CN103267478A - High-precision position detection device and method - Google Patents
High-precision position detection device and method Download PDFInfo
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- CN103267478A CN103267478A CN201310119400XA CN201310119400A CN103267478A CN 103267478 A CN103267478 A CN 103267478A CN 201310119400X A CN201310119400X A CN 201310119400XA CN 201310119400 A CN201310119400 A CN 201310119400A CN 103267478 A CN103267478 A CN 103267478A
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Abstract
The invention discloses a high-precision position detection device and a high-precision position detection method and belongs to the field of optical detection. The device comprises a short coherent light source, a collimating lens, a polarizer, a 1/2 wave plate, an optical splitter, a holophote a coupling lens, an end reflection fiber beam splitter, a focusing lens, a polarization analyzer, a sensor, two 1/4 wave plates and a multifocal lens; and the parts form a reference light path and a measurement light path. The optical path difference of different branches in the reference light path is fixed and different; and if assuming a test range is L and the reference light path comprises n branches, in order to test the optical surface space in the length of L, a movable lens is only required to move a distance of L/n, and the positions of different optical surfaces in the L range of a tested system can be accurately known by analyzing the position of the movable lens and the central position of interference fringe. The detection device has the advantages of wide detection range, small moving range of the movable lens, simple structure and high measuring accuracy.
Description
Technical field
The present invention relates to the optical detection field, particularly relate to a kind of high precision position detection device and method of utilizing light to detect.
Background technology
In the high-precision optical system of complexity, need test the interval between the optical mirror slip after the assembling, owing to assemble, can't use the way of machinery to test, can only take non-contacting mode to check, a kind of is to adopt short coherent source method to carry out than what be fit to this application, referring to SPIE document " Contact-free on-axis metrology for the fabrication and testing of complex optical systems ", the method that provides in the document is used the interferometer structure principle of Michelson, by the method for the movable lens position in the mobile reference arm and tested optical surface coupling, the position on different optical surface in the measuring optical system.
Fig. 1 has illustrated the theory structure of this checkout equipment, the light of the relevant wavelength of weak point that short coherent source 1 sends is similar to optical splitter through coupling mechanism 3() after, the Varifocal zoom lens 5 of leading up to enters tested optical system 4, another road enters movably catoptron 7 by collimating mirror 6, the reflection of two-way light is by overcoupling device 3, enter sensor 2, when the optical path difference of two-way light is identical, form interference fringe, otherwise be the simple superposition of light intensity, by the profile of test interference fringe and the position of catoptron, just can accurately know the spacing on different optical surface in the optical system.
In this checkout equipment, the moving range of movable lens is consistent at interval with the maximum functional of optical system, so when the interval of optical system is big, the movement of movable lens and sensing range also need and then to enlarge, and to interiorly on a large scale realize that it is very difficult that high precision detects, move the size that has increased equipment simultaneously on a large scale, lowered the reliability of equipment, make the cost of entire equipment sharply increase.
Summary of the invention
The technical problem to be solved in the present invention provides a kind of high precision position detection device and method, its compact conformation, can realize in short moving range that the high precision of longer optical range detects, solve at present on a large scale, the lower and larger-size problem of mobile eyeglass checkout equipment precision.
The technical scheme that solves the problems of the technologies described above is as follows:
The invention provides a kind of high precision position detection device, comprising:
Short coherent source, collimation lens, the polarizer, 1/2 wave plate, optical splitter, completely reflecting mirror, coupled lens, end reflection formula fiber optic splitter, condenser lens, analyzer, sensor, two quarter wave plates and zoom lens;
Wherein, the exit end of the incident end of described short coherent source, collimation lens, the polarizer, 1/2 wave plate, optical splitter, first quarter wave plate and completely reflecting mirror, completely reflecting mirror, coupled lens and end reflection formula fiber optic splitter are arranged in first light path;
Described condenser lens, second quarter wave plate, described optical splitter, analyzer, zoom lens become second light path with sensor arrangement;
Described second light path and first light path cross through described optical splitter, and the light path at the incident end place of short coherent source, collimation lens, the polarizer, 1/2 wave plate, optical splitter, first quarter wave plate and completely reflecting mirror in described second light path and first light path is vertical;
Described completely reflecting mirror can be in described first light path shift position.
