CN203337093U - High-precision position-detecting device - Google Patents
High-precision position-detecting device Download PDFInfo
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- CN203337093U CN203337093U CN2013201721215U CN201320172121U CN203337093U CN 203337093 U CN203337093 U CN 203337093U CN 2013201721215 U CN2013201721215 U CN 2013201721215U CN 201320172121 U CN201320172121 U CN 201320172121U CN 203337093 U CN203337093 U CN 203337093U
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Abstract
The utility model discloses a high-precision position-detecting device, and belongs to the field of optical detection. The device comprises a short coherent light source, a collimating lens, a polarizer, a half wave plate, an optical splitter, a holophote, a coupling lens, a tail-end reflection-type fiber splitter, a focusing lens, a polarization analyzer, a sensor, two quarter wave plates, and a zoom lens. All the parts form a reference light path and a measurement light path. The light path differences of different branches of the reference light path are constant and different from each other. Supposing that a test range is L, and the reference light path comprises n branches, a movable lens just needs to move a distance of L/n in order to test an optical surface spacing of the length L. The position of the movable lens and the central position of interference fringes are analyzed, so as to accurately know the positions of various optical surfaces of a tested system in the range of L. The device provided by the utility model is large in detection range, small in moving range of the movable lens, simple in structure, and high in measurement precision.
Description
Technical field
The utility model relates to the optical detection field, particularly relates to a kind of high precision position detection device that utilizes light to be detected.
Background technology
In the high-precision optical system of complexity, need to be tested the interval between the optical mirror slip after assembling, owing to assembling, can't use mechanical way to be tested, can only take non-contacting mode to be checked, it is a kind of that what be applicable to this application is to adopt short coherent source method to carry out, referring to SPIE document " Contact-free on-axis metrology for the fabrication and testing of complex optical systems ", the method provided in the document is used the interferometer structure principle of Michelson, method by the movable lens position in mobile reference arm and tested optical surface coupling, the position on different optical surface in the measuring optical system.
Fig. 1 has illustrated the theory structure of this checkout equipment, the light of the short relevant wavelength that short coherent source 1 sends is similar to optical splitter through coupling mechanism 3() after, the Varifocal zoom lens 5 of leading up to enters tested optical system 4, another road enters movably catoptron 7 by collimating mirror 6, the reflection of two-way light is by overcoupling device 3, enter sensor 2, when the optical path difference of two-way light is identical, form interference fringe, otherwise be the simple superposition of light intensity, by the profile of test interference fringe and the position of catoptron, just can accurately know the spacing on different optical surface in optical system.
In this checkout equipment, the maximum functional interval of the moving range of movable lens and optical system is consistent, so when the interval of optical system is larger, the movement of movable lens and sensing range also need and then to enlarge, and realize in will be on a large scale that it is very difficult that high precision detects, move the size that has increased equipment simultaneously on a large scale, lowered the reliability of equipment, make the cost of whole equipment sharply increase.
The utility model content
The technical problems to be solved in the utility model is to provide a kind of high precision position detection device, its compact conformation, the high precision that can in shorter moving range, realize longer optical range detects, and solves at present on a large scale, mobile eyeglass checkout equipment precision is lower and larger-size problem.
The technical scheme solved the problems of the technologies described above is as follows:
The utility model provides a kind of high precision position detection device, comprising:
Short coherent source, collimation lens, the polarizer, 1/2 wave plate, optical splitter, completely reflecting mirror, coupled lens, end reflection formula fiber optic splitter, condenser lens, analyzer, sensor, two quarter wave plates and zoom lens;
Wherein, the exit end of the incident end of described short coherent source, collimation lens, the polarizer, 1/2 wave plate, optical splitter, the first quarter wave plate and completely reflecting mirror, completely reflecting mirror, coupled lens and end reflection formula fiber optic splitter are arranged in the first light path;
Described condenser lens, the second quarter wave plate, described optical splitter, analyzer, zoom lens become the second light path with sensor arrangement;
Described the second light path and the first light path cross through described optical splitter, and described the second light path is vertical with the light path at the incident end place of short coherent source, collimation lens, the polarizer, 1/2 wave plate, optical splitter, the first quarter wave plate and completely reflecting mirror in the first light path;
Described completely reflecting mirror can be in described the first light path shift position.
