CN205482840U - Dualbeam component roughness measuring device based on mach -Zehnder - Google Patents
Dualbeam component roughness measuring device based on mach -Zehnder Download PDFInfo
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- CN205482840U CN205482840U CN201620002225.5U CN201620002225U CN205482840U CN 205482840 U CN205482840 U CN 205482840U CN 201620002225 U CN201620002225 U CN 201620002225U CN 205482840 U CN205482840 U CN 205482840U
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Abstract
The utility model provides one kind based on mach the dualbeam component roughness measuring device that zehnder interferes relates to the optical interferometry field. It be for the measuring range that solves traditional single light source phase -shift control method measurement element roughness little, be not suitable for the problem that bench height is greater than the roughness measurement on 12 wavelength materials surface. The utility model discloses a light source, no. Two light sources, speculum, spectroscope, no. Two spectroscopes, lens, cemented doublet, no. Two speculums, no. Three spectroscopes, no. Two lens, no. Two cemented doublets, the material that awaits measuring, no. Three lens, diaphragm, no. Three cemented doublets, no. Four cemented doublets, detecting device, little displacement controller, light intensity attenuator, element under test fixed station. Wherein, detecting device needs to link to each other with the computer, utilizes the computer to show the interference pattern that detecting device shot to the coupling phase answers the algorithm can obtain the roughness of element under test. The utility model is suitable for a precision optics interference sensing field.
Description
Technical field
This utility model relates to optical interferometry field.A kind of dual-beam element surface roughness measuring device interfered based on Mach-Zehnder.
Background technology
For the high-acruracy survey of element surface roughness, the measurement apparatus utilizing Mach-Zehnder principle of interference to design is a kind of effective approach.This device is constituted with reference path by sensing light path, has simple in construction, measures sensitivity high, can be used for planar optical elements, spherical optics element and the measurement of aspherical optical element surface roughness.Sphere curvature radius and various optical lens, prism and optical system light wave transmissions quality can be measured by the measurement apparatus simultaneously utilizing this principle to make.In the measurement apparatus of Mach-Zehnder interference technique principle design, phase shift interferometric method is the most accurate a kind of interferometric method, the light path that this kind of method utilizes micrometric displacement control device to control reference path in the optical path, make to sense light path and produce phase difference to realize phase-modulation with reference path, and utilizing detection device to gather interference pattern, its certainty of measurement is up to 1/50 wavelength magnitude.But traditional phase interferometric method uses the light source of single wavelength, it is little that it measures scope, is not suitable for the roughness concentration more than 1/2 wavelength of the element under test surface step height.During measuring, if measured material step height has big difference, cause the phase difference of neighbor to be more than 1/2 wavelength more than π i.e. optical path difference, then cannot precisely measure out the height of step.
Therefore, it is necessary to improved by the device of traditional bit interference method measuring cell surface roughness, design element surface roughness measuring device easy and simple to handle, that precision is high, measurement scope is big.
Summary of the invention
This utility model is to solve in the measurement of element surface roughness, and traditional phase interferometric method measures the problem that scope is little, measurement apparatus cost of manufacture high and operation is complicated.On the basis of Mach-Zehnder principle of interference and phase-shifting interferometry, exploitation realizes the novel dual-beam element surface roughness measuring device interfered based on Mach-Zehnder.Compared with existing measurement equipment, this utility model provides a kind of easy and simple to handle, dual-beam element surface roughness measuring device that measurement scope is big, precision is high interferes based on Mach-Zehnder.
