CN100491975C - Portable infrared spectrograph - Google Patents

Portable infrared spectrograph Download PDF

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Publication number
CN100491975C
CN100491975C CN 200610018607 CN200610018607A CN100491975C CN 100491975 C CN100491975 C CN 100491975C CN 200610018607 CN200610018607 CN 200610018607 CN 200610018607 A CN200610018607 A CN 200610018607A CN 100491975 C CN100491975 C CN 100491975C
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China
Prior art keywords
mirror
motor
interferometer
infrared
reflector
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Expired - Fee Related
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CN 200610018607
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CN1818619A (en
Inventor
雷俊锋
曾立波
许贤泽
龚丹
童爱清
刘茜
尹邦胜
杨琨
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Wuhan University WHU
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Wuhan University WHU
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Abstract

A portable infrared spectrograph consists of light source, infrared reflector, shutter, laser, laser reflector, motor, interferometer, laser detector, sample pool and infrared detector .It is featured as forming active mirror of interferometer by angle mirror driven by motor and planar reflector on interferometer, connecting angle mirror to driving motor and setting said planar reflector to be vertical to axle of motor and using linear motor as said motor.

Description

Portable infrared spectrograph
Technical field
The present invention relates to a kind of portable infrared spectrograph, belong to the spectral measurement methods field.
Background technology
The functional group of the absorption that infrared spectrum produces mainly is positioned at 2.5 μ m-25 mu m wavebands.The infrared spectrum of the many materials of nature has tangible specificity, therefore the functional group to the infrared spectrum (2.5 μ m-25 mu m waveband) of material differentiates, the qualitative and quantitative analysis future is very big, be the current popular domain of research both at home and abroad, in mineralogical analysis, drug inspection, oil check and environment measuring, all obtain certain application.
Retrieval finds that the patent No. is 200420025072.3, and the applying date is the spectrometer that the utility model patent " portable near infrared spectrometer " on March 2nd, 2004 discloses a kind of raster pattern beam split mode.But raster pattern beam split mode exists a lot of fatal weakness, makes our spectral measurement be very restricted: 1) can only measure very narrow wavelength band in the interbody spacer at a time; 2) sweep velocity is slow, should not measure the process of Fast transforms; 3) optics complexity, movable part easy to wear is many; 4) infrared radiation of sample self can be received by detecting device.
The nearest development of this quasi-instrument is a Fourier transformation infrared spectrometer in the world, main Michelson (michelson) interferometer that adopts classics, such as, Tensor series of the Nexus series of Buddhist nun's high-tensile strength (Nicolet) company, Brooker (Bruker) company or the like.Moving, the horizontal glass of their Michelson (michelson) interferometer or the level crossing that all adopts, all adopt angle mirror, for these two kinds of interferometers, all add the device of dynamic collimation behind or added dynamic angle mirror position alignment device in the behind of an angle mirror at the horizontal glass of level crossing, so just strengthened the weight and volume of instrument.Their common characteristic is exactly that volume and weight is all bigger, very strict to the requirement of working environment.Certainly the precision of instrument also is very high, and this has just caused the on the high side of instrument, has so just limited the range of application of this quasi-instrument.
Domestic, the research and development of Fourier transformation infrared spectrometer was done by University Of Tianjin, and they also are the Michelson interferometers of the traditional classical of employing, but his spectrum range of research is visible light wave range (10000-25000cm -1), spectral resolution also has only 16cm -1, the usable range of this quasi-instrument is just reduced much so.Also not seeing the product that they produced emerges.
Summary of the invention
The objective of the invention is to: at the shortcoming of above prior art existence, it is reasonable, feasible to propose a kind of light channel structure, anufacturability is good, adopt being used in combination of level crossing and angle mirror, the stability of light path is strengthened, usable range is wide, light channel structure is simplified, compactness, not only can guarantee high-quality spectral analysis, draw the sample spectrogram fast, and dwindle the volume of spectrometer greatly, in light weight, being suitable for field condition sample analysis and detection, is portable Fourier infrared spectrograph, for the article detection of open air is provided convenience.
The technical scheme of portable infrared spectrograph of the present invention is: it comprises light source, ir reflector, diaphragm, laser instrument, laser mirror, motor, interferometer, laser detector, sample cell, the infrared detector that is connected with treatment circuit; The index glass of interferometer is made up of border, motor-driven angle and the plane mirror above the interferometer, and this angle mirror and motor link; The plane mirror of index glass that constitutes interferometer with angle mirror is vertical mutually with the axis of motor; Described motor is linear electric motors.
Described interferometer comprises beam splitter and compensating plate, two plane mirrors; Wherein, two plane mirrors are vertical mutually.
The angle of described beam splitter and two plane mirrors is 45 degree.
The described optical convergence that will disperse of being mainly used in has two to be ellipsoidal mirror to any ir reflector; Be mainly used in the optical alignment that to disperse and be directional light or have two to be paraboloidal mirror the ir reflector that directional light converges to a bit.
The described catoptron that is no color differnece for the ir reflector of paraboloidal mirror that reaches for ellipsoidal mirror.
Described laser instrument is He-Ne (He-Ne) laser instrument, the reference signal that its interference signal is gathered as the control signal and the infrared spectrum of motor movement.
The light path of described laser instrument is consistent with infrared light path.
Described diaphragm is the variable unthreaded hole of pore size on the light path.
Description of drawings
Fig. 1 is the structural representation of the specific embodiment of portable infrared spectrograph.
Light path synoptic diagram when Fig. 2 does not tilt for angle mirror.
Light path synoptic diagram when Fig. 3 is the angle mirror run-off the straight.
Light path synoptic diagram when Fig. 4 does not tilt for level crossing.
Light path synoptic diagram when Fig. 5 is the level crossing run-off the straight.
Fig. 6 is light path synoptic diagram when two angle mirror positions are aimed at fully in two angle mirrors combinations.
Fig. 7 be in two angle mirrors combinations angle mirror generation translation to the synoptic diagram that influences of light.
Fig. 8 be in the combination of single angle mirror and level crossing the angle mirror translation to the synoptic diagram that influences of light.
In the accompanying drawing: 1. light source, 2,16,4,14. ir reflector, 3. diaphragms, 5. laser instrument, 6. laser mirror, 7. motor, 8. border, angle, 9,12. plane mirror, 10. interferometers, 11. beam splitter, 13. laser detectors, 15. sample cells, 17. infrared detector, 18. compensating plates, 19. power supplys, 20. electronic circuit, 21. robot calculator.
Embodiment
Below in conjunction with embodiment and accompanying drawing the present invention is described as follows:
Shown in Fig. 1-8, present embodiment is a kind of open-air portable infrared spectrograph that article, for example liquid or solid or gas quality testing are surveyed that is used for, and belongs to Fourier transformation infrared spectrometer.It has a light source 1, ir reflector 2,16,4,14, diaphragm 3, laser instrument 5, laser mirror 6, motor 7, interferometer 10, laser detector 13, sample cell 15, the infrared detector 17 that is connected with treatment circuit; The index glass of interferometer 10 is made up of with the plane mirror 9 above the interferometer 10 border, angle 8 that motor 7 drives, and this angle mirror 8 links with drive motor 7, and described motor 7 is linear electric motors, and angle mirror 8 is the dihedral catoptron; The plane mirror 9 that constitutes interferometer 10 index glass with angle mirror 8 is vertical mutually with the axis of motor 7, and the sideline of an end of this plane mirror 9 is on the extended line of motor 7 axis; Infrared detector 17 is settled along light path; Interferometer 10 has beam splitter 11 and compensating plate 18, plane mirror 9,12, and wherein, plane mirror 9 is vertical mutually with plane plane mirror 12; The angle of beam splitter 11 and two plane mirrors 9,12 is 45 degree; Ir reflector 2,16 is an ellipsoidal mirror, is mainly used in the optical convergence that will disperse to a bit, and ir reflector 4,14 is a paraboloidal mirror, is mainly used in the optical alignment that will disperse and is directional light or directional light is converged to a bit; Ir reflector 2,16,4,14 is the catoptron of no color differnece; Laser instrument 5 is He-Ne (He-Ne) laser instrument, and its interference signal is the control signal of motor 7 motions and the reference signal of infrared collection; The light path of laser instrument 5 is consistent with infrared light path; Diaphragm 3 is variable unthreaded holes of pore size on the light path; The precision that laser instrument 5 control samplings obtain infrared spectrum is 0.1cm -1To 0.8cm -1, be generally 0.5cm -1Described portable infrared spectrograph also has power supply 19; In addition, electronic circuit 20 and computing machine 21 UNICOMs.
Light of the present invention in the transmission of light path is: during use, sample is placed in the sample cell 15, open instrument power source 19, the infrared beam that light source 1 sends focuses on diaphragm 3 through ir reflector 2, after ir reflector 4 collimations are for directional light, enter interferometer 10 again, Infrared becomes interference light through the horizontal glass 12 of interferometer 10 with index glass (angle mirror 8 that motor 7 drives and the combination of plane mirror 9) interference between the two, interference light arrives ir reflector 14 and focuses on the sample that sees through in the sample cell 15, arrive ir reflector 16, focus at last on the infrared detector 17, obtain electric signal through the interference signal of sample, be transported to analyzing and processing circuit 20 and computing machine 21 at last, carry out just can obtaining behind the Fourier transform infrared transmission (absorption) spectrum of sample by computing machine.
Structure, principle of work and technique effect, advantage to portable infrared spectrograph of the present invention is described further as follows in conjunction with the embodiments:
Shown in Fig. 1-8: Fig. 1 is the structural representation of the specific embodiment of portable infrared spectrograph; Light path synoptic diagram when Fig. 2 does not tilt for angle mirror; Light path synoptic diagram when Fig. 3 is the angle mirror run-off the straight; Light path synoptic diagram when Fig. 4 does not tilt for level crossing; Light path synoptic diagram when Fig. 5 is the level crossing run-off the straight; Fig. 6 is light path synoptic diagram when two angle mirror positions are aimed at fully in two angle mirrors combinations; Fig. 7 be in two angle mirrors combinations angle mirror generation translation to the synoptic diagram that influences of light; Fig. 8 be in the combination of single angle mirror and level crossing the angle mirror translation to the synoptic diagram that influences of light.
1, the present invention does not have beam splitting system, be to use the interference light of having modulated through interferometer during measurement, can once obtain full wave spectral information, have and cover series of advantages such as wide waveband, high flux, low noise, measuring speed be fast, it has expanded the infrared spectroscopic study field, has developed many measuring techniques.
2, the interferometer of the most Fourier infrared spectrograph of prior art, all adopt classical Michelson interferometer, its index glass and horizontal glass all are level crossings, index glass of the present invention is made up of angle mirror 8 and plane mirror 9, adopted advanced angle mirror technology, advantage is the exactly parallel retrodirective reflection characteristic of angle mirror, has significantly reduced the processing request of index glass driving and guide rail support system.
3, ir reflector 2,16,4,14 of the present invention all adopts the non-spherical reflector of no color differnece, its advantage is parallel beam or the convergent beam that it can produce high-quality no central obscuration with simple face shape, no color differnece all has one to two aberrationless ideal point.
4, diaphragm 3 is variable unthreaded holes of pore size on the light path among the present invention, strengthens the aperture of the diaphragm, and luminous flux strengthens, and helps improving detection sensitivity; Dwindle the aperture of the diaphragm, luminous flux reduces, but can keep off some parasitic lights, improves the quality of output light, helps improving resolution.
5, the interferometer among the present invention utilizes helium-neon laser to provide accuracy rating to be 0.1cm -1To 0.8cm -1Measurement, be generally 0.5cm -1High-acruracy survey.The interferogram of actual measurement needs with the method for uniformly-spaced getting point sampling, the digitizing of advanced row, just used helium-neon laser this moment, the light path of laser instrument is consistent with infrared light path, and the interference signal that laser detector 13 obtains is the interferogram of a cosine, during test sample, with this cosine interferogram monitoring scanning survey overall process, whenever the cosine wave (CW) zero crossing, can sample to the sample interferogram by a trigger, obtain the sample interferogram.Laser also is used for monitoring index glass translational speed and decision index glass displacement in addition.
6, moving, the horizontal glass of prior art all adopt the Fourier transformation infrared spectrometer of level crossing, and when sampling was moved in index glass scanning in the measuring process, the unavoidable swing that exists to a certain degree made reflection ray depart from original direction.As the incident of incident light out of plumb, perhaps two level crossings are not orthogonal, will can not get the reflected light parallel with incident light, thereby influence the spectral quality of instrument.Extraneous vibration also can produce each catoptron and disturb in addition, and for this reason, classical interferometer must very be adjusted subtly, also will keep index glass accurately perpendicular to horizontal glass when mobile, could obtain spectrum well.The Fourier transformation infrared spectrometer moving, that horizontal glass all adopts angle mirror, though the angular deflection of index glass can not exert an influence to interference in the measuring process, the offset meeting on angle mirror summit causes the fluctuating of interference signal.Though its reason is not to be offset through the light direction that angle mirror returns, but be that symmetrical translation (see figure 7) has taken place origin position in fact all with the angle mirror summit, for this reason, this type of interferometer must very be adjusted the angle mirror summit in real time, guarantee strict aligning the in angle mirror summit on two light paths, could obtain spectrum well.In order to solve these interference problems, on a light path, replace one of them level crossing (index glass) among the present invention with angle mirror 8 and 9 combinations of the plane mirror above the interferometer 10.Plane mirror 12 is vertical with plane mirror 9, beam splitter 11 and two level crossings are at 45, the light beam that beam splitter 11 is told reflexes to plane mirror 9 through angle mirror 8, vertically return again by plane mirror 9 and to turn back to beam splitter 11 through angle mirror, it should be noted that the not only not deflection of angle of light beam of getting back to beam splitter 11, and the position does not change (see figure 8) yet.As long as the summit of angle mirror 8 is in the light beam district, the minor shifts that swing and angle mirror 8 summits take place when angle mirror 8 (index glass) can not influence the light beam of participating in interference.After adopting angle mirror 8 and plane mirror 9 combinations, the antijamming capability of this instrument strengthens, and repeatability improves greatly, therefore to the permissible error value of the design of instrument and assembling can obviously relax, also very favourable to the manufacturing and the packaging technology of instrument.
The method of operating of portable infrared spectrograph of the present invention is: during use, sample is placed in the sample cell 15, the infrared beam that light source 1 sends is through ir reflector 2 optically focused, behind ir reflector 4 collimations, enter interferometer 10 again with directional light, Infrared is through the index glass interference between the two of horizontal glass 12 with angle mirror 8 with plane mirror 9 compositions of motor 7 drivings of interferometer 10, and interference light arrives ir reflector 14.Interference light sees through the sample in the sample cell 15, ir reflector 16, focus at last on the infrared detector 17, obtain electric signal through the interference signal of sample, be transported to analyzing and processing circuit and computing machine at last, by just obtaining infrared transmission (absorption) spectrum of sample behind the Fourier transform.

Claims (7)

1. portable infrared spectrograph, it comprises light source (1), ir reflector (2), (16), (4), (14), diaphragm (3), laser instrument (5), laser mirror (6), motor (7), interferometer (10), laser detector (13), sample cell (15), the infrared detector that is connected with treatment circuit (17); It is characterized in that: the index glass of interferometer (10) is made up of with the plane mirror (9) above the interferometer (10) the angle mirror (8) that motor (7) drives, and this angle mirror (8) links with motor (7); The plane mirror (9) of index glass that constitutes interferometer (10) with angle mirror (8) is vertical mutually with the axis of motor (7); Described motor (7) is linear electric motors.
2. according to the described portable infrared spectrograph of claim 1, it is characterized in that: interferometer (10) comprises beam splitter (11) and compensating plate (18), two plane mirrors (9), (12); Wherein, two plane mirrors (9), (12) are vertical mutually.
3. according to the described portable infrared spectrograph of claim 1, it is characterized in that: ir reflector has two (2), (16) to be ellipsoidal mirror, is mainly used in the optical convergence that will disperse and arrives a bit; Ir reflector has two (4), (14) to be paraboloidal mirror, is mainly used in the optical alignment that will disperse and is directional light or directional light is converged to a bit.
4. according to the described portable infrared spectrograph of claim 3, it is characterized in that: be catoptron ellipsoidal mirror and be no color differnece for the ir reflector of paraboloidal mirror (2), (16), (4), (14).
5. according to claim 1 or 2 or 3 or 4 described portable infrared spectrographs, it is characterized in that: laser instrument (5) is He-Ne (He-Ne) laser instrument, and its interference signal is as the control signal of motor (7) motion and the reference signal of infrared collection.
6. according to claim 1 or 2 or 3 or 4 described portable infrared spectrographs, it is characterized in that: the light path of laser instrument (5) is consistent with infrared light path.
7. according to claim 1 or 2 or 3 or 4 described portable infrared spectrographs, it is characterized in that: diaphragm (3) is the variable unthreaded hole of pore size on the light path.
CN 200610018607 2006-03-22 2006-03-22 Portable infrared spectrograph Expired - Fee Related CN100491975C (en)

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Families Citing this family (9)

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Publication number Priority date Publication date Assignee Title
CN101694455B (en) * 2009-09-29 2012-01-11 武汉理工大学 Horizontal sample frame of Fourier infrared spectrograph
CN103344335B (en) * 2013-06-18 2014-04-02 武汉大学 Intermediate infrared spectrograph based on MEMS detector
CN103344601B (en) * 2013-07-02 2015-08-19 哈尔滨工业大学 Based on the translucent material absorption coefficient measuring method of Fourier turn infrared instrument
US11300773B2 (en) * 2014-09-29 2022-04-12 Agilent Technologies, Inc. Mid-infrared scanning system
CN105181622A (en) * 2015-08-31 2015-12-23 中国科学技术大学先进技术研究院 Mid-infrared absorption type gas concentration detection apparatus and mid-infrared absorption type gas concentration detection method
CN107255623A (en) * 2017-06-15 2017-10-17 中国科学院合肥物质科学研究院 A kind of portable multicomponent gas infrared spectrum detecting system
CN107490554A (en) * 2017-09-29 2017-12-19 贵州国台酒业有限公司 A kind of liquor determination device
CN109696245A (en) * 2018-12-28 2019-04-30 北京北分瑞利分析仪器(集团)有限责任公司 A kind of angle mirror type Michelson's interferometer
CN113295642A (en) * 2021-05-17 2021-08-24 中国科学院合肥物质科学研究院 Mid-infrared spectrum measurement system and method for ammonia molecule absorption line parameters

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光谱仪动镜倾斜误差分析及其动态校正技术研究. 尹邦胜,曾立波,雷俊锋,杨琨.光学仪器,第28卷第1期. 2006
光谱仪动镜倾斜误差分析及其动态校正技术研究. 尹邦胜,曾立波,雷俊锋,杨琨.光学仪器,第28卷第1期. 2006 *
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