CN104713649A - Interferometer used for spectrograph - Google Patents
Interferometer used for spectrograph Download PDFInfo
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Abstract
The invention discloses an interferometer used for a Fourier transformation spectrograph. The interferometer comprises a spectroscope, a third plane mirror, a fourth plane mirror, a movable mirror and a fixed mirror, wherein the movable mirror and the fixed mirror are arranged on light beam paths between the spectroscope and the third plane mirror as well as between the spectroscope and the fourth plane mirror respectively. The movable mirror and the fixed mirror are designed to be of an integrated structure capable of synchronously swinging or rotating. The interferometer can fundamentally eliminate optical path detuning caused by movement errors of a movable mirror bracket and a fixed mirror bracket independent of the movable mirror bracket. The precision and stability of the interferometer in the Fourier transformation spectrograph are improved, and a larger optical path difference can be obtained under the same swinging or rotating angle.
Description
Technical field
The present invention relates to spectrometer art, be specifically related to a kind of Fourier transform spectrometer, interferometer.
Background technology
Fourier transform spectrometer, has that wavelength accuracy is high, sweep velocity is fast, spectral resolution is high, signal to noise ratio (S/N ratio) is high; the advantages such as detectability is low, luminous flux is large, hyperchannel detects simultaneously; be widely used in material detects and nondestructive measurement is studied; play increasing effect in productive life and scientific research field, particularly have a extensive future in all conglomeraties of industry, agricultural, mine prospection, environmental protection, traffic, medical treatment etc.
Fourier transform spectrometer, is based on Michelson interference and fourier transform technique, and system mainly forms and comprises light source, beam splitter, interferometer, photoelectric detector, Electromechanical Control and data processing equipment etc.Its course of work can be described as: wideband light source sends light and form parallel beam after collimation, two bundles are divided into after inciding beam splitter, two-beam turns back to beam splitter and again meets after fixed mirror and index glass reflection, forms interfering beam, converges to photoelectric detector by light beam focusing system.Index glass is along the optical path difference of moving between change two different path reflection beam in incident light direction, generation time sequence interference signal, detecting device receives interference signal and it is converted into electric signal and exports, after the process such as modulation /demodulation, bandpass filtering, amplification of Circuits System, be that digital signal is stored in computing machine through the collection of AD converter, after apodization, phase correction and Fast Fourier Transform (FFT) being carried out to the digital signal gathered by computer software programs, obtain measure spectrum.
In ft-nir spectrometer, core component is interferometer, and its maximum mobile optical path difference determines the highest resolution of spectrometer, and stability determines spectrometer measurement precision and repeatability.Interferometer is by beam splitter, and index glass, the travel mechanism of horizontal glass and correspondence forms.High-accuracy Fourier spectrometer, basic demand for interferometer is that shift motion is long, and stability is high, reproducible, index glass remains unchanged in the light path of moving process Instrumental, and not by the impact that the mechanical vibration produced in index glass moving process and operating ambient temperature change.
Affect the many factors of interferometer precision, wherein process difference in index glass, horizontal glass manufacture process, index glass kinematic error in scanning process is topmost influence factor.Driving index glass to do straight reciprocating motion requires very high for machining and kinematic train, index glass motion process medial error is mainly derived from two aspects: one is due to the at the uniform velocity bad optical path difference sampling error brought of property, it will cause the change of phase place, make interferogram lose symmetry; Two is that the inclination of plane index glass in moving process can cause beam deflection, and it also may bring phase error while reduction interferogram degree of modulation
In interferometer, the small misalignment of optical element can appreciable impact interferometer performance.Michelson interferometer require index glass keep in moving process mirror and wave front perpendicular or parallel, any short-term or the secular variation of the parallel wavefronts relative to incident light of horizontal glass or index glass can affect interference signal, and cause the error of spectral measurement.In order to reduce the misalignment effects of machinery, acoustics and thermal perturbation, interferometer is designed to have large quality and thermal capacity.Significantly, the instrument of large interferometer is used to be not easy to carry, stiff even.Often adopt passive or aggressive device to reduce misalignment effect at commercialization interferometer, wherein passive device comprises and uses corner cube mirror, retroreflector or other compensation systems as far as possible.Aggressive device comprises dynamic mirror alignment device or active thermal control device.It is improved one's methods and comprises: the interferometer of Thermo company have employed the aligning Position Design of high speed dynamic digital collimation technique, Modularized optical platform and optical element; PerkinElmer company have employed mechanical rotation double-movable-mirror interferometer and " absolute standard instrument " (absolute virtualinstrument, AVI) function; Bruker company adopts solid angle mirror interferometer; ABB AB adopts " furcula " interferometer; Buchi company adopts polarized interferometer etc.These innovative approachs can improve performance and the long-time stability of spectral instrument to a certain extent, but also there are some problems in the application, and some needs special maintenance personnel to the conscientious periodic calibration of instrument, guarantee Instrument measuring precision.
