CN113566716A - Device and method for measuring micro relative displacement of reflector component in vibration environment - Google Patents
Device and method for measuring micro relative displacement of reflector component in vibration environment Download PDFInfo
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- CN113566716A CN113566716A CN202110996288.2A CN202110996288A CN113566716A CN 113566716 A CN113566716 A CN 113566716A CN 202110996288 A CN202110996288 A CN 202110996288A CN 113566716 A CN113566716 A CN 113566716A
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- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
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Abstract
The invention belongs to the technical field of optical precision detection, and discloses a device and a method for measuring the tiny relative displacement of a reflector assembly in a vibration environment. The invention solves the problems of low measurement precision, complex erection, damage to the reflector in the measurement process and the like in the relative displacement measurement process of the reflector assembly, and has the characteristics of simple structure, good rigidity, simple erection, high measurement precision, no damage to the measurement of the reflector and the like.
Description
Technical Field
The invention belongs to the field of optical precision measurement, relates to a device and a method for measuring the tiny relative displacement of a reflector component in a vibration environment, and mainly aims to realize the measurement of the tiny relative displacement of the reflector component.
Background
With the development of photoelectric products in the directions of common optical path, integration and compactness, the reflector component is widely applied to a common-axis optical system, an off-axis optical system, a catadioptric optical system and the like as a main structure of the photoelectric product, and the rigidity of the assembled reflector component plays an important role in imaging of the optical system. The assembly of the reflector assembly usually adopts an adhesive structure, and optical parts, a mirror frame and other metal parts are integrated into a whole. Although the optical-mechanical adhesive structure has the advantages of compact design, light weight, low cost and easy assembly, the rigidity of the adhesive is poor and the adhesive has certain damping, so that the reflector and the reflector frame can generate relative displacement under a vibration environment, the interval of optical elements in an optical system is changed, the alignment state of the optical surface of the reflector relative to an optical axis and other components in the system is changed, and the imaging quality is reduced. In order to improve the imaging quality of the photoelectric product in a vibration environment, the relative displacement of the reflection mirror assembly in the vibration environment before the assembly is carried out must be measured.
The response of the mirror assembly to a vibrating environment depends on its fundamental frequency and damping, and under severe dynamic vibration conditions, the mirror displacement can also briefly exceed design tolerances. For the reflector component, the maximum damping is structural damping which is proportional to displacement, and after the silicon rubber is solidified, compared with the rigidity of the main mirror frame and the main reflector, the silicon rubber layer has the weakest rigidity because the main reflector and the mirror frame are bonded by silicon rubber, so that the relative displacement of the reflector and the main mirror frame is expressed as the damping of the silicon rubber. Because the cured silicone rubber has physical properties which are viscoelastic, the traditional empirical method can only calculate the maximum displacement generated under random vibration, and the accuracy of the result is difficult to ensure by an analytical method due to the change of the vibration environment and the change of the connection mode, so that in most optical-mechanical structures, the measurement of the relative displacement between the reflector and the mirror frame needs to be carried out by a test method. The existing method has the following problems in measuring relative displacement: firstly, the measurement precision is not high, the relative displacement between the reflector and the mirror frame is more in the micron level, and the precision of the common measurement method is difficult to ensure; secondly, the general measurement means adopts contact measurement, so that the optical elements or the film layer in the reflector component are easily damaged; the existing non-contact method for measuring the micro displacement mainly adopts an echo and interference method for measurement, the surface of the optical element with the roughness less than 0.012 is easy to reflect, and the existing non-contact measurement method is difficult to accurately receive, so that the micro displacement of the optical element is difficult to measure or inaccurate to measure; and fourthly, the airborne and vehicle-mounted commonly used test frequency spectrum in the random vibration environment has a wide frequency spectrum band, generally vibrates in the middle of 10Hz to 2000Hz, the environmental amplitude of vibration is up to 3-5mm, and is about 1000 times of the relative displacement of the reflector and the mirror frame, and the general high-precision displacement measurement method cannot be used and measured in the environment of large-amplitude vibration and high-frequency vibration.
