CN105092530B - The absolute method of measurement of optical parallel optical heterogeneity - Google Patents
The absolute method of measurement of optical parallel optical heterogeneity Download PDFInfo
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- CN105092530B CN105092530B CN201510263169.0A CN201510263169A CN105092530B CN 105092530 B CN105092530 B CN 105092530B CN 201510263169 A CN201510263169 A CN 201510263169A CN 105092530 B CN105092530 B CN 105092530B
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Abstract
The invention discloses a kind of absolute method of measurement of optical parallel optical heterogeneity.Step is：Interferometry is carried out to the first transmission reference optical flat working face and the preceding surface of optical parallel to be measured；Non-reflective reference optical flat is placed behind optical parallel to be measured, an interferometry is carried out to the first transmission reference optical flat and non-reflective reference optical flat working face；Interferometry is carried out to surface after the first transmission reference optical flat working face and optical parallel to be measured；Cavity interferometry is carried out to the first transmission reference optical flat and non-reflective reference optical flat working face；The first transmission reference optical flat is replaced with the second transmission reference optical flat, an interferometry is carried out to the second transmission reference optical flat and the first transmission reference optical flat working face；Interferometry is carried out to the second transmission reference optical flat and non-reflective reference optical flat working face；Composite measurement result, obtain the optical heterogeneity of optical parallel to be measured.The present invention is simple and easy, accurate efficient, and measurement object is not limited by the front and rear surfaces depth of parallelism.
Description
Technical field
The invention belongs to interference of light metering field, particularly a kind of absolute measurement side of optical parallel optical heterogeneity
Method.
Background technology
Optical transmission material is the important component of optical material, and optical heterogeneity is as evaluation optical transmission material
The important indicator of performance, reflection be same optical material inner refractive index inconsistency.Refraction inside optical material
Rate is inconsistent, will result directly in the change of transmission wavefront, and then change the wave aberration of optical system.Under normal circumstances, 10-6Magnitude
Optical heterogeneity, the wave aberration of wavelength magnitude can be introduced, therefore to the high precision test of optical element optical heterogeneity
Have great importance.
Domestic and international expert has carried out substantial amounts of research to the detection method of optical heterogeneity.Mainly post plate measurement
Method, four step interferometries, short coherent light interferometry and wavelength tuning Fourier analysis mensuration.Post plate mensuration
The detection of optical heterogeneity is carried out, it is necessary to increase by two pieces of refractive indexes with measured piece identical glass optical flat as plate is posted, is put down
Brilliant surface surface figure accuracy requirement is better than λ/10, while the heterogeneity of index liquid used can also influence measurement accuracy；Four steps are done
Relate to the detection that mensuration carries out optical heterogeneity, it is desirable to which the angle of wedge of glass plate to be measured is controlled 2~66 jiaos points between, it is impossible to
To the front and rear surfaces depth of parallelism, very high optical parallel is tested；Short Coherence Interferometry solves table before and after high-acruracy survey
The problem of face depth of parallelism preferable planar opticses heterogeneity, but measurement accuracy is influenceed by light source spectrum width；Wavelength tuning Fu
In leaf analysis mensuration can obtain optical parallel front and rear surfaces face shape and material homogeneity information, still by measuring twice
Instrument must use can accurate adjustment wavelength semiconductor laser as light source, and need special processing software, can not obtain
To extensive use.
The content of the invention
It is an object of the invention to provide a kind of absolute measurement of precision height, the optical parallel optical heterogeneity easily realized
Method, measurement result is not influenceed by transmission reference optical flat face shape and non-reflective reference optical flat surface figure accuracy, measurement object not by
The limitation of the front and rear surfaces depth of parallelism.
The technical solution for realizing the object of the invention is：A kind of absolute measurement side of optical parallel optical heterogeneity
Method, comprise the following steps：
Step 1, coordinate system is established, using the optical axis direction of the launch of striking rope type laser interferometer as z-axis, direction is perpendicular to the ground
Y-axis, x-axis, y-axis, z-axis form right-handed coordinate system of the thumb along optical axis direction；Transmitted using striking rope type laser interferometer to first
With reference to optical flat T1The preceding surface B of working face A and optical parallel S to be measured carry out an interferometry and obtain result M1；
Step 2, along optical axis direction, non-reflective reference optical flat R is placed behind optical parallel S to be measured, the first transmission is joined
Examine optical flat T1 working faces A and non-reflective reference optical flat R working faces D and carry out an interferometry, obtain optical parallel S to be measured transmission
Measurement result M2；
Step 3, optical parallel S to be measured is rotated into 180 degree around y-axis, to the first transmission reference optical flat T1Working face A and to be measured
Surface C carries out an interferometry and obtains result M after optical parallel S3, by measurement result M3Mirror image reversal is carried out along y-axis to obtain
Step 4, optical parallel S to be measured is taken away, to the first transmission reference optical flat T1Working face A and non-reflective reference optical flat R works
Make a face D cavity interferometry of progress and obtain result M4；
Step 5, with the second transmission reference optical flat T2Replace the first transmission reference optical flat T1, the second transmission reference optical flat T2Make
For interferometer reference mirror, by the first transmission reference optical flat T1180 degree is rotated around y-axis, to the second transmission reference optical flat T2Working face E
With the first transmission reference optical flat T1Working face A carries out an interferometry and obtains result M5；
Step 6, to the second transmission reference optical flat T2Working face E and non-reflective reference optical flat R working faces D carries out once interference and surveyed
Measure result M6；
Step 7, the measurement result of combining step 1~6, optical parallel S to be measured optical heterogeneity Δ n is obtained.
