CN204902764U - Move and interfere test system mutually - Google Patents
Move and interfere test system mutually Download PDFInfo
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- CN204902764U CN204902764U CN201520278053.XU CN201520278053U CN204902764U CN 204902764 U CN204902764 U CN 204902764U CN 201520278053 U CN201520278053 U CN 201520278053U CN 204902764 U CN204902764 U CN 204902764U
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- spectroscope
- light source
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- measured lens
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Abstract
The utility model relates to a move and interfere test system mutually, it is main including light source (1), collimating mirror (2), spectroscope (3), measured lens (4), refer to mirror (5) and piezoceramics driver (6), direction according to the light path sets gradually light source (1), collimating mirror (2) and spectroscope (3), measured lens (4) set up the rear side in spectroscope (3), it corresponds spectroscope (3) setting to refer to mirror (5) and piezoceramics driver (6), the light path direction mutually perpendicular of light path direction and measured lens (4). The utility model provides a move and interfere test system mutually is introducing orderly phase shift through certain means between the double -phase dry optical distance of interferometer, photoelectric detector samples to the interference pattern at this in -process, and the light intensity array storage after will digitizing later calculates corresponding phase distribution according to certain mathematic model according to the change of light intensity in the computer.
Description
Technical field
The utility model relates to a kind of phase-shifting interference measuring technology that utilizes and carries out the movable phase interfere test macro tested, and belongs to interferometer field.
Background technology
Shift-phase interferometry is the non-contact measuring technology in units of optical wavelength, has high measuring accuracy and sensitivity, is considered to one of most exact technical detecting precision element.Before more than 200 years, people just notice the interference of light of knowing clearly, and start planned control interference.But until the succeeding in developing of nineteen sixty first ruby laser, interference just starts to be widely used in fields of measurement.Traditional interfere measurement technique is mainly by take a picture or human eye directly observes interference fringe, and the mode of hand computation measurement result is carried out, and inefficiency, subjective error is larger.Phase detection technology in communication field is incorporated in optical measurement by the people such as Bruning in 1974 first, makes classical interfere measurement technique stride into nanoscale from micron order, realizes the important breakthrough of Optical metrology and measurement.Since the eighties, along with the progressively application of technology in optic test such as laser technology, detecting technique, computer technology, image processing techniques and precision optical machineries, Phase-Shifting Interferometry is further developed, achieve in real time, fast, multiparameter, robotization measurement.
Exactly because the high precision of movable phase interfere measuring technology and high sensitivity, slight disturbance all can cause the distortion of interferogram, shake and fuzzy, this makes a lot of measurement all need the vibration isolation table in sealing chamber just can be carried out, seriously limit Phase-Shifting Interferometry test at the scene in application.How eliminating the vibration effect in interferometry, realize on-the-spot test, is one of Main Topics of current interferometry aspect.
Utility model content
In order to overcome the deficiencies in the prior art, resolving the problem of prior art, making up the deficiency of existing existing product in the market.
The utility model provides a kind of movable phase interfere test macro, movable phase interfere test macro mainly comprises light source, collimating mirror, spectroscope, measured lens, reference mirror and piezoelectric ceramic actuator, light source, collimating mirror and spectroscope is set gradually according to the direction of light path, measured lens is arranged on spectroscopical rear side, reference mirror and the corresponding spectroscope of piezoelectric ceramic actuator are arranged, and optical path direction is mutually vertical with the optical path direction of measured lens.
Preferably, above-mentioned light source is LASER Light Source.
Preferably, preferably upper, above-mentioned spectroscope has been sticked part reflective semitransparent film.
Preferably, the light that above-mentioned light source sends arrives measured lens and reference mirror respectively by spectroscope after collimating mirror, after reference mirror, arrive piezoelectric ceramic actuator again.
Preferably, above-mentioned piezoelectric ceramic actuator is connected with a computer for controlling.
The movable phase interfere test macro that the utility model provides between two relevant light paths of interferometer, introduces orderly phase shift by certain means, photodetector is sampled to interferogram in the process, by the light intensity array stores after digitizing in a computer, corresponding PHASE DISTRIBUTION is gone out according to certain mathematical model according to the change calculations of light intensity afterwards.
Accompanying drawing explanation
Fig. 1 is the utility model structural representation.
Reference numeral: 1-light source; 2-collimating mirror; 3-spectroscope; 4-measured lens; 5-reference mirror; 6-piezoelectric ceramic actuator; 7-interferogram.
Embodiment
Understand for the ease of those of ordinary skill in the art and implement the utility model, lower and by reference to the accompanying drawings and embodiment the utility model is described in further detail.
As shown in Figure 1, the movable phase interfere test macro that the utility model provides, movable phase interfere test macro mainly comprises light source 1, collimating mirror 2, spectroscope 3, measured lens 4, reference mirror 5 and piezoelectric ceramic actuator 6, light source 1, collimating mirror 2 and spectroscope 3 is set gradually according to the direction of light path, measured lens 4 is arranged on the rear side of spectroscope 3, reference mirror 5 and the corresponding spectroscope 3 of piezoelectric ceramic actuator 6 are arranged, and optical path direction is mutually vertical with the optical path direction of measured lens 4.