Therefore, a new device and method are needed to be found, which can not only meet the requirement of high-precision measurement, but also realize the erection and the measurement of tiny relative displacement in a high-frequency and high-amplitude environment, and do not damage the optical element.
The invention discloses a generalized phase shift holographic experimental optical path and a generalized phase shift interference beam phase shift extraction algorithm, and aims at a device and a method for measuring the micro relative displacement of a reflector component in a vibration environment, and the invention of the invention patent of China 'application number CN106247950A, the micro displacement measurement based on generalized phase shift digital holography', and the displacement of the micro-nano scale of the movement of a target reflector is calculated by utilizing the relationship between a phase shift value and the micro displacement of the reflector. The method has high requirement on the stability of the erected light path, and is not suitable for measuring the micro displacement in the engineering vibration environment; secondly, the method calculates the displacement of the movement of the reflecting mirror through a phase shift value, and has larger error for the displacement measurement in a high-frequency vibration environment. The patent application No. CN103630075A discloses a method and a device for measuring the micro-displacement of a light beam, which adopts a laser beam, a cylindrical mirror, a three-dimensional mobile platform and an observation screen to form the method and the device for measuring the micro-displacement, wherein, a laser is fixed on the displacement platform and is reflected to the observation screen through the cylindrical mirror, and the displacement of the laser can be measured. In a vibration environment, the laser of the method cannot separate a noise signal and an actual vibration signal through the reflection of the cylindrical mirror, so that the measured displacement data is inaccurate, and secondly, the method has a complex erection process and has higher requirements on the assumed precision of the laser and the cylindrical mirror.
Disclosure of Invention
Objects of the invention
The purpose of the invention is: the invention provides a method and a device for measuring the micro relative displacement of a reflector component in a vibration environment, aiming at the problems that the measurement precision is not high, the operation is severe in the vibration environment, the optical reflector is damaged in the test process, the relative displacement cannot be measured in the random vibration environment and the like in the measurement process of the micro relative displacement of the reflector component in the vibration environment.
(II) technical scheme
In order to solve the above technical problem, the present invention provides a device for measuring a minute relative displacement of a mirror assembly in a vibration environment, comprising: the device comprises a vibration connecting plate 1, a vibration connecting rod 2, a detector supporting seat 3, a detector pressing plate 4, a spectrum confocal lens 5, a coupler 6, an LED light source signal controller 7, an optical fiber 8, a data acquisition module 9 and a data post-processing module 10.
The vibration connecting plate 1 is used as a base body, the flatness requirement is 0.008mm, the parallelism is 0.01mm, the rigid connection of the to-be-measured reflector assembly, the vibration connecting plate 1 and the vibration test bed is ensured, and the vibration connecting plate has a mechanical interface connected with the vibration test bed, a mechanical interface connected with the to-be-measured reflector assembly and a mechanical interface connected with a measurement system; the mechanical fixing part of the measuring system consists of a vibration connecting rod 2, a detector supporting seat 3, a detector pressing plate 4 and a spectrum confocal lens 5; the vibration connecting rod 2 is provided with a waist-shaped connecting hole position and is connected with the vibration connecting plate 1, and the confocal plane of the spectrum confocal lens 5 and the reflector to be measured can be realized through the waist-shaped connecting hole position; the detector supporting seat 3 is provided with a mechanical interface connected with the vibrating connecting rod 2, the transverse and vertical misalignment caused by machining errors can be compensated through the waist-shaped hole position of the vibrating connecting rod 2, the relative position of the spectrum confocal lens 5 and a reflector component to be detected is adjusted, the light focus is ensured to be positioned on the reflector or a mirror frame to be detected, the detector supporting seat 3 is designed into an elastic chuck structure, and the spectrum confocal lens 5 can be stably and reliably fixed and can not damage the lens through the elastic chuck; the detector pressing plate 4 is connected with the detector supporting seat 3 and used for fixing the vertical position of the spectrum confocal lens 5 and ensuring the rigidity of the spectrum confocal lens 5 under the random vibration environment, namely the spectrum confocal lens does not generate relative displacement with the vibration connecting plate 1; the spectrum confocal lens 5 is used for converging the light beams, performing self-calibration and receiving return signals; the coupler 6 is used for coupling the LED optical signals passing through the optical fiber into optical signals with continuous wavelengths, providing target light beams and receiving optical signals returned by the spectrum confocal lens; the LED light source signal controller 7 is used for controlling the generation of a light source, controlling the intensity and the acquisition frequency of the light source, converting light signals with different wavelengths into displacement information through the peak photosensitive intensity, and the LED light source signal controller 7 is connected with the coupler 6 through an optical fiber 8; the data acquisition module 9 and the data post-processing module 10 are integrated in the computer, and are connected with the LED light source signal controller 7 through a network port to transmit data.
