CN104613881A - Lens center thickness measuring device and method based on double face confocal measurement - Google Patents

Lens center thickness measuring device and method based on double face confocal measurement Download PDF

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Publication number
CN104613881A
CN104613881A CN201510071930.0A CN201510071930A CN104613881A CN 104613881 A CN104613881 A CN 104613881A CN 201510071930 A CN201510071930 A CN 201510071930A CN 104613881 A CN104613881 A CN 104613881A
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China
Prior art keywords
lens
optic probe
thickness
measurement
optic
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CN201510071930.0A
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Chinese (zh)
Inventor
姚红兵
李丽淋
吴迪富
孙玉娟
单国云
吴广剑
薛海燕
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江苏宇迪光学股份有限公司
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Priority to CN201510071930.0A priority Critical patent/CN104613881A/en
Publication of CN104613881A publication Critical patent/CN104613881A/en

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Abstract

The invention discloses a lens center thickness measuring device based on double face confocal measurement. The device is characterized by comprising a controller with a spectrograph, an optical probe I, a two-dimensional moving frame, a lens clamp, an optical probe II, a support and a computer. The optical probe I, the two-dimensional moving frame and the optical probe II are all fixed on the support, the lens clamp is clamped on the two-dimensional moving frame, the controller is connected with the optical probe I and the optical probe II through optical fibers, the two-dimensional moving frame is located between the two optical probes, and the computer is connected with the controller with the spectrograph through a data line. The device has the advantage that 1 each optical probe is only required to detect first peak of return wavelength, the problem that the false peak is required to be recognized under the condition that a lens is coated by a film is solved, and thickness measurement of the lens coated by the film is achieved; 2 two optical probes are utilized to reduce errors caused by the fact that light enters the lens to be refracted and reflected, and measurement accuracy is improved; 3 the method can be used for thickness measurement of the opaque object allowing double-face reflection, and the measurement range of the confocal measurement is expanded.

