CN104897076A - Three dimensional shape measurement method for micro nanoscale - Google Patents
Three dimensional shape measurement method for micro nanoscale Download PDFInfo
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- CN104897076A CN104897076A CN201410086820.7A CN201410086820A CN104897076A CN 104897076 A CN104897076 A CN 104897076A CN 201410086820 A CN201410086820 A CN 201410086820A CN 104897076 A CN104897076 A CN 104897076A
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Abstract
The invention discloses a three dimensional shape measurement method for micro nanoscale. The three-dimensional shape measurement method for micro nanoscale is mainly used for the three-dimensional shape measurement for the micro nanoscale measurement surfaces of the semiconductor integrated circuit, MEMS members, etc. The three dimensional shape measurement method for the micro nanoscale comprises steps of performing the scanning measurement on the surface of a sample through femtosecond laser, adopting a measurement optical path to realize cross-scale micro nano measurement, wherein the an interference pattern which is obtained in measurement is detected by a high-speed CCD, obtaining surface three dimensional shape characteristic parameters after processing and analyzing and thus resorting surface three dimensional shape of the surface of the sample.
Description
Technical field
The present invention relates to a kind of method adopting femtosecond laser frequency comb measured surface three dimensional topography, the method is mainly used in the measurement of the micro/nano-scale such as SIC (semiconductor integrated circuit), MEMS three-dimensional surface shape feature.
Background technology
Along with SIC (semiconductor integrated circuit) manufacturing technology, the further developing of micro-nano Ultraprecision Machining, the appearance of large scale, nanoscale large scale integrated circuit and microminiaturization, precise treatment MEMS (micro electro mechanical system), proposes new requirement and challenge to the detectability of relevant measurement method and surveying instrument and accuracy of detection.
Current existing micro/nano-scale three-dimensional surface shape pattern measurement method has many restrictions, transverse field as single measurement is less, the field sweep longitudinally measured, to retouch speed soon slower, measuring accuracy is relevant to mechanical scanner, can not meet requirement micro/nano-scale three-dimensional surface shape feature being looked greatly to speed measurement.
Femtosecond laser frequency comb has unique time and spectral characteristic in precision spectroscopy, optical frequency metering and Models of Absolute Distance Measurement Based etc., the Characterization method that the low time coherence of femto-second laser pulse, high spatial are concerned with is a kind of novel measuring method, have and measure the advantages such as visual field is large, measuring speed is fast, in large scale three-dimensional surface shape pattern measurement, have unprecedented advantage in SIC (semiconductor integrated circuit) manufacture, MEMS processing and other minute manufacturings, the field such as three-dimensional surface shape pattern measurement based on femtosecond laser frequency comb has significant application value.
Summary of the invention
The present invention adopts femtosecond laser frequency comb as light source, the characteristic utilizing its low time coherence, high spatial relevant realizes large-sized micro-nano and measures, and the repetition frequency of frequency comb can regulate, complete the scanning survey to sample surfaces by the change of repetition frequency.The present invention adopts optical path to be non-equilibrium asymmetrical beam road, by optic fibre light path, frequency doubling system with expand light path and form, to realize measuring across yardstick micro-nano.Measure the interference pattern that obtains to be detected by high-speed CCD, after carrying out processing and analyze, sample surfaces three dimensional topography parameter can be obtained, and sample surfaces three-dimensional appearance can be reduced by reconstructing three-dimensional model.
Compared with traditional measurement method, the present invention adopts femtosecond laser frequency comb as light source, expands and measures visual field; Adopt electric scanning method to scan, improve sweep velocity, avoid the impact of mechanical scanning on measuring accuracy simultaneously; Can realize measuring across yardstick micro-nano.
Accompanying drawing explanation
In order to more clearly and accurately illustrates the technical scheme in the embodiment of the present invention, introduce doing the accompanying drawing used required in embodiment or description of the prior art simply below, obviously, accompanying drawing in the following describes is only embodiments of the invention, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to the accompanying drawing provided.
