CN104296698A - Method for measuring evenness of optical surface with ultrahigh precision - Google Patents
Method for measuring evenness of optical surface with ultrahigh precision Download PDFInfo
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- CN104296698A CN104296698A CN201410587349.XA CN201410587349A CN104296698A CN 104296698 A CN104296698 A CN 104296698A CN 201410587349 A CN201410587349 A CN 201410587349A CN 104296698 A CN104296698 A CN 104296698A
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Abstract
The invention discloses a method for measuring evenness of an optical surface with ultrahigh precision. At first, a broadband weak coherent light source and an optical spectrum analyzer are started, before a measured optical element is placed, the optical spectrum analyzer detects reference light signals, namely a spectrum of the broadband weak coherent light source, reflected by a coated optical fiber end face, and the spectrum is recorded and stored; secondly, the measured optical element is placed nearby a focal plane of a focusing lens of an optical fiber probe, the distance between the measured optical element and the optical fiber probe is adjusted, optical fiber polarization controllers are adjusted, the contrast ratio of interference signals collected on the optical spectrum analyzer is made to be the highest, a scanning galvanometer is controlled to move through a computer, measuring light beams are made to move on the measured optical element, and the optical spectrum analyzer is controlled to collect and store corresponding interference signals at the moment; finally, the collected interference signals are processed, so evenness information of the measured optical surface can be obtained. The method has the advantages that anti-interference capacity is high and measurement accuracy is high.
Description
Technical field
The present invention relates to the technical field of optical measurement, refer in particular to a kind of optical surface roughness measurement method of superhigh precision.
Background technology
In optical element processing and manufacturing field, the flatness measuring optical surface is an extremely important job.The flatness information of optical surface can the formulation of processing technology of guiding optics element, also can reflect the processing and manufacturing level of product simultaneously.
In optical interferometry, the information of tested optical surface is characterized with the form of optical strength striped, by the record of interference fringe with analyze the flatness information that just can obtain optical surface.In classic method, the extraction of tested phase place is by realizing the interpretation of interference fringe, and this visual measuring method precision is lower, usually can reach the precision of about 1/10th wavelength.Contemporary optics interfere measurement technique introduces phase shifting method, by changing the phase differential in optical interference circuit between reference arm and signal arm, record the interferogram under several out of phase differences, adopt suitable algorithm to calculate the flatness information that just can extract optical surface, be called that phase shift interference is measured.The optical surface roughness measurement instrument occurred based on phase shift interference principle is called phase shifting interferometer, it uses phase-shifter to produce phase shift modulated (as piezoelectric ceramics etc., by applying the voltage changed on piezoelectric ceramics, it is made to produce different electrostriction displacements, change the optical path difference between reference arm and signal arm in optical interference circuit, thus the phase differential between change two-arm), this phase shifting interferometer signal to noise ratio (S/N ratio) is higher, and measuring accuracy can reach 1/100 wavelength usually.
But, because the phase shift modulated speed of current phase-shifter is slower, or the placement property due to phase-shifter self is subject to ambient temperature and humidity impact, and the existence of the disturbing factor such as air turbulence in dephasing processes, actual phase-shift phase often departs from default phase-shift phase, and this have impact on stability and the accuracy of measurement result greatly.
Summary of the invention
The object of the invention is to reduce phase shift modulated error, improve stability and the precision of interferometry, there is provided a kind of weak coherent light source, broadband that uses as measurement light source, the optical surface roughness measurement method utilizing the superhigh precision of spectrum generation phase shift, compared with traditional phase shifting interferometer, the roughness measurement of optical surface can be realized under the prerequisite not needing phase-shifter, not only reduce the cost of interference measuring instrument, there is antijamming capability strong, measuring accuracy high simultaneously.
For achieving the above object, technical scheme provided by the present invention is: a kind of optical surface roughness measurement method of superhigh precision, adopt weak coherent light source, broadband, spectroanalysis instrument, fiber coupler, coated optical fibre, optical fiber polarization controller, fibre-optical probe, wherein, weak coherent light source, described broadband and spectroanalysis instrument respectively by Fiber connection to two ports of fiber coupler the same side, described coated optical fibre and fibre-optical probe are connected to two ports of fiber coupler opposite side, described coated optical fibre is arranged on optical fiber polarization controller, its output end face is coated with highly reflecting films, the beam reflection back into optical fibers coupling mechanism that can will transmit in this optical fiber, and spin fiber Polarization Controller can change the polarization state of light beam.
