CN110389112A - A kind of high-precision laser interferometric modulator air refraction absolute measurement device and method - Google Patents
A kind of high-precision laser interferometric modulator air refraction absolute measurement device and method Download PDFInfo
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- CN110389112A CN110389112A CN201910661278.6A CN201910661278A CN110389112A CN 110389112 A CN110389112 A CN 110389112A CN 201910661278 A CN201910661278 A CN 201910661278A CN 110389112 A CN110389112 A CN 110389112A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
- G01N21/45—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N2021/0106—General arrangement of respective parts
- G01N2021/0112—Apparatus in one mechanical, optical or electronic block
Abstract
The invention discloses a kind of high-precision laser interferometric modulator air refraction absolute measurement device and methods.The laser of single-frequency laser output is divided into two collimated light beams after optical isolation and sinusoidal phase modulation, by lateral displacement spectroscope, and directive sinusoidal phase modulating interferometer obtains measurement and compensating interferometer signal, is received by two detectors；Length variable vacuum compartment is placed in the optical path of sinusoidal phase modulating interferometer parallel with the light direction of propagation, and two collimated light beams pass through vacuum chamber vacuum optical path and outside air optical path respectively；When measurement, linearly moving carriage drives movement light inlet window moving distance, calculates two-way interference signal phase changing capacity in real time, finds out air refraction.Measurement accuracy of the present invention is high, and environment resistant interference performance is strong, can be widely applied to laser interference Technology of Precision Measurement field.
Description
Technical field
The present invention relates to air refractive index measurement methods, more particularly, to a kind of high-precision laser interferometric modulator air refraction
Rate absolute measurement device and method.
Background technique
The detection and calibration of air refraction are using optical maser wavelength as the basic measurement of the precision measurement method of length standard
Problem.Existing air refractive index measurement method is mainly PTF equation and laser interferance method.Edl é n based on PTF sensing is public
Formula method is limited by sensor accuracy and formula itself uncertainty, and measurement accuracy is difficult to improve.Laser interferance method is usually with true
Empty refractive index is as standard, caused by optical path difference when measuring laser beam is by the vacuum and air optical path that length is L
Number of interference fringes mainly includes degassing method and containing vacuum cell method.For degassing method, the pumping in measurement process or meeting of deflating
Cavity temperature and air pressure sharply heterogeneity variation in the short time are caused, causes interference fringe to be shaken, and change of atmospheric pressure
Vacuum chamber can be caused to deform, these factors can all make air refraction measurement accuracy limited；For the containing vacuum that length is fixed
Cell method, can only measure the corresponding fractional part interference fringe of optical path difference, and air refraction measurement range is limited.
Summary of the invention
In order to meet optical precision measurement technology to the requirements for high precision of air refraction, the purpose of the present invention is to provide
A kind of high-precision air refraction absolute measurement device and method construct the true of consecutive variations using the vacuum chamber that length can be changed
Empty and air light path, the movement that vacuum chamber is compensated by monitoring vacuum chamber outside air optical path interference signal phase change miss
Difference, to realize high-precision air refraction absolute measurement.
The technical solution adopted by the present invention to solve the technical problems is:
One, a kind of high-precision laser interferometric modulator air refraction absolute measurement device:
Device includes mainly by polarization spectroscope, the first a quarter slide, the first prism of corner cube, the second a quarter glass
Piece, the second prism of corner cube and polarizer group at sinusoidal phase modulating interferometer, it is characterised in that: including single-frequency laser, light
Isolator, electro-optic phase modulator, lateral displacement spectroscope, length variable vacuum compartment, linearly moving carriage, the first detection
Device, the second detector and PGC phase demodulation modules；The input end cloth of polarization spectroscope in sinusoidal phase modulating interferometer
It is equipped with single-frequency laser, optoisolator, electro-optic phase modulator and lateral displacement spectroscope, in sinusoidal phase modulating interferometer
The second a quarter slide and the second prism of corner cube between be placed with length variable vacuum compartment, in sinusoidal phase modulating interferometer
In polarizing film output be disposed with the first detector and the second detector, the first detector and the second detector are all connected to
PGC phase demodulation modules；The length variable vacuum compartment is mainly by fixed light inlet window, telescopic bellows and movement light inlet window
It constitutes, connection is tightly connected by telescopic bellows between fixed light inlet window and movement light inlet window, and the inner cavity of formation is vacuum
Chamber, fixed light inlet window are kept fixed, and movement light inlet window is mounted on linearly moving carriage, and linearly moving carriage drives movement
Light inlet window moves horizontally the length for changing length variable vacuum compartment, moves horizontally and is oriented parallel to by length variable vacuum compartment
Optical axis direction.
