CN107421448A - A kind of micro-displacement measuring device and measuring method - Google Patents

A kind of micro-displacement measuring device and measuring method Download PDF

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Publication number
CN107421448A
CN107421448A CN201710213938.5A CN201710213938A CN107421448A CN 107421448 A CN107421448 A CN 107421448A CN 201710213938 A CN201710213938 A CN 201710213938A CN 107421448 A CN107421448 A CN 107421448A
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mrow
micro
branch
spectrometer
msub
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王宇
卢增雄
齐月静
苏佳妮
齐威
杨光华
张清洋
李兵
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Academy of Opto Electronics of CAS
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Academy of Opto Electronics of CAS
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/02Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

The present invention proposes a kind of micro-displacement measuring device and measuring method, the device includes white light broad spectrum light source, double branch optical fibers, fiber exit beam, dispersion object lens, dispersion objective lens exit light beam, determinand, the joints of optical fibre, multiple-limb optical fiber, spectrometer and computer, this method includes the axial displacement of adjustment determinand, is located in the working range of dispersion object lens;By the micro spectrometer of computer acquisition first, the second micro spectrometer ... and the spectroscopic data of N micro spectrometers;Calculate the displacement of determinand.The present invention can make whole system keep less volume while systemic resolution is improved, realize the portable microdisplacement measurement of high-resolution by using the micro spectrometer of multiple fixed gratings.

Description

A kind of micro-displacement measuring device and measuring method
Technical field
The present invention relates to field of optical measuring technologies, and in particular to a kind of measurement of micro-displacement.
Background technology
Displacement is one of most basic geometry parameter, and its accurate measurement is engaged in the research in each field to people and advanced science Progress is significant, and the precision engineering such as precision manufactureing and super hot investment casting, micromachine, fine and superstructure technologies is current And the basis of following high-end manufacturing technology, and precision micro-displacement measurement is the basis of promotion and the high-end manufacturing technology of development.
At present, more ripe microdisplacement measurement technology is non-contact displacement transducer, and its important represents is photo-electric The reflective displacement transducer of displacement transducer, such as laser triangulation, but its measurement result is easily tilted by gauge head installation, measured surface The factors such as color, gloss, surface roughness and surface texture situation influence.Spectral Confocal method is a kind of based on wavelength shift tune The contactless microdisplacement measurement method of system, have measurement accuracy high, speed is fast, the factor such as texture, inclination to measured surface It is insensitive, the advantages that to material without particular/special requirement.
The present invention provides a kind of portable micro-displacement measuring device and measuring method based on Spectral Confocal principle, by adopting With the micro spectrometer of multiple fixed gratings, whole system can be made to keep less volume while systemic resolution is improved, Realize the portable microdisplacement measurement of high-resolution.
The content of the invention
The purpose of the present invention is achieved through the following technical solutions.
A kind of micro-displacement measuring device, it is characterised in that the device includes white light broad spectrum light source (10), double branch optical fibers (20), fiber exit beam (201), dispersion object lens (30), dispersion objective lens exit light beam (301), determinand (40), optical fiber connection Device (50), multiple-limb optical fiber (60), spectrometer (70) and computer (80), wherein, the width that white light broad spectrum light source (10) is sent Spectrum white-light light beam coupling enters the first branch end of double branch optical fibers (20), and then is coupled into double branch optical fibers (20), through double points Fiber exit beam (201) is obtained after branch optical fiber (20) always end transmission, fiber exit beam (201) obtains after dispersion object lens (30) To dispersion objective lens exit light beam (301), dispersion objective lens exit light beam (301) reflected by determinand (40) after through dispersion object lens (30), double branch optical fibers (20) total end, the second branch end of double branch optical fibers (20), the joints of optical fibre (50), multiple-limb optical fiber (60) total end, the multiple of multiple-limb optical fiber (60) branch into spectrometer (70), and spectrometer is gathered by computer (80) Spectral signal, by the processing of the spectral signal to collection, obtain the displacement of determinand (40).
Preferably, the broad-spectrum white-light light beam that the white light broad spectrum light source (10) sends, its spectrum is continuous.