In phase shift interference is measured, on testee, the interference signal I (x, y) of any point (x, y) can be expressed as:
I(x,y)＝A(x,y)+B(x,y)cos[φ(x,y)+δ(x,y)]
Wherein, A (x, y), B (x, y), φ (x, y), δ (x, y) represent the background intensity of interference signal, modulate intensity, the phase place of testee and the phase-shift phase modulation of introducing respectively.Usually, in phase shift interference is measured, introduce phase-shift phase modulation by certain method, just can be obtained the phase information of testee by the above interferogram of three width.But because phase shift modulated speed placement property that is comparatively slow and phase-shifter self is subject to ambient temperature and humidity impact, and the existence of the disturbing factor such as air turbulence in dephasing processes, actual phase-shift phase often departs from default phase-shift phase, and this becomes the main cause affecting phase-shift measurement precision.
In scheme proposed by the invention, we use weak coherent light source, broadband as measurement light source, and the interference signal recorded can be expressed as:
I
i(x,y)＝A(x,y)+B(x,y)cos[φ
i(x,y)]
Wherein, I
i(x, y), A (x, y), B (x, y), φ
i(x, y) represents that weak coherent light source, broadband medium wavelength is λ respectively
ithe interference strength of light-wave irradiation when testee, the background light intensity of interference signal, the modulation light intensity of interference signal, and the phase place of testee.
φ
i(x, y) can be expressed as:
Wherein h (x, y) represents light path when measuring, λ
0represent the initial wavelength of weak coherent light source, broadband service band.Visible, wavelength is λ
ilight irradiating object on the phase place of any point (x, y) to can be regarded as initial wavelength be λ
0the phase place that obtains of monochromatic light exposure object and additional phase shift amount δ
i(x, y) sum.Additional phase shift amount and wavelength are inversely proportional to, namely linear with wave vector.Therefore, when using weak coherent light source, broadband as measurement light source and to use spectroanalysis instrument to gather interference signal, the phase information that the light irradiating object of different wave length in weak coherent light source, broadband obtains can be regarded as phase shift modulated process.This measuring method does not need to use extra phase-shifter, reduces the cost of system and the complexity of system.
When needs carry out optical surface roughness measurement, first weak coherent light source, described broadband and spectroanalysis instrument is opened, before not placing the measured optical unit, described spectroanalysis instrument detects the reference optical signal that coated optical fibre end face reflection returns, the i.e. spectrum in broadband weak coherent light source, records and preserves this spectrum; Near the condenser lens focal plane afterwards the measured optical unit being placed on described fibre-optical probe, adjustment distance between the two, and adjust described optical fiber polarization controller, make the contrast of the interference signal that described spectroanalysis instrument collects the highest, then control scanning galvanometer motion by computing machine, measuring beam is moved on the measured optical unit, meanwhile, controls spectroanalysis instrument collection and store corresponding interference signal; Finally, process the interference signal collected, can obtain the flatness information of tested optical surface, its treatment scheme is as follows:
1) spectral signal in the weak coherent light source, broadband collected in advance is utilized to be normalized the interference signal that spectroanalysis instrument detects;
2) interference signal after normalized is converted to wave number space by wavelength space, and carries out interpolation resampling at equal intervals by frequency;
3) Fourier transform is carried out to the data after resampling, remove DC component, then carry out inverse Fourier transform, obtain processing signals;
4) from the starting point of processing signals, choose the data point at phase-shift phase interval successively, utilize these data points in conjunction with phase shift algorithm, calculate the wrapped phase φ representated by interference fringe
1;
5) previous step 1 is repeated to the interference signal of all sensing points) to step 4) operation, obtain the wrapped phase φ of all sensing points
1, after separating parcel, obtain the phase place change φ of optical element surface;
6) formula is utilized
λ
1for the start wavelength in weak coherent light source, broadband, the relative altitude information of all sensing points on optical element surface can be obtained, i.e. the flatness information of optical surface.