Single-frequency laser exports laser, and laser becomes linearly polarized light at 45 ° after optoisolator, and 45 ° of linearly polarized lights pass through again
Electro-optic phase modulator is incident on lateral displacement spectroscope beam splitting, lateral displacement spectroscope output two after carrying out sinusoidal phase modulation
Beam collimated light beam, two beam parallel beam incidents are to the sinusoidal phase modulating interferometer for including length variable vacuum compartment, through sine
Phase modulation interference instrument is output to the first detector and the second detector obtains compensating interferometer signal and measurement interference signal, measurement
Interference signal and compensating interferometer signal are sent to the processing of PGC phase demodulation modules and calculate acquisition air refraction result.
Two beam parallel beam incidents export measurement interference signal and compensating interferometer signal, tool to sinusoidal phase modulating interferometer
Body are as follows: transmission and reflection occur for parallel beam incident to polarization spectroscope, and the transmitted light of polarization spectroscope is successively through the two or four point
One of be incident on the second prism of corner cube and reflect after slide, the fixation light inlet window of length variable vacuum compartment and movement light inlet window,
The reflected light of second prism of corner cube is converse to return to polarization spectroscope, then is incident on after polarization spectroscope reflection, polarizing film transmission
Detector；The reflected light of polarization spectroscope is successively incident on the first prism of corner cube original road after the first a quarter slide turns back back
To the first a quarter slide, polarization spectroscope is returned to after the first a quarter slide transmits again, then through polarization spectro
It is incident on detector after mirror transmission, polarizing film transmission, obtains compensating interferometer signal and measurement interference signal respectively.
Two, a kind of high-precision laser interferometric modulator air refraction absolute method of measurement, using above-mentioned measuring device, method
Include the following steps:
1) laser of single-frequency laser output is divided into two by lateral displacement spectroscope after optical isolation and sinusoidal phase modulation
Beam collimated light beam 1. and 2., directive by a polarization spectroscope, two a quarter slides, two prism of corner cubes and one partially
The sinusoidal phase modulating interferometer that the piece that shakes forms is respectively formed the two-way interference for obtaining measurement interference signal and compensating interferometer signal
Signal is received by two detectors, and signal calculates phase based on the received by PGC phase demodulation modules, in sinusoidal phase
The variable length variable vacuum compartment of a length parallel with the light direction of propagation is placed in modulation interferometer, length can be changed vacuum
The movement light inlet window of chamber is mounted on linearly moving carriage, drives movement light inlet window along parallel rays by linearly moving carriage
The direction of propagation is mobile to realize length variation；
2) before air refraction measurement starts, linearly moving carriage is kept to fix, PGC phase demodulation modules are calculated to survey
Amount interference signal and the phase of compensating interferometer signal are respectivelyWithAs initial phase；
3) linearly moving carriage drives the mobile fixed range Lv of the movement light inlet window of vacuum chamber, in the process PGC phase
Position demodulation module obtains the phase change of two-way interference signal in real time, and obtains the complete cycle of measurement 2 π of interference signal phase change
Number N, movement light inlet window obtains measurement interference signal when stopping and the phase of compensating interferometer signal is respectivelyWith
4) according to the moving distance Lv of light inlet window and the phase changing capacity of measurement and compensating interferometer signal, sky to be measured is obtained
Gas refractive index is naAre as follows:
In formula:WithRespectively the phase difference of measurement interference signal that obtains of the mobile front and back of movement light inlet window and
The phase difference of compensating interferometer signal, ngFor the glass refraction for moving light inlet window, D is the thickness for moving light inlet window, and H is laser light
Vertical range between the optical axis and movement light inlet window bottom of beam.