Description

A kind of based on two-sided confocal lens center thickness measurement mechanism and measuring method
Technical field
The present invention relates to a kind of based on two-sided confocal lens center thickness measurement mechanism and the measuring method utilizing it, belong to optical lens measuring field.
Background technology
Lens have three basic parameters: center thickness, refractive index and radius-of-curvature, and in optical field, lens center thickness manufacturing tolerance is the key factor affecting optical system imaging.
The method of existing measurement lens center thickness has contact type measurement and non-contact measurement two kinds.
In contact type measurement, generally use the measurer such as slide calliper rule, mircrometer gauge to the airspace of the center thickness and mirror group that measure lens.It is slowly and not accurate that such method one carrys out measuring speed, and two polished surface or the coated surface scratches easily making measured lens, cause after being assembled into instrument, adds additional the parasitic light of system.
Non-contact measuring technology development in recent years is very rapid, there is advantages such as fast, accurately, not damaging, also more and more be subject to now everybody attention and utilization, such as patent CN102435146 and patent CN203100685 just respectively propose a kind of device measuring lens center thickness based on confocal method, and what adopt is all contactless measurements.But all need light to enter in lens in these two kinds of patents and occur to reflect then to be returned by reflection to reflect again, this is the inevasible precision decreasing this kind of measuring method just, also can there is larger problem when measuring plated film lens simultaneously.
Summary of the invention
The object of the invention is: provide a kind of based on two-sided confocal lens center thickness measurement mechanism.This device is that the light that sent by light source is by being coupled into optic probe, then confocal principle is utilized, optic probe I can receive the light that upper surface is reflected back, and optic probe II receives the light that lower surface is launched back, then by data feedback can be obtained the center thickness of lens to computing machine.
To achieve these goals, technical scheme of the present invention is:
A kind of based on two-sided confocal lens center thickness measurement mechanism, it comprises the controller containing spectrometer, optic probe I, two-dimensional movement frame, lens holder, optic probe II, support and computing machine, described optic probe I, two-dimensional movement frame and optic probe II are all fixed on support, described lens holder is installed on two-dimensional movement frame, the described controller containing spectrometer is connected with optic probe II with optic probe I respectively by optical fiber, described optic probe I and optic probe II just to arrange and two optic probes be centrally located on same axis, described two-dimensional movement chord position is between two optic probes, and the central axis of two-dimensional movement frame and two optic probes is perpendicular, described computing machine is connected to receive data with the controller containing spectrometer by data line.
Utilize said lens center thickness measurement mechanism to measure, concrete steps are: first demarcate with the flat board that known thickness is d; Then in lens holder, measured lens is put into, make itself and optic probe I and the same optical axis of optic probe II, control two-dimensional movement frame by computing machine to move, measure maximum/little value of measured lens a line thickness, the optical measurement point of system moves back on this line thickness extreme point by movable stand, the lens thickness column scan perpendicular to this line is done by this point, measure maximum/little value of these row, this extreme point is exactly measure the central point of lens, thus institute's Thickness Measurement by Microwave also centered by thickness; In running order at optic probe I, at this time computing machine can record the displacement Z1 of confocal response signal movement by the wavelength of feedback; In running order at optic probe II, at this time computing machine can record the displacement Z2 of confocal response signal movement by the wavelength of feedback; Finally by computer calculate display lens center thickness D=d+Z1+Z2.
The invention has the beneficial effects as follows:
1, each optic probe only need detect the first peak returning wavelength, solves and need identification ghost peak Problems existing in glasses lens plated situation, can realize measurement plated film lens being carried out to thickness;
2, make use of two optic probes, deducted, because light enters in lens, the error that refraction reflection waits generation has occurred, improve the precision of measurement;
3, this measuring method can be used in two-sided reflection but the thickness measure of opaque object simultaneously, has widened the measurement range measured based on confocal method.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention.
Fig. 2 is schematic diagram of the present invention.
Wherein, 1, controller, 2, optic probe I, 3, two-dimensional movement frame, 4, lens holder, 5, optic probe II, 6, support, 7, computing machine, 8, optical fiber, 9, data line.
Embodiment
As shown in Figure 1, a kind of based on two-sided confocal lens center thickness measurement mechanism, it comprises the controller 1 containing spectrometer, optic probe I 2, two-dimensional movement frame 3, lens holder 4, optic probe II 5, support 6 and computing machine 7, optic probe I 2, two-dimensional movement frame 3 and optic probe II 5 are all fixing on the frame 6, lens holder 4 is installed on two-dimensional movement frame 3, controller 1 containing spectrometer is connected with optic probe II 5 with optic probe I 2 respectively by optical fiber 8, optic probe I 2 and optic probe II 5 just to arrange and two optic probes be centrally located on same axis, two-dimensional movement frame 3 is between two optic probes, and the central axis of two-dimensional movement frame 3 and two optic probes is perpendicular, computing machine 7 is connected to receive data with the controller 1 containing spectrometer by data line 9.
During concrete measurement, open light source, first demarcate with the flat board that known thickness is d; Then in lens holder, measured lens is put into, make itself and optic probe I and the same optical axis of optic probe II, control two-dimensional movement frame by computing machine to move, measure maximum/little value of measured lens a line thickness, the optical measurement point of system moves back on this line thickness extreme point by movable stand, the lens thickness column scan perpendicular to this line is done by this point, measure maximum/little value of these row, this extreme point is exactly measure the central point of lens, thus institute's Thickness Measurement by Microwave also centered by thickness; In running order at optic probe I, at this time computing machine can record the displacement Z1 of confocal response signal movement by the wavelength of feedback; In running order at optic probe II, at this time computing machine can record the displacement Z2 of confocal response signal movement by the wavelength of feedback; Finally by computer calculate display lens center thickness D=d+Z1+Z2.
Principle of the present invention is: as shown in Figure 2, according to confocal method principle, when measured lens is placed in measurement range, the detection light sent from light source through optics into focus to measured lens, if in the focus that object is assembled at certain wavelength just, then the light of this wavelength reflects at lens surface, and the light of reflection converges to fibre-optical probe by optical system.The light reflected gives the controller containing spectrometer by Optical Fiber Transmission, carries out spectral analysis and again the data obtained is transferred to computing machine, finally determine measured lens thickness by data processing.Beam splitting system in Fig. 2 is spectrometer and computing machine.

Claims (2)

1. one kind based on two-sided confocal lens center thickness measurement mechanism, it is characterized in that: comprise the controller containing spectrometer, optic probe I, two-dimensional movement frame, lens holder, optic probe II, support and computing machine, described optic probe I, two-dimensional movement frame and optic probe II are all fixed on support, described lens holder is installed on two-dimensional movement frame, the described controller containing spectrometer is connected with optic probe II with optic probe I respectively by optical fiber, described optic probe I and optic probe II just to arrange and two optic probes be centrally located on same axis, described two-dimensional movement chord position is between two optic probes, and the central axis of two-dimensional movement frame and two optic probes is perpendicular, described computing machine is connected with the controller containing spectrometer by data line, in order to receive data.
2. the method for the measurement utilizing the lens center thickness measurement mechanism described in claim 1 to carry out, is characterized in that: measuring process is: first demarcate with the flat board that known thickness is d; Then in lens holder, measured lens is put into, make itself and optic probe I and the same optical axis of optic probe II, control two-dimensional movement frame by computing machine to move, measure maximum/little value of measured lens a line thickness, optical measurement point moves back on this line thickness extreme point by movable stand, the lens thickness column scan perpendicular to this line is done by this point, measure maximum/little value of these row, this extreme point is exactly measure the central point of lens, thus institute's Thickness Measurement by Microwave also centered by thickness; In running order at optic probe I, at this time computing machine can record the displacement Z1 of confocal response signal movement by the wavelength of feedback; In running order at optic probe II, at this time computing machine can record the displacement Z2 of confocal response signal movement by the wavelength of feedback; Finally by computer calculate display lens center thickness D=d+Z1+Z2.
CN201510071930.0A 2015-02-12 2015-02-12 Lens center thickness measuring device and method based on double face confocal measurement CN104613881A (en)

