CN103115582B - Based on the Michelson fluorescence interference micro-measurement apparatus of stimulated radiation - Google Patents
Based on the Michelson fluorescence interference micro-measurement apparatus of stimulated radiation Download PDFInfo
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- CN103115582B CN103115582B CN201310033080.6A CN201310033080A CN103115582B CN 103115582 B CN103115582 B CN 103115582B CN 201310033080 A CN201310033080 A CN 201310033080A CN 103115582 B CN103115582 B CN 103115582B
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Abstract
Michelson fluorescence interference micro-measurement apparatus based on stimulated radiation belongs to measuring surface form technical field; This measurement mechanism comprises laser instrument, convergence object lens, the first pin hole, collimator and extender object lens and the Amici prism be configured in along light transmition direction in laser instrument direct projection light path; Be configured in the focusing objective len on Amici prism reflected light path, displacement driver, reference mirror, Amici prism and measured piece; Object lens, narrow band pass filter, the second pin hole, detector are assembled in the imaging be configured on Amici prism transmitted light path; Described measured piece and reference mirror surface adopt vacuum evaporatation to carry out plated film; This design being changed the character of surface of tested surface by plated film, ensureing to measure light can Return Detecting System after tested surface reflection, solve a difficult problem for high NA and high slope Surface testing, be applicable to the ultra precise measurement of high NA and high slope sphere, aspheric surface and 3 D profilometry of free-form surface.
Description
Technical field
Michelson fluorescence interference micro-measurement apparatus based on stimulated radiation belongs to measuring surface form technical field, particularly a kind of ultraprecise for three-dimensional microstructure in Microstructure Optics element, microstructure mechanical organ, integrated circuit component, micro-step, very low power live width and the shape measure of large-numerical aperture optical element surface, dynamically, high speed interferometric method and device.
Background technology
Micro-interference is measured and is carried out surface measurement by the principle of optical interference and micro-amplification exactly.Along with developing rapidly of photoelectric technology and computer technology, develop the phase-shifting technique directly measuring interferometric phase distribution in interferometry field.Its principle is: introduce a time-modulation to the phase differential of two bundle coherent lights, then by photodetector and computing machine, from the interference signal received, demodulate tested PHASE DISTRIBUTION, the method can increase substantially measuring accuracy and the measuring speed of microinterferometer.
Applied to by phase-shifting technique on micro-interference and just define phase shifting type micro-interference principle (PSMI), the light source of use is still one-wavelength laser, and not requiring interference microscope must aplanatism.The microinterferometer of application phase shifting type micro-interference principle becomes the main tool measuring high precision super-smooth surface pattern.In order to the phase jump indeterminacy problem run into when solving and detect step and cutting, the light source used develops into white light or accurate white light from one-wavelength laser, dual wavelength light, two kinds of corresponding micro-interference test philosophies, namely vertical scanning white light interference theory (VSI) and white light Fourier frequency-domain analysis principle (FDA) are also shown one's talent.
Path-splitting interference microscope refers to that the reference light that generation is interfered and test light do not walk the same road, and needs the index plane that service precision is very high, mainly contains Michelson, Mirau, Linnik type according to the structure of optical interference circuit.
The principle of Michelson interference micro-profilometer: parallel beam mirror that is split after microcobjective focuses on is divided into two bundles, reflected after a branch of directive reference mirror, another beam is reflected after measured surface (containing measured surface information), and two bundle reflected light meet at spectroscope and interfere.Traditional Michelson interferometer is a kind of macroscopic measurement, measurement be surface configuration or surface shape error, and Michelson interference micro-profilometer is a kind of micro-measurement by magnification, the microcosmic Facial Features that what its was measured is in microcosmos area.
Mirau interferes the light path of micro-profilometer: to focus on and through the light beam of reference plate through microcobjective, part light transmission beam-splitter directive measured surface is also reflected back toward microscopical visual field, another part be split plate reflex to be positioned at reference plate center reference mirror on and be again reflected back toward microscopical visual field, two bundle utilizing emitted lights interferes in microscopical visual field.Due to optical path and the approximate road altogether of reference path, therefore can get rid of a lot of interference, this is the advantage that Mirau interferes micro-profilometer.