Compared with the background art, the invention has the advantages that:
(1) sensing unit of the vacuum chamber that the present invention can be changed using length as refractometry, constructs consecutive variations
Vacuum and air light path, realize the absolute measurement of air refraction；
(2) two-way interference signal is formd in the present invention, respectively the vacuum of detection consecutive variations and air light path and light transmission
Heeling error in window moving process realizes the compensation of light inlet window heeling error, improves air refraction measurement accuracy；
(3) in terms of interference signal phase demodulating, the present invention uses sinusoidal phase modulation and PGC Phase Demodulation Method of Optic, mentions
The high phase demodulating precision and anti-interference ability of interference signal；
(4) the configuration of the present invention is simple, easy to use, air refraction measurement accuracy can achieve 10-9, environment resistant interference energy
Power is strong, can be widely applied to laser interference Technology of Precision Measurement field.
Detailed description of the invention
Fig. 1 is high-precision laser interferometric modulator air refraction absolute measurement schematic diagram；
Fig. 2 is the working principle and its movement light inlet window inclination schematic diagram of length variable vacuum compartment；
Fig. 3 is that the movement light inlet window inclination of length variable vacuum compartment introduces vacuum path error schematic diagram.
In figure: 1, single-frequency laser, 2, optoisolator, 3, electro-optic phase modulator, 4, lateral displacement spectroscope, 5, polarization
Spectroscope, the 6, first a quarter slide, the 7, first prism of corner cube, the 8, second a quarter slide, 9, length variable vacuum compartment,
10, linearly moving carriage, the 11, second prism of corner cube, 12, polarizing film, the 13, first detector, the 14, second detector, 15,
PGC phase demodulation modules；901, fixed light inlet window, 902, telescopic bellows, 903, movement light inlet window.
Specific embodiment
The present invention is described in detail with reference to the accompanying drawing, is embodied as follows:
The measuring device of refraction index of air that the present invention is embodied is as shown in Figure 1, air refraction of the invention measures dress
Set as shown in Figure 1, include mainly by polarization spectroscope 5, the first a quarter slide 6, the first prism of corner cube the 7, the 2nd 4/
The sinusoidal phase modulating interferometer that one slide 8, the second prism of corner cube 11 and polarizing film 12 form, further includes single-frequency laser 1, light
Isolator 2, electro-optic phase modulator 3, lateral displacement spectroscope 4, length variable vacuum compartment 9, linearly moving carriage 10, first
Detector 13, the second detector 14 and PGC phase demodulation modules 15；Polarization spectroscope 5 in sinusoidal phase modulating interferometer
Input end be disposed with single-frequency laser 1, optoisolator 2, electro-optic phase modulator 3 and lateral displacement spectroscope 4, in sine
It is placed with length variable vacuum compartment 9 between the second a quarter slide 8 and the second prism of corner cube 11 in phase modulation interference instrument,
12 output of polarizing film in sinusoidal phase modulating interferometer is disposed with the first detector 13 and the second detector 14, and first
Detector 13 and the second detector 14 are all connected to PGC phase demodulation modules 15.
As shown in Fig. 2, length variable vacuum compartment 9 is mainly saturating by fixed light inlet window 901, telescopic bellows 902 and movement
Optical window 903 is constituted, and connection is tightly connected by telescopic bellows 902 between fixed light inlet window 901 and movement light inlet window 903,
The inner cavity of formation is vacuum chamber, and fixed light inlet window 901 is kept fixed, and movement light inlet window 903 is mounted on linearly moving carriage 10
On, linearly moving carriage 10 drives movement light inlet window 903 to move horizontally the length for changing length variable vacuum compartment 9, and level is moved
The dynamic optical axis direction being oriented parallel to by length variable vacuum compartment 9.To change the length of length variable vacuum compartment 9, length
It is identical as direction of beam propagation in optical path that the length of variable vacuum compartment 9 changes direction.
