CN114001645A - Three-wavelength optical fiber point differential confocal microscopic detection method and device - Google Patents
Three-wavelength optical fiber point differential confocal microscopic detection method and device Download PDFInfo
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Abstract
The invention belongs to the technical field of optical imaging and detection, and discloses a three-wavelength optical fiber point differential confocal microscopic detection method and a device, wherein the device comprises a three-wavelength light source, an optical fiber coupler, a dispersion objective lens and a detection module; illumination beams with three different wavelengths emitted by the three-wavelength light source are incident to the dispersion objective lens after passing through the optical fiber coupler; the dispersion objective is used for focusing light with various wavelengths at different positions on the optical axis of the dispersion objective to form measuring beams which are irradiated on the surface of a measured sample; the measuring beam reflected from the surface of the measured sample returns to the optical fiber coupler along the original optical path after passing through the dispersion objective lens, and enters the detection module after passing through the optical fiber coupler to obtain confocal response intensity values of the illumination beam under three different wavelengths, wherein the confocal response intensity values are used for calculating and obtaining displacement information of the surface of the measured sample. The invention has the advantages of high signal-to-noise ratio, high measurement speed, simple structure, simple assembly and adjustment and the like.
Description
Technical Field
The invention belongs to the technical field of optical imaging and detection, and particularly relates to a three-wavelength optical fiber point differential confocal micro-detection method and device, which can be used for high-speed and high-precision measurement of surface appearance of various micro-nano precision samples such as integrated circuits, MEMS devices, micro-mirror arrays, micro-fluid devices and the like.
Background
The confocal microscope is invented by Marvin Minsky of America in 1957, and the basic principle is that a point light source, an object and a point detector are arranged at conjugate positions, and the conjugate design enables the confocal microscope to have axial chromatography capacity and can meet the surface morphology measurement of various micro-nano structures. However, in the process of implementing axial tomography measurement by using a conventional confocal microscope, a motion device such as a motor or piezoelectric ceramic needs to be controlled to accurately move a microscope objective or a measured sample along the optical axis direction of the objective, a detector acquires confocal response intensities when the motion device is at different displacement positions, so as to obtain a confocal response intensity curve of the confocal microscope, and the acquired confocal response intensity curve data is subjected to peak extraction and other operation processing to obtain the surface topography information of the measured sample. However, the axial scanning speed and precision of the mechanical device are low, so that the measurement speed of the confocal microscope is slow, and the measurement precision is limited.
In order to improve the measurement speed and measurement accuracy of the conventional confocal microscope, in the invention patent CN 109307481 a, "high-speed sensing confocal microscopy measurement method", the moving device is precisely controlled to move at a larger sampling interval, the confocal response intensity of the moving device at different displacement positions is obtained by the detector, and the surface morphology of the measured sample is rapidly and highly accurately obtained by performing differential processing on the intensity values at two sides of the maximum intensity. Although the above method can significantly reduce the number of axial scans of the moving device, several axial scans are still required, limiting further improvements in measurement speed and measurement accuracy. A variable threshold peak value extraction algorithm is provided in a literature, namely, a local adaptive threshold localization in confocal microscopy, published in Optics Letters, and can be used for carrying out high-precision processing on confocal response intensity curve data under a large sampling interval, so that the confocal microscopic measurement speed and precision are remarkably improved. However, the above method is similar to the problem of CN 109307481 a, i.e. scanning with a precise operating device is still required, and the confocal microscopic measurement speed and accuracy cannot be further improved. The document Real-time laser differential confocal microscopic with out sample reflectivity effects published on Optics Express uses two point detectors, wherein one point detector is arranged at a tiny interval before the point light source conjugate position, the other point detector is arranged at a tiny interval equal to the point light source conjugate position, and the surface topography of a sample to be measured is obtained quickly and accurately by differentiating the confocal response curve intensity values collected by the two point detectors. However, when constructing a confocal microscopy system, the above method has the following disadvantages: firstly, the light path adjustment process of the single-point detector and the point light source conjugation is more complex, and the light path adjustment is more complex due to the design of the double-point detector in the method; the displacement offset of the two point detectors along the optical axis direction of the measuring beam needs to be controlled in the micron order, and extremely high requirements are provided for the machining precision of mechanical assembly parts; thirdly, the measuring range of the method is limited by the depth of field of the microscope objective, can only be maintained to be about microns to tens of microns, and cannot meet the requirement of measuring the appearance of the longitudinal large-range complex curved surface micro-nano structure.
Disclosure of Invention
The invention overcomes the defects of the prior art, and solves the technical problems that: the three-wavelength optical fiber point difference confocal microscopic detection method and device are provided to reduce the adjustment and assembly difficulty of the device and improve the measurement speed and the measurement precision.
