CN102980600A - Optical system based on double-pulse digital speckle transient measurement - Google Patents

Optical system based on double-pulse digital speckle transient measurement Download PDF

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Publication number
CN102980600A
CN102980600A CN2012105053576A CN201210505357A CN102980600A CN 102980600 A CN102980600 A CN 102980600A CN 2012105053576 A CN2012105053576 A CN 2012105053576A CN 201210505357 A CN201210505357 A CN 201210505357A CN 102980600 A CN102980600 A CN 102980600A
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China
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lens
light
long
focus lens
double
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CN2012105053576A
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张大治
温聚英
王晶晶
薛景锋
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Beijing Changcheng Institute of Metrology and Measurement AVIC
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Beijing Changcheng Institute of Metrology and Measurement AVIC
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Abstract

The invention relates a transient speckle measurement optical system based on a double-pulse laser, and belongs to the field of dynamic mechanical quantity laser measurement. The system comprises a light source, a light path transmission system and a photoelectric receiving system; the light source emits double-pulse laser, the energy of the laser is adjusted by an attenuation piece, and the space filtering is carried out for speckles of the laser by a space filtering mirror group which consists of a first long focal length lens, a metal pinhole and a second long focal length lens; the light beam passes through a second reflector after the space filtering is expanded and collimated by a first reflector, an expanded beam lens and a collimating lens, and is divided into a path of measurement light and a path of reference light through a beam splitter prism to be incident on a measured surface and a reference surface respectively; the two paths of scattered light are gathered after passing through the beam splitter prism, and are interfered mutually; and the interfered light beam is imaged on the receiving surface of a CCD (Charge-Coupled Device) camera by an eyepiece. The system obtains speckle images of transient vibration of an object structure surface in an adjustable time interval; and the signal to noise ratio of the obtained speckle images is high.