Compared with prior art, its remarkable advantage is the present invention：(1) measurement result is not by transmission reference optical flat face shape and anti-
The influence with reference to optical flat surface figure accuracy is penetrated, measurement accuracy is high；(2) measurement object is not limited by the front and rear surfaces depth of parallelism, easily
Realize；(3) measurement process is easy, and measurement structure is simple.
The present invention is described in further detail below in conjunction with the accompanying drawings.
Brief description of the drawings
Fig. 1 is the schematic diagram of reference frame of the present invention.
Fig. 2 is the first transmission reference optical flat T1The preceding surface B interferometry schematic diagrames of working face A and optical parallel S to be measured.
Fig. 3 is optical parallel S to be measured transmission measurement schematic diagram.
Fig. 4 is the first transmission reference optical flat T1Surface C interferometry schematic diagram after working face A and optical parallel S to be measured.
Fig. 5 is the schematic diagram of cavity interferometry.
Fig. 6 is the second transmission reference optical flat T2Working face E and the first transmission reference optical flat T1Working face A interferometries are illustrated
Figure.
Fig. 7 is the second transmission reference optical flat T2Working face E and non-reflective reference optical flat R working face D interferometry schematic diagrames.
Embodiment
With reference to Fig. 1, all measurement process are all carried out under the reference frame shown in Fig. 1 in the present invention.Establish coordinate
System, using the optical axis direction of the launch of striking rope type laser interferometer as z-axis, direction is y-axis perpendicular to the ground, and x-axis, y-axis, z-axis form thumb
Refer to the right-handed coordinate system along optical axis direction.
With reference to Fig. 2~Fig. 7, the method for optical parallel optical heterogeneity absolute measurement of the present invention, comprise the steps of：
Step 1, as shown in Fig. 2 using striking rope type laser interferometer to the first transmission reference optical flat T1Working face A and to be measured
The preceding surface B of optical parallel S carry out an interferometry and obtain result M1, formula is as follows：
M1=2B (x, y) -2A (x, y) (1)
In formula, A (x, y) represents the first transmission reference optical flat T1Working face A face shape error, B (x, y) represent to be measured parallel
The preceding surface B face shape errors of optical flat S.
Step 2, as shown in figure 3, along optical axis direction, placement non-reflective reference optical flat R, right behind optical parallel S to be measured
First transmission reference optical flat T1 working faces A and non-reflective reference optical flat R working faces D carries out an interferometry, obtains to be measured parallel
Optical flat S transmissive measurement M2, formula is as follows：
M2=2B (x, y) -2A (x, y)+2n0[C(x,y)-B(x,y)]+2D(x,y)-2C(x,y)+2δ (2)
In formula, n0Optical parallel S to be measured refractive index nominal value is represented, δ represents optical parallel S optical heterogeneities to be measured
The wave aberration of introducing, C (x, y) represent the face shape error of surface C after optical parallel S to be measured, and D (x, y) represents non-reflective reference optical flat R
Working face D face shape error.
Step 3, as shown in figure 4, optical parallel S to be measured is rotated into 180 degree around y-axis, to the first transmission reference optical flat T1Work
A surface C interferometry of progress obtains result M after making face A and optical parallel S to be measured3, formula is as follows：
M3=-2C (- x, y) -2A (x, y) (3)
In formula, C (- x, y) represents to carry out mirror image reversal to the face shape error of surface C after optical parallel S to be measured along y-axis；
By measurement result M3Mirror image reversal is carried out along y-axis to obtain
Wherein, A (- x, y) is represented along y-axis to the first transmission reference optical flat T1It is anti-that working face A face shape error carries out mirror image
Turn.
Step 4, as shown in figure 5, taking optical parallel S to be measured away, to the first transmission reference optical flat T1Working face A and reflection are joined
Examine an optical flat R working faces D cavity interferometry of progress and obtain result M4, formula is as follows：
M4=2D (x, y) -2A (x, y) (5)
Step 5, as shown in fig. 6, with the second transmission reference optical flat T2Replace the first transmission reference optical flat T1, the second transmission ginseng
Examine optical flat T2As interferometer reference mirror, by the first transmission reference optical flat T1180 degree is rotated around y-axis, to the second transmission reference optical flat
T2Working face E and the first transmission reference optical flat T1Working face A carries out an interferometry and obtains result M5, formula is as follows：
M5=-2A (- x, y) -2E (x, y) (6)
Wherein, E (x, y) represents the second transmission reference optical flat T2Working face E face shape error.
