CN113566716B - Device and method for measuring micro relative displacement of reflecting mirror component in vibration environment - Google Patents
Device and method for measuring micro relative displacement of reflecting mirror component in vibration environment Download PDFInfo
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- CN113566716B CN113566716B CN202110996288.2A CN202110996288A CN113566716B CN 113566716 B CN113566716 B CN 113566716B CN 202110996288 A CN202110996288 A CN 202110996288A CN 113566716 B CN113566716 B CN 113566716B
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- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
Abstract
The invention belongs to the technical field of optical precision detection, and discloses a device and a method for measuring micro relative displacement of a reflecting mirror component in a vibration environment. The invention solves the problems of low measurement precision, complex erection, damage to the reflector in the measurement process and the like in the relative displacement measurement process of the reflector component, and has the characteristics of simple structure, good rigidity, simple erection, high measurement precision, no damage to the reflector measurement and the like.
Description
Technical Field
The invention belongs to the field of optical precision measurement, and relates to a device and a method for measuring micro relative displacement of a reflecting mirror assembly in a vibration environment, which are a main means for realizing the micro relative displacement measurement of the reflecting mirror assembly.
Background
Along with the development of photoelectric products to common light paths, integration and compactness, the reflecting mirror component is used as a main structure of the photoelectric products and is widely applied to coaxial optical systems, off-axis optical systems, turning reflecting optical systems and the like, and the rigidity of the assembled reflecting mirror component plays an important role in imaging of the optical systems. The assembly of the reflector assembly usually adopts an adhesive structure, and the optical parts, the mirror frame and other metal parts are assembled into a whole. The optical machine adhesive structure has compact design, light weight, low cost and easy assembly, but has poor rigidity and certain damping due to the adhesive, so that under the vibration environment, the reflector and the reflector frame can generate relative displacement, the interval between optical elements in the optical system is changed, and the alignment state of the optical surface of the reflector relative to the optical axis and other components in the system is changed, thereby reducing the imaging quality. In order to improve the imaging quality of the optoelectronic product in the vibration environment, the relative displacement of the mirror assembly in the vibration environment before assembly is measured.
The response of the mirror assembly to a vibratory environment is dependent on its fundamental frequency and damping, and under severe dynamic vibration conditions, the mirror displacement can also briefly exceed design tolerances. For the reflector assembly, the greatest damping is structural damping, the structural damping is proportional to displacement, and because the main reflector and the mirror frame are bonded by adopting silicon rubber, after the silicon rubber is solidified, compared with the rigidity of the main reflector frame and the main reflector, the silicon rubber layer is the weakest in rigidity, so that the relative displacement of the reflector and the main mirror frame is represented as the damping of the silicon rubber. Because the physical property of the cured silicone rubber is viscoelastic, the traditional empirical method can only calculate the maximum displacement generated under random vibration, and the accuracy of the result is difficult to ensure by an analytic method due to the change of the vibration environment and the change of the connection mode, so that in most optical machine structures, the measurement of the relative displacement of the reflecting mirror and the mirror frame is required by a test method. The existing method has the following problems in measuring the relative displacement: (1) the measurement accuracy is not high, the relative displacement of the reflecting mirror and the mirror frame is in the micron level, and the accuracy of the common measurement method is difficult to ensure; (2) the common measuring means adopts contact measurement, which is easy to damage the optical element or the film layer in the reflecting mirror component; (3) the existing non-contact method for measuring the micro displacement mainly adopts an echo and interference method to measure, and is easy to cause reflection on the surface of an optical element with roughness less than 0.012, and the existing non-contact measuring method is difficult to accurately receive, so that the micro displacement of the optical element is difficult to measure or inaccurate to measure; (4) the test frequency spectrum commonly used on the vehicle and the vehicle in the random vibration environment is wide in frequency spectrum band, and generally vibrates in the middle of 10Hz to 2000Hz, the environment amplitude is up to 3-5mm, which is about 1000 times of the relative displacement of the reflector and the mirror frame, and the displacement measurement method with high precision cannot be used and measured in the environment of large-amplitude vibration and high-frequency vibration.
Therefore, a new device and method are needed to be able to meet the requirements of high-precision measurement, and to realize the erection and measurement of micro relative displacement in high-frequency and high-amplitude environments without damaging the optical element.