As shown in Figure 1, single-frequency laser 1 exports laser, laser becomes linearly polarized light at 45 ° after optoisolator 2,45 °
Linearly polarized light is incident on 4 beam splitting of lateral displacement spectroscope, lateral position after electro-optic phase modulator 3 carries out sinusoidal phase modulation again
1. and 2. it moves spectroscope 4 and exports two beam collimated light beams, 1. and 2. it includes length variable vacuum compartment 9 that two beam collimated light beams are incident on
Sinusoidal phase modulating interferometer, be output to the first detector 13 and the second detector 14 through sinusoidal phase modulating interferometer and obtain
Compensating interferometer signal and measurement interference signal, measure interference signal and compensating interferometer signal are sent to PGC phase demodulation modules 15
Processing, which calculates, obtains two-way interference signal phase and air refraction result.
Two beam collimated light beams 1. and be 2. incident on include length variable vacuum compartment 9 sinusoidal phase modulating interferometer, warp
Sinusoidal phase modulating interferometer output measurement interference signal and compensating interferometer signal, specifically:
To polarization spectroscope 5 transmission and reflection occur for parallel beam incident, and the transmitted light of polarization spectroscope 5 is successively through second
The second pyramid rib is incident on after a quarter slide 8, the fixation light inlet window 901 of length variable vacuum compartment 9 and movement light inlet window 903
Mirror 11 reflects, and the reflected light of the second prism of corner cube 11 is converse to return to polarization spectroscope 5, and converse is successively variable true through length
Incidence returns to polarization spectroscope 5 after the movement light inlet window 903 of cavity 9 and fixed light inlet window 901, the second a quarter slide 8, then
Detector 13,14 is incident on after the reflection of polarization spectroscope 5, polarizing film 12 transmit；
The reflected light of polarization spectroscope 5 is successively incident on the former road folding of the first prism of corner cube 7 after the first a quarter slide 6
Back to the first a quarter slide 6, polarization spectroscope 5 is returned to after the first a quarter slide 6 transmits again, then through inclined
The transmission of vibration spectroscope 5, polarizing film 12 are incident on detector 13,14 after transmiting.
It will be seen from figure 1 that 1. 2. light beam forms two-way interference signal with light beam in interferometer, wherein light beam is 1.
Measurement interference signal is formed by vacuum chamber vacuum optical path, is received by the second detector 14,2. light beam passes through outside vacuum chamber
Portion's air optical path forms compensating interferometer signal, is received by the first detector 13.
In device shown in Fig. 1, before measurement starts, the movement light inlet window 903 of vacuum chamber is placed in A point, as shown in Fig. 2,
PGC phase demodulation modules 15 calculate the initial phase of measurement and compensating interferometer signal is respectivelyWithWhen straight-line displacement work
When making the drive light inlet window movement of platform 10, the length of vacuum chamber changes, and the vacuum and air light path for causing light beam 1. to pass through change
Become, PGC phase demodulation modules 15 calculate the phase change of two-way interference signal in real time, calculate to obtain measurement 2 π of interference signal phase change
Complete cycle issue N, measured when light inlet window is moved to B point and be respectively with reference to the phase of interference signalWithThen have:
In formula: λ0For the vacuum wavelength of laser 1, OPLmThe change in optical path length amount of front and back light beam 1. is moved for light inlet window,
WithThe respectively phase of the mobile front and back measurement interference signal of light inlet window.
It is illustrated in figure 2 light inlet window inclination schematic diagram, figure it is seen that light beam is 1. and 2. saturating when light inlet window tilts
Change in optical path length in optical window is identical.Assuming that the inclination angle of light inlet window is a, then it is increased in light inlet window when light beam is 1. and 2. round-trip
Light path lgAre as follows:
In formula: ngFor the glass refraction of light inlet window, D is the thickness of light inlet window,WithRespectively light inlet window is mobile
The phase of RELATED APPLICATIONS interference signal.
Movement 10 inclination angle a of light inlet window can be calculated according to formula (2) are as follows:
As shown in figure 3, the vacuum path error schematic diagram of the light beam introduced 1. is tilted for light inlet window, from figure 3, it can be seen that
The inclination of light inlet window also results in 1. vacuum optical path distance that light beam passes through and reduces la, it is assumed that laser beam center and movement
The distance between light inlet window installation point is that H can calculate light beam and 1. reduce then according to the calculated light inlet window inclined angle alpha of formula (3)
Vacuum optical path distance la:
la=Htan α (4)
Finally, the final change in optical path length OPL of light beam 1.mAre as follows:
OPLm=2 (LV-la)·(na-1)+lg (5)
In formula: Lv is the distance that light inlet window is moved to B point from A point, naIt is air refraction to be measured.