The invention also provides a method for measuring the micro relative displacement of the reflector component in the vibration environment, and the measuring method adopts the device for measuring the micro relative displacement of the reflector component in the vibration environment to measure the displacement of the reflector component in the random vibration environment.
Wherein the measuring method comprises the following steps:
the first step is as follows: mounting a mirror assembly to be tested
The vibration connecting plate 1 is connected to a vibration test bench through a mechanical interface, the vibration test bench is used for providing random vibration frequency spectrum, and the reflector component to be tested is fixed on the vibration connecting plate 1.
The second step is that: erecting micro displacement measuring system
The vibration connecting rod 2 is connected to the vibration connecting plate 1 through a mechanical interface, and the detector supporting seat 3 is connected to the vibration connecting rod 2 through a mechanical interface. The spectrum confocal lens 5 is arranged on the detector supporting seat 3, the elastic chuck of the detector supporting seat is reliably fixed by using a screw, the detector pressing plate 4 is rigidly connected with the detector supporting seat 3 and the spectrum confocal lens 5, and the vertical position of the spectrum confocal lens 5 is limited, namely the spectrum confocal lens does not generate relative displacement with the vibration connecting plate 1 in a random vibration environment; the coupler 6 is arranged on the spectrum confocal lens 5 and is connected with the LED light source signal controller 7 through the optical fiber 8; and data transmission between the data of the LED light source signal controller 7 and the data acquisition module 9 and between the data post-processing module 10 is realized through a network port.
The third step: adjusting confocal point
And opening the LED light source signal controller 7, loosening the mechanical connecting interface of the vibration connecting rod 2, the vibration connecting plate 1 and the detector supporting seat 3, and adjusting the vertical position and the horizontal position of the confocal point of the spectrum confocal lens through the waist-shaped connecting hole position on the vibration connecting rod 2 so that the confocal point is respectively superposed with the reflector measuring point and the reflector frame measuring point.
The fourth step: collecting measurements
The vibration test bed applies random vibration frequency, collects the reflector measuring point and the reflector frame measuring point in the same frequency domain through the data collecting module 9, and formats and stores the data by a dat file, and respectively records the displacement data of the reflector and the reflector frame at different moments.
The fifth step: data processing
The data post-processing module 10 processes the reflector displacement data and the reflector frame displacement data acquired by the data acquisition module 9, and the time domain is taken as a horizontal axis coordinate to respectively stack the reflector displacement data and the reflector frame displacement data, so that the relative displacement of the reflector and the reflector frame at the same moment in a random vibration environment can be obtained.
(III) advantageous effects
The device and the method for measuring the micro relative displacement of the reflector component in the vibration environment have the advantages that the following aspects are achieved.
(1) The measuring device and the reflector component to be measured are located in the same random vibration environment, so that the interference frequency and the error of the vibration test environment can be filtered, the accuracy of displacement data is high, and the problem that the micro displacement cannot be measured in the vibration environment is solved.
(2) The surface displacement measurement of the optical element is realized by adopting a non-contact measurement method, and the method eliminates the damage to the optical element;
(3) by adopting a spectrum confocal method, the loss of optical energy of an optical element in the vibration process is avoided, the measurement precision is low, and the measurement accuracy is improved by a confocal system.