Wherein, light source 1 is LASER Light Source.Spectroscope 3 has been sticked part reflective semitransparent film.
Operationally, the light that light source 1 sends arrives measured lens 4 and reference mirror 5 respectively by spectroscope 3 after collimating mirror 2, after reference mirror 5, arrive piezoelectric ceramic actuator 6 again.Piezoelectric ceramic actuator 6 is connected with a computer for controlling.
The movable phase interfere test macro that the utility model provides make use of phase-shifting interference measuring technology, its principle between two relevant light paths of interferometer, introduces orderly phase shift by certain means, photodetector is sampled to interferogram in the process, by the light intensity array stores after digitizing in a computer, corresponding PHASE DISTRIBUTION is gone out according to certain mathematical model according to the change calculations of light intensity afterwards.The movable phase interfere test macro that the utility model provides, realizes orderly phase shift by piezoelectric ceramic actuator (PZT) 6.In phase shift process, on interferogram, the light intensity change of certain some P (x, y) can be expressed as:
I
i(x，y)＝I
a(x，y)+I
b(x，y)cos[Ф(x，y)+δ(t)]
In formula, Ф (x, y) is the tested initial phase of certain point on corrugated; I
athe DC component that (x, y) is light intensity; I
bthe AC amplitude that (x, y) is light intensity; δ (t) is amount of phase shift.
δ (t) is correspondence 0, pi/2, π, 3 pi/2s respectively.Gather a width interferogram after each phase shift, can obtain because width phase place differs the interferogram of pi/2 successively:
I
1(x，y)＝a(x，y)+b(x，y)cos[Ф(x，y)]
I
2(x，y)＝a(x，y)+b(x，y)cos[Ф(x，y)+π/2]
I
3(x，y)＝a(x，y)+b(x，y)cos[Ф(x，y)+π]
I
4(x，y)＝a(x，y)+b(x，y)cos[Ф(x，y)+3π/2]
Now tested phase place obtains by following formulae discovery:
What obtain in formula is a PHASE DISTRIBUTION being wrapped in [-π ,+π] scope, the Phase-un-wrapping operation on spatial domain just must can reconstruct whole original wave-front.
The embodiment of the above is better embodiment of the present utility model; not limit concrete practical range of the present utility model with this; scope of the present utility model comprises and is not limited to this embodiment, and the equivalence change that all shapes according to the utility model, structure are done is all in protection domain of the present utility model.
Claims (5)
1. a movable phase interfere test macro, it is characterized in that: described movable phase interfere test macro mainly comprises light source (1), collimating mirror (2), spectroscope (3), measured lens (4), reference mirror (5) and piezoelectric ceramic actuator (6), light source (1) is set gradually according to the direction of light path, collimating mirror (2) and spectroscope (3), measured lens (4) is arranged on the rear side of spectroscope (3), reference mirror (5) and piezoelectric ceramic actuator (6) corresponding spectroscope (3) are arranged, optical path direction is mutually vertical with the optical path direction of measured lens (4).
2. movable phase interfere test macro according to claim 1, is characterized in that: described light source (1) is LASER Light Source.
3. movable phase interfere test macro according to claim 1, is characterized in that: described spectroscope (3) has been sticked part reflective semitransparent film.
4. movable phase interfere test macro according to claim 1, it is characterized in that: the light that described light source (1) sends arrives measured lens (4) and reference mirror (5) respectively by spectroscope (3) after collimating mirror (2), arrives piezoelectric ceramic actuator (6) after reference mirror (5) again.
5. according to the movable phase interfere test macro one of claim 1-4 Suo Shu, it is characterized in that: described piezoelectric ceramic actuator (6) is connected with a computer for controlling.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520278053.XU CN204902764U (en) | 2015-04-28 | 2015-04-28 | Move and interfere test system mutually |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520278053.XU CN204902764U (en) | 2015-04-28 | 2015-04-28 | Move and interfere test system mutually |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204902764U true CN204902764U (en) | 2015-12-23 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520278053.XU Expired - Fee Related CN204902764U (en) | 2015-04-28 | 2015-04-28 | Move and interfere test system mutually |
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| CN (1) | CN204902764U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106247950A (en) * | 2016-08-27 | 2016-12-21 | 中国石油大学(华东) | Based on the micro-displacement measurement method that broad sense phase-shifted digital is holographic |
-
2015
- 2015-04-28 CN CN201520278053.XU patent/CN204902764U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106247950A (en) * | 2016-08-27 | 2016-12-21 | 中国石油大学(华东) | Based on the micro-displacement measurement method that broad sense phase-shifted digital is holographic |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20151223 Termination date: 20160428 |