Domestic and international a series of patent and article also improve interferometer design, as the people such as Wadsworth proposed tilting mirror interference technique scheme in 1997, utilize tilting mirror to rotate and produce optical path difference realization interference, but because tilting mirror material optical path difference under different wave length refractive index is non-linear, interference signal is easily caused to change, therefore propose very high requirement to the selection of tilting mirror material, manufacturing cost is higher.
The people such as Liao Ningfang (patent: a kind of rotary Fourier transform inteference imaging spectrometer, 201210254898.6) devise a kind of rotary Fourier transform interferometer, traditional movable reflector straight-line motion scan mode is replaced with beam splitter or cube corner catoptron rotary scanning mode, there is the characteristic of common light path, even if beam splitter has small rocking in rotary course, also interference effect can not be affected; Replace the level crossing in conventional Fourier transform imaging spectrometer with cube corner catoptron, avoid the problem because mirror tilt brings, improve the ability of the stability of instrument, reliability and concussion resistibility.
The rotary mirror type high sensitivity interferometer design that the people such as Yuan Yan propose, adopt the tilting mirror interference technique based on sagnac beam splitting structure, but the angle in this structure between beam splitter and two catoptrons has strict restriction, not easily debug, structure is not compact, less stable, is difficult to realize material objectization and commercialization manufacture.
The double-movable-mirror interferometer structure (200810017691.0) that the people such as Yang Qinghua proposes by a beam splitter, fixing plane mirror, be installed in parallel in the first index glass on the public slide unit that can be linearly moved and the second index glass forms; First index glass and the second index glass are fixed together abreast by a rigid structure, and as an independent moving component, beam splitter and plane mirror are mutually vertical, and they and the angle between the first index glass and the second index glass are 45 degree; Optical path difference is produced by the straight reciprocating motion of the two index glass of parallel plane, and optical path difference is 4 times of two index glass displacement (relative to its zero optical path difference position).This interferometer structure is simple, cost is low, but rigid connection structure causes system to manufacture complexity, and light path characteristic is easily subject to the strain impact that is rigidly connected, and requires very high, be difficult to realize commercialization for coupling arrangement manufacturing accuracy.
The people such as Simon (U.S. Patent No. 5,309,217) have invented the interferometer using pivot and retroreflector.Its advantage be stable, be easy to aim at.But the light path system designed in this patent needs multiple extra minute surface and adds whole light path active path length, its adverse consequences caused significantly increases the instability being caused light path by thermal distortion, and optical element and relevant structural volume are comparatively large, affect the compactedness of whole instrument.
In sum, adopt in interferometer in Fourier transform spectrometer up to now straight line index glass scanning and rotating mirror scanning principle respectively have feature, but all distinguish the light path imbalance that existence and stability is poor, high to tilting mirror material requirements, linear ramp " is creeped " to be caused, there is kinematic error in separate index glass and horizontal glass bracket, straight reciprocating motion and swing the non-homogeneous mechanical wear caused at the intrinsic commutation dead point of to-and-fro movement, light channel structure such as not easily to debug at the problem.
Summary of the invention
The object of the present invention is to provide a kind of Fourier trasform spectroscopy interferometer, it fundamentally can eliminate the light path imbalance that separate index glass and horizontal glass movement of bracket error cause, improve Fourier spectrometer in use interferometer precision and stability, and under identical swing or rotational angle, obtain larger optical path difference.