The beneficial effects of the utility model: by short coherent source, collimation lens, the polarizer, 1/2 wave plate, optical splitter, completely reflecting mirror, coupled lens, end reflection formula fiber optic splitter, condenser lens, analyzer, sensor, two quarter wave plates and zoom lens, coordinate and can form the pick-up unit with reference path and optical path.The movable completely reflecting mirror of this device only needs the distance of mobile L/n, can measure the optical surface spacing of L length, by the position of analysis completely reflecting mirror and the center of interference fringe, just can accurately know that system under test (SUT) comprises the position on different optical surface at the L length range, there is the large and movable completely reflecting mirror moving range of sensing range little, advantage simple in structure, that measuring accuracy is high.
The accompanying drawing explanation
In order to be illustrated more clearly in the technical scheme of the utility model embodiment, in below describing embodiment, the accompanying drawing of required use is briefly described, apparently, accompanying drawing in the following describes is only embodiment more of the present utility model, for those of ordinary skill in the art, under the prerequisite of not paying creative work, can also obtain other accompanying drawings according to these accompanying drawings.
Fig. 1 is the structural representation of existing commercial short relevant test macro;
The structure of the detecting device schematic diagram that Fig. 2 is the utility model embodiment.
Embodiment
Below the technical scheme in the utility model embodiment is clearly and completely described, obviously, described embodiment is only the utility model part embodiment, rather than whole embodiment.Based on embodiment of the present utility model, those of ordinary skills, not making under the creative work prerequisite the every other embodiment obtained, belong to protection domain of the present utility model.
Below the utility model embodiment is described in further detail.
The utility model embodiment provides a kind of high precision position measurement mechanism, it is a kind of compact conformation, the high precision that can realize long optical range in shorter moving range detects, solving current checkout equipment will be on a large scale, the problem that moving lens built-in testing precision and equipment size are larger, as shown in Figure 1, this pick-up unit comprises: short coherent source 301, collimation lens 302, the polarizer 303, 1/2 wave plate 304, optical splitter 305, completely reflecting mirror 502, coupled lens 503, end reflection formula fiber optic splitter 504, condenser lens 402, analyzer 601, sensor 603, two quarter wave plates 501, 502 and zoom lens 602,
Wherein, exit end, coupled lens 503 and the end reflection formula fiber optic splitter 504 of the incident end 502 of described short coherent source 301, collimation lens 302, the polarizer 303,1/2 wave plate 304, optical splitter 305, the first quarter wave plate 501 and completely reflecting mirror 502, completely reflecting mirror 502 are arranged in the first light path;
Described condenser lens 402, the second quarter wave plate 401, described optical splitter 305, analyzer 601, zoom lens 602 and sensor 603 are arranged in the second light path;
Described the second light path and the first light path cross through described optical splitter 305, and described the second light path is vertical with the light path at the incident end place of short coherent source 301, collimation lens 302, the polarizer 303,1/2 wave plate 304, optical splitter 305, the first quarter wave plate 501 and completely reflecting mirror 502 in the first light path;
Described completely reflecting mirror 502 can be in described the first light path shift position.
In said apparatus, by the incident end of described short coherent source 301, collimation lens 302, the polarizer 303,1/2 wave plate 304, optical splitter, the first quarter wave plate 51, completely reflecting mirror 502, exit end, coupled lens 503, end reflection formula fiber optic splitter 504, described end reflection formula fiber optic splitter 504, described coupled lens 503, the exit end of described completely reflecting mirror 502, the incident end of described completely reflecting mirror 502, described the first quarter wave plate 501, analyzer 601, zoom lens 602 and the sensor 603 of completely reflecting mirror 502, form reference path.
In above-mentioned reference path, from incident end, the exit end of completely reflecting mirror 502, coupled lens 503 to the end reflection formula fiber optic splitter 504 of described short coherent source 301, collimation lens 302, the polarizer 303,1/2 wave plate 304, optical splitter 305, the first quarter wave plate 501, completely reflecting mirror 502, form the process reference path;
Exit end from end reflection formula fiber optic splitter 504 to described coupled lens 503, described completely reflecting mirror 502, the incident end of described completely reflecting mirror 502, described the first quarter wave plate 501, analyzer 601, zoom lens 602 and sensor 603 form the backhaul reference path.