Michelson interference microscope and Mirau interference microscope all only use a microcobjective, and when measuring, object lens can not introduce additional optical path difference to two bundle coherent lights.Owing to placed light-splitting device between object lens and measured surface, therefore the operating distance of object lens is longer, and numerical aperture is less, and lateral resolution is lower.Wherein Michelson interference microscope object lens operating distance is longer than Mirau interference microscope, and therefore antijamming capability and lateral resolution will be worse than Mirau interference microscope.
Linnik interference microscope have employed two identical microcobjectives, reference path requires consistent with optical path, owing to there is no other optical element between object lens and measured surface, thus the Linnik interference microscope microcobjective that operating distance can be used shorter, its numerical aperture is higher, and lateral resolution is higher.
But, for high NA or the violent surface of Curvature varying, because detection system cannot collect enough light echos, therefore its Surface testing cannot be realized.
Summary of the invention
Be difficult to Return Detecting System for solving detection light thus a difficult problem for high NA and high slope Surface testing cannot be realized, the invention discloses a kind of Michelson fluorescence interference micro-measurement apparatus based on stimulated radiation.The character of surface of tested surface is changed by plated film, ensureing to measure light can Return Detecting System after tested surface reflection, solve a difficult problem for high NA and high slope Surface testing, be applicable to the ultra precise measurement of high NA and high slope sphere, aspheric surface and 3 D profilometry of free-form surface.
The object of the present invention is achieved like this:
Based on the Michelson fluorescence interference micro-measurement apparatus of stimulated radiation, comprise laser instrument, convergence object lens, the first pin hole, collimator and extender object lens and the Amici prism be configured in along light transmition direction in laser instrument direct projection light path; Be configured in the focusing objective len on Amici prism reflected light path, displacement driver, reference mirror, Amici prism and measured piece; Object lens, narrow band pass filter, the second pin hole, detector are assembled in the imaging be configured on Amici prism transmitted light path; Described measured piece and reference mirror surface adopt vacuum evaporatation to carry out plated film.
The above-mentioned Michelson fluorescence interference micro-measurement apparatus based on stimulated radiation, the numerical aperture of described focusing objective len is less than 0.2.
The above-mentioned Michelson fluorescence interference micro-measurement apparatus based on stimulated radiation, the centre wavelength of described narrow band pass filter is 610nm, and bandwidth is 50nm.
Owing to the present invention is based on the Michelson fluorescence interference micro-measurement apparatus of stimulated radiation, comprise laser instrument, convergence object lens, the first pin hole, collimator and extender object lens and the Amici prism be configured in along light transmition direction in laser instrument direct projection light path; Be configured in the focusing objective len on Amici prism reflected light path, displacement driver, reference mirror, Amici prism and measured piece; Object lens, narrow band pass filter, the second pin hole, detector are assembled in the imaging be configured on Amici prism transmitted light path; Described measured piece and reference mirror surface adopt vacuum evaporatation to carry out plated film; This design, both white light interferometry method advantage had been remained, overcome the phase fuzzy problem in monochromatic light Phaseshifting interferometry, its vertical survey scope only limits by scanner stroke and interference objective operating distance in theory, the character of surface of tested surface is changed again by plated film, ensureing to measure light can Return Detecting System after tested surface reflection, solves a difficult problem for high NA and high slope Surface testing, is applicable to the ultra precise measurement of high NA and high slope sphere, aspheric surface and 3 D profilometry of free-form surface.
Accompanying drawing explanation
Fig. 1 is the structural representation of the Michelson fluorescence interference micro-measurement apparatus that the present invention is based on stimulated radiation.
In figure: 1 laser instrument, 2 assembles object lens, 3 first pin holes, 4 collimator and extender object lens, 5 Amici prisms, 6 focusing objective lens, 7 displacement driver, 8 reference mirrors, 9 Amici prisms, 10 measured pieces, 11 imagings convergence object lens, 12 narrow band pass filters, 13 second pin holes, 14 detectors.
Embodiment
Below in conjunction with accompanying drawing, the specific embodiment of the invention is described in further detail.