Step 6, as shown in fig. 7, to the second transmission reference optical flat T2Working face E and non-reflective reference optical flat R working faces D is carried out
Interferometry obtains result M6, formula is as follows：
M6=2D (x, y) -2E (x, y) (7)
Step 7, the measurement result of combining step 1~6, simultaneous formula (1), (2), (4), (5), (6), (7), is obtained to be measured
Optical parallel S optical heterogeneity Δ n：
In formula, d is optical parallel S to be measured thickness.
In summary, measurement result of the present invention is not by transmission reference optical flat face shape and the shadow of non-reflective reference optical flat surface figure accuracy
Ring, measurement object is not limited by the front and rear surfaces depth of parallelism, and measurement accuracy is high, easily realizes.
Claims (1)
1. a kind of absolute method of measurement of optical parallel optical heterogeneity, it is characterised in that comprise the following steps：
Step 1, coordinate system is established, using the optical axis direction of the launch of striking rope type laser interferometer as z-axis, direction is y-axis perpendicular to the ground,
X-axis, y-axis, z-axis form right-handed coordinate system of the thumb along optical axis direction；Using striking rope type laser interferometer to the first transmission reference
Optical flat T1The preceding surface B of working face A and optical parallel S to be measured carry out an interferometry and obtain result M1；
Step 2, along optical axis direction, non-reflective reference optical flat R is placed behind optical parallel S to be measured, the first transmission reference is put down
Brilliant T1 working faces A and non-reflective reference optical flat R working faces D carries out an interferometry, obtains optical parallel S to be measured transmission measurement
As a result M2；
Step 3, optical parallel S to be measured is rotated into 180 degree around y-axis, to the first transmission reference optical flat T1Working face A with it is to be measured parallel
Surface C carries out an interferometry and obtains result M after optical flat S3, by measurement result M3Mirror image reversal is carried out along y-axis to obtain
Step 4, optical parallel S to be measured is taken away, to the first transmission reference optical flat T1Working face A and non-reflective reference optical flat R working faces D
Carry out a cavity interferometry and obtain result M4；
Step 5, with the second transmission reference optical flat T2Replace the first transmission reference optical flat T1, the second transmission reference optical flat T2As dry
Interferometer reference mirror, by the first transmission reference optical flat T1180 degree is rotated around y-axis, to the second transmission reference optical flat T2Working face E and
One transmission reference optical flat T1Working face A carries out an interferometry and obtains result M5；
Step 6, to the second transmission reference optical flat T2Working face E and non-reflective reference optical flat R working faces D carries out an interferometry and obtained
As a result M6；
Step 7, the measurement result of combining step 1~6, optical parallel S to be measured optical heterogeneity Δ n is obtained；
Using striking rope type laser interferometer to the first transmission reference optical flat T described in step 11Before working face A and optical parallel S to be measured
Surface B carries out an interferometry and obtains result M1, formula is as follows：
M1=2B (x, y) -2A (x, y) (1)
In formula, A (x, y) represents the first transmission reference optical flat T1Working face A face shape error, B (x, y) represent optical parallel S to be measured
Preceding surface B face shape errors；
Once interference is carried out described in step 2 to the first transmission reference optical flat T1 working faces A and non-reflective reference optical flat R working faces D to survey
Amount, obtains optical parallel S to be measured transmissive measurement M2, formula is as follows：
M2=2B (x, y) -2A (x, y)+2n0[C(x,y)-B(x,y)]+2D(x,y)-2C(x,y)+2δ (2)
In formula, n0Optical parallel S to be measured refractive index nominal value is represented, δ represents that optical parallel S optical heterogeneities to be measured introduce
Wave aberration, C (x, y) represents the face shape error of surface C after optical parallel S to be measured, and D (x, y) represents non-reflective reference optical flat R work
Face D face shape error；
To the first transmission reference optical flat T described in step 31Surface C carries out an interferometry after working face A and optical parallel S to be measured
Obtain result M3, formula is as follows：
M3=-2C (- x, y) -2A (x, y) (3)
In formula, C (- x, y) represents to carry out mirror image reversal to the face shape error of surface C after optical parallel S to be measured along y-axis；
By measurement result M3Mirror image reversal is carried out along y-axis to obtain
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Wherein, A (- x, y) is represented along y-axis to the first transmission reference optical flat T1Working face A face shape error carries out mirror image reversal；
To the first transmission reference optical flat T described in step 41Working face A and non-reflective reference optical flat R working faces D carries out a cavity interference
Measure to obtain result M4, formula is as follows：
M4=2D (x, y) -2A (x, y) (5)
To the second transmission reference optical flat T described in step 52Working face E and the first transmission reference optical flat T1Working face A is once done
Relate to and measure to obtain result M5, formula is as follows：
M5=-2A (- x, y) -2E (x, y) (6)
Wherein, E (x, y) represents the second transmission reference optical flat T2Working face E face shape error；
To the second transmission reference optical flat T described in step 62Working face E and non-reflective reference optical flat R working faces D carries out an interferometry
Obtain result M6, formula is as follows：
M6=2D (x, y) -2E (x, y) (7)
The measurement result of combining step 1~6 described in step 7, obtain optical parallel S to be measured optical heterogeneity Δ n：
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In formula, d is optical parallel S to be measured thickness.
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