CN106018345A - System and method for measuring refractive index of optical plate glass based on short coherence - Google Patents
System and method for measuring refractive index of optical plate glass based on short coherence Download PDFInfo
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- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
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Abstract
The invention discloses a system and a method for measuring refractive index of optical plate glass based on short coherence. The system comprises a Michelson interferometer; a Michelson interference light path is composed of a short coherence light source, a beam splitter prism, a reference reflector and a semi-transparent semi-reflective mirror; the equal arm principle of the Michelson interference light path is utilized and the reference reflector can move back and forth so as to match with the optical path between the semi-transparent semi-reflective mirror and the reflector; the optical path between the semi-transparent semi-reflective mirror and the reflector can be calculated by measuring the moving distance of the reference reflector with a grating ruler; the optical paths between the semi-transparent semi-reflective mirror and the reflector before and after the sample is put in are respectively measured and the optical path between the semi-transparent semi-reflective mirror and the reflector after the sample is rotated for a certain degree is measured, so that the refractive index of the sample can be calculated. The device has a simple structure; the measurement for the physical thickness of optical glass is avoided; high precision measurement for the refractive index of optical glass is realized; an iterative method is adopted for quickly calculating the refractive index of optical glass.
Description
Technical field
The present invention relates to refractive index measurement method and apparatus for measuring refractive index, particularly to a kind of based on short relevant optics
Plate glass refractometry system and method.
Background technology
Along with the development in the field such as Aeronautics and Astronautics and astronomy, increase the requirement to optical system quality and precision,
For ensureing optical system imaging quality, precise measuring optical glass materials refractive index seems more and more important.Heavy caliber is parallel flat
In the national large-scale Optical devices such as plate class component is extensively applied and inertial confinement fusion, astrosurveillance system.Refractive index is such
One important indicator of element, refractive index is not mated will directly affect beam quality and image quality with design.
Existing optical glass material refraction index test method mainly has angle-measuring method and interferometric method two kinds.Angle-measuring method mainly has vertical
The methods such as straight incident method, the method for minimum deviation angle, V prism, auto-collimation, above-mentioned measuring method requires that measuring samples is prepared as special form
Shape, therefore the small-bore sample of general employing replaces heavy caliber glass refraction, but small-bore sample cannot characterize big mouth completely
Footpath glass refraction.Interferometric method mainly has F-P interferometric method, and the method requires that two inner surfacies of interferometer need to be accurate to several with ideal
What plane deviation answers perfect parallelism on 1/20 to 1/100 wavelength, two surfaces, and sample surface shape required precision is higher.
The domestic disclosure of the invention of Application No. CN201480036869.X refractive index measurement method, apparatus for measuring refractive index
And Optical element manufacturing method, be specifically related to be divided into the light from light source tested light and with reference to light, tested light is incorporated into by
In a corpse or other object for laboratory examination and chemical testing and measure and be derived from reference to light and the interference light through the interference the tested light of subject, described method includes
Following steps: by subject being arranged in the medium that its group index is equal to the group index of subject in certain wave strong point
In, measure and be derived from through subject and the tested light of medium and through the interference light of the interference the reference light of medium;Based on
Tested light and the wavelength dependency with reference to the phase contrast between light, determine described specific wavelength;And calculate and described certain wave
The group index of long corresponding medium is as the group index of the subject corresponding with described specific wavelength.This measuring method relates to
The measurement of group index, causes the method device complex, and the method exists computationally intensive problem simultaneously.
A kind of refractive index of transparent materials measuring method of the domestic disclosure of the invention of Application No. CN02159100.8 and dry
Interference measuring apparatus, mainly makes the assembled flat sample of two pieces of symmetric prisms compositions by detected materials, and is placed on Mach-old
On Dare interferometer one arm, producing two-way and interfere, a road is that mach-zehnder is interfered, and another road is the two of assembled flat sample
The equal thickness interference that logical bright finish is formed, a piece in assembled flat sample is fixed, and while another block translates along fixed block, precision is surveyed
Determine variable quantity m1 and m2 of two-way interference fringe in moving process;N=1/ [1-2 (m1/m2)] is utilized to calculate the folding of detected materials
Penetrate rate.The method needs testing sample carries out special technology processing, is not suitable for the light plate glass of large-scale molding
The measurement of refractive index, simultaneously need to utilize the second photelectric receiver and interpretation software just can obtain measurement result, practicality
Relatively low.