Aiming at the device and the method for measuring the micro relative displacement of the reflecting mirror component in the vibration environment, the invention patent application No. CN106247950A of China discloses a generalized phase shift holographic experimental light path and a generalized phase shift interference beam phase shift extraction algorithm based on the micro displacement measurement of generalized phase shift digital holography, and utilizes the relation between a phase shift value and the micro displacement of the reflecting mirror to calculate the micro-nano scale displacement of the target reflecting mirror. The method has high requirements on the stability of an erected light path, and is not suitable for measuring the micro displacement in an engineering vibration environment; secondly, the method calculates the displacement of the reflector movement through the phase shift value, and has larger error for the displacement measurement under the high-frequency vibration environment. The patent discloses a method and a device for measuring the micro displacement of a laser, which are formed by a laser beam, a cylindrical mirror, a three-dimensional mobile station and an observation screen, wherein the laser is fixed on the mobile station and is reflected to the observation screen through the cylindrical mirror, so that the displacement of the laser can be measured. In the method, noise signals and actual vibration signals cannot be separated through reflection of the cylindrical mirror under a vibration environment, so that measurement displacement data are inaccurate, and the method is complex in erection process and high in requirement on assumption accuracy of the laser and the cylindrical mirror.
Disclosure of Invention
Object of the invention
The purpose of the invention is that: aiming at the problems that in the measuring process of the micro relative displacement of the reflecting mirror component in the vibration environment, the measuring precision is not high, the operation is severe in the vibration environment, the optical reflecting mirror is damaged in the testing process, the relative displacement can not be measured in the random vibration environment and the like, the invention provides the measuring method and the device of the micro relative displacement of the reflecting mirror component in the vibration environment, which have the advantages of high strength, stable structure, good rigidity and convenient and quick erection.
(II) technical scheme
In order to solve the above technical problems, the present invention provides a device for measuring a micro relative displacement of a mirror assembly in a vibrating environment, comprising: the device comprises a vibration connecting plate 1, a vibration connecting rod 2, a detector supporting seat 3, a detector pressing plate 4, a spectrum confocal lens 5, a coupler 6, an LED light source signal controller 7, an optical fiber 8, a data acquisition module 9 and a data post-processing module 10.
The vibration connecting plate 1 is used as a matrix, the flatness requirement is 0.008mm, the parallelism is 0.01mm, and the rigid connection of the mirror assembly to be tested, the vibration connecting plate 1 and the vibration test bench is ensured, and the vibration connecting plate is provided with a mechanical interface connected with the vibration test bench, a mechanical interface connected with the mirror assembly to be tested and a mechanical interface connected with a measuring system; the mechanical fixing part of the measuring system consists of a vibration connecting rod 2, a detector supporting seat 3, a detector pressing plate 4 and a spectrum confocal lens 5; the vibration connecting rod 2 is provided with a waist-shaped connecting hole site which is connected with the vibration connecting plate 1, and the confocal plane of the spectrum confocal lens 5 and the reflecting mirror to be detected can be realized through the waist-shaped connecting hole site; the detector supporting seat 3 is provided with a mechanical interface connected with the vibration connecting rod 2, the transverse and vertical offset caused by processing errors can be compensated through the waist-shaped hole site of the vibration connecting rod 2, the relative position of the spectral confocal lens 5 and the reflecting mirror assembly to be detected is regulated, the optical focus is ensured to be positioned on the reflecting mirror or the mirror frame to be detected, the detector supporting seat 3 is designed into an elastic chuck structure, and the spectral confocal lens 5 can be stably and reliably fixed through the elastic chuck without damaging the lens; the detector pressing plate 4 is connected with the detector supporting seat 3 and is used for fixing the vertical position of the spectral confocal lens 5, so that the rigidity of the spectral confocal lens 5 in a random vibration environment is ensured, namely, the spectral confocal lens is not relatively displaced with the vibration connecting plate 1; the spectral confocal lens 5 is used for converging the light beams and receiving a return signal, and is self-aligning; the coupler 6 is used for coupling the LED optical signals passing through the optical fiber into optical signals with continuous wavelengths, providing target light beams and receiving the optical signals returned by the spectral confocal lens; the LED light source signal controller 7 is used for controlling the generated light source, controlling the light source intensity and the acquisition frequency, converting the light signals with different wavelengths into displacement information through the peak photosensitive intensity, and the LED light source signal controller 7 is connected with the coupler 6 through the optical fiber 8; the data acquisition module 9 and the data post-processing module 10 are integrated in the computer and connected with the LED light source signal controller 7 through a network port to transmit data.
