CN107941469B - A kind of equilateral prism apex angle bias measurement method - Google Patents
A kind of equilateral prism apex angle bias measurement method Download PDFInfo
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- CN107941469B CN107941469B CN201711029546.XA CN201711029546A CN107941469B CN 107941469 B CN107941469 B CN 107941469B CN 201711029546 A CN201711029546 A CN 201711029546A CN 107941469 B CN107941469 B CN 107941469B
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- G—PHYSICS
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- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
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Abstract
The invention discloses a kind of equilateral prism apex angle bias measurement methods.This method includes three steps: two pieces of reflecting mirrors are fixed into 60 ° of angle mirror by the first step, and the angular bisector at 60 ° of angles of angle mirror is parallel with interferometer emergent light optical axis, the angle of two light of measurement auto-collimation return；Equilateral prism to be measured is placed between interferometer and angle mirror by second step, and apex angle face interferometer to be measured, measures two sides through equilateral prism apex angle to be measured by interference pattern, then respectively by the angle of reflected two light in two faces of angle mirror；Third step, composite measurement are as a result, obtain the apex angle deviation of equilateral prism to be measured.This method step is few, easy to operate, precision is high, can be used for the high-acruracy survey of equilateral prism apex angle deviation.
Description
Technical field
The invention belongs to optical interferometry technical field, especially a kind of equilateral prism apex angle bias measurement method.
Background technique
Optical transmission material is the important component of optical material, and optical heterogeneity is as evaluation optical transmission material
The important indicator of performance, reflection be same optical material inner refractive index inconsistency.Refraction inside optical material
Rate is inconsistent, will result directly in the change of transmission wavefront, and then change the wave aberration of optical system.Under normal conditions, 10-6Magnitude
Optical heterogeneity, the wave aberration of wavelength magnitude can be introduced, therefore detect to the high-precision of optical element optical heterogeneity
Have great importance.
Domestic and international expert has carried out a large amount of research to the detection method of equilateral prism apex angle deviation.Mainly there is auto-collimation
Method, directional light method, interior angle bounce technique.Autocollimation method based on auto-collimator carries out the detection of equilateral prism apex angle deviation
When, need the two sides for adjusting telescope and apex angle to be measured to be twice respectively perpendicular, measurement accuracy is limited to the precision of index dial, surveys
The uncertain angle value for measuring result is larger；Directional light method carries out the detection of equilateral prism apex angle deviation, it is desirable that adjusts spectrometer and connects
The light that directional light is reflected through the two sides of apex angle to be measured is received, system operatio is complicated, it is high to adjust requirement；Interior angle based on interferometry
Bounce technique carries out the detection of equilateral prism apex angle deviation, needs the emergent light of interferometer in prism multiple reflection inside, if rib
The uniformity of mirror material is bad, will lead to light deflection, influences measurement accuracy.
Summary of the invention
The purpose of the present invention is to provide a kind of measurement accuracy height, striking rope type laser interferometer measurement is utilized easily to operate
The measurement method of the apex angle deviation of equilateral prism.
The technical solution for realizing the aim of the invention is as follows: a kind of equilateral prism apex angle bias measurement method, this method
Based on striking rope type laser interference system, the apex angle deviation of equilateral prism is measured using exterior angle penalty method, specifically includes following step
It is rapid:
Step 1, one 60 ° of angle mirror is fixed in interferometer measurement optical path, and the angular bisector of angle mirror goes out with interferometer
The optical axis for penetrating light is parallel, the angle for two light that measurement auto-collimation returns；
Step 2, equilateral prism to be measured is placed between interferometer and angle mirror, and apex angle face interferometer to be measured；By doing
It relates to figure and measures two sides through equilateral prism apex angle to be measured, then respectively through reflected two light in two faces of angle mirror
Angle；
Step 3, according to the measurement result of steps 1 and 2, the apex angle deviation of equilateral prism to be measured is calculated.