A kind of dual-beam element surface roughness measuring device based on Mach-Zehnder, it includes a light source (1), No. two light sources (2), a number reflecting mirror (3), a number spectroscope (4), No. two spectroscopes (5), lens (6), a number cemented doublet (7), No. two reflecting mirrors (8), No. three spectroscopes (9), No. two lens (10), No. two cemented doublets (11), detected materials (12), No. three lens (13), diaphragm (14), No. three cemented doublets (15), No. four cemented doublets (16), detection device (17), Micro displacement controller (18), variable optical attenuator (19), element under test fixed station (20)；
nullNumber reflecting mirror (3) is positioned over a light source (1) at a distance of 300mm and orthogonal at a distance of position between the position and three of 200mmd with a spectroscope (4)，No. two light sources (2) are parallel with a light source (1) at a distance of 300mm and position with a spectroscope (4)，No. two spectroscopes (5) and a spectroscope (4) at a distance of 200mm and with a lens (6) at a distance of 200mm and orthogonal at a distance of position between 200mm and three with No. two lens (10)，A number lens (6) and a cemented doublet (7) 200mm apart，No. two lens (10) and No. two cemented doublets (11) 200mm apart，No. two reflecting mirrors (8) be fixed on Micro displacement controller (18) upper and with cemented doublet (7) at a distance of 200mm and orthogonal at a distance of position between 609mm and three with No. three spectroscopes (9)，Variable optical attenuator (19) is positioned between No. two reflecting mirrors (8) and No. three spectroscopes (9) and with No. two reflecting mirrors (8) at a distance of 300mm，Detected materials (12) be placed on element under test fixed station (20) upper and with cemented doublet (11) at a distance of 200mm and orthogonal at a distance of position between 609mm and three with No. three spectroscopes (9)，No. three lens (13) and No. three spectroscopes (9) at a distance of 200mm and with diaphragm (14) at a distance of 200mm，No. three cemented doublets (15) and diaphragm (14) at a distance of 30mm and with No. four cemented doublets (16) at a distance of 20mm，No. four cemented doublets (16) and detection device (17) 44mm apart.
The optical wavelength of a number light source (1) is 632.8nm, and the optical wavelength of No. two light sources is 543nm.
Number spectroscope (4), No. two spectroscopes (5), the splitting ratio of No. three spectroscopes (9) is 1:1 and material is BK7 glass.
Number lens (6), the focal length of No. two lens (10) are 12.9mm and thickness is 2mm and a diameter of 3mm and material are K9 glass.
The focal length of No. three lens (13) is 200mm and thickness is 4mm and a diameter of 34mm and material are K9 glass.
A number cemented doublet (7), No. two a diameter of 3mm of cemented doublet (11) and the most two-part material are ZF1 glass and K9 glass respectively.
The thickness of diaphragm (14) is 30mm.
The diameter of No. three cemented doublets (15) and No. four cemented doublets (16) is that two-part material is K9 glass, F3 glass and F3 glass, K9 glass respectively before and after 10mm and 14mm and the two cemented doublet respectively.
Micro displacement controller (18) is PZT.
Variable optical attenuator (19) is the adjustable battery of lens of transmitted intensity.
Element under test fixed station (20) is can conveniently to place the metal of detected materials (12) or fixture that plastics are made.
Detection device (17) is CCD.
The beneficial effects of the utility model are: this utility model, by double light sources of two different wave lengths replacing single light source and improving on the basis of the phase shift interference device of Mach-Zehnder interferometer and tradition single wavelength light source, designs novel Mach-Zehnder interferometer dual-beam element surface roughness measuring device.This measurement apparatus comprises the light source of two different wave lengths, and it so can be made to measure expanded range, can be used for the roughness measuring shoulder height more than 1/2 wavelength material surface.This device is during measuring, if measured material step height has big difference, and the height causing the phase difference of neighbor can precisely measure out step equally more than π, than traditional interferometric measuring means, there is bigger measurement scope.Meanwhile, this device based on principle of interference ensure that and measure highly sensitive advantage, element under test fixed station facilitates picking and placeing and simple to operate of element under test.Double light source component measuring device for surface roughness that this Mach-Zehnder interferes are compared tradition single light source measurement apparatus and are had the advantages such as highly sensitive, measurement scope is big, easy and simple to handle.
