CN205003080U - Refracting index and thickness synchronous measurement system based on spectral domain interferometer - Google Patents
Refracting index and thickness synchronous measurement system based on spectral domain interferometer Download PDFInfo
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- CN205003080U CN205003080U CN201520484556.2U CN201520484556U CN205003080U CN 205003080 U CN205003080 U CN 205003080U CN 201520484556 U CN201520484556 U CN 201520484556U CN 205003080 U CN205003080 U CN 205003080U
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Abstract
The utility model discloses a refracting index and thickness synchronous measurement system based on spectral domain interferometer based on the low relevant detection system that interferes of spectral domain, is inserted sample arm light path through surveying the sample for partly light beam pierces through is surveyed the sample, and through being surveyed the sample, two parts light does not all shine on a planar mirror and through the reflection retrieval system another part light beam. From by before surveying the sample, form a set of interference signal between the light that returns of rear surface, reflect back from the planar mirror of sample bizhong, pierce through that surveyed the sample and another organizes interference signal through formation between the light beam of sample, survey these two sets of interference signal's spectrum through the spectrum appearance, carry out data acquisition and processing through the computer, can obtain being surveyed the thickness and the refracting index information of sample simultaneously. The advantage that this measurement system has, does not need any component, stable in structure in the mobile system, only needs once to measure the refracting index and the thickness information that can obtain being surveyed the sample simultaneously.
Description
Technical field
The utility model relates to spectral domain and interferes (Spectralinterferometry) technology, particularly relates to a kind of refractive index based on spectral domain interferometer and thickness synchronized measurement system.
Background technology
Refractive index is the Important Parameters of exosyndrome material optical characteristics, has wide influence for the scientific research such as optical design, light wave propagation and industrial circle.Refractive index is relevant to the micromechanism of material itself, and changes as the change of temperature, electromagnetic field, pressure etc. with extraneous parameter, thus produces a series of optical phenomena, as the effect of dispersion, Kerr effect, Faraday effect, photoelastic effect etc. of light.Therefore the funtcional relationship that the refractive index of material and refractive index change with extraneous parameter is accurately measured significant.
At present, measurement transparent sample thickness and refractive index have multiple method, and major part is the technology based on Low coherence Michelson interferometer.The effect of spectral domain interference technique acquired by the reflection characteristic for analyzing nearly optical surface in optical system of low-coherence light source causes great concern, when this technology is applied to optical engineering, a series of great breakthrough is obtained during the fields such as biomedicine, as D.Huang1991 proposes optical chromatography coherent technique (opticalcoherencetomography, OCT) 1-4, this technology in nineteen ninety-five by G.J.Tearney for measuring the refractive index of high scattering tissue, the frequency domain that A.B.Vakhtin2003 proposes is road OCT technology altogether, the Fourier optical fiber OCT technology etc. that X.Liu2008 proposes.Meanwhile, correlation technique is also used to geometric thickness and the refractive index of synchro measure transparent sample.What W.V.Sorin1992 proposed utilizes optics Low coherence reflection technology synchro measure sample geometric thickness and refractive index, the employing that J.Na2009 proposes is from reference spectrum interferometric method measure geometry thickness and refractive index, P.Hlubina2001 proposes the transmitting case that uncompensated Michelson steller interferometer white-light spectrum interferometric method measures the refractive index in quartz glass, the use Michelson that G.D.Gillen2005 proposes, Fabry-Perot (FP) independently measures wafer geometric thickness and refractive index, the optical coherence refractive technique that P.H.Tomlins2008 proposes, the employing that S.Kim2008 proposes is road Low coherence technology synchro measure thickness of sample and refractive index etc. altogether.OCT technology original adoption both arms Michelson interference technology, found that common path interference technology was compacter, more stablize 3,4 afterwards.Such as use Michelson, Fabry-Perot (FP) integrated technology 8, modified OCT technology 9, confocal Low coherence technology etc. 10.
Above-mentioned every prior art has the respective scope of application, also all has some limitations.Particularly, white-light spectrum interference technique needs to carry out accurately moving 7 to the reference mirror of Michelson interferometer; Based on Fabry-Perot interference technology and modified OCT technology, need the anglec of rotation 8,9 of accurate Quality control itself; This accurate movement itself is difficult to reach degree of precision, causes there is larger systematic error.Both arms white light Michelson interferometer does not need to move 5,6 to system unit and sample, but needs sample to be close to reference mirror placement, causes the equipment being difficult to be put into by sample for changing external parameter (temperature, pressure etc.).And above prior art all needs to carry out to placing and not placing sample two states geometric thickness and the refractive index information that twice measurement can measure sample; The pattern of this twice measurement, will certainly inconsistent due to external environment, causes measuring error to increase; And the pattern of this twice measurement, work efficiency is lower.