The Michelson fluorescence interference micro-measurement apparatus structural representation based on stimulated radiation of the present embodiment as shown in Figure 1.This measurement mechanism comprises laser instrument 1, convergence object lens 2, first pin hole 3, collimator and extender object lens 4 and the Amici prism 5 be configured in along light transmition direction in laser instrument 1 direct projection light path; Be configured in the focusing objective len 6 on Amici prism 5 reflected light path, displacement driver 7, reference mirror 8, Amici prism 9 and measured piece 10; Object lens 11, narrow band pass filter 12, second pin hole 13, detector 14 are assembled in the imaging be configured on Amici prism 5 transmitted light path; Described measured piece 10 and reference mirror 8 surface adopt vacuum evaporatation to carry out plated film.
The numerical aperture of described focusing objective len is less than 0.2.
The centre wavelength of described narrow band pass filter is 610nm, and bandwidth is 50nm.
Claims (1)
1., based on the Michelson fluorescence interference micro-measurement apparatus of stimulated radiation, it is characterized in that comprising laser instrument (1), the convergence object lens (2) be configured in along light transmition direction in laser instrument (1) direct projection light path, the first pin hole (3), collimator and extender object lens (4) and Amici prism (5); The numerical aperture be configured on Amici prism (5) reflected light path be less than 0.2 focusing objective len (6), displacement driver (7), reference mirror (8), Amici prism (9) and measured piece (10); Object lens (11) are assembled in the imaging be configured on Amici prism (5) transmitted light path, centre wavelength is 610nm, and bandwidth is narrow band pass filter (12), the second pin hole (13), the detector (14) of 50nm; Described measured piece (10) and reference mirror (8) surface adopt vacuum evaporatation to carry out plated film.
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| CN201310033080.6A CN103115582B (en) | 2013-01-29 | 2013-01-29 | Based on the Michelson fluorescence interference micro-measurement apparatus of stimulated radiation |
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| CN103115582B true CN103115582B (en) | 2015-07-29 |
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Families Citing this family (9)
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| CN104422398B (en) * | 2013-08-20 | 2016-12-28 | 南京理工大学 | The micro-sleeve arrangement of interference of adjustable Michaelson |
| CN104034271B (en) * | 2014-06-19 | 2016-08-24 | 清华大学 | A kind of lateral resolution reaches the interference rotation map detection method of 1nm |
| CN106403843A (en) * | 2016-12-09 | 2017-02-15 | 哈尔滨工业大学 | Contour scanning measurement device and method for large-aperture high-curvature optical element based on confocal microscopy |
| CN108089217B (en) * | 2017-11-15 | 2023-06-13 | 中国工程物理研究院激光聚变研究中心 | X-ray detector based on Michelson interferometer |
| CN109163673B (en) * | 2018-08-17 | 2019-07-05 | 华中科技大学 | A kind of multi-wavelength and the bisynchronous surface method for real-time measurement of phase shift interference and system |
| CN110260783B (en) * | 2019-07-10 | 2020-11-10 | 中国工程物理研究院机械制造工艺研究所 | Automatic focusing device and method for interference microscope |
| CN111537200B (en) * | 2020-05-09 | 2023-03-14 | 中国科学院国家授时中心 | Device and method for measuring laser line width based on cyclic self-heterodyne method |
| CN113189105A (en) * | 2021-05-19 | 2021-07-30 | 哈尔滨工业大学 | Device and method for detecting miniature industrial sample based on gradient refractive index lens |
| CN114440785B (en) * | 2022-02-08 | 2023-02-07 | 山东大学 | Device and method for measuring photoinduced deformation coefficient of material based on optical interference principle |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN1158414A (en) * | 1996-02-29 | 1997-09-03 | 中国科学院上海光学精密机械研究所 | Surface microstructure detection system and detection method thereof |
| CN101201549A (en) * | 2007-11-30 | 2008-06-18 | 北京理工大学 | Device and method for focusing and leveling based on microlens array |
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| JP4056064B2 (en) * | 2002-11-21 | 2008-03-05 | 株式会社リコー | Coating layer thickness measuring method and thickness measuring apparatus for thin coated fine powder |
| JP2009053157A (en) * | 2007-08-29 | 2009-03-12 | Ricoh Co Ltd | Method and apparatus for measuring film thickness of thin film coating layer |
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Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1158414A (en) * | 1996-02-29 | 1997-09-03 | 中国科学院上海光学精密机械研究所 | Surface microstructure detection system and detection method thereof |
| CN101201549A (en) * | 2007-11-30 | 2008-06-18 | 北京理工大学 | Device and method for focusing and leveling based on microlens array |
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