Form optical path by described short coherent source 301, collimation lens 302, the polarizer 303,1/2 wave plate 304, optical splitter 305, the second quarter wave plate 401, condenser lens 402, described condenser lens 402, described the second quarter wave plate 401, described optical splitter 305, analyzer 601, zoom lens 602 and sensor 603.
In above-mentioned optical path, from described short coherent source 301, collimation lens 302, the polarizer 303,1/2 wave plate 304, optical splitter 305, the second quarter wave plate 401, condenser lens 402, form the process optical path to tested optical system 403 again;
From tested optical system 403 to described condenser lens 402, described the second quarter wave plate 401, described optical splitter 305, analyzer 601, zoom lens 602 and sensor 603 form the backhaul optical paths.
In above-mentioned detection device, end reflection formula fiber optic splitter 504 is: there is an incident end, and n road branch exit end, and each exit end end is equipped with the fiber optic splitter of reflectance coating, and this fiber optic splitter can separate the n road light that has different optical path differences.
Above-mentioned detection device also comprises: optical fiber, and the input end of this optical fiber is connected with described condenser lens, and output terminal is corresponding with described the second quarter wave plate.
During above-mentioned detection device work, the light that short coherent source 301 sends is after collimation lens 302, become after directional light after the polarizer 303 and 1/2 wave plate 304, being certain polarization direction incides on optical splitter 305, light beam transmission after optical splitter 305, after the first quarter wave plate 501, enter a movably completely reflecting mirror 502, from the light of completely reflecting mirror 502 outgoing, through a coupled lens 503, couple light into an end reflection formula fiber optic splitter 504, end reflection formula fiber optic splitter 504 is beam splitters of a 1 * n, one road light is divided into to n road light, there is different optical path differences between the light of n road, the end of each fiber optic tap plates reflectance coating, light through reflection returns on the Cong Yuan road again, reflected light is after the first quarter wave plate 501, change of polarization 90 degree, reflect and enter in sensor 603 by analyzer 601 and zoom lens 602 on optical splitter 305, this road light is referred to as reference light, can find out, the light that comprises different optical path differences in reference light, movably completely reflecting mirror is fixed in movable mechanism, so the optical path difference of the different light beams of reference light can be regulated,
Another drive test amount light, reflected light through optical splitter 305, after the second quarter wave plate 401, by variable condenser lens 402, focus in tested optical system, after different optical device surface reflection in tested optical system 403, again become directional light through condenser lens 402, by after the second quarter wave plate 401, entering optical splitter 305, due to twice by the second quarter wave plate 401,90 degree rotations occur in polarization direction, by optical splitter 305 transmissions, by analyzer 601 and zoom lens 602, enter in sensor 603; Two-beam all will pass through analyzer 601 before entering sensor 603, and two-beam can incide sensor 603 with identical polarization direction like this.Tested optical system 403 is set in optical path, and the surface that tested optical system 403 comprises different optical device, measure the light that also comprises different optical path differences in light like this.
If while having the optical path difference to sensor of certain two-way light close in measurement light and reference light, can in certain scope, form and interfere, when the completely reflecting mirror in reference light moves, interference fringe can change, due to what adopt, be short coherent source, so this interference fringe just forms in certain sweep limit.
In reference light, the optical path difference of different branches is that fix and not identical, suppose that the length range of measuring is L, reference path comprises that n props up, in order to test the optical surface spacing of L length, movable completely reflecting mirror only needs the distance of mobile L/n, by the position of analysis completely reflecting mirror and the center of interference fringe, just can accurately know that tested optical system L length range comprises the position on different optical surface.
Short coherent source in above-mentioned detection device can adopt the short relevant LED light source that coherent length is 1310nm.
The angle of the polarizer in the first light path in above-mentioned detection device can be adjusted.Further, in said apparatus, also can adopt fiber coupler or Optical Fiber Michelson Interferometer to carry out light splitting.
Completely reflecting mirror in above-mentioned detection device is portable right angle completely reflecting mirror.
Optical splitter in above-mentioned detection device adopts polarizing beam splitter; Further, in said apparatus, also can adopt unpolarized method to carry out light splitting; Realize the coupling interference by the reflective light intensity of regulating completely reflecting mirror.
The focus place of the condenser lens in above-mentioned detection device is for placing tested optical system place.