The present invention also provides a kind of high precision position detection method, adopts pick-up unit of the present invention, may further comprise the steps:
The centre of sphere of the optical surface of tested optical system is arranged on the focus place of the condenser lens of described pick-up unit;
Described pick-up unit is interfered the interference fringe that its sensor reception measuring light and reference light are interfered formation through reference path and the formation of measurement light path of its spectroscope formation after its short coherent source sends light;
By the position of mobile completely reflecting mirror and the center of described interference fringe, determine the position on different optical surface in the described tested optical system.
Beneficial effect of the present invention: cooperate by short coherent source, collimation lens, the polarizer, 1/2 wave plate, optical splitter, completely reflecting mirror, coupled lens, end reflection formula fiber optic splitter, condenser lens, analyzer, sensor, two quarter wave plates and zoom lens to form the pick-up unit that has reference path and measure light path.The movable completely reflecting mirror of this device only needs the distance of mobile L/n, can measure the optical surface spacing of L length, by the position of analysis completely reflecting mirror and the center of interference fringe, just can know accurately that system under test (SUT) comprises the position on different optical surface in the L length range, it is little to have the big and movable completely reflecting mirror moving range of sensing range, advantage simple in structure, that measuring accuracy is high.
Description of drawings
In order to be illustrated more clearly in the technical scheme of the embodiment of the invention, the accompanying drawing of required use is done to introduce simply in will describing embodiment below, apparently, accompanying drawing in describing below only is some embodiments of the present invention, for those of ordinary skill in the art, under the prerequisite of not paying creative work, can also obtain other accompanying drawings according to these accompanying drawings.
Fig. 1 is the structural representation of existing commercial short relevant test macro;
Fig. 2 is the pick-up unit structural representation of the embodiment of the invention.
Embodiment
Below the technical scheme in the embodiment of the invention is clearly and completely described, obviously, described embodiment only is the present invention's part embodiment, rather than whole embodiment.Based on embodiments of the invention, those of ordinary skills belong to protection scope of the present invention not making the every other embodiment that obtains under the creative work prerequisite.
Below the embodiment of the invention is described in further detail.
The embodiment of the invention provides a kind of high precision position measurement mechanism, it is a kind of compact conformation, the high precision that can realize longer optical range in short moving range detects, solving present checkout equipment will be on a large scale, the problem that moving lens built-in testing precision and equipment size are bigger, as shown in Figure 1, this pick-up unit comprises: short coherent source 301, collimation lens 302, the polarizer 303,1/2 wave plate 304, optical splitter 305, completely reflecting mirror 502, coupled lens 503, end reflection formula fiber optic splitter 504, condenser lens 402, analyzer 601, sensor 603, two quarter wave plates 501,502 and zoom lens 602;
Wherein, the exit end of the incident end 502 of described short coherent source 301, collimation lens 302, the polarizer 303,1/2 wave plate 304, optical splitter 305, first quarter wave plate 501 and completely reflecting mirror 502, completely reflecting mirror 502, coupled lens 503 and end reflection formula fiber optic splitter 504 are arranged in first light path;
Described condenser lens 402, second quarter wave plate 401, described optical splitter 305, analyzer 601, zoom lens 602 and sensor 603 are arranged in second light path;
Described second light path and first light path cross through described optical splitter 305, and the light path at the incident end place of short coherent source 301, collimation lens 302, the polarizer 303,1/2 wave plate 304, optical splitter 305, first quarter wave plate 501 and completely reflecting mirror 502 in described second light path and first light path is vertical;
Described completely reflecting mirror 502 can be in described first light path shift position.
In the said apparatus, constitute reference path by the incident end of described short coherent source 301, collimation lens 302, the polarizer 303,1/2 wave plate 304, optical splitter, first quarter wave plate 51, completely reflecting mirror 502, exit end, coupled lens 503, end reflection formula fiber optic splitter 504, described end reflection formula fiber optic splitter 504, described coupled lens 503, the exit end of described completely reflecting mirror 502, the incident end of described completely reflecting mirror 502, described first quarter wave plate 501, analyzer 601, zoom lens 602 and the sensor 603 of completely reflecting mirror 502.