For realization is above-mentioned purpose, the present invention adopts following proposal to implement:
A kind of Fourier transform spectrometer, interferometer, comprise index glass and horizontal glass that spectroscope, third and fourth plane mirror and the beam path between spectroscope and third and fourth plane mirror are arranged respectively, index glass and horizontal glass are the integral structure synchronously carrying out swinging or rotating.
Further:
Index glass, between horizontal glass and third and fourth plane mirror, be respectively arranged with first and second hollow corner reflector.
Spectroscope and be also respectively arranged with first and second plane mirror between index glass and horizontal glass.
The present invention specifically has following four kinds of embodiments:
One:
Described index glass and horizontal glass are that two reflectings surface of a two-sided planar catoptron are formed respectively, first and third plane mirror and the first hollow corner reflector and second, four plane mirrors be placed in two-sided planar catoptron two outside, reflective mirror is positioned at the outer end of the two-sided planar catoptron near first and second plane mirror, two-sided planar catoptron rotates and is fixed on support, forms this shaft axis be rotationally connected and becomes to be arranged vertically with the normal of index glass, horizontal glass.
Its two:
Described index glass and horizontal glass are that two reflectings surface of a two-sided planar catoptron are formed respectively, first and third plane mirror and the first hollow corner reflector and second, four plane mirrors be placed in two-sided planar catoptron two outside, reflective mirror is positioned at the outer end of the two-sided planar catoptron near first and second plane mirror, two-sided planar catoptron rotates and is fixed on rigid support, forms this shaft axis be rotationally connected and index glass, the normal of horizontal glass acutangulates angle and arrange.
Be preferably, spectroscopical light spliting angle is 45 °, and the normal angle of shaft axis and index glass, horizontal glass is 2 °.
Its three:
Described index glass and horizontal glass are that the reflecting surface of a plane mirror is formed along two parts that cut-off rule is divided into always, this plane mirror rotates and is fixed on runing rest, form this shaft axis be rotationally connected crossing with straight cut-off rule, spectroscope, 3rd, four plane mirrors, first, two hollow corner reflectors are all positioned at the outside of this plane mirror reflecting surface, and the 3rd plane mirror, first hollow corner reflector and the 4th plane mirror, second hollow corner reflector is arranged about the symmetrical correspondence of straight cut-off rule, spectroscope is positioned at first, the centre of two hollow corner reflectors, 3rd, four catoptrons are placed in first, the outside of two hollow corner reflectors, shaft axis and index glass, the normal of horizontal glass acutangulates angle and arranges.
Be preferably, spectroscopical light spliting angle is 45 °, and shaft axis becomes angle to be 2 ° with the normal of index glass, horizontal glass.
Its four:
Described index glass and horizontal glass are that the two plane scintilloscopes connected as one by same rotating shaft are formed, the reflecting surface of index glass and horizontal glass is arranged in opposite directions, spectroscope, third and fourth plane mirror about index glass, horizontal glass rotating shaft correspondence be placed in index glass, horizontal glass two outside, the normal of the shaft axis of index glass, horizontal glass and index glass, horizontal glass acutangulates angle and arranges.
Preferably, spectroscopical light spliting angle is 45 °, and index glass, horizontal glass spacing are 30mm, and the normal angle of the shaft axis of index glass, horizontal glass and index glass, horizontal glass is 5 °.
The interferometer structure that the present invention adopts index glass and horizontal glass to be integrated, comprises the beam splitter at 45 ° with incident beam, fixation reflex level crossing and hollow corner reflector.System light path is symmetrical about index glass horizontal glass assembly, the two-beam that spectroscope separates by plane mirror reflexes on the reflecting surface of index glass horizontal glass assembly, hollow corner reflector and plane mirror acting in conjunction, turn back to spectroscope and form interference by the Guang Yuanlu reflected from index glass horizontal glass assembly.
Innovation of the present invention is:
Index glass horizontal glass assembly (integral structure) enormously simplify the structure of interferometer, provides the possibility of the fit pivot of the winding motion of interferometer being reduced to the combination of index glass horizontal glass or continuously and smoothly's rotation.Assembly adopts monolithic molding manufacture method, has two workplaces, drops to minimum by two workplace manufacturing variations, reduce the impact of manufacturing process size for spectrometer precision
The tapered roller bearing support rotary mechanism of symmetric double can be adopted, gap can be reduced to minimum like this, index glass and horizontal glass are integrated, it is made to stand identical swing, rotate, vibration and distortion, index glass horizontal glass unification continuously and smoothly rotates and greatly will improve sampling rate and greatly reduce straight reciprocating motion and swing the non-homogeneous mechanical wear caused at to-and-fro movement commutation dead point.