Summary of the invention
The present invention solves problem above present in prior art, it is provided that a kind of based on short relevant optical flat glass
Glass refractometry system and method, it is achieved that the high-acruracy survey of heavy caliber glass refraction, it is not necessary to it is special to carry out sample
Processing, simplifies the calculating process of refractive index, and this apparatus structure is simple, easy to maintenance, measures low cost, and practicality is high.
To achieve these goals, the technical solution used in the present invention is:
A kind of based on short relevant optical plate glass refractometry system, short relevant including linearly set gradually
Light source, Amici prism, semi-transparent semi-reflecting lens, plane mirror, Amici prism both sides are respectively arranged with film viewing screen and reference mirror,
Described reference mirror is furnished with the grating scale of recordable reference mirror displacement, wherein, film viewing screen and reference mirror it
Between line light source dry with short-term and semi-transparent semi-reflecting lens between line vertical, also include for measuring the testing sample anglec of rotation
Optical angle gauge.
A kind of use described based on short relevant optical plate glass refractometry systematic survey optical plate glass
The method of refractive index, comprises the following steps:
Step 1: linearly set gradually short-coherence light source, Amici prism, semi-transparent semi-reflecting lens, plane mirror, in light splitting
Prism both sides are respectively provided with film viewing screen and reference mirror, and wherein, the line between film viewing screen and reference mirror is done with short-term
Line between light source and semi-transparent semi-reflecting lens is vertical, and described reference mirror is furnished with the light of recordable reference mirror displacement
Grid chi;
Step 2: open short-coherence light source;
Step 3: mobile reference mirror, when occurring interference fringe on film viewing screen, is obtained by the reading on grating scale
Light path between two surfaces that semi-transparent semi-reflecting lens is relative with plane mirror is L;
Step 4: plate glass to be measured is placed between semi-transparent semi-reflecting lens and plane mirror, and samples vertical is in short phase
The light beam that dry light source sends: mobile reference mirror, when occurring interference fringe on film viewing screen, is obtained by the reading on grating scale
Light path between two surfaces that semi-transparent semi-reflecting lens is relative with plane mirror is L1, and L1Meet:
L1=nh
Wherein, n is sample refractive index at that wavelength, and h is thickness of sample;
Step 5: with anglec of rotation i rotary sample, measure anglec of rotation i with high-precision optical clinometer;
Step 6: mobile reference mirror, when occurring interference fringe on film viewing screen, is obtained by the reading on grating scale
Light path between semi-transparent semi-reflecting lens and close two surfaces of plane mirror is L2, and L2Meet:
Wherein, refraction angle after θ is light sample;
Step 7: pass through L1=nh andIt is calculated
Step 8: pass throughWithCalculate sample refractive index n at that wavelength.
In such scheme, the computational methods in described step 8 are the iterative computation carried out in a computer, including following several
Individual step:
Step 8.1: arrange initial, take variable k=0, nkInitial value be 1, i.e. n0=1;
Step 8.2: anglec of rotation i that input records, using formulaCalculate refraction angle θk;
Step 8.3: L, L that input records1And L2, using formulaCalculate refractive index nk+1;
Step 8.4: make k=k+1, repeats step 8.2-8.3, if nk+1-nk<10-6, then final refractive index n=n is exportedk+1。
The invention has the beneficial effects as follows:
1) apparatus of the present invention optical plate glass refractometry precision reaches 10-6-10-7;
2) present invention proposes the feature utilizing short-coherence light source wavelength coherence length short, it is achieved that optical glass optical thickness
High-acruracy survey, thus avoided measurement the low difficult point causing refractometry precision low of optical glass physical thickness precision;
3) present invention utilizes the law of refraction to realize the deviation of light path by rotary optical glass, passes through high precision angle measuring apparatus
Achieve the high-acruracy survey at refraction angle, further increase the precision of refractometry;
4) present invention passes through the law of refraction, establishes angle of incidence, refraction angle, refractive index and the pass of optical glass optical thickness
It is equation, the method proposing to use iteration, thus can quickly calculate optical glass refractive index
5) assembly of the invention simple in construction, easy to maintenance, processing cost is low, and production efficiency is high, and practicality is high.
6) this device is suitable for the refractometry of optical plate glass, it is not necessary to sample carries out special processing, measures essence
Degree height.
Accompanying drawing explanation
Fig. 1 is structural representation based on short relevant optical plate glass refractometry system in the present invention;
Fig. 2 is the angle of incidence of light path in the present invention, refraction angle schematic diagram;
Fig. 3 is the flow chart of iterative computation in the present invention.
Labelling in figure: 1, short-coherence light source, 2, Amici prism, 3, film viewing screen, 4, semi-transparent semi-reflecting lens, 5, plane mirror,
6, plate glass to be measured, 7, high precisive angle gauge, 8, grating scale, 9, reference mirror, 10, light path.