Utility model content
The utility model provides refractive index based on spectral domain interferometer and thickness synchronized measurement system, and it can obtain refractive index and the thickness information of sample simultaneously to sample one-shot measurement.
This system adopts spectral domain low coherence interference technology, parallel the propagating in same sample arm of two-beam, only have wherein light beam through sample.Sample as a low fineness cleverly FP etalon provide very important compensated information.This system and device is compact, Stability Analysis of Structures, does not need mobile any part, once can complete measurement.This sample under the condition of the temperature control device of external temperature field and thermal expansivity can be regulated to be placed any position in the optical path not affecting to place.
Particular content is as follows:
A kind of refractive index based on spectral domain interferometer of the utility model and thickness synchronized measurement system, comprise wideband light source, fiber optical circulator, sample arm, spectrometer and computing machine, wherein, sample arm comprises the first fiber optic collimator mirror, sample, the first condenser lens and level crossing, spectrometer comprises the second fiber optic collimator mirror, diffraction grating, the second condenser lens and detector C CD.The detecting light beam part entering sample arm is collected through sample and analyzes, another part light beam is not collected through sample and analyzes, detector C CD detection from the forward and backward surface reflection of sample return light signal, the process of returning from flat mirror reflects and the light signal without sample.
Described wideband light source is connected with the first port of fiber optical circulator, and the second port of fiber optical circulator is connected with the first fiber optic collimator mirror in sample arm; The first fiber optic collimator mirror in sample arm and the first condenser lens are placed on the front side of level crossing, and sample is placed between the first fiber optic collimator mirror and the first condenser lens, and only allow the light beam of a part through sample; 3rd port of fiber optical circulator is connected with spectrometer, and respectively through the second fiber optic collimator mirror, diffraction grating, the second condenser lens, alignment detector CCD, the detector C CD in spectrometer is connected with computing machine, and computing machine carries out data processing.
The light that wideband light source sends enters the first port of fiber optical circulator, sample arm is entered through fiber optical circulator second port, light beam diffuses into angle pencil of ray through the first fiber optic collimator mirror, wherein a part of light transmission sample projects on the first condenser lens, focus on level crossing through the first condenser lens, through flat mirror reflects and light beam through the forward and backward surface reflection of sample be back to fiber optical circulator second port along former road, and from fiber optical circulator the 3rd port lead-in light spectrometer; The another part entering sample arm does not focus on level crossing on through the first condenser lens through sample light beam after the first fiber optic collimator mirror expands, fiber optical circulator second port is back to through flat mirror reflects Hou Yanyuan road, and from fiber optical circulator the 3rd port lead-in light spectrometer; Now, two light beams returned from the forward and backward surface of sample interfere, and produce one group of interference signal, and return from flat mirror reflects, interfere with without the light beam of sample through sample, produce another group interference signal.Above two groups of interference signals comprise the information of sample thickness and refractive index, two groups of interference signals be detected device CCD detection to after import computing machine to obtain sample thickness and refractive index simultaneously information by data processings such as Fourier transforms into.
After Fourier's change is carried out to the two groups of interference signals detected, two groups of optical path differences can be drawn, namely two light beams returned from the forward and backward surface of sample interfere the optical path difference Δ 1 of generation, that returns from flat mirror reflects interferes the optical path difference Δ 2 of generation through sample and the light beam without sample returned from flat mirror reflects, if the refractive index of sample is n, the thickness of sample is d, and the refractive index of air is 1, according to the communication theory of light, be easy to get:
Δ1＝2nd………(1)
Δ2＝2d(n-1)…(2)
The above-mentioned system of equations of simultaneous, solves the value drawing sample thickness and refractive index.Said method can the once information recording sample refractive index and thickness simultaneously, is obtained the value of sample thickness and refractive index simultaneously, greatly improve industrial efficiency by data processing compared with previous methods.
Compared with background technology, the utility model has useful technique effect:
1). without the need to the mobile any system unit comprising optical element and sample, the mode of accurate mobile mirror or sample is needed compared to white-light spectrum interference technique, Fabry-Perot interference technology and modified OCT technology, avoid the systematic error that certain part due to mobile system is brought, simplify test operation step, improve accuracy and the degree of accuracy of measurement;
2). require low to the placement location of sample, any position in the optical path can be placed.This restriction sample being close to reference mirror placement is needed compared to both arms white light Michelson interferometer, sample in system described in the utility model the requirement of environmentally control device can be placed on its position needed, to carry out quantified controlling to the external environment condition of sample.Such as installing a baking box or cryostat additional, or the device etc. of pressure, electromagnetic field can changed.System described in the utility model reduces the dependence of sample to position greatly, for the deep refractive index of research sample and the funtcional relationship of external environment condition provide condition extremely easily;
3). by through sample with not through one group of interference signal that sample produces, and from the light that sample upper and lower surface is reflected back produce another group interference signal analyze, using sample as a low fineness cleverly FP etalon provide very important compensated information, complete the measurement of sample thickness and refractive index simultaneously, disposablely complete measurement, simplify test operation step, improve industrial efficiency;
4). in addition, twice measurement completes at one time, and compared with measuring system in the past, the measuring error that the change avoiding environment residing for successively twice measurement brings, improves accuracy.
