CN204902762U - Reaction type acousto -optic modulation moves interferes system mutually - Google Patents
Reaction type acousto -optic modulation moves interferes system mutually Download PDFInfo
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- CN204902762U CN204902762U CN201520271451.9U CN201520271451U CN204902762U CN 204902762 U CN204902762 U CN 204902762U CN 201520271451 U CN201520271451 U CN 201520271451U CN 204902762 U CN204902762 U CN 204902762U
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Abstract
The utility model relates to a reaction type acousto -optic modulation moves interferes system mutually, it is main including laser instrument (1), a plurality of beam expanding lenss, splitting system (3), a plurality of modulators, diaphragm (6), speculum (7), a plurality of collimating mirrors, refer to mirror (12) and imaging lens (15), wherein, a plurality of beam expanding lenss include first beam expanding lens (2) and second beam expanding lens (5), a plurality of modulators include first modulator (4) and second modulator (10), a plurality of collimating mirrors include first collimating mirror (8) and second collimating mirror (15). The utility model provides a reaction type acousto -optic modulation moves interferes system mutually utilizes AOM to set a camera the wave frequency to carry out high frequency ladder modulation, realized the fringe phase and surveyed and move the looks interferometry, simultaneously still with its as the initiative compensation component, realized in the interferometer of big optical path difference that the phase error that the pairing vibration led to the fact carries out the self -adaptation compensation.
Description
Technical field
The utility model relates to one and utilizes AOM to carry out high frequency step modulation to frequency of light wave, achieves the interferometer of fringe phase detection and phase-shifting interference measuring, particularly relates to a kind of reaction type acoustooptic modulation movable phase interfere system, belong to interferometer field.
Background technology
Shift-phase interferometry is the non-contact measuring technology in units of optical wavelength, has high measuring accuracy and sensitivity, is considered to one of most exact technical detecting precision element.Before more than 200 years, people just notice the interference of light of knowing clearly, and start planned control interference.But until the succeeding in developing of nineteen sixty first ruby laser, interference just starts to be widely used in fields of measurement.Traditional interfere measurement technique is mainly by take a picture or human eye directly observes interference fringe, and the mode of hand computation measurement result is carried out, and inefficiency, subjective error is larger.Phase detection technology in communication field is incorporated in optical measurement by the people such as Bruning in 1974 first, makes classical interfere measurement technique stride into nanoscale from micron order, realizes the important breakthrough of Optical metrology and measurement.Since the eighties, along with the progressively application of technology in optic test such as laser technology, detecting technique, computer technology, image processing techniques and precision optical machineries, Phase-Shifting Interferometry is further developed, achieve in real time, fast, multiparameter, robotization measurement.
The usual time phase-shifting method of traditional movable phase interfere, utilizes the piezoelectric property of PZT to promote phase shifting component and at the uniform velocity moves, realize the phase shift at equal intervals of interferogram.During this period, the factor such as ambient vibration, air turbulence all can affect the precision of phase shift step-length, reduces the measuring accuracy of phase-shifting interferometer.Under prevailing experimental conditions, interferometer is positioned on optical table usually, and now its natural frequency is lower, the amplitude com parison that the ambient vibration of low frequency is corresponding is large, the vibration of these low frequency large amplitudes can make interferogram image blurring, has a strong impact on the contrast of interferogram, the measuring accuracy of obvious reduction system.
Utility model content
In order to overcome the deficiencies in the prior art, resolving the problem of prior art, making up the deficiency of existing existing product in the market.
The utility model provides a kind of reaction type acoustooptic modulation movable phase interfere system, mainly comprise laser instrument, multiple beam expanding lens, beam splitting system, multiple modulator, diaphragm, catoptron, multiple collimating mirror, reference mirror and imaging len, wherein, multiple beam expanding lens comprises the first beam expanding lens and the second beam expanding lens, multiple modulator comprises the first modulator and the second modulator, multiple collimating mirror comprises the first collimating mirror and the second collimating mirror, described laser instrument, first beam expanding lens, beam splitting system, first modulator, second beam expanding lens, diaphragm and catoptron are arranged on same optical axis, the laser that laser instrument is launched arrives beam splitting system and is divided into two-way after the first beam expanding lens, one tunnel arrives catoptron through the first modulator and the second beam expanding lens, road after spectroscope, another road arrives measured piece, imaging len is arrived after spectroscope.
Preferably, between above-mentioned beam splitting system and the second modulator, the first photoelectric tube is set.
Preferably, above-mentioned laser instrument is helium-neon laser, and described first beam expanding lens is λ/2 lens, and the second beam expanding lens is λ/4 lens, and described catoptron is spherical reflector.
Preferably, above-mentioned interference instrument also comprises DSP, and described DSP is connected with the second modulator.
Preferably, the second photoelectric tube and the second collimating mirror are set between above-mentioned DSP and imaging len.
Preferably, above-mentioned interference instrument also comprises CCD, and described CCD is connected with imaging len.
The reaction type acoustooptic modulation movable phase interfere system that the utility model provides utilizes AOM to carry out high frequency step modulation to frequency of light wave, achieve fringe phase detection and phase-shifting interference measuring, simultaneously also used as Active Compensation element, achieve in the interferometer of large optical path difference and carry out adaptive equalization to vibrating the phase error caused.
Accompanying drawing explanation
Fig. 1 is the utility model structural representation.
Reference numeral: 1-laser instrument; 2-first beam expanding lens; 3-beam splitting system; 4-first modulator; 5-second beam expanding lens; 6-diaphragm; 7-catoptron; 8-first collimating mirror; 9-first photoelectric tube; 10-second modulator; 11-measured piece; 12-reference mirror; 13-DSP; 14-second photoelectric tube; 15-second collimating mirror; 16-CCD; 17-imaging len; 18-spectroscope.
