CN201527335U - 90-degree external angle prism laser interferometer - Google Patents
90-degree external angle prism laser interferometer Download PDFInfo
- Publication number
- CN201527335U CN201527335U CN2009202358203U CN200920235820U CN201527335U CN 201527335 U CN201527335 U CN 201527335U CN 2009202358203 U CN2009202358203 U CN 2009202358203U CN 200920235820 U CN200920235820 U CN 200920235820U CN 201527335 U CN201527335 U CN 201527335U
- Authority
- CN
- China
- Prior art keywords
- angle prism
- sheet glass
- laser interferometer
- polished surface
- catoptron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Abstract
The utility model relates to a 90-degree external angle prism laser interferometer which comprises two pieces of high-accuracy reflecting mirrors (1) and a piece of high-accuracy plate glass (3) which are vertical to each other; a 90-degree prism (2) to be measured is arranged on the plate glass; and the 90-degree external angle prism laser interferometer is characterized in that one side of the reflecting mirror (1) is a polished surface, the other side thereof is a matte surface, and the polished surface is contacted with the two end surfaces of the plate glass (3) by gluing. As the light refraction is not influenced by the refractive index of optical material, so that the laser interferometer has accurate measurement results and flexible operation, and is simple and easy to apply.
Description
Technical field
The utility model is equipped with high-precision frock again based on laser interferometer, detects the laser interferometry instrument of 90 ° of outer angle prisms of all kinds of high precision.
Background technology
At present, the detection at 90 ° of angles of high precision prism, the general internal test method that adopts on laser interferometer, this detection method is subjected to the influence of optical material refractive index, and is very big to the angle measurement accuracy influence.
Summary of the invention
At above deficiency, the purpose of this utility model is to provide a kind of 90 ° of outer angle prism laser interferometry instrument, be based on the optics angle-measuring method of laser interferometer, in original laser interferometry instrument, add one group of high-precision tooling device, reduce the various factors that influence measurement result, obtain the measurement result of high precision.
The technical solution of the utility model realizes in the following manner: 90 ° of outer angle prism laser interferometry instrument, comprise 2 high precision catoptrons and 1 block of high precision sheet glass, orthogonal between catoptron and the sheet glass, 90 ° of prisms to be measured place above the sheet glass, it is characterized in that: described catoptron simultaneously is polished surface, another side is a frosting, and polished surface contacts with the both ends of the surface gummed of sheet glass.
The aperture of described catoptron polished surface requires: 0.2f, and surface requirements: 60-40, coating film area needs silver-plated reflective membrane: R＞=95%.
Described sheet glass and catoptron cemented surface need polish, the requirement of polished surface aperture; 0.5f, parallel error＜=0.5.
The utility model, the refraction of light is not subjected to the influence of optical material refractive index, and measurement result is accurate, and flexible operation is simple.
Description of drawings
Fig. 1 is a structural representation of the present utility model.
Embodiment
Know by Fig. 1,90 ° of outer angle prism laser interferometry instrument of present embodiment, by 2 high precision catoptrons 1 and a high precision sheet glass 3, orthogonal between catoptron 1 and the sheet glass 3,90 ° of prisms 2 to be measured place above the sheet glass 3, with catoptron 1, the workplace of sheet glass 3 is handled cleaning, utilize the principle that attracts each other between the optical glass with two catoptrons, 1 optical cement upper flat plate glass 3 then, and guaranteed parallel error＜=0.5 between their polished surface tested prism 2 to be placed on the sheet glass 3.
Laser interferometer is sent two tunnel LASER Light Source, and 1 right angle face at 90 ° of prisms 2 produces reflection respectively, because the workplace of prism is coated with reflectance coating, so light reflects, when later inciding prism right angle face again, produce reflection once more on prism, incorporate injecting laser interferometer into, be received.Two tunnel light that received by laser interferometer produce 2 road interference fringes in system, system software compares automatically, and changes into the angular error data, shows on computers, thereby draws needed result.
Claims (3)
1.90 ° outer angle prism laser interferometry instrument, comprise 2 high precision catoptrons (1) and 1 block of high precision sheet glass (3), orthogonal between catoptron (1) and the sheet glass (3), 90 ° of prisms to be measured (2) place above the sheet glass, it is characterized in that: described catoptron (1) one side is polished surface, another side is a frosting, and polished surface contacts with the both ends of the surface gummed of sheet glass (3).
2. 90 ° of outer angle prism laser interferometry instrument according to claim 1 is characterized in that: the aperture of described catoptron (1) polished surface requires: 0.2f, and surface requirements: 60-40, coating film area needs silver-plated reflective membrane: R＞=95%.
