CN203572450U - Laser interference angle measurement optical path - Google Patents
Laser interference angle measurement optical path Download PDFInfo
- Publication number
- CN203572450U CN203572450U CN201320632751.6U CN201320632751U CN203572450U CN 203572450 U CN203572450 U CN 203572450U CN 201320632751 U CN201320632751 U CN 201320632751U CN 203572450 U CN203572450 U CN 203572450U
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- China
- Prior art keywords
- plane mirror
- retroreflector
- laser
- angle measurement
- optical path
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- Expired - Lifetime
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- 238000005259 measurement Methods 0.000 title claims abstract description 22
- 230000003287 optical effect Effects 0.000 title abstract description 12
- 230000010287 polarization Effects 0.000 claims abstract description 12
- 239000011248 coating agent Substances 0.000 claims description 3
- 238000000576 coating method Methods 0.000 claims description 3
- 239000000203 mixture Substances 0.000 claims description 3
- 230000002459 sustained effect Effects 0.000 claims description 2
- 238000005516 engineering process Methods 0.000 abstract description 3
- 230000005540 biological transmission Effects 0.000 abstract 1
- 239000011521 glass Substances 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000005305 interferometry Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Images
Abstract
The utility model relates to the geometric measurement technology and specifically discloses a laser interference angle measurement optical path. The laser interference angle measurement optical path comprises two hollow corner matched prisms, a planer mirror set and a polarization splitting prism. The two hollow corner matched prisms are positioned at the same height. The planer mirror set includes three planer mirrors. According to laser interference angle measurement optical path, the hollow corner matched prisms guarantee the consistency of laser transmission, works in cooperation with the mirrors in maintaining consistent laser polarization in the optical path, simplifies the optical path structure, and overcomes factors influencing high-precision interference measurement, and thus data precision and stability of a laser small-angle measuring apparatus are guaranteed.
Description
Technical field
The utility model belongs to geometric sense measurement technology, is specifically related to a kind of laser low-angle and interferes angle measurement light path.
Background technology
Laser narrow angle measuring device is a kind of employing sine principle, with michelson interferometry, measures low-angle high precision instrument, mainly by sinusoidal arm, and spectroscope group, laser interference system forms.The relative center of sinusoidal arm symmetria bilateralis is installed corner cube, and two corner cube centre distances have formed the brachium D of sinusoidal arm.When sinusoidal arm wraparound turns central rotation angle θ, laser interference system measurement of optical path difference is changed to H, with the sine relation sin θ=H/D of sinusoidal arm brachium D existence.The narrow angle measuring device of laser shown in Fig. 1 angle measuring principle.The benchmark that many metering mechanisms measure laser narrow angle measuring device as low-angle in the world, for photoelectric auto-collimator, the calibration of the high-precision small-angle angle measuring instruments such as electrolevel.
At present, the optical interference circuit of the laser narrow angle measuring device of domestic employing, common by Amici prism, total reflection prism, the compositions such as solid corner cube, λ/4 slide, number of optical devices is many, and structure is comparatively complicated, has brought some uncertain factors to laser propagation process, the for example variation of refractive index, the variation of light path, the variation of polarization state etc., thus affect the raising of laser low-angle angle measurement accuracy and stability.In this invention, light channel structure is simple, and optical energy loss is little, and polarization state keeps, and installs to adjust also to facilitate, and can improve the measuring accuracy of laser low-angle device.
Summary of the invention
The purpose of this utility model is to provide that a kind of optical interference circuit is simple in structure, optical energy loss is little, polarization state keeps, laser interference angle measurement light path easy to adjust is installed.
The technical solution of the utility model is as follows:
A laser interference angle measurement light path, comprises retroreflector, plane mirror group and polarization splitting prism, and described retroreflector has two, the first retroreflector and the second retroreflector, and both are positioned at sustained height; Described plane mirror group comprises three plane mirrors, the first plane mirror, the second plane mirror and the 3rd plane mirror, the first plane mirror is positioned under the first retroreflector, the second plane mirror be positioned at the second retroreflector under, the 3rd plane mirror and the first plane mirror are positioned at same level height, and parallel with the first plane mirror; Described polarization splitting prism be positioned at the 3rd plane mirror under, and be positioned on the reflected light path of the second plane mirror.
In above-mentioned a kind of laser interference angle measurement light path: the first described retroreflector is identical with the second retroreflector structure, the tetrahedron all being formed by the identical isosceles triangle catoptron of three block sizes, described mirror surface is provided with golden reflectance coating.
In above-mentioned a kind of laser interference angle measurement light path: the clear aperture of three catoptrons of described composition retroreflector is 25-30mm, caliber size and interference mirror group clear aperture match.
The beneficial effects of the utility model are: retroreflector has guaranteed the consistance of laser propagation, coordinate catoptron that light path inner laser polarization state is consistent, and simplified light channel structure, overcome the factor that affects high precision interferometry, thereby guaranteed data precision and the stability of laser narrow angle measuring device.