Weak coherent light source, described broadband is be operated in the pulse of near-infrared band or the weak coherent light source, broadband of continous way, and can be super-radiance light emitting diode light source or femtosecond laser super continuum source, its centre wavelength be λ
c, start wavelength is λ
1, spectral bandwidth is Δ λ; Described spectroanalysis instrument can detect the whole service band in weak coherent light source, broadband; Described fiber coupler is Michelson structure, can center transmission wavelength be λ
c, bandwidth is the broadband light of Δ λ.
Described fibre-optical probe includes a collimation lens, a two-dimensional scanning mirrors and a condenser lens, eyeglass rotation center and the condenser lens three of described collimation lens, two-dimensional scanning mirrors are coaxial, and described two-dimensional scanning mirrors is positioned in the back focus of condenser lens near the center of lens of condenser lens; In measuring process, the light beam exported by weak coherent light source, described broadband is divided into two bundles after fiber coupler, wherein light beam returns fiber coupler through plated film end face after transmitting in coated optical fibre, another light beam returns fiber coupler by the measured optical unit surface after fibre-optical probe, the equivalent optical path of two-beam.
Compared with prior art, tool has the following advantages and beneficial effect in the present invention:
1, use weak coherent light source, broadband as measurement light source, utilize broadband spectral to produce phase shift, do not need to use phase-shifter, reduce cost and the system complexity of phase shift interference measurement;
2, reduce the impact of environmental factor on measurement result, ensure that stability and the accuracy of measurement;
3, the critical piece of the inventive method adopts fiber optic component, level of integrated system is high, Measuring Time depends primarily on the sample rate of spectroanalysis instrument, and current rapid spectrometer technology can realize the sample rate up to hundreds of kHz, thus ensure that the inventive method can complete the surface quality detection of optical element in very short time, can be used for the real-time detection of optical element surface, be particularly useful for the on-line measurement monitoring of the surface smoothness in small-sized high-accuracy optical element process.
Accompanying drawing explanation
Fig. 1 adopts by the present invention the connection diagram of parts.
Fig. 2 is any interference signal figure on optical flat.
Fig. 3 is interference signal figure after treatment.
Fig. 4 be utilize phase shift algorithm to extract optical element surface on surface smoothness hum pattern on any line.
Fig. 5 is preset optical surface smoothness information and the comparison diagram of the flatness information recorded.
Embodiment
Below in conjunction with specific embodiment, the invention will be further described.
The optical surface roughness measurement method of the superhigh precision described in the present embodiment, adopt weak coherent light source, broadband 1, spectroanalysis instrument 2, fiber coupler 3, coated optical fibre 4, optical fiber polarization controller 5, fibre-optical probe 6, as shown in Figure 1, weak coherent light source, described broadband 1 and spectroanalysis instrument 2 are respectively by Fiber connection to A, C two ports of fiber coupler 3 the same side, and described coated optical fibre 4 and fibre-optical probe 6 are connected to B, D two ports of fiber coupler 3 opposite side; Wherein, weak coherent light source, described broadband 1 is for being operated in pulse or the continous way light source of near-infrared band, and can be super-radiance light emitting diode light source or femtosecond laser super continuum source, its centre wavelength be λ
c, start wavelength is λ
1, spectral bandwidth is Δ λ; Described spectroanalysis instrument 2 can detect the whole service band in weak coherent light source, broadband; Described fiber coupler 3 is Michelson structure, can center transmission wavelength be λ
c, bandwidth is the broadband light of Δ λ; Described coated optical fibre 4 is arranged on optical fiber polarization controller 5, its output end face is coated with highly reflecting films, the beam reflection back into optical fibers coupling mechanism 3 that can will transmit in this optical fiber, and spin fiber Polarization Controller 5 can change the polarization state of light beam, thus obtain the better interference fringe of contrast; Described fibre-optical probe 6 includes a collimation lens, a two-dimensional scanning mirrors and a condenser lens, eyeglass rotation center and the condenser lens three of described collimation lens, two-dimensional scanning mirrors are coaxial, and described two-dimensional scanning mirrors is positioned in the back focus of condenser lens near the center of lens of condenser lens; In measuring process, the light beam exported by weak coherent light source, described broadband is divided into two bundles after fiber coupler, wherein light beam returns fiber coupler through plated film end face after transmitting in coated optical fibre, another light beam returns fiber coupler by the measured optical unit surface after fibre-optical probe, the equivalent optical path of two-beam.