Further, said apparatus can also arrange optical fiber, add condenser lens before optical fiber, the focused light of condenser lens also can be coupled into an optical fiber, guide to other device place of being inconvenient to arrive by optical fiber, the surface of the optical device of the tested optical system of optical fiber front-end detection by condenser lens is set.
The utility model embodiment also provides a kind of high precision position detection method, adopts above-mentioned pick-up unit, comprises the following steps:
The centre of sphere of the optical surface of tested optical system is arranged on to the focus place of the condenser lens of described pick-up unit;
Described pick-up unit is after its short coherent source sends light, and the reference path formed through its spectroscope and optical path form interferes, and its sensor receives measurement light and reference light is interfered the interference fringe formed;
By the position of mobile completely reflecting mirror and the center of described interference fringe, determine the position on different optical surface in described tested optical system.
Below in conjunction with specific embodiment, the utility model is described in further detail.
Embodiment 1
As shown in the utility model structure of the detecting device figure of Fig. 2, short coherent source 301 is after collimation lens 302, become after directional light after the polarizer 303 and 1/2 wave plate 304, being certain polarization direction incides on polarizing beam splitter 305, light beam transmission after optical splitter, after the first quarter wave plate 501, enter a movably completely reflecting mirror 502, from the light of completely reflecting mirror 502 outgoing, through a coupled lens 503, couple light into an end reflection formula fiber optic splitter 504, end reflection formula fiber optic splitter 504 is beam splitters of a 1 * n, one road light is divided into to n road light, there is different optical path differences between the light of n road, the end of each fiber optic tap plates reflectance coating, light through reflection returns on the Cong Yuan road again, reflected light is after the first quarter wave plate 501, change of polarization 90 degree, reflect and enter in sensor 603 by analyzer 601 and zoom lens 602 on optical splitter 305, this road light is referred to as reference light.
Another drive test amount light, reflected light through optical splitter 305, after the second quarter wave plate 401, by condenser lens 402, focus in tested optical system 403, after different optical device surface reflection in tested optical system 403, again become directional light through condenser lens 402, by after the second quarter wave plate 401, entering optical splitter 305, due to twice by the second quarter wave plate 401,90 degree rotations occur in polarization direction, by optical splitter 305 transmissions, by analyzer 601 and zoom lens 602, enter in sensor 603; Two-beam all will pass through analyzer 601 before entering sensor 603, and two-beam can incide sensor 603 with identical polarization direction like this.Comprise optical system in optical path, optical system comprises different surfaces, so measure the light that also comprises different optical path differences in light.
If measure in light and reference light while having certain two-way light close to the optical path difference of sensing system, can in certain scope, form and interfere, when the catoptron in reference light moves, interference fringe can change, due to what adopt, be short coherent source, so this interference fringe just forms in certain sweep limit.
In reference path, the optical path difference of different branches is that fix and not identical, suppose that test specification is 400mm, reference path comprises 40 tunnels, adjacent two-way optical fiber is spaced apart 10mm, the integral multiple that the length on each road is 10 adds some specific very little values, as the eigenwert a1 of the first via is 1um, the second road a2 is 3um, Third Road is that a3 is 5um, until 40 road a40, the eigenwert on every road is all inconsistent, in order to test any optical surface spacing in the L length range, movable completely reflecting mirror only need to move the distance of the interval 20mm of 2 times of adjacent two-way optical fiber, interference peak all can appear 2 times in the optical surface in whole 400mm scope like this, by comparing the position deviation of twice interference peak, with the eigenwert on each road, compare, just can be easy to obtain this optical surface, with which light path branch, relevant obtaining occur, thereby by analyzing movable completely reflecting mirror position and the center of interference fringe, just can accurately know that system under test (SUT) L scope comprises the position on different optical surface.The corresponding relation of different branches light path optical path difference is: the corresponding L/n+a1 in 1 tunnel, 2 tunnel correspondence 2 * L/n+a2,3 tunnel correspondence 3 * L/n+a3, the rest may be inferred, until the n road corresponding be L+an.Wherein n means the quantity of each branch's light path of reference path.
The above; it is only preferably embodiment of the utility model; but protection domain of the present utility model is not limited to this; anyly be familiar with those skilled in the art in the technical scope that the utility model discloses; the variation that can expect easily or replacement, within all should being encompassed in protection domain of the present utility model.Therefore, protection domain of the present utility model should be as the criterion with the protection domain of claims.
