CN106247950A - Based on the micro-displacement measurement method that broad sense phase-shifted digital is holographic - Google Patents

Based on the micro-displacement measurement method that broad sense phase-shifted digital is holographic Download PDF

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Publication number
CN106247950A
CN106247950A CN201610739015.9A CN201610739015A CN106247950A CN 106247950 A CN106247950 A CN 106247950A CN 201610739015 A CN201610739015 A CN 201610739015A CN 106247950 A CN106247950 A CN 106247950A
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China
Prior art keywords
phase
interferogram
width
broad sense
micro
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CN201610739015.9A
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徐先锋
张鲤
焦志勇
贾玉磊
张会
张格涛
张志伟
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China University of Petroleum East China
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China University of Petroleum East China
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Holo Graphy (AREA)

Abstract

Based on the micro-displacement measurement method that broad sense phase-shifted digital is holographic, it relates to Technology of Precision Measurement field；By using broad sense phase-shifted digital holography experiment light path and broad sense Phaseshifting interferometry phase shift extraction algorithm, coding realizes the exact algorithm of extraction phase shift.Find the relation between stripe order recognition and reference light phase shift by the realization of algorithm, obtain accurate phase-shift value, utilize the relational expression of phase-shift value and the micro-displacement of reflecting mirror, extrapolate the displacement of the micro-nano-scale that target mirror moves.The micro-displacement measurement method holographic based on broad sense phase-shifted digital of the present invention, precision can reach nanometer scale, building of broad sense phase-shifted digital holography experiment light path is fairly simple, and the exact algorithm of the phase shift of employing extraction is easier when phase-shift value must extract realizing.