The invention also provides a method for measuring the micro relative displacement of the reflecting mirror component in the vibration environment, which adopts the device for measuring the micro relative displacement of the reflecting mirror component in the vibration environment to measure the displacement of the reflecting mirror component in the random vibration environment.
Wherein, the measuring method comprises the following steps:
the first step: mounting a mirror assembly to be tested
The vibration connecting plate 1 is connected to a vibration test bed through a mechanical interface, the vibration test bed is used for providing random vibration frequency spectrum, and the reflecting mirror assembly to be tested is fixed on the vibration connecting plate 1.
And a second step of: erection of micro displacement measuring system
The vibration connecting rod 2 is connected to the vibration connecting plate 1 through a mechanical interface, and the detector supporting seat 3 is connected to the vibration connecting rod 2 through a mechanical interface. The spectral confocal lens 5 is mounted on the detector supporting seat 3, the elastic chuck of the detector supporting seat is reliably fixed by the screw, the detector pressing plate 4 is rigidly connected with the detector supporting seat 3 and the spectral confocal lens 5, and the vertical position of the spectral confocal lens 5 is limited, namely, the spectral confocal lens 5 and the vibration connecting plate 1 do not relatively displace in a random vibration environment; the coupler 6 is arranged on the spectral confocal lens 5 and is connected with the LED light source signal controller 7 through the optical fiber 8; and data transmission between the data of the LED light source signal controller 7, the data acquisition module 9 and the data post-processing module 10 is realized through a network port.
And a third step of: adjusting confocal points
And opening an LED light source signal controller 7, loosening a mechanical connection interface of the vibration connecting rod 2, the vibration connecting plate 1 and the detector supporting seat 3, and adjusting the vertical position and the transverse position of the confocal point of the spectral confocal lens through a waist-shaped connection hole site on the vibration connecting rod 2 so that the confocal point is respectively overlapped with the measuring point of the reflecting mirror and the measuring point of the reflecting mirror frame.
Fourth step: acquisition and measurement
The vibration test bed applies random vibration frequency, the measuring points of the reflecting mirror and the measuring points of the reflecting mirror frame are collected in the same time domain and the same frequency domain through the data collecting module 9, data are formatted and stored by using a dat file, and displacement data of the reflecting mirror and the reflecting mirror frame at different moments are recorded respectively.
Fifth step: data processing
The reflector displacement data and the reflector frame displacement data acquired by the data acquisition module 9 are processed by the data post-processing module 10, the reflector displacement data and the reflector frame displacement data are respectively overlapped by taking the time domain as the horizontal axis coordinate, and the relative displacement of the reflector and the reflector frame under the random vibration environment at the same moment can be obtained.
(III) beneficial effects
The device and the method for measuring the micro relative displacement of the reflecting mirror component in the vibration environment have the beneficial effects that the device and the method are as follows.
(1) The measuring device and the reflecting mirror component to be measured are positioned in the same random vibration environment, the interference frequency and error of the vibration test environment can be filtered, the accuracy of displacement data is high, and the problem that the micro displacement cannot be measured in the vibration environment is solved.
(2) The non-contact measurement method is adopted to realize the surface displacement measurement of the optical element, and damage to the optical element is eliminated;
(3) The method of spectral confocal is adopted, so that the loss of light energy of an optical element in the vibration process is avoided, the measurement accuracy is low, and the measurement accuracy is improved through a confocal system.
(4) The measuring and analyzing of displacement data of the reflector and the reflector frame at a certain vibration frequency spectrum at the same time can be realized.
(5) The elastic chuck structure and the mechanical supporting structure are adopted, the mechanical structure of the measuring device is simple, the rigidity is high, the operation is convenient, the installation is quick, and the accuracy and the timeliness of data acquisition are improved.
Drawings
FIG. 1 is a schematic diagram of a device for measuring the micro relative displacement of a reflector assembly and a reflector assembly to be measured in a vibration environment;
the device comprises a 1-vibration connecting plate, a 2-vibration connecting rod, a 3-detector supporting seat, a 4-detector pressing plate, a 5-spectrum confocal lens, a 6-coupler, a 7-LED light source signal controller, an 8-optical fiber, a 9-data acquisition module and a 10-data post-processing module.