Preferably, the optical fiber in double branch optical fibers (20) is multimode fibre, and double branch optical fibers (20) include total end (200), the first branch end (20a) and the second branch end (20b), wherein the first branch end (20a) and the second branch end (20b) are logical The mode and total end (200) for crossing melting link together, the light entered from the first branch end (20a) or the second branch end (20b) Beam will project from total end (200), and the light beam entered from total end (200) will be simultaneously from the first branch end (20a) and the second branch (20b) is held to project, and it is identical with the beam energy that the second branch end (20b) projects from the first branch end (20a);
Optical fiber in the multiple-limb optical fiber (60) is multimode fibre, and multiple-limb optical fiber (60) includes total end (600), first Branch end (601), the second branch end (602) ..., N branch ends (60n), wherein the first branch end (601), the second branch end (602) ..., N branch ends (60n) are linked together by way of melting with total end (600), from the first branch end (601) Or second branch end (602) ... or the light beam that N branch ends (60n) enter will project from total end (600), from total end (600) enter light beam will simultaneously from the first branch end (601), the second branch end (602) ..., N branch ends (60n) project, And from the first branch end (601), the second branch end (602) ..., N branch ends (60n) project beam energy it is identical;
The spectrometer (70) is made up of multiple micro spectrometers, respectively the first micro spectrometer (701), second miniature Spectrometer (702) ..., N micro spectrometers (70n), and the first micro spectrometer (701), the second micro spectrometer (702) ... and the grating in N micro spectrometers (70n) and the position of collimating mirror and imaging lens are fixed.
Preferably, the operation wavelength of the dispersion object lens (30) is λminTo λmaxContinuous white-light spectrum, the optical fiber goes out The dispersion objective lens exit light beam (301) that irradiating light beam (201) obtains after the dispersion object lens (30) has multiple focuses, different ripples A long corresponding focus, and the line of these focuses is the optical axis of dispersion object lens (30), distance of these focuses to dispersion object lens DλMeet following relation with wavelength X:
Dλ=C+k λ (1)
In formula, DλFor wavelength X light beam to the distance of dispersion object lens end face, C and k are constant, and its value can be according to a most young waiter in a wineshop or an inn Multiplication is by multiple λ and corresponding DλTry to achieve.
Preferably, the minimum operation wavelength λ of the dispersion object lens (30)minWith maximum functional wavelength XmaxCorresponding focus arrives The distance of dispersion object lens is respectively Dλmin=C+k λminAnd Dλmax=C+k λmax, the micro-displacement measuring device can measure most Big displacement is Δ D=| Dλmin‐Dλmax|。
Preferably, the second branch end of double branch optical fibers (20) and total end of multiple-limb optical fiber (60) are to pass through optical fiber Connector (50) connection.
Preferably, set the first micro spectrometer (701) in spectrometer (70), the second micro spectrometer (702) ..., With the stop position of N micro spectrometers (70n) so that the first micro spectrometer (701), the second micro spectrometer (702) ... and N micro spectrometers (70n) only receive Δ λ respectively1、Δλ2... and Δ λNSpectrum, wherein Δ λ1Comprising λminTo λ1Spectrum, Δ λ2Include λ1To λ2Spectrum ..., Δ λNInclude λN‐1To λmaxSpectrum, λ1、λ2... and λN‐1According to Following formula is tried to achieve
Preferably, the pixel number of N number of micro spectrometer is m in spectrometer (70), and total pixel of spectrometer (70) is individual Number is N × m.
Preferably, in spectrometer (70), the 1st pixel corresponding wavelength is λmin, wavelength corresponding to the N × m pixel is λmax, wherein, λminAnd λmaxFor the minimum value and maximum of dispersion object lens operation wavelength;Wavelength X corresponding to ith pixeliFor
A kind of microdisplacement measurement method, it uses above-mentioned micro-displacement measuring device to realize, it is characterised in that methods described Comprise the following steps:
S1, adjustment determinand (40) axial displacement, are located in the working range of dispersion object lens (30);
S2, gathered by computer (80) the first micro spectrometer (701), the second micro spectrometer (702) ... and N The spectroscopic data of micro spectrometer (70n), structure line number are N × m, and columns is 1 matrix M, by the first micro spectrometer (701) M pixel value be placed in matrix M preceding m rows, m pixel value of the second micro spectrometer (701) be placed in matrix M m+1 Row to 2m rows ..., m pixel value of N micro spectrometers (70n) be placed in matrix M (N-1) × m+1 rows to N × M rows;
In S3, calculating matrix M, the pixel number j of peak value spectrum, according to the wavelength value λ of formula (2) calculating peak value spectrumi
Wherein, λminAnd λmaxMinimum operation wavelength and the maximum functional wavelength of respectively described dispersion object lens (30);
S4, peak wavelength λ calculated according to formula (1)iThe displacement D of corresponding determinand (40)λi
Dλi=C+k λi (1)
Wherein, DλiFor peak wavelength λiLight beam to the distance of dispersion object lens end face, C and k are constant, and its value is according to most Small square law is by multiple λ and corresponding DλTry to achieve.