Detailed description of the invention
For making the object, technical solutions and advantages of the present invention clearer, below in conjunction with accompanying drawing, the present invention is made into one
Step ground describes in detail.
See Fig. 1-2, a kind of based on short relevant optical plate glass refractometry system, including setting the most successively
The short-coherence light source 1 put, Amici prism 2, semi-transparent semi-reflecting lens 4, plane mirror 5, Amici prism 2 both sides are respectively arranged with observation
Screen 3 and reference mirror 9, described reference mirror 9 is furnished with the grating scale 8 of recordable reference mirror displacement, wherein, sees
Examine the line between line light source dry with short-term 1 and the semi-transparent semi-reflecting lens 4 between screen 3 and reference mirror 9 vertical, described reference
Reflecting mirror 9 is also equipped with guide rail, also includes the optical angle gauge 7 for measuring the testing sample anglec of rotation.
A kind of use described based on short relevant optical plate glass refractometry systematic survey optical plate glass
The method of refractive index, comprises the following steps:
Step 1: linearly set gradually short-coherence light source 1, Amici prism 2, semi-transparent semi-reflecting lens 4, plane mirror 5,
Amici prism 2 both sides are respectively provided with film viewing screen 3 and reference mirror 9, wherein, the line between film viewing screen 3 and reference mirror 9
Line between light source 1 dry with short-term and semi-transparent semi-reflecting lens 4 is vertical, and described reference mirror 9 is furnished with recordable reference mirror
The grating scale 8 of displacement;
Step 2: open short-coherence light source 1;
Step 3: mobile reference mirror 9, owing to short-coherence light source coherence length is short, only when Michelson's interferometer reference
Arm with measurement arm, there is interference fringe in film viewing screen 3, obtains semi-transparent semi-reflecting lens 4 by the reading on grating scale 8 when equal
The light path two surfaces between relative with plane mirror 5 is L;
Step 4: sample 6 is placed between semi-transparent semi-reflecting lens 4 and plane mirror 5, and sample 6 is perpendicular to short coherent light
The light beam that source 1 sends: mobile reference mirror 9, when there is interference fringe on film viewing screen 3, is obtained by the reading on grating scale 8
Light path between two surfaces that semi-transparent semi-reflecting lens 4 is relative with plane mirror 5 is L1, and L1Meet:
L1=nh
Wherein, n is sample refractive index at that wavelength, and h is thickness of sample;
Step 5: with anglec of rotation i rotary sample, measure anglec of rotation i with high-precision optical clinometer 7;
Step 6: mobile reference mirror 9, when there is interference fringe on film viewing screen 3, is obtained by the reading on grating scale 8
Light path between two surfaces that semi-transparent semi-reflecting lens 4 and plane mirror 5 are close is L2, and L2Meet:
Wherein, refraction angle after θ is light sample;
Step 7: pass through L1=nh andIt is calculated
Step 8: utilizeWithCalculate sample refractive index n at that wavelength.
Seeing the computational methods in Fig. 3, step 8 is the iterative computation carried out in a computer, including following step:
Step 8.1: arrange initial, take variable k=0, nkInitial value be 1, i.e. n0=1;
Step 8.2: anglec of rotation i that input records, using formulaCalculate refraction angle θk;
Step 8.3: L, L that input records1And L2, using formulaCalculate refractive index nk+1;
Step 8.4: make k=k+1, repeats step 8.2-8.3, if nk+1-nk<10-6, then final refractive index n=n is exportedk+1。
See Fig. 1, during measurement, described short-coherence light source 1 launch light after Amici prism 2 is divided into two-beam, one
Shu Guangjing reference mirror reflection 9, another light beam reflects through plane mirror 5 after semi-transparent semi-reflecting lens 4, and two-beam leads to again
Cross and interfere at Amici prism 2 directive film viewing screen 3.
The foregoing is only presently preferred embodiments of the present invention, not in order to limit the present invention, all spirit in the present invention and
Within principle, any modification, equivalent substitution and improvement etc. made, should be included within the scope of the present invention.
Claims (3)
1. one kind based on short relevant optical plate glass refractometry system, it is characterised in that include setting the most successively
The short-coherence light source (1) put, Amici prism (2), semi-transparent semi-reflecting lens (4), plane mirror (5), Amici prism (2) both sides are respectively
Being provided with film viewing screen (3) and reference mirror (9), described reference mirror (9) is furnished with recordable reference mirror displacement
Grating scale (8), wherein, line light source dry with short-term (1) between film viewing screen (3) and reference mirror (9) and semi-transparent semi-reflecting
Line between mirror (4) is vertical, also includes the optical angle gauge (7) for measuring the testing sample anglec of rotation.