Description

Based on the micro-displacement measurement method that broad sense phase-shifted digital is holographic
Technical field
The present invention relates to Technology of Precision Measurement field, be specifically related to the micro-displacement measurement holographic based on broad sense phase-shifted digital Method.
Background technology
The measurement of micro-displacement relates to principle and the correlation technique of accurate measurement, and accurate measurement is from accuracy prediction curve chart Setting out, can derive a lot of Technologies of Precision Measurement, the precision of accurate measurement is also from millimeter magnitude, and micron dimension is the most Through having reached nanometer scale.Measuring method is developed into by the three-dimensional coordinates measurement of micron level, surface measurement and Roundness Measuring Technique The X-ray scanning interference technique of technology and nano measurement it is measured microscopically based on scanning probe microscopy, optical interference Micro-nano magnitude measures technology.So far, what Technology of Precision Measurement was at full speed develops into image recognition measurement technology.Accordingly Theoretical analysis method also develop into the image measurement stage from Mathematical Method.
Prior art:
1, michelson interferometer measurement micro-displacement technology；
2, measurement technology based on Mai Shi interferometer；
3, CCD measures micro-displacement technology.
1, michelson interferometer measurement micro-displacement, needs with traditional tiny length survey tool such as vernier calliper Chi, micrometer caliper etc. measures, in addition it is also necessary to improve certainty of measurement by repetitive measurement, there will be bigger the most unavoidably Measurement error so that measurement result forbidden；
2, Michelson's interferometer and traveling microscope being combined can the critically tiny length of Measuring Object and small Displacement, this device uses microscope to amplify determinand, improves certainty of measurement in conjunction with Michelson's interferometer, arrives micron Magnitude, and survey can be improved by using high magnification microscope with the Mai Shi interferometer using accurate drive system Accuracy of measurement.But in practical operation, the combination of traveling microscope and interferometer may produce bigger difficulty on adjusting, And must assure that microscope is perpendicular to the moving direction of the determinand on Mai Shi interferometer, add to observe with microscope and treat Survey thing and have the highest requirement, measure difficulty bigger；
The method of 3, traditional CCD micro-displacement measurement is to use similar CCD displacement meter device to complete, and whole measures The reception luminous point obtained on CCD in journey is directly reflected back by measured object dignity, and therefore small position measured by CCD displacement meter The method moved is affected bigger by measured object dignity, and if the reflecting effect of measured object dignity is inconspicuous or tested When object plane is in irregular shape, this metering system cannot accomplish that effect is well measured.
Summary of the invention
Present invention aims to defect and the deficiency of prior art, it is provided that a kind of relation utilizing phase place and displacement Calculate the nano-grade displacement of object, it is achieved the high-precision micro-displacement measurement side holographic based on broad sense phase-shifted digital of measurement Method.
For achieving the above object, the technical solution used in the present invention is: based on the micro-displacement that broad sense phase-shifted digital is holographic Measuring method, it comprises the steps of:
1, using Cross interference light path, the laser of semiconductor laser outgoing becomes after pinhole filter with collimated Uniform plane wave number bundle, is divided into object light and reference light through beam splitter, and reference light enters after the first reflecting mirror reflection again After entering beam splitter, transmission enters CCD；Object light enters in beam splitter by beam splitter reflection to CCD after the second reflecting mirror reflection In, final two-beam forms interference in CCD；
2, three width interferograms are used to carry out the extraction of phase shift.By the object wave on recording surface and the complex amplitude of reference light, can Obtaining the interference fringe distribution formula of N width hologram it is:
Take out three width interferograms during calculating, set the first width interferogram reference light δ 1=0, reference light phase place δ 2 of the second width For α 1, then the reference light phase place of the 3rd width interferogram is α 2, at this moment also has:
I in above-mentioned formula1,I2,I3,Io,IrIt is the first width, the second width, the light intensity of the 3rd width interferogram and object light and ginseng respectively Examine the light intensity of light；
By one common intermediate variable of introducing by these three variable abbreviation it is again:
P=csin (α1/2)
Q=csin (α2/2)
R=csin [(α1+α2)/2]
Such that it is able to the relational expression obtained between intermediate variable is:
C=2pqr [2 (p2q2+p2r2+q2r2)-(p4+q4+r4)]-1/2
From above-mentioned formula, we can obtain the phase-shift value formula of requirement and are:
α1=2arcsin (p/c), α2=2arcsin (q/c)
3, utilize the ccd data acquisition software of computer to gather the interferogram before and after object under test change in displacement, pass through The interference fringe Skeleton Extract that institute obtains.Multi-frame interferometry figure is read, in the program of establishment by software programming program The stripe order recognition in every width interferogram is obtained with mean function.In the relation found between stripe order recognition and reference light phase shift Time, from all of interferogram, choose first interferogram, last interferogram and the interferogram of centre and to selected Interferogram arranges corresponding light intensity I1、I2、I3, then utilize the broad sense phase-shifted digital accurate extraction algorithm of holographic interferometry phase-shift value, Calculate the phase-shift value in experiment light pathThen formula is used:
By this derivation of equation it is:
Finally the formula of optical maser wavelength and step 2 is calculated gained phase-shift value to substitute in above-mentioned formula, can try to achieve small Shift value.
What the present invention produced has the beneficial effect that the micro-displacement measurement holographic based on broad sense phase-shifted digital of the present invention Method, precision can reach nanometer scale, and building of broad sense phase-shifted digital holography experiment light path is fairly simple, and the phase shift of employing is taken out The exact algorithm taken is easier when phase-shift value must extract realizing.
Accompanying drawing explanation