Micro-displacement measuring device provided by the invention and measuring method, it is possible to achieve high-resolution microdisplacement measurement, and With portable advantage.The present invention carries out spectrum segmentation detection by using the micro spectrometer of multiple fixed gratings, so as to The resolution ratio of measuring system is improved, while whole measuring system can be made to keep smaller size smaller, and due in micro spectrometer Grating, collimating mirror and imaging lens position are fixed, therefore, also with portable advantage.
Brief description of the drawings
By reading the detailed description of hereafter preferred embodiment, it is various other the advantages of and benefit it is common for this area Technical staff will be clear understanding.Accompanying drawing is only used for showing the purpose of preferred embodiment, and is not considered as to the present invention Limitation.And in whole accompanying drawing, identical part is denoted by the same reference numerals.In the accompanying drawings:
Fig. 1 is the micro-displacement measuring device schematic diagram according to embodiment of the present invention;
Fig. 2 is the composition structural representation according to double branch optical fibers of embodiment of the present invention;
Fig. 3 is that different wave length corresponds to displacement relation schematic diagram in the dispersion object lens according to embodiment of the present invention;
Fig. 4 is the composition structural representation according to the multiple-limb optical fiber of embodiment of the present invention;
Fig. 5 is the composition structural representation according to the spectrometer of embodiment of the present invention;
Fig. 6 is the microdisplacement measurement method flow diagram according to embodiment of the present invention;
Wherein, micro-displacement apparatus includes:10th, white light broad spectrum light source, 20, double branch optical fibers, 201, fiber exit beam, 30th, dispersion object lens, 301, dispersion objective lens exit light beam, 40, determinand, 50, the joints of optical fibre, 60, multiple-limb optical fiber, 70, light Spectrometer, 80, computer.
Double branch optical fibers 20 include:200th, total end, 20a, the first branch end, 20b, the second branch end.
Multiple-limb optical fiber 60 includes:600th, total end, the 601, first branch end, the 602, second branch end ..., 60n, N points Zhi Duan.
Spectrometer 70 includes:701st, the first micro spectrometer, the 702, second micro spectrometer ..., 70n, N micro spectrals Instrument.
Embodiment
The illustrative embodiments of the disclosure are more fully described below with reference to accompanying drawings.Although this public affairs is shown in accompanying drawing The illustrative embodiments opened, it being understood, however, that may be realized in various forms the disclosure without the reality that should be illustrated here The mode of applying is limited.Conversely, there is provided these embodiments are to be able to be best understood from the disclosure, and can be by this public affairs The scope opened completely is communicated to those skilled in the art.
As shown in figure 1, micro-displacement measuring device schematic diagram of the present invention, including it is white light broad spectrum light source (10), double Branch optical fiber (20), fiber exit beam (201), dispersion object lens (30), dispersion objective lens exit light beam (301), determinand (40), The joints of optical fibre (50), multiple-limb optical fiber (60), spectrometer (70) and computer (80).
The broad-spectrum white-light light beam coupling that white light broad spectrum light source (10) is sent enters the first branch of double branch optical fibers (20) End is coupled into double branch optical fibers (20), obtains fiber exit beam (201) after double branch optical fibers (20) always end transmission, optical fiber goes out Irradiating light beam (201) obtains dispersion objective lens exit light beam (301), dispersion objective lens exit light beam (301) quilt after dispersion object lens (30) Determinand (40) reflection after through dispersion object lens (30), double branch optical fibers (20) always end, double branch optical fibers (20) the second branch end, The joints of optical fibre (50), total end of multiple-limb optical fiber (60), the multiple of multiple-limb optical fiber (60) branch into spectrometer (70), lead to The spectral signal of computer (80) collection spectrometer is crossed, by the processing of the spectral signal to collection, obtains determinand (40) Displacement.