(4) The displacement data of the reflector and the reflector frame in a certain vibration frequency spectrum can be measured and analyzed at the same moment.
(5) By adopting the elastic chuck structure and the mechanical supporting structure, the measuring device has the advantages of simple mechanical structure, high rigidity, convenience in operation and quickness in installation, and the accuracy and the timeliness of data acquisition are improved.
Drawings
FIG. 1 is a schematic view of a mirror assembly micro relative displacement measuring device and a mirror assembly to be measured installed in a vibration environment;
the device comprises a vibration connecting plate 1, a vibration connecting rod 2, a detector supporting seat 3, a detector pressing plate 4, a spectrum confocal lens 5, a coupler 6, an LED light source signal controller 7, an optical fiber 8, a data acquisition module 9 and a data post-processing module 10.
FIG. 2 is a schematic view of confocal measurement of a reflector frame;
fig. 3 is a schematic view of confocal measurement of the mirror.
Detailed Description
In order to make the objects, contents and advantages of the present invention clearer, the following detailed description of the embodiments of the present invention will be made in conjunction with the accompanying drawings and examples.
Referring to fig. 1 to 3, the apparatus for measuring a minute relative displacement of a mirror assembly in a vibration environment according to the present invention includes: the device comprises a vibration connecting plate 1, a vibration connecting rod 2, a detector supporting seat 3, a spectrum confocal lens 5, a coupler 6, an LED light source signal controller 7, an optical fiber 8, a data acquisition module 9 and a data post-processing module 10; the device comprises a vibration connecting plate 1, a reflector component to be tested, a vibration connecting rod 2, a detector supporting seat 3, a spectrum confocal lens 5, a coupler 6, an LED light source signal controller 7, a data acquisition module 9 and a data post-processing module 10, wherein the vibration connecting plate 1 is installed on a vibration test bed, the reflector component to be tested is installed at the center of the upper surface of the vibration connecting plate 1, the two adjacent side surfaces of the vibration connecting plate 1 are respectively provided with the vibration connecting rod 2, the top of each vibration connecting rod 2 is provided with the detector supporting seat 3, the spectrum confocal lens 5 is installed on each detector supporting seat 3, the coupler 6 is arranged above each spectrum confocal lens 5, the two couplers 6 are respectively connected to the LED light source signal controller 7 through corresponding optical fibers 8, the LED light source signal controller 7 is connected with the data acquisition module 9 through a net mouth, and the data acquisition module 9 is connected with the data post-processing module 10; the LED light source signal controller 7 is opened, light rays respectively enter the corresponding couplers 6 through the two optical fibers 8, the couplers 6 couple the light rays into continuous wavelength optical signals, the spectrum confocal lens 5 focuses the continuous wavelength optical signals generated by the couplers 6 to ensure that the light rays with different wavelengths are focused along the axis, light beams emitted by the two spectrum confocal lenses 5 are respectively vertically incident on a reflecting mirror frame and a reflecting mirror of a reflector component to be detected, when the reflecting mirror frame or the reflecting mirror vibrates, the axial displacement of the reflecting mirror frame or the reflecting mirror is changed, the optical signals with different specific wavelengths are reflected at different displacement positions, the optical signals with the specific wavelengths enter the optical fibers 8 through the spectrum confocal lens 5 and the couplers 6 and are transmitted to the LED light source signal controller 7 through the optical fibers 8, and the LED light source signal controller 7 converts the optical signals with different wavelengths into displacement signals through peak photosensitive intensity, the data are transmitted to a data acquisition module 9 through a network port, the data acquisition module 9 acquires displacement data of the reflector and the reflector frame in real time and transmits the displacement data to a data post-processing module 10, the data post-processing module 10 analyzes and processes the acquired data in time domain coordinates, and noise and clutter data are coupled and eliminated during data processing to obtain the relative displacement between the reflector and the reflector frame after error elimination.
In this embodiment, vibration connecting plate 1 is square thick flat board, and the center is equipped with the screw via hole of three groups 12 equipartitions, and the screw hole as mechanical interface and vibration test platform corresponds, guarantees vibration connecting plate 1 and vibration test platform rigid connection, does not take place relative displacement with the vibration test platform at random vibration in-process.
The upper surface of the vibration connecting plate 1 is provided with a boss corresponding to the connecting position of the reflector component to be detected, the boss is provided with a threaded hole, the boss corresponds to a bolt through hole of the reflector component to be detected, thereby the vibration connecting plate 1 is connected with the reflector component to be detected through a bolt, the flatness of the contact surface of the vibration connecting plate 1 and the reflector component to be detected is not more than 0.008mm, the parallelism of the bottom surface is not more than 0.01mm, the reflector component to be detected is ensured to be stably and reliably contacted with the vibration connecting plate 1, and the reflector component to be detected does not generate relative displacement with the vibration connecting plate 1 in the random vibration process.
Adjacent both sides face respectively is equipped with a boss on the vibration connecting plate 1, and the boss plane degree is not more than 0.008mm, has the screw hole on the boss, links to each other with vibration connecting rod 2, guarantees that vibration connecting rod 2 and vibration connecting plate 1 contact are stable, reliable, and vibration connecting rod 2 does not take place relative displacement with vibration connecting plate 1 at random vibration in-process.
The vibration connecting rod 2 is provided with a connecting interface of the vibration connecting plate 1 and a connecting interface of the detector supporting seat 3, the connecting interface is a waist-shaped hole, namely a long circular hole, the position of the connecting screw in the waist-shaped hole can be adjusted to be used for adjusting the vertical position and the radial position of the spectrum confocal lens 5, errors caused by part processing can be compensated, and the adaptability of the measuring device is improved.
The detector supporting seat 3 is provided with a threaded hole and an elastic chuck structure which are connected with the vibration connecting rod 2, the spectrum confocal lens 5 is arranged in the elastic chuck structure, the elastic chuck structure can effectively fix the spectrum confocal lens 5 and restrain the transverse position of the spectrum confocal lens 5, the spectrum confocal lens 5 is prevented from shifting in the random vibration process, an optical element of the spectrum confocal lens 5 can be protected, and the accuracy of displacement measurement is improved.
The detector supporting seat 3 is further provided with a detector pressing plate 4, the detector pressing plate 4 is provided with a connecting interface with the detector supporting seat 3 and is mainly used for fixing the spectrum confocal lens 5 and restraining the vertical position of the spectrum confocal lens 5, and the rigidity of the spectrum confocal lens 5 and the detector supporting seat 3 in a random vibration environment is guaranteed.
In this embodiment, the spectral confocal lens 5 is configured to converge the light beam provided by the coupler 6, and is configured to receive the light beam returned by the mirror assembly to be measured.
The coupler 6 functions to couple the LED optical signals through the optical fiber into a continuous wavelength optical signal, provide a target beam, and receive the optical signal returned by the spectral confocal lens.
The LED light source signal controller 7 is used for controlling the generation of a light source, controlling the intensity and the acquisition frequency of the light source, and converting light signals with different wavelengths into displacement information through the peak value photosensitive intensity.
The optical fiber 8 is connected with the coupler 6 and the LED light source signal controller 7 and used for transmitting optical signals.
The data acquisition module 9 is used for acquiring displacement data and is connected with the LED light source signal controller 7 through a network port, so that the displacement data of the reflector and the reflector frame can be acquired simultaneously, and the timeliness and the reliability of data acquisition are improved.
The data post-processing module 10 is used for analyzing and processing the acquired data in time domain coordinates, and because the data acquisition module acquires displacement data of the reflector and the reflector frame at the same time, the data processing module performs coupling elimination on noise and clutter data to obtain the relative displacement of the reflector and the reflector frame after error elimination.
The setting process of the data acquisition module 9 and the processing method of the data post-processing module 10 in the embodiment comprise the following steps:
the first step is as follows: and extracting the frequency spectrum of the random vibration of the vibration test bed, and adjusting the acquisition frequency of the data acquisition module 9 to be 10 times of the maximum frequency of the random vibration according to the maximum frequency of the random vibration, so that the timeliness and the accuracy of the data acquisition of the displacement point are ensured.