FIG. 2 is a schematic view of a mirror frame confocal measurement;
fig. 3 is a schematic diagram of a mirror confocal measurement.
Detailed Description
To make the objects, contents and advantages of the present invention more apparent, the following detailed description of the present invention will be given with reference to the accompanying drawings and examples.
Referring to fig. 1 to 3, the device for measuring the micro relative displacement of the mirror assembly in the vibration environment of the present invention comprises: the device comprises a vibration connecting plate 1, a vibration connecting rod 2, a detector supporting seat 3, a spectrum confocal lens 5, a coupler 6, an LED light source signal controller 7, an optical fiber 8, a data acquisition module 9 and a data post-processing module 10; the vibration connecting plate 1 is arranged on a vibration test bed, the mirror assembly to be tested is arranged at the center of the upper surface of the vibration connecting plate 1, two adjacent side surfaces of the vibration connecting plate 1 are respectively provided with a vibration connecting rod 2, the top of each vibration connecting rod 2 is provided with a detector supporting seat 3, each detector supporting seat 3 is provided with a spectrum confocal lens 5, a coupler 6 is arranged above each spectrum confocal lens 5, the two couplers 6 are respectively connected to an LED light source signal controller 7 through corresponding optical fibers 8, the LED light source signal controller 7 is connected with a data acquisition module 9 through a network port, and the data acquisition module 9 is connected with a data post-processing module 10; the LED light source signal controller 7 is opened, light enters the corresponding coupler 6 through the two optical fibers 8 respectively, the coupler 6 couples the light into continuous wavelength optical signals, the spectral confocal lens 5 focuses the continuous wavelength optical signals generated by the coupler 6, the light rays with different wavelengths are ensured to be focused along the axis, the light beams emitted by the two spectral confocal lenses 5 are respectively vertically incident on the reflector frame and the reflector of the reflector assembly to be tested, when the reflector frame or the reflector vibrates, the axial displacement changes, the optical signals with different specific wavelengths are reflected at different positions, the specific wavelength optical signals enter the optical fibers 8 through the spectral confocal lenses 5 and the coupler 6, the optical signals with different wavelengths are transmitted to the LED light source signal controller 7 through the optical fibers 8, the LED light source signal controller 7 converts the optical signals with different wavelengths into displacement signals through peak photosensitive intensity, the displacement data of the reflector and the reflector frame are transmitted to the data acquisition module 9 through a network port, the data acquisition module 9 acquires displacement data of the reflector frame and the data post-processing module 10 in real time, the data post-processing module 10 analyzes the acquired data in time domain coordinates, and eliminates noise and clutter errors, and the displacement of the reflector frame and the reflector after coupling is eliminated during data processing.
In this embodiment, vibration connecting plate 1 is square thick flat plate, and the center is equipped with three sets of 12 equipartitions's screw via holes, corresponds as mechanical interface and vibration test bench's screw hole, guarantees vibration connecting plate 1 and vibration test bench rigid connection, does not take place relative displacement with the vibration test bench at random vibration in-process.
The upper surface of the vibration connecting plate 1 is provided with a boss corresponding to the connecting position of the mirror component to be tested, the boss is provided with a threaded hole corresponding to the screw through hole of the mirror component to be tested, so that the vibration connecting plate 1 and the mirror component to be tested are connected through the screw, the flatness of the contact surface of the vibration connecting plate 1 and the mirror component to be tested is not more than 0.008mm, the parallelism of the vibration connecting plate 1 and the bottom surface is not more than 0.01mm, the mirror component to be tested is ensured to be contacted stably and reliably with the vibration connecting plate 1, and the mirror component to be tested and the vibration connecting plate 1 do not generate relative displacement in the random vibration process.
Two adjacent side surfaces on the vibration connecting plate 1 are respectively provided with a boss, the flatness of the boss is not more than 0.008mm, a threaded hole is formed in the boss and is connected with the vibration connecting rod 2, the vibration connecting rod 2 and the vibration connecting plate 1 are ensured to be contacted stably and reliably, and the vibration connecting rod 2 and the vibration connecting plate 1 do not generate relative displacement in the random vibration process.