Broad-spectrum white-light light beam its spectrum that above-mentioned white light broad spectrum light source (10) sends is continuous.
As shown in Fig. 2 be the composition structural representation of double branch optical fibers (20), the light in this pair of branch optical fiber (20) Fibre is multimode fibre, and double branch optical fibers (20) include total end (200), the first branch end (20a) and the second branch end (20b), its In the first branch end (20a) and the second branch end (20b) linked together by way of melting with total end (200), from first The light beam that branch end (20a) or the second branch end (20b) enter will project from total end (200), the light entered from total end (200) Beam will be simultaneously from the first branch end (20a) and the second branch end (20b) injection, and from the first branch end (20a) and the second branch The beam energy for holding (20b) to project is identical.
As shown in figure 3, the schematic diagram of displacement, the dispersion object lens are corresponded to for different wave length in the dispersion object lens (30) (30) operation wavelength is λminTo λmaxContinuous white-light spectrum, the fiber exit beam (201) is through the dispersion object lens (30) the dispersion objective lens exit light beam (301) obtained after has multiple focuses, the corresponding focus of different wave length, and these focuses Line be dispersion object lens (30) optical axis, the distance D of these focuses to dispersion object lensλMeet following relation with wavelength X:
Dλ=C+k λ (1)
In formula, DλFor wavelength X light beam to the distance of dispersion object lens end face, C and k are constant, and its value can be according to a most young waiter in a wineshop or an inn Multiplication is by multiple λ and corresponding DλTry to achieve.
The minimum operation wavelength λ of dispersion object lens (30)minWith maximum functional wavelength XmaxCorresponding focus is to dispersion object lens Distance respectively Dλmin=C+k λminAnd Dλmax=C+k λmax, the maximum displacement that micro-displacement measuring device can measure is Δ D=| Dλmin‐Dλmax|。
As shown in figure 4, be the composition structural representation of the multiple-limb optical fiber (60), the optical fiber in multiple-limb optical fiber (60) For multimode fibre, multiple-limb optical fiber (60) include total end (600), the first branch end (601), the second branch end (602) ..., N Branch end (60n), wherein the first branch end (601), the second branch end (602) ..., N branch ends (60n) side that passes through melting Formula and total end (600) link together, from the first branch end (601) or the second branch end (602) ... or N branch ends The light beam that (60n) enters will project from total end (600), and the light beam entered from total end (600) will be simultaneously from the first branch end (601), the second branch end (602) ..., N branch ends (60n) project, and from the first branch end (601), the second branch end (602) beam energy that ..., N branch ends (60n) project is identical.
Second branch end of above-mentioned double branch optical fibers (20) and total end of multiple-limb optical fiber (60) are to pass through the joints of optical fibre (50) connect.
As shown in figure 5, for the structural representation of the spectrometer (70), spectrometer (70) is by multiple micro spectrometer groups Into, respectively the first micro spectrometer (701), the second micro spectrometer (702) ..., N micro spectrometers (70n), and first Micro spectrometer (701), the second micro spectrometer (702) ... and grating in N micro spectrometers (70n) and collimating mirror and The position of imaging lens is fixed.
Set the first micro spectrometer (701) in spectrometer (70), the second micro spectrometer (702) ... and N is micro- The stop position of type spectrometer (70n) so that the first micro spectrometer (701), the second micro spectrometer (702) ... and N Micro spectrometer (70n) only receives Δ λ respectively1、Δλ2... and Δ λNSpectrum, wherein Δ λ1Include λminTo λ1Spectrum, Δ λ2Include λ1To λ2Spectrum ..., Δ λNInclude λN‐1To λmaxSpectrum, λ1、λ2... and λN‐1Tried to achieve according to following formula
The pixel number of N number of micro spectrometer is m in spectrometer (70), then total pixel number of spectrometer (70) is N × m, therefore, compared with single micro spectrometer, the resolution ratio of spectrometer (70) improves N times.