Two reflectings surface of index glass horizontal glass assembly are parallel to each other, and when after plane mirror and prism of corner cube Correctly adjust, rotate index glass horizontal glass assembly and can not change two light beams coincidences interference position and collimation property on spectroscope, only produce the difference of light path.Under identical swings or rotational angle, the optical path difference that index glass horizontal glass combined structure produces is one times that swings or rotate single index glass.This structure is also convenient to the light path according to circumstances between beam splitter and plane mirror be provided with the compensating plate simultaneously compensating various wavelength optical path difference.
Beneficial effect of the present invention is:
Index glass and horizontal glass are integrated or index glass and horizontal glass are fixed in same rigid mechanical structure, it stands identical swing, rotate, vibration and distortion, fundamentally eliminate the light path imbalance that separate index glass and horizontal glass movement of bracket error cause, comparatively large for motion process medial error, i.e. its vibration, strain, the interferogram degree of modulation of inclination institute noise and the impact of phase place less.Optical path difference is two index glass displacements, and namely very little two index glass displacements can obtain larger optical path difference, are applicable to high spectral resolution spectrometer.
Accompanying drawing explanation
Fig. 1,2,3,4 is four kinds of embodiments of the present invention.
Embodiment
In order to make objects and advantages of the present invention clearly understand, below in conjunction with embodiment, the present invention is further elaborated.Should be appreciated that specific embodiment described herein only in order to explain the present invention, be not intended to limit the present invention.
A kind of Fourier transform spectrometer, interferometer, comprise index glass and horizontal glass that spectroscope, third and fourth plane mirror and the beam path between spectroscope and third and fourth plane mirror are arranged respectively, for synchronously carrying out the integral structure swinging or rotate between index glass and horizontal glass.Index glass, between horizontal glass and third and fourth plane mirror, be respectively arranged with first and second hollow corner reflector.Spectroscope and be also respectively arranged with first and second plane mirror between index glass and horizontal glass.
Shown in Fig. 1, it is the first embodiment of the present invention, in this embodiment: described index glass and horizontal glass are that two reflectings surface of a two-sided planar catoptron are formed respectively, first and third plane mirror and the first hollow corner reflector and second, four plane mirrors be placed in two-sided planar catoptron two outside, reflective mirror is positioned at the outer end of the two-sided planar catoptron near first and second plane mirror, two-sided planar catoptron rotates and is fixed on support, forms this shaft axis be rotationally connected and becomes to be arranged vertically with the normal of index glass, horizontal glass.
Specifically as shown in Figure 1, in figure, structure 1 is the double-sided coating plane-parallel mirror (two-sided planar catoptron) as index glass horizontal glass assembly, can swing around oscillation centre 2.3 is 50% spectroscopes.4 is the incident beams after collimation.5 be experience beam splitting differential with light path after again overlap to together with emergent light.6 and 7 is plane mirrors, and the two-beam separated by spectroscope reflexes on the reflecting surface of index glass horizontal glass assembly 1.8 and 9 is hollow corner reflectors, and 10 and 11 is plane mirrors.The effect of 8 ~ 10 and 9 ~ 11 Guang Yuanlu reflected from index glass horizontal glass assembly 1 is turned back to spectroscope to form same light path interference.Because two reflectings surface of index glass horizontal glass assembly 1 are parallel to each other, when after plane mirror 10 and 11 Correctly adjust, rotate the collimation that index glass horizontal glass assembly 1 can not change the same light path interference of two light beams coincidences on spectroscope.Rotate the difference that index glass horizontal glass assembly 1 produces two-way light path light path, thus realize the optical path scanning needed for Fourier transform.