Fig. 1 is the experimental provision structural representation that this detailed description of the invention broad sense phase-shifted digital record is holographic；
Fig. 2 is this detailed description of the invention test effect figure.
Detailed description of the invention
In order to be illustrated more clearly that the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing In having technology to describe, the required accompanying drawing used is briefly described, it should be apparent that, the accompanying drawing in describing below is only this Some embodiments of invention, for those of ordinary skill in the art, on the premise of not paying creative work, also may be used To obtain other accompanying drawing according to these accompanying drawings.
Referring to as shown in Fig. 1 Fig. 2, this detailed description of the invention adopts the following technical scheme that based on broad sense phase-shifted digital Holographic micro-displacement measurement method, it comprises the steps of:
1, using Cross interference light path, the laser of semiconductor laser 3 outgoing becomes after pinhole filter collimates with lens 4 For uniform plane wave number bundle, be divided into object light and reference light through beam splitter 5, reference light through first reflecting mirror 1 reflection after again After secondary entrance beam splitter 5, transmission enters CCD 6；Object light enters in beam splitter 5 anti-by beam splitter after reflecting when the second reflecting mirror 2 Being incident upon in CCD 6, final two-beam forms interference in CCD6；Use semiconductor laser 3, use traditional Mai Shi to interfere dress Put, can avoid the first reflecting mirror 1 and the second reflecting mirror 2 are carried out the adjustment of angle, thus when carrying out the calculating of phase-shift value Do not consider the angle of light and reflecting mirror.
2, three width interferograms are used to carry out the extraction of phase shift.By the object wave on recording surface and the complex amplitude of reference light, can Obtaining the interference fringe distribution formula of N width hologram it is:
Take out three width interferograms during calculating, set the first width interferogram reference light δ 1=0, reference light phase place δ 2 of the second width For α 1, then the reference light phase place of the 3rd width interferogram is α 2, at this moment also has:
I in above-mentioned formula1,I2,I3,Io,IrIt is the first width, the second width, the light intensity of the 3rd width interferogram and object light and ginseng respectively Examine the light intensity of light；
By one common intermediate variable of introducing by these three variable abbreviation it is again:
P=csin (α1/2)
Q=csin (α2/2)
R=csin [(α1+α2)/2]
Such that it is able to the relational expression obtained between intermediate variable is:
C=2pqr [2 (p2q2+p2r2+q2r2)-(p4+q4+r4)]-1/2
From above-mentioned formula, we can obtain the phase-shift value formula of requirement and are:
α1=2arcsin (p/c), α2=2arcsin (q/c)
3, utilize the ccd data acquisition software of computer to gather the interferogram before and after object under test change in displacement, pass through The interference fringe Skeleton Extract that institute obtains.Multi-frame interferometry figure is read, in the program of establishment by software programming program The stripe order recognition in every width interferogram is obtained with mean function.In the relation found between stripe order recognition and reference light phase shift Time, from all of interferogram, choose first interferogram, last interferogram and the interferogram of centre and to selected Interferogram arranges corresponding light intensity I1、I2、I3, then utilize the broad sense phase-shifted digital accurate extraction algorithm of holographic interferometry phase-shift value, Calculate the phase-shift value in experiment light pathThen formula is used:
By this derivation of equation it is:
Finally the formula of optical maser wavelength and step 2 is calculated gained phase-shift value to substitute in above-mentioned formula, can try to achieve small Shift value.
This detailed description of the invention uses green glow in an experiment, and wavelength X is 532nm.
When the interferogram read from video is read out operation and the one dimensional image display of intensity, as long as in interferogram Heart striped is bright fringes, will demonstrate a peak value in the strength relationship figure of these interferograms on a corresponding position, and Between adjacent bright striped, corresponding flat mirror moves half wavelength.In strength relationship figure, count the number of peak value, just can draw Total half-wavelength number that one width interferogram and last width interferogram are spaced.Total displacement should be positive number half-wavelength displacement again Plus two displacements less than half-wavelength, it may be assumed that
When the intensity level of the center of reading striped, we to take each width interferogram and take the intensity level of image center location, This can realize by image carries out the mean function process of two dimension in a program.Therefore to all interferograms obtained The mean function carrying out two dimension processes.
Can count from the strength relationship curve chart of each interferogram between the first width interferogram and last width interferogram Peak number be 31, run whole program, the phase-shift value finally obtained is:
Q=
27.0968
R=
29.6776
C=
29.6972
D1=
0.9160
D2=
2.2984
D1 and d2 i.e. represent the first width hologram and intermediate hologram and intermediate hologram and last width hologram it Between phase change value, by the phase change value of acquisition and count to get half-wave long number application formula in, it is possible to calculate The micro-displacement of mirror surface:
d = ( 0.9160 + 2.2984 ) × 532 n m 4 π + 31 2 × 532 n m = 8382 n m
What the present invention produced has the beneficial effect that the micro-displacement measurement holographic based on broad sense phase-shifted digital of the present invention Method, precision can reach nanometer scale, and building of broad sense phase-shifted digital holography experiment light path is fairly simple, and the phase shift of employing is taken out The exact algorithm taken is easier when phase-shift value must extract realizing.
The ultimate principle of the present invention and principal character and advantages of the present invention have more than been shown and described.The skill of the industry The art personnel simply explanation it should be appreciated that the present invention is not restricted to the described embodiments, described in above-described embodiment and description The principle of the present invention, without departing from the spirit and scope of the present invention, the present invention also has various changes and modifications, these Changes and improvements both fall within scope of the claimed invention.Claimed scope by appending claims and Its equivalent defines.