In the above-mentioned reference path, constitute the process reference paths from exit end, coupled lens 503 to the end reflection formula fiber optic splitter 504 of the incident end of described short coherent source 301, collimation lens 302, the polarizer 303,1/2 wave plate 304, optical splitter 305, first quarter wave plate 501, completely reflecting mirror 502, completely reflecting mirror 502;
Exit end from end reflection formula fiber optic splitter 504 to described coupled lens 503, described completely reflecting mirror 502, the incident end of described completely reflecting mirror 502, described first quarter wave plate 501, analyzer 601, zoom lens 602 and sensor 603 constitute the backhaul reference path.
Constitute the measurement light path by described short coherent source 301, collimation lens 302, the polarizer 303,1/2 wave plate 304, optical splitter 305, second quarter wave plate 401, condenser lens 402, described condenser lens 402, described second quarter wave plate 401, described optical splitter 305, analyzer 601, zoom lens 602 and sensor 603.
In the above-mentioned measurement light path, measure light path to tested optical system 403 formation processes again from described short coherent source 301, collimation lens 302, the polarizer 303,1/2 wave plate 304, optical splitter 305, second quarter wave plate 401, condenser lens 402;
From tested optical system 403 to described condenser lens 402, described second quarter wave plate 401, described optical splitter 305, analyzer 601, zoom lens 602 and sensor 603 constitute backhauls and measure light paths.
In the above-mentioned detection device, end reflection formula fiber optic splitter 504 is: have an incident end, and n road branch exit end, and each exit end end is equipped with the fiber optic splitter of reflectance coating, and this fiber optic splitter can be told the n road light that has different optical path differences.
During above-mentioned detection device work, the light that short coherent source 301 sends is through behind the collimation lens 302, become behind the directional light through behind the polarizer 303 and 1/2 wave plate 304, being certain polarization direction incides on the optical splitter 305, through the optical splitter 305 a branch of smooth transmissions in back, behind first quarter wave plate 501, enter a movably completely reflecting mirror 502, to couple light to the end reflection formula fiber optic splitter 504 through a coupled lens 503 from the light of completely reflecting mirror 502 outgoing, end reflection formula fiber optic splitter 504 is beam splitters of a 1 * n, one road light is divided into n road light, there is different optical path differences between the light of n road, the end of each fiber optic tap plates reflectance coating, light through reflection returns from former road again, reflected light through first quarter wave plate 501 after, change of polarization 90 degree, enter in the sensor 603 by analyzer 601 and zoom lens 602 in optical splitter 305 reflections, this road light is referred to as reference light, as can be seen, the light that comprises different optical path differences in the reference light, movably completely reflecting mirror is fixed in the movable mechanism, so the optical path difference of the different light beams of reference light can be regulated;
Another road measuring light, reflected light through optical splitter 305, behind second quarter wave plate 401, by variable condenser lens 402, focus in the tested optical system, after different optical device surface reflection in the tested optical system 403, become directional light again through condenser lens 402, by entering optical splitter 305 behind second quarter wave plate 401, because twice by second quarter wave plate 401,90 degree rotations take place in the polarization direction, enter in the sensor 603 by analyzer 601 and zoom lens 602 by optical splitter 305 transmissions; Two-beam all will pass through analyzer 601 before entering sensor 603, and two-beam can incide sensor 603 with identical polarization direction like this.Measure in the light path tested optical system 403 is set, tested optical system 403 comprises the surface of different optical device, also comprises the light of different optical path differences like this in the measuring light.
If when having the optical path difference to sensor of certain two-way light close in measuring light and the reference light, can in certain scope, form and interfere, when the completely reflecting mirror in the reference light moves, interference fringe can change, because what adopt is short coherent source, so this interference fringe just forms in certain sweep limit.
The optical path difference of different branches is that fix and inequality in the reference light, suppose that the length measured scope is L, reference path comprises that n props up, in order to test the optical surface spacing of L length, movable completely reflecting mirror only needs the distance of mobile L/n, by the position of analysis completely reflecting mirror and the center of interference fringe, just can accurately know the position that comprises the different optical surface in the tested optical system L length range.
It is the relevant led light source of weak point of 1310nm that short coherent source in the above-mentioned detection device can adopt coherent length.
The angle of the polarizer in first light path in the above-mentioned detection device can be adjusted.Further, also can adopt fiber coupler or optical fiber Michelson interferometer to carry out light splitting in the said apparatus.
Completely reflecting mirror in the above-mentioned detection device is portable right angle completely reflecting mirror.