The second step is that: the dat data files collected by the data collecting module 9 respectively include mirror frame displacement data and mirror displacement data, and the data post-processing module 10 models the data by using the time domain signal as an abscissa axis and the displacement data as an ordinate axis.
The third step: the reflector data model and the reflector frame data model are overlapped, even if the reflector data model and the reflector frame data model respectively carry noise displacement data of the vibration test bed and each support frame, because the reflector data and the reflector frame data are simultaneously collected, in the overlapping process, the noise displacement data caused by the vibration test bed and each support frame can be eliminated by overlapping at the same moment.
The fourth step: the data post-processing module 10 uses the mirror frame displacement data as a reference, the mirror displacement data is greater than the mirror frame displacement data at the same moment and is recorded as +, the mirror displacement data is less than the mirror frame and is recorded as-, and an absolute value is taken for the data, so that the position variation of the mirror and the mirror frame at different moments can be obtained.
Based on the device for measuring the micro relative displacement of the reflector assembly in the vibration environment, the method for measuring the micro relative displacement of the reflector assembly in the vibration environment comprises the following steps:
the first step is as follows: mounting a mirror assembly to be tested
The vibration connecting plate 1 is connected to a vibration test bed through a mechanical interface and is connected with the vibration test bed through three groups of 12 uniformly distributed screw through holes, so that the vibration connecting plate 1 is guaranteed not to generate relative displacement with the vibration test bed. The vibration test bed is used for providing random vibration frequency spectrum and fixing the reflector component to be tested on the vibration connecting plate 1.
The second step is that: erecting micro displacement measuring system
The vibration connecting rod 2 is connected to the vibration connecting plate 1 through a mechanical interface, and the detector supporting seat 3 is connected to the vibration connecting rod 2 through a mechanical interface. The spectrum confocal lens 5 is arranged on the detector supporting seat 3, the elastic chuck structure of the detector supporting seat is reliably fixed by screws, and the detector pressing plate 4 is rigidly connected with the detector supporting seat 3 and the spectrum confocal lens 5 to limit the vertical position of the spectrum confocal lens 5; the coupler 6 is arranged on the spectrum confocal lens 5 and is connected with the LED light source signal controller 7 through the optical fiber 8; and data transmission between the data of the LED light source signal controller 7 and the data acquisition module 9 and between the data post-processing module 10 is realized through a network port.
The third step: adjusting confocal point
And opening the LED light source signal controller 7, loosening the mechanical connecting interfaces of the vibration connecting rod 2, the vibration connecting plate 1 and the detector supporting seat 3, and adjusting the vertical position and the horizontal position of the confocal point of the spectrum confocal lens through the waist-shaped connecting hole position on the vibration connecting rod 2, as shown in figures 2 and 3, so that the confocal point is respectively coincided with the measuring point of the reflector and the measuring point of the reflector frame.
The fourth step: collecting measurements
The vibration test bed applies random vibration frequency, collects the reflector measuring point and the reflector frame measuring point in the same frequency domain through the data collecting module 9, and formats and stores the data by a dat file, and respectively records the displacement data of the reflector and the reflector frame at different moments.
The fifth step: data processing
The data post-processing module 10 processes the reflector displacement data and the reflector frame displacement data acquired by the data acquisition module 9, and the time domain is taken as a horizontal axis coordinate to respectively stack the reflector displacement data and the reflector frame displacement data, so that the relative displacement of the reflector and the reflector frame at the same moment in a random vibration environment can be obtained.
According to the technical scheme, the device has the advantages of high strength, stable structure, convenience and quickness in erection, good connection rigidity with a vibration system and utilization of an optical spectrum confocal principle; the micro displacement is measured by adopting a non-contact method, the measurement precision is high, the reflector is not damaged, and the relative displacement of the reflector and the mirror frame at a certain moment is obtained under random vibration by superposing and quantizing the random vibration.