Claims (2)

1. based on the micro-displacement measurement method that broad sense phase-shifted digital is holographic, it is characterised in that it comprises the steps of:
(1), using Cross interference light path, the laser of semiconductor laser outgoing becomes equal after pinhole filter with collimated Even plane wave number bundle, is divided into object light and reference light through beam splitter, and reference light is again introduced into after the first reflecting mirror reflection After beam splitter, transmission enters CCD；Object light enters in beam splitter by beam splitter reflection to CCD after the second reflecting mirror reflection, Final two-beam forms interference in CCD；
(2) three width interferograms, are used to carry out the extraction of phase shift.By the object wave on recording surface and the complex amplitude of reference light, permissible The interference fringe distribution formula obtaining N width hologram is:
Taking out three width interferograms during calculating, set the first width interferogram reference light δ 1=0, reference light phase place δ 2 of the second width is α 1, then the reference light phase place of the 3rd width interferogram is α 2, at this moment also has:
I in above-mentioned formula1,I2,I3,Io,IrIt is the first width, the second width, the light intensity of the 3rd width interferogram and object light and reference light respectively Light intensity；
By one common intermediate variable of introducing by these three variable abbreviation it is again:
P=csin (α1/2)
Q=csin (α2/2)
R=csin [(α1+α2)/2]
Such that it is able to the relational expression obtained between intermediate variable is:
C=2pqr [2 (p2q2+p2r2+q2r2)-(p4+q4+r4)]-1/2
From above-mentioned formula, we can obtain the phase-shift value formula of requirement and are:
α1=2arcsin (p/c), α2=2arcsin (q/c)
(3), utilize the ccd data acquisition software of computer to gather the interferogram before and after object under test change in displacement, by grinding Study carefully obtained interference fringe Skeleton Extract.Read multi-frame interferometry figure by software programming program, use in the program of establishment Mean function obtains the stripe order recognition in every width interferogram.When the relation found between stripe order recognition and reference light phase shift, First interferogram, last interferogram and the interferogram of centre is chosen and to selected interference from all of interferogram Figure arranges corresponding light intensity I1、I2、I3, then utilize the broad sense phase-shifted digital accurate extraction algorithm of holographic interferometry phase-shift value, calculate Go out to test the phase-shift value in light pathThen formula is used:
By this derivation of equation it is:
Finally the formula of optical maser wavelength and step (2) is calculated gained phase-shift value to substitute in above-mentioned formula, small position can be tried to achieve Shifting value.
The micro-displacement measurement method holographic based on broad sense phase-shifted digital the most according to claim 1, it is characterised in that: from When the interferogram read in the video of above-mentioned steps (3) is read out operation and the one dimensional image display of intensity, if interferogram Center striped be bright fringes, the strength relationship figure of these interferograms will demonstrate a peak on a corresponding position Value, and between adjacent bright striped, corresponding flat mirror moves half wavelength.In strength relationship figure, count the number of peak value, just can obtain Going out the first width interferogram and the total half-wavelength number at last width interferogram interval, total displacement should be positive number half-wavelength position Move and add two displacements less than half-wavelength, it may be assumed that
CN201610739015.9A 2016-08-27 2016-08-27 Based on the micro-displacement measurement method that broad sense phase-shifted digital is holographic Pending CN106247950A (en)

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108106973A (en) * 2017-12-18 2018-06-01 大连理工大学 A kind of method for measuring saturation granule medium stress and displacement simultaneously based on transparent photoelastic material
CN109358334A (en) * 2018-11-09 2019-02-19 复旦大学 Nanometer displacement platform precision positioning method based on partially coherent light
CN109974591A (en) * 2019-03-22 2019-07-05 上海理工大学 The method that particle micro-displacement measurement device and measurement fine particle generate displacement
CN110207614A (en) * 2019-05-28 2019-09-06 南京理工大学 One kind being based on the matched high-resolution high precision measuring system of doubly telecentric camera and method
CN113566716A (en) * 2021-08-27 2021-10-29 西安应用光学研究所 Device and method for measuring micro relative displacement of reflector component in vibration environment

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101520306A (en) * 2009-03-30 2009-09-02 哈尔滨工业大学 Spatial carrier based interference confocal measuring device and method
CN204902764U (en) * 2015-04-28 2015-12-23 林燕彬 Move and interfere test system mutually

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101520306A (en) * 2009-03-30 2009-09-02 哈尔滨工业大学 Spatial carrier based interference confocal measuring device and method
CN204902764U (en) * 2015-04-28 2015-12-23 林燕彬 Move and interfere test system mutually

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
徐先锋: "基于广义相移干涉术的数字全息实验", 《实验室研究与探索》 *
徐先锋等: "广义相移数字全息反射物体成像实验设计", 《大学物理》 *
计欣华 等: "数字全息计量技术及其在微小位移测量中的应用", 《实验力学》 *

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108106973A (en) * 2017-12-18 2018-06-01 大连理工大学 A kind of method for measuring saturation granule medium stress and displacement simultaneously based on transparent photoelastic material
CN109358334A (en) * 2018-11-09 2019-02-19 复旦大学 Nanometer displacement platform precision positioning method based on partially coherent light
CN109358334B (en) * 2018-11-09 2023-03-14 复旦大学 Nano displacement table precision positioning method based on partially coherent light
CN109974591A (en) * 2019-03-22 2019-07-05 上海理工大学 The method that particle micro-displacement measurement device and measurement fine particle generate displacement
CN110207614A (en) * 2019-05-28 2019-09-06 南京理工大学 One kind being based on the matched high-resolution high precision measuring system of doubly telecentric camera and method
CN110207614B (en) * 2019-05-28 2020-12-04 南京理工大学 High-resolution high-precision measurement system and method based on double telecentric camera matching
CN113566716A (en) * 2021-08-27 2021-10-29 西安应用光学研究所 Device and method for measuring micro relative displacement of reflector component in vibration environment

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Application publication date: 20161221