When needs carry out optical surface roughness measurement, first weak coherent light source, described broadband 1 and spectroanalysis instrument 2 is opened, before not placing the measured optical unit, described spectroanalysis instrument 2 detects the reference optical signal that coated optical fibre 4 end face reflection returns, the i.e. spectrum in broadband weak coherent light source, records and preserves this spectrum, near the condenser lens focal plane afterwards the measured optical unit being placed on described fibre-optical probe 6, adjustment distance between the two, and adjust described optical fiber polarization controller 5, making the contrast of the interference signal that described spectroanalysis instrument 2 collects, the highest (its concrete operations are placed on by the measured optical unit to have height below described fibre-optical probe with on the working face of angular setting knob, distance between adjustment the measured optical unit and fibre-optical probe, the measured optical unit surface is made to be positioned near the focal plane of condenser lens, spectroanalysis instrument occurs the interference fringe in 3 ~ 5 cycles, adjust optical fiber polarization controller afterwards, the contrast of interference fringe is made to reach maximum), then control scanning galvanometer motion by computing machine, measuring beam is moved on the measured optical unit, meanwhile, control spectrometer collection and store corresponding interference signal (its concrete operations are the adjustment height of working face and angulation knob, make detecting light beam when the measured optical unit needs search coverage interscan, spectroanalysis instrument can be observed the interference fringe in 3 ~ 5 cycles, while computer controlled damping mirror motion, spectrometer collection interference signal, also preserves data record in a computer), finally, process the interference signal collected, can obtain the flatness information of tested optical surface, its treatment scheme is as follows:
1) spectral signal in the weak coherent light source, broadband collected in advance is utilized to carry out removal zero-frequency, amplitude normalization process to the interference signal that spectroanalysis instrument detects;
2) interference signal after normalized is converted to wave number space by wavelength space, and carries out interpolation resampling at equal intervals by frequency;
3) Fourier transform is carried out to the data after resampling, remove DC component, then carry out inverse Fourier transform, obtain processing signals;
4) data point choosing phase-shift phase interval from the starting point of processing signals successively calculates phase place in conjunction with phase shift algorithm, and we choose phase-shift phase successively from processing signals starting point and are spaced apart here
four some I
1, I
2, I
3, I
4, and utilize four-step phase-shifting algorithm:
calculate the wrapped phase φ representated by interference fringe
1;
5) previous step 1 is repeated to the interference signal of all sensing points) to step 4) operation, obtain the wrapped phase φ of all sensing points
1, after separating parcel, obtain the phase place change φ of optical element surface;
6) formula is utilized
the relative altitude information of all sensing points on optical element surface can be obtained, i.e. the flatness information of optical surface.
For verifying the accuracy of measuring method proposed by the invention, We conducted simplation verification, the flatness information on preset optical surface, obtain measurement result by the method that the present invention proposes, contrast with preset value, verify feasibility and the accuracy of measuring method proposed by the invention.On optical flat, the interference signal of any as shown in Figure 2; Interference signal after treatment as shown in Figure 3; Surface smoothness information on the optical element surface utilizing phase shift algorithm to extract on any line as shown in Figure 4, wherein solid line represents default optical surface flatness information, dotted line represents the flatness information utilizing method proposed by the invention to record, difference between the two as shown in Figure 5, the maximal value of measuring error is 16nm, reach the measuring accuracy of 1/100 wavelength, thus demonstrate feasibility and the accuracy of the method.
In sum, after the above scheme of employing, the present invention adopts weak coherent light source, broadband as measurement light source, its coherent length is shorter, when measuring optical element by interferometric method, due to the phase differential gap to some extent of each wavelength light in weak coherent light source, broadband, therefore can collect periodically variable interference signal by spectroanalysis instrument, this interference signal can be equivalent to and use wavelength to be λ
0monochromatic source and the interference signal obtained after using phase-shifter to carry out phase shift modulated, phase shift algorithm can be adopted to extract the flatness information of tested optical surface.Because this method is that the spectrum utilizing broadband weak coherent light to be derived from body produces phase shift, do not need extra phase-shifter, not only reduce cost, and avoid in dephasing processes due to error that environmental impact is introduced, thus ensure that stability and the high precision of measurement result, be worthy to be popularized.