Shown in Fig. 2, it is the second embodiment of the present invention, in this embodiment: described index glass and horizontal glass are that two reflectings surface of a two-sided planar catoptron are formed respectively, first and third plane mirror and the first hollow corner reflector and second, four plane mirrors be placed in two-sided planar catoptron two outside, reflective mirror is positioned at the outer end of the two-sided planar catoptron near first and second plane mirror, two-sided planar catoptron rotates and is fixed on rigid support, forms this shaft axis be rotationally connected and index glass, the normal of horizontal glass acutangulates angle and arrange.
Concrete as shown in Figure 2, in this figure, 20 is double-sided coating plane-parallel mirrors of index glass horizontal glass assembly.This two-sided plane-parallel mirror is fixed on rigid support 22 with the θ angle that its normal is fixing with 21 one-tenth, turning axle one.23 is 50% spectroscopes.24 is the incident beams after collimation.25 be experience beam splitting differential with light path after again overlap to together with emergent light.26 and 27 is plane mirrors, is reflexed to by the two-beam of spectroscope outgoing on the reflecting surface of index glass horizontal glass assembly 20.28 and 29 is hollow corner reflectors, and 30 and 31 is plane mirrors.The effect of 28 ~ 30 and 29 ~ 31 Guang Yuanlu reflected from index glass horizontal glass assembly 20 is turned back to spectroscope to form same light path interference.Because two reflectings surface of index glass horizontal glass assembly 20 are parallel to each other, when after plane mirror 26 and 27 Correctly adjust, rigid support 22 drives index glass horizontal glass assembly 20 can not change the collimation of the same light path interference of two light beams coincidences on spectroscope when turning axle 21 rotates.Rotate the difference that index glass horizontal glass assembly 20 produces two-way light path light path, thus realize the optical path scanning needed for Fourier transform.
Calculating shows, is 45 degree at light spliting angle, and when θ angle is 2 °, index glass horizontal glass assembly rotates a circle the optical path scanning that can realize maximum 19.36 millimeters.
Shown in Fig. 3, it is the third embodiment of the present invention, in this embodiment: described index glass and horizontal glass are that the reflecting surface of a plane mirror is formed along two parts that cut-off rule is divided into always, this plane mirror rotates and is fixed on runing rest, form this shaft axis be rotationally connected crossing with straight cut-off rule, spectroscope, 3rd, four plane mirrors, first, two hollow corner reflectors are all positioned at the outside of this plane mirror reflecting surface, and the 3rd plane mirror, first hollow corner reflector and the 4th plane mirror, second hollow corner reflector is arranged about the symmetrical correspondence of straight cut-off rule, spectroscope is positioned at first, the centre of two hollow corner reflectors, 3rd, four catoptrons are placed in first, the outside of two hollow corner reflectors, shaft axis and index glass, the normal of horizontal glass acutangulates angle and arranges.
Specifically as shown in Figure 3, in this embodiment, 30 is the coating single side plane mirrors as index glass horizontal glass assembly.Two-beam road is all by the reflection of this same plane catoptron, and any deformation, shakes the error caused and all can offset because occurring on same rigid body.This plane-parallel mirror 30 is fixed on rigid rotating support 31 with the θ angle that its normal is fixing with 32 one-tenth, turning axle one.33 is 50% spectroscopes.34 is the incident beams after collimation.35 be experience beam splitting differential with light path after again overlap to together with emergent light.36 and 37 is hollow corner reflectors, and 38 and 39 is plane mirrors.The effect of 36 ~ 38 and 37 ~ 39 Guang Yuanlu reflected from index glass horizontal glass assembly 30 is turned back to spectroscope to form same light path interference.When after plane mirror 38 and 39 Correctly adjust, rigid support 31 drives index glass horizontal glass assembly 30 can not change the collimation of the same light path interference of two light beams coincidences on spectroscope when turning axle 32 rotates.Rotate the difference that index glass horizontal glass assembly 30 produces two-way light path light path, thus realize the optical path scanning needed for Fourier transform.
Calculating shows, is 45 degree at light spliting angle, and when θ angle is 2 °, index glass horizontal glass assembly rotates a circle the optical path scanning that can realize maximum 20.56 millimeters.
Shown in Fig. 4, it is the present invention's the 4th kind of embodiment, in this embodiment: described index glass and horizontal glass are that the two plane scintilloscopes connected as one by same rotating shaft are formed, the reflecting surface of index glass and horizontal glass is arranged in opposite directions, spectroscope, third and fourth plane mirror about index glass, horizontal glass rotating shaft correspondence be placed in index glass, horizontal glass two outside, the normal of the shaft axis of index glass, horizontal glass and index glass, horizontal glass acutangulates angle and arranges.