In order to solve the technical problems, the invention adopts the technical scheme that: three wavelength optical fiber point difference confocal micro-detection device includes: the system comprises a three-wavelength light source, an optical fiber coupler, a dispersion objective lens and a detection module;
the three-wavelength light source is used for emitting illumination light beams with three different wavelengths, the output end of the three-wavelength light source is connected with the input end of the optical fiber coupler through an illumination end optical fiber, and the illumination light beams emitted by the three-wavelength light source are incident to the dispersion objective lens after passing through the optical fiber coupler; the dispersion objective lens has different focal lengths for light with different wavelengths and is used for focusing the light with each wavelength at different positions on the optical axis of the dispersion objective lens to form measuring beams which are irradiated on the surface of a measured sample; the measuring light beam reflected from the surface of the measured sample returns to the optical fiber coupler along the original light path after passing through the dispersive objective lens, and is output by the optical fiber coupler and then enters the detection module, the detection module is used for measuring and obtaining single optical fiber confocal response intensity values of the illumination light beam under three different wavelengths, and the single optical fiber confocal response intensity valueI 1、I 2、I 3And the displacement information of the surface of the measured sample is obtained through calculation.
The detection module comprises a wavelength light splitting device and a detector;
the wavelength light splitting device is used for sending different wavelengths in the measuring light beam to different detection areas of the detector, and light intensity values obtained by the different detection areas of the detector are single-optical-fiber confocal response intensity values of the illumination light beam under three different wavelengthsI 1、I 2、I 3。
The wavelength dispersion device includes: the grating and the spherical focusing mirror are respectively arranged on two sides of the spherical reflecting mirror, measuring beams reflected from the surface of a sample to be measured sequentially pass through a dispersion objective lens, an optical fiber coupler and a detection end optical fiber and then enter the spherical reflecting mirror, then enter the grating after being reflected by the spherical reflecting mirror, and after being reflected by the grating, illuminating beams with various wavelengths are separated and then enter different detection areas of the detector after being reflected by the spherical focusing mirror.
The detection module comprises a collimating mirror, a first dichroic beam splitter, a second dichroic beam splitter and three detection units; the collimating mirror is used for collimating the measuring beam output from the detection end optical fiber, the collimated beam sequentially passes through the first dichroic beam splitter and the second dichroic beam splitter to separate the measuring beams with three wavelengths, and the three detection units are respectively used for detecting the measuring beam with one wavelength;
or the detection module comprises a collimating mirror, a first light splitting unit, a second light splitting unit, three narrow-band filters and three detection units; the collimating lens is used for collimating the measuring light beams output from the detection end optical fiber, the collimated light beams are divided into three beams after passing through the first light splitting unit and the second light splitting unit in sequence, each beam of light is changed into a single-wavelength light beam after passing through a narrow-band filter respectively, the three single-wavelength light beams are incident to one of the detection units respectively, and the three detection units are used for detecting the measuring light beams with one of the wavelengths respectively;
or, the detection module comprises a wavelength division multiplexer and three detection units;
alternatively, the detection module is a spectrometer.
The three-wavelength optical fiber point difference confocal microscopic detection device also comprises a microprocessor and a time division driving circuit, wherein the microprocessor is used for controlling the time division driving circuit to generate periodic pulse signals, the rising edge of the pulse signals stimulates the driving circuit to sequentially supply power to the sub-light source modules with different wavelengths in the three-wavelength light source, and the single-wavelength illumination light beams with three different wavelengths are sequentially generated at different moments;
the detection module is a single detector.
The dispersion objective lens comprises an achromatic lens, a concave lens, a first convex lens, a second convex lens and a third convex lens which are coaxially arranged in sequence;
the three-wavelength light source comprises a first single-wavelength optical fiber light source, a second single-wavelength optical fiber light source, a third single-wavelength optical fiber light source and an optical fiber beam combiner, and the output ends of the first single-wavelength optical fiber light source, the second single-wavelength optical fiber light source and the third single-wavelength optical fiber light source are connected with the optical fiber beam combiner.
The three-wavelength optical fiber point difference confocal micro-detection device also comprises a propelling structure, wherein the propelling structure is used for moving a detected sample along the direction vertical to the optical axis of the measuring beam;
alternatively, the propulsion mechanism is adapted to move the detection device.
The invention also provides a three-wavelength optical fiber point differential confocal microscopic detection method, which is realized by adopting the three-wavelength optical fiber point differential confocal microscopic detection device and comprises the following steps:
s1, calibration: setting the calibration sample on the optical axis of the measuring beam, controlling the calibration sample to move along the optical axis of the measuring beam, measuring and recording the displacement value of the calibration sample along the optical axis of the measuring beam, and calibrating the wavelength of the calibration sample under each displacement valueλ 1、λ 2、λ 3Then, carrying out differential processing on the confocal response intensity values under any adjacent wavelengths to obtain a first differential confocal response value and a second differential confocal response value;constructing a corresponding relation between the displacement value and the first and second differential confocal response values, and calibrating the relation between the first and second differential confocal response values and the displacement;
s2, measurement process: arranging the sample to be measured on the optical axis of the measuring beam, measuring and recording the wavelength of the sample to be measuredλ 1、λ 2、λ 3Then carrying out differential processing on the confocal response intensity values under any adjacent wavelengths to obtain a first differential confocal response value and a second differential confocal response value; obtaining the displacement of the detected sample according to the calibration relation between the first and second differential confocal response values and the displacement;
s3, moving the measured sample along the direction vertical to the optical axis of the measuring beam, repeating the step S2, and obtaining the displacement information of the measured sample surface at different positions along the optical axis of the measuring beam, thereby obtaining the appearance information of the measured sample.