Description

Based on dipulse digital speckle instantaneous measurement optical system
Technical field
The present invention relates to a kind of digital speckle interference measuring technique, be specifically related to the transient state speckle measurement optical system based on the double-pulse laser device, belong to dynamic mechanical amount laser measurement field.
Background technology
Digital speckle interference is measured the vibration information that obtains the measured surface each point by collection and demodulation to whole audience speckle interference pattern, can be used in whole audience vibration, displacement and the strain measurement, this technology has the advantages such as noncontact, high resolving power, real-time, in the development and production process of war products extensive, important effect is arranged.
Chinese utility model patent number is " CN92226915.7 ", and name is called " a kind of optic head for portable electronic speckle interferometer ", and the disclosed electronic speckle interferometer optical head of this utility model adopts semiconductor laser.Chinese invention patent number is " ZL200410073049.6 ", and name is called " subregion splicing multiple He-Ne laser digital speckle interference measuring system ", and the laser interferometry system of this disclosure of the Invention adopts the He-Ne laser instrument.Domestic digital speckle measuring system concentrates on steady state measurement, i.e. static measurement on the ordinary meaning can't obtain certain instantaneous vibration pattern.Speckle interference measuring system uses the less continuous wave laser of luminous power as light source, and it is limited to measure area, and irradiating object surface light intensity is inhomogeneous, the speckle image poor signal to noise.
Summary of the invention
The objective of the invention is in order to solve traditional speckle measurement system irradiating object surface light intensity inhomogeneously, the problem of speckle image poor signal to noise has realized obtaining of instantaneous vibration pattern.The invention discloses a kind of based on dipulse digital speckle instantaneous measurement optical system.
The objective of the invention is to realize by technique scheme.
Of the present invention a kind of based on dipulse digital speckle instantaneous measurement optical system, comprise light source, optic path system, photoelectric receiving system; Described optic path system is comprised of attenuator, first long-focus lens, metal pin hole, second long-focus lens, first broadband dielectric mirror, beam expanding lens, collimating mirror, second broadband dielectric mirror and Amici prism; Described photoelectric receiving system is comprised of eyepiece and CCD camera;
Light source sends double-pulse laser, through attenuator laser energy is regulated, process is by first long-focus lens, metal pin hole and second spatial filtering mirror group that long-focus lens forms again, the laser instrument hot spot is carried out spatial filtering, effectively eliminate the inhomogeneous phenomenon of hot spot, obtain uniform light distribution; Light beam behind the spatial filtering expands and collimates through first catoptron, extender lens, collimating mirror, again by second catoptron, then by Amici prism light beam is divided into a drive test amount light and one road reference light, incide respectively on measured surface and the reference surface, by converging behind the Amici prism and interfering, interfering beam is imaged on CCD camera receiving surface by eyepiece to two scattered lights again;
The metal pin hole is positioned at first long-focus lens focus place; Distance between second long-focus lens and the first long-focus lens is the focal length sum of two lens; The first long-focus lens becomes miter angle with the incident light optical axis; Distance between extender lens, collimating mirror and the extender lens is focal length poor of two lens; Second catoptron becomes miter angle with the incident light optical axis; Measured surface be positioned at Amici prism directly over; Photoelectricity receive be positioned at Amici prism under;
Described light source adopts the double-pulse laser device, and coherent length is greater than 0.5m.
Described CCD camera mode of operation is the double-exposure pattern, and the imaging enlargement factor is adjustable.
Beneficial effect
1, of the present invention based on dipulse digital speckle instantaneous measurement optical system, owing to adopted double-pulse laser device and double-exposure mode of operation CCD camera, therefore can obtain the speckle image of the object structures surface instantaneous vibration in the time regulatable interval.
2, of the present invention based on dipulse digital speckle instantaneous measurement optical system, adopt spatial filter to shoot laser filtering, the speckle field light distribution is even, and the speckle image signal to noise ratio (S/N ratio) of obtaining is high.
3, of the present invention based on dipulse digital speckle instantaneous measurement optical system, easy to use, energy of lasers is high, has the advantages such as speckle image that can measure the body surface whole audience.
Description of drawings
Fig. 1 is system chart of the present invention.
Wherein, 1-light source, 2-optic path system, 3-attenuator, 4-first long-focus lens, 5-metal pin hole, second long-focus lens of 6-, 7-first broadband dielectric mirror, 8-beam expanding lens, 9-collimating mirror, second broadband dielectric mirror of 10-, 11-Amici prism, 12-eyepiece, 13-CCD camera, 14-photoelectric receiving system, 15-measured surface, 16-reference surface.
Embodiment
The present invention will be further described below in conjunction with embodiment and accompanying drawing.
Embodiment 1
Of the present invention a kind of based on dipulse digital speckle instantaneous measurement optical system, comprise light source 1, optic path system 2, photoelectric receiving system 14, as shown in Figure 1; Described optic path system 2 is comprised of attenuator 3, first long-focus lens 4, metal pin hole 5, second long-focus lens 6, first broadband dielectric mirror 7, beam expanding lens 8, collimating mirror 9, second broadband dielectric mirror 10 and Amici prism 11; Described photoelectric receiving system 14 is comprised of eyepiece 12 and CCD camera 13;
Described light source 1 adopts the double-pulse laser device, and coherent length is greater than 0.5m.Laser instrument produces the high energy laser pulse, and double-pulsed time and repetition frequency are adjustable continuously.
Described CCD camera 13 mode of operations are the double-exposure pattern, and the imaging enlargement factor is adjustable.
Light source 1 sends double-pulse laser, regulate through 3 pairs of laser energies of attenuator, again through pin hole 5 and second spatial filtering mirror group that long-focus lens 6 forms by first long-focus lens 4, metal material making, the laser instrument hot spot is carried out spatial filtering, effectively eliminate the inhomogeneous phenomenon of hot spot, obtain uniform light distribution.Light beam behind the spatial filtering changes optical path direction through first broadband dielectric mirror 7, expand and collimate through extender lens 8, collimation lens 9, change optical path direction through second broadband dielectric mirror 10 again, then by Amici prism 11 light beam is divided into a drive test amount light and one road reference light, incide respectively on measured surface 15 and the reference surface 16, by converging behind the Amici prism 11 and interfering, interfering beam is imaged on CCD camera 13 receiving surfaces by eyepiece 12 to two scattered lights again.
Metal pin hole 5 is positioned at first long-focus lens 4 focus places; Distance between second long-focus lens 6 and the first long-focus lens 4 is the focal length sum of two lens; First long-focus lens 4 becomes miter angle with the incident light optical axis; Distance between extender lens, collimating mirror and the extender lens is focal length poor of two lens; Second catoptron becomes miter angle with the incident light optical axis; Measured surface be positioned at Amici prism directly over; Photoelectricity receive be positioned at Amici prism under.