Accompanying drawing explanation
Fig. 1 is laser interference angle measurement light path schematic diagram;
In figure: 1. the first retroreflector; 2. the second retroreflector; 3. the first plane mirror; 4. the second plane mirror; 5. the 3rd plane mirror; 6. polarization splitting prism.
Embodiment
Below in conjunction with drawings and the specific embodiments, the utility model is described in further detail.
As shown in Figure 1, laser interference angle measurement light path comprises two retroreflectors, is respectively the first retroreflector 1 and the second retroreflector 2, and they are positioned at same level height.Described retroreflector is one and studs with by three the tetrahedron that isosceles triangle devitrified glass catoptron forms.Three mirror shapes sizes are identical, and surface is coated with golden reflectance coating, and clear aperture is 25mm, can make sinusoidal arm maximum functional angle reach 5 °.
Laser interference angle measurement light path also comprises three plane mirrors, is respectively the first plane mirror 3, the second plane mirror 4 and the 3rd plane mirror 5.Wherein the first plane mirror 3 is positioned under the first retroreflector 1, with 45 ° of installations of beam angle, and make 90 ° of folded light beam and incident beam deflections, the second plane mirror 4 be positioned at the second retroreflector 2 under, with 45 ° of installations of beam angle, and make 90 ° of folded light beam and incident beam deflections, the 3rd plane mirror 5 and the first plane mirror 3 are positioned at same level height, and with the parallel placement of the first plane mirror 3.The horizontal level of the second described plane mirror 4 is lower than the first plane mirror 3.
Laser interference angle measurement light path also comprises polarization splitting prism 6, its be positioned at the 3rd described plane mirror 5 under, and be positioned on the reflected light path of the second plane mirror 4.
It is matrix that described three plane mirrors all adopt devitrified glass, utilizes gold electrode sputter coating process to make reflecting surface, reflecting surface flatness λ/20, and λ is the light wave length of wavelength in a vacuum.And golden coated surface is mirror front-reflection face, without other materials diaphragm.
Claims (3)
1. a laser interference angle measurement light path, comprise retroreflector, plane mirror group and polarization splitting prism (6), described retroreflector has two, the first retroreflector (1) and the second retroreflector (2), and both are positioned at sustained height; Described plane mirror group comprises three plane mirrors, the first plane mirror (3), the second plane mirror (4) and the 3rd plane mirror (5), the first plane mirror (3) is positioned under the first retroreflector (1), the second plane mirror (4) be positioned at the second retroreflector (2) under, the 3rd plane mirror (5) is positioned at same level height with the first plane mirror (3), and parallel with the first plane mirror (3); Described polarization splitting prism (6) be positioned at the 3rd plane mirror (5) under, and be positioned on the reflected light path of the second plane mirror (4).
2. a kind of laser interference angle measurement light path as claimed in claim 1, it is characterized in that: described the first retroreflector (1) is identical with the second retroreflector (2) structure, the tetrahedron being all comprised of the identical isosceles triangle catoptron of three block sizes, described mirror surface is provided with golden reflectance coating.
3. a kind of laser interference angle measurement light path as claimed in claim 2, is characterized in that: the clear aperture of three catoptrons of described composition retroreflector is 25-30mm, and caliber size and interference mirror group clear aperture match.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320632751.6U CN203572450U (en) | 2013-10-14 | 2013-10-14 | Laser interference angle measurement optical path |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320632751.6U CN203572450U (en) | 2013-10-14 | 2013-10-14 | Laser interference angle measurement optical path |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203572450U true CN203572450U (en) | 2014-04-30 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320632751.6U Expired - Lifetime CN203572450U (en) | 2013-10-14 | 2013-10-14 | Laser interference angle measurement optical path |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203572450U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104019729A (en) * | 2014-06-20 | 2014-09-03 | 中国计量科学研究院 | Cone gauge multi-parameter measurement device and method |
| CN112254682A (en) * | 2020-09-23 | 2021-01-22 | 重庆邮电大学 | Three-dimensional angle measurement method of wide-range photoelectric autocollimator |
-
2013
- 2013-10-14 CN CN201320632751.6U patent/CN203572450U/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104019729A (en) * | 2014-06-20 | 2014-09-03 | 中国计量科学研究院 | Cone gauge multi-parameter measurement device and method |
| CN104019729B (en) * | 2014-06-20 | 2017-01-04 | 中国计量科学研究院 | A kind of taper gage multiparameter measuring device and method |
| CN112254682A (en) * | 2020-09-23 | 2021-01-22 | 重庆邮电大学 | Three-dimensional angle measurement method of wide-range photoelectric autocollimator |
| CN112254682B (en) * | 2020-09-23 | 2022-07-01 | 重庆邮电大学 | Three-dimensional angle measurement method of wide-range photoelectric autocollimator |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20140430 |