Accompanying drawing explanation
Fig. 1 is a kind of dual-beam element surface roughness measuring device interfered based on Mach-Zehnder.
Detailed description of the invention
Detailed description of the invention of the present utility model is further illustrated below in conjunction with Figure of description.
Such as Fig. 1, a kind of dual-beam element surface roughness measuring device interfered based on Mach-Zehnder described in present embodiment, it includes a light source (1), No. two light sources (2), a number reflecting mirror (3), a number spectroscope (4), No. two spectroscopes (5), lens (6), a number cemented doublet (7), No. two reflecting mirrors (8), No. three spectroscopes (9), No. two lens (10), No. two cemented doublets (11), detected materials (12), No. three lens (13), diaphragm (14), No. three cemented doublets (15), No. four cemented doublets (16), detection device (17), Micro displacement controller (18), variable optical attenuator (19), element under test fixed station (20)；nullNumber reflecting mirror (3) is positioned over a light source (1) at a distance of 300mm and orthogonal at a distance of position between the position and three of 200mm with a spectroscope (4)，No. two light sources (2) are parallel with a light source (1) at a distance of 300mm and position with a spectroscope (4)，No. two spectroscopes (5) and a spectroscope (4) at a distance of 200mm and with a lens (6) at a distance of 200mm and orthogonal at a distance of position between 200mm and three with No. two lens (10)，A number lens (6) and a cemented doublet (7) 200mm apart，No. two lens (10) and No. two cemented doublets (11) 200mm apart，No. two reflecting mirrors (8) be fixed on Micro displacement controller (18) upper and with cemented doublet (7) at a distance of 200mm and orthogonal at a distance of position between 609mm and three with No. three spectroscopes (9)，Variable optical attenuator (19) is positioned between No. two reflecting mirrors (8) and No. three spectroscopes (9) and with No. two reflecting mirrors (8) at a distance of 300mm，Detected materials (12) be placed on element under test fixed station (20) upper and with cemented doublet (11) at a distance of 200mm and orthogonal at a distance of position between 609mm and three with No. three spectroscopes (9)，No. three lens (13) and No. three spectroscopes (9) at a distance of 200mm and with diaphragm (14) at a distance of 200mm，No. three cemented doublets (15) and diaphragm (14) at a distance of 30mm and with No. four cemented doublets (16) at a distance of 20mm，No. four cemented doublets (16) and detection device (17) 44mm apart.
The optical wavelength of a number light source (1) is 632.8nm, and the optical wavelength of No. two light sources is 543nm.
Number spectroscope (4), No. two spectroscopes (5), the splitting ratio of No. three spectroscopes (9) is 1:1 and material is BK7 glass.
Number lens (6), the focal length of No. two lens (10) are 12.9mm and thickness is 2mm and a diameter of 3mm and material are K9 glass.
The focal length of No. three lens (13) is 200mm and thickness is 4mm and a diameter of 34mm and material are K9 glass.
A number cemented doublet (7), No. two a diameter of 3mm of cemented doublet (11) and the most two-part material are ZF1 glass and K9 glass respectively.
The thickness of diaphragm (14) is 30mm.
The diameter of No. three cemented doublets (15) and No. four cemented doublets (16) be respectively the material of 10mm and 14mm and each lens be K9 glass, F3 glass and F3 glass, K9 glass respectively.
Micro displacement controller (18) is PZT.
Variable optical attenuator (19) is the adjustable battery of lens of transmitted intensity.
Element under test fixed station (20) is can conveniently to place the metal of detected materials (12) or fixture that plastics are made.
Detection device (17) is CCD.
When carrying out element surface roughness concentration, first put up experiment light path, detection device (17) is connected to computer.Element under test fixed station (20) is put well detected materials (12) and adjusts the position of detected materials (12) so that light can just arrive this detected materials (12) and by this detected materials (12) to No. three spectroscope (9) from No. two cemented doublets (11).On computer, the pattern shot through detecting device (17) of display is pattern when light occurs coupling to interfere behind two-way difference path.When Micro displacement controller (18) drives No. two reflecting mirrors (8) to be moved, the light path of two-way light changes so that sensing light path and reference path produce phase difference to realize phase-modulation.Detection device (17) is utilized to gather interference pattern.By the drawing information collected, obtain the surface roughness of detected materials (12).