The vibration connecting rod 2 is provided with a connecting interface with the vibration connecting plate 1 and a connecting interface with the detector supporting seat 3, the connecting interfaces are kidney-shaped holes, namely oblong holes, and the vertical position and the radial position of the spectrum confocal lens 5 can be adjusted by adjusting the positions of the connecting screws in the kidney-shaped holes, so that errors caused by part machining can be compensated, and the adaptability of the measuring device is improved.
The detector supporting seat 3 is provided with a threaded hole connected with the vibration connecting rod 2 and an elastic chuck structure, the spectral confocal lens 5 is arranged in the elastic chuck structure, the elastic chuck structure not only can effectively fix the spectral confocal lens 5 and restrict the transverse position of the spectral confocal lens 5, but also can protect the optical element of the spectral confocal lens 5 and improve the accuracy of displacement measurement, and the spectral confocal lens 5 is prevented from displacement in the random vibration process.
The detector supporting seat 3 is also provided with a detector pressing plate 4, the detector pressing plate 4 is provided with a connecting interface with the detector supporting seat 3, and is mainly used for fixing the spectral confocal lens 5, restraining the vertical position of the spectral confocal lens 5 and ensuring the rigidity of the spectral confocal lens 5 and the detector supporting seat 3 under a random vibration environment.
In this embodiment, the spectral confocal lens 5 is configured to converge the light beam provided by the coupler 6, and is configured to receive the light beam returned by the mirror assembly to be tested.
The coupler 6 is used for coupling the LED optical signal passing through the optical fiber into an optical signal with continuous wavelength, providing a target light beam, and receiving the optical signal returned by the spectral confocal lens.
The LED light source signal controller 7 is used for controlling the generation of a light source, controlling the intensity and the acquisition frequency of the light source, and converting light signals with different wavelengths into displacement information through the peak photosensitive intensity.
The optical fiber 8 is connected with the coupler 6 and the LED light source signal controller 7 and is used for transmitting optical signals.
The data acquisition module 9 is used for acquiring displacement data, is connected with the LED light source signal controller 7 through a network port, ensures that the displacement data of the reflecting mirror and the reflecting mirror frame can be acquired simultaneously, and improves timeliness and reliability of data acquisition.
The data post-processing module 10 is configured to analyze and process the acquired data in time domain coordinates, and because the data acquisition module acquires displacement data of the reflecting mirror and the reflecting mirror frame at the same time, noise and clutter data are coupled and eliminated during data processing, and a relative displacement of the reflecting mirror and the reflecting mirror frame after error elimination is obtained.
The setting process of the data acquisition module 9 and the processing method of the data post-processing module 10 in this embodiment include the following steps:
the first step: and extracting the frequency spectrum of random vibration of the vibration test bed, and adjusting the acquisition frequency of the data acquisition module 9 to be 10 times of the maximum frequency of the random vibration according to the maximum frequency of the random vibration, so as to ensure the timeliness and accuracy of the data acquisition of the displacement points.
And a second step of: the dat data file acquired by the data acquisition module 9 respectively comprises mirror frame displacement data and mirror displacement data, and the data post-processing module 10 models the data by taking a time domain signal as an abscissa axis and the displacement data as an ordinate axis.
And a third step of: and (3) carrying out superposition processing on the reflector data model and the reflector frame data model, wherein even if the reflector data model and the reflector frame data model respectively carry noise displacement data of the vibration test bed and each support frame, the noise displacement data caused by the vibration test bed and each support frame can be eliminated by superposition at the same moment in the superposition processing process because the reflector data and the reflector frame data are collected simultaneously.
Fourth step: the data post-processing module 10 takes the mirror frame displacement data as a reference, the mirror displacement data is more than the mark of the mirror frame displacement data at the same moment, the mirror displacement data is less than the mark of the mirror frame, the absolute value is taken for the data, and the position change quantity of the mirror and the mirror frame at different moments can be obtained.
Based on the device for measuring the micro relative displacement of the reflecting mirror component in the vibration environment, the method for measuring the micro relative displacement of the reflecting mirror component in the vibration environment comprises the following steps:
the first step: mounting a mirror assembly to be tested
The vibration connecting plate 1 is connected to the vibration test bed through a mechanical interface, and is connected with the vibration test bed through three groups of 12 uniformly distributed screw through holes, so that the vibration connecting plate 1 is ensured not to generate relative displacement with the vibration test bed. The vibration test bed is used for providing random vibration frequency spectrum and fixing the reflecting mirror assembly to be tested on the vibration connecting plate 1.