Optical splitter in the above-mentioned detection device adopts polarizing beam splitter; Further, also can adopt unpolarized method to carry out light splitting in the said apparatus; Realize the coupling interference by the reflective light intensity of regulating completely reflecting mirror.
The focus place of the condenser lens in the above-mentioned detection device is for placing tested optical system place.
Further, said apparatus can also arrange optical fiber, before optical fiber, add condenser lens, the focused light of condenser lens also can be coupled into an optical fiber, guide to other device place of being inconvenient to arrive by optical fiber, the surface of the optical device of the tested optical system of optical fiber front-end detection by condenser lens is set.
The embodiment of the invention also provides a kind of high precision position detection method, adopts above-mentioned pick-up unit, may further comprise the steps:
The centre of sphere of the optical surface of tested optical system is arranged on the focus place of the condenser lens of described pick-up unit;
Described pick-up unit is interfered the interference fringe that its sensor reception measuring light and reference light are interfered formation through reference path and the formation of measurement light path of its spectroscope formation after its short coherent source sends light;
By the position of mobile completely reflecting mirror and the center of described interference fringe, determine the position on different optical surface in the described tested optical system.
The invention will be further described below in conjunction with specific embodiment.
Embodiment 1
Shown in the pick-up unit structural drawing of the present invention of Fig. 2, short coherent source 301 is through behind the collimation lens 302, become behind the directional light through behind the polarizer 303 and 1/2 wave plate 304, being certain polarization direction incides on the polarizing beam splitter 305, through a branch of smooth transmission behind the optical splitter, behind first quarter wave plate 501, enter a movably completely reflecting mirror 502, to couple light to the end reflection formula fiber optic splitter 504 through a coupled lens 503 from the light of completely reflecting mirror 502 outgoing, end reflection formula fiber optic splitter 504 is beam splitters of a 1 * n, one road light is divided into n road light, there is different optical path differences between the light of n road, the end of each fiber optic tap plates reflectance coating, light through reflection returns from former road again, reflected light through first quarter wave plate 501 after, change of polarization 90 degree, enter in the sensor 603 by analyzer 601 and zoom lens 602 in optical splitter 305 reflections, this road light is referred to as reference light.
Another road measuring light, reflected light through optical splitter 305, behind second quarter wave plate 401, by condenser lens 402, focus in the tested optical system 403, after different optical device surface reflection in the tested optical system 403, become directional light again through condenser lens 402, by entering optical splitter 305 behind second quarter wave plate 401, because twice by second quarter wave plate 401,90 degree rotations take place in the polarization direction, enter in the sensor 603 by analyzer 601 and zoom lens 602 by optical splitter 305 transmissions; Two-beam all will pass through analyzer 601 before entering sensor 603, and two-beam can incide sensor 603 with identical polarization direction like this.Comprise optical system in the measurement light path, optical system comprises different surfaces, so also comprise the light of different optical path differences in the measuring light.
If when having certain two-way light close to the optical path difference of sensing system in measuring light and the reference light, can in certain scope, form and interfere, when the catoptron in the reference light moves, interference fringe can change, because what adopt is short coherent source, so this interference fringe just forms in certain sweep limit.
The optical path difference of different branches is that fix and inequality in the reference path, suppose that test specification is 400mm, reference path comprises 40 the tunnel, adjacent two-way optical fiber is spaced apart 10mm, the length on each road is that 10 integral multiple adds some specific very little values, eigenwert a1 as the first via is 1um, the second road a2 is 3um, Third Road is that a3 is 5um, until 40 road a40, the eigenwert on every road is all inconsistent, in order to test any optical surface spacing in the L length range, movable completely reflecting mirror only need move the distance of the interval 20mm of 2 times of adjacent two-way optical fiber, interference peak all can appear 2 times in the optical surface in whole 400mm scope like this, by comparing the position deviation of twice interference peak, compare with the eigenwert on each road, just can be easy to obtain this optical surface and with which light path branch relevant obtaining be taken place, thereby by analyzing movable completely reflecting mirror position and the center of interference fringe, just can accurately know the position that comprises the different optical surface in the system under test (SUT) L scope.The corresponding relation of different branches light path optical path difference is: 1 tunnel corresponding L/n+a1, and 2 tunnel correspondences, 2 * L/n+a2,3 tunnel correspondences, 3 * L/n+a3, the rest may be inferred, and up to n road correspondence is L+an.Wherein n represents the quantity of each branch's light path of reference path.