Further, one 60 ° of angle mirror, and the angle bisection of angle mirror are fixed described in step 1 in interferometer measurement optical path
Line is parallel with the optical axis of interferometer emergent light, the angle for two light that measurement auto-collimation returns, specific as follows:
(1.1) posture for adjusting two reflecting mirrors of composition angle mirror to be measured, makes the light auto-collimation returned respectively through two reflecting mirrors
It goes back, and two groups of numbers of interference fringes are less than setting value；
(1.2) striking rope type laser interferometer is utilized, acquires what the light returned through reference mirror returned respectively with angle mirror two sides
Two groups of interference fringes that light is formed, analysis obtain the angle Θ for the light that angle mirror two sides return respectively.
Further, described described in step 2 that equilateral prism to be measured is placed between interferometer and angle mirror, and apex angle to be measured
Face interferometer；Two sides through equilateral prism apex angle to be measured are measured by interference pattern, then anti-through two faces of angle mirror respectively
It is emitted back towards the angle of two light come, the specific steps are as follows:
(2.1) prism to be measured is fixed on adjustment frame, and by apex angle face interferometer light-emitting window to be measured.Coarse adjustment trigone
The posture of mirror makes interferometer emergent light through the two sides of prism apex angle, then the light autocollimatic returned respectively through two reflecting surface of angle mirror
Straight gyrus is gone, and obtains interference pattern；
(2.2) adjustment frame of fixed prism, the posture of accurate adjustment prism are adjusted, until two groups of numbers of interference fringes are less than
Setting value；
(2.3) angle of reflected two light is measured by interference pattern
Further, the apex angle deviation of equilateral prism to be measured is calculated according to the measurement result of steps 1 and 2 described in step 3
Δ θ, formula are as follows:
Wherein, Θ is the angle for the light that angle mirror two sides return respectively,It is reflected to be measured by interference pattern
The angle of two light.
Compared with prior art, the present invention its remarkable advantage are as follows: (1) use striking 60 ° of angle mirrors of rope type laser interferometer measurement
Angular deviation and auto-collimation return two light angle, derived according to theory relation, can be calculated by above-mentioned measurement result
To the apex angle deviation of prism to be measured, totally two pacing amount, step is few, easy to operate；(2) avoid conventional interior angle reflection measurement by
High-acruracy survey in the error that the problems such as part own material uniformity to be measured introduces, suitable for equilateral prism apex angle deviation.
Present invention is further described in detail with reference to the accompanying drawing.
Detailed description of the invention
Fig. 1 is the schematic diagram of reference frame of the present invention.
Fig. 2 is the flow chart of the equilateral prism apex angle bias measurement method of the present invention.
Fig. 3 is 60 ° of angle mirror angular deviation instrumentation plans of the invention.
Fig. 4 is the present invention equilateral prism corner angle deviation schematic diagram to be measured.
Specific embodiment
In conjunction with Fig. 1, carried out under all measurement process reference frame all shown in Fig. 1 in the present invention.Establish coordinate
System, using the optical axis direction of the launch of striking rope type laser interferometer as z-axis, direction is y-axis perpendicular to the ground, and x-axis, y-axis, z-axis constitute thumb
Refer to the right-handed coordinate system along optical axis direction.
In conjunction with Fig. 2-Fig. 4, the equilateral prism apex angle bias measurement method of the present invention, comprising the following steps:
Step 1, as shown in figure 3, fixing one 60 ° of angle mirror in interferometer measurement optical path, and the angular bisector of angle mirror
It is parallel with the optical axis of interferometer emergent light.The posture for adjusting two reflecting mirrors of composition angle mirror to be measured, makes to return through two reflecting mirrors respectively
The light auto-collimation returned is gone back, and two groups of numbers of interference fringes are less than setting value.The light returned through reference mirror is acquired using interferometer
The two groups of interference fringes formed with the light that angle mirror two sides return respectively, are analyzed, obtain what angle mirror two sides returned respectively
The angle of light.