And a second step of: erection of micro displacement measuring system
The vibration connecting rod 2 is connected to the vibration connecting plate 1 through a mechanical interface, and the detector supporting seat 3 is connected to the vibration connecting rod 2 through a mechanical interface. The spectral confocal lens 5 is mounted on the detector supporting seat 3, the elastic chuck structure of the detector supporting seat is reliably fixed by using screws, and the detector pressing plate 4 is rigidly connected with the detector supporting seat 3 and the spectral confocal lens 5 to limit the vertical position of the spectral confocal lens 5; the coupler 6 is arranged on the spectral confocal lens 5 and is connected with the LED light source signal controller 7 through the optical fiber 8; and data transmission between the data of the LED light source signal controller 7, the data acquisition module 9 and the data post-processing module 10 is realized through a network port.
And a third step of: adjusting confocal points
The LED light source signal controller 7 is turned on, the mechanical connection interfaces of the vibration connecting rod 2, the vibration connecting plate 1 and the detector supporting seat 3 are loosened, and the vertical position and the horizontal position of the confocal point of the spectral confocal lens are adjusted through the waist-shaped connection hole site on the vibration connecting rod 2, as shown in fig. 2 and 3, so that the confocal point is respectively overlapped with the measuring point of the reflecting mirror and the measuring point of the reflecting mirror frame.
Fourth step: acquisition and measurement
The vibration test bed applies random vibration frequency, the measuring points of the reflecting mirror and the measuring points of the reflecting mirror frame are collected in the same time domain and the same frequency domain through the data collecting module 9, data are formatted and stored by using a dat file, and displacement data of the reflecting mirror and the reflecting mirror frame at different moments are recorded respectively.
Fifth step: data processing
The reflector displacement data and the reflector frame displacement data acquired by the data acquisition module 9 are processed by the data post-processing module 10, the reflector displacement data and the reflector frame displacement data are respectively overlapped by taking the time domain as the horizontal axis coordinate, and the relative displacement of the reflector and the reflector frame under the random vibration environment at the same moment can be obtained.
According to the technical scheme, the device has high strength, stable structure, convenient and quick erection and good connection rigidity with the vibration system, and utilizes the optical spectrum confocal principle; the non-contact method is adopted to measure the micro displacement, the measurement accuracy is high, the reflector is not damaged, and the relative displacement of the reflector and the mirror frame at a certain moment is obtained under the random vibration by superposition and quantization of the random vibration.
The foregoing is merely a preferred embodiment of the present invention, and it should be noted that modifications and variations could be made by those skilled in the art without departing from the technical principles of the present invention, and such modifications and variations should also be regarded as being within the scope of the invention.
Claims (10)
1. A device for measuring the micro relative displacement of a reflecting mirror assembly in a vibrating environment, comprising: the device comprises a vibration connecting plate (1), a vibration connecting rod (2), a detector supporting seat (3), a spectrum confocal lens (5), a coupler (6), an LED light source signal controller (7), an optical fiber (8), a data acquisition module (9) and a data post-processing module (10); the vibration connecting plate (1) is arranged on the vibration test bed, the mirror assembly to be tested is arranged at the center position of the upper surface of the vibration connecting plate (1), two adjacent side surfaces of the vibration connecting plate (1) are respectively provided with a vibration connecting rod (2), the top of each vibration connecting rod (2) is provided with a detector supporting seat (3), each detector supporting seat (3) is provided with a spectral confocal lens (5), a coupler (6) is arranged above each spectral confocal lens (5), the two couplers (6) are respectively connected to the LED light source signal controller (7) through corresponding optical fibers (8), the LED light source signal controller (7) is connected with the data acquisition module (9) through a network port, and the data acquisition module (9) is connected with the data post-processing module (10); the LED light source signal controller (7) is opened, light enters the corresponding coupler (6) through the two optical fibers (8), the coupler (6) couples the light into continuous wavelength optical signals, the spectral confocal lens (5) focuses the continuous wavelength optical signals generated by the coupler (6), the light with different wavelengths is ensured to be focused along the axis, the light beams emitted by the two spectral confocal lenses (5) are respectively vertically incident on the reflector frame and the reflector of the reflector assembly to be detected, when the reflector frame or the reflector vibrates, the axial displacement changes, the optical signals with different specific wavelengths are reflected at different displacement positions, the specific wavelength optical signals are transmitted to the LED light source signal controller (7) through the optical fibers (8) through the spectral confocal lenses (5) and the coupler (6), the LED light source signal controller (7) converts the light signals with different wavelengths into displacement signals through peak photosensitive intensity, the displacement signals are transmitted to the data acquisition module (9) through a network port, the displacement data of the reflector and the reflector frame are acquired in real time, the displacement data of the reflector frame are transmitted to the data post-processing module (10), the data are subjected to relative displacement processing on the reflector frame and the time domain coordinate data acquisition module, and the data are subjected to relative coordinate processing, and the error is eliminated.