Concrete in this figure, 50 and 51 is plane mirrors as shown in Figure 4, two coated reflection face parallel opposed longer sides and putting.Plane mirror 50 and 51 is fixed on rigid structure 52 with its normal direction and turning axle mode into θ angle.The index glass horizontal glass assembly that rigid structure 52 is formed together with plane mirror 50 and 51 can rotate around turning axle 53.54 is 50% spectroscopes.55 is the incident beams after collimation.56 be experience beam splitting differential with light path after again overlap to together with emergent light.57 and 58 be plane mirror (or in similar Fig. 18 ~ 10 corner reflector and combination plane mirrow).Because the reflecting surface of plane mirror 50 and 51 is parallel to each other, the light separated through spectroscope 54 respectively reflects once respectively on the reflecting surface of plane mirror 50 and 51, is turned back to spectroscope formation same light path interfere by plane mirror 57 or 58 reflection Hou Yanyuan road.Because the reflecting surface of plane mirror 50 and 51 is parallel to each other, index glass horizontal glass assembly 50 ~ 51 ~ 52 rotates the collimation that can not change two light paths around turning axle 53.Should rotate around turning axle 53 difference only producing two-way light path light path, thus realize the optical path scanning needed for Fourier transform.
Calculating shows, is 45 degree at light spliting angle, 30 millimeters, index glass horizontal glass interval, and when θ angle is 5 °, index glass horizontal glass assembly rotates a circle the optical path scanning that can realize maximum 29.6 millimeters.
The above is only the preferred embodiment of the present invention; it should be pointed out that for those skilled in the art, under the premise without departing from the principles of the invention; can also make some improvements and modifications, these improvements and modifications also should be considered as protection scope of the present invention.
Claims (7)
1. a Fourier transform spectrometer, interferometer, comprise index glass and horizontal glass that spectroscope, third and fourth plane mirror and the light path between spectroscope and third and fourth plane mirror are arranged respectively, index glass and horizontal glass are the integral structure that can synchronously carry out swinging or rotating.
2. Fourier transform spectrometer, interferometer as claimed in claim 1, is characterized in that: index glass, be respectively arranged with first and second hollow corner reflector between horizontal glass and third and fourth plane mirror.
3. Fourier transform spectrometer, interferometer as claimed in claim 1, is characterized in that: spectroscope and be also respectively arranged with first and second plane mirror between index glass and horizontal glass.
4. Fourier transform spectrometer, interferometer as claimed in claim 1, it is characterized in that: described index glass and horizontal glass are that the two plane scintilloscopes connected as one by same rotating shaft are formed, the reflecting surface of index glass and horizontal glass is arranged in opposite directions, spectroscope, third and fourth plane mirror about index glass, horizontal glass rotating shaft correspondence be placed in index glass, horizontal glass two outside, the normal of the shaft axis of index glass, horizontal glass and index glass, horizontal glass acutangulates angle and arranges.
5. Fourier transform spectrometer, interferometer as claimed in claim 2, it is characterized in that: described index glass and horizontal glass are that the reflecting surface of a plane mirror is formed along two parts that cut-off rule is divided into always, this plane mirror rotates and is fixed on runing rest, form this shaft axis be rotationally connected crossing with straight cut-off rule, spectroscope, 3rd, four plane mirrors, first, two hollow corner reflectors are all positioned at the outside of this plane mirror reflecting surface, and the 3rd plane mirror, first hollow corner reflector and the 4th plane mirror, second hollow corner reflector is arranged about the symmetrical correspondence of straight cut-off rule, spectroscope is positioned at first, the centre of two hollow corner reflectors, 3rd, four catoptrons are placed in first, the outside of two hollow corner reflectors, shaft axis and index glass, the normal of horizontal glass acutangulates angle and arranges.