The above description is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, several modifications and variations can be made without departing from the technical principle of the present invention, and these modifications and variations should also be regarded as the protection scope of the present invention.
Claims (10)
1. A device for measuring the tiny relative displacement of a reflector component in a vibration environment is characterized by comprising: the device comprises a vibration connecting plate (1), a vibration connecting rod (2), a detector supporting seat (3), a spectrum confocal lens (5), a coupler (6), an LED light source signal controller (7), an optical fiber (8), a data acquisition module (9) and a data post-processing module (10); the device comprises a vibration connecting plate (1), a reflector component to be tested, a vibration connecting rod (2), a detector supporting seat (3) and a spectrum confocal lens (5), wherein the vibration connecting plate (1) is arranged on the center of the upper surface of the vibration connecting plate (1), two adjacent side surfaces of the vibration connecting plate (1) are respectively provided with the vibration connecting rod (2), the top of each vibration connecting rod (2) is provided with the detector supporting seat (3), each detector supporting seat (3) is provided with the spectrum confocal lens (5), a coupler (6) is arranged above each spectrum confocal lens (5), the two couplers (6) are respectively connected to an LED light source signal controller (7) through corresponding optical fibers (8), the LED light source signal controller (7) is connected with a data acquisition module (9) through a net mouth, and the data acquisition module (9) is connected with a data post-processing module (10); an LED light source signal controller (7) is opened, light rays respectively enter corresponding couplers (6) through two optical fibers (8), the couplers (6) couple the light rays into continuous wavelength optical signals, a spectrum confocal lens (5) focuses the continuous wavelength optical signals generated by the couplers (6) to ensure that the light rays with different wavelengths are focused along an axis, light beams emitted by the two spectrum confocal lenses (5) are respectively vertically incident on a reflector frame and a reflector of a reflector component to be detected, when the reflector frame or the reflector vibrates, the axial displacement of the reflector frame or the reflector changes, optical signals with different specific wavelengths are reflected at different displacement positions, the optical signals with the specific wavelengths enter the optical fibers (8) through the spectrum confocal lens (5) and the couplers (6), are transmitted to the LED light source signal controller (7) through the optical fibers (8), and the LED light source signal controller (7) converts the optical signals with different wavelengths into displacement signals through peak light sensing intensity, the data are transmitted to a data acquisition module (9) through a network port, the data acquisition module (9) acquires displacement data of the reflector and the reflector frame in real time and transmits the displacement data to a data post-processing module (10), the data post-processing module (10) analyzes and processes the acquired data in time domain coordinates, and noise and clutter data are coupled and eliminated during data processing to obtain the relative displacement between the reflector and the reflector frame after error elimination.
2. The device for measuring the micro relative displacement of the reflector assembly in the vibration environment according to claim 1, wherein the vibration connection plate (1) is a square flat plate, a plurality of uniformly distributed screw through holes are formed in the center of the vibration connection plate, and the screw through holes are used as mechanical interfaces and correspondingly connected with threaded holes of a vibration test bed, so that the vibration connection plate (1) is rigidly connected with the vibration test bed.
3. The device for measuring the minor relative displacement of the mirror assembly in the vibration environment according to claim 1, wherein the upper surface of the vibration connecting plate (1) is provided with a boss corresponding to the connection position of the mirror assembly to be measured, the boss is provided with a threaded hole corresponding to a screw through hole of the mirror assembly to be measured, so that the vibration connecting plate (1) is connected with the mirror assembly to be measured through a screw, the flatness of the contact surface of the vibration connecting plate (1) and the mirror assembly to be measured is not more than 0.008mm, and the parallelism of the vibration connecting plate and the bottom surface is not more than 0.01 mm.
4. The apparatus for measuring the minor relative displacement of the mirror assembly in the vibration environment according to claim 1, wherein the adjacent two side surfaces of the vibration connecting plate (1) are respectively provided with a boss, the flatness of the boss is not more than 0.008mm, and the boss is provided with a threaded hole and is connected with the vibration connecting rod (2).