2. The device for measuring the micro relative displacement of the reflecting mirror assembly in the vibration environment according to claim 1, wherein the vibration connecting plate (1) is a square flat plate, a plurality of uniformly distributed screw through holes are formed in the center of the vibration connecting plate, the vibration connecting plate is correspondingly connected with the threaded holes of the vibration test stand as a mechanical interface, and the vibration connecting plate (1) is rigidly connected with the vibration test stand.
3. The device for measuring the micro relative displacement of the reflecting mirror assembly in the vibration environment according to claim 1, wherein the upper surface of the vibration connecting plate (1) is provided with a boss corresponding to the connecting position of the reflecting mirror assembly to be measured, the boss is provided with a threaded hole corresponding to a screw through hole of the reflecting mirror assembly to be measured, the vibration connecting plate (1) is connected with the reflecting mirror assembly to be measured through a screw, the planeness of the contact surface of the vibration connecting plate (1) and the reflecting mirror assembly to be measured is not more than 0.008mm, and the parallelism of the contact surface of the vibration connecting plate (1) and the bottom surface is not more than 0.01mm.
4. The device for measuring the micro relative displacement of the reflecting mirror assembly in the vibration environment according to claim 1, wherein two adjacent side surfaces on the vibration connecting plate (1) are respectively provided with a boss, the flatness of the boss is not more than 0.008mm, and the bosses are provided with threaded holes which are connected with the vibration connecting rod (2).
5. The device for measuring the micro relative displacement of the reflecting mirror assembly in the vibration environment according to claim 1, wherein the vibration connecting rod (2) is provided with a connection interface with the vibration connecting rod (1) and a connection interface with the detector supporting seat (3), and the connection interfaces are all kidney-shaped holes and are used for adjusting the vertical position, the radial position and the part machining error of the spectrum confocal lens (5) by adjusting the positions of the connection screws in the kidney-shaped holes.
6. A device for measuring the micro relative displacement of a reflecting mirror assembly in a vibrating environment according to claim 1, wherein the detector supporting seat (3) is provided with a threaded hole connected with the vibrating connecting rod (2) and an elastic chuck structure, and the spectral confocal lens (5) is arranged in the elastic chuck structure.
7. A device for measuring the micro relative displacement of a reflecting mirror assembly in a vibrating environment according to claim 1, characterized in that a detector pressing plate (4) is arranged on the detector supporting seat (3), and the detector pressing plate (4) is provided with a connecting interface with the detector supporting seat (3) for fixing a spectrum confocal lens (5) and restraining the vertical position of the spectrum confocal lens (5).