The calculation formula of the first and second differential confocal response values is as follows:
dI 21=(I 2–I 1)/(I 2+I 1)，dI 32=(I 3–I 2)/(I 3+I 2)；
or dI 21=(I 2–I 1)，dI 32=(I 3–I 2)；
Wherein d isI 21And dI 32Respectively representing a first differential response value and a second differential response value,I 1、I 2、I 3respectively indicating the wavelength of the measuring deviceλ 1、λ 2、λ 3Single fiber confocal response intensity values below.
The specific steps of step S3 are:
moving the measured sample in one dimension along the direction vertical to the optical axis of the measuring beam, repeating the step S2, obtaining displacement information of different positions along the optical axis of the measuring beam on one straight line of the surface of the measured sample, and thus obtaining the profile and roughness information of the measured sample;
or the following steps:
and (5) moving the measured sample in two dimensions along the direction vertical to the optical axis of the measuring beam, repeating the step S2, and obtaining the displacement information of the measured sample surface at different positions along the optical axis of the measuring beam, thereby obtaining the three-dimensional shape information of the measured sample.
Compared with the prior art, the invention has the following beneficial effects:
1. the invention provides a three-wavelength optical fiber point difference confocal micro-detection device and a three-wavelength optical fiber point difference confocal micro-detection method, which can realize the measurement of a sample without axial mechanical scanning and have the advantages of simple structure and the like
2. According to the three-wavelength optical fiber point difference confocal microscopic measurement technology, a linear region with a larger slope in a confocal response curve is used for replacing a vertex region with a zero slope in the traditional confocal technology to detect displacement information, so that the sensitivity and the measurement precision are obviously improved;
3. the invention only needs a common photoelectric detector to measure the illumination wavelengthλ 1、λ 2、λ 3The single optical fiber confocal response intensity value signal has the advantages of high signal-to-noise ratio, high measurement speed and the like;
4. the invention uses the optical fiber tail end of the optical fiber device as the optical fiber lighting pinhole and the optical fiber detection pinhole to respectively emit the lighting beam and collect the measuring beam reflected by the sample, can directly realize the self-alignment confocal, does not need the light path adjustment, and has the advantages of simple structure and the like.
Drawings
Fig. 1 is a schematic diagram of a three-wavelength optical fiber point differential confocal micro-detection apparatus provided in embodiment 1 of the present invention;
FIG. 2 is a diagram showing an optical path configuration of a dispersive objective lens in embodiment 1 of the present invention;
FIG. 3 is a schematic view of a wavelength dispersion device and a detector in embodiment 2 of the present invention;
FIG. 4 is a schematic view of a wavelength dispersion device and a detector in embodiment 3 of the present invention;
FIG. 5 is a schematic diagram of a three-wavelength fiber point differential confocal micro-detection apparatus provided in embodiment 4 of the present invention;
FIG. 6 is a schematic diagram of a three-wavelength fiber point differential confocal micro-detection apparatus provided in example 5 of the present invention;
fig. 7 is a graph showing a relationship between a single-fiber confocal response intensity value and a sample displacement at different wavelengths in a three-wavelength fiber point differential confocal microscopic detection method according to embodiment 6 of the present invention;
FIG. 8 is a graph showing the relationship between the differential confocal response values of adjacent wavelengths and the displacement of the sample in example 6 of the present invention;
wherein: 1-three wavelength light source, 101-first single wavelength fiber light source, 102-second single wavelength fiber light source, 103-third single wavelength fiber light source, 104-fiber beam combiner, 2-fiber coupler, 201-illumination end fiber, 202-coupling unit, 203-common end fiber, 204-detection end fiber, 3-dispersion objective, 301-achromatic lens, 302-concave lens, 303-first convex lens, 304-second convex lens, 305-third convex lens, 4-tested sample, 5-wavelength light splitting device, 501-spherical reflector, 502-grating, 503-spherical focusing lens, 504-collimating mirror, 505-first dichroic beam splitter, 506-second dichroic beam splitter, 507-first beam splitter, 508-second beam splitter, 509-narrow band filter, 512-wavelength division multiplexer, 513-time division driving circuit, 6-detector, 601-detection unit, 604-optical fiber detection unit, and 7-microprocessor.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below, and it is obvious that the described embodiments are some embodiments of the present invention, but not all embodiments; all other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Example 1
As shown in fig. 1, embodiment 1 of the present invention provides a three-wavelength optical fiber point differential confocal micro-detection apparatus, including: the device comprises a three-wavelength light source 1, an optical fiber coupler 2, a dispersion objective lens 3 and a detection module. Specifically, in the present embodiment, the fiber coupler 2 includes an illumination-side fiber 201, a coupling unit 202, a common-side fiber 203, and a detection-side fiber 204.