Operation principle:
The dual wavelength element surface roughness concentration interfered based on Mach-Zehnder:
Work process: as it is shown in figure 1, detection device (17) be connected with computer, and build experiment light path.
During to element surface roughness concentration, first detection device (17) is connected with computer, then opens a light source (1), No. two light sources (2), detection device (17), computers successively.The light sent through reflecting mirror (3) reflection and No. two light sources (2) by a light source (1) meets in a spectroscope (4), and the splitting ratio of a spectroscope (4) is 1:1.After a spectroscope (4), light is divided into the two-beam that beam intensity ratio is 1:1 and respectively enters sensing light path and reference path.In sensing light path, light sequentially passes through No. two lens (10), No. two cemented doublets (11), detected materials (12), No. three spectroscopes (9).In reference path, light sequentially passes through a lens (6), cemented doublet (7), No. two reflecting mirrors (8), variable optical attenuators (19) meeting with another road light in No. three spectroscopes (9) and couples.When the light path of reference path drives No. two reflecting mirrors (8) mobile by Micro displacement controller (18), its light path can change, so that the optical path difference of two-way light changes.The position when change of optical path difference can cause two-beam to couple changes mutually.The two-beam that meets in No. three spectroscopes (9) can occur the redistribution of light intensity because of the superposition of the mutually different two-beam in position, produces interference.This interference light sequentially passes through No. three lens (13), diaphragm (14), No. three cemented doublets (15), No. four cemented doublets (16) arrival detection device (17).When interfering light because the light path of reference path changes, the interference pattern captured by detection device (17) can change.Can be according to the change of interference pattern and utilize corresponding algorithm to calculate the surface roughness of detected materials (12).
Claims (9)
1. a dual-beam element surface roughness measuring device based on Mach-Zehnder, it is characterized in that: it includes a light source (1), No. two light sources (2), a number reflecting mirror (3), a number spectroscope (4), No. two spectroscopes (5), lens (6), a number cemented doublet (7), No. two reflecting mirrors (8), No. three spectroscopes (9), No. two lens (10), No. two cemented doublets (11), detected materials (12), No. three lens (13), diaphragm (14), No. three cemented doublets (15), No. four cemented doublets (16), detection device (17), Micro displacement controller (18), variable optical attenuator (19), element under test fixed station (20)；
nullA number reflecting mirror (3) is positioned over a light source (1) at a distance of 300mm and the position orthogonal with between a spectroscope (4) 200mm apart and three，No. two light sources (2) are parallel with a light source (1) at a distance of 300mm and position with a spectroscope (4)，No. two spectroscopes (5) and a spectroscope (4) at a distance of 200mm and with a lens (6) at a distance of 200mm and orthogonal at a distance of position between 200mm and three with No. two lens (10)，A number lens (6) and a cemented doublet (7) 200mm apart，No. two lens (10) and No. two cemented doublets (11) 200mm apart，No. two reflecting mirrors (8) be fixed on Micro displacement controller (18) upper and with cemented doublet (7) at a distance of 200mm and orthogonal at a distance of position between 609mm and three with No. three spectroscopes (9)，Variable optical attenuator (19) is positioned between No. two reflecting mirrors (8) and No. three spectroscopes (9) and with No. two reflecting mirrors (8) at a distance of 300mm，Detected materials (12) be placed on element under test fixed station (20) upper and with cemented doublet (11) at a distance of 200mm and orthogonal at a distance of position between 609mm and three with No. three spectroscopes (9)，No. three lens (13) and No. three spectroscopes (9) at a distance of 200mm and with diaphragm (14) at a distance of 200mm，No. three cemented doublets (15) and diaphragm (14) at a distance of 30mm and with No. four cemented doublets (16) at a distance of 20mm，No. four cemented doublets (16) and detection device (17) 44mm apart.