Claims (3)

1. one kind based on dipulse digital speckle instantaneous measurement optical system, it is characterized in that: comprise light source (1), optic path system (2), photoelectric receiving system (14); Described optic path system (2) is comprised of attenuator (3), first long-focus lens (4), metal pin hole (5), second long-focus lens (6), first broadband dielectric mirror (7), beam expanding lens (8), collimating mirror (9), second broadband dielectric mirror (10) and Amici prism (11); Described photoelectric receiving system (14) is comprised of eyepiece (12) and CCD camera (13); Light source (1) sends double-pulse laser, through attenuator (3) laser energy is regulated, pass through again the spatial filtering mirror group that is formed by first long-focus lens (4), metal pin hole (5) and second long-focus lens (6), the laser instrument hot spot is carried out spatial filtering, effectively eliminate the inhomogeneous phenomenon of hot spot, obtain uniform light distribution; Light beam behind the spatial filtering expands and collimates through first catoptron (7), extender lens (8), collimating mirror (9), again by second catoptron (10), then by Amici prism (11) light beam is divided into a drive test amount light and one road reference light, incide respectively on measured surface (15) and the reference surface (16), by converging behind the Amici prism (11) and interfering, interfering beam is imaged on CCD camera (13) receiving surface by eyepiece (12) to two scattered lights again; Metal pin hole (5) is positioned at first long-focus lens (4) focus place; Distance between second long-focus lens (6) and the first long-focus lens (4) is the focal length sum of two lens; First long-focus lens (4) becomes miter angle with the incident light optical axis; Distance between extender lens, collimating mirror and the extender lens is focal length poor of two lens; Second catoptron becomes miter angle with the incident light optical axis; Measured surface be positioned at Amici prism directly over; Photoelectricity receive be positioned at Amici prism under.
2. as claimed in claim 1 a kind of based on dipulse digital speckle instantaneous measurement optical system, it is characterized in that: described light source (1) adopts the double-pulse laser device, and coherent length is greater than 0.5m.
3. as claimed in claim 1 a kind of based on dipulse digital speckle instantaneous measurement optical system, it is characterized in that: described CCD camera (13) mode of operation is the double-exposure pattern, and the imaging enlargement factor is adjustable.
CN2012105053576A 2012-12-03 2012-12-03 Optical system based on double-pulse digital speckle transient measurement Pending CN102980600A (en)

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Cited By (14)