The three-wavelength light source 1 is used for emitting illumination light beams with three different wavelengths, the output end of the three-wavelength light source 1 is connected with the input end of the coupling unit 202 through an illumination end optical fiber 201, and the illumination light beams emitted by the three-wavelength light source 1 enter the dispersion objective lens 3 after passing through the illumination end optical fiber 201, the coupling unit 202 and a common end optical fiber 203; the dispersion objective lens 3 has different focal lengths for light with different wavelengths, and is used for focusing light with various wavelengths at different positions on the optical axis of the dispersion objective lens 3 to form measuring beams which are irradiated on the surface of a measured sample 4; the measuring beam reflected from the surface of the measured sample 4 passes through the dispersive objective lens 3 and then returns to the public end optical fiber 203 and the coupling unit 202 along the original optical path, passes through the coupling unit 202 and then enters the detection end optical fiber 204, and then enters the detection module after being output by the detection end optical fiber 204, the detection module measures and obtains single optical fiber confocal response intensity values of the illumination beam under three different wavelengths, and the single optical fiber confocal response intensity valuesI 1、I 2、I 3Used for calculating and obtaining the displacement information of the surface of the tested sample 4.
Specifically, in this embodiment, the detection module includes a wavelength splitting device 5 and a detector 6. The measuring beams output by the detection end optical fiber 204 are incident to the wavelength light splitting device 5, after passing through the wavelength light splitting device 5, the measuring beams with three wavelengths are respectively incident to different detection areas of the detector 6, and the single optical fiber confocal response intensity values of the measuring device under three different wavelengths are obtained through measurement by the detector 6. That is to say, in this embodiment, the wavelength splitting device 5 is configured to send the light beams with different wavelengths to different detection regions of the detector 6, and the light intensity values obtained by the different detection regions of the detector 6 are the light intensity values of the detected sample with the wavelengths respectively being the same as the wavelengths of the detected sampleλ 1、λ 2、λ 3Single optical fiber confocal response intensity valueI 1、I 2、I 3。
Further, in the present embodiment, as shown in fig. 1, the wavelength dispersion device 5 includes: the device comprises a spherical reflector 501, a grating 502 and a spherical focusing mirror 503, wherein the grating 502 and the spherical focusing mirror 503 are respectively arranged at two sides of the spherical reflector 701, measuring beams reflected from the surface of a sample 4 to be measured sequentially pass through a dispersion objective lens 3, an optical fiber coupler 2 and a detection end optical fiber 204 and then are output and incident to the spherical reflector 501, then are reflected by the spherical reflector 501 and then are incident to the grating 502, and after being reflected by the grating 502, illuminating beams with various wavelengths are separated and then are incident to different detection areas of a detector 6 after being reflected by the spherical focusing mirror 503.
Further, as shown in fig. 1, the three-wavelength optical fiber point differential confocal micro-detection apparatus of this embodiment further includes a microprocessor 7, in this embodiment, the microprocessor 7 is configured to receive detection signals of the detector, that is, the wavelengths of the sample to be detected are respectively the sameλ 1、λ 2、λ 3Single optical fiber confocal response intensity valueI 1、I 2、I 3And based on the confocal response intensity value of the single optical fiberI 1、I 2、I 3And calculating to obtain the displacement information of the surface of the measured sample 4.
Further, as shown in fig. 2, in this embodiment, the dispersion objective 3 includes an achromatic lens 301 (focal length 23mm, clear aperture 5.2 mm), a concave lens 302 (focal length-14 mm, clear aperture 15 mm), a first convex lens 303 (focal length 23.8mm, clear aperture 25.4 mm), a second convex lens 304 (focal length 34mm, clear aperture 25.4 mm), and a third convex lens 305 (focal length 34mm, clear aperture 22 mm), which are coaxially disposed in sequence, and the basic working principle of the dispersion objective 3 is as follows: the achromatic lens 301 collimates the three-wavelength point illumination beam, sends the collimated three-wavelength point illumination beam into the concave lens 302 for divergence, and then focuses the three-wavelength point illumination beam on different positions on the optical axis OA1 after passing through the first convex lens 303, the second convex lens 304 and the third convex lens 305 in sequence, such as the wavelengthλ 1=450nm、λ 2=455nm、λ 3Beams of =460nm are focused at 16.5mm, 16.505mm, 16.510mm from the optical axis of the dispersive objective lens.
Further, in the present embodiment, the detector 6 includes a detectable wavelengthλ 1、λ 2、λ 3The detection area of intensity.
Further, in the present embodiment, the wavelength splitting device 5 and the detector 6 may be replaced by a spectrometer.
Further, as shown in fig. 1, in the present embodiment, the three-wavelength light source 1 includes a first single-wavelength fiber light source 101, a second single-wavelength fiber light source 102, a third single-wavelength fiber light source 103, and an optical fiber combiner 104, where the first single-wavelength fiber light source 101, the second single-wavelength fiber light source 102, and the third single-wavelength fiber light source 103 respectively emit wavelengthsλ 1=450nm、λ 2=455nm、λ 3The beams with three wavelengths are combined into one beam by the optical fiber combiner 104, and output to the optical fiber coupler 2 through the illumination end optical fiber 201.
The working principle of the embodiment is as follows: the three-wavelength light source 1 emits light with a wavelengthλ 1=450nm、λ 2=455nm、λ 3An illumination beam of =460nm is output to the optical fiber coupler 2 through an illumination end optical fiber 201, and then enters the dispersion objective lens 3 through a common end optical fiber 203; dispersive objective lens 3 converts wavelengthλ 1=450nm、λ 2=455nm、λ 3=460nm focused at 16.5mm, 16.505mm, 16.510mm of the optical axis of the dispersive objective lens; the illumination beam passing through the dispersive objective lens 3 is focused to form a measuring beam which is irradiated on the surface of a sample 4 to be measured; the measured sample 4 reflects the measuring beam focused on the measured sample, the reflected beam is collected by the dispersive objective lens 3, then is output from the detection end optical fiber 204 after sequentially passing through the common end optical fiber 203 and the optical fiber coupler 2, and is incident to the wavelength light splitting device 5; the wavelength splitting device 5 focuses light of different wavelengths passing through the measuring beam onto different areas of the detector 6; the detector 6 thus obtains the illumination wavelengthλ 1、λ 2、λ 3Single optical fiber confocal response intensity valueI 1、I 2、I 3 ；Differential processing is carried out on the single optical fiber confocal response intensity data under two adjacent illumination wavelengths to obtain two adjacent wavelength differential confocal response valuesdI 21、dI 32And then the displacement information of the measured sample along the optical axis direction of the measuring beam is obtained. When the motion platform is used for moving the three-wavelength optical fiber point difference confocal micro-detection device or the measured sample along the direction vertical to the measuring light beam, the displacement information of different positions on the surface of the measured sample is obtained, and the surface profile or the appearance of the sample is reconstructed.
Example 2
As shown in fig. 3, in the present embodiment, the detection module includes a collimating mirror 504, a first dichroic beam splitter 505, a second dichroic beam splitter 506 and three detection units 601; the collimating mirror 504 is configured to collimate the measuring beam output by the detection-end optical fiber 204, the collimated beam passes through the first dichroic beam splitter 505 and the second dichroic beam splitter 506 in sequence to separate the measuring beams with three wavelengths, and the three detection units 601 are respectively configured to detect the measuring beam with one wavelength, so as to obtain the illumination wavelength finallyλ 1、λ 2、λ 3Single optical fiber confocal response intensity valueI 1、I 2、I 3。
Example 3
As shown in fig. 4, in this embodiment, the detection module includes a collimating mirror 504, a first light splitting unit 507, a second light splitting unit 508, three narrow-band filters 509, and three detection units 801; the collimating mirror 504 is used for collimating the measuring beam output by the detection end optical fiber 204, the collimated beam passes through the first light splitting unit 507 and the second light splitting unit 508 in sequence and is split into three beams, and then each beam of light is incident into the narrow band filter 509 after passing through the narrow band filter 509 respectivelyA detection unit, wherein each narrow-band filter 509 is used to filter out one of the wavelengths, and three detection units 801 are used to detect the measuring beam with one of the wavelengths, so as to obtain the illumination wavelengthλ 1、λ 2、λ 3Single optical fiber confocal response intensity valueI 1、I 2、I 3。
Example 4
As shown in fig. 5, in the present embodiment, the three-wavelength light source 1 includes a first single-wavelength fiber light source 101, a second single-wavelength fiber light source 102, a third single-wavelength fiber light source 103, and a fiber combiner 104, the fiber coupler 2 includes an illumination-end fiber 201, a coupling unit 202, a common-end fiber 203, and a detection-end fiber 204, and the detector 6 includes three fiber detectors 604. The detection module includes a wavelength division multiplexer 512 and three fiber detection units 604. In this embodiment, the wavelength division multiplexer 512 is configured to output three wavelength components of the measurement beam output by the detection end optical fiber 204 to one of the optical fiber detection units 604, respectively, and detect the three wavelength components by the optical fiber detection unit 604 to obtain the illumination wavelength finallyλ 1、λ 2、λ 3Single optical fiber confocal response intensity valueI 1、I 2、I 3. The micro-processor 7 passes the illumination wavelengthλ 1、λ 2、λ 3Single optical fiber confocal response intensity valueI 1、I 2、I 3Differential processing is carried out to obtain two adjacent wavelength differential confocal response valuesdI 21、dI 32And then displacement information of the surface of the measured sample along the optical axis OA1 of the measuring beam is obtained.
Example 5
As shown in fig. 6, the three-wavelength optical fiber point differential confocal micro-detection apparatus provided in this embodiment includes a three-wavelength light source 1, an optical fiber coupler 2, a dispersive objective lens 3, a time division driving circuit 513, a detector 6, and a microprocessor 7.
The working principle of the embodiment is as follows: the three-wavelength light source 1 emits light with a wavelengthλ 1、λ 2、λ 3The illumination beam of (a); the microprocessor 7 controls the time division driving circuit 513 to send out a periodic pulse signal, and the rising edge of the pulse signal excites the driving circuit to sequentially send the light source 1 with the wavelength ofλ 1、λ 2、λ 3The sub-modules of the single-wavelength optical fiber light sources 101, 102, 103 and the like are powered ont 1、t 2、t 3At a time, the sequentially occurring wavelengths areλ 1、λ 2、λ 3The illumination light beam enters the optical fiber coupler 2 through the optical fiber combiner 104 and the illumination end optical fiber 201; the optical fiber coupler 2 sends the three-wavelength illumination light beam to the public end optical fiber 203 through the coupling unit 202 for emergence, and the emergent light beam enters the dispersion objective lens 3; the dispersion objective 3 focuses the light of different wavelengths in the three-wavelength illumination beam emitted from the common-end fiber 203 at different positions on the optical axis OA1 of the dispersion objective; the illumination beam passing through the dispersive objective lens 3 is focused to form a measuring beam which is irradiated on the surface of a measuring sample 4; the measured sample 4 reflects the measuring light beam, the reflected light beam returns along the original light path, is collected by the dispersive objective lens 3, is filtered by the public end optical fiber 203 and enters the optical fiber coupler 2; the fiber coupler 2 sends the reflected measuring beam to the detection end fiber 204 and enters the fiber detector 604; in thatt 1、t 2、t 3At any moment, the fiber detector 604 sequentially detects the illumination wavelengthλ 1、λ 2、λ 3Single optical fiber confocal response intensity valueI 1、I 2、I 3(ii) a The micro-processor 7 passes the illumination wavelengthλ 1、λ 2、λ 3Single optical fiber confocal response intensity valueI 1、I 2、I 3Differential processing is carried out to obtain two adjacent wavelength differential confocal response valuesdI 21、dI 32And then displacement information of the surface of the measured sample along the optical axis OA1 of the measuring beam is obtained.
Example 6
In this embodiment, the obtaining of the displacement information in the direction of the measuring beam depends on the construction of two adjacent wavelength differential confocal response valuesdI 21、dI 32And the calibration relation between the measured sample displacement and the measured sample displacement. In the detection device, the dispersion objective lens 3, the wavelength splitting device 5, the detector 6 and other devices have non-uniform spectral response characteristics, so that the relationship between the difference confocal response values of two adjacent wavelengths and the displacement of the detected sample can deviate from the theoretical design, and therefore the difference confocal response values of the two adjacent wavelengths need to be accurately constructed through actual testsdI 21、dI 32And the calibration relation between the measured sample displacement and the measured sample displacement. Specifically, the present embodiment includes the following steps:
s1, calibration: setting the calibration sample on the optical axis of the measuring beam, controlling the calibration sample to move along the optical axis of the measuring beam, measuring and recording the displacement value of the calibration sample along the optical axis of the measuring beam, and calibrating the wavelength of the calibration sample under each displacement valueλ 1、λ 2、λ 3Carrying out differential processing on two adjacent wavelengths to obtain a first differential confocal response value and a second differential confocal response value; and constructing a corresponding relation between the displacement value and the first and second differential confocal response values, and calibrating the relation between the first and second differential confocal response values and the displacement.
In particular, in this embodiment, the movement of the calibration sample in the measuring direction of the measuring beam is precisely controlled, e.g.z 1=0、z 2=0.1 μm、z 3=0.3 μm、…、z M =10 μm and the different displacements are simultaneously detected by the detector 6 at the illumination wavelengthλ 1、λ 2、λ 3Single optical fiber confocal response intensity valueI 1、I 2、I 3 ，I.e. the wavelength of the illuminationλ 1、λ 2、λ 3Single fiber confocal response intensity curve below, as shown in fig. 7; the differential confocal response values of two adjacent wavelengths are obtained by carrying out differential processing on the single optical fiber confocal response intensity values under any adjacent wavelengths under the same displacementdI 21、dI 32The relation curve between the measured sample shift and the measured sample shift is shown in FIG. 8, and the confocal response value of the difference of two adjacent wavelengths is realizeddI 21、dI 32And calibrating the relation between the displacement and the sample.
S2, measurement process: arranging the sample 4 to be measured on the optical axis of the measuring beam, measuring and recording the wavelength of the sample to be measuredλ 1、λ 2、λ 3Carrying out differential processing on two adjacent wavelengths to obtain a first differential confocal response value and a second differential confocal response value; obtaining the position of the detected sample according to the calibration relation between the first and second differential confocal response values and the displacement;
and S3, moving the measured sample 4 along the direction vertical to the optical axis of the measuring beam, repeating the step S2, and obtaining the displacement information of the measured sample surface 5 along the optical axis direction of the measuring beam at different positions, thereby obtaining the appearance information of the measured sample.