A kind of dual-beam element surface roughness measuring device based on Mach-Zehnder the most according to claim 1, it is characterised in that: the optical wavelength of a light source (1) is 632.8nm, and the optical wavelength of No. two light sources is 543nm.
A kind of dual-beam element surface roughness measuring device based on Mach-Zehnder the most according to claim 1, it is characterized in that: a spectroscope (4), No. two spectroscopes (5), the splitting ratio of No. three spectroscopes (9) is 1:1 and material is BK7 glass, a number lens (6), the focal length of No. two lens (10) is 12.9mm and thickness is 2mm and a diameter of 3mm and material are K9 glass, the focal length of No. three lens (13) is 200mm and thickness is 4mm and a diameter of 34mm and material are K9 glass, a number cemented doublet (7), No. two a diameter of 3mm of cemented doublet (11) and the most two-part material are ZF1 glass and K9 glass respectively.
A kind of dual-beam element surface roughness measuring device based on Mach-Zehnder the most according to claim 1, it is characterised in that: the thickness of diaphragm (14) is 30mm.
A kind of dual-beam element surface roughness measuring device based on Mach-Zehnder the most according to claim 1, it is characterised in that: the diameter of No. three cemented doublets (15) and No. four cemented doublets (16) is that two-part material is K9 glass, F3 glass and F3 glass, K9 glass respectively before and after 10mm and 14mm and each lens respectively.
A kind of dual-beam element surface roughness measuring device based on Mach-Zehnder the most according to claim 1, it is characterised in that: Micro displacement controller (18) is PZT.
A kind of dual-beam element surface roughness measuring device based on Mach-Zehnder the most according to claim 1, it is characterised in that: variable optical attenuator (19) is the adjustable battery of lens of transmitted intensity.
A kind of dual-beam element surface roughness measuring device based on Mach-Zehnder the most according to claim 1, it is characterised in that: element under test fixed station (20) is can conveniently to place the metal of detected materials (12) or fixture that plastics are made.
A kind of dual-beam element surface roughness measuring device based on Mach-Zehnder the most according to claim 1, it is characterised in that: detection device (17) is CCD.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107631694A (en) * | 2017-11-14 | 2018-01-26 | 张家港市欧微自动化研发有限公司 | A kind of measuring method of optical component thickness |
| CN107727009A (en) * | 2017-11-06 | 2018-02-23 | 深圳精创视觉科技有限公司 | Hand-set lid glass quality detection means |
| CN109307487A (en) * | 2017-07-26 | 2019-02-05 | 赫克斯冈技术中心 | Optically roughness degree sensor for coordinate measuring machine |
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2016
- 2016-01-05 CN CN201620002225.5U patent/CN205482840U/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109307487A (en) * | 2017-07-26 | 2019-02-05 | 赫克斯冈技术中心 | Optically roughness degree sensor for coordinate measuring machine |
| US10775150B2 (en) | 2017-07-26 | 2020-09-15 | Hexagon Technology Center Gmbh | Optical roughness sensor for a coordinate measuring machine |
| CN107727009A (en) * | 2017-11-06 | 2018-02-23 | 深圳精创视觉科技有限公司 | Hand-set lid glass quality detection means |
| CN107727009B (en) * | 2017-11-06 | 2023-11-24 | 深圳精创视觉科技有限公司 | Quality detection device for mobile phone cover plate glass |
| CN107631694A (en) * | 2017-11-14 | 2018-01-26 | 张家港市欧微自动化研发有限公司 | A kind of measuring method of optical component thickness |
| CN107631694B (en) * | 2017-11-14 | 2020-07-14 | 江西特莱斯光学有限公司 | Method for measuring thickness of optical component |
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Granted publication date: 20160817 Termination date: 20170105 |