In conjunction with formula (1)-(5), obtaining air refraction to be measured is naIt calculates are as follows:
In embodiment, when the wavelength X of single-frequency laser0=632.990577nm, wavelength accuracy are 1.3 × 10-8μm, straight line
The moving distance of displacement work table 10 is 100mm, and positioning accuracy is 0.3 μm, when interference signal phase demodulating precision is 0.1 DEG C,
The measurement accuracy of air refraction is up to 2.8 × 10-9。
To sum up, the present invention constructs the consecutive variations of vacuum and air light path using the vacuum chamber that length can be changed, real
Show the absolute measurement of air refraction, while constructing compensating interferometer signal to measure and compensate the heeling error of vacuum chamber,
To realize high-precision air refraction absolute measurement.
Above-mentioned specific embodiment is used to illustrate the present invention, rather than limits the invention, of the invention
In spirit and scope of protection of the claims, to any modifications and changes that the present invention makes, protection model of the invention is both fallen within
It encloses.
Claims (4)
1. a kind of high-precision laser interferometric modulator air refraction absolute measurement device, including mainly by polarization spectroscope (5),
One a quarter slide (6), the first prism of corner cube (7), the second a quarter slide (8), the second prism of corner cube (11) and polarization
The sinusoidal phase modulating interferometer of piece (12) composition, it is characterised in that: including single-frequency laser (1), optoisolator (2), electric light
Phase-modulator (3), lateral displacement spectroscope (4), length variable vacuum compartment (9), linearly moving carriage (10), the first detection
Device (13), the second detector (14) and PGC phase demodulation modules (15)；Polarization spectroscope in sinusoidal phase modulating interferometer
(5) input end is disposed with single-frequency laser (1), optoisolator (2), electro-optic phase modulator (3) and lateral displacement light splitting
Mirror (4) is placed in the second a quarter slide (8) in sinusoidal phase modulating interferometer and between the second prism of corner cube (11)
Length variable vacuum compartment (9), polarizing film (12) output in sinusoidal phase modulating interferometer are disposed with the first detector
(13) and the second detector (14), the first detector (13) and the second detector (14) are all connected to PGC phase demodulation modules
(15)；The length variable vacuum compartment (9) is mainly by fixed light inlet window (901), telescopic bellows (902) and movement light transmission
Window (903) is constituted, and connection is sealed by telescopic bellows (902) between fixed light inlet window (901) and movement light inlet window (903)
Connection, the inner cavity of formation are vacuum chamber, and fixed light inlet window (901) are kept fixed, and movement light inlet window (903) is mounted on straight-line displacement
On workbench (10), linearly moving carriage (10) drives movement light inlet window (903) to move horizontally change length variable vacuum compartment
(9) length moves horizontally the optical axis direction being oriented parallel to by length variable vacuum compartment (9).
2. a kind of high-precision laser interferometric modulator air refraction absolute measurement device according to claim 1, feature
Be: single-frequency laser (1) exports laser, and laser becomes linearly polarized light at 45 ° after optoisolator (2), and 45 ° of linearly polarized lights are again
Lateral displacement spectroscope (4) beam splitting, lateral displacement light splitting are incident on after electro-optic phase modulator (3) carry out sinusoidal phase modulation
Mirror (4) exports two beam collimated light beams, two beam parallel beam incidents to the sinusoidal phase modulation for including length variable vacuum compartment (9)
Interferometer is output to the first detector (13) through sinusoidal phase modulating interferometer and the second detector (14) obtains compensating interferometer letter
Number and measurement interference signal, measure interference signal and compensating interferometer signal and be sent to PGC phase demodulation modules (15) processing and calculate
Obtain air refraction result.