Accompanying drawing explanation
Fig. 1 is structural representation of the present utility model;
In figure: 1, wideband light source, 2, fiber optical circulator, 3, sample arm, 4, spectrometer, 5, computing machine, the 6, first fiber optic collimator mirror, 7, sample, 8, the first condenser lens, 9, level crossing, the 10, second fiber optic collimator mirror, 11, diffraction grating, 12, the second condenser lens, 13, detector C CD.
Embodiment
Be further described the utility model below in conjunction with drawings and Examples, the purpose of this utility model and effect will become more obvious.
A kind of refractive index based on spectral domain interferometer of the utility model and thickness synchronized measurement system as shown in Figure 1, comprise wideband light source 1, fiber optical circulator 2, sample arm 3, spectrometer 4 and computing machine 5, wherein, sample arm 3 comprises the first fiber optic collimator mirror 6, sample 7, first condenser lens 8 and level crossing 9, spectrometer 4 comprises the second fiber optic collimator mirror 10, diffraction grating 11, second condenser lens 12 and detector C CD13.
Described wideband light source 1 is connected with the first port of fiber optical circulator 2, and the second port of fiber optical circulator 2 is connected with the first fiber optic collimator mirror 6 in sample arm 3; The first fiber optic collimator mirror 6 in sample arm 3 and the first condenser lens 8 are placed on the front side of level crossing 9, and sample 7 is placed between the first fiber optic collimator mirror 6 and the first condenser lens 8, and only allow the light beam of a part through sample 7; 3rd port of fiber optical circulator 2 is connected with spectrometer 4, and respectively through the second fiber optic collimator mirror 10, diffraction grating 11, the second condenser lens 12, alignment detector CCD13, the detector C CD13 in spectrometer 4 is connected with computing machine 5, and computing machine 5 carries out data processing.
The light that wideband light source 1 sends enters the first port of fiber optical circulator 2, sample arm 3 is entered through fiber optical circulator 2 second port, light beam diffuses into angle pencil of ray through the first fiber optic collimator mirror 6, wherein a part of light transmission sample 7 to project on the first condenser lens 8, focus on level crossing 9 through the first condenser lens 8, that reflect through level crossing 9 and through the forward and backward surface reflection of sample 7 light beam is back to fiber optical circulator 2 second port along former road, and from fiber optical circulator 2 the 3rd port lead-in light spectrometer 4; The another part entering sample arm 3 does not focus on level crossing 9 on through the first condenser lens 8 through sample 7 light beam after the first fiber optic collimator mirror 6 expands, reflect Hou Yanyuan road through level crossing 9 and be back to fiber optical circulator 2 second port, and from fiber optical circulator 2 the 3rd port lead-in light spectrometer 4; Now, two light beams returned from the forward and backward surface of sample interfere, and produce one group of interference signal, and return from flat mirror reflects, interfere with without the light beam of sample through sample, produce another group interference signal.Above two groups of interference signals comprise the information of sample 7 thickness and refractive index, and two groups of interference signals are detected after device CCD13 detects and import computing machine 5 obtains sample 7 thickness and refractive index simultaneously information by data processings such as Fourier transforms into.
After Fourier's change is carried out to the two groups of interference signals detected, two groups of optical path differences can be drawn, namely two light beams returned from the forward and backward surface of sample 7 interfere the optical path difference Δ 1 of generation, what be reflected back from level crossing 9 interferes the optical path difference Δ 2 of generation through sample 7 and the light beam without sample 7 be reflected back from level crossing 9, if the refractive index of sample 7 is n, the thickness of sample 7 is d, and the refractive index of air is 1, according to the communication theory of light, be easy to get:
Δ1＝2nd………(1)
Δ2＝2d(n-1)…(2)
The above-mentioned system of equations of simultaneous, solves the value drawing sample thickness and refractive index.Said method can the once information recording sample refractive index and thickness simultaneously, is obtained the value of sample thickness and refractive index simultaneously, greatly improve industrial efficiency by data processing compared with previous methods.
The above is only preferred implementation of the present utility model, it should be pointed out that for those skilled in the art, can also make some improvement under the premise without departing from the principles of the invention, and these improvement also should be considered as protection scope of the present invention.