Fig. 1 is femtosecond laser frequency comb tri-dimensional facial type measuring method composition frame chart
Fig. 2 is femtosecond laser frequency comb tri-dimensional facial type measuring system structural representation
Fig. 3 is femtosecond laser frequency comb tri-dimensional facial type measuring method process flow diagram
Wherein, 21: fiber coupler; 22,23: single-mode fiber; 24: dispersion compensating fiber; 25,33,34: lens; 26: dichronic mirror; 27: frequency-doubling crystal; 31: level crossing; 32: Amici prism; 35: sample; 41: high-speed CCD camera
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, carry out accurately, intactly describing to the technical side's case in the embodiment of the present invention, obviously, described embodiment is only the present invention's part embodiment, is not whole embodiments.Based on this, those of ordinary skill in the art, not making the every other embodiment obtained under creative work prerequisite, belong to protection scope of the present invention.
The method of the femtosecond laser frequency comb measured surface three dimensional topography that the present invention relates to comprises: the femtosecond laser frequency comb system 1 that repetition frequency is adjustable, the light path system 2 of optic fibre light path and frequency doubling system composition, the receiving system 4 that michelson interferometer optical path forms with the measuring system 3 and high-speed CCD camera that expand light path formation, as shown in Figure 1.As shown in Figure 2, the femtosecond pulse that femtosecond laser frequency comb produces is divided into two-beam by fiber coupler 21 and enters the optic fibre light path be made up of reference path and optical path the femtosecond laser frequency comb tri-dimensional facial type measuring system that the present invention relates to.Wherein reference path is made up of segment length's single-mode fiber 23, is combined dispersion compensating fiber 24 to compensate the dispersion because long range propagation causes simultaneously.Optical path is made up of one section short single-mode fiber 22.Be designed with larger optical path difference between reference path and optical path simultaneously.Incided frequency-doubling crystal 27 by the femtosecond pulse after optic fibre light path outgoing carry out frequency multiplication through level crossing 25, dichronic mirror 26, and only have the femtosecond pulse after frequency multiplication can enter measuring system by dichronic mirror 26 reflection.The michelson interferometer optical path that measuring system is made up of level crossing 31, Amici prism 32, lens 33 and 34, sample 35 forms, and wherein lens 33 and 34 composition expands light path better to detect sample surfaces.Complete the scanning to sample by the repetition frequency adjusting femtosecond laser frequency comb, high-speed CCD camera 41 obtains corresponding interference pattern.
Measuring method flow process of the present invention as shown in Figure 3, first according to actual sample determination repetition frequency adjustment step-length, then from initial repetition frequency, repetition after each step by step modulating completes and once on CCD, obtains the corresponding image of a frame to the measurement of sample surfaces, so goes round and begins again until complete the scanning on sample surface.By the analyzing and processing to gained interference pattern on CCD after having scanned, sample surfaces three dimensional topography parameter can be obtained, and sample surfaces three-dimensional appearance can have been reduced by reconstructing three-dimensional model.
To the above-mentioned explanation of the disclosed embodiments, professional and technical personnel in the field are realized or uses the present invention, will be apparent to the multiple amendment of these embodiments concerning the patented technology personnel of this area.General Principle as defined herein when not departing from spirit of the present invention or scope, can realize in other embodiments.Therefore, the present invention can not be restricted to these embodiments shown in this article, but will meet principle disclosed herein and the consistent the widest scope of novel features.
Claims (3)
1., for a method for micro/nano-scale measuring three-dimensional morphology, comprise,
The femtosecond laser frequency comb system 1 that repetition frequency is adjustable, the light path system 2 of optic fibre light path and frequency doubling system composition, the receiving system 4 that michelson interferometer optical path forms with the measuring system 3 and high-speed CCD camera that expand light path formation.
2. according to claim 1, draw the femtosecond laser frequency comb tri-dimensional facial type measuring system related to, the femtosecond pulse that femtosecond laser frequency comb produces is divided into two-beam by fiber coupler 21 and enters the optic fibre light path be made up of reference path and optical path.Wherein reference path is made up of segment length's single-mode fiber 23, is combined dispersion compensating fiber 24 to compensate the dispersion because long range propagation causes simultaneously.Optical path is made up of one section short single-mode fiber 22.Be designed with larger optical path difference between reference path and optical path simultaneously.Incided frequency-doubling crystal 27 by the femtosecond pulse after optic fibre light path outgoing carry out frequency multiplication through level crossing 25, dichronic mirror 26, and only have the femtosecond pulse after frequency multiplication can enter measuring system by dichronic mirror 26 reflection.The michelson interferometer optical path that measuring system is made up of level crossing 31, Amici prism 32, lens 33 and 34, sample 35 forms, and wherein lens 33 and 34 composition expands light path better to detect sample surfaces.Complete the scanning to sample by the repetition frequency adjusting femtosecond laser frequency comb, high-speed CCD camera 41 obtains corresponding interference pattern.