Step 2, as shown in figure 4, prism to be measured is fixed on adjustment frame, and apex angle face interferometer to be measured is gone out into light
Mouthful.The posture of coarse adjustment prism makes interferometer emergent light through the two sides of prism apex angle, then returns respectively through two reflecting surface of angle mirror
The light auto-collimation returned is gone back, and interference pattern is obtained；Adjust the adjustment frame of fixed prism, the posture of accurate adjustment prism, until two groups
Number of interference fringes is less than setting value；The angle of reflected two light is measured by interference pattern
Step 3, the measurement result of combining step 1,2 obtains the apex angle deviation delta θ of equilateral prism to be measured:
Wherein, Θ is the angle for the light that angle mirror two sides return respectively,It is reflected to be measured by interference pattern
The angle of two light.
Embodiment 1
The equilateral prism apex angle bias measurement method of the present invention, this method are based on striking rope type laser interferometer system, specifically
The following steps are included:
Step 1, one 60 ° of angle mirror is fixed in interferometer measurement optical path, and the angular bisector of angle mirror goes out with interferometer
The optical axis for penetrating light is parallel, the angle for two light that measurement auto-collimation returns, specific as follows:
(1.1) posture for adjusting two reflecting mirrors of composition angle mirror to be measured, makes the light auto-collimation returned respectively through two reflecting mirrors
It goes back；
(1.2) striking rope type laser interferometer is utilized, acquires what the light returned through reference mirror returned respectively with angle mirror two sides
Two groups of interference fringes that light is formed, are analyzed, obtain the angle Θ for the light that angle mirror two sides return respectively.
Step 2, equilateral prism to be measured is placed between interferometer and angle mirror, and apex angle face interferometer to be measured.By doing
It relates to figure and measures two sides through equilateral prism apex angle to be measured, then respectively through reflected two light in two faces of angle mirror
Angle, the specific steps are as follows:
(2.1) prism to be measured is fixed on adjustment frame, and by apex angle face interferometer light-emitting window to be measured.Coarse adjustment trigone
The posture of mirror makes interferometer emergent light through the two sides of prism apex angle, then the light autocollimatic returned respectively through two reflecting surface of angle mirror
Straight gyrus is gone, and obtains interference pattern；
(2.2) adjust the adjustment frame of fixed prism, the posture of accurate adjustment prism, until two groups of numbers of interference fringes compared with
It is few；
(2.3) angle of reflected two light is measured by interference pattern
Step 4, according to the measurement result of steps 1 and 2, the apex angle deviation delta θ of equilateral prism to be measured is calculated:
In conclusion a kind of equilateral prism apex angle bias measurement method proposed by the present invention, dry using striking rope type laser
Interferometer carries out interferometry to equilateral prism to be measured and equilateral trigone to be measured is finally calculated by two step wavefront measurements
The apex angle deviation of mirror.Measurement method used in the present invention carries out two pacing amounts altogether, and measurement accuracy is high, easy to operate, easy to be real
It is existing.
Claims (3)
1. a kind of equilateral prism apex angle bias measurement method, which is characterized in that this method is based on striking rope type laser interference system,
The apex angle deviation of equilateral prism is measured using exterior angle penalty method, specifically includes the following steps:
Step 1, one 60 ° of angle mirror, and the angular bisector of angle mirror and interferometer emergent light are fixed in interferometer measurement optical path
Optical axis it is parallel, measurement auto-collimation return two light angle；
Step 2, equilateral prism to be measured is placed between interferometer and angle mirror, and apex angle face interferometer to be measured；By interference pattern
Two sides through equilateral prism apex angle to be measured are measured, then the folder respectively through reflected two light in two faces of angle mirror
Angle；
Step 3, according to the measurement result of steps 1 and 2, the apex angle deviation of equilateral prism to be measured is calculated；
According to the measurement result of steps 1 and 2 described in step 3, the apex angle deviation delta θ of equilateral prism to be measured is calculated, formula is as follows:
Wherein, Θ is the angle for the light that angle mirror two sides return respectively,For reflected two light measured by interference pattern
Angle.
