated into parallel light by a collimating mirror 502 and split by a reflecting plane grating 503, the light split by the grating is converged by a condensing mirror 504, an array photoelectric detector CCD is adopted as a signal receiving element, a plano-convex cylindrical mirror 505 with the same height as a linear array is placed in front of a detector 506, the optical energy density on the detector is improved, the integration time is reduced, the processing speed is accelerated, the horizontal included angle between the cylindrical mirror and the linear array is adjusted, and the uniformity of the optical energy density on the detector is modulated.
As shown in fig. 1, the white LED light source emits a white light source 1000, which is split by a beam splitter 200. The distance between the sample 400 and the dispersing lens 300 is adjusted, and the light returned to the spectrometer by the light path of the dispersing lens 300 can be ignored when the distance is out of the range of the measuring range. Only the white light of the second path of light 1200 reflected by the mirror reflection module is collected by the spectrometer, the signal processing module 700 in the computer 600 performs illumination normalization processing on the spectral distribution of the white light LED, and the LED light sources are idealized to be the same as the energy excited by each wavelength, so that the influence that the peak wavelength is not the confocal wavelength is solved, and the measurement accuracy is effectively improved; the method comprises the steps of monitoring the fading condition of LED light energy by periodically collecting white light LED spectrum information of a spectrum confocal displacement sensor, normalizing a light source again according to the fading condition, and correcting integral time, so that the deviation of a measurement result caused by the fading of the LED light energy is avoided. The method for correcting the integration time specifically comprises the following steps: setting the integration time t as a variable, setting a standard energy value of the spectrometer under the monitoring of the white light LED as A + delta a, and when the energy value of the spectrometer under the monitoring of the white light LED is lower than A-delta a along with the attenuation of the light energy of the LED, the software adjusts the integration time t + At i (i is 0, 1, 2, 3, 1us is taken for delta t), and gradually increasing the value of i until the energy value reaches A + delta a.
The light path control switch system 800 is set to be closed, the distance between the measured sample and the dispersion lens is adjusted to be within the range of measurement range, the second path of light is dispersed by the dispersion lens and then is emitted to the measured sample, the spectrum with the specific wavelength reflected by the measured sample returns through the dispersion lens, the light 1300 is collected by the spectrometer through the optical fiber 1100, the spectrum oscillogram collected by the spectrometer is shown in figure 4, and the signal filtering processing is carried out on the collected oscillogram to obtain the initial position value of the measured sample.
The optical path control switch system 800 is set to be on, the specular reflection module 900 and the dispersion lens module 300 work simultaneously, light (light 1200) reflected by the specular reflection module is transmitted into the optical fiber spectrometer through the optical fiber 1100, light (light 1300) reflected by a sample to be measured of the dispersion lens module is also transmitted into the optical fiber spectrometer through the optical fiber 1100, two beams of reflected light interfere, interference fringes are collected by a spectrometer detector, a spectrum waveform diagram of the interference fringes is shown in fig. 5, and a measured sample position value (highest energy peak position) is calculated with higher precision according to the fringe intervals of the interference fringes. Fig. 4 is a waveform diagram of a spectrum acquired by the detector according to the present invention, and compared with a position result obtained by single module operation, a position accuracy obtained by double module operation is greatly improved.
Claims (9)
1. A spectral confocal displacement sensor, characterized by: including broad spectrum light source, beam splitter system, dispersion camera lens, fiber optic spectrometer and specular reflection module, the light that the broad spectrum light source sent passes through the beam splitter system and divide into two light paths, and wherein first way light passes through the dispersion camera lens and produces spectral dispersion, forms the quasi monochromatic light of different wavelength and incides to the testee, and mirror reflection module is incided to second way light, and first way light is gathered and is interfered in the fiber optic spectrometer by the fiber optic spectrometer with the light that the beam splitter system was reflected back to the second way light through the testee, calculates the distance value according to the interference fringe.
2. The spectroscopic confocal displacement sensor of claim 1, wherein: a plano-convex cylindrical mirror which is equal to the linear array detector in height is arranged at the front end of a photoelectric detector in the optical fiber spectrometer, and the horizontal included angle between the plano-convex cylindrical mirror and the linear array detector is adjustable.
3. The spectroscopic confocal displacement sensor of claim 1, wherein: the device also comprises a processor electrically connected with the fiber spectrometer, and the processor is used for carrying out normalization processing on the illuminance of the broad spectrum light source.
4. The spectroscopic confocal displacement sensor of claim 3, wherein: the processor monitors the illuminance of the broad spectrum light source collected by the fiber spectrometer at regular time, and the spectral illuminance and the correction integral time of the light source are processed by normalization again according to the attenuation of the illumination intensity.
5. The spectroscopic confocal displacement sensor of claim 4, wherein: and the correction of the integration time means that the integration time t is set as a variable, a standard energy value of the spectrometer under the monitoring of the white light LED is specified to be A +/-delta a, and when the energy value of the spectrometer under the monitoring of the white light LED is lower than A-delta a along with the attenuation of the LED light energy, the software adjusts the integration time by t + delta t i, wherein i is 0, 1, 2, 3.
6. The spectroscopic confocal displacement sensor of claim 1, wherein: the device also comprises a controller and a switch control system, wherein the controller controls the on/off of the second path of light rays through the switch control system.
7. The spectroscopic confocal displacement sensor of claim 1, wherein: the beam splitter system adopts an X-shaped splitting way, wherein the broad spectrum light source and the optical fiber spectrometer are arranged at the same end of the beam splitter system, and the dispersion lens and the mirror reflection module are arranged at the other end of the beam splitter; the beam splitter adopts a semi-transparent semi-reflecting mirror and splits the beams in a way that the light energy splitting ratio is 50: 50.
8. The spectroscopic confocal displacement sensor of claim 1, wherein: the dispersion lens adopts a numerical aperture range of 0.4-0.5 and adopts a combination of crown glass and flint glass positive and negative focal power lenses.
9. The spectroscopic confocal displacement sensor of claim 1, wherein: the wide-spectrum light source adopts a white light LED light source.
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114001645A (en) * | 2021-10-28 | 2022-02-01 | 山西大学 | Three-wavelength optical fiber point differential confocal microscopic detection method and device |
| CN114485422A (en) * | 2022-01-27 | 2022-05-13 | 深圳市深视智能科技有限公司 | Spectrum confocal detection method and device and electronic equipment |
| CN116447988A (en) * | 2023-06-16 | 2023-07-18 | 宁德微图智能科技有限公司 | Triangular laser measurement method adopting wide-spectrum light source |
| CN117537715A (en) * | 2022-02-17 | 2024-02-09 | 智慧星空(上海)工程技术有限公司 | Spectrum-adjustable confocal displacement and thickness measuring system and method |
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| CN117537715A (en) * | 2022-02-17 | 2024-02-09 | 智慧星空(上海)工程技术有限公司 | Spectrum-adjustable confocal displacement and thickness measuring system and method |
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