Specifically, in this embodiment, the calculation formula of the first and second adjacent wavelength differential confocal response values is as follows:
dI 21=(I 2–I 1)/(I 2+I 1)，dI 32=(I 3–I 2)/(I 3+I 2)；（1）
alternatively, the calculation formula of the first and second adjacent wavelength differential confocal response values may also be:
dI 21=(I 2–I 1)，dI 32=(I 3–I 2)；（2）
wherein the content of the first and second substances,dI 21anddI 32respectively representing a first adjacent wavelength differential confocal response value and a second adjacent wavelength differential confocal response value,I 1、I 2、I 3respectively indicate the wavelength of the sampleλ 1、λ 2、λ 3Single fiber confocal response intensity values below.
Further, in this embodiment, the specific step of step S3 is: moving the measured sample 4 in one dimension along the direction perpendicular to the optical axis of the measuring beam, repeating the step S2, and obtaining displacement information of the measured sample 4 at different positions along the optical axis of the measuring beam on one straight line on the surface, thereby obtaining the profile and roughness information of the measured sample;
further, in this embodiment, the specific step of step S3 may be: and (4) moving the measured sample 4 in two dimensions along the direction vertical to the optical axis of the measuring beam, repeating the step S2, and obtaining the displacement information of the measured sample surface 4 at different positions along the optical axis of the measuring beam, thereby obtaining the three-dimensional shape information of the measured sample.
Specifically, in this embodiment, a series of 2 differential confocal response values can be obtained under different calibration displacements; in the implementation process, a mapping relation between the displacement and the 2 differential confocal response values can be constructed; and in the measurement, obtaining a displacement value according to the mapping relation and the 2 differential confocal response values obtained by measurement.
Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; while the invention has been described in detail and with reference to the foregoing embodiments, it will be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; and the modifications or the substitutions do not make the essence of the corresponding technical solutions depart from the scope of the technical solutions of the embodiments of the present invention.
Claims (10)
1. Three wavelength optical fiber point difference confocal micro-detection device, its characterized in that includes: the device comprises a three-wavelength light source (1), an optical fiber coupler (2), a dispersion objective lens (3) and a detection module;
the three-wavelength light source (1) is used for emitting illumination light beams with three different wavelengths, the output end of the three-wavelength light source (1) is connected with the input end of the optical fiber coupler (2) through an illumination end optical fiber (201), and the illumination light beams emitted by the three-wavelength light source (1) enter the dispersion objective lens (3) after passing through the optical fiber coupler (2); the dispersion objective lens (3) has different focal lengths for light with different wavelengths, and is used for focusing light with various wavelengths at different positions on the optical axis of the dispersion objective lens (3) to form measuring beams which are irradiated on the surface of a measured sample (4); the measuring beam reflected from the surface of the measured sample (4) returns to the optical fiber coupler (2) along the original optical path after passing through the dispersion objective lens (3), and is output by the optical fiber coupler (2) and then enters the detection module, the detection module is used for measuring and obtaining single optical fiber confocal response intensity values of the illumination beam under three different wavelengths, and the single optical fiber confocal response intensity valuesI 1、I 2、I 3Used for calculating and obtaining the displacement information of the surface of the tested sample (4).
2. The three-wavelength optical fiber point-differential confocal microscopy detection device according to claim 1, characterized in that the detection module comprises a wavelength splitting device (5) and a detector (6);
the wavelength light splitting device (5) is used for sending different wavelengths in the measuring light beam to different detection areas of the detector (6), and light intensity values obtained by the different detection areas of the detector (6) are single-fiber confocal response intensity values of the illumination light beam under three different wavelengthsI 1、I 2、I 3。
3. The three-wavelength optical fiber point-differential confocal microscopy detection device according to claim 2, characterized in that said wavelength splitting device (5) comprises: spherical reflector (501), grating (502), spherical focusing mirror (503) set up respectively in spherical reflector (501) both sides, from being incited to behind dispersion objective (3), fiber coupler (2), detection end optic fibre (204) in proper order by the measuring beam who is surveyed sample (4) surface reflection spherical reflector (501), then incite to behind spherical reflector (501) reflection grating (502), warp grating (502) reflection back, the illuminating beam of each wavelength separates, then the warp spherical focusing mirror (503) reflection back incides the different detection area of detector (6).