2. equilateral prism apex angle bias measurement method according to claim 1, which is characterized in that dry described in step 1
One 60 ° of angle mirror is fixed in interferometer optical path, and the angular bisector of angle mirror is parallel with the optical axis of interferometer emergent light, measure
The angle for two light that auto-collimation returns, specific as follows:
(1.1) posture for adjusting two reflecting mirrors of composition angle mirror to be measured, makes the light auto-collimation returned respectively through two reflecting mirrors go back,
And two groups of numbers of interference fringes are less than setting value；
(1.2) interferometer is utilized, two groups that the light returned through reference mirror is formed with the light that angle mirror two sides return respectively is acquired and does
Striped is related to, analysis obtains the angle Θ for the light that angle mirror two sides return respectively.
3. equilateral prism apex angle bias measurement method according to claim 1, which is characterized in that will be to described in step 2
It surveys equilateral prism to be placed between interferometer and angle mirror, and apex angle face interferometer to be measured；It is measured by interference pattern through equilateral three
Two sides of prism apex angle to be measured, then the angle respectively through reflected two light in two faces of angle mirror, the specific steps are as follows:
(2.1) prism to be measured is fixed on adjustment frame, and by apex angle face interferometer light-emitting window to be measured, coarse adjustment prism
Posture makes interferometer emergent light through the two sides of prism apex angle, then the light autocollimatic straight gyrus returned respectively through two reflecting surface of angle mirror
It goes, obtains interference pattern；
(2.2) adjustment frame of fixed prism, the posture of accurate adjustment prism are adjusted, until two groups of numbers of interference fringes are less than setting
Value；
(2.3) angle of reflected two light is measured by interference pattern
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| KR20240006707A (en) | 2021-02-25 | 2024-01-15 | 루머스 리미티드 | Optical aperture multipliers having a rectangular waveguide |
| WO2023031913A1 (en) * | 2021-08-30 | 2023-03-09 | Lumus Ltd. | Method and apparatus for bonding of optical surfaces by active alignment |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11173825A (en) * | 1997-12-10 | 1999-07-02 | Ricoh Co Ltd | Prism squareness-measuring method |
| CN1851393A (en) * | 2006-05-24 | 2006-10-25 | 长春理工大学 | Triple-prism height laser non-contacting detection method and apparatus |
| CN101078615A (en) * | 2007-06-22 | 2007-11-28 | 哈尔滨工业大学 | Precision determination method for angle between optical axis and mechanical axis of optical system |
| CN201527335U (en) * | 2009-09-25 | 2010-07-14 | 丹阳弘业电子有限公司 | 90-degree external angle prism laser interferometer |
| CN105841638A (en) * | 2016-05-13 | 2016-08-10 | 深圳市中图仪器科技有限公司 | Optical system applied to laser interferometer measuring guide rail linearity |
-
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- 2017-10-27 CN CN201711029546.XA patent/CN107941469B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11173825A (en) * | 1997-12-10 | 1999-07-02 | Ricoh Co Ltd | Prism squareness-measuring method |
| CN1851393A (en) * | 2006-05-24 | 2006-10-25 | 长春理工大学 | Triple-prism height laser non-contacting detection method and apparatus |
| CN101078615A (en) * | 2007-06-22 | 2007-11-28 | 哈尔滨工业大学 | Precision determination method for angle between optical axis and mechanical axis of optical system |
| CN201527335U (en) * | 2009-09-25 | 2010-07-14 | 丹阳弘业电子有限公司 | 90-degree external angle prism laser interferometer |
| CN105841638A (en) * | 2016-05-13 | 2016-08-10 | 深圳市中图仪器科技有限公司 | Optical system applied to laser interferometer measuring guide rail linearity |
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