2. one kind use described in claim 1 or 2 based on short relevant optical plate glass refractometry systematic survey light
The method learning plate glass refractive index, it is characterised in that comprise the following steps:
Step 1: linearly set gradually short-coherence light source (1), Amici prism (2), semi-transparent semi-reflecting lens (4), plane mirror
(5), being respectively provided with film viewing screen (3) and reference mirror (9) in Amici prism (2) both sides, wherein, film viewing screen (3) and reference are anti-
Penetrate the line between the light source dry with short-term of the line between mirror (9) (1) and semi-transparent semi-reflecting lens (4) vertical, described reference mirror
(9) it is furnished with the grating scale (8) of recordable reference mirror displacement;
Step 2: open short-coherence light source (1);
Step 3: mobile reference mirror (9), when there is interference fringe on film viewing screen (3), by the reading on grating scale (8)
The light path obtained between two surfaces that semi-transparent semi-reflecting lens (4) is relative with plane mirror (5) is L;
Step 4: plate glass to be measured (6) is placed between semi-transparent semi-reflecting lens (4) and plane mirror (5), and treats master plate
Glass (6) is perpendicular to the light beam that short-coherence light source (1) sends: move reference mirror (9), when occurring interfering on film viewing screen (3)
During striped, by the reading on grating scale (8) obtain semi-transparent semi-reflecting lens (4) two surfaces relative with plane mirror (5) it
Between light path be L1, and L1Meet:
L1=nh
Wherein, n is sample refractive index at that wavelength, and h is thickness of sample;
Step 5: with anglec of rotation i rotary sample, measure anglec of rotation i with high-precision optical clinometer (7);
Step 6: mobile reference mirror (9), when there is interference fringe on film viewing screen (3), by the reading on grating scale (8)
The light path obtained between semi-transparent semi-reflecting lens (4) and close two surfaces of plane mirror (5) is L2, and L2Meet:
Wherein, the refraction angle after θ is light sample;
Step 7: pass through L1=nh andIt is calculated
Step 8: utilizeWithCalculate sample refractive index n at that wavelength.
A kind of optical plate glass refractive index measurement method based on short coherent technique the most according to claim 1, it is special
Levying and be, the computational methods in described step 8 are the iterative computation carried out in a computer, including following step:
Step 8.1: arrange initial, take variable k=0, nkInitial value be 1, i.e. n0=1;
Step 8.2: anglec of rotation i that input records, using formulaCalculate refraction angle θk;
Step 8.3: L, L that input records1And L2, using formulaCalculate refractive index nk+1;
Step 8.4: make k=k+1, repeats step 8.2-8.3, if nk+1-nk<10-6, then final refractive index n=n is exportedk+1。
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CN106840002A (en) * | 2017-01-21 | 2017-06-13 | 西南交通大学 | A kind of contactless plate glass thickness and apparatus for measuring refractive index and method |
CN106871797A (en) * | 2017-01-07 | 2017-06-20 | 四川大学 | Contactless thickness of sample measuring method and measurement apparatus based on Michelson Interference Principle |
CN110567685A (en) * | 2019-09-10 | 2019-12-13 | 宁波法里奥光学科技发展有限公司 | Device and method for detecting refractive index of lens |
CN111122510A (en) * | 2019-11-08 | 2020-05-08 | 桂林电子科技大学 | Transmission type orthogonal polarization phase microscopic imaging device based on F-P interferometer |
CN116183175A (en) * | 2023-01-05 | 2023-05-30 | 苏州科技大学 | Device and method for measuring refractive index of flat optical element |
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CN106871797A (en) * | 2017-01-07 | 2017-06-20 | 四川大学 | Contactless thickness of sample measuring method and measurement apparatus based on Michelson Interference Principle |
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CN110567685B (en) * | 2019-09-10 | 2023-09-08 | 宁波法里奥光学科技发展有限公司 | Device and method for detecting refractive index of lens |
CN111122510A (en) * | 2019-11-08 | 2020-05-08 | 桂林电子科技大学 | Transmission type orthogonal polarization phase microscopic imaging device based on F-P interferometer |
CN116183175A (en) * | 2023-01-05 | 2023-05-30 | 苏州科技大学 | Device and method for measuring refractive index of flat optical element |
CN116183175B (en) * | 2023-01-05 | 2023-08-04 | 苏州科技大学 | Method for measuring refractive index of flat optical element |
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