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Cited By (12)

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CN105157584A (en) * 2015-08-31 2015-12-16 江苏大学 On-line measurement apparatus and method of thickness of non-contact object
CN105203036A (en) * 2015-10-22 2015-12-30 茂莱(南京)仪器有限公司 Device and method for measuring thickness of center of lens according to non-contact method
CN105526901A (en) * 2015-12-01 2016-04-27 中国航空工业集团公司洛阳电光设备研究所 Device and method for measuring central thickness of spherical part
CN106441122A (en) * 2016-10-09 2017-02-22 佛山市北创光电科技有限公司 Thickness gauge
CN106556349A (en) * 2015-09-24 2017-04-05 上海思信科学仪器有限公司 Water film thickness measuring instrument
CN106556348A (en) * 2015-09-24 2017-04-05 上海思信科学仪器有限公司 Sapphire thickness measurement equipment
CN107990833A (en) * 2017-11-06 2018-05-04 南京珂亥韧光电科技有限公司 Optical coating lens center thickness measuring device and method
CN108955549A (en) * 2018-09-11 2018-12-07 深圳立仪科技有限公司 A kind of two-sided measuring thickness device of translucent material
CN109000571A (en) * 2018-09-11 2018-12-14 中国科学院光电技术研究所 A kind of consistency of thickness detection device
CN109341554A (en) * 2018-12-24 2019-02-15 上海集成电路研发中心有限公司 A kind of device and method measuring film thickness
CN109458939A (en) * 2018-12-18 2019-03-12 南京理工大学 With the lens center thickness measurement method combined of quickly feeling relieved
CN110926397A (en) * 2019-12-25 2020-03-27 中国计量科学研究院 Transparent circular hole calibration method for pose of double sensors in confocal thickness measurement

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Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105157584B (en) * 2015-08-31 2018-10-09 江苏大学 A kind of on-line measurement device and method of non-contact object thickness
CN105157584A (en) * 2015-08-31 2015-12-16 江苏大学 On-line measurement apparatus and method of thickness of non-contact object
CN106556349A (en) * 2015-09-24 2017-04-05 上海思信科学仪器有限公司 Water film thickness measuring instrument
CN106556348A (en) * 2015-09-24 2017-04-05 上海思信科学仪器有限公司 Sapphire thickness measurement equipment
CN105203036A (en) * 2015-10-22 2015-12-30 茂莱(南京)仪器有限公司 Device and method for measuring thickness of center of lens according to non-contact method
CN105203036B (en) * 2015-10-22 2018-08-28 茂莱(南京)仪器有限公司 The device and method that eyes with non-contact method measures lens centre thickness
CN105526901A (en) * 2015-12-01 2016-04-27 中国航空工业集团公司洛阳电光设备研究所 Device and method for measuring central thickness of spherical part
CN106441122A (en) * 2016-10-09 2017-02-22 佛山市北创光电科技有限公司 Thickness gauge
CN107990833A (en) * 2017-11-06 2018-05-04 南京珂亥韧光电科技有限公司 Optical coating lens center thickness measuring device and method
CN107990833B (en) * 2017-11-06 2020-11-20 南京珂亥韧光电科技有限公司 Device and method for measuring central thickness of optical coated lens
CN109000571A (en) * 2018-09-11 2018-12-14 中国科学院光电技术研究所 A kind of consistency of thickness detection device
CN108955549A (en) * 2018-09-11 2018-12-07 深圳立仪科技有限公司 A kind of two-sided measuring thickness device of translucent material
CN109458939A (en) * 2018-12-18 2019-03-12 南京理工大学 With the lens center thickness measurement method combined of quickly feeling relieved
CN109341554A (en) * 2018-12-24 2019-02-15 上海集成电路研发中心有限公司 A kind of device and method measuring film thickness
CN109341554B (en) * 2018-12-24 2020-09-04 上海集成电路研发中心有限公司 Device and method for measuring film thickness
CN110926397A (en) * 2019-12-25 2020-03-27 中国计量科学研究院 Transparent circular hole calibration method for pose of double sensors in confocal thickness measurement

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Application publication date: 20150513