In spectrometer (70), the 1st pixel corresponding wavelength is λmin, wavelength corresponding to the N × m pixel is λmax, wherein, λminAnd λmaxFor the minimum value and maximum of dispersion object lens operation wavelength.Wavelength X corresponding to ith pixeliFor
As shown in fig. 6, for the described microdisplacement measurement method flow diagram of one's duty invention, filled when using above-mentioned microdisplacement measurement When putting progress microdisplacement measurement, microdisplacement measurement method comprises the following steps:
S1, adjustment determinand (40) axial displacement, are located in the working range of dispersion object lens (30);
S2, gathered by computer (80) the first micro spectrometer (701), the second micro spectrometer (702) ... and N The spectroscopic data of micro spectrometer (70n), structure line number are N × m, and columns is 1 matrix M, by the first micro spectrometer (701) M pixel value be placed in matrix M preceding m rows, m pixel value of the second micro spectrometer (701) be placed in matrix M m+1 Row to 2m rows ..., m pixel value of N micro spectrometers (70n) be placed in matrix M (N-1) × m+1 rows to N × M rows.
In S3, calculating matrix M, the pixel number j of peak value spectrum, according to the wavelength value λ of formula (2) calculating peak value spectrumi
Wherein, λminAnd λmaxMinimum operation wavelength and the maximum functional wavelength of respectively described dispersion object lens (30);
S4, peak wavelength λ calculated according to formula (1)iThe displacement D of corresponding determinand (40)λi
Dλi=C+k λi (1)
Wherein, DλiFor peak wavelength λiLight beam to the distance of dispersion object lens end face, C and k are constant, and its value is according to most Small square law is by multiple λ and corresponding DλTry to achieve.
The foregoing is only a preferred embodiment of the present invention, but protection scope of the present invention be not limited thereto, Any one skilled in the art the invention discloses technical scope in, the change or replacement that can readily occur in, It should all be included within the scope of the present invention.Therefore, protection scope of the present invention should be with the protection model of the claim Enclose and be defined.

Claims (10)

1. a kind of micro-displacement measuring device, it is characterised in that the device includes white light broad spectrum light source (10), double branch optical fibers (20), fiber exit beam (201), dispersion object lens (30), dispersion objective lens exit light beam (301), determinand (40), optical fiber connection Device (50), multiple-limb optical fiber (60), spectrometer (70) and computer (80), wherein, the width that white light broad spectrum light source (10) is sent Spectrum white-light light beam coupling enters the first branch end of double branch optical fibers (20), and then is coupled into double branch optical fibers (20), through double points Fiber exit beam (201) is obtained after branch optical fiber (20) always end transmission, fiber exit beam (201) obtains after dispersion object lens (30) To dispersion objective lens exit light beam (301), dispersion objective lens exit light beam (301) reflected by determinand (40) after through dispersion object lens (30), double branch optical fibers (20) total end, the second branch end of double branch optical fibers (20), the joints of optical fibre (50), multiple-limb optical fiber (60) total end, the multiple of multiple-limb optical fiber (60) branch into spectrometer (70), and spectrometer is gathered by computer (80) Spectral signal, by the processing of the spectral signal to collection, obtain the displacement of determinand (40).
A kind of 2. micro-displacement measuring device according to claim 1, it is characterised in that the white light broad spectrum light source (10) The broad-spectrum white-light light beam sent, its spectrum are continuous.