The examples of implementation of the above are only the preferred embodiment of the present invention, not limit practical range of the present invention with this, therefore the change that all shapes according to the present invention, principle are done, all should be encompassed in protection scope of the present invention.
Claims (3)
1. the optical surface roughness measurement method of a superhigh precision, it is characterized in that: adopt weak coherent light source, broadband, spectroanalysis instrument, fiber coupler, coated optical fibre, optical fiber polarization controller, fibre-optical probe, wherein, weak coherent light source, described broadband and spectroanalysis instrument respectively by Fiber connection to two ports of fiber coupler the same side, described coated optical fibre and fibre-optical probe are connected to two ports of fiber coupler opposite side, described coated optical fibre is arranged on optical fiber polarization controller, its output end face is coated with highly reflecting films, the beam reflection back into optical fibers coupling mechanism that can will transmit in this optical fiber, and spin fiber Polarization Controller can change the polarization state of light beam,
When needs carry out optical surface roughness measurement, first weak coherent light source, described broadband and spectroanalysis instrument is opened, before not placing the measured optical unit, described spectroanalysis instrument detects the reference optical signal that coated optical fibre end face reflection returns, the i.e. spectrum in broadband weak coherent light source, records and preserves this spectrum; Near the condenser lens focal plane afterwards the measured optical unit being placed on described fibre-optical probe, adjustment distance between the two, and adjust described optical fiber polarization controller, make the contrast of the interference signal that described spectroanalysis instrument collects the highest, then control scanning galvanometer motion by computing machine, measuring beam is moved on the measured optical unit, meanwhile, controls spectrometer collection and store corresponding interference signal; Finally, process the interference signal collected, can obtain the flatness information of tested optical surface, its treatment scheme is as follows:
1) spectral signal in the weak coherent light source, broadband collected in advance is utilized to be normalized the interference signal that spectroanalysis instrument detects;
2) interference signal after normalized is converted to wave number space by wavelength space, and carries out interpolation resampling at equal intervals by frequency;
3) Fourier transform is carried out to the data after resampling, remove DC component, then carry out inverse Fourier transform, obtain processing signals;
4) from the starting point of processing signals, choose the data point at phase-shift phase interval successively, utilize these data points in conjunction with phase shift algorithm, calculate the wrapped phase φ representated by interference fringe
1;
5) previous step 1 is repeated to the interference signal of all sensing points) to step 4) operation, obtain the wrapped phase φ of all sensing points
1, after separating parcel, obtain the phase place change φ of optical element surface;
6) formula is utilized
λ
1for the start wavelength in weak coherent light source, broadband, the relative altitude information of all sensing points on optical element surface can be obtained, i.e. the flatness information of optical surface.
2. the optical surface roughness measurement method of a kind of superhigh precision according to claim 1, is characterized in that: weak coherent light source, described broadband is the pulse or the continous way light source that are operated in near-infrared band, and its centre wavelength is λ
c, start wavelength is λ
1, spectral bandwidth is Δ λ; Described spectroanalysis instrument can detect the whole service band in weak coherent light source, broadband; Described fiber coupler is Michelson structure, can center transmission wavelength be λ
c, bandwidth is the broadband light of Δ λ.
3. the optical surface roughness measurement method of a kind of superhigh precision according to claim 1, it is characterized in that: described fibre-optical probe includes a collimation lens, a two-dimensional scanning mirrors and a condenser lens, eyeglass rotation center and the condenser lens three of described collimation lens, two-dimensional scanning mirrors are coaxial, and described two-dimensional scanning mirrors is positioned in the back focus of condenser lens near the center of lens of condenser lens; In measuring process, the light beam exported by weak coherent light source, described broadband is divided into two bundles after fiber coupler, wherein light beam returns fiber coupler through plated film end face after transmitting in coated optical fibre, another light beam returns fiber coupler by the measured optical unit surface after fibre-optical probe, the equivalent optical path of two-beam.
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