6. spectrometer interferometer as claimed in claim 3, it is characterized in that: described index glass and horizontal glass are that two reflectings surface of a two-sided planar catoptron are formed respectively, first and third plane mirror and the first hollow corner reflector and second, four plane mirrors be placed in two-sided planar catoptron two outside, reflective mirror is positioned at the outer end of the two-sided planar catoptron near first and second plane mirror, two-sided planar catoptron rotates and is fixed on rigid support, forms this shaft axis be rotationally connected and index glass, the normal of horizontal glass acutangulates angle and arrange.
7. spectrometer interferometer as claimed in claim 3, it is characterized in that: described index glass and horizontal glass are that two reflectings surface of a two-sided planar catoptron are formed respectively, first and third plane mirror and the first hollow corner reflector and second, four plane mirrors be placed in two-sided planar catoptron two outside, reflective mirror is positioned at the outer end of the two-sided planar catoptron near first and second plane mirror, two-sided planar catoptron rotates and is fixed on support, forms this shaft axis be rotationally connected and becomes to be arranged vertically with the normal of index glass, horizontal glass.
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| CN111708037A (en) * | 2020-06-24 | 2020-09-25 | 清华大学 | Passive measuring head and double-optical comb measuring system based on tunable band-pass filter |
| CN113447124A (en) * | 2021-06-29 | 2021-09-28 | 中国科学院空天信息创新研究院 | Low-sampling high-resolution interference spectrum system |
| CN113640241A (en) * | 2021-08-20 | 2021-11-12 | 中国科学院空天信息创新研究院 | Oscillating Fourier transform infrared spectrum device |
| CN113654659A (en) * | 2021-08-30 | 2021-11-16 | 中国科学院空天信息创新研究院 | Swinging Fourier transform infrared spectrum device with parallel reflector group |
| CN113654658A (en) * | 2021-08-30 | 2021-11-16 | 中国科学院空天信息创新研究院 | Parallel reflector group rotary Fourier transform infrared spectrum device |
| CN113740287A (en) * | 2021-09-15 | 2021-12-03 | 中国科学院空天信息创新研究院 | Rotating parallel mirror type Fourier transform infrared spectrum device |
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| US11448552B2 (en) * | 2020-04-27 | 2022-09-20 | Xi'an Institute Of Optics And Precision Mechanics, Chinese Academy Of Sciences | Common-path cube corner interferometer and interference technique |
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| CN113447124A (en) * | 2021-06-29 | 2021-09-28 | 中国科学院空天信息创新研究院 | Low-sampling high-resolution interference spectrum system |
| CN113447124B (en) * | 2021-06-29 | 2023-02-28 | 中国科学院空天信息创新研究院 | Low-sampling high-resolution interference spectrum system |
| CN113640241A (en) * | 2021-08-20 | 2021-11-12 | 中国科学院空天信息创新研究院 | Oscillating Fourier transform infrared spectrum device |
| CN113640241B (en) * | 2021-08-20 | 2023-03-14 | 中国科学院空天信息创新研究院 | Oscillating Fourier transform infrared spectrum device |
| CN113654659A (en) * | 2021-08-30 | 2021-11-16 | 中国科学院空天信息创新研究院 | Swinging Fourier transform infrared spectrum device with parallel reflector group |
| CN113654658A (en) * | 2021-08-30 | 2021-11-16 | 中国科学院空天信息创新研究院 | Parallel reflector group rotary Fourier transform infrared spectrum device |
| CN113654658B (en) * | 2021-08-30 | 2023-08-01 | 中国科学院空天信息创新研究院 | Rotary Fourier transform infrared spectrum device of parallel reflecting mirror group |
| CN113654659B (en) * | 2021-08-30 | 2023-08-01 | 中国科学院空天信息创新研究院 | Swinging Fourier transform infrared spectrum device of parallel reflecting mirror group |
| CN113740287A (en) * | 2021-09-15 | 2021-12-03 | 中国科学院空天信息创新研究院 | Rotating parallel mirror type Fourier transform infrared spectrum device |
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| CN104713649B (en) | 2017-06-09 |
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Application publication date: 20150617 Assignee: Tianjin nine Light Technology Development Co., Ltd. Assignor: Tianjin Tongyang Science &Technology Development Co., Ltd. Contract record no.: 2019120000007 Denomination of invention: Interferometer used for Fourier transform spectrograph Granted publication date: 20170609 License type: Common License Record date: 20190722 |