8. A measuring method based on a mirror assembly micro relative displacement measuring device in a vibrating environment according to any one of claims 1 to 7, characterized by the steps of:
the first step: mounting a mirror assembly to be tested
Connecting a vibration connecting plate (1) to a vibration test bed through a mechanical interface, and fixing a reflecting mirror assembly to be tested on the vibration connecting plate (1);
and a second step of: erection of micro displacement measuring system
Connecting a vibration connecting rod (2) to the vibration connecting rod (1) through a mechanical interface, connecting a detector supporting seat (3) to the vibration connecting rod (2) through a mechanical interface, mounting a spectral confocal lens (5) to the detector supporting seat (3), and rigidly connecting a detector pressing plate (4) with the detector supporting seat (3) and the spectral confocal lens (5) to limit the vertical position of the spectral confocal lens (5); the coupler (6) is arranged on the spectral confocal lens (5) and is connected with the LED light source signal controller (7) through the optical fiber (8); the data transmission between the LED light source signal controller (7) and the data acquisition module (9) and the data post-processing module (10) is realized through the network port;
and a third step of: adjusting confocal points
Opening an LED light source signal controller (7), loosening a mechanical connection interface between the vibration connecting rod (2) and the vibration connecting plate (1) as well as between the vibration connecting rod and the detector supporting seat (3), and adjusting the vertical position and the transverse position of the confocal point of the spectrum confocal lens through a waist-shaped connection hole site on the vibration connecting rod (2) so that the confocal point is respectively overlapped with a reflector measuring point and a reflector measuring point;
fourth step: acquisition and measurement
The vibration test bed applies random vibration frequency, acquires the reflector measuring points and the reflector frame measuring points in the same time domain and the same frequency domain through the data acquisition module (9), formats and stores data by using a dat file, and records displacement data of the reflector and the reflector frame at different moments respectively;
fifth step: data processing
The reflector displacement data and the reflector frame displacement data acquired by the data acquisition module (9) are processed by the data post-processing module (10), the reflector displacement data and the reflector frame displacement data are respectively overlapped by taking a time domain as a transverse axis coordinate, and the relative displacement of the reflector and the reflector frame under the same moment in a random vibration environment is obtained.
9. The measuring method according to claim 8, wherein in the fourth step, the frequency spectrum of random vibration of the vibration test stand is extracted before the acquisition measurement is performed, and the acquisition frequency of the data acquisition module (9) is adjusted to be 10 times the maximum frequency of random vibration according to the maximum frequency of random vibration.
10. The measuring method according to claim 8, wherein in the fifth step, when the data post-processing module (10) calculates the relative displacement between the mirror and the mirror frame, the mirror displacement data is recorded as +, the mirror displacement data is larger than the mirror frame displacement data at the same time, the mirror displacement data is recorded as +, the mirror displacement data is smaller than the mirror frame displacement data, and absolute values are obtained for the data, so that the position change amounts of the mirror and the mirror frame at different times are obtained.
Priority Applications (1)
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| CN107339943A (en) * | 2017-04-25 | 2017-11-10 | 哈尔滨工程大学 | The common light path self calibration apparatus for measuring thickness of thin film and measuring method of palarization multiplexing |
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| US5880465A (en) * | 1996-05-31 | 1999-03-09 | Kovex Corporation | Scanning confocal microscope with oscillating objective lens |
| JP2004102228A (en) * | 2002-07-15 | 2004-04-02 | Sunx Ltd | Focusing device, displacement sensor and cofocusing microscope |
| JP5595360B2 (en) * | 2011-09-13 | 2014-09-24 | 三菱電機株式会社 | Optical displacement measuring device |
| CN103575213B (en) * | 2012-08-09 | 2016-06-29 | 中国科学院微电子研究所 | Optical measuring device |
| CN103630075B (en) * | 2012-08-22 | 2016-07-06 | 上海工程技术大学 | A kind of micro-displacement measurement method of light beam and measurement device |
| CN106247950A (en) * | 2016-08-27 | 2016-12-21 | 中国石油大学(华东) | Based on the micro-displacement measurement method that broad sense phase-shifted digital is holographic |
| CN109163662A (en) * | 2018-08-31 | 2019-01-08 | 天津大学 | Spectral Confocal displacement measurement method and device based on length scanning |
| CN111307269B (en) * | 2020-03-11 | 2021-01-01 | 北京理工大学 | Laser confocal/differential confocal Raman spectrum vibration parameter measuring method |
| CN111947580B (en) * | 2020-08-24 | 2021-06-01 | 中国科学院长春光学精密机械与物理研究所 | Multi-spliced sub-mirror multi-degree-of-freedom displacement monitoring system |
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| CN104215176A (en) * | 2014-09-17 | 2014-12-17 | 中国科学院上海光学精密机械研究所 | High accuracy optical interval measurement device and method |
| CN107339943A (en) * | 2017-04-25 | 2017-11-10 | 哈尔滨工程大学 | The common light path self calibration apparatus for measuring thickness of thin film and measuring method of palarization multiplexing |
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