4. The three-wavelength fiber point differential confocal microscopy detection device according to claim 1, characterized in that the detection module comprises a collimating mirror (504), a first dichroic beam splitter (505), a second dichroic beam splitter (506) and three detection units; the collimating mirror (504) is used for collimating the measuring beam output from the detection end optical fiber (204), the collimated beam passes through the first dichroic beam splitter (705) and the second dichroic beam splitter (706) in sequence and then separates the measuring beams with three wavelengths, and the three detection units are respectively used for detecting the measuring beam with one wavelength;
or the detection module comprises a collimating mirror (504), a first light splitting unit (507), a second light splitting unit (508), three narrow-band filters and three detection units; the collimating mirror (504) is used for collimating the measuring beam output from the detection end optical fiber (204), the collimated beam passes through the first light splitting unit (507) and the second light splitting unit (508) in sequence and then is divided into three beams, each beam is changed into a single-wavelength beam after passing through a narrow-band filter respectively, the three single-wavelength beams are respectively incident to one of the detection units, and the three detection units are respectively used for detecting the measuring beam with one of the wavelengths;
or, the detection module comprises a wavelength division multiplexer (512) and three detection units;
alternatively, the detection module is a spectrometer.
5. The confocal microscopy detection device with three wavelength optical fiber points according to claim 1 is characterized by further comprising a microprocessor (7) and a time division driving circuit (512), wherein the microprocessor (7) is used for controlling the time division driving circuit (512) to generate a periodic pulse signal, the rising edge of the pulse signal excites the driving circuit to sequentially supply power to the sub-light source modules with different wavelengths in the three-wavelength light source (1), and three single-wavelength illumination light beams with different wavelengths are sequentially generated at different moments;
the detection module is a single detector.
6. The confocal microscopy apparatus with three wavelength optical fiber point difference according to claim 1 is characterized in that the dispersive objective (3) comprises an achromatic lens (301), a concave lens (302), a first convex lens (303), a second convex lens (304) and a third convex lens (305) coaxially arranged in sequence;
the three-wavelength light source (1) comprises a first single-wavelength optical fiber light source (101), a second single-wavelength optical fiber light source (102), a third single-wavelength optical fiber light source (103) and an optical fiber beam combiner (104), wherein the output ends of the first single-wavelength optical fiber light source (101), the second single-wavelength optical fiber light source (102) and the third single-wavelength optical fiber light source (103) are connected with the optical fiber beam combiner (104).
7. The three-wavelength optical fiber point-differential confocal microscopy detection device according to claim 1, further comprising an advancing mechanism for moving the sample (4) to be measured in a direction perpendicular to the optical axis of the measuring beam;
alternatively, the propulsion mechanism is adapted to move the detection device.
8. The three-wavelength optical fiber point differential confocal microscopic detection method is characterized by being realized by adopting the three-wavelength optical fiber point differential confocal microscopic detection device disclosed by claim 1, and comprising the following steps of:
s1, calibration: setting the calibration sample on the optical axis of the measuring beam, controlling the calibration sample to move along the optical axis of the measuring beam, measuring and recording the displacement value of the calibration sample along the optical axis of the measuring beam, and calibrating the wavelength of the calibration sample under each displacement valueλ 1、λ 2、λ 3Then, carrying out differential processing on the confocal response intensity values under any adjacent wavelengths to obtain a first differential confocal response value and a second differential confocal response value; constructing a corresponding relation between the displacement value and the first and second differential confocal response values, and calibrating the relation between the first and second differential confocal response values and the displacement;
s2, measurement process: arranging the sample (4) to be measured on the optical axis of the measuring beam, measuring and recording the wavelength of the sample to be measuredλ 1、λ 2、λ 3Then carrying out differential processing on the confocal response intensity values under any adjacent wavelengths to obtain a first differential confocal response value and a second differential confocal response value; obtaining the displacement of the detected sample (4) according to the calibration relation between the first and second differential confocal response values and the displacement;
s3, moving the tested sample (4) along the direction vertical to the optical axis of the measuring beam, repeating the step S2, obtaining the displacement information of the tested sample (4) at different positions on the surface along the optical axis of the measuring beam, and thus obtaining the appearance information of the tested sample (4).
9. The method of claim 8, wherein the first and second differential confocal response values are calculated by:
dI 21=(I 2–I 1)/(I 2+I 1)，dI 32=(I 3–I 2)/(I 3+I 2)；
or dI 21=(I 2–I 1)，dI 32=(I 3–I 2)；
Wherein d isI 21And dI 32Respectively representing a first differential response value and a second differential response value,I 1、I 2、I 3respectively indicating the wavelength of the measuring deviceλ 1、λ 2、λ 3Single fiber confocal response intensity values below.
10. The three-wavelength optical fiber point differential confocal microscopy detection method according to claim 8, wherein the specific steps of step S3 are as follows:
moving the measured sample (4) in one dimension along the direction vertical to the optical axis of the measuring beam, repeating the step S2, and obtaining the displacement information of different positions along the optical axis direction of the measuring beam on one straight line on the surface of the measured sample (4), thereby obtaining the profile and roughness information of the measured sample (4);
or the following steps:
and (4) moving the measured sample (4) in two dimensions along the direction vertical to the optical axis of the measuring light beam, repeating the step S2, and obtaining the displacement information of the measured sample (4) at different positions on the surface along the optical axis of the measuring light beam, thereby obtaining the three-dimensional shape information of the measured sample (4).
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