3. 90 ° of outer angle prism laser interferometry instrument according to claim 1 is characterized in that: described sheet glass (3) and catoptron (1) cemented surface need polish the requirement of polished surface aperture; 0.5f, parallel error＜=0.5.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009202358203U CN201527335U (en) | 2009-09-25 | 2009-09-25 | 90-degree external angle prism laser interferometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009202358203U CN201527335U (en) | 2009-09-25 | 2009-09-25 | 90-degree external angle prism laser interferometer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201527335U true CN201527335U (en) | 2010-07-14 |
Family
ID=42518620
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009202358203U Expired - Fee Related CN201527335U (en) | 2009-09-25 | 2009-09-25 | 90-degree external angle prism laser interferometer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201527335U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107941469A (en) * | 2017-10-27 | 2018-04-20 | 南京理工大学 | A kind of equilateral prism apex angle bias measurement method |
-
2009
- 2009-09-25 CN CN2009202358203U patent/CN201527335U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107941469A (en) * | 2017-10-27 | 2018-04-20 | 南京理工大学 | A kind of equilateral prism apex angle bias measurement method |
| CN107941469B (en) * | 2017-10-27 | 2019-11-15 | 南京理工大学 | A kind of equilateral prism apex angle bias measurement method |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN100462674C (en) | Precision determination method for angle between optical axis and mechanical axis of optical system | |
| CN110174054B (en) | High-stability four-optical-path laser interferometry system | |
| CN103267743A (en) | Measuring refractive index device and method thereof | |
| CN103471521B (en) | The real-time detection method of optical aspherical surface fast and accurately | |
| CN101995230A (en) | Talbot effect-based aspheric surface detection system | |
| CN102878935B (en) | Device and method for measuring optical off-plane displacement field based on shearing speckle interference | |
| CN103308281A (en) | Detection device and detection method for wedge-shaped lens | |
| CN205449447U (en) | Optical lens divided beams depth of parallelism detection device | |
| CN106018345A (en) | System and method for measuring refractive index of optical plate glass based on short coherence | |
| CN102818534B (en) | Detection method for detecting surface shape of plane optical component | |
| CN201527335U (en) | 90-degree external angle prism laser interferometer | |
| CN203259473U (en) | Refractivity measuring device | |
| CN108759723B (en) | Optical angle measuring method | |
| CN108759713B (en) | Surface shape three-dimensional measurement system based on ray tracing | |
| CN202676973U (en) | Hollow pyramid assembly | |
| CN108788929B (en) | A kind of processing method accurately controlling nontransparent thickness of workpiece | |
| CN101799588B (en) | Light beam aligning device and aligning method thereof | |
| CN203572450U (en) | Laser interference angle measurement optical path | |
| CN203605909U (en) | System capable of realizing accurate measurement of off-axis parameters of off-axis reflecting mirror | |
| CN103791843A (en) | System capable of realizing precise measurement of off-axis parameters of off-axis reflector and method thereof | |
| CN209446875U (en) | A kind of combined reflected element of high-precision | |
| CN207894588U (en) | The more field image quality detecting devices of optical lens based on prism of corner cube | |
| CN107727009B (en) | Quality detection device for mobile phone cover plate glass | |
| CN101900542A (en) | Lossless measuring device of magnetic roller surface roughness | |
| JPH072960U (en) | Ellipsometer Method for Measuring Samples in Solution |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: DANYANG DANYAO OPTICAL CO., LTD. Free format text: FORMER OWNER: DANGYANG HONGYE ELECTRONICS CO., LTD. Effective date: 20100907 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 212325 HONGYE ELECTRONIC CO., LTD., EAST OF DOUZHUANG RIVER, DOUZHUANG VILLAGE, FANGXIAN TOWN, DANYANG CITY, JIANGSU PROVINCE TO: 212325 HEDONG, DOUZHUANG VILLAGE, FANGXIAN TOWNSHIP, DANYANG CITY, JIANGSU PROVINCE |
|
| TR01 | Transfer of patent right |
Effective date of registration: 20100907 Address after: 212325, Danyang, Jiangsu Province, visit the town of Hedong Patentee after: Danyang Daystar Optics Co.,Ltd. Address before: 212325, Jiangsu, Danyang province visited the town of Hedong Hedong Electronics Co., Ltd. Patentee before: Danyang Hongye Electronics Co., Ltd. |
|
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100714 Termination date: 20170925 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |