CN102359818A - Infrared spectrum interferometer and infrared spectrometer employing interferometer - Google Patents
Infrared spectrum interferometer and infrared spectrometer employing interferometer Download PDFInfo
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- CN102359818A CN102359818A CN2011102855316A CN201110285531A CN102359818A CN 102359818 A CN102359818 A CN 102359818A CN 2011102855316 A CN2011102855316 A CN 2011102855316A CN 201110285531 A CN201110285531 A CN 201110285531A CN 102359818 A CN102359818 A CN 102359818A
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Abstract
The invention provides an infrared spectrum interferometer. And the infrared spectrum interferometer includes a light source that emits a parallel light; a beam splitter prism is arranged at a heading direction of the parallel light; a compensating mirror, a movable solid angle mirror and a first plane mirror are successively arranged on a transmitted light path of the beam splitter prism; and a fixed solid angle mirror and a second plane mirror are successively arranged on a reflected light path of the beam splitter prism. Besides, a beam splitter prism plane, which is plated with a beam splitting coating, is in parallel with an angular bisector of an included angle that is formed by the second plane mirror and the first plane mirror; the second plane mirror is perpendicular to an optical axis of the fixed solid angle mirror; and the first plane mirror is perpendicular to an optical axis of the movable solid angle mirror. According to the infrared spectrum interferometer provided in the invention, the interferometer has a unique light path design; therefore, the interferometer is not only not influenced by angular deflection of solid angle mirrors but also not influenced by position translation of peaks of the solid angle mirrors, so that anti-environmental interference capability of the interferometer is strong. In addition, the invention also provides an infrared spectrometer that employs the infrared spectrum interferometer; and beneficially technical effects of the infrared spectrometer are the same as that of the infrared spectrum interferometer.
Description
Technical field
The invention belongs to the infrared spectrometry technical field, particularly a kind of infrared spectrum interferometer and the infrared spectrometer that adopts this infrared spectrum interferometer.
Background technology
Infrared spectrum is the fingerprint spectral region of material, has up to the present accumulated abundant ir data, gives and differentiates unknown compound, and the content of quantitative test compound provides powerful measure.Because the logical light quantity of grating spectrograph slit is little, the infrared radiation that adds infrared light supply is a lot of a little less than than visible light, and grating type spectrum is eliminated at infrared band gradually.To the seventies, on the flourish basis of robot calculator, FFIR (FTIR) experimental technique gets into modernized scholar's laboratory, becomes the important tool of structure analysis.It makes classical infrared spectrum technology obtain new life again with the brand-new looks of high sensitivity, high resolving power, scanning fast, on line operation and height computerization.
The core of Fourier transformation infrared spectrometer is an infrared spectrum interferometer; Mainly contain at present two types infrared spectrum interferometer at the Fourier transformation infrared spectrometer of usefulness: with the classical Michelson interferometer of thermoelectric (Thermo-fisher) company employing two plane mirrors that are representative with Buddhist nun's high-tensile strength (Nicolet) company is the modified Michelson interferometer of the employing two angle mirror catoptrons of representative.Before a kind of interferometer must guarantee two level crossings angular error less than a rad (1/3600 degree), it has adopted a kind of dynamic development adjustment to adjust the requirement that one of them plane mirror reaches this harshness in real time for this reason.But when instrument ran into bigger vibrations and moves, dynamically the scope of adjustment was just not enough, must manual work readjust instrument.A kind of interferometer in back has bigger improvement in this regard, but still the position translation error that requires the angle mirror catoptron is less than 0.01mm.All do not run into big problem though two kinds of interferometers use under superior laboratory environment, need under the on-the-spot situation of mobile test and abominable Industry Control at some, vibrations have all formed the test that is difficult to bear for instrument.
Fig. 1 is the light path principle figure of classical Michelson interferometer.The horizontal light that sends from light source 1 is divided into two bundles through beam splitter 2 (half sees through, a half reflection), after a branch of the seeing through, through compensating glass 3, is returned by level crossing 6 ' reflection, reflexes to detecting device 4 by beam splitter 2 again; Another bundle is returned by level crossing 5 ' reflection earlier by beam splitter 2 reflections then, sees through beam splitter 2 to detecting device 4 again.Can find out that being 45 degree in beam splitter 2 and incident ray strictness places; Level crossing 5 ' and 6 ' and incident ray respectively strictness be 0 degree and 90 whens placement degree; The two-beam of being opened in 2 minutes by beam splitter can arrive the same position of detecting device 4 and interfere; If there is small deflection beam splitter 2 and two catoptrons 5 ', 6 ' positions, two-beam will arrive the diverse location of detecting device 4.In general, required angle deflection is less than 1 rad, but this is to be difficult to satisfy, and particularly level crossing 6 ' need be when measuring under the at the uniform velocity reciprocating situation.
Fig. 2 is the light path principle figure of modified Michelson interferometer.Three- dimensional angle mirror 7 and 8 has replaced level crossing 5 ' and 6 ' respectively.Desirable three-dimensional angle mirror is when its summit rotates, and the angle of emergent ray and incident ray total energy keeps 180 °.Therefore when movably moving three-dimensional angle mirror 8 moves reciprocatingly, the rotation of moving three-dimensional angle mirror 8 will can not make the light of detecting device 4 change.But, when the summit of three-dimensional angle mirror 8 is moved perpendicular to optical axis direction front and back (or up and down) translation of moving three-dimensional angle mirror 8 in the edge, can find that two-way light will reflex to the diverse location of detecting device 4 after moving.Though the infrared spectrum interferometer after therefore improving is insensitive to the rotation of moving three-dimensional angle mirror 8, become front and back (or the up and down) translation on moving three-dimensional angle mirror 8 summits responsive.
Summary of the invention
The present invention proposes a kind of infrared spectrum interferometer; The light path design of the uniqueness of this interferometer; Make the influence of its angular deflection that neither receives three-dimensional angle mirror also not receive simultaneously the influence of the position translation of solid angle vertex point; And with in the interferometer the responsive device of micro-displacement being concentrated in the optics monomer structure, therefore anti-environmental disturbances ability further strengthens.Simultaneously, the present invention also provides a kind of infrared spectrometer that adopts this infrared spectrum interferometer, can obtain same beneficial technical effects.
Technical scheme:
A kind of infrared spectrum interferometer; It is characterized in that; Comprise the light source (1) that sends parallel rays; The working direction of said parallel rays is provided with beam splitter (2), on the transmitted light path of beam splitter (2), is disposed with compensating glass (3), the moving three-dimensional angle mirror (8) that can move along its optical axis direction and fixing first level crossing (6), and transmitted light sees through said compensating glass (3) and reflexes on first level crossing (6) through moving three-dimensional angle mirror (8); Said first level crossing (6) reflects incident light to reverse solid angle mirror (8) and further see through compensating glass (3) and returns beam splitter (2) along former road, beam splitter (2) reflexes to detecting device (4) with it; On the reflected light path of beam splitter (2), be disposed with fixing fixed three-dimensional angle mirror (7) and fixing second level crossing (5); Folded light beam reflexes on second level crossing (5) through fixed three-dimensional angle mirror (7), and said second level crossing (5) is projected to detecting device (4) with incident ray along former road reflected back beam splitter (2) and through beam splitter (2); The face that is coated with beam splitting coating of beam splitter wherein (2) is parallel to the angular bisector of the angle of said second level crossing (5) and first level crossing (6) formation; Second level crossing (5) is perpendicular to the optical axis of fixed three-dimensional angle mirror (7); First level crossing (6) is perpendicular to the optical axis of moving three-dimensional angle mirror (8); Said compensating glass (3) is parallel to said beam splitter (2) setting; And with the same material of said beam splitter (2), equal thickness, the transmitted light of the parallel rays of said light source (1) behind beam splitter (2) is parallel to the optical axis of moving three-dimensional angle mirror (8), and the parallel rays of said light source (1) is parallel to the optical axis of fixed three-dimensional angle mirror (7) through the reflection ray of beam splitter (2).
The face that is coated with beam splitting coating of said beam splitter (2) is positioned on the angular bisector of the angle that second level crossing (5) and first level crossing (6) constitute.
Said second level crossing (5) and first level crossing (6) constitute 45 ° of-135 ° of angles.
Said second level crossing (5) and first level crossing (6) constitute the angle of 90 ° or 60 °.
One end of one end of said first level crossing (6) and second level crossing (5) joins; The other end away from second level crossing (5) of said first level crossing (6) is positioned on the optical axis of moving three-dimensional angle mirror (8), and the other end away from first level crossing (6) of said second level crossing (5) is positioned on the optical axis of fixed three-dimensional angle mirror (7).
Right-angle prism (9) with metal-plated membrane replaces second level crossing (5) and first level crossing (6), and two right angle faces of said right-angle prism (9) are equivalent to first level crossing (6) and second level crossing (5) respectively.
Also include optics monomer structure (10), said optics monomer structure (10) includes shell structure and the said right-angle prism (9), said beam splitter (2) and the said compensating glass (3) that are fixed in the shell structure.
Said optics monomer structure (10) also comprises column (11) and mirror support structure (12); Said shell structure comprises top (13) and go to the bottom (14); Said right-angle prism (9) is fixed on an end of shell structure through last top (13) and go to the bottom (14); Said column (11) is fixed on the relative other end of shell structure through last top (13) and go to the bottom (14); Said beam splitter (2) and compensating glass (3) are fixed on the mirror support structure (12), and the face that is coated with beam splitting coating of angular bisector or said beam splitter (2) of angle that said mirror support structure (12) is fixed in the shell structure and the face that is coated with beam splitting coating of said beam splitter (2) is parallel to two right angle faces of right-angle prism (9) is positioned on the angular bisector of angle of two right angle faces of right-angle prism (9).
Said shell structure, column (11) and mirror support structure (12) adopt the close optical material of thermal expansivity with said beam splitter (2), and the close difference that is meant thermal expansivity of thermal expansivity wherein is less than 2.0 * 10
-6K
-1
Also comprise interferometer housing (15) and linear drive motor (16); Said optics monomer structure (10), fixed three-dimensional angle mirror (7), moving three-dimensional angle mirror (8) and linear drive motor (16) all are positioned at said interferometer housing (15) inside, and said linear drive motor (16) is used to drive moving three-dimensional angle mirror (8) along its optical axis direction move left and right.
Have incident light window (17) and interference light window (18) on the said interferometer housing (15); The parallel rays that wherein said light source sends gets into interferometer through incident light window (17) and projects on the beam splitter (2) of optics monomer structure (10); Interference light projects on the outer detecting device (4) of interferometer housing (15) through interference light window (18); On said incident light window (17) and the interference light window (18) the sealing window is installed; Said infrared spectrum interferometer also comprises HeNe laser instrument (19) or semiconductor laser and catoptron; Wherein the entrance port of HeNe laser instrument (19) or semiconductor laser probes into interferometer housing (15) inside, and the light path of HeNe laser instrument (19) or semiconductor laser is provided with one or several catoptrons light path and the projection that the parallel rays that laser-bounce becomes and said light source sends parallels got on the beam splitter (2) of optics monomer structure (10).
A kind of infrared spectrometer is characterized in that, this infrared spectrometer comprises above-mentioned infrared spectrum interferometer.
Technique effect:
The invention provides a kind of infrared spectrum interferometer; Include light source, beam splitter, compensating glass, two level crossings and two three-dimensional angle mirrors and detecting device; This special light path design make moving three-dimensional angle mirror no matter still the position translation on angular deflection and the summit of fixed three-dimensional angle mirror all can not influence the interference degree of interferometer, greatly improved the degree of stability of instrument.
The bisector of the angle that parallel first level crossing of the face that is coated with beam splitting coating of beam splitter and second level crossing constitute.Under the preferred situation; The face that is coated with beam splitting coating of beam splitter is positioned on the bisector of the angle that first level crossing and second level crossing constitute, and can obtain the clear aperature of maximum like this, and the bisector that departs from angle is far away more; Actual effectively clear aperature is more little, and instrument signal to noise ratio will be low more.
Consider the volume size of infrared spectrum interferometer, the angle between first level crossing and second level crossing will be between 45 °-135 °.Preferably, first level crossing and second level crossing are 60 degree or 90 degree angles, and angle is 90 ° infrared spectrum interferometer and has smaller volume, is of value to the light path of arranging infrared spectrometer; Angle is 60 ° infrared spectrum interferometer can the more efficient use beam splitter.
Further; Can adopt the right-angle prism of metal-plated membrane to replace first level crossing and second level crossing; Because two right angle faces of right-angle prism can accurately keep 90 degree; And with the synthetic device of two devices, avoided the relative position play between two devices, become a supporter of optics monomer structure simultaneously.
Preferably; Right-angle prism, beam splitter and compensating glass are fixed on the shell structure to form an optics monomer structure; Make the relative position between right-angle prism, beam splitter and the compensating glass obtain further fixing, make interferometer thoroughly break away from sensitivity vibrations.
The material of optics monomer structure will be selected the optical material close with the thermal expansivity of beam splitter, makes the interference degree of interferometer that obvious variation not take place to guarantee temperature variation.
The present invention also provides a kind of infrared spectrometer, because this infrared spectrometer has comprised above-mentioned infrared spectrum interferometer, therefore has same beneficial technical effects.
Description of drawings
Fig. 1 is the light path synoptic diagram of traditional biplane catoptron Michelson interferometer;
Fig. 2 is the light path synoptic diagram of improved pair of angle mirror catoptron Michelson interferometer;
Fig. 3 is a kind of light path synoptic diagram of infrared spectrum interferometer of the present invention;
Fig. 4 is another light path synoptic diagram of infrared spectrum interferometer of the present invention;
The optics monomer structure side view that Fig. 5 infrared spectrum interferometer of the present invention is used;
The optics monomer structure vertical view that Fig. 6 infrared spectrum interferometer of the present invention is used;
A kind of structural representation of Fig. 7 infrared spectrum interferometer of the present invention;
Fig. 8 is a kind of structural representation of infrared spectrometer of the present invention.
The Reference numeral example is following:
The 1-light source, 2-beam splitter, 3-compensating glass, 4-detecting device, 5-second level crossing, 6-first level crossing; 5 ', 6 '-level crossing, the fixed three-dimensional angle mirror of 7-, 8-moves three-dimensional angle mirror, 9-right-angle prism, 10-optics monomer structure, 11-column; 12-mirror support structure, the last top of 13-, 14-goes to the bottom, 15-interferometer housing, 16-linear drive motor, 17-incident light window; 18-interference light window, 19-HeNe laser instrument, 20-first catoptron, 21-second catoptron, 22-ellipsoid light source condenser, the parabolic collimating mirror of 23-; The parabolic focus lamp of 24-, 25-sample chamber, 26-specimen holder, 27-ellipsoid condenser, 28-diaphragm, 29-processor.
Embodiment
For the purpose, technical scheme and the advantage that make invention is clearer,, the present invention is further elaborated below in conjunction with accompanying drawing and embodiment.Should be appreciated that specific embodiment described herein only in order to explanation the present invention, and be not used in qualification the present invention.
As shown in Figure 3; A kind of light path synoptic diagram for infrared spectrum interferometer of the present invention; Fig. 3 also can be a kind of structural representation of infrared spectrum interferometer of the present invention simultaneously; It includes the light source 1 that can send parallel rays, is the beam splitter 2 that 135 degree angles are provided with parallel rays; On the transmitted light path of beam splitter 2, be disposed with compensating glass 3, can along the moving three-dimensional angle mirror 8 of himself optical axis direction move left and right, can be with moving the first fixing level crossing 6 that three-dimensional angle mirror 8 emission light reflect back along original optical path; On the reflected light path of beam splitter 2, be disposed with fixing fixed three-dimensional angle mirror 7 and the second fixing level crossing 5 that can emission light that decide three-dimensional angle mirror 7 be reflected back along original optical path, wherein compensating glass 3 is parallel to that beam splitter 2 is provided with and compensating glass 3 has identical thickness, employing identical materials with beam splitter 2.Wherein the incident parallel rays that sends of light source 1 is parallel with the optical axis of moving three-dimensional angle mirror 8; The optical axis of moving three-dimensional angle mirror 8 is vertical with first level crossing 6; And an end of first level crossing 6 is positioned on the optical axis of moving three-dimensional angle mirror 8; The parallel rays that light source 1 sends is parallel to the optical axis of fixed three-dimensional angle mirror 7 through the reflection ray of beam splitter 2; The optical axis of fixed three-dimensional angle mirror 7 is vertical with second level crossing 5, and an end of second level crossing 5 is positioned on the optical axis of fixed three-dimensional angle mirror 7, and the other end of the other end of first level crossing 6 and second level crossing 5 joins.The face that is coated with beam splitting coating of beam splitter 2 wherein is parallel to the angular bisector of the angle of second level crossing 5 and first level crossing, 6 formations; Preferably, the face that is coated with beam splitting coating of beam splitter 2 is positioned on the angular bisector of the angle that second level crossing 5 and first level crossing 6 constitute.
The course of work of the infrared spectrum interferometer in the present embodiment is following: (half sees through the parallel rays that sends from light source 1 through beam splitter 2; One half reflection) is divided into two bundles; After a branch of the seeing through,, reflexed on first level crossing 6 by three-dimensional angle mirror 8 through compensating glass 3; Returned along the original optical path reflection by first level crossing 6, the back reflexes to detecting device 4 by beam splitter 2 again; Another bundle by beam splitter 2 reflections, is reflexed to second level crossing 5 by fixed three-dimensional angle mirror 7 earlier then, is returned along the original optical path reflection by second level crossing 5, sees through beam splitter 2 to detecting device 4 again.Like this, on detecting device 4, obtained coherent light.When moving three-dimensional angle mirror 8 left zero point motion L, the generation optical path difference was x=4L.
Can find out: when fixed three-dimensional angle mirror 7 or moving three-dimensional angle mirror 8 rotated around the angle mirror summit, as long as guarantee light still in the field range of angle mirror, direction and position that light arrives detecting device 4 did not have any change, so can not influence the effect of interferometer yet.
With moving three-dimensional angle mirror 8 is that example is investigated the influence to the infrared spectrum interferometer of front and back and the upper and lower translation of three-dimensional angle mirror.When moving three-dimensional angle mirror 8 moves towards fixed three-dimensional angle mirror 7 along the optical axis direction perpendicular to three-dimensional angle mirror 8, still in the field range of moving three-dimensional angle mirror 8, just can not influence the effect of infrared spectrum interferometer as long as guarantee light.When moving three-dimensional angle mirror 8 moves toward opposite direction, will directly not turn back to beam splitter 2 near the sub-fraction light that moves three-dimensional angle mirror 8 optical axises through first level crossing 6, therefore this a part of light will no longer interfere phenomenon.Therefore total interference signal intensity has slight reduction, but this reduction and Fig. 2 middle infrared spectrum interferometer have essential difference because of translation causes the reduction of interference degree, and both reductions can differ the 1-2 one magnitude.And, reserve suitable surplus at the optical axis edge of moving three-dimensional angle mirror 8 as long as suitably dwindle the aperture of incident light, the minor shifts of moving three-dimensional angle mirror 8 just can not influence the interference effect of infrared spectrum interferometer.In like manner, when moving three-dimensional angle mirror 8 moves up and down, as long as guarantee that light still in the field range of moving three-dimensional angle mirror 8, just can not influence the effect of infrared spectrum interferometer.
To sum up; The skew of the slight position variation of moving three-dimensional angle mirror 8 and fixed three-dimensional angle mirror 7 and angle can not influence the interference degree of interferometer in the infrared spectrum interferometer of the present invention; Improve the degree of stability of instrument greatly, made interferometer possess the characteristic that anti-ambient vibration disturbs.But the relative position of second level crossing 5 and first level crossing 6 and beam splitter 2 is still quite big to the influence of interference degree.We have proposed a kind of optics monomer structure for this reason, make the infrared spectrum interferometer thoroughly break away from the sensitivity to vibrations, see embodiment 3.
In addition, the end away from second level crossing 5 of first level crossing 6 is positioned on the optical axis of moving three-dimensional angle mirror 8, and the end away from first level crossing 6 of second level crossing 5 is positioned on the optical axis of fixed three-dimensional angle mirror 7 simultaneously, and the purpose that is provided with like this is to make logical light face maximum.
In the present embodiment, the angle between first level crossing 6 and second level crossing 5 is 90 degree, and under the situation of this light path, the volume of infrared spectrum interferometer is less.But according to actual condition, the angle between first level crossing 6 and second level crossing 5 is in the time of 45 °-135 °, and the volume of infrared spectrum interferometer all can be accepted.Angle between first level crossing 6 and second level crossing 5 is smaller or equal to 45 ° or during more than or equal to 135 °, and the volume of corresponding infrared spectrum interferometer is bigger, not too is suitable for common infrared spectrometer, may on the infrared spectrometer of specific use, use.
Fig. 4 is another light path synoptic diagram of infrared spectrum interferometer of the present invention; Fig. 4 also can be another structural representation of infrared spectrum interferometer of the present invention simultaneously.The difference of present embodiment and embodiment 1 is that the angle between first level crossing 6 and second level crossing 5 is 60 degree, and at this moment, beam splitter 2 is 120 degree angles with the incident parallel rays and is provided with.Vertical second level crossing 5 of optical axis of fixed three-dimensional angle mirror 7 and the edge through second level crossing 5, vertical first level crossing 6 of optical axis of moving three-dimensional angle mirror 8 and the edge through first level crossing 6.
The structure that angle is 60 degree helps the utilization of beam splitter 2, can calculate under the situation of onesize beam splitter 2, during the structure of 60 degree bigger clear aperature is arranged, but other device layout of infrared spectrometer wants difficulty a bit, and the volume of instrument is understood bigger than normal.
The skew of the slight position variation of moving three-dimensional angle mirror 8 and fixed three-dimensional angle mirror 7 and angle can not influence the interference degree of interferometer in the infrared spectrum interferometer among the embodiment 1, with respect to prior art, has improved the degree of stability of infrared spectrum interferometer greatly.But the face that is coated with beam splitting coating of beam splitter 2 must be strict the angular bisector that is parallel to second level crossing 5 and first level crossing, 6 angles, error generally should be in 1-5 rad, the relative position variation to the influence of interference degree still quite greatly.For this reason; Present embodiment has proposed a kind of optics monomer structure; The relative position of first level crossing 6, second level crossing 5 and beam splitter 2 is fixed, made the infrared spectrum interferometer thoroughly break away from the sensitivity to vibrations, Fig. 5 and Fig. 6 are respectively the side view and the vertical view of this optics monomer structure 10.
As shown in the figure, optics monomer structure 10 includes shell structure and the right-angle prism 9 that is fixed on beam splitter 2 in the shell structure, compensating glass 3, metal-plated membrane, and the shell structure here 14 is made up of with going to the bottom last top 13.Wherein, Two right angle faces of the right-angle prism 9 of metal-plated membrane (being coated with aluminium film, golden film or silverskin usually) are equivalent to first level crossing 6 and second level crossing 5 respectively; Replace the purpose of two level crossings to be with a right-angle prism 9: to replace two optical device with an optical device; In the time of simplified structure, the most important thing is to help the relative position relation of fixing first level crossing 6, second level crossing 5 and beam splitter 2.Right-angle prism 9 is respectively perpendicular to last top 13 with go to the bottom 14 and be fixed on top 13 and go to the bottom between 14; Right-angle prism 9 is positioned at an end of shell structure; The other end in shell structure is fixed with a column 11; This column 11 is fixed on top 13 and go to the bottom between 14 equally, make go up top 13, go to the bottom 14, column 11 and right-angle prism 9 form a stable framed structure.Beam splitter 2 is fixed on earlier on the mirror support structure 12 with compensating glass 3; Being fixed on through mirror support structure 12 then makes beam splitter 2, compensating glass 3 and mirror support structure 12 embed in the framed structure in the shell structure; The face that is coated with beam splitting coating of guaranteeing beam splitter 2 simultaneously accurately is positioned on the angular bisector of two right angle faces of right-angle prism 9 (certainly, the angular bisector that the face that is coated with beam splitting coating of beam splitter 2 is parallel to two right angle faces of right-angle prism 9 gets final product).Like this, beam splitter 2, compensating glass 3, right-angle prism 9 (first level crossing 6 and second level crossing 5) have been formed an one-piece construction, to have guaranteed the relative position relation between the three, have further improved the degree of stability of infrared spectrum interferometer.
Further, the shell structure of optics monomer structure 10 and supporting construction (column 11 with mirror support structure 12) all adopt the close optical material of thermal expansivity with beam splitter 2, in the difference of thermal expansivity less than 2.0 * 10
-6(K
-1) time is advisable, obvious variation does not take place in the interference degree of infrared spectrum interferometer when guaranteeing temperature variation.
Be illustrated in figure 7 as a practical structures synoptic diagram of infrared spectrum interferometer of the present invention; Present embodiment has comprised the light channel structure of embodiment 1 and the optics monomer structure 10 of embodiment 3; Simultaneously because 2 pairs of humidity of beam splitter of interferometer are quite responsive; The interferometer housing 15 of a sealing has been shown in the present embodiment; Interferometer housing 15 offers incident light window 17 and interference light window 18, in establish the linear drive motor 16 that drives moving three-dimensional angle mirror 8, and the HeNe laser instrument 19 that is used for Electric Machine Control and sampled signal.Optics monomer structure 10 among the embodiment 3 and fixed three-dimensional angle mirror 7, moving three-dimensional angle mirror 8 are installed in interferometer housing 15 inside, and linear drive motor 16 and two catoptrons 20,21 also are installed in interferometer housing 15 inside simultaneously.Wherein, The light that light source sends gets in the interferometer housing 15 through incident light window 17 behind collimation and projects on the beam splitter 2 of optics monomer structure 10; The two-beam that returns beam splitter 2 through three-dimensional angle mirror peace face mirror penetrates interferometer housing 15 through interference light window 18, on incident light window 17 and the interference light window 18 the sealing window is installed all; Linear drive motor 16 is used to drive moving three-dimensional angle mirror 8 along its optical axis direction move left and right; The entrance port of HeNe laser instrument 19 probes into interferometer housing 15 inside; Get into HeNe laser in the interferometer housing 15 through the reflection of first catoptron 20 and second catoptron 21, parallel in the optics monomer structure 10 of going forward side by side with incident light and project on the beam splitter 2 from 17 entering of incident light window.
The light that light source sends projects on the beam splitter 2 of optics monomer structure 10 after getting into interferometer housings 15 through incident light window 17 behind the collimation; Beam splitter 2 is divided into two-beam: a branch of reflected light, a branch of transmitted light; Reflected light reflexes on the right angle face of right-angle prism 9 through fixed three-dimensional angle mirror 7; Its reflected back is decided on the three-dimensional angle mirror 7 along original optical path by the right angle face of right-angle prism 9, last reflected back beam splitter 2 backs also see through on the detecting device 4 of beam splitter 2 outside interference light window 18 projects interferometer housing 15 again; The transmitted light that beam splitter 2 is divided into reflexes on another right angle face of right-angle prism 9 through compensating glass 3, moving three-dimensional angle mirror 8; On its reflection being reversed solid angle mirror 8 by another right angle face of right-angle prism 9 along original optical path again; After after compensating glass 3 returns beam splitter 2, project through beam splitter 2 reflections and through interference light window 18 on the detecting device 4 outside the interferometer housing 15.Two bundles interfere from the light beam directed toward detector 4 that interference light window 18 penetrates; In said process; Linear drive motor 16 constantly drives moving three-dimensional angle mirror 8 to-and-fro movements along its optical axis direction; Changing the optical path difference of two light beam processes, thereby form interferogram, interferogram is done inverse fourier transform after detecting device 4 detects can obtain spectrogram.The monochromatic optical wave that the HeNe laser instrument 19 here produces; Through the laggard beam splitter 2 of going into optics monomer structure 10 of first catoptron 20 and second catoptron 21; And produce two light beams and interfere through above-mentioned same process, be mainly used in the control of linear drive motor 16, the demarcation and the sampling of displacement through HeNe laser instrument 19 resulting interferograms.
Except that HeNe laser instrument 19, all devices all are encapsulated in the interferometer housing 15 of sealing, make it break away from the sensitivity to humidity.
The HeNe laser instrument 19 here can substitute with semiconductor laser, but sees from aspect of performance, and HeNe laser instrument 19 is more stable than semiconductor laser.
As shown in Figure 8, be a kind of structural representation of the infrared spectrometer that includes the infrared spectrum interferometer among the embodiment 4.The infrared light that infrared light supply 1 sends; Converge to aperture diaphragm 28 through ellipsoid light source condenser 22, aperture diaphragm 28 keeps the suitably hot spot of size according to the needs of measure spectrum resolution; The infrared light that sees through diaphragm 28 gets in the infrared spectrum interferometer described in the embodiment 4 behind parabolic collimating mirror 23 collimations; Produced interference by the infrared spectrum interferometer, and by moving three-dimensional angle mirror 8 modulation of infrared spectrum interferometer, the light after the interference modulations focuses on being placed on the sample on the specimen holder 26 in the sample chamber 25 through parabolic focus lamp 24; And through sample; Carry the absorption spectrum information of sample, the infrared light that sees through sample focuses on the detecting device 4 through ellipsoid condenser 27, is detected interferogram and is sent to processor 29 by detecting device 4; Processor 29 carries out the mathematics manipulation of inverse fourier transform, and interferogram is reduced into spectrogram.
Claims (12)
1. infrared spectrum interferometer; It is characterized in that; Comprise the light source (1) that sends parallel rays; The working direction of said parallel rays is provided with beam splitter (2), on the transmitted light path of beam splitter (2), is disposed with compensating glass (3), the moving three-dimensional angle mirror (8) that can move along its optical axis direction and fixing first level crossing (6), and transmitted light sees through said compensating glass (3) and reflexes on first level crossing (6) through moving three-dimensional angle mirror (8); Said first level crossing (6) reflects incident light to reverse solid angle mirror (8) and further see through compensating glass (3) and returns beam splitter (2) along former road, beam splitter (2) reflexes to detecting device (4) with it; On the reflected light path of beam splitter (2), be disposed with fixing fixed three-dimensional angle mirror (7) and fixing second level crossing (5); Folded light beam reflexes on second level crossing (5) through fixed three-dimensional angle mirror (7), and said second level crossing (5) is projected to detecting device (4) with incident ray along former road reflected back beam splitter (2) and through beam splitter (2); The face that is coated with beam splitting coating of beam splitter wherein (2) is parallel to the angular bisector of the angle of said second level crossing (5) and first level crossing (6) formation; Second level crossing (5) is perpendicular to the optical axis of fixed three-dimensional angle mirror (7); First level crossing (6) is perpendicular to the optical axis of moving three-dimensional angle mirror (8); Said compensating glass (3) is parallel to said beam splitter (2) setting; And with the same material of said beam splitter (2), equal thickness, the transmitted light of the parallel rays of said light source (1) behind beam splitter (2) is parallel to the optical axis of moving three-dimensional angle mirror (8), and the parallel rays of said light source (1) is parallel to the optical axis of fixed three-dimensional angle mirror (7) through the reflection ray of beam splitter (2).
2. infrared spectrum interferometer according to claim 1 is characterized in that, the face that is coated with beam splitting coating of said beam splitter (2) is positioned on the angular bisector of the angle that second level crossing (5) and first level crossing (6) constitute.
3. infrared spectrum interferometer according to claim 1 and 2 is characterized in that, said second level crossing (5) and first level crossing (6) constitute 45 ° of-135 ° of angles.
4. infrared spectrum interferometer according to claim 3 is characterized in that, said second level crossing (5) and first level crossing (6) constitute the angle of 90 ° or 60 °.
5. according to claim 3 or 4 described infrared spectrum interferometers; It is characterized in that; One end of one end of said first level crossing (6) and second level crossing (5) joins; The other end away from second level crossing (5) of said first level crossing (6) is positioned on the optical axis of moving three-dimensional angle mirror (8), and the other end away from first level crossing (6) of said second level crossing (5) is positioned on the optical axis of fixed three-dimensional angle mirror (7).
6. infrared spectrum interferometer according to claim 5; It is characterized in that; Right-angle prism (9) with metal-plated membrane replaces second level crossing (5) and first level crossing (6), and two right angle faces of said right-angle prism (9) are equivalent to first level crossing (6) and second level crossing (5) respectively.
7. infrared spectrum interferometer according to claim 6; It is characterized in that; Also include optics monomer structure (10), said optics monomer structure (10) includes shell structure and the said right-angle prism (9), said beam splitter (2) and the said compensating glass (3) that are fixed in the shell structure.
8. infrared spectrum interferometer according to claim 7; It is characterized in that; Said optics monomer structure (10) also comprises column (11) and mirror support structure (12); Said shell structure comprises top (13) and go to the bottom (14); Said right-angle prism (9) is fixed on an end of shell structure through last top (13) and go to the bottom (14); Said column (11) is fixed on the relative other end of shell structure through last top (13) and go to the bottom (14), and said beam splitter (2) and compensating glass (3) are fixed on the mirror support structure (12), and the face that is coated with beam splitting coating of angular bisector or said beam splitter (2) of angle that said mirror support structure (12) is fixed in the shell structure and the face that is coated with beam splitting coating of said beam splitter (2) is parallel to two right angle faces of right-angle prism (9) is positioned on the angular bisector of angle of two right angle faces of right-angle prism (9).
9. infrared spectrum interferometer according to claim 8; It is characterized in that; Said shell structure, column (11) and mirror support structure (12) adopt the close optical material of thermal expansivity with said beam splitter (2), and the close difference that is meant thermal expansivity of thermal expansivity wherein is less than 2.0 * 10
-6K
-1
10. according to the described infrared spectrum interferometer of one of claim 7 to 9; It is characterized in that; Also comprise interferometer housing (15) and linear drive motor (16); Said optics monomer structure (10), fixed three-dimensional angle mirror (7), moving three-dimensional angle mirror (8) and linear drive motor (16) all are positioned at said interferometer housing (15) inside, and said linear drive motor (16) is used to drive moving three-dimensional angle mirror (8) along its optical axis direction move left and right.
11. infrared spectrum interferometer according to claim 10; It is characterized in that; Have incident light window (17) and interference light window (18) on the said interferometer housing (15); The parallel rays that wherein said light source sends gets into interferometer through incident light window (17) and projects on the beam splitter (2) of optics monomer structure (10); Interference light projects on the outer detecting device (4) of interferometer housing (15) through interference light window (18); On said incident light window (17) and the interference light window (18) the sealing window is installed; Said infrared spectrum interferometer also comprises HeNe laser instrument (19) or semiconductor laser and catoptron, and wherein the entrance port of HeNe laser instrument (19) or semiconductor laser probes into interferometer housing (15) inside, and the light path of HeNe laser instrument (19) or semiconductor laser is provided with one or several catoptrons light path and the projection that the parallel rays that laser-bounce becomes and said light source sends parallels got on the beam splitter (2) of optics monomer structure (10).
12. an infrared spectrometer is characterized in that, this infrared spectrometer comprises the described infrared spectrum interferometer of one of said claim 1-11.
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104704333A (en) * | 2012-10-05 | 2015-06-10 | 国立大学法人香川大学 | Spectral characteristic measurement device |
| CN104713649A (en) * | 2013-12-13 | 2015-06-17 | 天津同阳科技发展有限公司 | Interferometer used for spectrograph |
| US9482576B2 (en) | 2012-10-05 | 2016-11-01 | National University Corporation Kagawa University | Spectroscopic measurement device having transmissive optical member with a sloped face |
| CN107300383A (en) * | 2017-07-31 | 2017-10-27 | 天津大学 | A kind of laser optical path coupled system based on transflection prism |
| CN112067570A (en) * | 2020-10-09 | 2020-12-11 | 南京昆磊泓锐仪器技术有限公司 | Fourier transform infrared spectrum system and detection method |
| CN113237547A (en) * | 2021-04-26 | 2021-08-10 | 中国科学院合肥物质科学研究院 | Single-swing-arm hollow angle moving mirror swinging type interferometer and driving method |
| CN113390820A (en) * | 2021-05-17 | 2021-09-14 | 西派特（北京）科技有限公司 | Multi-source spectrum light fuel oil quality detection system |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000074617A (en) * | 1998-09-03 | 2000-03-14 | Tokyo Seimitsu Co Ltd | Laser interferometer |
| KR20070059402A (en) * | 2005-12-06 | 2007-06-12 | 한국표준과학연구원 | Fourier transform infrared spectrometer using one side coated beam splitter |
| CN202229843U (en) * | 2011-09-23 | 2012-05-23 | 北京华夏科创仪器技术有限公司 | Infrared spectrum interferometer and infrared spectrometer employing the interferometer |
-
2011
- 2011-09-23 CN CN201110285531.6A patent/CN102359818B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000074617A (en) * | 1998-09-03 | 2000-03-14 | Tokyo Seimitsu Co Ltd | Laser interferometer |
| KR20070059402A (en) * | 2005-12-06 | 2007-06-12 | 한국표준과학연구원 | Fourier transform infrared spectrometer using one side coated beam splitter |
| CN202229843U (en) * | 2011-09-23 | 2012-05-23 | 北京华夏科创仪器技术有限公司 | Infrared spectrum interferometer and infrared spectrometer employing the interferometer |
Non-Patent Citations (1)
| Title |
|---|
| 高学军等: "WQF-510型付立叶变换红外光谱仪", 《光谱仪器与分析》 * |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104704333A (en) * | 2012-10-05 | 2015-06-10 | 国立大学法人香川大学 | Spectral characteristic measurement device |
| CN104833634A (en) * | 2012-10-05 | 2015-08-12 | 国立大学法人香川大学 | Spectral characteristic measurement device |
| US9482576B2 (en) | 2012-10-05 | 2016-11-01 | National University Corporation Kagawa University | Spectroscopic measurement device having transmissive optical member with a sloped face |
| US9488524B2 (en) | 2012-10-05 | 2016-11-08 | National University Corporation Kagawa University | Spectroscopic measurement device having diffraction grating at conjugate plane of relay lens |
| CN104713649A (en) * | 2013-12-13 | 2015-06-17 | 天津同阳科技发展有限公司 | Interferometer used for spectrograph |
| CN107300383A (en) * | 2017-07-31 | 2017-10-27 | 天津大学 | A kind of laser optical path coupled system based on transflection prism |
| CN107300383B (en) * | 2017-07-31 | 2023-05-30 | 天津大学 | Laser optical path coupling system based on transflective prism |
| CN112067570A (en) * | 2020-10-09 | 2020-12-11 | 南京昆磊泓锐仪器技术有限公司 | Fourier transform infrared spectrum system and detection method |
| CN113237547A (en) * | 2021-04-26 | 2021-08-10 | 中国科学院合肥物质科学研究院 | Single-swing-arm hollow angle moving mirror swinging type interferometer and driving method |
| CN113390820A (en) * | 2021-05-17 | 2021-09-14 | 西派特（北京）科技有限公司 | Multi-source spectrum light fuel oil quality detection system |
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