3. a kind of micro-displacement measuring device according to claim 1, it is characterised in that in double branch optical fibers (20) Optical fiber is multimode fibre, and double branch optical fibers (20) include total end (200), the first branch end (20a) and the second branch end (20b), Wherein the first branch end (20a) and the second branch end (20b) are linked together by way of melting with total end (200), from the The light beam that one branch end (20a) or the second branch end (20b) enter will project from total end (200), enter from total end (200) Light beam will be simultaneously from the first branch end (20a) and the second branch end (20b) injection, and from the first branch end (20a) and second point The beam energy that Zhi Duan (20b) is projected is identical;
Optical fiber in the multiple-limb optical fiber (60) is multimode fibre, and multiple-limb optical fiber (60) includes total end (600), the first branch Hold (601), the second branch end (602) ..., N branch ends (60n), wherein the first branch end (601), the second branch end (602) ..., N branch ends (60n) are linked together by way of melting with total end (600), from the first branch end (601) Or second branch end (602) ... or the light beam that N branch ends (60n) enter will project from total end (600), from total end (600) enter light beam will simultaneously from the first branch end (601), the second branch end (602) ..., N branch ends (60n) project, And from the first branch end (601), the second branch end (602) ..., N branch ends (60n) project beam energy it is identical;
The spectrometer (70) is made up of multiple micro spectrometers, respectively the first micro spectrometer (701), the second micro spectral Instrument (702) ..., N micro spectrometers (70n), and the first micro spectrometer (701), the second micro spectrometer (702) ... and Grating and the position of collimating mirror and imaging lens in N micro spectrometers (70n) are fixed.
A kind of 4. micro-displacement measuring device according to claim 1, it is characterised in that the work of the dispersion object lens (30) Wavelength is λminTo λmaxContinuous white-light spectrum, what the fiber exit beam (201) obtained after the dispersion object lens (30) Dispersion objective lens exit light beam (301) has multiple focuses, the corresponding focus of different wave length, and the line of these focuses is dispersion The optical axis of object lens (30), the distance D of these focuses to dispersion object lensλMeet following relation with wavelength X:
Dλ=C+k λ (1)
In formula, DλFor wavelength X light beam to the distance of dispersion object lens end face, C and k are constant, its value be according to least square method by Multiple λ and corresponding DλTry to achieve.
A kind of 5. micro-displacement measuring device according to claim 1, it is characterised in that the minimum of the dispersion object lens (30) Operation wavelength λminWith maximum functional wavelength XmaxCorresponding focus to the distance of dispersion object lens be respectively Dλmin=C+k λminAnd Dλmax =C+k λmax, the maximum displacement that the micro-displacement measuring device can measure is Δ D=| Dλmin‐Dλmax|。
A kind of 6. micro-displacement measuring device according to claim 3, it is characterised in that the of double branch optical fibers (20) Total end of two branch ends and multiple-limb optical fiber (60) is connected by the joints of optical fibre (50).
7. a kind of micro-displacement measuring device according to claim 3, it is characterised in that first in setting spectrometer (70) Micro spectrometer (701), the second micro spectrometer (702) ... and the stop position of N micro spectrometers (70n) so that One micro spectrometer (701), the second micro spectrometer (702) ... and N micro spectrometers (70n) only receive a Δ λ respectively1、 Δλ2... and Δ λNSpectrum, wherein Δ λ1Include λminTo λ1Spectrum, Δ λ2Include λ1To λ2Spectrum ..., Δ λNComprising λN‐1To λmaxSpectrum, λ1、λ2... and λN‐1Tried to achieve according to following formula
<mrow> <msub> <mi>&amp;lambda;</mi> <mi>j</mi> </msub> <mo>=</mo> <msub> <mi>&amp;lambda;</mi> <mrow> <mi>m</mi> <mi>i</mi> <mi>n</mi> </mrow> </msub> <mo>+</mo> <mfrac> <mrow> <mi>j</mi> <mrow> <mo>(</mo> <msub> <mi>&amp;lambda;</mi> <mrow> <mi>m</mi> <mi>a</mi> <mi>x</mi> </mrow> </msub> <mo>-</mo> <msub> <mi>&amp;lambda;</mi> <mrow> <mi>m</mi> <mi>i</mi> <mi>n</mi> </mrow> </msub> <mo>)</mo> </mrow> </mrow> <mi>N</mi> </mfrac> <mo>,</mo> <mi>j</mi> <mo>=</mo> <mn>1</mn> <mo>,</mo> <mn>2</mn> <mo>,</mo> <mn>3</mn> <mo>,</mo> <mo>...</mo> <mo>,</mo> <mi>N</mi> <mo>-</mo> <mn>1</mn> <mo>-</mo> <mo>-</mo> <mo>-</mo> <mrow> <mo>(</mo> <mn>2</mn> <mo>)</mo> </mrow> <mo>.</mo> </mrow>
A kind of 8. micro-displacement measuring device according to claim 7, it is characterised in that N number of miniature light in spectrometer (70) The pixel number of spectrometer is m, and total pixel number of spectrometer (70) is N × m.