Claims (4)
1. based on refractive index and the thickness synchronized measurement system of spectral domain interferometer, comprise wideband light source (1), fiber optical circulator (2), sample arm (3), spectrometer (4) and computing machine (5), wherein, sample arm (3) comprises the first fiber optic collimator mirror (6), sample (7), first condenser lens (8) and level crossing (9), spectrometer (4) comprises the second fiber optic collimator mirror (10), diffraction grating (11), second condenser lens (12) and detector C CD (13), it is characterized in that: the detecting light beam part entering sample arm (3) is collected through sample (7) and analyzes, another part light beam is not collected through sample (7) and analyzes, detector C CD (13) detection is front from sample (7), the light signal that rear surface reflects, the process reflected from level crossing (9) and the light signal without sample (7).
2. the refractive index based on spectral domain interferometer according to claim 1 and thickness synchronized measurement system, it is characterized in that: described wideband light source (1) is connected with the first port of fiber optical circulator (2), the second port of fiber optical circulator (2) is connected with the first fiber optic collimator mirror (6) in sample arm (3); The first fiber optic collimator mirror (6) in sample arm (3) and the first condenser lens (8) are placed on the front side of level crossing (9), sample (7) is placed between the first fiber optic collimator mirror (6) and the first condenser lens (8), and only allows the light beam of a part through sample (7); 3rd port of fiber optical circulator (2) is connected with spectrometer (4), from the light beam of the 3rd port outgoing of circulator (2) respectively through the second fiber optic collimator mirror (10), diffraction grating (11), the second condenser lens (12), focus on detector C CD (13), detector C CD (13) in spectrometer (4) is connected with computing machine (5), and computing machine (5) carries out data processing.
3. the refractive index based on spectral domain interferometer according to claim 1 and thickness synchronized measurement system, it is characterized in that: the light that wideband light source (1) sends enters the first port of fiber optical circulator (2), sample arm (3) is entered through fiber optical circulator (2) second port, light beam diffuses into angle pencil of ray through the first fiber optic collimator mirror (6), wherein a part of light transmission sample (7) projects (8) on the first condenser lens, focus on level crossing (9) through the first condenser lens (8), that reflect through level crossing (9) and front through sample (7), the light beam of rear surface reflection is back to fiber optical circulator (2) second port along former road, and from fiber optical circulator (2) the 3rd port lead-in light spectrometer (4).
4. the refractive index based on spectral domain interferometer according to claim 3 and thickness synchronized measurement system, it is characterized in that: the another part entering sample arm (3) does not focus on level crossing (9) on through the first condenser lens (8) through sample (7) light beam after the first fiber optic collimator mirror (6) expands, fiber optical circulator (2) second port is back to through level crossing (9) reflection Hou Yanyuan road, and from fiber optical circulator (2) the 3rd port lead-in light spectrometer (4); Now, two light beams returned from sample (7) forward and backward surface interfere, produce one group of interference signal, and to be reflected back from level crossing (9), interfere through sample (7) and the light beam without sample (7), produce another group interference signal, above two groups of interference signals comprise the information of sample (7) thickness and refractive index, and two groups of interference signals are detected after device CCD (13) detects and import computing machine (5) obtains sample thickness and refractive index simultaneously information by Fourier transform data processing into.
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105044035A (en) * | 2015-07-03 | 2015-11-11 | 南京航空航天大学 | Spectral domain interferometer-based refractive index and thickness synchronous measurement method and system thereof |
| CN107677210A (en) * | 2016-08-01 | 2018-02-09 | 株式会社迪思科 | Measurement apparatus |
| CN109100328A (en) * | 2017-06-21 | 2018-12-28 | 中国石油化工股份有限公司 | A kind of device and method measuring refractive index |
| CN109343024A (en) * | 2018-12-19 | 2019-02-15 | 中国科学院合肥物质科学研究院 | EO-1 hyperion laser radar echo signal beam-splitting optical system and its processing method |
-
2015
- 2015-07-03 CN CN201520484556.2U patent/CN205003080U/en not_active Withdrawn - After Issue
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105044035A (en) * | 2015-07-03 | 2015-11-11 | 南京航空航天大学 | Spectral domain interferometer-based refractive index and thickness synchronous measurement method and system thereof |
| CN105044035B (en) * | 2015-07-03 | 2017-09-05 | 南京航空航天大学 | Refractive index and thickness method for synchronously measuring and system based on spectral domain interferometer |
| CN107677210A (en) * | 2016-08-01 | 2018-02-09 | 株式会社迪思科 | Measurement apparatus |
| CN109100328A (en) * | 2017-06-21 | 2018-12-28 | 中国石油化工股份有限公司 | A kind of device and method measuring refractive index |
| CN109343024A (en) * | 2018-12-19 | 2019-02-15 | 中国科学院合肥物质科学研究院 | EO-1 hyperion laser radar echo signal beam-splitting optical system and its processing method |
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Granted publication date: 20160127 Effective date of abandoning: 20170905 |