The above; only for the preferable embodiment of the present invention, but protection scope of the present invention is not limited thereto, and anyly is familiar with those skilled in the art in the technical scope that the present invention discloses; the variation that can expect easily or replacement all should be encompassed within protection scope of the present invention.Therefore, protection scope of the present invention should be as the criterion with the protection domain of claims.
Claims (9)
1. a high precision position detection device is characterized in that, comprising:
Short coherent source, collimation lens, the polarizer, 1/2 wave plate, optical splitter, completely reflecting mirror, coupled lens, end reflection formula fiber optic splitter, condenser lens, analyzer, sensor, two quarter wave plates and zoom lens;
Wherein, the exit end of the incident end of described short coherent source, collimation lens, the polarizer, 1/2 wave plate, optical splitter, first quarter wave plate and completely reflecting mirror, completely reflecting mirror, coupled lens and end reflection formula fiber optic splitter are arranged in first light path;
Described condenser lens, second quarter wave plate, described optical splitter, analyzer, zoom lens become second light path with sensor arrangement;
Described second light path and first light path cross through described optical splitter, and the light path at the incident end place of short coherent source, collimation lens, the polarizer, 1/2 wave plate, optical splitter, first quarter wave plate and completely reflecting mirror in described second light path and first light path is vertical;
Described completely reflecting mirror can be in described first light path shift position.
2. device as claimed in claim 1, it is characterized in that, in the described device, constitute reference path by the incident end of described short coherent source, collimation lens, the polarizer, 1/2 wave plate, optical splitter, first quarter wave plate, completely reflecting mirror, exit end, coupled lens, end reflection formula fiber optic splitter, described end reflection formula fiber optic splitter, described coupled lens, the exit end of described completely reflecting mirror, the incident end of described completely reflecting mirror, described first quarter wave plate, analyzer, zoom lens and the sensor of completely reflecting mirror;
Constitute the measurement light path by described short coherent source, collimation lens, the polarizer, 1/2 wave plate, optical splitter, second quarter wave plate, condenser lens, described condenser lens, described second quarter wave plate, described optical splitter, analyzer, zoom lens and sensor.
3. device as claimed in claim 1 or 2, it is characterized in that, described end reflection formula fiber optic splitter is: have an incident end, and n road branch exit end, and each exit end end is equipped with the fiber optic splitter of the n road light that there is different optical path differences in telling of reflectance coating.
4. device as claimed in claim 1 or 2 is characterized in that, it is the relevant led light source of weak point of 1310nm that described short coherent source adopts coherent length.
5. device as claimed in claim 1 or 2 is characterized in that, the angle of the polarizer in described first light path can be adjusted.
6. device as claimed in claim 1 or 2 is characterized in that, described completely reflecting mirror is the right angle completely reflecting mirror, and its position can be moved.
7. device as claimed in claim 1 or 2 is characterized in that,
Described completely reflecting mirror is portable right angle completely reflecting mirror;
Described optical splitter adopts polarizing beam splitter;
The focus place of described condenser lens is for placing tested optical system place.
8. device as claimed in claim 1 or 2 is characterized in that, also comprises: optical fiber, and the input end of this optical fiber is connected with described condenser lens, and output terminal is corresponding with described second quarter wave plate.
9. a high precision position detection method is characterized in that, adopts each described pick-up unit of claim 1～8, may further comprise the steps:
The centre of sphere of the optical surface of tested optical system is arranged on the focus place of the condenser lens of described pick-up unit;
Described pick-up unit is interfered the interference fringe that its sensor reception measuring light and reference light are interfered formation through reference path and the formation of measurement light path of its spectroscope formation after its short coherent source sends light;
By the position of mobile completely reflecting mirror and the center of described interference fringe, determine the position on different optical surface in the described tested optical system.
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| CN113758442A (en) * | 2021-09-27 | 2021-12-07 | 中国科学院沈阳自动化研究所 | Non-contact type small-diameter tube inner cavity morphology detection device and method based on low coherence interference |
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| CN113758442A (en) * | 2021-09-27 | 2021-12-07 | 中国科学院沈阳自动化研究所 | Non-contact type small-diameter tube inner cavity morphology detection device and method based on low coherence interference |
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