5. The apparatus for measuring the minor relative displacement of the mirror assembly in the vibration environment according to claim 1, wherein the vibration connecting rod (2) has a connecting interface with the vibration connecting plate 1 and a connecting interface with the detector supporting seat (3), the connecting interfaces are all waist-shaped holes, and the vertical position, the radial position and the part processing error of the spectral confocal lens (5) are adjusted by adjusting the positions of the connecting screws in the waist-shaped holes.
6. The apparatus for measuring the minor relative displacement of the mirror assembly in the vibration environment according to claim 1, wherein the probe supporting base (3) has a threaded hole connected to the vibrating connecting rod (2) and a collet structure, and the spectral confocal lens (5) is mounted in the collet structure.
7. The apparatus for measuring the minor relative displacement of the mirror assembly in the vibration environment according to claim 1, wherein the detector holder (3) is provided with a detector pressing plate (4), and the detector pressing plate (4) has a connection interface with the detector holder (3) for fixing the spectral confocal lens (5) and restraining the vertical position of the spectral confocal lens (5).
8. The method for measuring the minor relative displacement of the mirror assembly under the vibration environment according to any one of claims 1 to 7, comprising the steps of:
the first step is as follows: mounting a mirror assembly to be tested
Connecting the vibration connecting plate (1) to a vibration test bed through a mechanical interface, and fixing a reflector assembly to be tested on the vibration connecting plate (1);
the second step is that: erecting micro displacement measuring system
Connecting a vibration connecting rod (2) to a vibration connecting plate (1) through a mechanical interface, connecting a detector supporting seat (3) to the vibration connecting rod (2) through the mechanical interface, installing a spectrum confocal lens (5) to the detector supporting seat (3), and rigidly connecting a detector pressing plate (4) with the detector supporting seat (3) and the spectrum confocal lens (5) to limit the vertical position of the spectrum confocal lens (5); the coupler (6) is arranged on the spectrum confocal lens (5) and is connected with the LED light source signal controller (7) through an optical fiber (8); data transmission between the data of the LED light source signal controller (7) and the data acquisition module (9) and the data post-processing module (10) is realized through the network port;
the third step: adjusting confocal point
Opening an LED light source signal controller (7), loosening a mechanical connecting interface of a vibration connecting rod (2), a vibration connecting plate (1) and a detector supporting seat (3), and adjusting the vertical position and the horizontal position of the confocal point of the spectrum confocal lens through a waist-shaped connecting hole position on the vibration connecting rod (2) so that the confocal point is respectively coincided with a reflector measuring point and a reflector frame measuring point;
the fourth step: collecting measurements
Applying random vibration frequency to the vibration test bed, simultaneously acquiring a reflector measuring point and a reflector frame measuring point in the same frequency domain through a data acquisition module (9), and performing formatted storage on data by using a dat file to respectively record displacement data of the reflector and the reflector frame at different moments;
the fifth step: data processing
The data post-processing module (10) is used for processing the reflector displacement data and the reflector frame displacement data acquired by the data acquisition module (9), the time domain is taken as a horizontal axis coordinate, and the reflector displacement data and the reflector frame displacement data are respectively superposed to obtain the relative displacement of the reflector and the reflector frame at the same moment in a random vibration environment.
9. The measurement method according to claim 8, wherein in the fourth step, before the acquisition measurement, a frequency spectrum of random vibration of the vibration test stand is extracted, and the acquisition frequency of the data acquisition module (9) is adjusted to 10 times the maximum frequency of the random vibration according to the maximum frequency of the random vibration.
10. The measurement method according to claim 8, wherein in the fifth step, when the data post-processing module (10) calculates the relative displacement between the mirror and the mirror frame, based on the mirror frame displacement data, the mirror displacement data is greater than the mark + of the mirror frame displacement data at the same time, the mirror displacement data is smaller than the mark-of the mirror frame, and the absolute value of the data is obtained to obtain the amount of change in the positions of the mirror and the mirror frame at different times.
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