3. according to claim 2, draw actual sample determination repetition frequency adjustment step-length, then from initial repetition frequency, repetition after each step by step modulating completes and once on CCD, obtains the corresponding image of a frame to the measurement of sample surfaces, so goes round and begins again until complete the scanning on sample surface.By the analyzing and processing to gained interference pattern on CCD after having scanned, sample surfaces three dimensional topography parameter can be obtained, and sample surfaces three-dimensional appearance can have been reduced by reconstructing three-dimensional model.
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| CN201410086820.7A CN104897076A (en) | 2014-03-07 | 2014-03-07 | Three dimensional shape measurement method for micro nanoscale |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105444785A (en) * | 2015-12-25 | 2016-03-30 | 中国科学院光电研究院 | Optical distance compensation device and method of scanning plane laser |
| CN107063125A (en) * | 2017-06-15 | 2017-08-18 | 清华大学 | A kind of length scanning three dimensional shape measurement system of frequency comb reference |
| CN108844493A (en) * | 2018-07-04 | 2018-11-20 | 天津大学 | The double light comb topography measurement devices of Electro-optical Modulation and its method of calibration |
| CN111504190A (en) * | 2020-04-30 | 2020-08-07 | 天津大学 | Three-dimensional coordinate measuring device for correcting nonlinearity of frequency modulated continuous wave by Kerr optical comb |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008151640A (en) * | 2006-12-18 | 2008-07-03 | Nikon Corp | Measurement device |
| CN102494615A (en) * | 2011-11-15 | 2012-06-13 | 清华大学 | Step distance measuring device based on femtosecond optical-frequency comb and measuring method thereof |
| CN102967274A (en) * | 2012-11-14 | 2013-03-13 | 广东汉唐量子光电科技有限公司 | Method for measuring object surface topography |
-
2014
- 2014-03-07 CN CN201410086820.7A patent/CN104897076A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008151640A (en) * | 2006-12-18 | 2008-07-03 | Nikon Corp | Measurement device |
| CN102494615A (en) * | 2011-11-15 | 2012-06-13 | 清华大学 | Step distance measuring device based on femtosecond optical-frequency comb and measuring method thereof |
| CN102967274A (en) * | 2012-11-14 | 2013-03-13 | 广东汉唐量子光电科技有限公司 | Method for measuring object surface topography |
Non-Patent Citations (1)
| Title |
|---|
| JOO W D 等: "Femtosecond laser pulses for fast 3-D surface profilometry of microelectronic step-structures", 《OPTICS EXPRESS》 * |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105444785A (en) * | 2015-12-25 | 2016-03-30 | 中国科学院光电研究院 | Optical distance compensation device and method of scanning plane laser |
| CN107063125A (en) * | 2017-06-15 | 2017-08-18 | 清华大学 | A kind of length scanning three dimensional shape measurement system of frequency comb reference |
| CN107063125B (en) * | 2017-06-15 | 2019-08-02 | 清华大学 | A kind of length scanning three dimensional shape measurement system of frequency comb reference |
| CN108844493A (en) * | 2018-07-04 | 2018-11-20 | 天津大学 | The double light comb topography measurement devices of Electro-optical Modulation and its method of calibration |
| CN111504190A (en) * | 2020-04-30 | 2020-08-07 | 天津大学 | Three-dimensional coordinate measuring device for correcting nonlinearity of frequency modulated continuous wave by Kerr optical comb |
| CN111504190B (en) * | 2020-04-30 | 2021-05-25 | 天津大学 | Three-dimensional coordinate measuring device for correcting nonlinearity of frequency modulated continuous wave by Kerr optical comb |
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