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Publication number Priority date Publication date Assignee Title
CN103983341A (en) * 2014-05-20 2014-08-13 厦门大学 High-precision laser speckle micro-vibration measurement system and measurement method
CN103983340A (en) * 2014-05-20 2014-08-13 厦门大学 Micro vibration measuring system and measuring method based on long-distance pulse laser speckles
CN104776907A (en) * 2015-04-30 2015-07-15 杭州电子科技大学 Vibration detection method based on multi-point laser speckle extreme value tracking
CN104819743A (en) * 2015-04-30 2015-08-05 杭州电子科技大学 Laser-sensing-based multi-parameter detection method
CN105203501A (en) * 2015-09-14 2015-12-30 大连理工大学 Device for measuring erosion and redeposition of Tokamak wall materials
CN104360095B (en) * 2014-11-12 2018-01-02 西南科技大学 A kind of method for measuring instantaneous rotation speed based on Beams, apparatus and system
CN108267661A (en) * 2018-03-30 2018-07-10 华中科技大学 Photovoltaic property measuring apparatus, measuring method and the imaging system of a kind of photoelectric device
CN108680335A (en) * 2018-03-23 2018-10-19 中国航天空气动力技术研究院 A kind of High-speed transient schlieren system
CN109557767A (en) * 2017-09-25 2019-04-02 深圳市纳姆达科技有限公司 A kind of no exposure mask projection lithography system
CN110044394A (en) * 2019-05-08 2019-07-23 浙江大学昆山创新中心 A kind of novel light wave leads phase-array scanning system
CN111247401A (en) * 2018-12-10 2020-06-05 合刃科技(深圳)有限公司 Vibration source positioning device and method based on coherent light
CN111465342A (en) * 2017-12-12 2020-07-28 爱尔康公司 Multiple beam splitting using spatial beam splitting
CN112326585A (en) * 2020-10-28 2021-02-05 南京农业大学 Infrared spectrum device and detection method for rapidly detecting powdery mildew of strawberries
CN112684460A (en) * 2020-12-21 2021-04-20 武汉光目科技有限公司 Area array sweep frequency measuring device and method

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Cited By (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103983340A (en) * 2014-05-20 2014-08-13 厦门大学 Micro vibration measuring system and measuring method based on long-distance pulse laser speckles
CN103983340B (en) * 2014-05-20 2017-06-13 厦门大学 Microvibration measuring system and measuring method based on remote pulse laser speckle
CN103983341A (en) * 2014-05-20 2014-08-13 厦门大学 High-precision laser speckle micro-vibration measurement system and measurement method
CN104360095B (en) * 2014-11-12 2018-01-02 西南科技大学 A kind of method for measuring instantaneous rotation speed based on Beams, apparatus and system
CN104776907A (en) * 2015-04-30 2015-07-15 杭州电子科技大学 Vibration detection method based on multi-point laser speckle extreme value tracking
CN104819743A (en) * 2015-04-30 2015-08-05 杭州电子科技大学 Laser-sensing-based multi-parameter detection method
CN104819743B (en) * 2015-04-30 2017-05-10 杭州电子科技大学 Laser-sensing-based multi-parameter detection method
CN105203501A (en) * 2015-09-14 2015-12-30 大连理工大学 Device for measuring erosion and redeposition of Tokamak wall materials
CN105203501B (en) * 2015-09-14 2018-09-04 大连理工大学 A kind of measuring device of tokamak wall material erosion and redeposition
CN109557767A (en) * 2017-09-25 2019-04-02 深圳市纳姆达科技有限公司 A kind of no exposure mask projection lithography system
CN111465342A (en) * 2017-12-12 2020-07-28 爱尔康公司 Multiple beam splitting using spatial beam splitting
CN108680335A (en) * 2018-03-23 2018-10-19 中国航天空气动力技术研究院 A kind of High-speed transient schlieren system
CN108267661A (en) * 2018-03-30 2018-07-10 华中科技大学 Photovoltaic property measuring apparatus, measuring method and the imaging system of a kind of photoelectric device
CN108267661B (en) * 2018-03-30 2023-08-25 华中科技大学 Photovoltaic property measuring equipment, measuring method and imaging system of photoelectric device
CN111247401A (en) * 2018-12-10 2020-06-05 合刃科技(深圳)有限公司 Vibration source positioning device and method based on coherent light
CN111247401B (en) * 2018-12-10 2022-04-01 合刃科技(深圳)有限公司 Vibration source positioning device and method based on coherent light
CN110044394A (en) * 2019-05-08 2019-07-23 浙江大学昆山创新中心 A kind of novel light wave leads phase-array scanning system
CN112326585A (en) * 2020-10-28 2021-02-05 南京农业大学 Infrared spectrum device and detection method for rapidly detecting powdery mildew of strawberries
CN112684460A (en) * 2020-12-21 2021-04-20 武汉光目科技有限公司 Area array sweep frequency measuring device and method
CN112684460B (en) * 2020-12-21 2024-03-22 武汉光目科技有限公司 Area array sweep frequency measuring device and method

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Application publication date: 20130320