3. a kind of high-precision laser interferometric modulator air refraction absolute measurement device according to claim 1, feature
Be: two beam parallel beam incidents to sinusoidal phase modulating interferometer export measurement interference signal and compensating interferometer signal, specifically
Are as follows: transmission and reflection occur for parallel beam incident to polarization spectroscope (5), and the transmitted light of polarization spectroscope (5) is successively through second
The is incident on after a quarter slide (8), the fixation light inlet window (901) of length variable vacuum compartment (9) and movement light inlet window (903)
Two prism of corner cubes (11) reflect, and the reflected light of the second prism of corner cube (11) is converse to return to polarization spectroscope (5), then through polarizing
Detector (13,14) are incident on after spectroscope (5) reflection, polarizing film (12) transmission；The reflected light of polarization spectroscope (5) successively passes through
It it is incident on the former road of the first prism of corner cube (7) after first a quarter slide (6) turns back and return to the first a quarter slide (6), pass through
First a quarter slide (6) returns to polarization spectroscope (5) after transmiting again, then through polarization spectroscope (5) transmission, polarizing film
(12) detector (13,14) are incident on after transmiting, obtain compensating interferometer signal and measurement interference signal respectively.
4. a kind of high-precision laser interferometric modulator air refraction absolute method of measurement, it is characterised in that: method includes following step
It is rapid:
1) laser of single-frequency laser (1) output is divided into after optical isolation and sinusoidal phase modulation by lateral displacement spectroscope (4)
1. and 2., directive is by a polarization spectroscope (5), two a quarter slides (6,8), two prism of corner cubes for two beam collimated light beams
(7), the sinusoidal phase modulating interferometer of (11) and a polarizing film (12) composition is respectively formed acquisition measurement interference signal and benefit
The two-way interference signal for repaying interference signal is received by two detectors (13,14), and by PGC phase demodulation modules (15) basis
Received signal calculates phase, and placing a length parallel with the light direction of propagation in sinusoidal phase modulating interferometer can
The movement light inlet window (903) of the length variable vacuum compartment (9) of change, length variable vacuum compartment (9) is mounted on linearly moving carriage
(10) on, movement light inlet window (903) is driven to move realization length along the parallel rays direction of propagation by linearly moving carriage (10)
Variation；
2) before air refraction measurement starts, keep linearly moving carriage (10) fixed, PGC phase demodulation modules (15) are calculated
The phase that interference signal and compensating interferometer signal must be measured is respectivelyWithAs initial phase；
3) linearly moving carriage (10) drives the mobile fixed range Lv of the movement light inlet window (903) of vacuum chamber, in the process
PGC phase demodulation modules obtain the phase change of two-way interference signal in real time, and obtain measurement 2 π's of interference signal phase change
Complete cycle issue N, obtains measurement interference signal when movement light inlet window (903) stops and the phase of compensating interferometer signal is respectively
With
4) according to the moving distance Lv of light inlet window and the phase changing capacity of measurement and compensating interferometer signal, air folding to be measured is obtained
Penetrating rate is naAre as follows:
In formula:WithRespectively the phase difference of measurement interference signal that obtains of the mobile front and back of movement light inlet window (903) and
The phase difference of compensating interferometer signal, ngFor the glass refraction for moving light inlet window (903), D is the thickness for moving light inlet window (903)
Degree, H are the vertical range between the optical axis of laser beam and movement light inlet window (903) bottom.
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| CN111610165A (en) * | 2020-06-08 | 2020-09-01 | 中国工程物理研究院流体物理研究所 | High-pressure gas refractive index precision measurement method |
| CN113358602A (en) * | 2021-08-10 | 2021-09-07 | 中国计量科学研究院 | Air refractive index measuring device and method based on inflatable vacuum cavity |
| CN113607690A (en) * | 2021-08-10 | 2021-11-05 | 中国计量科学研究院 | Air refractive index measuring device and method based on movable vacuum bellows |
| CN113607691A (en) * | 2021-08-10 | 2021-11-05 | 中国计量科学研究院 | Air refractive index fluctuation measuring device and method based on optical vernier Fabry-Perot interference |
| CN114763988A (en) * | 2021-01-14 | 2022-07-19 | 致茂电子(苏州)有限公司 | Laser confocal measuring system and light control module of laser confocal measuring system |
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