A kind of 9. micro-displacement measuring device according to claim 3, it is characterised in that in spectrometer (70), the 1st pixel Corresponding wavelength is λmin, wavelength corresponding to the N × m pixel is λmax, wherein, λminAnd λmaxFor dispersion object lens operation wavelength most Small value and maximum;Wavelength X corresponding to ith pixeliFor
<mrow> <msub> <mi>&amp;lambda;</mi> <mi>i</mi> </msub> <mo>=</mo> <mfrac> <mrow> <msub> <mi>&amp;lambda;</mi> <mrow> <mi>m</mi> <mi>a</mi> <mi>x</mi> </mrow> </msub> <mo>-</mo> <msub> <mi>&amp;lambda;</mi> <mrow> <mi>m</mi> <mi>i</mi> <mi>n</mi> </mrow> </msub> </mrow> <mrow> <mi>N</mi> <mo>&amp;times;</mo> <mi>m</mi> <mo>-</mo> <mn>1</mn> </mrow> </mfrac> <mrow> <mo>(</mo> <mi>i</mi> <mo>-</mo> <mn>1</mn> <mo>)</mo> </mrow> <mo>+</mo> <msub> <mi>&amp;lambda;</mi> <mrow> <mi>m</mi> <mi>i</mi> <mi>n</mi> </mrow> </msub> <mo>-</mo> <mo>-</mo> <mo>-</mo> <mrow> <mo>(</mo> <mn>3</mn> <mo>)</mo> </mrow> </mrow>
10. a kind of microdisplacement measurement method, it uses any one of claim 1-9 micro-displacement measuring device to realize, it is special Sign is, the described method comprises the following steps:
S1, adjustment determinand (40) axial displacement, are located in the working range of dispersion object lens (30);
S2, gathered by computer (80) the first micro spectrometer (701), the second micro spectrometer (702) ... and N is miniature The spectroscopic data of spectrometer (70n), structure line number are N × m, and columns is 1 matrix M, by the m of the first micro spectrometer (701) The m+1 rows that individual pixel value is placed in matrix M preceding m rows, m pixel value of the second micro spectrometer (701) be placed in matrix M arrive 2m rows ..., m pixel value of N micro spectrometers (70n) is placed in matrix M (N-1) × m+1 rows to N × m rows;
In S3, calculating matrix M, the pixel number j of peak value spectrum, according to the wavelength value λ of formula (2) calculating peak value spectrumi
<mrow> <msub> <mi>&amp;lambda;</mi> <mi>j</mi> </msub> <mo>=</mo> <msub> <mi>&amp;lambda;</mi> <mi>min</mi> </msub> <mo>+</mo> <mfrac> <mrow> <mi>j</mi> <mrow> <mo>(</mo> <msub> <mi>&amp;lambda;</mi> <mrow> <mi>m</mi> <mi>a</mi> <mi>x</mi> </mrow> </msub> <mo>-</mo> <msub> <mi>&amp;lambda;</mi> <mrow> <mi>m</mi> <mi>i</mi> <mi>n</mi> </mrow> </msub> <mo>)</mo> </mrow> </mrow> <mi>N</mi> </mfrac> <mo>,</mo> <mi>j</mi> <mo>=</mo> <mn>1</mn> <mo>,</mo> <mn>2</mn> <mo>,</mo> <mn>3</mn> <mo>,</mo> <mo>...</mo> <mo>,</mo> <mi>N</mi> <mo>-</mo> <mn>1</mn> <mo>-</mo> <mo>-</mo> <mo>-</mo> <mrow> <mo>(</mo> <mn>2</mn> <mo>)</mo> </mrow> </mrow>
Wherein, λminAnd λmaxMinimum operation wavelength and the maximum functional wavelength of respectively described dispersion object lens (30);
S4, peak wavelength λ calculated according to formula (1)iThe displacement D of corresponding determinand (40)λi
Dλi=C+k λi (1)
Wherein, DλiFor peak wavelength λiLight beam to the distance of dispersion object lens end face, C and k are constant, and its value is according to a most young waiter in a wineshop or an inn Multiplication is by multiple λ and corresponding DλTry to achieve.
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