Embodiment
Understand for the ease of those of ordinary skill in the art and implement the utility model, below in conjunction with the drawings and the specific embodiments, the utility model being described in further detail.
As shown in Figure 1, the reaction type acoustooptic modulation movable phase interfere system that the utility model provides, mainly comprise laser instrument 1, multiple beam expanding lens, beam splitting system 3, multiple modulator, diaphragm 6, catoptron 7, multiple collimating mirror, reference mirror 12 and imaging len 15, wherein, multiple beam expanding lens comprises the first beam expanding lens 2 and the second beam expanding lens 5, multiple modulator comprises the first modulator 4 and the second modulator 10, multiple collimating mirror comprises the first collimating mirror 8 and the second collimating mirror 15, laser instrument 1, first beam expanding lens 2, beam splitting system 3, first modulator 4, second beam expanding lens 5, diaphragm 6 and catoptron 7 are arranged on same optical axis, the laser that laser instrument 1 is launched arrives beam splitting system 3 and is divided into two-way after the first beam expanding lens 2, one tunnel arrives catoptron 7 through the first modulator 4 and the second beam expanding lens 5, road after spectroscope 18, another road arrives measured piece 11, imaging len 17 is arrived after spectroscope 18.
Between beam splitting system 3 and the second modulator 10, the first photoelectric tube 9 is set.Laser instrument 1 is helium-neon laser, and the first beam expanding lens 2 is λ/2 lens, and the second beam expanding lens 5 is λ/4 lens, and catoptron 7 is spherical reflector.Interferometer also comprises DSP13, and DSP13 is connected with the second modulator 10.Second photoelectric tube 14 and the second collimating mirror 15 is set between DSP13 and imaging len 17.Interferometer also comprises CCD16, and CCD16 is connected with imaging len 17.
The reaction type acoustooptic modulation movable phase interfere system that the utility model provides, according to acoustooptic modulation (AOM) principle, AOM is utilized to carry out high frequency step modulation to frequency of light wave, achieve fringe phase detection and phase-shifting interference measuring, simultaneously also used as Active Compensation element, achieve in the interferometer of large optical path difference and carry out adaptive equalization to vibrating the phase error caused.Its main thought utilizes the acoustooptic effect of crystal---being changed by the frequency of laser during acousto-optic crsytal, by controlling acousto-optic crsytal, changing the frequency of laser, realize, to the compensation of the phase place change that ambient vibration produces, obtaining stable interference fringe.
The embodiment of the above is better embodiment of the present utility model; not limit concrete practical range of the present utility model with this; scope of the present utility model comprises and is not limited to this embodiment, and the equivalence change that all shapes according to the utility model, structure are done is all in protection domain of the present utility model.
Claims (6)
1. a reaction type acoustooptic modulation movable phase interfere system, it is characterized in that: described reaction type acoustooptic modulation movable phase interfere system mainly comprises laser instrument (1), multiple beam expanding lens, beam splitting system (3), multiple modulator, diaphragm (6), catoptron (7), multiple collimating mirror, reference mirror (12) and imaging len (15), wherein, multiple beam expanding lens comprises the first beam expanding lens (2) and the second beam expanding lens (5), multiple modulator comprises the first modulator (4) and the second modulator (10), multiple collimating mirror comprises the first collimating mirror (8) and the second collimating mirror (15), described laser instrument (1), first beam expanding lens (2), beam splitting system (3), first modulator (4), second beam expanding lens (5), diaphragm (6) and catoptron (7) are arranged on same optical axis, the laser that laser instrument (1) is launched arrives beam splitting system (3) and is divided into two-way after the first beam expanding lens (2), one tunnel arrives catoptron (7) through the first modulator (4) and the second beam expanding lens (5), road after spectroscope (18), another road arrives measured piece (11), imaging len (17) is arrived after spectroscope (18).
2. reaction type acoustooptic modulation movable phase interfere system according to claim 1, is characterized in that: arrange the first photoelectric tube (9) between described beam splitting system (3) and the second modulator (10).
3. reaction type acoustooptic modulation movable phase interfere system according to claim 1, it is characterized in that: described laser instrument (1) is helium-neon laser, described first beam expanding lens (2) is λ/2 lens, second beam expanding lens (5) is λ/4 lens, and described catoptron (7) is spherical reflector.
4. reaction type acoustooptic modulation movable phase interfere system according to claim 1, it is characterized in that: described system also comprises DSP (13), described DSP (13) is connected with the second modulator (10).
5. reaction type acoustooptic modulation movable phase interfere system according to claim 4, is characterized in that: arrange the second photoelectric tube (14) and the second collimating mirror (15) between DSP (13) and imaging len (17).
6., according to the reaction type acoustooptic modulation movable phase interfere system one of claim 1-4 Suo Shu, it is characterized in that: described system also comprises CCD (16), described CCD (16) is connected with imaging len (17).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520271451.9U CN204902762U (en) | 2015-04-27 | 2015-04-27 | Reaction type acousto -optic modulation moves interferes system mutually |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520271451.9U CN204902762U (en) | 2015-04-27 | 2015-04-27 | Reaction type acousto -optic modulation moves interferes system mutually |
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| Publication Number | Publication Date |
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| CN204902762U true CN204902762U (en) | 2015-12-23 |
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| CN201520271451.9U Expired - Fee Related CN204902762U (en) | 2015-04-27 | 2015-04-27 | Reaction type acousto -optic modulation moves interferes system mutually |
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2015
- 2015-04-27 CN CN201520271451.9U patent/CN204902762U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20151223 Termination date: 20160427 |