Claims (8)
1. a high precision position detection device, is characterized in that, comprising:
Short coherent source, collimation lens, the polarizer, 1/2 wave plate, optical splitter, completely reflecting mirror, coupled lens, end reflection formula fiber optic splitter, condenser lens, analyzer, sensor, two quarter wave plates and zoom lens;
Wherein, the exit end of the incident end of described short coherent source, collimation lens, the polarizer, 1/2 wave plate, optical splitter, the first quarter wave plate and completely reflecting mirror, completely reflecting mirror, coupled lens and end reflection formula fiber optic splitter are arranged in the first light path;
Described condenser lens, the second quarter wave plate, described optical splitter, analyzer, zoom lens become the second light path with sensor arrangement;
Described the second light path and the first light path cross through described optical splitter, and described the second light path is vertical with the light path at the incident end place of short coherent source, collimation lens, the polarizer, 1/2 wave plate, optical splitter, the first quarter wave plate and completely reflecting mirror in the first light path;
Described completely reflecting mirror can be in described the first light path shift position.
2. device as claimed in claim 1, it is characterized in that, in described device, by the incident end of described short coherent source, collimation lens, the polarizer, 1/2 wave plate, optical splitter, the first quarter wave plate, completely reflecting mirror, exit end, coupled lens, end reflection formula fiber optic splitter, described end reflection formula fiber optic splitter, described coupled lens, the exit end of described completely reflecting mirror, the incident end of described completely reflecting mirror, described the first quarter wave plate, analyzer, zoom lens and the sensor of completely reflecting mirror, form reference path;
Form optical path by described short coherent source, collimation lens, the polarizer, 1/2 wave plate, optical splitter, the second quarter wave plate, condenser lens, described condenser lens, described the second quarter wave plate, described optical splitter, analyzer, zoom lens and sensor.
3. device as claimed in claim 1 or 2, it is characterized in that, described end reflection formula fiber optic splitter is: there is an incident end, and n road branch exit end, and each exit end end is equipped with the fiber optic splitter of the n road light that there is different optical path differences in separating of reflectance coating.
4. device as claimed in claim 1 or 2, is characterized in that, described short coherent source adopts the short relevant LED light source that coherent length is 1310nm.
5. device as claimed in claim 1 or 2, is characterized in that, the angle of the polarizer in described the first light path can be adjusted.
6. device as claimed in claim 1 or 2, is characterized in that, described completely reflecting mirror is the right angle completely reflecting mirror, and its position can be moved.
7. device as claimed in claim 1 or 2, is characterized in that,
Described completely reflecting mirror is portable right angle completely reflecting mirror;
Described optical splitter adopts polarizing beam splitter;
The focus place of described condenser lens is for placing tested optical system place.
8. device as claimed in claim 1 or 2, is characterized in that, also comprises: optical fiber, and the input end of this optical fiber is connected with described condenser lens, and output terminal is corresponding with described the second quarter wave plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013201721215U CN203337093U (en) | 2013-04-08 | 2013-04-08 | High-precision position-detecting device |
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| Application Number | Priority Date | Filing Date | Title |
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| CN2013201721215U CN203337093U (en) | 2013-04-08 | 2013-04-08 | High-precision position-detecting device |
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| CN203337093U true CN203337093U (en) | 2013-12-11 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103267478A (en) * | 2013-04-08 | 2013-08-28 | 辽宁科旺光电科技有限公司 | High-precision position detection device and method |
| CN107683400A (en) * | 2015-06-29 | 2018-02-09 | 科磊股份有限公司 | For measuring the method and apparatus of height on the semiconductor wafer |
-
2013
- 2013-04-08 CN CN2013201721215U patent/CN203337093U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103267478A (en) * | 2013-04-08 | 2013-08-28 | 辽宁科旺光电科技有限公司 | High-precision position detection device and method |
| CN103267478B (en) * | 2013-04-08 | 2018-10-02 | 辽宁科旺光电科技有限公司 | High-precision position detection device and method |
| CN107683400A (en) * | 2015-06-29 | 2018-02-09 | 科磊股份有限公司 | For measuring the method and apparatus of height on the semiconductor wafer |
| US10495446B2 (en) | 2015-06-29 | 2019-12-03 | Kla-Tencor Corporation | Methods and apparatus for measuring height on a semiconductor wafer |
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